JP5996566B2 - ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 - Google Patents

ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 Download PDF

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JP5996566B2
JP5996566B2 JP2014024950A JP2014024950A JP5996566B2 JP 5996566 B2 JP5996566 B2 JP 5996566B2 JP 2014024950 A JP2014024950 A JP 2014024950A JP 2014024950 A JP2014024950 A JP 2014024950A JP 5996566 B2 JP5996566 B2 JP 5996566B2
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workpiece
holding
chuck
adhesive
holding member
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JP2015153837A (ja
JP2015153837A5 (cg-RX-API-DMAC10.html
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義和 大谷
義和 大谷
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Shin-Etsu Engineering Co Ltd
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Shin-Etsu Engineering Co Ltd
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JP2014024950A 2014-02-12 2014-02-12 ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法 Active JP5996566B2 (ja)

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JP2014024950A JP5996566B2 (ja) 2014-02-12 2014-02-12 ワーク用チャック装置及びワーク貼り合わせ機並びにワーク貼り合わせ方法

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JP2015153837A JP2015153837A (ja) 2015-08-24
JP2015153837A5 JP2015153837A5 (cg-RX-API-DMAC10.html) 2016-07-07
JP5996566B2 true JP5996566B2 (ja) 2016-09-21

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Families Citing this family (10)

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Publication number Priority date Publication date Assignee Title
JP6955202B2 (ja) * 2017-09-04 2021-10-27 日本電気硝子株式会社 膜付き基板の製造方法
US11458635B2 (en) * 2018-05-09 2022-10-04 Intelligrated Headquarters, Llc Method and system for manipulating articles
US11318620B2 (en) 2018-05-09 2022-05-03 Intelligrated Headquarters, Llc Method and system for manipulating items
US10822177B2 (en) 2018-05-09 2020-11-03 Intelligrated Headquarters, Llc Method and system for manipulating articles
US20220143838A1 (en) * 2019-02-28 2022-05-12 Nitto Denko Corporation Adherent device, transfer equipment using the same, and transfer method
KR20220158168A (ko) * 2021-05-21 2022-11-30 삼성디스플레이 주식회사 윈도우 이송 방법 및 이를 이용한 윈도우 제조 방법
JP7738814B2 (ja) * 2021-09-21 2025-09-16 ヤマハロボティクス株式会社 チップ保持具、チップ保持装置、および半導体装置の製造装置
TWI904415B (zh) * 2023-03-06 2025-11-11 日商雅馬哈智能機器股份有限公司 晶片保持具、晶片保持裝置和半導體裝置的製造裝置
CN116728763B (zh) * 2023-05-24 2026-01-02 四川旭虹光电科技有限公司 基于清洗后联线覆膜的自动生产线
WO2025121081A1 (ja) * 2023-12-04 2025-06-12 株式会社クリエイティブテクノロジー ワーク保持装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387439A (ja) * 1986-09-29 1988-04-18 Hitachi Ltd 板状体の保持装置
JP4690572B2 (ja) * 2000-11-30 2011-06-01 キヤノンアネルバ株式会社 基板重ね合わせ装置
JP4030038B2 (ja) * 2001-08-21 2008-01-09 株式会社村田製作所 通気性ワーク取り出し・保持装置及び通気性ワークの取り扱い方法
PL1685930T3 (pl) * 2003-11-21 2009-06-30 Mitsuboshi Diamond Ind Co Ltd Próżniowa głowica ssąca oraz próżniowe urządzenie ssące i stół do ich stosowania
DE202007007721U1 (de) * 2007-05-31 2007-09-13 Jonas & Redmann Automationstechnik Gmbh Greifer, insbesondere Bernoulli-Greifer
DE102009010164A1 (de) * 2009-02-23 2010-09-02 Grenzebach Maschinenbau Gmbh Vorrichtung und Verfahren zum berührungslosen Erfassen von Glasplatten
JP2012030941A (ja) * 2010-07-30 2012-02-16 Japan Finetech Co Ltd ワーク搬送装置及びワーク搬送方法

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