JP6026087B2 - Substrate processing apparatus, filter cleaning method, and filter cleaning apparatus - Google Patents

Description

  The present invention relates to a substrate processing apparatus, a filter cleaning method, and a filter cleaning apparatus. Examples of substrates processed by the substrate processing apparatus include semiconductor wafers, liquid crystal display substrates, plasma display substrates, FED (Field Emission Display) substrates, optical disk substrates, magnetic disk substrates, and magneto-optical disk substrates. , Photomask substrates, ceramic substrates, solar cell substrates, and the like.

In a manufacturing process of a semiconductor device, a liquid crystal display device, or the like, a substrate processing apparatus that supplies a processing liquid to a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device and processes the substrate is used.
For example, Patent Document 1 discloses a batch-type substrate processing apparatus that processes a plurality of substrates at once and a single-wafer-type substrate processing apparatus that processes substrates one by one. Each substrate processing apparatus includes a circulation path for circulating the processing liquid supplied to the substrate. The processing liquid supplied to the substrate is filtered by a filter interposed in the circulation path, and then supplied again to the substrate.

JP 2011-061034 A

  The processing liquid supplied to the substrate contains foreign matter. Foreign matter contained in the treatment liquid is removed by the filter. Therefore, the filter may be clogged with foreign matter. When the filter is clogged, it becomes difficult for the processing liquid to pass through the filter, so that the pressure of the processing liquid circulating in the circulation path decreases. Increasing the output of the pump that feeds the processing liquid can compensate for the pressure drop, but if the pump is continuously used at a high load, the life of the pump is shortened. Therefore, it is necessary to replace the filter periodically. However, if the filter replacement frequency is high, the running cost of the substrate processing apparatus increases.

SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate processing apparatus that can extend the life of a filter.
Another object of the present invention is to provide a filter cleaning method and a filter cleaning apparatus that can remove foreign substances from a filter.

The invention described in claim 1 for achieving the above object includes a substrate holding means for holding a substrate, a processing liquid supply means for supplying a processing liquid to the substrate held by the substrate holding means, and a substrate (W). A housing (17) holding a filter (16) for filtering the processing liquid supplied to the substrate, the processing liquid supply means and the housing are connected, and the processing liquid supplied to the substrate is supplied to the housing. an upstream pipe leading to the interior, which connects the said and the treatment liquid supplying means housing, and a downstream pipe for guiding the treatment liquid that has been filtered by the inside the filter of the housing to the processing solution supply means, said by changing the temperature of the filter of state held in the housing, viewed including the avidity and cleaning means for reducing (22) of the foreign matter with respect to the filter, the cleaning unit, the temperature A fluid supply means for sequentially supplying a plurality of fluids to the filter; and after the fluid supply means sequentially supplies a plurality of fluids having different temperatures to the filter, the filter in a state of being held in the housing, Supplying the same type of processing liquid as the processing liquid to be filtered by the filter to wash out foreign substances adhering to the filter, and the processing liquid supplied to the filter by the same type of liquid supplying means to the housing including a drain pipe for discharging from a substrate processing apparatus (1).
According to this configuration, the filter held in the housing is heated and / or cooled by the cleaning means. As a result, the temperature of the filter changes. Therefore, the temperature of the foreign material adhering to the filter also changes. Since the filter and the foreign matter have different expansion rates, the binding force of the foreign matter to the filter decreases when the temperature of the filter changes. Thereby, a foreign material can be removed from the filter and removed. Even if the foreign matter does not come off the filter, the binding force of the foreign matter to the filter is reduced, so that the foreign matter can be easily washed away by supplying the liquid. Thereby, a foreign material can be removed from a filter. Therefore, clogging of the filter can be reduced and the life of the filter can be extended. Furthermore, foreign matters can be removed while the filter is held in the housing, so that work such as removing the filter from the housing is unnecessary. Therefore, the filter can be easily cleaned.
Furthermore, according to this configuration, the substrate can be processed by supplying the processing liquid from the processing liquid supply unit to the substrate held by the substrate holding unit. Further, since the processing liquid supply means, the upstream pipe, the housing, and the downstream pipe form an annular circulation path, the processing liquid can be circulated through this circulation path. Thereby, the processing liquid filtered by the filter inside the housing can be supplied to the substrate again. Therefore, the consumption of the processing liquid can be reduced. Furthermore, since the filter can be cleaned without removing it from the housing, it is possible to reduce the downtime (resting time) of the substrate processing apparatus that occurs when the filter is replaced. Therefore, the productivity of the substrate processing apparatus can be improved.
Further, according to this configuration, the liquid from the liquid supply means is supplied to the filter in a state where the binding force of the foreign matter to the filter is reduced. Since the binding force of the foreign matter to the filter is reduced, the foreign matter adhering to the filter is easily washed away by supplying the liquid. Thereby, a foreign material can be removed from a filter and the lifetime of a filter can be extended.
Furthermore, according to this structure, the process liquid of the same kind as the process liquid to be filtered by the filter is supplied to the filter. Therefore, the same type of treatment liquid adheres to the cleaned filter. Therefore, when the processing liquid is filtered using the washed filter, it is possible to suppress or prevent the liquid different from the processing liquid from being mixed into the filtered processing liquid and changing the concentration of the processing liquid. Thereby, the change in the concentration of the processing liquid supplied to the substrate can be suppressed or prevented.

The fluid supply means may be a gas supply means for sequentially supplying a plurality of gases having different temperatures to the filter, a liquid supply means for sequentially supplying a plurality of liquids having different temperatures to the filter, or a temperature Gas / liquid supply means for sequentially supplying different gases and liquids to the filter. The gas may be liquid vapor or mist.

When the fluid supply means is a liquid supply means or a gas / liquid supply means, the foreign matter adhering to the filter can be washed away with the liquid. Moreover, even when the fluid supply means is a gas supply means, the liquid (vapor) is liquefied on the surface of the filter, or mist as gas is supplied to the filter to attach droplets to the filter. Can be made. Thereby, the foreign material adhering to the filter can be washed away with the liquid.

According to a second aspect of the invention, the fluid supply means comprises a plurality of fluid sequentially supplying heating fluid supply means to said filter for heating (23, 24, 27) by being mixed, according to claim 1 A substrate processing apparatus.
The exothermic fluid supply means may be a gas supply means for sequentially supplying a plurality of gases that generate heat by mixing to the filter, or a liquid supply means for sequentially supplying a plurality of liquids that generate heat by mixing to the filter. It may be a gas / liquid supply means that sequentially supplies gas and liquid that generate heat by mixing to the filter. The gas may be liquid vapor or mist.

According to this configuration, a plurality of fluids that generate heat when mixed are sequentially supplied to the filter. Therefore, a plurality of fluids are mixed by the filter and heat is generated. This heat is applied to the filter, and the filter is heated. Thereby, the temperature of a filter can be changed. Further, in the case where the heating fluid supply means is any one of the gas supply means, the liquid supply means, and the gas / liquid supply means, the foreign matter adhering to the filter can be washed away with the liquid as in the case described above. .

According to a third aspect of the present invention, the cleaning unit supplies the liquid to the filter held in the housing after the fluid supply unit sequentially supplies a plurality of fluids having different temperatures to the filter. , comprising said liquid supply means for washing out the foreign matter adhering to the filter (23, 24, 27) is a substrate processing apparatus according to claim 1 or 2.
According to this configuration, the liquid from the liquid supply means is supplied to the filter in a state where the binding force of the foreign matter to the filter is reduced. Since the binding force of the foreign matter to the filter is reduced, the foreign matter adhering to the filter is easily washed away by supplying the liquid. Thereby, a foreign material can be removed from a filter and the lifetime of a filter can be extended.

