JP5976598B2 - ポンプモジュール並びに容積形ポンプ - Google Patents

ポンプモジュール並びに容積形ポンプ Download PDF

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Publication number
JP5976598B2
JP5976598B2 JP2013129759A JP2013129759A JP5976598B2 JP 5976598 B2 JP5976598 B2 JP 5976598B2 JP 2013129759 A JP2013129759 A JP 2013129759A JP 2013129759 A JP2013129759 A JP 2013129759A JP 5976598 B2 JP5976598 B2 JP 5976598B2
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JP
Japan
Prior art keywords
pump
actuator
pump module
thin film
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013129759A
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English (en)
Japanese (ja)
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JP2014015930A (ja
Inventor
コンラート・アルミン
Original Assignee
プファイファー・ヴァキューム・ゲーエムベーハー
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Publication of JP2014015930A publication Critical patent/JP2014015930A/ja
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Publication of JP5976598B2 publication Critical patent/JP5976598B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2013129759A 2012-07-11 2013-06-20 ポンプモジュール並びに容積形ポンプ Expired - Fee Related JP5976598B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012013681.1A DE102012013681A1 (de) 2012-07-11 2012-07-11 Pumpenmodul, sowie Verdrängerpumpe
DE102012013681.1 2012-07-11

Publications (2)

Publication Number Publication Date
JP2014015930A JP2014015930A (ja) 2014-01-30
JP5976598B2 true JP5976598B2 (ja) 2016-08-23

Family

ID=48577463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013129759A Expired - Fee Related JP5976598B2 (ja) 2012-07-11 2013-06-20 ポンプモジュール並びに容積形ポンプ

Country Status (4)

Country Link
US (1) US20140017097A1 (de)
EP (1) EP2685104B1 (de)
JP (1) JP5976598B2 (de)
DE (1) DE102012013681A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3135909B1 (de) 2015-08-24 2020-11-04 Pfeiffer Vacuum Gmbh Membranvakuumpumpe
WO2018122080A1 (en) * 2016-12-30 2018-07-05 Koninklijke Philips N.V. Electrostatic peristaltic pump and method of operation
FR3100846B1 (fr) * 2019-09-17 2022-11-11 Inst Polytechnique Grenoble Système de pompage dans le domaine des laboratoires sur puce
US20240218866A1 (en) * 2022-12-29 2024-07-04 Q Biotech Corp. Macro-fluidic and micro-fluidic systems and methods using magnetoactive soft materials

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1545918A (fr) * 1967-06-06 1968-11-15 Halle Maschf Veb Dispositif à commande électromagnétique pour le transport ou la compression de fluides liquides ou gazeux
JPS6013994A (ja) * 1983-07-06 1985-01-24 Kaetsu Hoshi 流体移送方法
JPH0381585A (ja) 1989-08-24 1991-04-05 Mitsubishi Kasei Corp 圧電ポンプ
JPH05106562A (ja) * 1991-10-16 1993-04-27 Osaka Shinku Kiki Seisakusho:Kk 進行波管壁式真空ポンプ
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
FR2744769B1 (fr) * 1996-02-12 1999-02-12 Drevet Jean Baptiste Circulateur de fluide a membrane vibrante
DE19725685B4 (de) * 1997-06-18 2006-11-30 Fludicon Gmbh Fluid-Pumpe
DE19922612C2 (de) * 1999-05-17 2001-05-23 Fraunhofer Ges Forschung Mikromechanische Pumpe
EP1258637A1 (de) * 2001-05-14 2002-11-20 Ludwig Resch Vogelflügelpumpe
FR2884242A1 (fr) * 2005-07-11 2006-10-13 Commissariat Energie Atomique Dispositif de connexion de capot dans un systeme d'electromouillage
US7517201B2 (en) * 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US20070029070A1 (en) * 2005-08-05 2007-02-08 Kenichi Yamamoto Sheet type fluid circulating apparatus and electronic device cooler structure using the same
WO2008111397A1 (ja) * 2007-03-12 2008-09-18 Murata Manufacturing Co., Ltd. 流体移送装置
DE102007050407A1 (de) * 2007-10-22 2009-04-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pumpe, Pumpenanordnung und Pumpenmodul
MX2011008313A (es) * 2009-02-12 2011-08-17 S The Board Of Trustees Of The University Of Illinoi Microbomba de transmision magnetica.

Also Published As

Publication number Publication date
JP2014015930A (ja) 2014-01-30
EP2685104A1 (de) 2014-01-15
US20140017097A1 (en) 2014-01-16
EP2685104B1 (de) 2018-06-27
DE102012013681A1 (de) 2014-01-16

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