JP5991024B2 - Mirror device, optical scanner and image forming apparatus - Google Patents

Description

  The present invention relates to a mirror device, an optical scanner, and an image forming apparatus.

For example, Patent Document 1 discloses an optical scanner that scans light two-dimensionally as an optical scanner for performing drawing by optical scanning with a projector, a printer, or the like.
The optical scanner described in Patent Document 1 includes a frame-shaped drive member and a pair of first shaft members that support the drive member at both ends so that the drive member can rotate (swing) around the X axis. The movable plate is used as the drive member so that the movable plate can be rotated around the Y axis orthogonal to the X axis. A second vibration system composed of a pair of second shaft members that are supported at both ends, a permanent magnet provided on the driving member, a coil provided so as to face the permanent magnet, and a voltage applied to the coil Drive means including a voltage application means for applying a voltage, and a spacer interposed between the drive member and the permanent magnet so as to form a space for preventing interference (contact) with the movable plate. The permanent magnet is provided such that a line segment connecting both poles is inclined with respect to the X axis and the Y axis in a plan view of the movable plate. In this optical scanner, a voltage having a frequency equal to the torsional resonance frequency around the Y axis of the second vibration system is applied to the coil to rotate the movable plate.
However, in the optical scanner described in Patent Literature 1, the rigidity of the driving member is insufficient, and a deformation mode in which the driving member is deformed at a frequency near the torsional resonance frequency occurs during the driving of the optical scanner. There is a problem that the behavior of the movable plate becomes strange.

JP 2008-216920 A

  An object of the present invention is to provide a mirror device, an optical scanner, and an image forming apparatus capable of appropriately swinging a movable plate around two different axes.

Such an object is achieved by the present invention described below.
A mirror device of the present invention includes a light reflecting portion having light reflectivity, and a movable plate that can swing around a first axis;
A first shaft member connected to both ends of the movable plate in the direction along the first axis;
A frame-shaped member that surrounds the movable plate, is connected to the first shaft member, and can swing around a second axis having a direction different from that of the first shaft;
A second shaft member connected to both ends of the frame-shaped member in a direction along the second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid body portion provided continuously or intermittently annularly on the frame-shaped member,
The rigid body part has at least one pair of end faces facing each other, and the pair of end faces constitutes a guide part that regulates the position of the permanent magnet,
At least a part of the permanent magnet is disposed in the guide portion.
Accordingly, it is possible to prevent or suppress the occurrence of a deformation mode in which the frame-shaped member is deformed at a frequency near the torsional resonance frequency around the first axis of the vibration system including the movable plate and the first shaft member. The movable plate can be appropriately swung around the first axis and the second axis.

In the mirror device according to the aspect of the invention, it is preferable that the guide portion is provided at a portion of the rigid body portion that is located on an extension line of the first shaft of the frame-shaped member.
Thereby, the permanent magnet is disposed in the vicinity of the connection portion between the frame-shaped member and the first shaft member, and the rigidity in the vicinity of the connection portion can be improved, so that even when the deformation mode occurs, It is possible to prevent the vibration of the frame-shaped member from being transmitted to the movable plate.

In the mirror device of the present invention, the permanent magnet has a portion overlapping the movable plate in plan view,
It is preferable that a concave portion is provided on a portion of the permanent magnet on the movable plate side that overlaps the movable plate.
Thereby, a collision with a permanent magnet and a movable plate can be prevented, and a movable plate can be rocked reliably.
In the mirror device according to the aspect of the invention, it is preferable that the rigidity of the rigid body portion is higher than that of the frame-shaped member.
Thereby, generation | occurrence | production of the said deformation | transformation mode can be prevented or suppressed more reliably.

In the mirror device of the present invention, it is preferable that the rigidity of at least the portion of the permanent magnet disposed in the guide portion is higher than that of the frame-shaped member.
Thereby, generation | occurrence | production of the said deformation | transformation mode can be prevented or suppressed more reliably.
In the mirror device of the present invention, it is preferable that the rigidity of at least the portion of the permanent magnet disposed in the guide portion is higher than that of the rigid portion.
Thereby, generation | occurrence | production of the said deformation | transformation mode can be prevented or suppressed more reliably.
In the mirror device of the present invention, it is preferable that one magnetic pole and the other magnetic pole have a permanent magnet disposed on the movable plate with the first shaft interposed therebetween.
Thereby, the movable plate can be reliably swung around the first axis and the second axis.

An optical scanner of the present invention includes a light reflecting portion having light reflectivity, and a movable plate that can swing around a first axis;
A first shaft member connected to both ends of the movable plate in the direction along the first axis;
A frame-shaped member that surrounds the movable plate, is connected to the first shaft member, and can swing around a second axis having a direction different from that of the first shaft;
A second shaft member connected to both ends of the frame-shaped member in a direction along the second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid body portion that is continuously or intermittently provided annularly on the frame-shaped member;
A coil that is arranged opposite to the frame-like member and generates a magnetic field that acts on the permanent magnet by application of a voltage;
Voltage application means for applying a voltage to the coil,
The rigid body part has at least one pair of end faces facing each other, and the pair of end faces constitutes a guide part that regulates the position of the permanent magnet,
At least a part of the permanent magnet is disposed in the guide portion.
As a result, it is possible to prevent the occurrence of a deformation mode in which the frame-shaped member is deformed at a frequency near the torsional resonance frequency around the first axis of the vibration system including the movable plate and the first shaft member. The plate can be properly swung around the first axis and the second axis.

An image forming apparatus of the present invention includes a light source that emits light,
An optical scanner that scans the light from the light source,
The optical scanner is
A movable plate provided with a light reflecting portion having light reflectivity and swingable about a first axis;
A first shaft member connected to both ends of the movable plate in the direction along the first axis;
A frame-shaped member that surrounds the movable plate, is connected to the first shaft member, and can swing around a second axis having a direction different from that of the first shaft;
A second shaft member connected to both ends of the frame-shaped member in a direction along the second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid body portion that is continuously or intermittently provided annularly on the frame-shaped member;
A coil that is arranged opposite to the frame-like member and generates a magnetic field that acts on the permanent magnet by application of a voltage;
Voltage application means for applying a voltage to the coil,
The rigid body part has at least one pair of end faces facing each other, and the pair of end faces constitutes a guide part that regulates the position of the permanent magnet,
At least a part of the permanent magnet is disposed in the guide portion.
As a result, it is possible to prevent the occurrence of a deformation mode in which the frame-shaped member is deformed at a frequency near the torsional resonance frequency around the first axis of the vibration system including the movable plate and the first shaft member. The plate can be properly swung around the first axis and the second axis.

