CN103261475B - 用于钻头涂覆的支架 - Google Patents

用于钻头涂覆的支架 Download PDF

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Publication number
CN103261475B
CN103261475B CN201180063281.XA CN201180063281A CN103261475B CN 103261475 B CN103261475 B CN 103261475B CN 201180063281 A CN201180063281 A CN 201180063281A CN 103261475 B CN103261475 B CN 103261475B
Authority
CN
China
Prior art keywords
wall
support
drill
perforation
cork drill
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201180063281.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN103261475A (zh
Inventor
C.海内-坎普肯斯
M.霍赫施瓦策尔
M.迪茨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Surface Solutions AG Pfaeffikon
Original Assignee
Oerlikon Trading AG Truebbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Trading AG Truebbach filed Critical Oerlikon Trading AG Truebbach
Publication of CN103261475A publication Critical patent/CN103261475A/zh
Application granted granted Critical
Publication of CN103261475B publication Critical patent/CN103261475B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04Coating on selected surface areas, e.g. using masks
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00Supports, screens or the like for the charge within the furnace
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D5/00Supports, screens or the like for the charge within the furnace
    • F27D5/005Supports specially adapted for holding elongated articles in an upright position, e.g. sparking plugs
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006Details, accessories not peculiar to any of the following furnaces
    • C21D9/0025Supports; Baskets; Containers; Covers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Drilling Tools (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
CN201180063281.XA 2010-12-28 2011-12-15 用于钻头涂覆的支架 Active CN103261475B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102010056157A DE102010056157A1 (de) 2010-12-28 2010-12-28 Halterung für Bohrkopfbeschichtung
DE102010056157.6 2010-12-28
PCT/EP2011/006321 WO2012089306A1 (de) 2010-12-28 2011-12-15 Halterung für bohrkopfbeschichtung

Publications (2)

Publication Number Publication Date
CN103261475A CN103261475A (zh) 2013-08-21
CN103261475B true CN103261475B (zh) 2015-12-09

Family

ID=45418608

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180063281.XA Active CN103261475B (zh) 2010-12-28 2011-12-15 用于钻头涂覆的支架

Country Status (11)

Country Link
US (1) US9869023B2 (cg-RX-API-DMAC7.html)
EP (1) EP2659023B1 (cg-RX-API-DMAC7.html)
JP (1) JP6027543B2 (cg-RX-API-DMAC7.html)
KR (2) KR20130132868A (cg-RX-API-DMAC7.html)
CN (1) CN103261475B (cg-RX-API-DMAC7.html)
BR (1) BR112013012779B1 (cg-RX-API-DMAC7.html)
CA (1) CA2824452C (cg-RX-API-DMAC7.html)
DE (1) DE102010056157A1 (cg-RX-API-DMAC7.html)
ES (1) ES2627812T3 (cg-RX-API-DMAC7.html)
PL (1) PL2659023T3 (cg-RX-API-DMAC7.html)
WO (1) WO2012089306A1 (cg-RX-API-DMAC7.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013007454A1 (de) * 2013-05-02 2014-11-06 Oerlikon Trading Ag, Trübbach Vielseitige Haltevorrichtung zur Oberflächenbehandlung von stangenförmigen Substraten
AR101884A1 (es) 2014-09-17 2017-01-18 Oerlikon Surface Solutions Ag Trubbach Soporte para tratar cuchillas
DE102015105169A1 (de) * 2015-04-02 2016-10-06 Cemecon Ag Chargierung von Werkstücken in einer Beschichtungsanlage
PL3583243T3 (pl) * 2017-02-16 2023-03-06 Oerlikon Surface Solutions Ag, Pfäffikon Mocowanie narzędziowe dla wielu etapów procesu
CA3095064A1 (en) * 2018-03-29 2019-10-03 Oerlikon Surface Solutions Ag, Pfaffikon Device and method for selective vapor coating of a substrate
CN116641031A (zh) * 2023-06-05 2023-08-25 武汉职业技术学院 一种制造长距离氢气传感光纤的磁控溅射涂覆装置及工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4528208A (en) * 1983-10-13 1985-07-09 Zymet, Inc. Method and apparatus for controlling article temperature during treatment in vacuum
JPH0217552U (cg-RX-API-DMAC7.html) * 1988-07-19 1990-02-05
JPH0452274A (ja) * 1990-06-20 1992-02-20 Nissin Electric Co Ltd 工具への薄膜被覆方法
US5096736A (en) * 1990-08-07 1992-03-17 General Electric Company Cvd diamond for coating twist drills
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
US5753092A (en) * 1996-08-26 1998-05-19 Velocidata, Inc. Cylindrical carriage sputtering system
GB9916558D0 (en) * 1999-07-14 1999-09-15 Dormer Tools Sheffield Ltd Method and means for drill production
KR20010087664A (ko) * 2000-03-08 2001-09-21 손명호 전자파 차폐막 코팅방법 및 그 장치
CN100529171C (zh) * 2005-07-21 2009-08-19 林泓庆 物理气相沉积蒸镀机的被镀物固持装置
US7182814B1 (en) * 2005-08-12 2007-02-27 Hong-Cing Lin Sample holder for physical vapor deposition equipment
US7469570B2 (en) * 2006-04-11 2008-12-30 Owens Corning Intellectual Capital, Llc Calibrating system for measuring sprayed materials

Also Published As

Publication number Publication date
KR20180098680A (ko) 2018-09-04
CA2824452C (en) 2021-02-16
ES2627812T3 (es) 2017-07-31
EP2659023B1 (de) 2017-03-08
BR112013012779A2 (pt) 2016-09-13
EP2659023A1 (de) 2013-11-06
BR112013012779B1 (pt) 2020-04-07
PL2659023T3 (pl) 2017-08-31
US20130264169A1 (en) 2013-10-10
JP2014507558A (ja) 2014-03-27
KR20130132868A (ko) 2013-12-05
WO2012089306A1 (de) 2012-07-05
CA2824452A1 (en) 2012-07-05
JP6027543B2 (ja) 2016-11-16
US9869023B2 (en) 2018-01-16
DE102010056157A1 (de) 2012-06-28
CN103261475A (zh) 2013-08-21

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: Swiss Te Lui Bach

Patentee after: OERLIKON TRADING AG, TRuBBACH

Address before: Swiss Te Lui Bach

Patentee before: OERLIKON TRADING AG, TRuBBACH

Address after: Swiss Te Lui Bach

Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON

Address before: Swiss Te Lui Bach

Patentee before: OERLIKON TRADING AG, TRuBBACH

CP01 Change in the name or title of a patent holder
CP02 Change in the address of a patent holder

Address after: Swiss hole

Patentee after: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON

Address before: Swiss Te Lui Bach

Patentee before: OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON

CP02 Change in the address of a patent holder