JP2012128307A - Optical scanner, manufacturing method of optical scanner and image forming device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner capable of stably rotating a movable plate about each of two axes perpendicular to each other, and further to provide an image forming device.SOLUTION: Driving beams 43, 53, 63 and 73 coupled to a fixing section 13 mounted to a base 12 are connected to displacement sections 41, 51, 61 and 71, and a supporting member 23 for supporting a light reflecting member 20 is fixed to movable sections 201, 202, 203 and 204 disposed at other leading ends of movable beams 42, 52, 62 and 72 connected to the displacement sections 41, 51, 61 and 71. Hereby, an optical scanner 1 being capable of reducing distortion of individual movable beams 42, 52, 62 and 72 and individual driving beams 43, 53, 63 and 73 caused as a result that the fixing section 13 and the base 12 are stuck to each other and being stably driven while preventing breakage thereof can be obtained.

Description

  The present invention relates to an optical scanner, an optical scanner manufacturing method, and an image forming apparatus.

For example, as an optical scanner for performing drawing by optical scanning with a laser printer or the like, an optical scanner configured by a torsional vibrator and using an actuator is known (for example, see Patent Document 1).
Patent Document 1 discloses an actuator having an insulating substrate provided with a pair of permanent magnets and a scanner body supported by the insulating substrate so as to be positioned between the pair of permanent magnets. The scanner body includes a frame-shaped support portion, a frame-shaped outer movable plate provided inside the support portion, and an inner movable plate (mirror) provided inside the outer movable plate. . The outer movable plate is connected to the support portion via a pair of first torsion bars extending in the X-axis direction, and the inner movable plate is a second torsion extending in the Y-axis direction orthogonal to the X-axis direction. It is connected to the outer movable plate via a bar. The outer movable plate and the inner movable plate are each provided with a coil.

  In the actuator having such a configuration, by applying a magnetic field generated from each coil by energization and a magnetic field generated between a pair of permanent magnets, the outer movable plate and the inner movable plate are used as the central axis of the first torsion bar. The inner movable plate rotates about the Y axis about the second torsion bar as the central axis.

JP 2005-181395 A

  As described above, in the actuator of Patent Document 1, the mechanism for rotating the inner movable plate around the X axis is different from the mechanism for rotating around the Y axis. Therefore, the inner movable plate cannot be rotated around the X axis and the Y axis under the same conditions. In the actuator of Patent Document 1, the magnetic field generated from the coil provided on the outer movable plate interferes with the magnetic field generated from the coil provided on the inner movable plate, and the inner movable plate is moved along the X axis and the Y axis. It cannot be rotated independently about each axis. Therefore, the actuator of Patent Document 1 has a problem that the inner movable plate cannot be stably rotated around the X axis and the Y axis.

  It is an object of the present invention to stably rotate the movable plate around each of two axes orthogonal to each other, and to suppress the deviation between the movable plate and the rotating shaft, thereby realizing an accurate image. It is an object of the present invention to provide an optical scanner and an image forming apparatus.

  The present invention has been made to solve at least a part of the above problems. It can be realized by the following forms or application examples.

  Application Example 1 An optical scanner according to this application example includes a light reflecting member having a light reflecting surface, four movable parts that support the light reflecting member, and each of the four movable parts. One end is connected, extends substantially parallel to the surface direction of the light reflecting surface, and is provided at intervals of 90 degrees along the circumferential direction of the light reflecting member in a plan view of the light reflecting surface. A movable beam; a displacement portion connected to the other end of the movable beam connected to the movable portion; a permanent magnet fixed to the displacement portion; and the displacement portion in an extending direction of the movable beam. And a drive unit that drives the displacement unit in cooperation with the permanent magnet, one end of the drive unit is connected to the displacement unit, and is substantially orthogonal to the movable beam and the surface direction of the light reflecting surface A driving beam extending substantially in parallel to support the displacement portion, and the driving beam A fixed portion connected to the other end of the one end connected to the displacement portion; and a base to which the fixed portion is fixed; and the movable beam is substantially parallel to the surface direction of the light reflecting surface. It has a bending part that bends and deforms the movable beam in a vertical direction, and the light reflecting member and the four movable parts are fixed with an adhesive.

According to the optical scanner according to this application example, the driving beam connected to the fixed portion fixed to the base is connected to the displacement portion, and is disposed at the displacement portion of the movable beam connected to the displacement portion and the other tip. The light reflecting member is fixed to the movable portion, and the light reflecting member can be rotated and vibrated by a driving force acting between the displacement portion and the driving portion.
The rotation of the movable part around one of the two axes orthogonal to each other and the rotation of the movable part around the other axis can be performed independently. Therefore, it is possible to provide an optical scanner that can stably rotate the movable portion around each of two axes orthogonal to each other.
In addition, when the fixed part and the base are fixed, the displacement part and the movable beam are distorted due to stress through the driving beam connected to the fixed part. In some cases, the movable beam and the driving beam may be damaged. However, by adopting a structure that is fixed to the light reflecting member through the four movable parts, the stress of the movable beam and the driving beam can be relaxed, and the optical scanner that can be stably driven while preventing damage is provided. Obtainable.

  Application Example 2 In the optical scanner according to the application example described above, it is preferable that the light reflecting member is fixed to the movable portion in a state where the light reflecting member is not in contact with the movable beam.

  According to this optical scanner, since the light reflecting member does not contact the movable beam, the length of the movable beam does not change due to the light reflecting member contacting the movable beam. In addition, it is possible to obtain an optical scanner that can be stably operated by preventing the light reflecting member and the movable beam from being damaged due to the light reflecting member coming into contact with the movable beam.

  Application Example 3 The optical scanner according to the application example further includes a support member, the movable portion supports the light reflecting member via the support member, and the support member does not contact the movable beam. It is preferable that the light reflecting member and the movable part are fixed in a state.

  According to this optical scanner, since the support member does not contact the movable beam, the length of the movable beam is not changed. Further, it is possible to obtain an optical scanner that can be stably driven while preventing breakage.

  Application Example 4 In the optical scanner according to the application example described above, it is preferable that the support member has an engagement portion that engages with the shape of the movable portion.

  According to this optical scanner, the movable part and the support member can be easily aligned and fixed.

  Application Example 5 A manufacturing method of an optical scanner according to this application example includes a light reflecting member having a light reflecting surface, four movable parts supporting the light reflecting member, and movable parts of the four movable parts. One end of each of the light reflecting surfaces is connected to each other, extends substantially parallel to the surface direction of the light reflecting surface, and is provided at intervals of 90 degrees along the circumferential direction of the light reflecting member in a plan view of the light reflecting surface. Four movable beams, a displacement portion coupled to the other end of the one end connected to the movable portion of the movable beam, a permanent magnet fixed to the displacement portion, and an extending direction of the movable beam A drive unit that is disposed apart from the displacement unit and drives the displacement unit in cooperation with the permanent magnet, and one end of the drive unit is connected to the displacement unit, and is substantially orthogonal to the movable beam and the light reflecting surface A driving beam that extends substantially parallel to the surface direction of and supports the displacement portion; A fixed portion connected to the other end of the one end connected to the displacement portion of the drive beam, and a base to which the fixed portion is fixed, and the movable beam includes the light reflecting surface of the light reflecting surface. A method of manufacturing an optical scanner, comprising: a bent portion that bends and deforms the movable beam in a direction substantially perpendicular to a surface direction, wherein the light reflecting member and the movable portion are fixed with an adhesive. A step of manufacturing a vibration substrate including a movable portion, the movable beam, the displacement portion, the permanent magnet, the driving beam, and the fixing portion; a first fixing step of fixing the fixing portion to the base; And a second fixing step for fixing the light reflecting member to the four movable parts, and the second fixing step is performed after the first fixing step.

  According to the method for manufacturing an optical scanner according to this application example, an optical scanner including a light reflecting member can be manufactured. Although the movable beam and the driving beam are distorted by stress due to the fixing of the base and the fixed part, four movable parts are provided, and after the fixing process of the base and the fixed part, the support member is attached. By fixing to the movable part, it is possible to obtain an optical scanner including a light reflecting member that is stably driven while relaxing the stress.

  Application Example 6 In the manufacturing method of the optical scanner according to the application example, the vibration substrate surrounds the light reflecting member, the movable portion, the movable beam, the displacement portion, the driving beam, and the fixed portion. A support portion formed; and a separation portion that connects the fixing portion and the support portion; and the separation portion includes the fixing portion between the first fixing step and the second fixing step. The method further includes a separation step of separating the support portion.

  According to this method of manufacturing an optical scanner, an optical scanner having a light reflecting member from which a support portion is removed can be manufactured, so that the drive unit and the displacement unit can be arranged close to each other, realizing low power consumption and stable. A driving optical scanner can be obtained.

  Application Example 7 An image forming apparatus according to this application example includes a light source and a light scanner that scans light from the light source, and the light scanner includes a light reflection member having a light reflection surface, and the light. One end of each of the four movable parts that support the reflecting member and each of the four movable parts is connected to the movable part, and extends substantially parallel to the surface direction of the light reflecting surface. The four movable beams provided at intervals of 90 degrees along the circumferential direction of the light reflecting member in plan view, and a displacement coupled to the other end of the one end connected to the movable portion of the movable beam A permanent magnet fixed to the displacement portion, a drive portion that is disposed in the extending direction of the movable beam and is spaced apart from the displacement portion, and that drives the displacement portion in cooperation with the permanent magnet, and the displacement One end is connected to the part and is substantially orthogonal to the movable beam On the other hand, a driving beam that extends substantially parallel to the surface direction of the light reflecting surface and supports the displacement portion, and a fixed portion to which the other end of the one end connected to the displacement portion of the driving beam is connected. And a base on which the fixed portion is fixed, and the movable beam has a bent portion that bends and deforms the movable beam in a direction substantially perpendicular to the surface direction of the light reflecting surface. The reflecting member and the four movable parts are fixed through an adhesive.