It is a top view which shows 1st Embodiment of the optical scanner of this invention. It is a bottom view of the optical scanner shown in FIG. It is the sectional view on the AA line of FIG. It is a block diagram which shows the voltage application means of the drive means with which the optical scanner shown in FIG. 1 is provided. FIG. 5 is a diagram illustrating an example of voltages generated in a first voltage generation unit and a second voltage generation unit illustrated in FIG. 4. It is a bottom view which shows the movable plate, each shaft member, a frame-shaped member, a rigid body part, and each permanent magnet in 2nd Embodiment of the optical scanner of this invention. It is a bottom view which shows the movable plate, each shaft member, a frame-shaped member, a rigid body part, and a permanent magnet in 3rd Embodiment of the optical scanner of this invention. It is a side view which shows the permanent magnet of the optical scanner shown in FIG. 1 is a diagram schematically showing an embodiment of an image forming apparatus of the present invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of a mirror device, an optical scanner, and an image forming apparatus of the invention will be described with reference to the accompanying drawings. In the following embodiment, a case where the mirror device of the present invention is applied to an optical scanner will be described as a representative example.
<First Embodiment>
FIG. 1 is a plan view showing a first embodiment of the optical scanner of the present invention, FIG. 2 is a bottom view of the optical scanner shown in FIG. 1, FIG. 3 is a cross-sectional view taken along line AA in FIG. FIG. 5 is a block diagram showing voltage applying means of driving means included in the optical scanner shown in FIG. 1, and FIG. 5 is a diagram showing an example of voltages generated in the first voltage generating section and the second voltage generating section shown in FIG. It is. In the following, for convenience of explanation, the right side in FIGS. 1 and 2 is referred to as “right”, the left side is referred to as “left”, the upper side in FIG. 3 is “upper”, the lower side is “lower”, and the right side is “ "Right", the left side is called "left".

  As shown in FIGS. 1 to 3, the optical scanner 10 includes a mirror device 1, a holder 17, a coil 30, and a voltage applying unit 40 that applies a voltage to the coil 30. The mirror device 1 includes a movable plate 11 including a movable plate main body 110 and a light reflecting portion 12 having light reflectivity, a pair of shaft members (first shaft members) 13a and 13b, a frame-shaped member 14, and a frame. A rigid body portion 5 provided on the shaped member 14, a pair of shaft members (second shaft members) 15a and 15b, a support frame 16, and a pair of permanent magnets (second permanent magnets) 20a and 20b. And a permanent magnet (first permanent magnet) 20c. The light reflecting portion 12 is provided on the upper surface of the movable plate main body 110.

  The permanent magnet 20c, the movable plate 11, the shaft members 13a and 13b, the permanent magnets 20a and 20b, the frame-like member 14, the rigid body portion 5, and the shaft members 15a and 15b are combined with the shaft members 15a and 15b (first). 2 shaft member) as the rotation axis, and the permanent magnet 20c, the movable plate 11, and the shaft members 13a and 13b include the shaft members 13a and 13b (first shaft member). A first vibration system having the rotation axis as the rotation axis is configured.

The frame-like member 14 is supported on the support frame 16 by shaft members 15a and 15b. The movable plate 11 is disposed inside the frame-shaped member 14 and supported by the frame-shaped member 14 by shaft members 13a and 13b. That is, the frame-shaped member 14 surrounds the movable plate 11. The support frame 16 is supported by the holder 17.
The shape of the movable plate 11 is circular in a plan view in the illustrated configuration, but is not limited thereto, and may be, for example, a polygon such as an ellipse or a rectangle in a plan view. The shape of the frame-shaped member 14 is not particularly limited as long as it is a frame shape in the illustrated configuration, but is not particularly limited as long as it is a frame shape. Other polygons, such as an ellipse and a pentagon, may be sufficient.

The shaft members 13a and 13b and the shaft members 15a and 15b can be elastically deformed, respectively. The shaft members 15a and 15b connect the frame-shaped member 14 and the support frame 16 so that the frame-shaped member 14 can rotate (swing) around the X axis (second axis) shown in FIG. . In this case, the shaft members 15 a and 15 b are connected to both ends of the frame-shaped member 14 in the direction along the X axis, and support the frame-shaped member 14 on both sides of the support frame 16. Further, the shaft members 13a and 13b connect the movable plate 11 and the frame-like member 14 so that the movable plate 11 can be rotated (swinged) around the Y axis (first axis) shown in FIG. Yes. In this case, the shaft members 13 a and 13 b are connected to both ends of the movable plate 11 in the direction along the Y axis, and support the movable plate 11 on both sides of the frame-like member 14. Note that the X axis and the Y axis are orthogonal to each other. Further, the center of the frame-shaped member 14 and the center of the movable plate 11 are located on the intersection of the X axis and the Y axis in plan view. The axis lines of the shaft members 15a and 15b coincide with the X axis, and the axis lines of the shaft members 13a and 13b coincide with the Y axis.
By making the frame-like member 14 rotatable about the X axis and allowing the movable plate 11 to rotate about the Y axis, the movable plate 11 can be rotated about two axes orthogonal to the X axis and the Y axis. Can do.

  The movable plate 11, the shaft members 13a and 13b, the frame member 14, the shaft members 15a and 15b, and the support frame 16 are integrally formed with, for example, silicon as a main material. By using silicon as a main material, it is possible to realize excellent rotation characteristics and to exhibit excellent durability. Further, fine processing (processing) is possible, and the optical scanner 10 can be downsized. These may be formed using a substrate having a laminated structure such as an SOI substrate. In this case, the movable plate 11, the shaft members 13a and 13b, the frame member 14, the shaft members 15a and 15b, and the support frame 16 are used. Are preferably formed of one layer of a laminated substrate.

The holder 17 is made of, for example, glass or silicon as a main material. The shape of the holder 17 is a concave shape in the configuration shown in the figure and is a quadrangle in plan view, but is not particularly limited as long as the support frame 16 can be supported. The joining method of the support frame 16 and the holder 17 is not specifically limited, For example, you may join using an adhesive agent and may join by anodic bonding. Further, for example, a SiO ₂ layer composed of SiO ₂ as a main material may be interposed between the support frame 16 and the holder 17.

A rigid portion 5 is provided on the lower surface of the frame-like member 14 (the surface facing the holder 17). The rigid body portion 5 is provided in an annular shape continuously or intermittently. In the present embodiment, the rigid body portion 5 is intermittently provided in an annular shape, and has an intermittent quadrangular frame shape in plan view. Needless to say, the shape of the rigid portion 5 is not limited to a quadrangle.
Specifically, the rigid body portion 5 includes a pair of ribs 51a and 51b arranged so as to be separated from each other. The rib 51a includes a main body part 511a extending along the X axis, a protruding part 512a extending along the Y axis from one end part of the main body part 511a, and the other end part. Projecting portion 513a projecting in the Y-axis direction and extending along the Y-axis. The rib 51b has the same shape as the rib 51a, and includes a main body portion 511b and projecting portions 512b and 513b.

  The rib 51a and the rib 51b are opposed to each other with the end surface 514a of the protruding portion 512a and the end surface 515a of the protruding portion 513a, the end surface 514b of the protruding portion 512b and the end surface 515b of the protruding portion 513b spaced apart from each other by a predetermined distance. Are arranged to be. A longitudinal permanent magnet 20a described later is disposed between the end surface 514a and the end surface 514b, and a longitudinal permanent magnet 20b described below is disposed between the end surface 515a and the end surface 515b. In this case, the position of the permanent magnet 20a is regulated by the end surface 514a and the end surface 514b. Therefore, the end surface 514a and the end surface 514b constitute a guide portion that regulates the position of the permanent magnet 20a. Further, the position of the permanent magnet 20b is regulated by the end face 515a and the end face 515b. Therefore, the end surface 515a and the end surface 515b constitute a guide portion that regulates the position of the permanent magnet 20b.

