JP5969281B2 - Liquid material coating apparatus and defect correcting apparatus including the same - Google Patents

Description

  The present invention relates to a defect correction apparatus for correcting a defect by applying a liquid material to a fine region on a substrate, and in particular, in correcting a defect generated in a manufacturing process of a color filter of an LCD (liquid crystal display), The present invention relates to a coating apparatus for applying the material and a defect correcting apparatus including the same.

  In recent years, the number of pixels has increased with the increase in size and resolution of LCDs (liquid crystal displays), making it difficult to manufacture LCDs without defects, and the probability of occurrence of defects has also increased. Under these circumstances, in order to improve the yield, a defect correcting apparatus that corrects a defect that occurs in the manufacturing process of an LCD color filter has become indispensable for a production line.

FIG. 15 is a diagram showing defects that occur in the manufacturing process of the color filter of the LCD. Referring to FIG. 15, in FIG. 15 (A) ~ (C), the color filter has a transparent substrate, a lattice-shaped pattern called a black matrix 51 formed on the surface thereof, a plurality of sets of R (red) A pixel 52, a G (green) pixel 53, and a B (blue) pixel 54. In the color filter manufacturing process, as shown in FIG. 15 ( A ), the white defect 55 in which the color of the pixel or the black matrix 51 is lost, or the color of the adjacent pixel is mixed as shown in FIG. 15 ( B ). or, and a black defect 56 black matrix 51 had protrudes pixel, foreign matter defects 57 foreign substance pixel is adhered as shown in FIG. 15 (C) is generated.

  As a method for correcting the white defect 55, an ink having the same color as that of the pixel in which the white defect 55 exists is attached to the tip of the application needle by an ink application device, and the ink attached to the tip of the application needle is applied to the white defect 55. There is a method to correct by applying. Further, as a method of correcting the black defect 56 and the foreign matter defect 57, the defective portion is laser-cut to form a rectangular white defect 55, and then the ink applied to the tip of the application needle is removed by the ink application device. There is a method in which the defect 55 is applied and corrected.

  Liquid crystal displays are manufactured in various sizes depending on the application. Specifically, a large panel is manufactured for a home TV, and a small panel is manufactured for a display device of a portable terminal.

  In particular, recently, the demand for higher-definition small-sized liquid crystal panels has increased due to the use of mobile phone terminals as smartphones. Under such circumstances, the pixel size has been reduced, and the defect size to be corrected has become very small, about 20 μm or less.

  There has been a demand for a correction device capable of correcting this minute defect with high quality. As a technique capable of correcting such a micro-sized defect with high quality, there is an invention disclosed in Japanese Patent Laid-Open No. 2009-122259 (Patent Document 1).

  In Japanese Patent Laid-Open No. 2009-122259 (Patent Document 1), in order to correct a defect of the color filter as shown in FIG. ) Describes that the defect is corrected by applying the same color ink.

FIG. 14 is a diagram showing a main part of a conventional defect correction apparatus. Referring to FIG. 14, in the application standby state of FIG. 14 ( A ), the tip of application needle 11 is in a state of being housed in the application material container. When applying ink, the cylinder is driven as shown in FIG. 14 ( B ) to cause the application needle 11 to protrude from the coating material container, and as shown in FIG. 14 ( C ), the ink is applied by the Z-axis drive mechanism of the apparatus. The apparatus is lowered, and the tip of the application needle 11 is brought into contact with the substrate 5 to apply ink and correct the defect.

Coating the needle 11 is supported by the slide mechanism 25, and relatively movable with respect to the support member 26, when the coating needle 11 is brought into contact with the substrate 5 as shown in FIG. 14 (C), the device The Z-axis driving mechanism is further lowered by a small amount after the tip of the application needle 11 comes into contact with the substrate 5 so that the ink is reliably applied to the substrate 5.

At this time, the application needle 11 is moved to the upper part of the support member 26 by the slide mechanism, so that an excessive load is not applied to the tip of the application needle 11. Contact load to the substrate 5 of the application needle 11 is adapted to take only the self-weight of the hatched portion shown in FIG. 14 (D). Accordingly, when stationary, the application needle 11 always contacts the substrate 5 with a constant contact load.