  According to the image forming apparatus according to this application example, the driving beam connected to the fixed portion fixed to the base is connected to the displacement portion, and is arranged at the displacement portion of the movable beam connected to the displacement portion and the other tip. A support member that supports the light reflecting member is fixed to the movable portion, and the light reflecting member can be rotated and vibrated by a driving force that acts between the displacement portion and the driving portion. When the fixed part and the base are fixed, distortion due to stress occurs in the displacement part and the movable beam via the driving beam connected to the fixed part. The movable beam and the driving beam may be damaged. However, it is possible to obtain an image forming apparatus provided with an optical scanner that can relieve stress on the movable beam and the driving beam by adopting a structure that is fixed to the support member via a plurality of movable parts. Therefore, it is possible to obtain an image forming apparatus including an optical scanner that achieves power consumption and is driven stably.

1 is a schematic plan view showing an optical scanner according to a first embodiment. 1 is a cross-sectional view of an optical scanner according to a first embodiment. The perspective view of the connection part which the optical scanner concerning 1st Embodiment has. The figure explaining the displacement means which the optical scanner concerning 1st Embodiment has. FIG. 4 is a diagram for explaining driving of the optical scanner according to the first embodiment. FIG. 4 is a diagram for explaining driving of the optical scanner according to the first embodiment. FIG. 4 is a diagram for explaining driving of the optical scanner according to the first embodiment. FIG. 4 is a diagram for explaining driving of the optical scanner according to the first embodiment. Explanatory drawing which shows the shape of the supporting member of the optical scanner concerning 1st Embodiment. Explanatory drawing which shows the shape of the supporting member of the optical scanner concerning 1st Embodiment. 5 is a flowchart showing a method for manufacturing the optical scanner according to the first embodiment. FIG. 5 is a schematic process diagram illustrating a method for manufacturing the optical scanner according to the first embodiment. FIG. 5 is a schematic process diagram illustrating a method for manufacturing the optical scanner according to the first embodiment. The schematic plan view which shows the mirror chip concerning 2nd Embodiment. 9 is a flowchart showing a method for manufacturing an optical scanner according to a second embodiment. Schematic process drawing which shows the manufacturing method of the optical scanner concerning 2nd Embodiment. FIG. 10 is a schematic configuration diagram illustrating a projector according to a third embodiment.

  Hereinafter, an example of a preferred embodiment of the optical scanner and the image forming apparatus of the present invention will be described.

  Hereinafter, for convenience of explanation, the left side in the figure is referred to as “left”, the right side is referred to as “right”, the upper side in the figure is referred to as “upper”, and the lower side is referred to as “lower”. In addition, as shown in FIG. 1, the three axes orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis. A direction parallel to the X axis is referred to as “X axis direction”, a direction parallel to the Y axis is referred to as “Y axis direction”, and a direction parallel to the Z axis direction is referred to as “Z axis direction”. The surface of the movable part in the non-driven state and the surface formed by the X axis and the Y axis are parallel, and the thickness direction of the movable part and the Z axis direction coincide.

<First Embodiment>
An optical scanner according to a first embodiment relating to an optical scanner, an optical scanner manufacturing method, and an image forming apparatus will be described with reference to FIGS. 1 and 2.
FIG. 1 is a plan view showing the overall configuration of the optical scanner. 2 (a) is a cross-sectional view taken along the line AA in FIG. 1, and FIG. 2 (b) is a cross-sectional view taken along the line BB in FIG. ) Is a cross-sectional view taken along the line CC in FIG.
As shown in FIGS. 1 and 2, the optical scanner 1 includes a vibration substrate 11, a base 12, and a displacement means 8. The vibration substrate 11 includes four movable parts 201, 202, 203, and 204, a light reflecting member 20 supported by the movable parts 201, 202, 203, and 204, and four movable parts 201, 202, 203, and 204, respectively. Are provided with four connecting portions 4, 5, 6, and 7 and fixed portions 13 to which the connecting portions 4, 5, 6, and 7 are connected. The vibration substrate 11 is supported by the base 12. The movable parts 201, 202, 203, 204 are displaced by the displacement means 8. Hereinafter, each configuration of the optical scanner 1 will be sequentially described in detail.

(1-1. Vibration substrate 11)
In the first embodiment, the vibration substrate 11 excluding the light reflecting member 20 (that is, the movable parts 201, 202, 203, 204, the four fixed parts 13, and the four connecting parts 4, 5, 6, 7) is an SOI. The substrate is integrally formed by removing unnecessary portions of the substrate by various etching methods such as dry etching and wet etching.

The four fixing portions 13 are connected to the connecting portions 4 and 5, the connecting portions 5 and 6, the connecting portions 6 and 7, or the connecting portions 4 and 7, respectively. The four fixed portions 13 and the four connecting portions 4, 5, 6, 7 are provided so as to surround the periphery of the movable portions 201, 202, 203, 204. The XY plan view shape of the four fixing portions 13 is illustrated as a rectangle, but is not limited thereto, and may be a polygon such as a triangle or a square, a circle or an ellipse, for example. Moreover, although the shape of the four fixing | fixed part 13 was illustrated with the same magnitude | size and the same shape, respectively, it is not restricted to this, A shape can be determined suitably.
Each of the movable parts 201, 202, 203, 204 has a flat plate shape. The light reflecting member 20 is fixed to the movable parts 201, 202, 203, 204 via the support member 23. The light reflecting member 20 has a flat plate shape, and a light reflecting portion 22 having light reflectivity is formed on one surface (surface opposite to the base 12) 21 of the light reflecting member 20. Then, the light reflecting member 20 is supported by the movable parts 201, 202, 203, 204 by fixing the support member 23 to the four movable parts 201, 202, 203, 204 with an adhesive. The light reflecting portion 22 is obtained, for example, by forming a metal film such as gold, silver, or aluminum on the surface 21 by vapor deposition or the like. The surface of the light reflecting portion 22 that reflects light corresponds to the light reflecting surface.

In the first embodiment, the shape of the light reflecting member 20 in the XY plan view is circular, but the shape of the light reflecting member 20 in the XY plan view is not particularly limited. For example, the light reflecting member 20 has many shapes such as a triangle, a rectangle, and a square. It may be rectangular, elliptical, or the like.
Such a light reflecting member 20 is connected to the fixed part 13 by movable parts 201, 202, 203, 204 and connecting parts 4, 5, 6, 7 respectively. The four connecting portions 4, 5, 6, and 7 are arranged at equal intervals along the circumferential direction of the light reflecting member 20, that is, at 90 ° intervals, in a substantially XY plan view of the light reflecting member 20.

  Of the four connecting portions 4, 5, 6, and 7, the connecting portions 4 and 6 are opposed to the X-axis direction via the light reflecting member 20 and are formed symmetrically with respect to the light reflecting member 20. The connecting portions 5 and 7 are opposed to the Y-axis direction via the light reflecting member 20 and are formed symmetrically with respect to the light reflecting member 20. The light reflecting member 20 can be supported in a stable state by supporting the light reflecting member 20 by the movable portions 201, 202, 203, and 204 connected to the connecting portions 4, 5, 6, and 7. .

The four connecting portions 4, 5, 6, and 7 have the same configuration.
Specifically, the connecting portion (first connecting portion) 4 includes a movable portion 201, a displacement portion 41, a movable beam 42, and a pair of drive beams 43. The movable beam 42 connects the displacement part 41 and the movable part 201. The drive beam 43 connects the displacement part 41 and the fixed part 13.
The connecting portion (third connecting portion) 5 includes a movable portion 202, a displacement portion 51, a movable beam 52, and a pair of drive beams 53. The movable beam 52 connects the displacement portion 51 and the movable portion 202. The drive beam 53 connects the displacement portion 51 and the fixed portion 13.
Further, the connecting portion (second connecting portion) 6 includes a movable portion 203, a displacement portion 61, a movable beam 62, and a pair of drive beams 63. The movable beam 62 connects the displacement portion 61 and the movable portion 203. The drive beam 63 connects the displacement portion 61 and the fixed portion 13.
Similarly, the connecting portion (fourth connecting portion) 7 includes a movable portion 204, a displacement portion 71, a movable beam 72, and a pair of drive beams 73. The movable beam 72 connects the displacement portion 71 and the movable portion 204. The drive beam 73 connects the displacement portion 71 and the fixed portion 13.
The “similar configuration” means that the elements constituting the connecting portion are common. Therefore, it is not necessary for the outer shapes to match.
By configuring each of the connecting portions 4, 5, 6, and 7 as described above, the configuration of the connecting portion is simplified, and the light reflecting member 20 can be smoothly rotated about the rotation center axes X1 and Y1. It can be carried out.

  Hereinafter, the connecting portions 4, 5, 6, and 7 will be described in detail. Since the structures of the connecting portions 4, 5, 6, and 7 are similar to each other, the connecting portion 4 will be described as a representative. The description of the connecting portions 5, 6, and 7 is omitted. In addition, the connection parts 5 and 7 are arrange | positioned in the state rotated 90 degree | times with respect to the connection part 4 in XY planar view of the light reflection member 20. FIG. Therefore, the connecting portions 5 and 7 are described by setting the “Y-axis direction” in the description of the connecting portion 4 below as the “X-axis direction” and the “X-axis direction” as the “Y-axis direction”. You can also.

FIG. 3 is a perspective view showing the configuration of the connecting portion.
As shown in FIG. 3, the pair of drive beams 43 are disposed to face each other in the Y-axis direction via the displacement portion 41, and support the displacement portion 41 at both ends. Each of the pair of drive beams 43 has a rod shape extending in the Y-axis direction. Further, the pair of drive beams 43 can be twisted and deformed around the central axis of the drive beams 43. The pair of drive beams 43 are provided coaxially, and the pair of drive beams 43 are torsionally deformed and displaced around this axis (hereinafter also referred to as “rotation center axis Y2”). The part 41 rotates.

  The displacement part 41 is provided away from the movable part 201 in the X-axis direction. Further, the displacement portion 41 is supported at both ends by the pair of drive beams 43 as described above. An inner frame portion 411 is formed in such a displacement portion 41. The inner frame portion 411 is a through-hole penetrating the displacement portion 41 along the normal direction of the surface of the displacement portion 41 parallel to the light reflection surface of the light reflecting member 20. A permanent magnet 811 is inserted through the inner frame portion 411 and fixed. The permanent magnet 811 is fixed to the displacement portion 41 by, for example, fitting (press fitting) or an adhesive.