Thus, the annular body is comprised by the rigid part 5 and permanent magnet 20a, 20b. The rigid portion 5 and the permanent magnets 20a and 20b improve the rigidity of the frame-shaped member 14, and the deformation mode (hereinafter referred to as “deformation mode”) in which the frame-shaped member 14 is deformed at a frequency near the torsional resonance frequency around the Y axis of the first vibration system. (Also simply referred to as “deformation mode”) can be prevented or suppressed, whereby the movable plate 11 can be appropriately rotated around the X axis and the Y axis.
Further, since the permanent magnets 20a and 20b are arranged not in the lower surface of the rigid body portion 5 but in the gap between the rib 51a and the rib 51b, compared with the case where the permanent magnets 20a and 20b are arranged on the lower surface of the rigid body portion 5, The moment of inertia with the shaft members 15a and 15b as the rotation axis can be reduced, and the movable plate 11 can be easily rotated around the X axis.

Here, it is preferable that the rigidity of the ribs 51 a and 51 b, that is, the rigid body portion 5 is higher than that of the frame-shaped member 14. Thereby, generation | occurrence | production of a deformation | transformation mode can be prevented or suppressed more reliably.
In order to make the rigidity of the rigid body part 5 higher than that of the frame-shaped member 14, for example, the thickness d1 of the rigid body part 5 is made thicker than the thickness d2 of the frame-shaped member 14, or as a constituent material of the rigid body part 5 A material having a Young's modulus higher than that of the constituent material of the frame member 14 is used.

Further, the ratio d1 / d2 between the thickness d1 of the rigid body portion 5 and the thickness d2 of the frame-shaped member 14 is not particularly limited and is appropriately set according to various conditions, but is 2 or more and 10 or less. It is preferable that it is 3 or more and 8 or less.
Further, the thickness d1 of the rigid body portion 5 is not particularly limited and is appropriately set according to various conditions, but is preferably 50 μm or more and 600 μm or less, and more preferably 100 μm or more and 400 μm or less. .
The thickness d2 of the frame-shaped member 14 is not particularly limited and is appropriately set according to various conditions, but is preferably 10 μm or more and 100 μm or less, and more preferably 20 μm or more and 80 μm or less. preferable.

In addition, the rigidity of the permanent magnets 20 a and 20 b is preferably higher than that of the frame-shaped member 14. Thereby, generation | occurrence | production of a deformation | transformation mode can be prevented or suppressed more reliably.
In order to make the rigidity of the permanent magnets 20a, 20b higher than that of the frame member 14, for example, the thickness d3 of the permanent magnets 20a, 20b is made thicker than the thickness d2 of the frame member 14, or the permanent magnet 20a. 20b, a material having a Young's modulus higher than that of the frame member 14 is used.

Further, the ratio d3 / d2 between the thickness d3 of the permanent magnets 20a and 20b and the thickness d2 of the frame-like member 14 is not particularly limited and is appropriately set according to various conditions. Or less, more preferably 3 or more and 8 or less.
Further, the thickness d3 of the permanent magnets 20a and 20b is not particularly limited and is appropriately set according to various conditions, but is preferably 60 μm or more and 700 μm or less, and preferably 150 μm or more and 400 μm or less. More preferred.

Further, the rigidity of the permanent magnets 20a and 20b is preferably equal to or higher than that of the rigid body part 5, and more preferably higher than that of the rigid body part 5. Thereby, generation | occurrence | production of a deformation | transformation mode can be prevented or suppressed more reliably.
In order to make the rigidity of the permanent magnets 20a and 20b higher than that of the rigid body portion 5, for example, the thickness d3 of the permanent magnets 20a and 20b is made thicker than the thickness d1 of the rigid body portion 5, or the permanent magnets 20a and 20b. As the constituent material, a material having a Young's modulus higher than that of the constituent material of the rigid portion 5 is used.
In addition, the ratio d3 / d1 between the thickness d3 of the permanent magnets 20a and 20b and the thickness d1 of the rigid body portion 5 is not particularly limited, and is appropriately set according to various conditions. Preferably, it is 1.5 or more and 4 or less, more preferably 2 or more and 4 or less.

In addition, although the constituent material of the rigid part 5 is not specifically limited, For example, the rigid part 5 can be comprised by using silicon as a main material. The joining method of the rigid body part 5 and the frame-shaped member 14 is not particularly limited, and may be joined using, for example, an adhesive or may be joined by anodic joining. Further, for example, an SiO ₂ layer composed of SiO ₂ as a main material may be interposed between the rigid portion 5 and the frame-like member 14. The rigid portion 5 is formed using, for example, a substrate having a laminated structure such as an SOI substrate together with the movable plate 11, the shaft members 13a and 13b, the frame member 14, the shaft members 15a and 15b, and the support frame 16. May be.

  A pair of permanent magnets 20a and 20b are provided on the lower surface of the frame-like member 14 (the surface facing the holder 17), and the lower surface of the movable plate 11 (the surface opposite to the light reflecting portion 12). A permanent magnet 20c is provided. In addition, the joining method of permanent magnet 20a, 20b and the frame-shaped member 14, and the joining method of permanent magnet 20c and the movable plate 11 are not specifically limited, respectively, For example, it can join using an adhesive agent. A coil 30 that generates a magnetic field that acts on the permanent magnets 20a, 20b, and 20c is provided on the upper surface of the holder 17. The coil 30 is electrically connected to the voltage applying means 40. The permanent magnets 20a, 20b, 20c, the coil 30, and the voltage applying means 40 constitute driving means for rotating the movable plate 11 and the frame-like member 14.

  Each of the permanent magnets 20a and 20b has a longitudinal shape, which is a plate-like and straight bar shape in the illustrated configuration, and is magnetized in the longitudinal direction. In other words, the direction of the line segment connecting the south pole and the north pole of the permanent magnet 20a coincides with the longitudinal direction of the permanent magnet 20a. In other words, the line segment connecting the S pole and the N pole of the permanent magnet 20a coincides with the axis of the permanent magnet 20a. The same applies to the permanent magnet 20b.

  The permanent magnet 20a is disposed on the left side of the Y axis, that is, between the end surfaces 514a and 514b, and the permanent magnet 20b is disposed on the right side of the Y axis, that is, between the end surfaces 515a and 515b. The permanent magnets 20a and 20b are arranged such that both poles sandwich the X axis. That is, the permanent magnets 20a and 20b are arranged so that both end portions (each magnetic pole) are located in two regions divided by the X axis. And permanent magnet 20a, 20b is arrange | positioned so that the axis line may respectively orthogonally cross with respect to an X-axis. Thereby, the movable plate 11 can be smoothly and reliably rotated around the X axis, and the rotation angle of the movable plate 11 around the X axis can be increased. Moreover, it can prevent or suppress that composite stress arises in the shaft members 15a and 15b.

In addition, each shape of the permanent magnets 20a and 20b is not limited to a longitudinal shape.
Further, the permanent magnet 20c has a longitudinal shape, which is a plate-like and straight bar shape in the illustrated configuration, and is magnetized in the longitudinal direction. That is, the direction of the line segment connecting the south pole and the north pole of the permanent magnet 20c coincides with the longitudinal direction of the permanent magnet 20c. In other words, the line segment connecting the south pole and the north pole of the permanent magnet 20c coincides with the axis of the permanent magnet 20c.