According to a fourth aspect of the present invention, in the substrate according to the third aspect , the liquid supply means includes a homogeneous liquid supply means (27) for supplying a treatment liquid of the same type as the treatment liquid to be filtered by the filter to the filter. It is a processing device.
According to this configuration, the same type of processing liquid as that to be filtered by the filter is supplied to the filter. Therefore, the same type of treatment liquid adheres to the cleaned filter. Therefore, when the processing liquid is filtered using the washed filter, it is possible to suppress or prevent the liquid different from the processing liquid from being mixed into the filtered processing liquid and changing the concentration of the processing liquid. Thereby, the change in the concentration of the processing liquid supplied to the substrate can be suppressed or prevented.

According to a third aspect of the present invention, the same type liquid supply means recovers the processing liquid to be filtered by the filter from the inside of the housing, and supplies the recovered processing liquid to the inside of the housing. including 27), a substrate processing apparatus according to claim 1 or 2.
According to this configuration, the processing liquid collected from the inside of the housing is supplied to the filter, and the foreign matter adhering to the filter is washed away. Thus, since the processing liquid collected from the inside of the housing is used, the consumption of the processing liquid can be reduced.

According to a fourth aspect of the present invention, the substrate processing apparatus further includes a heating unit (15) for heating the processing liquid flowing through the upstream side pipe, and the fluid supply unit is provided from the upstream side pipe to the inside of the housing. Heated fluid supply means (27) for recovering the supplied processing liquid and supplying the recovered processing liquid to the inside of the housing as a heating fluid, and supplying a cooling fluid at a temperature lower than the heating fluid to the inside of the housing The substrate processing apparatus according to any one of claims 1 to 3, further comprising a cooling fluid supply means (24) for performing the processing.

  According to this configuration, the processing liquid heated by the heating unit is supplied from the upstream pipe to the inside of the housing. The heating fluid supply means collects the processing liquid heated by the heating means from the inside of the housing, and supplies the collected processing liquid as a heating fluid to the filter. The cooling fluid supply means supplies the cooling fluid having a temperature lower than that of the heating fluid to the filter at least before and after the heating fluid is supplied to the filter. Thereby, the temperature of the filter can be changed by heating and cooling the filter. Furthermore, since the heating fluid supply means uses the processing liquid collected from the housing, the consumption amount of the heating fluid can be reduced. Moreover, since the processing liquid collected from the housing is preheated by the heating means, it is not necessary to provide a heating means separately.

The invention according to claim 5 is the substrate processing apparatus according to claim 4 , wherein the heating fluid supply means includes a discharge section (30 a) for discharging a processing liquid toward the filter.
According to this configuration, the processing liquid as the heating fluid is discharged from the discharge unit toward the filter. The processing liquid discharged from the discharge unit is sprayed on the filter and flows down along the filter. As a result, the processing liquid is supplied to the entire filter. Since the processing liquid is discharged from the discharge portion toward the filter, the entire filter can be cleaned with a smaller amount of processing liquid than when the housing is filled with the processing liquid and the filter is immersed. Thereby, the process liquid collect | recovered from the housing can be used efficiently.

Invention according to claim 6, and a circulation step of circulating the process liquid supplied to the substrate in an annular circulation path including the inside of the housing, and interruption step of interrupting the circulation of the processing solution in the circulation path, the interruption After the step is performed, a cleaning step (S3 to S6) for reducing the binding force of the foreign matter to the filter by changing the temperature of the filter, and a processing liquid in the circulation path after the cleaning step is performed. look including a resumption step of the circulation resumed, the cleaning step, the is held in the housing inside the housing, the filter for filtering the inside supply the process liquid of the housing, different temperatures A fluid supply step for sequentially supplying a plurality of fluids, and a treatment liquid of the same type as the treatment liquid to be filtered by the filter after the fluid supply step After supplying the same kind of liquid to the filter and washing out the foreign matters adhering to the filter, and after the same kind of liquid supplying step, the processing liquid supplied to the filter in the same kind of liquid supplying step is discharged from the housing. including a drainage step of a filter cleaning process. According to this configuration, it is possible to achieve an effect similar to the effect described with respect to the invention of claim 1.

The invention according to claim 7 is the filter cleaning according to claim 8, wherein the fluid supply step includes a heating fluid supply step (S3 to S5) for sequentially supplying a plurality of fluids that generate heat by mixing to the filter. Is the method. According to this configuration, it is possible to achieve the same effect as the effect described with respect to the invention of claim 2 .

According to an eighth aspect of the present invention, in the same type liquid supply step, the recovery liquid supply step (S4, S5) of recovering the processing liquid supplied into the housing and supplying the recovered processing liquid into the housing. The filter cleaning method according to claim 6 or 7 , comprising: According to this configuration, it is possible to achieve the same effect as the effect described with respect to the invention of claim 3 .

In the ninth aspect of the present invention, the fluid supply step is heated by a heating means, collects the processing liquid supplied to the inside of the housing, and supplies the recovered processing liquid to the inside of the housing as a heating fluid. Heating fluid supply step (S4, S5), and at least one of before and after the heating fluid supply step is performed, a cooling fluid supply step (S3, A filter cleaning method according to any one of claims 6 to 8 , comprising S5). According to this configuration, it is possible to achieve the same effect as the effect described with respect to the invention of claim 4 .

A tenth aspect of the present invention is the filter cleaning method according to the ninth aspect , wherein the heating fluid supply step includes a discharge step (S4, S5) for discharging a treatment liquid toward the filter. According to this configuration, it is possible to achieve the same effect as the effect described with respect to the invention of claim 5 .
The invention according to claim 11 is the state in which the treatment liquid is discharged from the inside of the housing and held in the housing before the cleaning step is performed and after the interruption step is performed. It is a filter washing | cleaning method as described in any one of Claims 6-10 which further includes the discharge | emission step (S2) which exposes a filter from a process liquid.

  According to this method, the circulation of the liquid in the annular circulation path including the inside of the housing is interrupted. Thereafter, the liquid is discharged from the inside of the housing, and the filter held in the housing is exposed from the liquid. Thereafter, the filter is washed by the temperature change of the filter. Then, the liquid is supplied again into the housing, and the circulation of the liquid in the circulation path is resumed. Thus, since the filter can be washed while being held in the housing, the replacement frequency of the filter can be reduced. Therefore, the running cost can be reduced.

According to a twelfth aspect of the present invention, a filter (16) for filtering liquid is attached, and a housing (17) that holds the attached filter inside, and a plurality of fluids that generate heat by mixing with the filter are sequentially applied to the filter. A cleaning device for cleaning a filter (including cleaning fluid supply means (222)), including heating fluid supply means for supplying and changing the temperature of the filter attached to the housing to reduce the binding force of foreign matter to the filter 201). According to this configuration, it is possible to achieve the same effects as those described in relation to the first and second aspects of the invention.

The invention of claim 13 wherein, the heating fluid supply means, together with generating heat by being mixed sequentially supplies fluid supply means different multiple fluid temperature in said filter (23, 24), according to claim 12 It is a filter washing | cleaning apparatus as described in. According to this configuration, it is possible to achieve the same effects as those described in relation to the first and second aspects of the invention.

According to a fourteenth aspect of the present invention, the cleaning means supplies liquid to the filter in a state of being held in the housing after sequentially supplying a plurality of fluids that generate heat by mixing the heat generating fluid supply means to the filter. The filter cleaning apparatus according to claim 12 , further comprising liquid supply means (23, 24, 237) for supplying foreign matter and washing away foreign matter adhering to the filter. According to this configuration, it is possible to achieve an effect similar to the effect described with respect to the invention of claim 1 .