In addition, it does not specifically limit as a planar view shape of the displacement part 41, For example, a triangle, a square, a polygon more than a pentagon may be sufficient, and circular may be sufficient.
Such a displacement portion 41 is connected to the movable portion 201 by the movable beam 42. The movable beam 42 is provided so as to extend as a whole in the X-axis direction. Such a movable beam 42 includes a bent portion 421 provided between the displacement portion 41 and the movable portion 201, a movable portion side movable beam 422, and a displacement portion side movable beam 423. The movable portion side movable beam 422 connects the bent portion 421 and the movable portion 201, and the displacement portion side movable beam 423 connects the bent portion 421 and the displaced portion 41.
The movable part side movable beam 422 and the displacement part side movable beam 423 each have a bar shape extending in the X-axis direction. The movable part side movable beam 422 and the displacement part side movable beam 423 are provided coaxially.

Of these two shaft portions, the displacement portion side movable beam 423 is preferably set to a hardness that does not cause significant deformation when the optical scanner 1 is driven, and is set to a hardness that does not substantially deform. Is more preferable. On the other hand, the movable portion side movable beam 422 can be twisted and deformed around its central axis. As described above, the movable part 42 has a hard part that does not substantially deform and a torsionally deformable part located on the tip side thereof, so that the movable part 201 can be stabilized around the X axis and the Y axis. And can be rotated. The term “does not deform” means that bending or bending in the Z-axis direction and torsional deformation around the central axis do not occur substantially.
Such a movable part side movable beam 422 and the displacement part side movable beam 423 are connected via a bent part 421. The bending portion 421 relaxes (absorbs) a function that becomes a node when the movable beam 42 bends and deforms, and torque generated by torsional deformation of the movable portion side movable beam 422, and the torque is transferred to the displacement portion side movable beam. 423 has a function of preventing or suppressing transmission to 423.

As shown in FIG. 3, the bent portion 421 includes a pair of deformable portions 4211 and 4212, a non-deformed portion 4213 provided therebetween, and a pair of connection portions 4214 that connect the deformable portion 4211 to the non-deformed portion 4213. And a pair of connection portions 4215 that connect the deformation portion 4212 to the non-deformation portion 4213.
The non-deformable portion 4213 has a rod shape extending in the Y-axis direction. Such a non-deformation portion 4213 is set to a hardness that does not substantially deform when the optical scanner 1 is driven. As a result, the movable beam 42 can be bent around the rotation center axis Y4 of the non-deformable portion 4213, the function as a node can be surely exhibited in the bent portion 421, and the optical scanner 1 can be stably operated. It can be driven.

  A pair of deformed portions 4211 and 4212 are arranged symmetrically with respect to such a non-deformed portion 4213. The deformable portions 4211 and 4212 each have a rod shape extending in the Y-axis direction. Further, the deformable portions 4211 and 4212 are arranged in parallel with being spaced apart from each other in the X-axis direction. Each of the deforming portions 4211 and 4212 can be twisted and deformed around its central axis.

  The deformable part 4211 located on the movable part 201 side is connected to one end of the movable part side movable beam 422 at substantially the center in the longitudinal direction, and is not deformed via a pair of connection parts 4214 at both ends. It is connected to the portion 4213. Similarly, the deformation portion 4212 located on the displacement portion 41 side is connected to one end of the displacement portion-side movable beam 423 at substantially the center in the longitudinal direction, and at both ends via a pair of connection portions 4215. Are connected to the non-deformable portion 4213.

One connection portion of the pair of connection portions 4214 connects one end portions of the deformation portion 4211 and the non-deformation portion 4213, and the other connection portion connects the other end portions of the deformation portion 4211 and the non-deformation portion 4213. ing. In addition, one connection portion of the pair of connection portions 4215 connects one end portions of the deformation portion 4212 and the non-deformation portion 4213, and the other connection portion connects the other end portions of the deformation portion 4212 and the non-deformation portion 4213. It is connected.
Each of the connection parts 4214 and 4215 has a rod shape extending in the X-axis direction. Each of the connecting portions 4214 and 4215 can be bent in the Z-axis direction and can be twisted and deformed around the central axis.
The configuration of the vibration substrate 11 has been specifically described above.

As described above, the vibration substrate 11 having such a configuration is integrally formed from an SOI substrate. Thereby, formation of the vibration substrate 11 becomes easy. Specifically, as described above, the vibration substrate 11 includes a portion that is positively deformed and a portion that is not deformed (not desired to be deformed). On the other hand, the SOI substrate is a substrate in which a first Si layer, a SiO ₂ layer, and a second Si layer are laminated in this order. Therefore, the portion not to be deformed is composed of all of the three layers, and the portion to be actively deformed is composed of only the second Si layer, that is, the thickness of the SOI substrate is changed. It is possible to easily form the vibration substrate 11 in which the part to be deformed and the part not to be deformed are mixed. Note that the positively deformed portion may be composed of two layers, a second Si layer and a SiO ₂ layer.

The “parts to be deformed” include drive beams 43, 53, 63, 73, movable part side movable beams 422, 522, 622, 722, deformed parts 4211, 4212, 5211, 5212, 6211, 6212, 7211, 7212 and Connection parts 4214, 4215, 5214, 5215, 6214, 6215, 7214, 7215 are included.
On the other hand, the “parts not to be deformed” include the movable portions 201, 202, 203, 204, the fixed portion 13, the displacement portions 41, 51, 61, 71, the displacement portion side movable beams 423, 523, 623, 723, and the non-deformation. Parts 4213, 5213, 6213, and 7213 are included.

(1-2. Base 12)
As shown in the AA cross-sectional view of FIG. 1 shown in FIG. 2A, the base 12 has a flat base 121 and substrate holding parts 122 provided at the four corners of the base 121. . Such a base 12 is joined to the lower surface of the fixed portion 13 of the vibration substrate 11 at the substrate holding portion 122 as shown in the CC cross-sectional view of FIG. 1 shown in FIG. Thereby, the vibration substrate 11 is supported by the base 12. Such a base 12 is made of, for example, glass such as Pyrex (registered trademark) or Tempax, silicon, or aluminum as a main material. In addition, it does not specifically limit as a joining method of the base 12 and the fixing | fixed part 13, For example, you may join using an adhesive agent and may use various joining methods, such as anodic bonding. Further, although the base 12 has the substrate holding portions 122 at the four corners, the invention is not limited thereto, and the substrate holding portion 122 is provided on the base 121 corresponding to the position of the fixing portion 13 of the vibration substrate 11. It only has to be done.

(1-3. Displacement means 8)
As shown in FIG. 1, the displacement unit 8 includes a first displacement unit 81, a second displacement unit 82, a third displacement unit 83, and a fourth displacement unit 84.
The first displacement means 81 includes a permanent magnet 811, a drive unit 810 around which a coil 812 is wound, and a power source 813. The second displacement means 82 includes a permanent magnet 821, a drive unit 820 around which a coil 822 is wound, and a power source 823. The third displacement unit 83 includes a permanent magnet 831, a drive unit 830 around which a coil 832 is wound, and a power source 833. The fourth displacement means 84 includes a permanent magnet 841, a drive unit 840 around which a coil 842 is wound, and a power source 843.

The first displacement means 81 is provided corresponding to the connecting portion 4, the second displacement means 82 is provided corresponding to the connecting portion 5, and the third displacement means 83 is The fourth displacement means 84 is provided corresponding to the connecting portion 7.
According to such a structure, the structure of the displacement means 8 becomes simple. Moreover, by making the displacement means 8 electromagnetically drive, a comparatively big force can be generated and the light reflection member 20 can be rotated more reliably. In addition, since one displacing means 8 (81, 82, 83, 84) is provided in each of the connecting portions 4, 5, 6, 7, each of the connecting portions 4, 5, 6, 7 is deformed independently. be able to. Therefore, the light reflecting member 20 can be displaced in various ways.

  Hereinafter, the first displacement means 81, the second displacement means 82, the third displacement means 83, and the fourth displacement means 84 will be described. Since these have the same configuration, the first displacement means 81 will be described below. The displacement means 81 will be described as a representative, and the description of the second displacement means 82, the third displacement means 83, and the fourth displacement means 84 will be omitted. The second displacing means 82 and the fourth displacing means 84 are arranged in a state of being rotated 90 degrees with respect to the first displacing means 81 in a plan view of the light reflecting member 20. Therefore, for the second displacement means 82 and the fourth displacement means 84, the “Y-axis direction” in the following description of the first displacement means 81 is “X-axis direction”, and “X-axis direction” is “ It can also be described as “Y-axis direction”.

  As shown in FIGS. 3 and 4, the permanent magnet 811 has a rod shape and is magnetized in the longitudinal direction thereof. That is, the permanent magnet 811 has one end side in the longitudinal direction as an S pole and the other end side as an N pole. Such a permanent magnet 811 is inserted through an inner frame portion 411 formed in the displacement portion 41 and is fixed to the displacement portion 41 at substantially the center in the longitudinal direction. And the permanent magnet 811 protrudes by the same length up and down of the displacement part 41, and the S pole and N pole oppose through the displacement part 41 (rotation center axis Y2). Thereby, the light reflection member 20 can be displaced stably.

The permanent magnet 811 is provided such that its longitudinal direction is orthogonal to the surface direction of the displacement portion 41. Further, the permanent magnet 811 is provided such that its central axis intersects the rotation central axis Y2.
The permanent magnet 811 is not particularly limited, and for example, a magnet made of a hard magnetic material such as a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, or a bonded magnet can be suitably used.

  In addition, in 1st Embodiment, although the permanent magnet 811 has comprised the rod shape, it does not specifically limit as a shape of a permanent magnet, For example, you may comprise plate shape or a column shape. In this case, the permanent magnet 811 may be magnetized in the plane direction and fixed to the displacement portion 41 so that the plane direction is orthogonal to the X-axis direction. Thereby, since the length of the permanent magnet 811 in the X-axis direction can be shortened, the moment of inertia generated with the rotation of the displacement portion 41 can be suppressed.