The pressure at which the tip of the coating the needle 11 comes into contact with the substrate 5, the impact force at the time of its own weight and the contact of the hatched portion shown in FIG. 14 (D), determined by the contact area of the tip of the coating the needle 11.

  The tip shape of the application needle 11 is a shape in which the tip of the cylindrical shaft is conical, and the tip is further processed to be flat. When applying the ink, the ink attached to the flat surface is transferred onto the substrate for application. For this reason, the diameter of the ink to be applied is slightly larger than the size of the flat surface at the tip of the application needle 11.

JP 2009-122259 A

  As described above, correction of a defect size of 20 μm or less has recently been required, and the tip size of the application needle 11 for correcting this defect requires a diameter of about 10 μm. When the tip size of the application needle 11 is reduced, the pressure when the tip of the application needle 11 contacts the substrate 5 also increases.

  For this reason, there are concerns about damage to the normal color filter surface due to contact of the tip of the application needle 11.

However, in the apparatus shown in FIG. 14, since the contact load of the application needle is determined by the weight of the shaded portion shown in FIG. 14 ( D ), the weight of the shaded portion is lightened in order to reduce the contact pressure. However, there is a limit to the weight reduction of the hatched portion, and it is difficult to further reduce the contact pressure.

  So far, we have explained the defect correction of the color filter of the liquid crystal panel, but the touch panel incorporated in the liquid crystal panel for smartphones has also been downsized and refined, and the electrode correction of 20 μm width is required even for the electrode correction application of the touch panel. It is coming. Also in this case, since a needle having a tip diameter of about 10 μm is used as the application needle, a measure for reducing the contact pressure of the application needle is required as in the case of the color filter. In particular, in the case of a touch panel, the base material may be a film such as PET (polyethylene terephthalate), and if the contact pressure is large, the base material itself may be damaged, so the contact pressure must be further reduced. It is coming.

  As described above, in the coating apparatus shown in FIG. 14, there is a limit to the reduction of the contact pressure of the application needle 11, and it is difficult to reduce the contact pressure beyond this. For this reason, it has become difficult to cope with the modification of a liquid crystal panel that is reduced in size and increased in definition and a touch panel that is formed into a film.

  Therefore, a main object of the present invention is to provide a coating apparatus capable of reducing the contact pressure between the coating needle and the substrate, which is a problem described above, and a defect correcting apparatus equipped with the coating apparatus.

  A liquid material application apparatus according to the present invention is a liquid material application apparatus for correcting a defect by applying a liquid material to a fine region on a substrate, and an application needle for applying the liquid material to the fine region, and an application needle. The contact pressure between the substrate and the application needle set so that the distance between the slide mechanism for moving in the direction, the support member for supporting the slide mechanism to be movable in the vertical direction, and the distance between the support members is constant is reduced. A contact pressure reducing mechanism.

  Preferably, the liquid material application device further includes an application needle support portion that supports the application needle, and a stopper portion that restricts the downward movement of the application needle support portion, and the contact pressure reduction mechanism includes the application needle support portion. A first magnet provided at the lower end and a second magnet provided at the stopper portion are included, and the first magnet and the second magnet are arranged coaxially with an axis perpendicular to the substrate.

More preferably, either the first magnet or the second magnet includes an electromagnet.
More preferably, the contact pressure reduction mechanism further includes a control unit that adjusts the magnitude of the applied current to the electromagnet, and the control unit adjusts the magnitude of the applied current to the electromagnet to thereby contact the coating needle with the substrate. Adjust pressure.

  More preferably, the control unit reduces the contact pressure between the application needle and the substrate by switching the applied current from the off state to the on state when the tip of the application needle descends.

  Preferably, the liquid material application device jets air between the application needle support part that supports the application needle, the stopper part that restricts the downward movement of the application needle support part, and the application needle support part and the stopper part. The air injection mechanism reduces the contact pressure between the application needle and the substrate by adjusting the air injection.

  More preferably, the contact pressure reducing mechanism further includes a control unit that adjusts the air flow rate of the air injection mechanism, and the control unit adjusts the contact pressure between the application needle and the substrate by changing the strength of the air injection mechanism.

  More preferably, the control unit reduces the contact pressure between the application needle and the substrate by switching the air injection mechanism from the stopped state to the injection state when the tip of the application needle is lowered.

