JP6011408B2 - 電子装置の製造方法 - Google Patents
電子装置の製造方法 Download PDFInfo
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- H01L24/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L24/39—Structure, shape, material or disposition of the strap connectors after the connecting process
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- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
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- H01L2924/1304—Transistor
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Description
電子部品として、ワイヤパッドの表面が、Niめっき層(211)を下地とするAuめっき層(212)よりなるものを用意する用意工程と、はんだランドにはんだを配置し、はんだ上に接合部材を搭載した状態ではんだをリフローさせることにより、接合部材をはんだ付けするはんだ付け工程と、はんだ付け工程の後、ワイヤボンディングを行ってワイヤパッドにワイヤを接合するワイヤボンディング工程と、ワイヤボンディング工程の後、電子部品を加熱する加熱工程と、を備え、
はんだ付け工程の前に、用意された電子部品を加熱することにより、ワイヤパッドにおいてAuめっき層の表面にNiめっき層からNiを拡散させるNi拡散工程を行うことを特徴とする。
本発明の第1実施形態にかかる電子装置S1について、図1、図2を参照して述べる。この電子装置S1は、たとえば自動車などの車両に搭載され、車両用の各種装置の駆動、制御等を行うための装置として適用されるものである。
なお、電子部品20としては、Alワイヤ40がワイヤボンディングされるワイヤパッド21と、はんだランド22とを両備するものであればよく、上記パワーチップ20に限定されるものではない。たとえば、その他、電子部品としては、各種の表面実装部品、回路基板、各種のセンサチップ等であってもよい。
20 電子部品としてのパワーチップ
21 ワイヤパッド
22 はんだランド
40 ボンディングワイヤ
50 接合部材としてのターミナル
70 はんだ
211 ワイヤパッドのNiめっき層
212 ワイヤパッドのAuめっき層
Claims (3)
- ワイヤボンド用のワイヤパッド(21)およびはんだ付け用のはんだランド(22)を有する電子部品(20)と、
前記ワイヤパッドにワイヤボンディングされたアルミニウムよりなるワイヤ(40)と、
前記はんだランドにSnを含むはんだ(70)を介してはんだ付けされた接合部材(50)と、を備える電子装置の製造方法であって、
前記電子部品として、前記ワイヤパッドの表面が、Niめっき層(211)を下地とするAuめっき層(212)よりなるものを用意する用意工程と、
前記はんだランドに前記はんだを配置し、前記はんだ上に前記接合部材を搭載した状態で前記はんだをリフローさせることにより、前記接合部材をはんだ付けするはんだ付け工程と、
前記はんだ付け工程の後、ワイヤボンディングを行って前記ワイヤパッドに前記ワイヤを接合するワイヤボンディング工程と、
前記ワイヤボンディング工程の後、前記電子部品を加熱する加熱工程と、を備え、
前記はんだ付け工程の前に、前記用意された前記電子部品を加熱することにより、前記ワイヤパッドにおいて前記Auめっき層の表面に前記Niめっき層からNiを拡散させるNi拡散工程を行うことを特徴とする電子装置の製造方法。 - 前記はんだ付け工程では、前記はんだは、フラックスを含むはんだペーストとして、前記はんだランドに配置することを特徴とする請求項1に記載の電子装置の製造方法。
- 前記用意工程では、前記電子部品として、前記はんだランドの表面も、前記ワイヤパッドと同一の表面構成を有する、Niめっき層(221)を下地とするAuめっき層(222)よりなるものを用意することを特徴とする請求項1または2に記載の電子装置の製造方法。
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JP6011408B2 true JP6011408B2 (ja) | 2016-10-19 |
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Cited By (1)
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US9528905B2 (en) | 2012-09-14 | 2016-12-27 | Advanced Scientifics, Inc. | Test system and method for flexible containers |
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JP3675407B2 (ja) * | 2001-06-06 | 2005-07-27 | 株式会社デンソー | 電子装置 |
JP5384913B2 (ja) * | 2008-11-18 | 2014-01-08 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
JP2015109334A (ja) * | 2013-12-04 | 2015-06-11 | 株式会社デンソー | 半導体装置 |
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US9528905B2 (en) | 2012-09-14 | 2016-12-27 | Advanced Scientifics, Inc. | Test system and method for flexible containers |
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