According to a fifteenth aspect of the present invention, a filter for filtering a liquid is attached, and a housing that holds the attached filter inside is attached to the housing by sequentially supplying a plurality of fluids having different temperatures to the filter. A fluid supply means for reducing the binding force of foreign matter to the filter by changing the temperature of the filter in a state in which the filter is in a state; and after the fluid supply means sequentially supplies a plurality of fluids having different temperatures to the filter, Supplying the same kind of liquid as the liquid to be filtered by the filter to the filter, supplying the liquid to the filter held in the housing and washing out the foreign matter adhering to the filter A filter cleaning device comprising means (237). According to this configuration, it is possible to achieve an effect similar to the effect described with respect to the invention of claim 1 .
In this section, alphanumeric characters in parentheses represent reference numerals of corresponding components in the embodiments described later, but the scope of the claims is not limited by these reference numerals.

It is a schematic diagram for demonstrating schematic structure of the substrate processing apparatus which concerns on 1st Embodiment of this invention. It is a schematic diagram for demonstrating the filter washing | cleaning mechanism which concerns on 1st Embodiment of this invention. It is a flowchart when cleaning a filter with the substrate processing apparatus which concerns on 1st Embodiment of this invention. It is a schematic diagram for demonstrating schematic structure of the filter cleaning apparatus which concerns on 2nd Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
[Substrate processing equipment]
FIG. 1 is a schematic diagram for explaining a schematic configuration of a substrate processing apparatus 1 according to the first embodiment of the present invention.
The substrate processing apparatus 1 is, for example, a batch type substrate processing apparatus that processes a plurality of substrates W at once. The substrate processing apparatus 1 includes a processing tank 2 (processing liquid supply means) that stores a chemical liquid that is an example of a processing liquid, a chemical liquid nozzle 3 that supplies the chemical liquid to the processing tank 2, and a chemical liquid stored in the processing tank 2. A lifter 4 (substrate holding means) that immerses the substrate W, a circulation mechanism 5 that circulates a chemical stored in the processing tank 2, and a control device 6 that controls each device and valve provided in the substrate processing apparatus 1. including.

  The processing tank 2 includes an inner tank 7 and an outer tank 8 opened upward. The chemical liquid nozzle 3 is connected to a chemical liquid pipe 10 in which a chemical liquid valve 9 is interposed. When the control device 6 opens the chemical liquid valve 9, the chemical liquid discharged from the chemical liquid nozzle 3 is supplied into the inner tank 7. When the chemical liquid overflows from the inner tank 7, the overflowed chemical liquid is received by the outer tank 8. The substrate W held by the lifter 4 is immersed in the chemical solution stored in the inner tank 7.

  The lifter 4 includes a plurality of holding bars 11 extending horizontally. The plurality of substrates W are supported in a vertical posture by the plurality of holding bars 11. The lifter 4 includes a lifting mechanism (not shown). The lifting mechanism includes a processing position (position shown in FIG. 1) where the substrate W held in the lifter 4 is located in the inner tank 7, and a substrate W held in the lifter 4 is located above the inner tank 7. The lifter 4 is moved up and down between the retracted position. Therefore, when the lifting mechanism moves the lifter 4 to the processing position, the plurality of substrates W held by the lifter 4 are immersed in the chemical solution. Thereby, the substrate W is processed.

  The circulation mechanism 5 circulates the chemical solution discharged from the treatment tank 2 to the treatment tank 2, a plurality of circulation nozzles 13 connected to the circulation pipe 12, and circulation for sending the chemical solution from the circulation pipe 12 to the circulation nozzle 13. The pump 14 and the heater 15 (heating means) which heats the chemical | medical solution which flows through the circulation piping 12 are included. The upstream end of the circulation pipe 12 is connected to the outer tub 8, and the downstream end of the circulation pipe 12 is connected to a plurality of circulation nozzles 13. The circulation nozzle 13 is attached to the inner tank 7. The circulation nozzle 13 discharges the chemical solution in the inner tank 7. The circulation pump 14 and the heater 15 are interposed in the circulation pipe 12. A filter 16 that filters the chemical solution flowing through the circulation pipe 12 is interposed in the circulation pipe 12. The filter 16 is held inside a housing 17 (see FIG. 2), which will be described later, interposed in the circulation pipe 12.

  The substrate processing apparatus 1 includes an annular circulation path P <b> 1 including a processing tank 2, a circulation pipe 12, and a housing 17. The chemical solution stored in the processing tank 2 circulates in this circulation path P1. Specifically, the chemical liquid overflowing from the inner tank 7 is received by the outer tank 8 and then sent from the circulation pipe 12 to the circulation nozzle 13 by the circulation pump 14. Thereby, the chemical liquid is discharged from the circulation nozzle 13 and the chemical liquid is supplied into the inner tank 7. Therefore, the chemical | medical solution stored in the inner tank 7 overflows. The overflowing chemical solution is received by the outer tub 8 and then sent from the circulation pipe 12 to the circulation nozzle 13 by the circulation pump 14. Then, the chemical liquid is discharged from the circulation nozzle 13 and the chemical liquid is supplied into the inner tank 7. In this way, the circulation of the chemical solution is continued.

  The chemical solution is heated by the heater 15 as the chemical solution passes through the circulation pipe 12. Therefore, by continuing the circulation of the chemical solution, the chemical solution stored in the processing tank 2 is maintained at a high temperature (temperature higher than room temperature (20 to 30 ° C.)). Furthermore, the chemical solution is filtered by the filter 16 as the chemical solution passes through the circulation pipe 12. Thereby, the foreign material contained in a chemical | medical solution is removed. Moreover, since a high temperature chemical | medical solution is supplied to the filter 16, the filter 16 is heated with a chemical | medical solution. Therefore, the filter 16 is kept at a high temperature in a state where the chemical solution is circulating through the circulation pipe 12.

FIG. 2 is a schematic diagram for explaining the filter cleaning mechanism 22 according to the first embodiment of the present invention.
The substrate processing apparatus 1 includes a housing 17 that holds the filter 16 therein. The filter 16 is held by the housing 17. The housing 17 can be opened and closed, and the filter 16 is detachably attached to the housing 17. The filter 16 has, for example, a cylindrical shape whose upper end is closed. The interior of the housing 17 is partitioned by the filter 16 into an upstream space X1 and a downstream space X2. The upstream space X1 is a space outside the filter 16 to which the liquid to be filtered is supplied, and the downstream space X2 is a space inside the filter 16 to which the liquid filtered by the filter 16 is supplied. The housing 17 includes an inflow portion 17a that communicates with the upstream space X1 and an outflow portion 17b that communicates with the downstream space X2.

  The circulation pipe 12 includes an upstream pipe 18 disposed on the upstream side of the housing 17 with respect to the flow direction of the chemical solution, and a downstream pipe 19 disposed on the downstream side of the housing 17. The circulation mechanism 5 further includes an upstream valve 20 interposed in the upstream pipe 18 and a downstream valve 21 interposed in the downstream pipe 19. The end of the upstream pipe 18 is connected to the inflow part 17 a of the housing 17, and the end of the downstream pipe 19 is connected to the outflow part 17 b of the housing 17. Therefore, the chemical liquid flowing in the upstream side pipe 18 flows into the upstream side space X1 from the upstream side pipe 18 through the inflow portion 17a. Moreover, the chemical | medical solution filtered by the filter 16 flows out out of the downstream space X2 to the downstream piping 19 via the outflow part 17b.

  In a state where the chemical solution is circulating through the circulation pipe 12, the inside of the housing 17 is filled with the chemical solution. Therefore, in this state, the supply pressure of the circulation pump 14 is applied to the surface 16 a of the filter 16. The chemical liquid in the housing 17 (upstream space X1) passes through the surface 16a of the filter 16 by the supply pressure of the circulation pump 14, and is filtered. Thereby, a chemical | medical solution moves to the downstream space X2 from the upstream space X1. And the chemical | medical solution which moved to the downstream space X2 is discharged | emitted from the outflow part 17b to the downstream piping 19, and is sent to the circulation nozzle 13. FIG. Thereby, the filtered chemical is supplied to the inner tank 7.