  Preferably, in the contact pressure reducing mechanism, the application needle support portion includes a first magnet, the stopper portion includes a second magnet, and the first magnet and the second magnet have an axis perpendicular to the substrate. The magnetic poles arranged on the same axis and facing each other of the first magnet and the second magnet are provided to have the same nature, and there is a repulsive force between the first magnet and the second magnet. Occur.

  More preferably, the liquid material application device further includes an interval adjustment mechanism that adjusts a distance between the first magnet and the second magnet.

  Preferably, the liquid material application device further includes an application needle support portion that supports the application needle, and a support spring provided between the support member and the application needle support portion.

  More preferably, the application needle support part is provided so as to be suspended from the support member by a support spring, and a contraction force is generated between the support member and the application needle support part.

  More preferably, the liquid material application device further includes a spring adjustment mechanism provided on either the support member side or the application needle support portion side.

  Preferably, the liquid material application device includes a third magnet and a fourth magnet provided in each of the application needle support portion and the application needle ascending end holding mechanism that holds the application needle support portion at the ascent end. The fourth magnet is attracted to each other so that the application needle ascending end holding mechanism and the application needle support portion can operate in conjunction with each other.

More preferably, one of the third magnet and the fourth magnet includes an electromagnet.
Preferably, the liquid material application device includes a third magnet provided on one of the application needle support portion and the application needle lift end holding mechanism that holds the application needle support portion at the lift end, and a magnet provided on the other. The third magnet and the magnetic body are attracted to each other so that the application needle rising end holding mechanism and the application needle support portion can operate in conjunction with each other.

More preferably, the third magnet includes an electromagnet.
Preferably, the defect correcting apparatus includes the liquid material applying apparatus described above.

  The liquid material coating apparatus of the present invention can reduce the contact pressure between the coating needle and the substrate.

It is a figure which shows the principal part of such a defect correction apparatus. It is a figure which shows the structure of the application | coating unit shown in FIG. It is sectional drawing which shows the structure of the coating material container shown in FIG. It is a flowchart which shows the ink application | coating operation | movement of the defect correction apparatus shown in FIGS. It is a figure which shows the liquid material application apparatus 6 of this Embodiment 1. FIG. It is a figure which shows the principal part of the liquid material application apparatus 6 of this Embodiment 1. FIG. It is a figure which shows 6 A of liquid material application apparatuses of this Embodiment 2. It is a figure which shows the principal part of 6 A of liquid material application apparatuses of this Embodiment 2. It is a figure which shows the liquid material coating device 6B of this Embodiment 3. FIG. It is a figure which shows the principal part of the liquid material application apparatus 6B of this Embodiment 3. It is a figure which shows 6C of liquid material application apparatuses of this Embodiment 4. It is a figure which shows the principal part of 6 C of liquid material application apparatuses of this Embodiment 4. It is a figure which shows the common whole structure of the defect correction apparatus containing the liquid material coating device of Embodiment 1-4 of this invention. It is a figure which shows the principal part of the conventional defect correction apparatus. It is a figure which shows the defect which generate | occur | produces in the manufacturing process of the color filter of LCD. It is a figure which shows the principal part of liquid material coating device 6D of this Embodiment 5, and shows the state before application | coating. It is a figure which shows the state at the time of application | coating of liquid material application device 6D of this Embodiment 5. FIG. In the liquid material applicator 6C of Embodiment 4, it is a figure which shows the state which the applicator needle support part 18 generate | occur | produced the descent | fall deficiency.

  Hereinafter, the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same or an equivalent part in a figure, and the description is not repeated.

  Before describing each of the first to fifth embodiments of the present invention, the common configuration of the defect correcting apparatus that is the basis of the present invention will be described. FIG. 1 is a diagram showing a main part of such a defect correcting apparatus. In FIG. 1, the defect correcting apparatus includes an observation optical system 3 including an observation lens barrel 1 and a plurality of objective lenses 2 having different magnifications. A desired objective lens 2 among a plurality of objective lenses 2 can be selected by a revolver (not shown), and the selected objective lens 2 can be moved below the observation barrel 1. The observation optical system 3 is mounted on the Z-axis table 4. A liquid crystal color filter substrate (hereinafter referred to as a substrate) 5 to be corrected is mounted on an XY table (not shown) facing the objective lens 2. The objective lens 2 is moved to an arbitrary position on the surface of the substrate 5 by moving the substrate 5 in the XY direction (horizontal direction) by the XY table and moving the observation optical system 3 in the Z axis direction (vertical direction) by the Z axis table 4. It is possible to observe by enlarging and focusing.