The permanent magnet 20c is arranged such that both poles sandwich the Y axis. And the permanent magnet 20c is arrange | positioned so that the axis line may incline with respect to an X-axis and a Y-axis. Further, the permanent magnet 20c is arranged such that both poles sandwich the X axis. That is, the permanent magnet 20c is arranged so that each end (magnetic pole) is located in two regions divided by the X axis, and is located in two regions divided by the Y axis. Has been placed. Since the axis of the permanent magnet 20c is inclined with respect to the Y axis, the axis of the permanent magnet 20c is not orthogonal to the axes of the permanent magnet 20a and the permanent magnet 20b. The magnetic body, the hard magnetic body before magnetization for the permanent magnet 20b, and the hard magnetic body before magnetization for the permanent magnet 20c are installed on the frame member 14 and the movable plate 11, respectively. Magnetization can be performed reliably.
The shape of the permanent magnet 20c is not limited to the longitudinal shape.

  Moreover, the angle (inclination angle of the axis of the permanent magnet 20c with respect to the Y axis) θ1 formed by the Y axis, that is, the axis of the shaft members 13a and 13b and the axis of the permanent magnet 20c is not particularly limited, but is 30 ° or more and 60 °. It is preferably below, more preferably 45 ° to 60 °, and even more preferably 45 °. By providing the permanent magnet 20c in this manner, the movable plate 11 can be smoothly and reliably rotated around the Y axis, and the magnetization can be reliably performed. On the other hand, if the inclination angle θ1 is less than the lower limit value, the movable plate 11 is sufficiently rotated around the Y axis depending on various conditions such as the strength of the voltage applied to the coil 30 by the voltage applying means 40. It may not be possible. On the other hand, when the inclination angle θ1 exceeds the upper limit, depending on various conditions, the hard magnetic body before magnetization is magnetized at the same time in a state where the hard magnetic body is installed on the frame-like member 14 and the movable plate 11, and becomes permanent. When the magnets 20a, 20b, and 20c are used, it may not be possible to sufficiently magnetize them. Further, when the other permanent magnet 20c is magnetized after the permanent magnets 20a and 20b are magnetized, or when the permanent magnets 20a and 20b are magnetized after the permanent magnet 20c is magnetized, the magnets are magnetized. Since a large force is applied to the magnetized permanent magnet by the magnetic field, and the shaft member is broken, there is a case where the magnetizing cannot be performed.

Further, the permanent magnets 20a and 20b are arranged so as to be line-symmetric with respect to the X axis, that is, the axis of the shaft members 15a and 15b, respectively, in plan view. Further, the permanent magnet 20a and the permanent magnet 20b are arranged so as to be line-symmetric with respect to the Y axis, that is, the axis of the shaft members 13a and 13b, thereby smoothly moving the movable plate 11 around the X axis. It can be rotated.
Further, the permanent magnet 20 c is arranged so that the center thereof coincides with the center of the movable plate 11 in plan view. And the permanent magnet 20c is arrange | positioned so that it may become point symmetrical with respect to the center of the movable plate 11 by planar view. Thereby, the movable plate 11 can be smoothly rotated around the X axis and the Y axis.

  In this embodiment, the permanent magnets 20a and 20b are provided on the lower surface of the frame-like member 14 (the surface facing the holder 17). It may be provided on the upper surface (the surface on the side where the light reflecting portion 12 is provided), or may be provided on both the lower surface and the upper surface of the frame-shaped member 14. Similarly, the permanent magnet 20 b may be provided on the upper surface of the frame-shaped member 14, or may be provided on both the lower surface and the upper surface of the frame-shaped member 14. When the permanent magnet 20a is provided on the upper surface of the frame member 14, the permanent magnet 20b is also preferably provided on the upper surface of the frame member 14, and the permanent magnet 20a is provided between the lower surface and the upper surface of the frame member 14. When provided on both sides, it is preferable that the permanent magnets 20b are also provided on both the lower surface and the upper surface of the frame-shaped member 14.

As the permanent magnets 20a, 20b, and 20c, for example, magnets that are magnetized with hard magnetic materials such as neodymium magnets, ferrite magnets, samarium cobalt magnets, alnico magnets, and bond magnets can be suitably used. Further, when magnetizing the hard magnetic material to make the permanent magnets 20 a, 20 b, 20 c, magnetization is performed after the hard magnetic material before magnetization is installed on the frame-shaped member 14 and the movable plate 11. If the magnets already magnetized and become permanent magnets 20a, 20b, 20c are to be installed on the frame-like member 14 and the movable plate 11, the permanent magnets 20a, 20b, 20c are placed on the frame-like member 14 and the movable plate 11 respectively. When arranged, any two or three of the permanent magnets 20a, 20b, and 20c are attracted by a magnetic force, and the structure of the frame-shaped member 14 and the movable plate 11 is broken by the force, or the permanent magnet 20a. This is because any two or three of 20b, 20c are attracted and the permanent magnets 20a, 20b, 20c cannot be installed.
In the optical scanner 10, since the axes of the permanent magnets 20a and 20b and the axis of the permanent magnet 20c are not orthogonal to each other, the magnetization can be reliably performed.

  A coil 30 is provided immediately below the permanent magnets 20a, 20b, and 20c. That is, the coil 30 is provided so as to face the lower surface of the movable plate 11 and the frame-like member 14. Thereby, the magnetic field generated from the coil 30 can be efficiently applied to the permanent magnets 20a, 20b, and 20c. Thereby, power saving and size reduction of the optical scanner 10 can be achieved.

The coil 30 is electrically connected to the voltage applying means 40. Then, when a voltage is applied to the coil 30 by the voltage applying means 40, a magnetic field having a magnetic flux orthogonal to the X axis and the Y axis is generated from the coil 30. The coil 30 may be wound around a magnetic core.
As shown in FIG. 4, the voltage applying means 40 includes a first voltage generator 41 that generates a first voltage V1 for rotating the movable plate 11 around the X axis, and a movable plate 11 around the Y axis. A second voltage generator 42 for generating a second voltage V2 for rotating the first voltage V2, and a voltage superimposing unit for superimposing the first voltage V1 and the second voltage V2 and applying the voltage to the coil 30. 43.

As shown in FIG. 5A, the first voltage generator 41 generates a first voltage V1 (vertical scanning voltage) that periodically changes at a period T1.
The first voltage V1 has a waveform like a sawtooth wave. Therefore, the optical scanner 10 can effectively perform vertical scanning (sub-scanning) of light. Note that the waveform of the first voltage V1 is not limited to this. Here, the frequency (1 / T1) of the first voltage V1 is not particularly limited as long as it is a frequency suitable for vertical scanning, but is preferably 30 to 120 Hz (about 60 Hz).
In the present embodiment, the frequency of the first voltage V1 includes the permanent magnet 20c, the movable plate 11, the shaft members 13a and 13b, the permanent magnets 20a and 20b, the frame member 14, the rigid body portion 5, and the shaft. The frequency is adjusted to be different from the torsional resonance frequency (resonance frequency) of the second vibration system constituted by the members 15a and 15b.