  The substrate processing apparatus 1 includes a filter cleaning mechanism 22 (cleaning unit) that cleans the filter 16. The filter cleaning mechanism 22 includes the housing 17, a heating pipe 23 (fluid supply means, liquid supply means) for supplying a heating fluid for heating the filter 16 into the housing 17, and a cooling fluid for cooling the filter 16. A cooling pipe 24 (fluid supply means, cooling fluid supply means, liquid supply means), a heating valve 25 interposed in the heating pipe 23, and a cooling valve 26 interposed in the cooling pipe 24. . Ends of the heating pipe 23 and the cooling pipe 24 are connected to the housing 17. The heating pipe 23 and the cooling pipe 24 communicate with the inside of the housing 17. When the heating valve 25 is opened, the heating fluid is supplied from the heating pipe 23 into the housing 17. Similarly, when the cooling valve 26 is opened, the cooling fluid is supplied from the cooling pipe 24 into the housing 17. The heating fluid may be a liquid or a gas. When the heating fluid is a gas, the heating fluid may be steam or mist. The same applies to the cooling fluid.

  The heating fluid and the cooling fluid are fluids having different temperatures. The heating fluid is a high-temperature fluid, and the cooling fluid is a low-temperature fluid having a temperature lower than that of the high-temperature fluid. If the low-temperature fluid is lower than the high-temperature fluid, the temperature of the low-temperature fluid may be less than room temperature or higher than room temperature. Further, the heating fluid and the cooling fluid may be a heating fluid that generates heat when mixed. In this case, the heating fluid may be hotter or colder than the cooling fluid, or may be at a temperature equal to the cooling fluid. That is, when the heating fluid and the cooling fluid are exothermic fluids, the heating fluid and the cooling fluid may not be fluids having different temperatures. Of course, the heating fluid and the cooling fluid may be a hot fluid and a cold fluid, respectively, and may be a heat generating fluid.

  Specific examples of the combination of the heating fluid and the cooling fluid are as shown in Table 1 below. The combination of the heating fluid and the cooling fluid shown in Table 1 is an example of the combination of the high temperature fluid and the low temperature fluid. All of the high temperature fluids shown in Table 1 are higher than room temperature, and all of the low temperature fluids shown in Table 1 are below room temperature. That is, the temperature of the cryogenic fluid shown in Table 1 may be lower than room temperature or may be equal to room temperature. As shown in Table 1, when the heating fluid is sulfuric acid, the cooling fluid may be hydrogen peroxide water or water. That is, when the heating fluid is sulfuric acid, the cooling fluid may be a liquid containing water. When a liquid containing water and sulfuric acid are mixed, heat of dilution is generated. Therefore, when sulfuric acid is supplied to the filter 16 in a state where a liquid containing water is attached to the filter 16, the filter 16 is heated. A combination of sulfuric acid and hydrogen peroxide solution, and a combination of sulfuric acid and water are examples of combinations of exothermic fluids. When the heating fluid is sulfuric acid, the sulfuric acid may be supplied to the filter 16 in a state of being mixed with another liquid.

  The filter cleaning mechanism 22 recovers the liquid from the housing 17 and supplies the recovered liquid into the housing 17 (fluid supply means, heating fluid supply means, liquid supply means, same-type liquid supply means, recovered liquid Supply means). The recovery mechanism 27 includes a tank 28 that stores the liquid discharged from the housing 17, a first recovery pipe 29 that guides the liquid in the housing 17 to the tank 28, and a second that guides the liquid in the tank 28 into the housing 17. A recovery pipe 30, a recovery valve 31 interposed in the first recovery pipe 29, and a recovery pump 32 interposed in the second recovery pipe 30 are included. One end of the first recovery pipe 29 is connected to the lower end of the housing 17, and the other end of the first recovery pipe 29 is connected to the tank 28. One end of the second recovery pipe 30 is connected to the lower end of the tank 28, and the other end of the second recovery pipe 30 is connected to the upper end of the housing 17.

  When the recovery valve 31 is opened, the liquid in the housing 17 is discharged to the first recovery pipe 29 and supplied into the tank 28. As a result, the liquid in the housing 17 is collected in the tank 28. When the recovery pump 32 is driven, the liquid in the tank 28 is supplied into the housing 17 via the second recovery pipe 30. Thereby, the liquid recovered from the housing 17 is returned into the housing 17. As described above, the tank 28, the first recovery pipe 29, and the second recovery pipe 30 constitute a recovery path P <b> 2 for returning the liquid recovered from the housing 17 into the housing 17.

  The other end of the second recovery pipe 30 constitutes a discharge part 30 a that discharges liquid toward the filter 16 held in the housing 17. That is, when the recovery pump 32 is driven, the liquid in the tank 28 is discharged from the discharge unit 30 a toward the filter 16. Then, the liquid discharged from the discharge unit 30 a is sprayed onto the surface 16 a of the filter 16 and flows down from the upper end portion of the filter 16 along the surface 16 a of the filter 16. As a result, the liquid discharged from the discharge portion 30 a of the second recovery pipe 30 is supplied to the entire surface 16 a of the filter 16.

  The filter cleaning mechanism 22 includes a drainage pipe 33 and an atmosphere communication pipe 34 connected to the housing 17, a drainage valve 35 interposed in the drainage pipe 33, and a communication valve 36 interposed in the atmosphere communication pipe 34. Including. One end of the drainage pipe 33 is connected to the lower end of the housing 17, and the other end of the drainage pipe 33 is connected to a waste liquid mechanism (not shown). One end of the atmospheric communication pipe 34 is connected to the upper end of the housing 17, and the other end of the atmospheric communication pipe 34 communicates with the atmosphere. The drainage pipe 33 and the atmosphere communication pipe 34 communicate with the inside of the housing 17. When the drain valve 35 is opened, the liquid in the housing 17 is discharged to the drain pipe 33 and guided to a waste liquid mechanism (not shown). When the communication valve 36 is opened, the interior of the housing 17 communicates with the atmosphere.

FIG. 3 is a flowchart when the filter 16 is cleaned by the substrate processing apparatus 1 according to the first embodiment of the present invention. In the following, reference is made to FIGS.
First, the case where the heating fluid and the cooling fluid are water vapor and liquid nitrogen, respectively, will be described.
[Steam and liquid nitrogen]
When the filter 16 is washed, first, the circulation of the chemical solution in the circulation path P1 is interrupted (S1). Specifically, the control device 6 closes the upstream side valve 20 and the downstream side valve 21 in a state where the valves 25, 26, 31, 35 and 36 of the filter cleaning mechanism 22 are closed. Thereby, the supply of the chemical solution from the upstream side pipe 18 into the housing 17 is stopped, and the circulation of the chemical solution in the circulation path P1 is stopped. In a state where the chemical solution is circulating through the circulation pipe 12, a constant pressure (chemical solution supply pressure) is applied to the filter 16. Therefore, the hydraulic pressure applied to the filter 16 is reduced by stopping the circulation of the chemical solution in the circulation path P1. For this reason, the foreign substance is more easily detached from the filter 16 than before the circulation of the chemical liquid is interrupted.

  Next, the chemical solution in the housing 17 is discharged (S2). Specifically, the control device 6 opens the recovery valve 31 and the communication valve 36. Thereby, the chemical solution in the housing 17 is discharged to the first recovery pipe 29 while air is introduced into the housing 17 from the atmosphere communication pipe 34. Since the first recovery pipe 29 is connected to the tank 28, the chemical solution in the housing 17 is recovered in the tank 28. The control device 6 maintains the collection valve 31 and the communication valve 36 in an open state until all the chemical solution in the housing 17 is discharged, that is, until the housing 17 is empty. When the inside of the housing 17 becomes empty, the control device 6 closes the recovery valve 31 and the communication valve 36. The filter 16 is exposed from the liquid by emptying the housing 17.