  FIG. 2 is a diagram showing the configuration of the coating unit shown in FIG. Referring to FIG. 2, the Z-axis table 4 is also mounted with a liquid material application device. As shown in FIGS. 2A and 2B, the liquid material coating apparatus includes four coating units 7 to 10 for R, G, B, and black, and each of the coating units 7 to 10 has a coating needle 11. A coating needle holder 12 and a coating material container (hereinafter also referred to as a container) 13. The coating units 7 and 8 are mounted on the X1 table 14, the coating units 9 and 10 are mounted on the X2 table 15, and the tables 14 and 15 are mounted on the Z-axis table 16 as shown in FIG. Is mounted on the Y-axis table 17.

  The application needle 11 selected for application is moved by the Y-axis table 17 so that the application needle 11 is located at the same position as the Y-axis direction position of the defect position to be applied, and then by the Z-axis table 16. Any one of the application units 7 to 10 including the selected application needle 11 is lowered in the vertical direction so that it can be inserted under the objective lens 2, and the position of the defect position where the application needle 11 applies the X-axis direction position The objective lens 2 and the substrate are moved by moving the X1 table 14 or the X2 table 15 on which any of the application units 7 to 10 including the selected application needle 11 are mounted in the direction of the objective lens 2 so as to come to the same position. 5 can be inserted.

  The coating unit 7 includes two coating needle support portions (arms) 18 and 19 as shown in FIGS. An application needle holder 12 is attached to the tip of the application needle support (arm) 18, an application material container 13 is attached to the tip of the application material container support (arm) 19, and the application needle 11 is attached to the application material container 13. Has been inserted.

  As shown in FIG. 3, a hole 13 a is opened at the bottom of the coating material container 13, and the ink 20 is injected. The hole 13a is set to a small size so that the ink 20 does not flow out. A holding part 21 is provided on the side of the coating material container 13, and the holding part 21 is provided with the coating material container 13 on the tip of the coating material container support part (arm) 19 via a magnet (not shown). A coating material container fixing pin 22 for fixing is provided. The opening of the coating material container 13 is closed with a lid 23, and a hole 23 a is opened in the lid 23.

  The application needle 11 has a stepped shape including a small diameter part 11 b on the tip part 11 a side and a large diameter part 11 c fixed to the application needle holder 12, and the diameter of the small diameter part 11 b is the diameter of the hole 13 a of the application material container 13. The diameter is set slightly smaller than the diameter, and the diameter of the large diameter portion 11c is set slightly smaller than the diameter of the hole 23a of the lid 23.

  2A and 2B, the base end portion of the coating material container support portion (arm) 19 is supported on the center portion of the coating needle support portion (arm) 18 by the slide mechanism 24 so as to be movable up and down. A proximal end portion of the needle support portion (arm) 18 is supported by a support member 26 by a slide mechanism 25 so as to be movable up and down. At the lower end of the support member 26, there is provided a stopper portion 27 for restricting the downward movement of the application needle support portion (arm) 18 and the coating material container support portion (arm) 19, and the support member 26 has an application needle support portion. A cylinder 28 for moving the lower end of the base end portion of the (arm) 18 up and down is mounted.

  Next, the operation of this defect correction apparatus will be described. FIG. 3 is a cross-sectional view showing the configuration of the coating material container shown in FIG. Referring to FIG. 3, during standby, coating needle support portion (arm) 18 is held at the upper limit position by cylinder 28, and coating material container support portion (arm) 19 is suspended from coating needle support portion (arm) 18. It has become. At this time, the distance in the vertical direction between the application needle support part (arm) 18 and the application material container support part (arm) 19 is maximized, and as shown in FIG. Soaked in

  FIG. 4 is a flowchart showing the ink application operation of the defect correcting apparatus shown in FIGS. Referring to FIG. 4, at the time of correction, in step S <b> 1, an operator specifies a position where ink 20 is applied to a defect displayed on a monitor screen (not shown). In step S2, it is confirmed whether the objective lens 2 currently used for observation is the objective lens 2 into which the application needle 11 can be inserted, that is, whether the objective lens 2 has a magnification of 10. When the magnification of the objective lens 2 is, for example, 20 times other than 10 times, the revolver is rotated to switch the objective lens 2 to the 10-times objective lens 2 in step S3, and the objective lens 2 is switched by the revolver in step S4. Confirm completion of. When the switching of the objective lens 2 is completed, and when the objective lens 2 is 10 times larger in step S2, the tables 14 to 17 are driven in step S5 to place the desired application needle 11 in the defect correction position. Move to.