On the other hand, as shown in FIG. 5B, the second voltage generator 42 generates a second voltage V2 (horizontal scanning voltage) that periodically changes at a period T2 different from the period T1. .
The second voltage V2 has a waveform like a sine wave. Therefore, the optical scanner 10 can effectively perform main scanning with light. Note that the waveform of the second voltage V2 is not limited to this.
The frequency of the second voltage V2 (second frequency) is preferably larger than the frequency of the first voltage V1 (first frequency). That is, the period T2 is preferably shorter than the period T1. Thereby, it is possible to rotate the movable plate 11 around the Y axis at the second frequency while rotating the movable plate 11 around the X axis at a second frequency more reliably and smoothly.

  The second frequency is not particularly limited as long as it is different from the first frequency and is suitable for horizontal scanning, but is preferably 10 to 40 kHz. As described above, the frequency of the second voltage V2 is set to 10 to 40 kHz, and the frequency of the first voltage V1 is set to about 60 Hz as described above, so that the movable plate 11 can be moved at a frequency suitable for drawing on the display. It can be rotated around each of two axes (X axis and Y axis) orthogonal to each other. However, the combination of the frequency of the first voltage V1 and the frequency of the second voltage V2 is not particularly limited as long as the movable plate 11 can be rotated around each of the X axis and the Y axis.

  In the present embodiment, the second frequency is the torsional resonance frequency (first torsional resonance frequency of the first vibration system having the shaft members 13a and 13b composed of the permanent magnet 20c, the movable plate 11 and the shaft members 13a and 13b as the rotation shaft ( It is set to be equal to f2). That is, the first vibration system is designed (manufactured) so that its torsional resonance frequency f2 is a frequency suitable for horizontal scanning. Thereby, the rotation angle of the movable plate 11 around the Y axis can be increased. The first frequency is composed of the permanent magnet 20c, the movable plate 11, the shaft members 13a and 13b, the permanent magnets 20a and 20b, the frame member 14, the rigid body portion 5, and the shaft members 15a and 15b. It is desirable that it is 1/10 or less of the torsional resonance frequency (f1) of the second vibration system with the shaft members 15a, 15b being used as rotation axes. In order to drive the second vibration system in a non-resonant state (amplitude gain is 1), the first frequency needs to be set to 1/10 or less of f1. This is because driving at a frequency greater than 1/10 may cause resonance of the second vibration system.

  The second frequency is preferably set to 10 times or more of the first frequency in order to drive the second vibration system in a non-resonant state (amplitude gain is 1). If the second frequency is less than 10 times the first frequency, when the second voltage V2 is applied to the coil 30, the second vibration system also rotates, causing crosstalk of the drive signal. End up. As described above, since the first frequency is desirably one tenth or less of f1, it is desirable that the second frequency is higher than the first frequency from these relationships.

  Further, when the torsional resonance frequency of the second vibration system is f1 [Hz] and the torsional resonance frequency of the first vibration system is f2 [Hz], f1 and f2 satisfy the relationship of f2> f1. Is preferable, and it is more preferable to satisfy the relationship of f2 ≧ 10f1. As a result, the movable plate 11 can be rotated more smoothly around the Y axis at the frequency of the second voltage V2 while being rotated at the frequency of the first voltage V1. When f2 ≦ f1, there is a possibility that the first vibration system vibrates at the first frequency.

The first voltage generation unit 41 and the second voltage generation unit 42 are connected to the control unit 7 and driven based on signals from the control unit 7. A voltage superimposing unit 43 is connected to the first voltage generating unit 41 and the second voltage generating unit 42 as described above.
The voltage superimposing unit 43 includes an adder 43 a for applying a voltage to the coil 30. The adder 43 a receives the first voltage V <b> 1 from the first voltage generator 41 and receives the second voltage V <b> 2 from the second voltage generator 42, and superimposes and applies these voltages to the coil 30. It has become.

  Next, a method for driving the optical scanner 10 will be described. In the present embodiment, as described above, the frequency of the first voltage V1 is set to a value different from the torsional resonance frequency of the second vibration system, and the frequency of the second voltage V2 is the first value. Is set to be equal to and greater than the frequency of the first voltage V1 (for example, the frequency of the first voltage V1 is 60 Hz and the frequency of the second voltage V2). Is 15 kHz).

For example, the first voltage V 1 as shown in FIG. 5A and the second voltage V 2 as shown in FIG. 5B are superimposed by the voltage superimposing unit 43, and the superimposed voltage is applied to the coil 30. Apply.
Then, the vicinity of the junction between the frame member 14 and the N pole of the permanent magnets 20a and 20b and the vicinity of the junction between the movable plate 11 and the N pole of the permanent magnet 20c are attracted to the coil 30 by the first voltage V1. In addition, a magnetic field (in the vicinity of the junction between the frame member 14 and the south pole of the permanent magnets 20a and 20b and the junction between the movable plate 11 and the south pole of the permanent magnet 20c is separated from the coil 30). This magnetic field is referred to as “magnetic field A1”) and the vicinity of the junction between the frame-shaped member 14 and the N pole of the permanent magnets 20a and 20b and the vicinity of the junction between the movable plate 11 and the N pole of the permanent magnet 20c from the coil 30. While trying to be separated from each other, the coil 30 tries to attract the vicinity of the joint between the frame member 14 and the south pole of the permanent magnets 20a and 20b and the joint between the movable plate 11 and the south pole of the permanent magnet 20c to the coil 30. Magnetism (This magnetic field referred to as "magnetic field A2") are switched alternately.

Here, as described above, the permanent magnets 20a and 20b are arranged so that their respective end portions (magnetic poles) are located in two regions divided by the X axis. That is, in plan view, the N pole of the permanent magnet 20a is located on one side of the X axis and the S pole is located on the other side. Therefore, by alternately switching between the magnetic field A1 and the magnetic field A2, the frame member 14 and the movable plate 11 rotate around the X axis at the frequency of the first voltage V1 while twisting and deforming the shaft members 15a and 15b. Move.
In this optical scanner 10, since the permanent magnets 20a and 20b are arranged so that the axes thereof are orthogonal to the X axis, the combined stress generated in the shaft members 15a and 15b is reduced or the combined stress is reduced. Generation | occurrence | production can be prevented and the rotation angle around the X-axis of the movable plate 11 can be enlarged.

  Further, the frequency of the first voltage V1 is set to be extremely low compared to the frequency of the second voltage V2. The torsional resonance frequency of the second vibration system is designed to be lower than the torsional resonance frequency of the first vibration system (for example, 1/10 or less of the torsional resonance frequency of the first vibration system). That is, since the second vibration system is designed to vibrate more easily than the first vibration system, the frame-shaped member 14 rotates around the X axis by the first voltage V1. That is, it is possible to prevent the frame-like member 14 from rotating around the X axis by the second voltage V2.

  On the other hand, the second voltage V2 tries to attract the coil 30 near the junction between the frame member 14 and the N pole of the permanent magnet 20a and the junction between the movable plate 11 and the N pole of the permanent magnet 20c. In addition, a magnetic field (this magnetic field is referred to as “ And the vicinity of the junction between the frame member 14 and the north pole of the permanent magnet 20a and the vicinity of the junction between the movable plate 11 and the north pole of the permanent magnet 20c. In addition, a magnetic field (this magnetic field is referred to as “magnetic field B2”) that attracts the coil 30 near the junction between the frame member 14 and the south pole of the permanent magnet 20a and the junction between the movable plate 11 and the south pole of the permanent magnet 20c. ") There switched alternately.