  Next, the filter 16 is cooled by liquid nitrogen as a cooling fluid (S3). Specifically, the control device 6 opens the cooling valve 26 and the communication valve 36. Thereby, liquid nitrogen is supplied into the housing 17. The control device 6 keeps the cooling valve 26 and the communication valve 36 open until the inside of the housing 17 is filled with liquid nitrogen. Therefore, the filter 16 is immersed in liquid nitrogen. Thereby, liquid nitrogen is supplied to the filter 16, and the filter 16 is cooled to a temperature lower than room temperature (for example, about −20 ° C.). After the filter 16 is cooled, the control device 6 closes the cooling valve 26 and opens the drainage valve 35. Thereby, the liquid nitrogen in the housing 17 is discharged to the drainage pipe 33. The control device 6 maintains the drainage valve 35 and the communication valve 36 in an open state until the inside of the housing 17 becomes empty. When the interior of the housing 17 becomes empty, the control device 6 closes the drain valve 35 and the communication valve 36. Foreign matter adhering to the filter 16 is washed away by liquid nitrogen discharged from the housing 17.

  Next, the filter 16 is heated by high-temperature steam as a heating fluid (S4). Specifically, the control device 6 opens the heating valve 25 and the drain valve 35. Thereby, water vapor is supplied into the housing 17. Therefore, the air in the housing 17 is replaced with water vapor, and the water vapor is filled in the housing 17. Thereby, water vapor | steam is supplied to the filter 16, and the filter 16 is heated to temperature higher than room temperature (for example, about 100 degreeC). Further, since water vapor is supplied to the cooled filter 16, the water vapor is liquefied on the surface 16 a of the filter 16, and water droplets adhere to the surface 16 a of the filter 16. The water droplets flow down along the filter 16 and are discharged to the drainage pipe 33. Thereby, the foreign material adhering to the filter 16 is washed away. The control device 6 closes the heating valve 25 and the drainage valve 35 after the filter 16 is heated.

  Next, cooling and heating of the filter 16 are alternately repeated (S5). Specifically, as in the case described above, the filter 16 is cooled by liquid nitrogen, and thereafter, the filter 16 is heated by water vapor as in the case described above. The number of repetitions of cooling and heating may be one time or two or more times. By alternately repeating cooling and heating, the filter 16 alternately repeats contraction and expansion. Moreover, since the foreign material adhering to the filter 16 is also cooled and heated, the foreign material repeatedly contracts and expands. Since the filter 16 and the foreign matter have different expansion rates, the foreign matter is detached from the filter 16 or the binding force of the foreign matter to the filter 16 is weakened by repeated contraction and expansion. Therefore, the foreign matter adhering to the filter 16 is reliably washed away by liquid nitrogen and water vapor. Then, liquid nitrogen and water containing foreign substances are discharged to the drainage pipe 33. Thereby, the reattachment of the foreign matter to the filter 16 is suppressed or prevented.

  Next, finish cleaning is performed using the same type of liquid as the liquid to be filtered by the filter 16, that is, chemical liquid (S6). Specifically, the control device 6 opens the communication valve 36 and drives the recovery pump 32. Thereby, the chemical solution stored in the tank 28 is supplied into the housing 17 from the discharge part 30 a of the second recovery pipe 30. The control device 6 drives the recovery pump 32 until the inside of the housing 17 is filled with the chemical solution. And the control apparatus 6 stops the collection | recovery pump 32, after the inside of the housing 17 is satisfy | filled with the chemical | medical solution. Thereafter, the control device 6 opens the drainage valve 35 in a state where the communication valve 36 is opened. Thereby, the chemical solution in the housing 17 is discharged to the drainage pipe 33. The control device 6 closes the drain valve 35 and the communication valve 36 after the inside of the housing 17 becomes empty. By filling the housing 17 with the chemical solution, the chemical solution is supplied to the filter 16. Therefore, the liquid nitrogen and water adhering to the filter 16 are replaced with the chemical solution. Therefore, when the circulation of the chemical solution in the circulation path P1 is resumed, it is possible to suppress or prevent the liquid nitrogen and water from being mixed into the chemical solution and changing the concentration of the chemical solution supplied to the substrate W.

  Next, the circulation of the chemical solution in the circulation path P1 is resumed (S7). Specifically, the control device 6 opens the upstream side valve 20 and the downstream side valve 21 in a state where the valves 25, 26, 31, 35, and 36 of the filter cleaning mechanism 22 are closed. Further, the control device 6 causes the chemical liquid nozzle 3 to discharge the chemical liquid (unused chemical liquid) into the inner tank 7. Thereby, the chemical liquid overflows from the inner tank 7, and the chemical liquid is supplied to the outer tank 8. Then, the chemical solution supplied to the outer tub 8 is supplied from the upstream side pipe 18 into the housing 17. Thereby, the inside of the housing 17 is filled with the chemical solution, and the supply pressure of the chemical solution is applied to the filter 16. The chemical solution supplied into the housing 17 passes through the filter 16, that is, after being filtered by the filter 16, is discharged to the downstream side pipe 19. Thereby, the circulation of the chemical solution in the circulation path P1 is resumed.

[Sulfuric acid & Hydrogen peroxide]
Next, a case where the heating fluid and the cooling fluid are respectively sulfuric acid and hydrogen peroxide solution and the chemical solution is SPM (mixed solution containing sulfuric acid and hydrogen peroxide solution) will be described. However, since the operation until the circulation of the SPM in the circulation path P1 is interrupted and the SPM in the housing 17 is discharged is the same as the above-described operation example (S1 to S2), the operation performed after that will be described. To do.

  After the circulation of the SPM in the circulation path P1 is interrupted and the SPM in the housing 17 is discharged, the filter 16 is cooled by the hydrogen peroxide solution as a cooling fluid (S3). Specifically, the control device 6 opens the cooling valve 26 and the communication valve 36. As a result, the hydrogen peroxide solution is supplied into the housing 17. The control device 6 keeps the cooling valve 26 and the communication valve 36 open until the housing 17 is filled with the hydrogen peroxide solution. As a result, the filter 16 is immersed in the hydrogen peroxide solution, and the hydrogen peroxide solution is supplied to the filter 16. Since SPM containing sulfuric acid adheres to the filter 16 before the hydrogen peroxide solution is supplied, when the hydrogen peroxide solution is supplied to the filter 16, heat is generated by mixing sulfuric acid and hydrogen peroxide solution. Arise. However, since the inside of the housing 17 is filled with hydrogen peroxide, the amount of heat absorbed is larger than the amount of heat generated. Therefore, the temperature of the filter 16 is lower than before the hydrogen peroxide solution is finally supplied. After the filter 16 is cooled, the control device 6 closes the cooling valve 26 and opens the drainage valve 35. Thereby, the hydrogen peroxide solution in the housing 17 is discharged to the drainage pipe 33. When the interior of the housing 17 becomes empty, the control device 6 closes the drain valve 35 and the communication valve 36. Foreign matter adhering to the filter 16 is washed away by the hydrogen peroxide solution discharged from the housing 17.

  Next, the filter 16 is heated with sulfuric acid as a heating fluid (S4). Specifically, the control device 6 opens the drain valve 35 and drives the recovery pump 32. As a result, the SPM stored in the tank 28 is discharged into the housing 17 from the discharge portion 30 a of the second recovery pipe 30. SPM discharged from the discharge unit 30 a flows down from the upper end of the filter 16 along the surface 16 a of the filter 16 and is discharged to the drainage pipe 33. As a result, the SPM is supplied to the entire surface 16a of the filter 16, and the foreign matter adhering to the filter 16 is washed away. The control device 6 supplies a part of the SPM stored in the tank 28 into the housing 17. Then, after the SPM is supplied into the housing 17, the control device 6 closes the drain valve 35 and stops the recovery pump 32.