  The coil 812 generates a magnetic field that acts on the permanent magnet 811. Such a coil 812 is disposed near the outside of the vibration substrate 11 so as to face the permanent magnet 811 in the X-axis direction. In addition, the coil 812 can generate a magnetic field in the X-axis direction, that is, a state where the permanent magnet 811 side of the coil 812 is an N pole and the opposite side is an S pole, and the permanent magnet 811 side of the coil 812 is an S pole. It is provided so as to be able to generate a state where it is a pole and the opposite side is an N pole.

  The optical scanner 1 according to the first embodiment includes a coil fixing unit 85 in a driving unit 810 (820, 830, 840) fixedly provided to the base 12 outside the vibration substrate 11, and this coil fixing. A coil 812 is wound around a protrusion 851 extending in the X-axis direction of the portion 85. With such a configuration, the coil 812 can be fixed to the vibration substrate 11 and a magnetic field as described above can be easily generated. In addition, by configuring the protruding portion 851 with a soft magnetic material such as iron, the protruding portion 851 can be used as the magnetic core of the coil 812, and the above-described magnetic field can be generated more efficiently.

  The power source 813 is electrically connected to the coil 812. A magnetic field as described above can be generated from the coil 812 by applying a desired voltage from the power source 813 to the coil 812. In the first embodiment, the power source 813 can selectively apply an alternating voltage and a DC voltage. Further, when an alternating voltage is applied, its strength and frequency can be changed, and an offset voltage (DC voltage) can be superimposed.

(2. Operation of optical scanner 1)
Next, the operation of the optical scanner will be described.
In the optical scanner 1 configured as described above, a pattern for rotating the light reflecting member 20, a pattern for vibrating the light reflecting member 20, and a pattern for stopping the light reflecting member 20 at a predetermined position can be selected. It is like that. As described above, the optical scanner 1 can be driven in various patterns because of the effect obtained by bending and deforming the movable beams 42, 52, 62, 72 of the respective connecting portions 4, 5, 6, 7. is there.
Hereinafter, these three patterns will be described sequentially. In the following, for the convenience of explanation, a configuration in which the permanent magnets 811, 821, 831, and 841 are all arranged with the N pole on the upper side will be described as a representative.

(2-1. Rotation)
<Rotation around Y axis>
Based on FIG. 5, the rotation of the light reflecting member 20 around the Y axis will be described. FIG. 5 is a cross-sectional view corresponding to the cross-sectional view taken along the line AA in FIG.
First, the first state in which the permanent magnet 811 side of the coil 812 is N pole, the permanent magnet 831 side of the coil 832 is S pole, the permanent magnet 811 side of the coil 812 is S pole, and the permanent magnet 831 side of the coil 832 is N pole. An alternating voltage is applied to the coils 812 and 832 from the power supplies 813 and 833 so that the second state is alternately and periodically switched. The alternating voltages applied to the coils 812 and 832 from the power supplies 813 and 833 preferably have the same waveform (the same strength and frequency).

  In the first state shown in FIG. 5A, since the south pole of the permanent magnet 811 is attracted to the coil 812 and the north pole is inclined away from the coil 812, the pair of drive beams 43 are twisted and deformed. The displacement portion 41 is inclined about the rotation center axis Y2 so that the upper surface thereof faces the light reflecting member 20 side. At the same time, since the N pole of the permanent magnet 831 is attracted to the coil 832 and the S pole is inclined away from the coil 832, the displacement portion 61 reflects light on the lower surface while twisting and deforming the pair of drive beams 63. It inclines around the rotation center axis Y3 so as to face the member 20 side. That is, the displacement parts 41 and 61 both incline clockwise in FIG.

Along with the inclination of the displacement portions 41 and 61, the displacement portion side movable beam 423 is inclined so that the end on the light reflecting member 20 side is directed downward, and the displacement portion side movable beam 623 is on the upper side of the light reflecting member 20 side. Tilt to face. Thereby, the light reflection member 20 side ends of the displacement portion side movable beams 423 and 623 are shifted in the Z-axis direction.
Then, the ends of the light reflecting member 20 side of the displacement part side movable beams 423 and 623 are displaced in the Z-axis direction, so that the deformation parts 4211, 4212, 6211, and 6212 are twisted and deformed around the central axis. While bending the connecting portions 4214, 4215, 6214, 6215, the movable portion side movable beams 422, 622 and the light reflecting member 20 are integrally tilted counterclockwise in FIG. 5A.

  In this way, in the first state, the movable beam 42 of the connecting portion 4 is bent and deformed into a V-shape projecting downward (first deformation) at the bent portion 421 in the middle thereof, and the connecting portion 6 When the movable beam 62 is bent and deformed into a V-shape convex upward (second deformation) at the bent portion 621 in the middle thereof, the light reflecting member 20 is centered on the rotation center axis Y1 as shown in FIG. ) Tilt counterclockwise.

  On the other hand, in the second state shown in FIG. 5B, the deformation opposite to the first state described above occurs. That is, in the second state, the movable beam 42 of the connecting portion 4 is bent and deformed (second deformation) into a convex V shape at the bent portion 421 and the movable beam 62 of the connecting portion 6 is bent. Then, it is bent and deformed into a V-shape projecting downward (first deformation). As a result, the light reflecting member 20 is tilted clockwise in FIG. 5 (b) around the rotation center axis Y1.

By alternately and periodically switching between the first state and the second state, the light reflecting member 20 can be rotated around the rotation center axis Y1. The rotation of the light reflecting member 20 around the rotation center axis Y1 is permitted by the torsional deformation of the movable portion side movable beams 522 and 722 included in the connecting portions 5 and 7 around the central axis.
The frequency of the alternating voltage applied to the coils 812 and 832 is not particularly limited, and includes the light reflecting member 20, the four movable parts 201, 202, 203, 204, and the connecting parts 4, 5, 6, 7. The resonance frequency of the vibration substrate 11 may be equal to or different from the resonance frequency of the vibration substrate 11, but is preferably different from the resonance frequency. That is, it is preferable to drive the optical scanner 1 in a non-resonant manner. As a result, the optical scanner 1 can be driven more stably.

<Rotation around X axis>
Next, the rotation of the light reflecting member 20 around the X axis will be described with reference to FIG. 6 is a cross-sectional view corresponding to the cross-sectional view taken along the line BB in FIG.
First, the first state in which the permanent magnet 821 side of the coil 822 is N pole, the permanent magnet 841 side of the coil 842 is S pole, the permanent magnet 821 side of the coil 822 is S pole, and the permanent magnet 841 side of the coil 842 is N pole. An alternating voltage is applied to the coils 822 and 842 from the power supplies 823 and 843 so that the second state is alternately and periodically switched. The alternating voltages applied to the coils 822 and 842 from the power supplies 823 and 843 preferably have the same waveform.

  Similar to the rotation of the light reflecting member 20 around the rotation center axis Y1, in the first state shown in FIG. 6A, the movable beam 52 of the connecting portion 5 is lowered by the bent portion 521 in the middle thereof. Bends and deforms into a V-shape convex to the side (first deformation), and the movable beam 72 of the connecting portion 7 is bent and deformed into a V-shape convex to the upper side at the bent portion 721 in the middle (second deformation) ), The light reflecting member 20 tilts counterclockwise in FIG. 6A around the rotation center axis X1.

On the other hand, in the second state shown in FIG. 6B, the deformation opposite to the first state described above occurs. That is, in the second state, the movable beam 52 of the connecting portion 5 is bent and deformed (second deformation) into a convex V shape at the bent portion 521 and the movable beam 72 of the connecting portion 7 is bent. Then, the light reflecting member 20 is tilted clockwise in FIG. 6B around the rotation center axis X1 by bending and deforming in a V-shape projecting downward (first deformation).
By alternately and periodically switching between the first state and the second state, the light reflecting member 20 can be rotated around the rotation center axis X1. The rotation of the light reflecting member 20 around the rotation center axis X1 is allowed by the torsional deformation of the movable part side movable beams 422 and 622 included in the coupling parts 4 and 6 around the central axis.

  The frequency of the alternating voltage applied to the coils 822 and 842 is not particularly limited, and includes the light reflecting member 20, the four movable parts 201, 202, 203, 204, and the connecting parts 4, 5, 6, 7. The resonance frequency of the vibration substrate 11 may be equal to or different from the resonance frequency of the vibration substrate 11, but is preferably different from the resonance frequency. That is, it is preferable to drive the optical scanner 1 in a non-resonant manner. As a result, the optical scanner 1 can be driven more stably.

<Rotation around X axis and Y axis>
By simultaneously performing the rotation about the X axis and the rotation about the Y axis as described above, the light reflecting member 20 is two-dimensionally rotated around the rotation center axis Y1 and the rotation center axis X1. Can be rotated. As described above, the rotation of the light reflecting member 20 around the rotation central axis Y1 is permitted by the torsional deformation of the movable portion side movable beams 522 and 722 around the central axis. The rotation around the rotation center axis X1 is allowed by the torsional deformation of the movable part side movable beams 422 and 622 around the center axis.

  In the above-described rotation around the X axis, rotation around the Y axis, and rotation around these two axes, the frequency of the alternating voltage applied to the coils 812, 822, 832, and 842 is not particularly limited, and the light reflecting member 20, may be equal to or different from the resonance frequency of the vibration substrate 11 composed of the four movable parts 201, 202, 203, 204 and the connecting parts 4, 5, 6, 7, but is different from the resonance frequency. It is preferable. That is, it is preferable to drive the optical scanner 1 in a non-resonant manner. As a result, the optical scanner 1 can be driven more stably.

  The frequency of the alternating voltage applied to the coils 812 and 832 for rotating the light reflecting member 20 around the rotation center axis Y1 and the coil for rotating the light reflecting member 20 around the rotation center axis X1. The frequency of the alternating voltage applied to 822 and 842 may be the same or different. For example, when it is desired to rotate the light reflecting member 20 around the rotation center axis Y1 faster than the rotation center axis X1, the frequency of the alternating voltage applied to the coils 812 and 832 is applied to the coils 822 and 842. What is necessary is just to set higher than the frequency of an alternating voltage.

  Further, the strength of the alternating voltage applied to the coils 812 and 832 and the strength of the alternating voltage applied to the coils 822 and 842 may be equal or different. For example, when it is desired to rotate the light reflecting member 20 around the rotation center axis Y1 more than the rotation center axis X1, the strength of the alternating voltage applied to the coils 812 and 832 is applied to the coils 822 and 842. What is necessary is just to make it stronger than the strength of the alternating voltage to do.