  Next, in step S <b> 6, the application needle support part (arm) 18 and the application material container support part (arm) 19 are lowered to the lower limit position by the cylinder 28. At this time, the coating material container support portion (arm) 19 comes into contact with the stopper portion 27 before the coating needle support portion (arm) 18, and the coating needle support portion (arm) 18 and the coating material container support portion (arm) 19. The distance in the vertical direction is minimized, and the tip end portion 11 a of the application needle 11 passes through the hole 13 a of the application material container 13 and protrudes from the bottom of the application material container 13. Ink 20 adheres to the tip 11 a of the protruding application needle 11. Next, in step S7, the application needle 11 is lowered by the Z-axis table 16, the tip portion 11a of the application needle 11 is brought into contact with the defective portion of the substrate 5, and the ink 20 is applied to the defective portion of the substrate 5 in step S8. In step S9, the application needle 11 is raised by the Z-axis table 16, and in step S10, the cylinder 28 is driven to store the application needle 11 in the application material container 13. In steps S6 to S10, one ink application is completed.

  If there are a plurality of defective portions, there are also a plurality of ink application positions. Therefore, in step S11, it is confirmed whether there is a next application position. If there is a next application position, the substrate 5 is determined in step S12. Are moved by an XY table (not shown), and Steps S6 to S10 are performed again. By repeating this operation, ink application to all defective portions is completed. If it is determined in step S11 that there is no next application position, the application needle 11 is retracted from the defect correction position in step S13, and the correction is completed in step S14.

[Embodiment 1]
FIG. 5 is a diagram showing the liquid material coating apparatus 6 according to the first embodiment. FIG. 6 is a diagram illustrating a main part of the liquid material coating apparatus 6 according to the first embodiment.

  Referring to FIGS. 5 and 6, the liquid material application device 6 includes an application material container 13 for storing the application material, an application needle 11, an application needle holder 12 for fixing the application needle 11, and an application needle holder 12. It includes an application needle support portion (arm) 18 that is fixedly supported, a slide mechanism 25 for moving the application needle 11 in the vertical direction, and a support member 26 that supports the slide mechanism 25 so as to be movable in the vertical direction.

  The liquid material application device 6 includes a magnet 110 incorporated in the application needle support portion 18 and an electromagnet 112 incorporated in the support member 26 in order to reduce the contact pressure of the application needle 11. The liquid material application device 6 further includes a cylinder 28 which is a drive mechanism for moving the application needle support portion 18 relative to the support member 26. The distance between the substrate 5 and the support member 26 is set to be constant, and this is not limited to the liquid material coating apparatus of the first embodiment, but the liquid material of the second to fourth embodiments described later. Similarly, the coating device is set to be constant.

  At the time of application standby, the application needle support portion 18 is in a state of being pulled upward by a support pin 29 attached to the cylinder 28. The application needle support 18 and the support pin 29 of the cylinder 28 are not fixed, and a part of the application needle support 18 is caught by the support pin 29 of the cylinder 28. Accordingly, when the support pin 29 of the cylinder 28 is lowered, the application needle support portion 18 is lowered by the weight of the shaded portion in FIG.

  At this time, although not shown, the liquid material coating apparatus of the first embodiment includes a control unit, and this control unit applies an applied current to the electromagnet, thereby generating a repulsive force between the magnet 110 and the electromagnet 112, The contact pressure between the application needle 11 and the substrate 5 when lowered is reduced. That is, the opposite side of the magnet 110 and the electromagnet 112 is a magnetic pole having the same property, and a current can be applied to the electromagnet 112 in a repulsive direction.

  Since the repulsive force can be varied by the amount of current flowing through the electromagnet 112, the repulsive force is reduced at a position where the application needle 11 is far from the substrate, and the repulsion is at a position just before the application needle 11 contacts the substrate 5. It is possible to reduce the contact pressure of the application needle 11 to a final target value by increasing the force.