  The SPM in the tank 28 is a high-temperature SPM heated by the heater 15. Therefore, when the SPM in the tank 28 is supplied to the filter 16, the filter 16 is heated by the heat of the SPM itself. Furthermore, since heat is generated by mixing the sulfuric acid contained in the SPM and the hydrogen peroxide solution adhering to the filter 16, the filter 16 is also heated by the heat generated by the mixing. In addition, since the SPM recovered from the housing 17 is supplied to the filter 16 as a heating fluid, the consumption of the heating fluid can be reduced. Further, since SPM is blown from the discharge part 30a of the second recovery pipe 30 to the filter 16, the entire surface 16a of the filter 16 can be wetted with SPM with a smaller amount of SPM than when the filter 16 is immersed in SPM. Thereby, the foreign material adhering to the filter 16 can be washed away with a small amount of SPM.

  Next, cooling and heating of the filter 16 are alternately repeated (S5). Specifically, the filter 16 is cooled by the hydrogen peroxide solution as in the above case, and then the filter 16 is heated by the remaining SPM stored in the tank 28 as in the above case. Is done. The number of repetitions of cooling and heating may be one time or two or more times. By alternately repeating cooling and heating, the filter 16 and the foreign matter alternately repeat contraction and expansion. Since the filter 16 and the foreign matter have different expansion rates, the foreign matter is detached from the filter 16 or the binding force of the foreign matter to the filter 16 is weakened by repeated contraction and expansion. Therefore, the foreign matter adhering to the filter 16 is reliably washed away by the hydrogen peroxide solution and sulfuric acid. Then, the hydrogen peroxide solution and the sulfuric acid containing foreign substances are discharged to the drainage pipe 33. Thereby, the reattachment of the foreign matter to the filter 16 is suppressed or prevented.

  Next, after finishing cleaning is performed by the SPM in the tank 28 which is the same kind of liquid as the liquid to be filtered by the filter 16 (S6), the circulation of the SPM in the circulation path P1 is resumed (S7). Specifically, after the SPM in the tank 28 is supplied into the housing 17, the control device 6 performs the upstream operation with the valves 25, 26, 31, 35, 36 of the filter cleaning mechanism 22 closed. The side valve 20 and the downstream valve 21 are opened. Further, the control device 6 discharges SPM from the chemical nozzle 3 to the inner tank 7. As a result, the SPM overflows from the inner tank 7 to the outer tank 8, and the overflowed SPM is supplied from the upstream pipe 18 into the housing 17. The SPM supplied into the housing 17 is filtered by the filter 16 and then discharged to the downstream pipe 19. As a result, the circulation of the SPM in the circulation path P1 is resumed. Thus, since the SPM circulation is resumed after the SPM in the tank 28 is supplied to the filter 16, the hydrogen peroxide solution adhering to the filter 16 is mixed into the SPM supplied to the substrate W. , It is possible to suppress or prevent the SPM concentration from changing.

[Hot water & cold water]
Next, the case where the heating fluid and the cooling fluid are hot water and cold water, respectively, will be described. However, since the operation until the circulation of the chemical solution in the circulation path P1 is interrupted and the chemical solution in the housing 17 is discharged is the same as the above-described operation example (S1 to S2), the operation performed after that will be described. To do.

  After the circulation of the chemical liquid in the circulation path P1 is interrupted and the chemical liquid in the housing 17 is discharged, the filter 16 is cooled by cold water as a cooling fluid (S3). Specifically, the control device 6 opens the cooling valve 26 and the communication valve 36. Thereby, cold water is supplied into the housing 17. The control device 6 keeps the cooling valve 26 and the communication valve 36 open until the inside of the housing 17 is filled with cold water. Therefore, the filter 16 is immersed in cold water. Thereby, cold water is supplied to the filter 16 and the filter 16 is cooled. After the filter 16 is cooled, the control device 6 closes the cooling valve 26 and opens the drainage valve 35. Thereby, the cold water in the housing 17 is discharged to the drainage pipe 33. The control device 6 maintains the drainage valve 35 and the communication valve 36 in an open state until the inside of the housing 17 becomes empty. When the interior of the housing 17 becomes empty, the control device 6 closes the drain valve 35 and the communication valve 36. The foreign matter adhering to the filter 16 is washed away by the cold water discharged from the housing 17.

  Next, the filter 16 is heated with warm water as a heating fluid (S4). Specifically, the control device 6 opens the heating valve 25 and the communication valve 36. Thereby, warm water is supplied into the housing 17. The control device 6 keeps the heating valve 25 and the communication valve 36 open until the inside of the housing 17 is filled with hot water. Therefore, the filter 16 is immersed in warm water. Thereby, warm water is supplied to the filter 16 and the filter 16 is heated. After the filter 16 is heated, the control device 6 closes the heating valve 25 and opens the drainage valve 35. Thereby, the hot water in the housing 17 is discharged to the drainage pipe 33. The control device 6 maintains the drainage valve 35 and the communication valve 36 in an open state until the inside of the housing 17 becomes empty. When the interior of the housing 17 becomes empty, the control device 6 closes the drain valve 35 and the communication valve 36. The foreign matter adhering to the filter 16 is washed away by the hot water discharged from the housing 17.

  Next, cooling and heating of the filter 16 are alternately repeated (S5). Specifically, the filter 16 is cooled by cold water as in the case described above, and then the filter 16 is heated by hot water as in the case described above. The number of repetitions of cooling and heating may be one time or two or more times. By alternately repeating cooling and heating, the filter 16 alternately repeats contraction and expansion. Since the filter 16 and the foreign matter have different expansion rates, the foreign matter is detached from the filter 16 or the binding force of the foreign matter to the filter 16 is weakened by repeated contraction and expansion. Therefore, the foreign matter adhering to the filter 16 is reliably washed away by cold water and hot water. Then, the cold water and the hot water containing the foreign matter are discharged to the drainage pipe 33. Thereby, the reattachment of the foreign matter to the filter 16 is suppressed or prevented.

  Next, finish cleaning is performed using the same type of liquid as the liquid to be filtered by the filter 16, that is, chemical liquid (S6). Specifically, the control device 6 opens the communication valve 36 and drives the recovery pump 32. Thereby, the chemical solution stored in the tank 28 is supplied into the housing 17 from the discharge part 30 a of the second recovery pipe 30. The control device 6 drives the recovery pump 32 until the inside of the housing 17 is filled with the chemical solution. And the control apparatus 6 stops the collection | recovery pump 32, after the inside of the housing 17 is satisfy | filled with the chemical | medical solution. Thereafter, the control device 6 opens the drainage valve 35 in a state where the communication valve 36 is opened. Thereby, the chemical solution in the housing 17 is discharged to the drainage pipe 33. The control device 6 closes the drain valve 35 and the communication valve 36 after the inside of the housing 17 becomes empty. By filling the housing 17 with the chemical solution, the chemical solution is supplied to the filter 16. Therefore, the cold water and hot water adhering to the filter 16 are replaced with the chemical solution. Therefore, it is possible to suppress or prevent a change in the concentration of the chemical solution supplied to the substrate W due to cold water and hot water being mixed into the chemical solution when the circulation of the chemical solution in the circulation path P1 is resumed.

  Next, the circulation of the chemical solution in the circulation path P1 is resumed (S7). Specifically, the control device 6 opens the upstream side valve 20 and the downstream side valve 21 in a state where the valves 25, 26, 31, 35, and 36 of the filter cleaning mechanism 22 are closed. Further, the control device 6 discharges the chemical liquid from the chemical liquid nozzle 3 to the inner tank 7. Thereby, the chemical liquid overflows from the inner tank 7, and the chemical liquid is supplied to the outer tank 8. Then, the chemical solution supplied to the outer tub 8 is supplied from the upstream side pipe 18 into the housing 17. Thereby, the inside of the housing 17 is filled with the chemical solution, and the supply pressure of the chemical solution is applied to the filter 16. The chemical solution supplied into the housing 17 passes through the filter 16, that is, after being filtered by the filter 16, is discharged to the downstream side pipe 19. Thereby, the circulation of the chemical solution in the circulation path P1 is resumed.