Here, as described above, the permanent magnet 20c is arranged such that each end (magnetic pole) is located in two regions divided by the Y axis. That is, in plan view, the N pole of the permanent magnet 20c is located on one side of the Y axis and the S pole is located on the other side. Therefore, by alternately switching the magnetic field B1 and the magnetic field B2, the movable plate 11 rotates around the Y axis at the frequency of the second voltage V2 while twisting and deforming the shaft members 13a and 13b.
The frequency of the second voltage V2 is equal to the torsional resonance frequency of the first vibration system. Therefore, the movable plate 11 can be rotated around the Y axis by the second voltage V2. That is, it is possible to prevent the movable plate 11 from rotating around the Y axis by the first voltage V1.

As described above, according to the present embodiment, by applying a voltage obtained by superimposing the first voltage V1 and the second voltage V2 to the coil 30, the movable plate 11 is moved around the X axis in the first direction. While rotating at the frequency of the voltage V1, it is possible to rotate at the frequency of the second voltage V2 around the Y axis. As a result, the cost and size of the apparatus can be reduced, and the movable plate 11 can be rotated around the X axis and the Y axis. Moreover, since the permanent magnets 20a, 20b, and 20c are provided even though the configuration is simple and small, a large driving force can be obtained even if the number of coils is small. As a result, the scanning angle of the vibration system can be increased and high-speed scanning is also possible.
And since the rigid body part 5 is provided in the frame-shaped member 14, the generation | occurrence | production of the deformation | transformation mode which the frame-shaped member 14 deform | transforms with the frequency vicinity of the torsional resonance frequency around the Y-axis of a 1st vibration system is prevented or suppressed. The movable plate 11 can be appropriately rotated around the X axis and the Y axis.

In addition, by appropriately changing the first voltage V1 and the second voltage V2, desired vibration characteristics can be obtained without changing the structures of the second vibration system and the first vibration system.
Further, the optical scanner 10 is provided with permanent magnets 20a and 20b on the frame-like member 14, a permanent magnet 20c is provided on the movable plate 11, and a coil 30 is provided on the holder 17 so as to face the permanent magnets 20a, 20b and 20c. ing. That is, the coil 30 that is a heating element is not provided on the second vibration system and the first vibration system. Therefore, it is possible to prevent or suppress the vibration system from being bent and the resonance frequency from being changed due to heat generated from the coil 30 by energization. As a result, the optical scanner 10 can exhibit desired vibration characteristics even when used continuously for a long time.

In the present embodiment, among the permanent magnets 20a, 20b, and 20c, the axis of the permanent magnet c is arranged so as to be inclined with respect to the Y axis. It is sufficient that at least one of the axes of the permanent magnets 20a and 20b is inclined with respect to the Y axis. For example, only the axes of the permanent magnets 20a and 20b may be inclined with respect to the Y axis, and the permanent magnets 20a, 20b and 20c may be inclined with respect to the Y axis.
Moreover, in this embodiment, although permanent magnet 20a, 20b whole is arrange | positioned at the guide part, it is not restricted to this, A part of permanent magnet 20a, 20b may be arrange | positioned at the guide part.
Further, a portion having a small thickness (length in the vertical direction in FIG. 3) may be provided in the middle of the rigid body portion 5, and the end surface of the rigid body portion 5 at that portion may be used as the guide portion.

Second Embodiment
FIG. 6 is a bottom view showing the movable plate, the shaft members, the frame-shaped member, the rigid body portion, and the permanent magnets in the second embodiment of the optical scanner of the present invention. In the following, for convenience of explanation, the right side in FIG. 6 is referred to as “right” and the left side is referred to as “left”.
Hereinafter, the second embodiment will be described with a focus on the differences from the first embodiment described above, and the description of the same matters will be omitted.

  As shown in FIG. 6, in the optical scanner 10 of the second embodiment, the permanent magnet 20c is omitted. The movable plate 11, the shaft members 13a and 13b, the frame-shaped member 14, the rigid body portion 5, the shaft members 15a and 15b, and the permanent magnets 20a and 20b are combined with the shaft members 15a and 15b (second shaft). A second vibration system having a rotation shaft as a rotation member is configured, and the movable plate 11 and the shaft members 13a and 13b are first rotations having the rotation of the shaft members 13a and 13b (first shaft member) as the rotation shaft. The vibration system is configured.

The permanent magnets 20a and 20b are arranged such that their axis lines are inclined with respect to the X axis and the Y axis, respectively.
In addition, the angle formed by the X axis, that is, the axis of the shaft members 15a and 15b, and the axis of the permanent magnets 20a and 20b (inclination angle of the axis of the permanent magnets 20a and 20b with respect to the X axis) θ2 is not particularly limited. 30 ° or more and 60 ° or less, more preferably 45 ° or more and 60 ° or less, and even more preferably 45 °. By providing the permanent magnets 20a and 20b as described above, the movable plate 11 can be smoothly and reliably rotated around the X axis.

  The inclination angle θ2 of the permanent magnet 20a and the inclination angle θ2 of the permanent magnet 20b may be the same or different, but are set to be the same in this embodiment. That is, the permanent magnets 20a and 20b are arranged so that their axes are parallel to each other. In the present embodiment, the permanent magnets 20a and 20b are arranged so that the permanent magnet 20a and the permanent magnet 20b are point-symmetric with respect to the center of the frame member 14 (movable plate 11) in plan view. ing. Thereby, the movable plate 11 can be smoothly rotated around the X axis and the Y axis. Note that the N pole of the permanent magnet 20a and the S pole of the permanent magnet 20b are point symmetric, and the S pole of the permanent magnet 20a and the N pole of the permanent magnet 20b are point symmetric.

  Further, each of the permanent magnets 20a and 20b is such that one end (N extreme) of the permanent magnet 20a and one end (S extreme) of the permanent magnet 20b are the X axis, that is, the shaft members 15a and 15b. It arrange | positions so that it may become line symmetry with respect to an axis line. The permanent magnet 20a is arranged so that one end (N pole) is positioned on the Y axis, that is, the axis of the shaft members 13a and 13b. The permanent magnet 20b has one end (S pole). It arrange | positions so that it may be located on a Y-axis.

  Specifically, the permanent magnet 20a is arranged so that one end (N extreme) is positioned at the connecting portion of the frame member 14 of the shaft member 13a (the connecting portion of the shaft member 13a and the frame member 14). Has been. Similarly, the permanent magnet 20b is arranged so that one end (S extreme) is located at the connection portion of the shaft member 13b in the frame member 14 (connection portion of the shaft member 13b and the frame member 14). Yes. Thereby, the movable plate 11 can thereby be rotated around the X axis smoothly and reliably.

  The rigid body portion 5 includes ribs 52a, 52b, 52c, and 52d that are disposed so as to be separated from each other. The rib 52a has an extending part 521a extending along the X-axis, and an extending part 522a extending in the Y-axis direction from the left end of the extending part 521a in FIG. 6 and extending along the Y-axis. It consists of and. The rib 52b extends in the Y-axis direction from the extending portion 521b extending along the X-axis and the right end in FIG. 6 of the extending portion 521b, and extends along the Y-axis. Part 522b. Further, the rib 52c extends in the Y-axis direction from the extending portion 521c extending along the X-axis, and the right end in FIG. 6 of the extending portion 521c, and extends along the Y-axis. The unit 522c is configured. In addition, the rib 52d extends in the Y-axis direction from the extending portion 521d extending along the X-axis and the right end in FIG. 6 of the extending portion 521d, and extends along the Y-axis. Part 522d.