  In addition, since the repulsive force can be turned on / off by turning on / off the current flowing through the electromagnet 112, when the tip of the application needle 11 descends, for example, the repulsive force is applied at a position just before contacting the substrate 5. It is possible to reduce the contact pressure of the application needle by working.

  Further, in the liquid material application apparatus according to the first embodiment, since the repulsive force for adjusting the contact pressure of the application needle 11 can be turned on / off, the repulsive force is applied immediately before the application needle 11 contacts the substrate 5. Since it can be operated and hardly affects the lowering of the application needle support portion 18, it is possible to reduce the contact pressure of the application needle 11 with almost no delay in application time compared to the conventional application apparatus. is there.

  By adopting such a configuration, it is possible to perform application while reducing the delay in the descending speed of the application needle 11 as much as possible. In addition, although the liquid material application apparatus of Embodiment 1 was demonstrated using the structure by which the magnet 110 and the electromagnet 112 were each incorporated in the application needle | hook support part 18 and the support member 26 here, it is limited to this. Instead, an electromagnet may be used for one of the magnets incorporated in the application needle support 18 and the support member 26.

[Embodiment 2]
FIG. 7 is a diagram showing a liquid material coating apparatus 6A according to the second embodiment. FIG. 8 is a diagram illustrating a main part of the liquid material coating apparatus 6A according to the second embodiment.

  With reference to FIG. 7 and FIG. 8, the liquid material coating apparatus 6 </ b> A of the second embodiment will be described while comparing with the liquid material coating apparatus 6 of the first embodiment. The liquid material application device 6A includes an air injection mechanism 210 instead of the magnet 110 and the electromagnet 112 of the liquid material application device 6.

  As shown in FIGS. 5 and 6, in the liquid material applicator 6 according to the first embodiment, the magnet 110 is incorporated in the application needle support portion 18, the electromagnet 112 is incorporated in the stopper portion 27, and repulsion occurs when an electric current is passed through the electromagnet 112. The contact pressure when the application needle 11 contacts the substrate 5 is reduced by the force.

  On the other hand, in the liquid material coating apparatus 6A of the second embodiment, the air injection mechanism 210 is provided in the stopper portion 27, and the contact pressure is reduced by blowing air to the lower end surface of the coating needle support portion 18.

  Although not shown, the liquid material application apparatus according to the second embodiment includes a control unit. The control unit adjusts the air pressure and the air pressure ON / OFF, thereby adjusting the liquid material application apparatus 6 according to the first embodiment. It is possible to reduce the contact pressure in the same way. Here, the air injection mechanism 210 is provided on the stopper part 27 side, but the present invention is not limited to this, and the air injection mechanism 210 may be provided on the application needle support part 18 side. Since the other configuration of liquid material coating apparatus 6A of the second embodiment is the same as that of liquid material coating apparatus 6 of the first embodiment, description thereof will not be repeated here.

[Embodiment 3]
FIG. 9 is a diagram showing a liquid material coating apparatus 6B according to the third embodiment. FIG. 10 is a diagram illustrating a main part of the liquid material coating apparatus 6B according to the third embodiment.

  With reference to FIGS. 9 and 10, the liquid material coating apparatus 6 </ b> B of the third embodiment will be described while comparing with the liquid material coating apparatus 6 of the first embodiment. The liquid material applicator 6B includes magnets 310 and 312 and an interval adjusting mechanism 320 instead of the magnet 110 and the electromagnet 112 of the liquid material applicator 6.

  The liquid material applicator 6B of Embodiment 3 incorporates magnets into the applicator needle support portion 18 and the stopper portion 27, respectively, and includes a magnet 310 incorporated into the applicator needle support portion 18 and a magnet 312 incorporated into the stopper portion 27. The magnets are arranged so as to face each other, and force is applied in the repulsive direction so that each magnet becomes a magnetic pole of the same polarity.

  In this case, the contact pressure of the application needle 11 can be adjusted by the interval adjusting mechanism 320. In other words, the interval adjusting mechanism 320 can be set to adjust the distance between the magnets, and thereby the contact pressure is adjusted. However, the liquid material coating apparatus according to the third embodiment cannot control ON / OFF of the repulsive force generated between both magnets.