[High-temperature nitrogen gas & low-temperature nitrogen gas]
Next, the case where the heating fluid and the cooling fluid are high-temperature nitrogen gas and low-temperature nitrogen gas, respectively, will be described. However, since the operation until the circulation of the chemical solution in the circulation path P1 is interrupted and the chemical solution in the housing 17 is discharged is the same as the above-described operation example (S1 to S2), the operation performed after that will be described. To do.

  After the circulation of the chemical liquid in the circulation path P1 is interrupted and the chemical liquid in the housing 17 is discharged, the filter 16 is cooled by the low-temperature nitrogen gas as the cooling fluid (S3). Specifically, the control device 6 opens the cooling valve 26 and the communication valve 36 to supply low temperature nitrogen gas into the housing 17. Thereby, the low temperature nitrogen gas fills the housing 17 and the filter 16 is exposed to the low temperature nitrogen gas. Therefore, low-temperature nitrogen gas is supplied to the filter 16 and the filter 16 is cooled. After the filter 16 is cooled, the control device 6 closes the cooling valve 26 and the communication valve 36 to stop the supply of the low-temperature nitrogen gas into the housing 17.

  Next, the filter 16 is heated by the high-temperature nitrogen gas as the heating fluid (S4). Specifically, the control device 6 opens the heating valve 25 and the communication valve 36 to supply hot nitrogen gas into the housing 17. Thereby, the high temperature nitrogen gas fills the housing 17 and the filter 16 is exposed to the high temperature nitrogen gas. Therefore, high temperature nitrogen gas is supplied to the filter 16 and the filter 16 is heated. After the filter 16 is heated, the control device 6 closes the heating valve 25 and the communication valve 36 to stop the supply of high-temperature nitrogen gas into the housing 17.

  Next, cooling and heating of the filter 16 are alternately repeated (S5). Specifically, the filter 16 is cooled by the low-temperature nitrogen gas as described above, and then the filter 16 is heated by the high-temperature nitrogen gas as described above. The number of repetitions of cooling and heating may be one time or two or more times. By alternately repeating cooling and heating, the filter 16 alternately repeats contraction and expansion. Moreover, since the foreign material adhering to the filter 16 is also cooled and heated, the foreign material repeatedly contracts and expands. Since the filter 16 and the foreign matter have different expansion rates, the foreign matter is detached from the filter 16 or the binding force of the foreign matter to the filter 16 is weakened by repeated contraction and expansion.

  Next, finish cleaning with a chemical solution is performed (S6). Specifically, the control device 6 opens the communication valve 36 and drives the recovery pump 32. Thereby, the chemical solution stored in the tank 28 is supplied into the housing 17 from the discharge part 30 a of the second recovery pipe 30. The control device 6 stops the recovery pump 32 after the inside of the housing 17 is filled with the chemical solution. Thereafter, the control device 6 opens the drainage valve 35 in a state where the communication valve 36 is opened. Thereby, the chemical solution in the housing 17 is discharged to the drainage pipe 33. The control device 6 closes the drain valve 35 and the communication valve 36 after the inside of the housing 17 becomes empty. By filling the housing 17 with the chemical solution, the chemical solution is supplied to the filter 16. Accordingly, the foreign matter whose binding force to the filter 16 is weakened by contraction and expansion is washed away from the filter 16 by the chemical solution. And the chemical | medical solution containing a foreign material is discharged | emitted by the drainage piping 33. FIG. Thereby, the reattachment of the foreign matter to the filter 16 is suppressed or prevented.

  Next, the circulation of the chemical solution in the circulation path P1 is resumed (S7). Specifically, the control device 6 opens the upstream side valve 20 and the downstream side valve 21 in a state where the valves 25, 26, 31, 35, and 36 of the filter cleaning mechanism 22 are closed. Further, the control device 6 discharges the chemical liquid from the chemical liquid nozzle 3 to the inner tank 7. Thereby, the chemical liquid overflows from the inner tank 7, and the chemical liquid is supplied to the outer tank 8. Then, the chemical solution supplied to the outer tub 8 is supplied from the upstream side pipe 18 into the housing 17. Thereby, the inside of the housing 17 is filled with the chemical solution, and the supply pressure of the chemical solution is applied to the filter 16. The chemical solution supplied into the housing 17 passes through the filter 16, that is, after being filtered by the filter 16, is discharged to the downstream side pipe 19. Thereby, the circulation of the chemical solution in the circulation path P1 is resumed.

  As described above, in the first embodiment, the temperature of the filter 16 held in the housing 17 is changed to reduce the binding force of foreign matter to the filter 16. Thereby, foreign matter can be removed from the filter 16. Therefore, the life of the filter 16 can be extended, and the replacement frequency of the filter 16 can be reduced. Therefore, the running cost of the substrate processing apparatus 1 can be reduced. Furthermore, since the clogging of the filter 16 can be suppressed, the chemical liquid can be circulated at a stable pressure without increasing the output of the circulation pump 14. Thereby, the lifetime of the circulation pump 14 can be extended. Therefore, the running cost of the substrate processing apparatus 1 can be further reduced. In addition, since the filter 16 can be cleaned without removing it from the housing 17, there is no need to remove or attach the filter 16 accompanying the cleaning. Accordingly, it is possible to reduce the downtime of the substrate processing apparatus 1 generated by the replacement of the filter 16. Thereby, the productivity of the substrate processing apparatus 1 can be improved.

[Filter cleaning equipment]
FIG. 4 is a schematic diagram for explaining a schematic configuration of a filter cleaning device 201 according to the second embodiment of the present invention.
The filter cleaning device 201 includes a housing 17. The filter 16 is detachably attached to the housing 17. The filter 16 is held inside the housing 17. The filter cleaning device 201 includes a filter cleaning mechanism 222 (cleaning unit) that cleans the filter 16. The filter cleaning mechanism 222 includes a heating pipe 23, a cooling pipe 24, a heating valve 25, and a cooling valve 26. Further, the filter cleaning mechanism 222 includes a drainage pipe 33 and an atmosphere communication pipe 34, and a drainage valve 35 and a communication valve 36. The filter cleaning device 201 includes a control device 6 that controls each device and valve provided in the filter cleaning device 201.

  The filter cleaning mechanism 222 includes a new liquid pipe 237 and a new liquid valve 238 in place of the recovery mechanism 27 described above. The new liquid valve 238 is interposed in a new liquid pipe 237 (liquid supply means, same-type liquid supply means). One end of the new liquid pipe 237 is connected to the housing 17, and the other end of the new liquid pipe 237 is a liquid that supplies the new liquid pipe 237 with an unused liquid of the same type as the liquid to be filtered by the filter 16. Connected to a source (not shown). Therefore, when the control device 6 opens the new liquid valve 238, unused liquid is supplied from the new liquid pipe 237 into the housing 17 (upstream space X1).

  When the filter 16 is cleaned by the filter cleaning device 201, the filter 16 is attached to the housing 17. Thereafter, the valves 25, 26, 35, and 36 are opened and closed by the control device 6, so that the cooling fluid and the heating fluid alternately enter the housing 17 in the same manner as the cleaning of the filter 16 described with reference to FIG. Supplied. Thereby, cooling and heating of the filter 16 are performed alternately, and the temperature of the filter 16 changes. The controller 6 opens the new liquid valve 238 after alternately cooling and heating the filter 16. As a result, unused liquid is supplied from the new liquid pipe 237 into the housing 17. The control device 6 closes the new liquid valve 238 after the housing 17 is filled with liquid. Thereafter, the control device 6 opens the drainage pipe 33. Thereby, the liquid in the housing 17 is discharged to the drainage pipe 33, and the inside of the housing 17 becomes empty. As a result, finish cleaning with an unused liquid is performed. Thereafter, the housing 17 is opened, and the cleaned filter 16 is removed.