  Further, the rib 52a and the rib 52b are arranged so that the end surface 523a of the extending portion 521a and the end surface 523b of the extending portion 521b are spaced apart from each other by a predetermined distance. The rib 52c and the rib 52d are arranged such that the end surface 523c of the extending portion 521c and the end surface 523c of the extending portion 521c are opposed to each other with a predetermined distance therebetween. Further, the rib 52a and the rib 52c are arranged so that the end surface 524a of the extending portion 522a and the end surface 524c of the extending portion 522c are opposed to each other with a predetermined distance therebetween. Further, the rib 52b and the rib 52d are arranged such that the end surface 524b of the extending portion 522b and the end surface 524d of the extending portion 522d are opposed to each other with a predetermined distance therebetween. The end faces 523a, 524a, 523b, 524b, 523c, 524c, 523d, and 524d are inclined at the same angle as the inclination angle θ2 of the permanent magnets 20a and 20b, respectively.

One end portion (N extreme) of the permanent magnet 20a is disposed between the end surface 523a and the end surface 523b, and the other end portion (S extreme) of the permanent magnet 20a is disposed between the end surface 524a and the end surface 524c. Is arranged. Accordingly, the end surfaces 523a, 523b, 524a, and 524c constitute a guide portion that regulates the position of the permanent magnet 20a.
Further, one end (S extreme) of the permanent magnet 20b is disposed between the end surface 523c and the end surface 523d, and the other end (N extreme) of the permanent magnet 20b is disposed between the end surface 524b and the end surface 524d. Is arranged. Therefore, the end surfaces 523b, 523d, 524a, and 524d constitute a guide portion that regulates the position of the permanent magnet 20b.

  Thus, in the embodiment, the guide portion configured by the end surfaces 523a and 523b and the guide portion configured by the end surfaces 523c and 523d are respectively on the Y axis of the frame-shaped member 14 in the rigid body portion 5 (first It is provided at a position located on the extension line of the shaft. As a result, the end portions of the permanent magnets 20a and 20b are arranged in the vicinity of the connection portions of the frame-like member 14 with the shaft members 13a and 13b, and the rigidity in the vicinity of the connection portions can be improved. Even if it occurs, it is possible to prevent the vibration of the frame-shaped member 14 from being transmitted to the movable plate 11.

The rigidity of the permanent magnets 20a and 20b is preferably equal to or higher than that of the rigid body part 5, and more preferably higher than that of the rigid body part 5. In particular, it is preferable that the rigidity of a portion arranged in one end portion (N extreme) of the permanent magnet 20 a, that is, the guide portion constituted by the end faces 523 a and 523 b, is higher than that of the rigid portion 5. Similarly, it is preferable that the rigidity of the part arrange | positioned at the one edge part (S extreme) of the permanent magnet 20b, ie, the guide part comprised by the end surfaces 523c and 523d, is higher than the rigid part 5. FIG. Thereby, generation | occurrence | production of a deformation | transformation mode can be prevented or suppressed more reliably.
In the present embodiment, no permanent magnet is disposed on the movable plate 11, but the present invention is not limited to this, and a permanent magnet may be disposed on the movable plate 11.

<Third Embodiment>
FIG. 7 is a bottom view showing a movable plate, shaft members, a frame-like member, a rigid part, and a permanent magnet in a third embodiment of the optical scanner of the present invention. FIG. 8 shows the permanent magnet of the optical scanner shown in FIG. FIG. In the following, for convenience of explanation, the right side in FIGS. 7 and 8 is referred to as “right”, and the left side is referred to as “left”.
Hereinafter, the third embodiment will be described with a focus on differences from the first embodiment described above, and descriptions of the same matters will be omitted.

  As shown in FIGS. 7 and 8, in the optical scanner 10 of the third embodiment, a permanent magnet 20 is provided instead of the permanent magnets 20a, 20b, and 20c. The movable plate 11, the shaft members 13 a and 13 b, the frame member 14, the rigid body portion 5, the shaft members 15 a and 15 b, and the permanent magnet 20 form the shaft members 15 a and 15 b (second shaft). A second vibration system having a rotation shaft is configured, and the movable plate 11 and the shaft members 13a and 13b constitute a first vibration system having the shaft members 13a and 13b (first shaft) as the rotation shaft. Composed.

  The permanent magnet 20 is arranged such that both poles sandwich the X axis and the Y axis, respectively. In other words, the permanent magnet 20 is disposed so that both end portions (each magnetic pole) are located in two regions divided by the X axis and in two regions divided by the Y axis. That is, the permanent magnet 20 is arranged so that the center thereof coincides with the center of the movable plate 11 in plan view and the axis thereof is inclined with respect to the X axis and the Y axis.

  The angle formed by the X axis, that is, the axis of the shaft members 15a and 15b, and the axis of the permanent magnet 20 (inclination angle of the axis of the permanent magnet 20 with respect to the X axis) θ3 is not particularly limited, but is 30 ° to 60 ° It is preferable that it is 40 ° or more and 50 ° or less, more preferably 45 °. By providing the permanent magnet 20 in this manner, the movable plate 11 can be smoothly and reliably rotated around the X axis and the Y axis.

  Further, the permanent magnet 20 has a portion that overlaps the movable plate 11 in a plan view, and a concave portion 21 is provided at a portion that overlaps the movable plate 11 on the movable plate 11 side of the permanent magnet 20. . In this embodiment, the recessed part 21 is provided in the site | part between the both ends of the permanent magnet 20, ie, the site | part except both ends. Thereby, the collision with the permanent magnet 20 and the movable plate 11 can be prevented, and the movable plate 11 can be reliably rotated.

  The rigid body portion 5 is composed of ribs 53a and 53b arranged so as to be separated from each other. The rib 53a has an extending portion 531a extending along the X axis, and an extending portion 532a extending in the Y axis direction from the left end of the extending portion 531a in FIG. 7 and extending along the Y axis. It consists of and. Further, the rib 53b extends in the Y-axis direction from the extension 531b extending along the X-axis and the right end in FIG. 7 of the extension 531b, and extends along the Y-axis. Part 532b.

Further, the rib 53a and the rib 53b are such that the end surface 533a of the extending portion 531a and the end surface 524b of the extending portion 531b face each other with a predetermined distance therebetween, and the end surface 534a of the extending portion 532a and the extending portion 531b The end surface 533b is disposed so as to face each other with a predetermined distance. The end faces 533a, 534a, 533b, and 534b are inclined at the same angle as the inclination angle θ3 of the permanent magnet 20, respectively.
One end portion (N extreme) of the permanent magnet 20 is disposed between the end surface 533a and the end surface 534b, and the other end portion (S extreme) of the permanent magnet 20 is disposed between the end surface 534a and the end surface 533b. Is arranged. Accordingly, the end surfaces 533a, 534b, 533a, and 534b constitute a guide portion that regulates the position of the permanent magnet 20.