  In the description, the interval adjustment mechanism 320 is provided on the application needle support portion 18 side, but is not limited thereto, and is provided on either the application needle support portion 18 side or the stopper portion 27. That's fine.

  By adopting the configuration of the liquid material applicator 6B, the contact pressure similar to that of the liquid material applicator 6 of the first embodiment can be reduced by adjusting the strength of the magnets 310 and 312 and the interval by the interval adjusting mechanism 320. The other configuration of the liquid material coating apparatus 6B according to the third embodiment is the same as that of the liquid material coating apparatus 6 according to the first embodiment, and therefore description thereof will not be repeated here.

[Embodiment 4]
FIG. 11 is a diagram showing a liquid material coating apparatus 6C according to the fourth embodiment. FIG. 12 is a diagram illustrating a main part of the liquid material coating apparatus 6C according to the third embodiment.

  With reference to FIGS. 11 and 12, the liquid material coating apparatus 6 </ b> C of the fourth embodiment will be described while comparing with the liquid material coating apparatus 6 of the first embodiment. The liquid material application device 6C includes a support spring 410 and a tension adjustment mechanism 420 as a spring adjustment mechanism, instead of the magnet 110 and the electromagnet 112 of the liquid material application device 6.

  The liquid material applicator 6C of the fourth embodiment further includes a support spring (tension spring) 410 between the application needle support 18 and the support member 26, and the application needle support 18 is supported by the support spring (tension spring) 410. By supporting by hanging, the contact pressure of the application needle 11 is reduced.

  Even in this case, the contact pressure of the application needle 11 can be reduced. Specifically, the contact pressure can be adjusted by changing the tension length of the support spring (tensile spring) 410 by a tension adjusting mechanism 420 provided on the support member 26 side. Using the tension adjustment mechanism 420, the application needle is supported by using a pulling back force (shrinkage force) to return the support spring provided between the application needle support portion 18 and the support member 26 from the extended state. The part 18 is lifted upward to reduce the contact pressure between the application needle 11 and the substrate 5. However, ON / OFF of the contact pressure reducing force of the application needle 11 cannot be controlled.

  Here, the support spring is provided between the application needle support portion 18 and the support member 26, but the present invention is not limited thereto, and a support spring may be provided between the application needle support portion 18 and the stopper portion 27. The other configuration of liquid material coating apparatus 6C of the fourth embodiment is similar to that of liquid material coating apparatus 6 of the first embodiment, and therefore description thereof will not be repeated here.

[Embodiment 5]
FIG. 16 is a diagram showing a main part of the liquid material coating apparatus 6D according to the fifth embodiment, and shows a state before coating. FIG. 17 is a diagram illustrating a state at the time of application according to the fifth embodiment. FIG. 18 shows a case where the descent of the application needle support portion 18 is insufficient in the liquid material application device 6C of the fourth embodiment, in which the magnet (magnet) 520 of the liquid material application device 6D of the fifth embodiment is not provided. FIG.

  Referring to FIGS. 16 and 17, liquid material applicator 6 </ b> D is obtained by adding magnet 520 for assisting the descent of the needle to liquid material applicator 6 </ b> C of the fourth embodiment.

  The liquid material applicator 6D of the fifth embodiment cannot control ON / OFF itself of the contact pressure reducing force of the application needle 11 as the liquid material applicators 6B and 6C of the third and fourth embodiments. It becomes effective in the case.

  Specifically, in the liquid material coating apparatus 6C according to the fourth embodiment, the application needle support 18 is suspended and supported by a support spring (a tension spring) 410, whereby the contact pressure between the application needle 11 and the substrate 5 is increased. Reduce.

  However, if the self-weight of the application needle support portion 18 is excessively reduced, there may be a case where it cannot be lowered as shown in FIG. 18 due to the sliding resistance of the slide mechanism 25 when lowered.

  Therefore, the liquid material coating apparatus 6D further includes magnets 520 and 521. The magnet 520 is provided on the support pin 29, while the magnet 521 is provided on the application needle support portion 18 and is disposed to face the magnet 520. The support pin 29 (application needle rising end holding mechanism) holds the application needle support 18 in a state where the application needle support 18 is pulled upward.