Although the embodiments of the present invention have been described above, the present invention is not limited to the contents of the first and second embodiments described above, and various modifications can be made within the scope of the claims. is there.
For example, in the first and second embodiments described above, the case where the temperature of the filter 16 is changed by supplying the heating fluid and the cooling fluid has been described. However, the filter is held in the housing 17 by a heater arranged inside or outside the housing 17. You may heat the filter 16 of the state currently performed. Further, the filter 16 held in the housing 17 by dry ice may be cooled.

In the first and second embodiments described above, the case of performing the final cleaning with the same kind of liquid as the liquid to be filtered by the filter 16 has been described. However, the liquid used in the final cleaning is the liquid to be filtered by the filter 16. It may not be the same kind of liquid. For example, pure water (deionized water) may be used in the finish cleaning.
In the first embodiment described above, the case of performing the final cleaning with the chemical solution recovered from the housing 17 has been described. However, a new liquid pipe for supplying an unused chemical solution into the housing 17 (upstream space X1) is provided. The finish cleaning may be performed with an unused chemical solution.

In the first and second embodiments described above, the case where the pump and the valve are controlled by the control device 6 when the filter 16 is cleaned has been described. However, the start and stop of liquid feeding from the pump, and the valve The opening and closing may be performed manually.
In the first and second embodiments described above, the case where the filter 16 is cylindrical has been described. However, the filter 16 may have a shape other than the cylindrical shape.

In the first embodiment, the substrate processing apparatus 1 is a batch-type substrate processing apparatus. However, the substrate processing apparatus 1 is a single-wafer type substrate processing apparatus that processes the substrates W one by one. It may be.
In addition, various design changes can be made within the scope of matters described in the claims.

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 2 Processing tank (Processing liquid supply means)
4 Lifter (substrate holding means)
15 Heater (heating means)
16 Filter 17 Housing 18 Upstream piping 19 Downstream piping 22 Filter cleaning mechanism (cleaning means)
23 Heating piping (fluid supply means, liquid supply means)
24 Cooling piping (fluid supply means, cooling fluid supply means, liquid supply means)
27 Recovery mechanism (fluid supply means, heating fluid supply means, liquid supply means, homogeneous liquid supply means, recovered liquid supply means)
30a Discharge unit 201 Filter cleaning device 222 Filter cleaning mechanism (cleaning means)
237 New liquid piping (liquid supply means, same type liquid supply means)
W substrate

Claims (15)

Substrate holding means for holding the substrate;
Treatment liquid supply means for supplying a treatment liquid to the substrate held by the substrate holding means;
A housing that internally holds a filter for filtering the processing liquid supplied to the substrate;
An upstream pipe that connects the processing liquid supply means and the housing, and guides the processing liquid supplied to the substrate into the housing;
A downstream pipe that connects the processing liquid supply means and the housing, and guides the processing liquid filtered by the filter inside the housing to the processing liquid supply means;
By changing the temperature of the filter of state held in the housing, seen including a cleaning means for reducing the binding force of the foreign matter against the filter,
The cleaning means is held by the housing after sequentially supplying a plurality of fluids having different temperatures to the filter, and a fluid supply means for sequentially supplying a plurality of fluids having different temperatures to the filter. Supplying the same kind of processing liquid as the processing liquid to be filtered by the filter to the filter in the state, and supplying the same kind of liquid to the filter by the same kind of liquid supply means for washing away foreign substances adhering to the filter. drain pipe and the including, a substrate processing apparatus for discharging the treating solution from said housing.   The substrate processing apparatus according to claim 1, wherein the fluid supply unit includes a heat generation fluid supply unit that sequentially supplies a plurality of fluids that generate heat when mixed to the filter. The allogeneic liquid supply means, the process liquid to be filtered by said filter is recovered from the interior of the housing, the recovered treatment solution containing recovering solution supplying means for supplying the interior of the housing, in claim 1 or 2 The substrate processing apparatus as described. The substrate processing apparatus further includes a heating unit that heats the processing liquid flowing through the upstream pipe,
The fluid supply means recovers the processing liquid supplied into the housing from the upstream pipe, and supplies the recovered processing liquid as a heating fluid into the housing; and the heating fluid cold cooling fluid and a cooling fluid supplying means for supplying to the interior of the housing, the substrate processing apparatus according to any one of claims 1 to 3 than. The substrate processing apparatus according to claim 4 , wherein the heating fluid supply unit includes a discharge unit that discharges a processing liquid toward the filter. A circulation step for circulating the processing liquid supplied to the substrate in an annular circulation path including the inside of the housing;
An interruption step of interrupting the circulation of the treatment liquid in the circulation path;
After the interruption step is performed, the cleaning step of changing the temperature of the filter to reduce the binding force of foreign matter to the filter;
After the washing step is performed, see contains a resumption step resuming the circulation of the processing solution in the circulation path,
The washing step includes
A fluid supply step of sequentially supplying a plurality of fluids having different temperatures to the filter, which is held in the housing inside the housing and filters the processing liquid supplied to the inside of the housing;
After the fluid supply step, supply the same kind of treatment liquid as the treatment liquid to be filtered by the filter to the filter, and the same kind of liquid supply step for washing away foreign substances adhering to the filter;
After said homologous liquid supplying step, including a drainage step of discharging the processing liquid supplied to the filter in the same type liquid supplying step from the housing, the filter cleaning process. The filter cleaning method according to claim 6 , wherein the fluid supply step includes a heating fluid supply step of sequentially supplying a plurality of fluids that generate heat when mixed to the filter. The filter cleaning according to claim 6 or 7 , wherein the same-type liquid supply step includes a recovery liquid supply step of recovering the processing liquid supplied into the housing and supplying the recovered processing liquid into the housing. Method. The fluid supply step includes
A heating fluid supply step that is heated by a heating means, collects the processing liquid supplied to the inside of the housing, and supplies the recovered processing liquid to the inside of the housing as a heating fluid;
Wherein at least one of before and after heating the fluid supply step is performed, the including a heating fluid temperature cooling fluid than the cooling fluid supplying step of supplying the interior of the housing, in any one of claims 6-8 The filter cleaning method as described. The filter cleaning method according to claim 9 , wherein the heating fluid supply step includes a discharge step of discharging a processing liquid toward the filter. Before the cleaning step is performed and after the interruption step, the processing liquid is discharged from the inside of the housing, and the filter held in the housing is exposed from the processing liquid. The filter cleaning method according to any one of claims 6 to 10 , further comprising a step. A housing that is fitted with a filter for filtering liquid, and that holds the attached filter inside;
A heating fluid supply means for sequentially supplying a plurality of fluids that generate heat by mixing to the filter is changed, and the temperature of the filter attached to the housing is changed to reduce the binding force of foreign matter to the filter. And a cleaning means. The filter cleaning device according to claim 12 , wherein the heating fluid supply means generates heat by mixing and sequentially supplies a plurality of fluids having different temperatures to the filter. The cleaning unit sequentially supplies a plurality of fluids that generate heat when the exothermic fluid supply unit is mixed to the filter, and then supplies liquid to the filter held in the housing, The filter cleaning device according to claim 12 or 13 , further comprising a liquid supply means for washing off the adhering foreign matter. A housing that is fitted with a filter for filtering liquid, and that holds the attached filter inside;
Fluid supply means for changing the temperature of the filter in a state attached to the housing by sequentially supplying a plurality of fluids having different temperatures to the filter, thereby reducing the binding force of foreign matter to the filter;
After the fluid supply means sequentially supplies a plurality of fluids having different temperatures to the filter, the same kind of liquid as the liquid to be filtered by the filter is supplied to the filter so that the fluid is held in the housing. A filter cleaning apparatus, comprising: a same-type liquid supply unit that supplies liquid to the filter to wash away foreign matters adhering to the filter.

Images