JP6004446B2 - 多層マイクロ流体プローブ・ヘッド及びその製造方法 - Google Patents
多層マイクロ流体プローブ・ヘッド及びその製造方法 Download PDFInfo
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- JP6004446B2 JP6004446B2 JP2013535547A JP2013535547A JP6004446B2 JP 6004446 B2 JP6004446 B2 JP 6004446B2 JP 2013535547 A JP2013535547 A JP 2013535547A JP 2013535547 A JP2013535547 A JP 2013535547A JP 6004446 B2 JP6004446 B2 JP 6004446B2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03B—MACHINES OR ENGINES FOR LIQUIDS
- F03B11/00—Parts or details not provided for in, or of interest apart from, the preceding groups, e.g. wear-protection couplings, between turbine and generator
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502776—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for focusing or laminating flows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0636—Focussing flows, e.g. to laminate flows
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0673—Handling of plugs of fluid surrounded by immiscible fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/06—Fluid handling related problems
- B01L2200/0694—Creating chemical gradients in a fluid
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2200/00—Solutions for specific problems relating to chemical or physical laboratory apparatus
- B01L2200/12—Specific details about manufacturing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/20—Hydro energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
Description
例えば、DRIEを使用して、カバー層110内に1つ以上のビアを形成すること。
例えば、DRIEによって、基層120内に1つ以上のマイクロチャネルを形成すること。
110・・・カバー層
111、112・・・ビア
120・・・基層
130・・・追加の層
121、122・・・処理液アパーチャ
123、124・・・処理液マイクロチャネル
124、124'・・・グルーブ
181、182・・・管ポート
221、222、321、322・・・浸液アパーチャ
223、224、324、424・・・浸液マイクロチャネル
310・・・エッジ
401、402・・・加熱素子
Claims (13)
- 基層を有するマイクロ流体プローブ・ヘッドであって、
前記基層の一端面上の処理液アパーチャと流体連結する処理液マイクロチャネルと、
前記基層の一端面上の浸液アパーチャと流体連結する浸液マイクロチャネルを備え、
前記マイクロ流体プローブ・ヘッドは、作動中、前記処理液アパーチャから供給される処理液が、前記浸液マイクロチャネルを通して前記浸液アパーチャから供給される浸液と混合することができるように構成される、マイクロ流体プローブ・ヘッド。 - 前記処理液マイクロチャネル及び前記浸液マイクロチャネルの各々は、それぞれ、前記基層の上面と平行し、1つ以上の面上で開放されている、請求項1に記載のマイクロ流体プローブ・ヘッド。
- 前記処理液マイクロチャネルの少なくとも一部は、前記基層の上面上で開放されているグルーブであり、前記浸液マイクロチャネルの少なくとも一部は、追加の層の下面によって閉じることができるように、前記基層の前記上面上で開放されている、請求項1に記載のマイクロ流体プローブ・ヘッド。
- 追加のカバー層をさらに備え、
前記処理液マイクロチャネル及び前記浸液マイクロチャネルの少なくとも一部は、前記ヘッドの1つの層の下面の一部によって閉じられる、請求項3に記載のマイクロ流体プローブ・ヘッド。 - 前記処理液マイクロチャネル及び前記浸液マイクロチャネルの各々は、前記基層の上面と前記基層の一端面上のそれぞれのアパーチャとの間で流体連結を可能にする、請求項4に記載のマイクロ流体プローブ・ヘッド。
- 前記カバー層の上面から延びる管ポートをさらに備え、
前記カバー層は、前記管ポートと前記カバー層の下面との間の流体連結を可能にするビアを有し、前記マイクロ流体プローブ・ヘッドは、前記ビアと1つ以上の前記マイクロチャネルとの間の流体連結を可能にするように構成される、請求項5に記載のマイクロ流体プローブ・ヘッド。 - 前記処理液マイクロチャネルの少なくとも一部は、前記処理液アパーチャまで延びるグルーブであり、前記処理液アパーチャは、前記基層の上面のエッジのレベルにおいて前記グルーブの一端に配置される、請求項1ないし請求項6の何れか1項に記載のマイクロ流体プローブ・ヘッド。
- 前記処理液マイクロチャネル及び/又は前記浸液マイクロチャネルは、前記マイクロチャネルに沿って特性が連続的に変化するよう構成されている、請求項1ないし請求項7の何れか1項に記載のマイクロ流体プローブ・ヘッド。
- 1つ以上の前記マイクロチャネルを加熱するのに適した加熱素子をさらに備える、請求項1ないし請求項8の何れか1項に記載のマイクロ流体プローブ・ヘッド。
- 前記基層の一端面上の第2の処理液アパーチャと流体連結する第2の処理液マイクロチャネルと、
前記基層の一端面上の第2の浸液アパーチャと流体連結する第2の浸液マイクロチャネルをさらに備え、
前記マイクロ流体プローブ・ヘッドは、作動中、前記第2の処理液アパーチャにおいて、前記第2の処理液アパーチャとは別のいずれか1つ以上のアパーチャを通して注入された流体を吸引することを可能にするように構成される、請求項1ないし請求項9の何れか1項に記載のマイクロ流体プローブ・ヘッド。 - 前記基層の一端面上の第2の浸液アパーチャとそれぞれ流体連結する第2の浸液マイクロチャネルとをさらに備え、
前記マイクロ流体プローブ・ヘッドは、作動中、前記浸液アパーチャを通して供給される浸液が、前記第2の浸液アパーチャを通して供給される浸液と混合することができるように構成される、請求項1ないし請求項9の何れか1項に記載のマイクロ流体プローブ・ヘッド。 - 前記マイクロ流体プローブ・ヘッドは、前記処理液アパーチャを通して提供され且つ前記浸液アパーチャを通して供給される浸液と混合する処理液が、実質的に層流であるように構成される、請求項1ないし請求項9の何れか1項に記載のマイクロ流体プローブ・ヘッド。
- 前記基層を提供するステップと、
前記基層内に前記マイクロチャネル及び前記アパーチャを製造するステップと
を有する、請求項1ないし請求項12の何れか1項に記載のマイクロ流体プローブ・ヘッドの製造方法。
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EP10189469.9 | 2010-10-29 | ||
EP10189469 | 2010-10-29 | ||
PCT/IB2011/054614 WO2012056369A1 (en) | 2010-10-29 | 2011-10-18 | Multilayer microfluidic probe head with immersion channels and fabrication thereof |
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JP6004446B2 true JP6004446B2 (ja) | 2016-10-05 |
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JP (1) | JP6004446B2 (ja) |
CN (1) | CN103140283B (ja) |
DE (1) | DE112011103579T5 (ja) |
GB (1) | GB2499933B (ja) |
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2011
- 2011-08-05 TW TW100128041A patent/TWI532530B/zh active
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- 2011-10-18 WO PCT/IB2011/054614 patent/WO2012056369A1/en active Application Filing
- 2011-10-18 CN CN201180047792.2A patent/CN103140283B/zh active Active
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CN103140283B (zh) | 2015-10-07 |
CN103140283A (zh) | 2013-06-05 |
WO2012056369A1 (en) | 2012-05-03 |
GB201308835D0 (en) | 2013-07-03 |
US9745949B2 (en) | 2017-08-29 |
GB2499933B (en) | 2017-03-08 |
TWI532530B (zh) | 2016-05-11 |
TW201233443A (en) | 2012-08-16 |
DE112011103579T5 (de) | 2013-08-08 |
GB2499933A (en) | 2013-09-04 |
US20130333761A1 (en) | 2013-12-19 |
JP2013543971A (ja) | 2013-12-09 |
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