  In the above description, the driving method for applying the alternating voltage to the coils 812, 822, 832, and 842 has been described. However, the light reflecting member 20 can also be rotated by the following driving method. That is, an offset voltage (DC voltage) of (+) or (−) may be superimposed on an alternating voltage applied to the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843. In other words, the strength with which the N poles of the permanent magnets 811, 821, 831, 841 are attracted to the coils 812, 822, 832, and 842 (hereinafter also simply referred to as “N pole attraction strength”) and the permanent magnets 811 and 821. , 831, 841 may be different in strength from which the S poles of the coils 812, 822, 832, and 842 are attracted (hereinafter also simply referred to as “S pole attracting strength”).

Hereinafter, although specifically described, a state in which the N-pole attracting strength and the S-pole attracting strength are equal as described above is referred to as a “normal state”.
When the S-pole attracting strength of the coils 812, 822, 832, and 842 is larger than the N-pole attracting strength, the displacement portions 41, 51, and 61 viewed from the AA cross section of FIG. , 71 at the end of the light reflecting member 20 side, the top dead center and the bottom dead center (points at which the turning direction is switched) move downward. As a result, as shown in FIG. 7, the rotation center axes X1 and Y1 of the light reflecting member 20 move downward as compared with the normal state. On the contrary, when the S-pole attracting strength of the coils 812, 822, 832, and 842 is weaker than the N-pole attracting strength, the displacement portion 41, as viewed from the AA cross section of FIG. The top dead center and the bottom dead center of the rotation of 51, 61, 71 are moved upward. For this reason, the rotation center axes X1 and Y1 of the light reflecting member 20 move upward as compared with the normal state.

  In this way, by rotating the offset voltage on the alternating voltage applied to the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843, the rotation center axes X1 and Y1 of the light reflecting member 20 are set to Z. Can be shifted in the axial direction. Thereby, for example, when the optical scanner 1 is incorporated in an image forming apparatus such as a projector, the optical path length of the light emitted from the light source to the light reflecting member 20 is adjusted even after the image forming apparatus is assembled. be able to. That is, when the image forming apparatus is assembled, the light source and the light reflecting member 20 are precisely positioned. However, even if these positions are deviated from the set values, the light source and the light reflecting member 20 are assembled after the assembly. And the position can be corrected.

(2-2. Vibration)
First, the first state in which the permanent magnets 811, 821, 831, and 841 of the coils 812, 822, 832, and 842 have N poles respectively, and the permanent magnets 811, 821, 831, and 841 of the coils 812, 822, 832, and 842, respectively. An alternating voltage is applied to the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843 so that the second state in which the sides become the S poles are alternately and periodically switched. The alternating voltages applied to the coils 812, 822, 832, and 842 from the power supplies 813, 823, 833, and 843 preferably have the same waveform.

  In the first state shown in FIG. 8A, the displacement portions 41, 51, 61, 71 are rotated so that the upper surfaces thereof face the light reflecting member 20 side, as in the case of the rotation described above. It inclines around the dynamic center axes Y2, X2, Y3, and X3. As the displacement parts 41, 51, 61, 71 are inclined, the displacement part side movable beams 423, 523, 623, and 723 are inclined so that the end on the light reflecting member 20 side faces downward. . As a result, while the movable beams 42, 52, 62, 72 are bent at the bent portions 421, 521, 621, 721, the movable portion side movable beams 422, 522, 622, 722 and the light reflecting member 20 are integrated into the light. The reflecting member 20 moves downward while keeping the posture (that is, the surface direction) constant.

  On the other hand, in the second state shown in FIG. 8 (b), the displacement portions 41, 51, 61, 71 are respectively pivoted central axes Y2, X2, Y3, with their lower surfaces facing the light reflecting member 20 side. Tilt around X3. As the displacement parts 41, 51, 61, 71 are inclined, the displacement part side movable beams 423, 523, 623, 723 are inclined so that the end on the light reflecting member 20 side faces upward. As a result, while the movable beams 42, 52, 62, 72 are bent at the bent portions 421, 521, 621, 721, the movable portion side movable beams 422, 522, 622, 722 and the light reflecting member 20 are integrated into the light. The reflecting member 20 moves upward while keeping the posture of the reflecting member 20 constant.

By alternately switching between the first state and the second state, the light reflecting member 20 is kept in its posture, that is, the surface of the light reflecting portion 22 is kept parallel to the XY plane, It can be vibrated in the Z-axis direction.
The frequency of the alternating voltage applied to the coils 812, 822, 832, and 842 is not particularly limited, and the light reflecting member 20, the four movable parts 201, 202, 203, 204, and the connecting parts 4, 5, 6, 7 may be equal to or different from the resonance frequency of the vibration substrate 11 constituted by 7, but is preferably equal to the resonance frequency. That is, it is preferable to drive the optical scanner 1 by resonance. As a result, the optical scanner 1 can be driven more stably.
Even in such a vibration pattern, similarly to the rotation pattern described above, the offset voltage is superimposed on the alternating voltage applied to the coils 812, 822, 832, and 842, thereby shifting the light from the natural state in the Z-axis direction and reflecting the light. The member 20 can be vibrated.

(2-3. Static pattern)
For example, direct current is supplied from the power sources 813, 823, 833, and 843 to the coils 812, 822, 832, and 842 so that the permanent magnets 811, 821, 831, and 841 of the coils 812, 822, 832, and 842 have N poles. Apply voltage. The DC voltages applied from the power supplies 813, 823, 833, and 843 to the coils 812, 822, 832, and 842 preferably have the same strength. When such a voltage is applied to the coils 812, 822, 832, and 842, the light reflecting member 20 stops in a state as shown in FIG.

Conversely, the coils 812, 822, 832, 842 are connected to the coils 812, 822, 832, 842 from the power sources 813, 823, 833, 843 so that the permanent magnets 811, 821, 831, 841 side are in the S pole state. When the DC voltage is applied, the light reflecting member 20 is stopped in a state as shown in FIG.
Thus, the light reflecting member 20 can be maintained at a position different from the natural state. According to such driving, for example, the optical path of the light reflected by the light reflecting section 22 can be shifted with respect to the natural state, so that it is particularly effective when the optical scanner 1 is used as an optical switch, for example. .

  In addition, for example, when the optical scanner 1 is incorporated in an image forming apparatus such as a projector, the emission of the laser to the outside of the apparatus has to be stopped because an abnormal laser is emitted from the light source. Further, the light reflecting member 20 is retracted to a position different from the natural state (a position not intersecting with the optical path of the laser), thereby preventing the reflection of the laser by the light reflecting portion 22. Thereby, the emission of the laser to the outside of the apparatus can be prevented. Further, by displacing the light reflecting member 20, the optical path of the laser reflected by the light reflecting portion 22 may be changed to prevent the laser from being emitted to the outside of the apparatus. As a result, a safety mechanism for solving such a problem does not need to be separately incorporated, the manufacturing process of the image forming apparatus is simplified, and the manufacturing cost can be reduced.

A state in which the light reflecting member 20 is tilted with respect to the natural state by applying the static drive of the light reflecting member 20 and making the DC voltages applied to the coils 812, 822, 832, and 842 different from each other. Can also be maintained. Further, the intensity of the DC voltage applied to the coils 812, 822, 832, 842 is changed independently and with time so that the light reflecting member 20 is irregularly displaced continuously or stepwise. You can also. Such a driving method is particularly effective when, for example, vector scanning is performed on the light reflected by the light reflecting unit 22.
The driving of the optical scanner 1 has been described in detail above.

  In such an optical scanner 1, the light reflecting member 20 can be rotated about the rotation center axis Y1 and the rotation about the rotation center axis X1 by the same mechanism. Further, in the optical scanner 1, the light reflecting member 20 can be rotated about the rotation center axis Y1 and the rotation about the rotation center axis X1 independently. That is, in the optical scanner 1, the rotation of the rotation center axis Y1 is not affected by the rotation about the rotation center axis X1, and conversely, the rotation of the rotation center axis X1 is also about the rotation center axis Y1. Unaffected by rotation. Therefore, according to the optical scanner 1, the light reflecting member 20 can be stably rotated around each of the rotation center axis Y1 and the rotation center axis X1.

  Further, as described above, in the optical scanner 1, the rotation of the light reflecting member 20 around the rotation center axis Y1 is allowed by the torsional deformation of the movable part side movable beams 522 and 722 around the center axis. Then, the rotation of the light reflecting member 20 around the rotation center axis X1 is permitted by the torsional deformation of the movable part side movable beams 422 and 622 around the center axis. Thus, each of the connecting portions 4, 5, 6, and 7 has the movable portion side movable beams 422, 522, 622, and 722 that can be torsionally deformed around the central axis. It can be smoothly rotated around each of the movement center axes Y1 and X1.

  Further, in the optical scanner 1, the bending portion 421 is provided in the connecting portion 4 between the movable portion side movable beam 422 that is torsionally deformed as described above and the displacement portion side movable beam 423 that is not desired to be deformed. Therefore, the stress generated by the above-described torsional deformation is absorbed and relaxed by deformation of the deformed portions 4211 and 4212 and the connecting portions 4214 and 4215 of the bent portion 421, and is not transmitted to the displacement portion side movable beam 423. That is, by providing the bent portion 421, it is possible to reliably prevent the displacement portion side movable beam 423 from being twisted and deformed around its central axis while the light reflecting member 20 is rotating. The same applies to the other connecting portions 5, 6, 7 other than the connecting portion 4. Therefore, the light reflecting member 20 can be smoothly rotated around the rotation center axes Y1 and X1.

  Furthermore, destruction of each displacement part side movable beam 423,523,623,723 is effectively prevented. In other words, in a rod-shaped member, the fracture when the stress in the Z-axis direction is applied from the state in which torsional deformation around the central axis occurs rather than the fracture strength when the stress in the Z-axis direction is applied from the natural state. It is technically clear that the strength is lower. Therefore, as described above, the bending portions 421, 521, 621, 721 are provided, and the displacement portion side movable beams 423, 523 are not caused by twisting deformation of the displacement portion side movable beams 423, 523, 623, 723. , 623, 723 can be effectively prevented.