  Since the optical scanner 10 as described above includes the light reflecting section 12, for example, a laser printer, a barcode reader, a scanning confocal laser microscope, a projector, a head-up display (HUD), a head-mounted display (HMD) ) Can be suitably applied to an optical scanner provided in an image forming apparatus such as an imaging display. As a result, an image forming apparatus having excellent drawing characteristics can be provided.

<Embodiment of Image Forming Apparatus>
FIG. 9 is a diagram schematically showing an embodiment of the image forming apparatus of the present invention.
In this embodiment, a case where the optical scanner 10 is used as an optical scanner of an imaging display will be described as an example of an image forming apparatus. The longitudinal direction of the screen S is referred to as “lateral direction”, and the direction perpendicular to the longitudinal direction is referred to as “vertical direction”. Further, the X axis, that is, the rotation center axis X is parallel to the horizontal direction of the screen S, and the Y axis, that is, the rotation center axis Y is parallel to the vertical direction of the screen S.

The image forming apparatus (projector) 9 includes a light source device (light source) 91 that emits light such as a laser, a plurality of dichroic mirrors 92, 92, 92, and an optical scanner 10.
The light source device 91 includes a red light source device 911 that emits red light, a blue light source device 912 that emits blue light, and a green light source device 913 that emits green light.
Each dichroic mirror 92 is an optical element that combines light emitted from each of the red light source device 911, the blue light source device 912, and the green light source device 913.

  Such a projector 9 combines light emitted from the light source device 91 (red light source device 911, blue light source device 912, green light source device 913) by a dichroic mirror 92 based on image information from a host computer (not shown). The combined light is two-dimensionally scanned by the optical scanner 10 to form a color image on the screen S.

During the two-dimensional scanning, the light reflected by the light reflecting portion 12 by the rotation of the movable plate 11 of the optical scanner 10 around the rotation center axis Y is scanned (main scanning) in the horizontal direction of the screen S. On the other hand, the light reflected by the light reflecting portion 12 due to the rotation of the movable plate 11 of the optical scanner 10 about the rotation center axis X is scanned (sub-scanned) in the vertical direction of the screen S.
In FIG. 9, the light synthesized by the dichroic mirror 92 is scanned two-dimensionally by the optical scanner 10, and then the light is reflected by the fixed mirror K and then an image is formed on the screen S. However, the fixed mirror K may be omitted, and the screen S may be directly irradiated with light two-dimensionally scanned by the optical scanner 10.

Although the mirror device, the optical scanner, and the image forming apparatus of the present invention have been described based on the illustrated embodiment, the present invention is not limited to this. For example, in the mirror device, the optical scanner, and the image forming apparatus of the present invention, the configuration of each part can be replaced with an arbitrary configuration having the same function, and other arbitrary configurations can be added. it can.
Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

  DESCRIPTION OF SYMBOLS 1 ... Mirror device 10 ... Optical scanner 11 ... Movable plate 110 ... Movable plate main body 12 ... Light reflection part 13a, 13b ... Shaft member 14 ... Frame-shaped member 15a, 15b ... Shaft member 16 ... Support frame 17 ... Holder 5 ... Rigid body part 51a, 51b ... ribs 511a, 511b ... main body parts 512a, 513a, 512b, 513b ... projecting parts 514a, 514b, 515a, 515b ... end faces 52a, 52b, 52c, 52d ... ribs 521a, 522a, 521b, 522b, 521c, 522c 521d, 522d ... Extension part 523a, 524a, 523b, 524b, 523c, 524c, 523d, 524d ... End face 53a, 53b ... Rib 531a, 532a, 531b, 532b ... Extension part 533a, 534a, 533b, 534b ... End face 20, 20a 20b, 20c ... Permanent magnet 21 ... Concave 30 ... Coil 40 ... Voltage application means 41 ... First voltage generator 42 ... Second voltage generator 43 ... Voltage superposition unit 43a ... Adder 7 ... Control unit 9 ... Projector 91 ... Light source device 911 ... Red light source device 912 ... Blue light source device 913 ... Green light source device 92 ... Dichroic mirror K ... Fixed mirror S ... Screen

Claims (9)

A movable plate having a light reflecting portion having light reflectivity;
A first shaft member that supports the movable plate in a swingable manner around a first axis;
A frame-like member that is connected to the first shaft member and that surrounds the movable plate in plan view of the movable plate;
A second shaft member that slidably supports the frame-shaped member around a second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid portion provided on the frame-shaped member,
The rigid body portion is composed of at least a first rigid body portion and a second rigid body portion,
The permanent magnet is disposed between the first rigid body part and the second rigid body part ,
The mirror device , wherein the rigid body portion is provided annularly continuously or intermittently on the frame-like member . The mirror device according to claim 1, wherein an end of the permanent magnet is disposed on an extension line of the first axis. The permanent magnet overlaps the movable plate in a plan view of the movable plate,
3. The mirror device according to claim 1, wherein a concave portion is provided on a side of the permanent magnet on the movable plate side and overlapping the movable plate in a plan view of the movable plate.   4. The mirror device according to claim 1, wherein rigidity of the rigid body portion is higher than that of the frame-shaped member. The stiffness of the permanent magnet, the mirror device according to any of the four claims 1 higher than the frame-like member. The stiffness of the permanent magnet, the mirror device according to any one of 5 to higher claims 1 than the rigid body section. Mirror device according to any one of claims 1 to 6 one magnetic pole and the other magnetic pole having a permanent magnet disposed on the movable plate across said first axis. A movable plate having a light reflecting portion having light reflectivity;
A first shaft member that supports the movable plate in a swingable manner around a first axis;
A frame-like member that is connected to the first shaft member and that surrounds the movable plate in plan view of the movable plate;
A second shaft member that slidably supports the frame-shaped member around a second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid portion provided on the frame-shaped member;
A coil that is arranged opposite to the frame-like member and generates a magnetic field that acts on the permanent magnet by application of a voltage;
Voltage application means for applying a voltage to the coil,
The rigid body portion is composed of at least a first rigid body portion and a second rigid body portion,
The permanent magnet is disposed between the first rigid body part and the second rigid body part ,
The optical scanner according to claim 1, wherein the rigid body portion is continuously or intermittently provided on the frame-shaped member . A light source that emits light;
An optical scanner that scans the light from the light source,
The optical scanner is
A movable plate having a light reflecting portion having light reflectivity;
A first shaft member that supports the movable plate in a swingable manner around a first axis;
A frame-like member that is connected to the first shaft member and that surrounds the movable plate in plan view of the movable plate;
A second shaft member that slidably supports the frame-shaped member around a second axis;
A permanent magnet in which one magnetic pole and the other magnetic pole are disposed on the frame-shaped member with the second shaft interposed therebetween;
A rigid portion provided on the frame-shaped member;
A coil that is arranged opposite to the frame-like member and generates a magnetic field that acts on the permanent magnet by application of a voltage;
Voltage application means for applying a voltage to the coil,
The rigid body portion is composed of at least a first rigid body portion and a second rigid body portion,
The permanent magnet is disposed between the first rigid body part and the second rigid body part ,
The image forming apparatus according to claim 1, wherein the rigid body portion is continuously or intermittently provided on the frame-like member in an annular shape.

Images