  Further, since the displacement part side movable beam 423 is not substantially deformed in the connecting part 4, the stress generated by the rotation of the displacement part 41 can be efficiently used for the rotation of the light reflecting member 20. The same applies to the connecting portions 5, 6, and 7. Therefore, the light reflecting member 20 can be rotated with a large rotation angle and power saving, or can be vibrated in the Z-axis direction with a large amplitude.

  Further, in the connecting portion 4, since the bent portion 421 has the non-deformed portion 4213, the movable beam 42 can be bent with the non-deformed portion 4213 as an axis. The same applies to the connecting portions 5, 6, and 7. Therefore, the movable beams 42, 52, 62, 72 of the connecting portions 4, 5, 6, 7 can be bent easily and reliably, and the light reflecting member 20 can be stably rotated and vibrated.

  Further, the connecting portion 4 includes a deformable portion 4211 in which the bent portion 421 is connected to the movable portion side movable beam 422 and a deformable portion 4212 that is connected to the displacement portion side movable beam 423, and is deformed when the movable beam 42 is bent. The portions 4211 and 4212 are torsionally deformed around the central axis, thereby effectively relieving stress generated by bending. The same applies to the connecting portions 5, 6, and 7. Therefore, the movable beams 42, 52, 62, 72 of the connecting portions 4, 5, 6, 7 can be reliably bent and the movable beams 42, 52, 62, 72 can be prevented from being broken. That is, the optical scanner 1 can be driven stably.

  Moreover, in the connection part 4, since the bending part 421 has a pair of deformation | transformation parts 4211 and 4212, the following effects can also be exhibited. That is, for example, the thermal expansion of the movable portion side movable beam 422 and the displacement portion side movable beam 423 due to the heat generated from the coil 812 by energization, the heat generated by the light applied to the light reflecting portion 22, or the like, the deformation portions 4211, 4212. Can be tolerated by deformation. The same applies to the connecting portions 5, 6, and 7. Therefore, the optical scanner 1 can prevent or suppress the stress from remaining on the vibration substrate 11 and can exhibit desired vibration characteristics regardless of the temperature.

In the optical scanner 1, the drive units 810, 820, 830, and 840 that drive the displacement units 41, 51, 61, and 71 are displaced in the extending direction of the movable beams 42, 52, 62, and 72. , 71 and the permanent magnets 811, 821, 831, 841 fixed to the inner frame portion 411 of the displacement portions 41, 51, 61, 71.
For this reason, the torque generated in the drive units 810, 820, 830, and 840 by the permanent magnets 811, 821, 831, and 841 can be made high. Since the torque is proportional to the magnetic field, and the magnetic field generated by the coil is proportional to the current, the same torque is generated by the drive units 810, 820, 830, 840 approaching the permanent magnets 811, 821, 831, 841. By arranging, it becomes possible with a low current. Since the power consumption W is proportional to the square of the current as expressed by W = I ² × R (W is power consumption, I is current, and R is resistance), the displacement portions 41, 51, The power consumption of the drive units 810, 820, 830, and 840 for driving 61 and 71 can be reduced, and the optical scanner 1 that achieves power consumption can be obtained. For example, when the distance between the drive units 810, 820, 830, and 840 and the permanent magnets 811, 821, 831, and 841 is set to ¼ compared to the conventional case, the same torque is generated. The optical scanner 1 can be driven stably with the current and the power consumption of 1/16 of the conventional one.

  Next, the shape of the support member 23 will be described with reference to FIG. FIG. 9 is an explanatory view showing the shape of the support member. FIG. 9A is a diagram showing the four movable parts and the support member in FIG. 1 from the back side in FIG. FIG. 9B is a cross-sectional view of the cross section including the X1 axis in FIG.

As shown in FIGS. 9A and 9B, the support member 23 is a columnar member having a rectangular fixing surface. The dimension in the X-axis direction of the rectangular shape of the fixed surface is smaller than the distance between the side of the movable part 201 on the movable part side movable beam 422 side and the side of the movable part 203 on the movable part side movable beam 622 side. Further, the dimension in the Y-axis direction of the rectangular shape of the fixed surface is smaller than the distance between the side of the movable part 202 on the movable part side movable beam 522 side and the side of the movable part 204 on the movable part side movable beam 722 side.
As shown in FIG. 9A and FIG. 9B, the four movable parts 201, 202, 203, 204 and the support member 23 are fixed. At this time, the intersection of the X1 axis and the Y1 axis in FIG. 9A (the center position between the movable parts 201, 202, 203, 204 in the XY plan view) and the center position of the fixing surface of the support member 23 are substantially the same. The movable parts 201, 202, 203, 204 and the support member 23 are fixed so as to be positioned. For this reason, the support member 23 is arranged so as to be in contact with the movable parts 201, 202, 203, 204 via an adhesive but not in contact with the movable beams 42, 52, 62, 72.

  The support member 23 is in contact with the movable parts 201, 202, 203, and 204 via an adhesive, but is not in contact with the movable part side movable beams 422, 522, 622, and 722, so the length of the movable beam is changed. There is no. Thereby, the spring constant of the movable beam can be kept constant and can be driven stably. Moreover, the damage by contact with a movable beam can be prevented.

  Next, an example of a support member having a shape different from that of the support member 23 will be described with reference to FIGS. 9C, 9D, 9E, and 9F. FIG. 9C is a view of the four movable parts and the support member as viewed from the support member side. FIG. 9D is a cross-sectional view of the cross section including the X1 axis in FIG. FIG. 9E is a view of the four movable parts and the support member as viewed from the support member side. FIG. 9F is a cross-sectional view of the cross section including the X1 axis in FIG.

  As shown in FIG. 9C and FIG. 9D, the support member 24 has an inclined surface 24a on the outer peripheral side of the fixing surface 24b that is fixed to the movable portions 201, 202, 203, and 204. The inclined surface 24 a is inclined toward the light reflecting portion 22 side from the outer peripheral side of the fixing surface 24 b toward the outer peripheral side of the support member 24.

  As shown in FIGS. 9 (e) and 9 (f), the support member 25 has four recesses 25a on the fixing surface 25b that is fixed to the movable parts 201, 202, 203, 204. The concave portion 25a is movable in the state where the support member 25 is fixed to the movable portions 201, 202, 203, and 204, the movable portion side movable beam 422, the movable portion side movable beam 522, the movable portion side movable beam 622, or the movable portion side movable. It is formed at a position facing the beam 722. The planar shape of the recess 25a is larger than the planar shape of the movable part side movable beam 422, the movable part side movable beam 522, the movable part side movable beam 622, or the movable part side movable beam 722. Therefore, in the support member 25, the concave portion 25a faces the movable portion side movable beam 422, the movable portion side movable beam 522, the movable portion side movable beam 622, or the movable portion side movable beam 722. The movable part side movable beam 422, the movable part side movable beam 522, the movable part side movable beam 622, and the movable part side movable beam 722 are not in contact with each other.

  The support member 24 and the support member 25 are a movable beam 42, a movable beam 52, a movable beam 62, and a movable portion side movable beam 422, a movable portion side movable beam 522, a movable portion side movable beam 622, and a movable portion of the movable beam 72. It does not contact the side movable beam 722. Therefore, the lengths of the movable beam 42, the movable beam 52, the movable beam 62, and the movable beam 72 are not changed. Thereby, the spring constants of the movable beam 42, the movable beam 52, the movable beam 62, and the movable beam 72 can be kept constant, and can be driven stably. The support member 24, the support member 25, the movable beam 42, the movable beam 52, and the movable beam 62 are brought into contact with the support member 24 or the support member 25 and the movable beam 42, the movable beam 52, the movable beam 62, or the movable beam 72. Or, damage to the movable beam 72 can be suppressed.

  Next, an example of a support member having a shape different from the above-described support member 23 will be described with reference to FIG. FIG. 10 is an explanatory view showing the shape of the support member. 10 (a), 10 (c), and 10 (e) are views of the four movable parts and the support member as viewed from the support member side. FIGS. 10B, 10D, and 10F are cross-sectional views including the X1 axis in FIGS. 10A, 10C, and 10E, respectively. is there.

  As shown in FIG. 10A and FIG. 10B, the four movable parts 201, 202, 203, 204 and the support member 26 are fixed. On the bonding surface side of the support member 26 with the movable parts 201, 202, 203, 204, there are a recessed part 261, a recessed part 262, a recessed part 263, and a recessed part 264 having shapes that engage with the movable parts 201, 202, 203, 204. Is provided. The movable portions 201, 202, 203, and 204 are engaged with the four concave portions 261, 262, 263, and 264, and are fixed by an adhesive.

  According to the configuration of the support member 26, the support member 26 and the movable portions 201, 202, 203, and 204 can be easily aligned. Further, since the support member 26 does not contact the movable beams 42, 52, 62, and 72, the length of the movable beam is not changed. Thereby, the spring constant of the movable beam can be kept constant and can be driven stably. Moreover, the damage by contact with a movable beam can be prevented.

  Hereinafter, the concave portion 261, the concave portion 262, the concave portion 263, and the concave portion 264 of the support member 26 have a shape different from that of the movable portion 201, the movable portion 202, the movable portion 203, or the movable portion 204. The support member 27 and the support member 28 will be described.

  As shown in FIG. 10C and FIG. 10D, the support member 27 includes a recess 271, a recess 272, a recess 273, and a recess 274. The XY planar view shape of the recesses 271, 272, 273, and 274 is a shape in which a part of the sides has an arc. At this time, the XY plan view shape of the movable portions 201, 202, 203, 204 is preferably substantially the same shape as each concave portion. Of course, the recesses 271, 272, 273, and 274 are not limited to the above shapes, and may be semicircular or semielliptical, and the movable parts 201, 202, 203, and 204 are triangular, square, pentagonal or more. It may be a polygon.

  As shown in FIGS. 10E and 10F, the support member 28 includes a recess 281, a recess 282, a recess 283, and a recess 284. The shape of the recesses 281, 282, 283, and 284 in the XY plan view is a trapezoid. At this time, the XY planar view shape of the movable parts 201, 202, 203, and 204 is preferably a trapezoid having substantially the same shape as each recess. Of course, the recesses 281, 282, 283, and 284 are not limited to trapezoids, and may be triangles, squares, or pentagons or more, and the movable parts 201, 202, 203, and 204 are rectangles, triangles, squares, It may be a pentagon or more polygon.

  According to the support member 27 or the support member 28, the alignment of the support member 27 or the support member 28 and the movable beams 42, 52, 62, and 72 can be easily performed. Further, since the movable beams 42, 52, 62, and 72 are not in contact with each other, the length of the movable beams is not changed. Thereby, the spring constant of the movable beam can be kept constant and can be driven stably. Moreover, the damage by contact with a movable beam can be prevented.

  Next, a method for manufacturing the optical scanner 1 will be described with reference to FIGS. FIG. 11 is a flowchart of a method for manufacturing an optical scanner. FIG. 12 is a cross-sectional view showing the positional relationship of the constituent members in the manufacturing process of the optical scanner. FIG. 13 is an explanatory diagram illustrating a connection state between the support member and the movable portion.

First, the first fixing step (S101) shown in FIG. 11 is performed.
As shown in FIG. 12A, the vibration substrate 11 is held by a holding member (not shown) and is opposed to the substrate holding portion 122 of the base 12.
Then, as shown in FIG. 12B, the fixing portion 13 of the vibration substrate 11 is disposed on the substrate holding portion 122 of the base 12. And the fixing | fixed part 13 is fixed to the board | substrate holding | maintenance part 122 using various bonding methods, such as an adhesive agent or anodic bonding. Thereby, the vibration substrate 11 is fixed to the base 12. Note that the vibration substrate 11 at this time is the vibration substrate 11 in a state in which the light reflecting member 20 and the support member 23 are not attached.

Next, the second fixing step (S102) shown in FIG. 11 is performed.
As shown in FIGS. 13A and 13B, the support member 23 to which the light reflecting member 20 is fixed is bonded to the four movable parts 201, 202, 203, and 204. FIG. 13A is a view as seen from the back surface of FIG. FIG. 13B is a cross-sectional view taken along the X1 axis in FIG.

  12 and 13, the permanent magnet 821 (811, 831, 841) is illustrated as being fixed to the vibration substrate 11. However, the present invention is not limited to this, and the first fixing step (S101) or The permanent magnet 821 (811, 831, 841) may be fixed after the second fixing step (S102).

  Thus, the optical scanner provided with the light reflection member can be manufactured. By fixing the base and the fixed part, the movable beam and the driving beam are distorted by stress. However, a plurality of movable parts are provided, and after the fixing process of the base and the fixed part, the support member By fixing the to the movable part, it is possible to obtain an optical scanner including a light reflecting member while alleviating distortion due to stress.

Second Embodiment
The optical scanner of 2nd Embodiment and the manufacturing method of an optical scanner are demonstrated with reference to FIGS.
The manufacturing method of the optical scanner of this embodiment is a method of manufacturing the optical scanner 1 using the mirror chip 10 including the vibration substrate 11 described above. For this reason, about the same structure, the same code | symbol is provided and description of a structure is abbreviate | omitted.
FIG. 14 is a plan view showing the configuration of the mirror chip. FIG. 15 is a flowchart showing a manufacturing process of the optical scanner. FIG. 16 is a cross-sectional view showing the positional relationship of components in the manufacturing process of the optical scanner.

  In the flowchart shown in FIG. 15, the first fixing step (S <b> 201) is a step of attaching the mirror chip 10 formed on the silicon substrate to the base 12. Next, the separation step (S202) is a step of separating the support portion 3 from the mirror chip 10 fixed to the base 12. Finally, the second fixing step (S203) is a step of bonding the four movable parts 201, 202, 203, 204 and the support member 23 together.

  As shown in FIG. 14, the mirror chip 10 includes a support portion 3, a separation portion 14, and a vibration substrate 11.

The support portion 3 is formed so as to surround the vibration substrate 11. That is, the support part 3 includes the movable parts 201, 202, 203, 204, the movable beams 42, 52, 62, 72, the displacement parts 41, 51, 61, 71, the drive beams 43, 53, 63, 73, and the fixed part. 13 is formed around.
The support portion 3 is connected to the fixed portion 13 by the separation portion 14. In the mirror chip 10, the separation part 14 partially connects the support part 3 and the fixed part 13. That is, the separation part 14 is formed so that the structural strength is weak with respect to the support part 3 and the fixing part 13. For this reason, it is possible to reliably separate the support portion 3 and the fixing portion 13 in the separation portion 14. The separation part 14 should just be comprised so that structural strength may become weak with respect to the support part 3 and the fixing | fixed part 13, and is not limited to said structure. For example, you may form so that the thickness of the isolation | separation part 14 may become small according to the thickness of the support part 3 or the fixing | fixed part 13. FIG.
In addition, the support part 3 should just be formed in the outer side of the fixing | fixed part 13, and connected between the fixing | fixed parts 13 via the isolation | separation part 14, and is not limited to said form.

First, the first fixing step (S201) shown in FIG. 15 is performed.
As shown in FIG. 16A, the mirror chip 10 is held by a holding member (not shown) or the like, and is opposed to the substrate holding part 122 of the base 12.
Then, as illustrated in FIG. 16B, the fixing portion 13 of the vibration substrate 11 is disposed on the substrate holding portion 122 of the base 12. And the fixing | fixed part 13 is fixed to the board | substrate holding | maintenance part 122 using various bonding methods, such as an adhesive agent or anodic bonding. Thereby, the vibration substrate 11 is fixed to the base 12. The mirror chip 10 (vibration substrate 11) at this time is the mirror chip 10 (vibration substrate 11) in a state where the light reflecting member 20 and the support member 23 are not attached.

Next, the separation step (S202) shown in FIG. 15 is performed.
As shown in FIG. 16C, the holding jig 91 and the separation jig 92 are moved in the direction of the arrow, the fixing part 13 is pressed by the holding jig 91, and the support part 3 and the separation part 14 are pushed by the separation jig 92. Press. Here, the separation part 14 may be pressed by the holding jig 91 or the separation jig 92, may not be pressed by either, and can be appropriately selected. Although the holding jig 91 and the separating jig 92 are moved in the direction of the arrow, the present invention is not limited to this, and the fixing portion 13, that is, the base 12 may be moved in the direction opposite to the direction of the arrow. Alternatively, the holding jig 91 and the separating jig 92 may be moved in the direction of the arrow, and the base 12 may be moved in the direction opposite to the direction of the arrow.
Subsequently, as shown in FIG. 16D, the separation jig 92 is moved in the direction of the arrow, and the separation portion 14 is broken and broken, so that the support portion can be removed from the mirror chip 10 fixed to the base 12. 3 is separated. Thereby, the optical scanner 1 in which the fixing portion 13 is supported by the base 12 is obtained (see FIG. 2).

Subsequently, the second fixing step (S203) shown in FIG. 15 is performed.
In the second fixing step (S203), as in the second fixing step (S102) described above, the four movable portions 201, 202, 203, and 204 are bonded to the support member 23 to which the light reflecting member 20 is fixed. .

  Here, in FIG. 16, the permanent magnet 821 (811, 831, 841) is illustrated as being fixed to the vibration substrate 11. However, the present invention is not limited to this, and the first fixing step (S <b> 201) or the separation step is performed. The permanent magnet 821 (811, 831, 841) may be fixed after (S202) or the second fixing step (S203).

According to the manufacturing method of this embodiment, in the mirror chip 10, the fixed part 13 is connected not only to the drive beams 43, 53, 63, 73 but also the support part 3 and the separation part 14 to connect the fixed part to the vibration substrate 11. Since they are connected, the rigidity can be increased as compared with the vibration substrate 11 in which the fixed portion 13 is connected only to the drive beams 43, 53, 63, 73. Therefore, when holding the mirror chip 10 and arranging the vibration substrate 11 on the substrate holding portion 122 of the base 12 to join the vibration substrate 11 and the base 12, the vibration substrate 11 is not damaged. As described above, it can be held, arranged, and joined.
Furthermore, the distortion caused by the fixing of the fixing part 13 and the base 12 in the first fixing process is alleviated by the provision of the plurality of movable parts 201, 202, 203, 204, and the supporting part 3 is separated by the separating process. After removing the above, by performing the second fixing step of fixing the movable parts 201, 202, 203, 204 and the support member 23, it is possible to obtain an optical scanner while reducing the influence of distortion.

  Further, since the support portion 3 is folded at the separation portion 14, the optical scanner 1 can be obtained that is downsized in the XY plan view as compared with the configuration in which the support portion 3 supports the vibration substrate 11. Furthermore, as in the first embodiment, it is possible to obtain the optical scanner 1 that realizes power consumption.

<Third Embodiment>
An image forming apparatus according to a third embodiment will be described with reference to FIG.
The image forming apparatus according to the third embodiment includes the optical scanner according to the first embodiment. The optical scanner has the same configuration as that of the first embodiment, or is manufactured using a manufacturing method similar to the manufacturing method described in the second embodiment. For this reason, about the same structure and manufacturing method, the same code | symbol is provided and description of a structure, a manufacturing method, etc. is abbreviate | omitted.

  The optical scanner 1 as described above can be suitably applied to an image forming apparatus such as a projector, a laser printer, an imaging display, a barcode reader, and a scanning confocal microscope. FIG. 17 is a schematic diagram showing an outline of the image forming apparatus of the present invention. FIG. 17 shows a projector 300 as an image forming apparatus. Here, the longitudinal direction of the screen 380 is referred to as “lateral direction”, and the direction perpendicular to the longitudinal direction is referred to as “vertical direction”. The projector 300 includes a light source device 310 that emits light such as a laser, a plurality of dichroic mirrors 320, and the optical scanner 1.

  The light source device 310 includes a red light source device 311 that emits red light, a blue light source device 312 that emits blue light, and a green light source device 313 that emits green light. Each dichroic mirror 320 is an optical element that combines light emitted from each of the red light source device 311, the blue light source device 312, and the green light source device 313. Such a projector 300 combines light emitted from the light source device 310 with a dichroic mirror 320 based on image information from a host computer (not shown), and the combined light is two-dimensionally scanned by the optical scanner 1. A color image is formed on the screen 380 via the fixed mirror 350.

  At the time of two-dimensional scanning, the light reflecting portion 22 of the optical scanner 1 rotates around the axis in the Y-axis direction, and the light reflected by the light reflecting portion 22 is scanned (main scanned) in the horizontal direction of the screen 380. On the other hand, the light reflecting portion 22 of the optical scanner 1 rotates about the axis in the X-axis direction, and the light reflected by the light reflecting portion 22 is scanned (sub-scanned) in the vertical direction of the screen 380. The light scanning by the optical scanner 1 may be performed by so-called raster scanning or by so-called vector scanning. In particular, since the optical scanner 1 is suitable for vector scanning because of its configuration, it is preferable to scan light by vector scanning.

  The vector scan preferable for the optical scanner 1 is a method of scanning the light emitted from the light source device 310 so as to sequentially form line segments connecting two different points on the screen 380 with respect to the screen 380. In other words, this is a technique for forming a desired image on the screen 380 by collecting minute straight lines. The light scanner 1 is particularly suitable for vector scanning because the light reflecting portion 22 can be irregularly and continuously displaced about the axis in the Y-axis direction and the axis in the X-axis direction.

  More specifically, when characters (a and b) as shown in FIG. 17 are drawn by vector scanning, the light emitted from the light source device 310 is scanned so as to write each character. At this time, the posture (rotation) around the axis in the X-axis direction and the posture (rotation) around the axis in the Y-axis direction of the light reflecting portion 22 of the optical scanner 1 are controlled respectively along the scanning locus 330. Thus, the light can be scanned irregularly, and the letters a and b can be drawn like a single stroke. According to such a vector scan, it is not necessary to scan the entire surface of the screen 380 like a raster scan, so that an image can be efficiently drawn. In FIG. 17, the light combined by the dichroic mirror 320 is scanned two-dimensionally by the optical scanner 1, and then the light is reflected by the fixed mirror 350 and then an image is formed on the screen 380. However, the fixed mirror 350 may be omitted, and the screen 380 may be directly irradiated with light two-dimensionally scanned by the light scanner 1.

  According to the present embodiment, it is possible to provide a projector 300 as an image forming apparatus that can achieve the same effects as the optical scanner 1 described in the above-described embodiments.

  In addition, the deformation | transformation in the range which can solve at least one part of the said subject, improvement, etc. are contained in above-mentioned embodiment.

  For example, the arrangement, shape, quantity, and the like of the separation unit 14 illustrated in FIG. 14 consider the connection between the support unit 3 and the fixed unit 13 of the vibration substrate 11 and the separation of the support unit 3 in the separation step (S202). Thus, it can be determined as appropriate.

  Further, the XY plan view shape of the inner frame portion 411 is not limited to the rectangle shown in FIGS. 1, 3, and 14. For example, the inner frame portion 411 may be a triangle, a square, a pentagon or more polygon, or a circle or an ellipse. It may be present and can be determined as appropriate.

  Further, the XY plan view shape of the permanent magnets 811, 821, 831, and 841 is illustrated as a rectangle in FIGS. 1 and 3, but is not particularly limited. For example, the shape is not limited to a triangle, a square, a pentagon or more polygon, a circle, It may be oval.

  Further, the configurations and shapes of the coil fixing portion, the displacement means, the stress relaxation portion, the vibration substrate, and the movable plate, and the light reflection member attached by inverting the vibration substrate up and down in the drawing are limited to the above-described embodiments. Instead, it can be changed as appropriate.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the above embodiment, the light reflecting member 20 is fixed to the movable parts 201, 202, 203, 204 via the support member 23. However, it is not essential that the light reflecting member is supported by the movable portion via the support member. The light reflecting member may be configured to be directly supported by the movable part.

  DESCRIPTION OF SYMBOLS 1 ... Optical scanner, 3 ... Support part, 4, 5, 6, 7 ... Connection part, 8 ... Displacement means, 11 ... Vibration board, 12 ... Base, 13 ... Fixed part, 14 ... Separation part, 20 ... Light reflection Member, 21 ... surface, 22 ... light reflection part, 23 ... support member, 41, 51, 61, 71 ... displacement part, 42, 52, 62, 72 ... movable beam, 43, 53, 63, 73 ... drive beam, 81: First displacement means, 82: Second displacement means, 83: Third displacement means, 84: Fourth displacement means, 85: Coil fixing portion, 91: Holding jig, 92: Separation jig, 121: Base, 122: Substrate holder, 201, 202, 203, 204 ... Movable part, 261, 262, 263, 264, 271, 272, 273, 274, 281, 282, 283, 284 ... Recess, 300 ... Projector 310 light source device 311 red light source device 312 Blue light source device, 313 ... Green light source device, 320 ... Dichroic mirror, 330 ... Scanning locus, 350 ... Fixed mirror, 380 ... Screen, 411 ... Inner frame portion, 421,521,621,721 ... Bent portion, 422,522 622, 722 ... movable part side movable beam, 423, 523, 623, 723 ... displacement part side movable beam, 810, 820, 830, 840 ... drive part, 811, 821, 831, 841 ... permanent magnet, 812, 822 832, 842 ... Coil, 813, 823, 833, 843 ... Power source, 851 ... Projection, 4211, 4212, 6211, 6212 ... Deformation, 4213, 5213, 6213, 7213 ... Non-deformation, 4214, 4215, 5214, 5215, 6214, 6215, 7214, 7215... Connection part, X1, X2, X3, Y1, Y , Y3, Y4 ... rotation center axis.

Claims (7)

A light reflecting member having a light reflecting surface;
Four movable parts that support the light reflecting member;
One end of each of the four movable parts is connected to the movable part, extends substantially parallel to the surface direction of the light reflecting surface, and surrounds the light reflecting member in a plan view of the light reflecting surface. Four movable beams provided at intervals of 90 degrees along the direction;
A displacement part coupled to the other end of the one end connected to the movable part of the movable beam;
A permanent magnet fixed to the displacement part;
A drive unit that is arranged in the extending direction of the movable beam and spaced from the displacement unit, and that drives the displacement unit in cooperation with the permanent magnet;
One end is connected to the displacement portion, the drive beam is substantially orthogonal to the movable beam and extends substantially parallel to the surface direction of the light reflecting surface, and supports the displacement portion;
A fixed part connected to the other end of the one end connected to the displacement part of the driving beam;
A base on which the fixing part is fixed,
The movable beam has a bent portion that bends and deforms the movable beam in a direction substantially perpendicular to the surface direction of the light reflecting surface;
The light scanner, wherein the light reflecting member and the four movable parts are fixed with an adhesive. The optical scanner according to claim 1.
The light scanner, wherein the light reflecting member is fixed to the movable portion without contacting the movable beam. The optical scanner according to claim 1.
A support member;
The movable part supports the light reflecting member via the support member,
The optical scanner according to claim 1, wherein the support member is fixed to the light reflecting member and the movable portion in a state where the support member is not in contact with the movable beam. The optical scanner according to claim 3.
The optical scanner according to claim 1, wherein the support member includes an engaging portion having a shape that engages with the shape of the movable portion. A light reflecting member having a light reflecting surface;
Four movable parts that support the light reflecting member;
One end of each of the four movable parts is connected to the movable part, extends substantially parallel to the surface direction of the light reflecting surface, and surrounds the light reflecting member in a plan view of the light reflecting surface. Four movable beams provided at intervals of 90 degrees along the direction;
A displacement part coupled to the other end of the one end connected to the movable part of the movable beam;
A permanent magnet fixed to the displacement part;
A drive unit that is arranged in the extending direction of the movable beam and spaced from the displacement unit, and that drives the displacement unit in cooperation with the permanent magnet;
One end is connected to the displacement portion, the drive beam is substantially orthogonal to the movable beam and extends substantially parallel to the surface direction of the light reflecting surface, and supports the displacement portion;
A fixed part connected to the other end of the one end connected to the displacement part of the driving beam;
A base on which the fixed portion is fixed, and the movable beam has a bent portion that bends and deforms the movable beam in a direction substantially perpendicular to the surface direction of the light reflecting surface, and the light reflecting member And the movable part is a method of manufacturing an optical scanner fixed through an adhesive,
Producing a vibration substrate comprising the movable part, the movable beam, the displacement part, the permanent magnet, the drive beam, and the fixed part;
A first fixing step of fixing the fixing portion to the base;
A second fixing step of fixing the light reflecting member to the movable part,
An optical scanner manufacturing method, wherein the second fixing step is performed after the first fixing step. In the manufacturing method of the optical scanner of Claim 5,
The vibration substrate includes a support portion formed to surround the light reflecting member, the movable portion, the movable beam, the displacement portion, the driving beam, and the fixed portion,
A separation part that connects the fixing part and the support part;
Between the first fixing step and the second fixing step,
The method of manufacturing an optical scanner, further comprising a separation step of separating the fixing portion and the support portion in the separation portion. A light source, and an optical scanner that scans light from the light source,
The optical scanner is
A light reflecting member having a light reflecting surface;
Four movable parts that support the light reflecting member;
One end of each of the four movable parts is connected to the movable part, extends substantially parallel to the surface direction of the light reflecting surface, and surrounds the light reflecting member in a plan view of the light reflecting surface. Four movable beams provided at intervals of 90 degrees along the direction;
A displacement part coupled to the other end of the one end connected to the movable part of the movable beam;
A permanent magnet fixed to the displacement part;
A drive unit that is arranged in the extending direction of the movable beam and spaced from the displacement unit, and that drives the displacement unit in cooperation with the permanent magnet;
One end is connected to the displacement portion, the drive beam is substantially orthogonal to the movable beam and intersects and extends substantially parallel to the surface direction of the light reflecting surface, and supports the displacement portion;
A fixed part connected to the other end of the one end connected to the displacement part of the driving beam;
A base on which the fixing part is fixed,
The movable beam has a bent portion that bends and deforms the movable beam in a direction substantially perpendicular to the surface direction of the light reflecting surface;
The image forming apparatus, wherein the light reflecting member and the movable portion are fixed with an adhesive.

Images