  Further, the application needle support 18 is pulled down to the stopper 27 by the cylinder 28 in a state where the magnets 520 and 521 are attracted by magnetic force. Even after the application needle support 18 is stopped by the stopper 27, the cylinder 28 is lowered, so that the magnet 520 and the magnet 521 are separated from each other. Stable application in a state where the contact force is reduced by the spring 410 is possible.

  In addition, although it demonstrated that a magnet (magnet) is arrange | positioned as a mechanism for mutually attracting | sucking, it is not limited to this, One of these may be arrange | positioned as a magnetic body. For example, a magnetic material may be used instead of the magnet 520 provided on the support pin 29.

  Also, stable application is possible even with a configuration in which either the magnet 520 or the magnet 521 is an electromagnet. In this case, for example, even if an electromagnet is used instead of the magnet 520 and the separation distance between the electromagnet and the magnet 521 is small, the influence of the magnetic force can be eliminated by turning off the current of the electromagnet.

  By adopting the configuration of the liquid material coating apparatus 6D according to the fifth embodiment, more stable coating is possible. Further, by using the above-described configuration also in the liquid material coating apparatuses 6B and 6C of the third and fourth embodiments, more stable coating can be performed.

  By adopting the configuration of the liquid material application device according to the first to fifth embodiments, it is possible to reduce the contact pressure when the application needle 11 contacts the substrate 5.

  As a result, in the correction of the color filter of the liquid crystal panel, even when a fine defect of 20 μm or less is corrected, the normal color filter surface is not damaged, and high-quality correction can be performed. Further, in the electrode correction such as the touch panel, the correction can be performed without damaging the base film or the normal electrode portion.

[Configuration of defect correction apparatus including liquid material application apparatus]
FIG. 13 is a diagram showing a common overall configuration of the defect correction apparatus including the liquid material coating apparatus according to the first to fifth embodiments of the present invention. Referring to FIG. 13, this defect correction apparatus includes a correction head including an observation optical system 31, a CCD (Charge Coupled Device) camera 32, a cutting laser device 33, an ink application mechanism 34, and an ink curing light source 35. A Z-axis table 36 that moves the correction head unit in a direction perpendicular to the substrate 5 to be corrected (Z-axis direction), and an X-axis table 37 that mounts the Z-axis table 36 and moves in the X-axis direction. A Y-axis table 38 that mounts the substrate 5 and moves in the Y-axis direction, a control computer 39 that controls the operation of the entire apparatus, a monitor 40 that displays an image taken by the CCD camera 32, and a control And an operation panel 41 for inputting a command from an operator to the computer 39.

  The observation optical system 31 is for observing the surface state of the substrate 5 and the state of the ink 20 applied by the ink application mechanism 34. An image observed by the observation optical system 31 is converted into an electrical signal by the CCD camera 32 and displayed on the monitor 40. The cutting laser device 33 removes unnecessary portions on the substrate 5 by irradiating them with laser light via the observation optical system 31.

  The ink application mechanism 34 corrects the white defect 55 generated on the substrate 5 by applying the ink 20. The ink curing light source 35 includes a CO2 laser, for example, and cures the ink 20 applied by the ink application mechanism 34 by irradiating the laser beam.

  This apparatus configuration is an example. For example, a Z-axis table 36 on which an observation optical system 31 and the like are mounted is mounted on an X-axis table 37, and an X-axis table 37 is further mounted on a Y-axis table 38. A configuration called a gantry system that allows the 36 to move in the XY directions may be used, and the Z-axis table 36 on which the observation optical system 31 and the like are mounted can be moved relative to the correction target substrate 5 in the XY directions. Any configuration is possible.

Finally, Embodiments 1 to 5 will be summarized with reference to the drawings.
As shown in FIGS. 5 to 18, the liquid material application apparatus according to the first to fifth embodiments is a liquid material application apparatus for correcting a defect by applying a liquid material to a fine region on the substrate 5. An application needle 11 for applying a liquid material to a fine region; a slide mechanism 25 for moving the application needle 11 in the vertical direction; a support member 26 for supporting the slide mechanism 25 so as to be movable in the vertical direction; The contact pressure reducing mechanism that reduces the contact pressure between the substrate and the application needle 11 set to have a constant distance (for example, the magnet 110, the electromagnet 112, the air ejection mechanism 210, the magnet 310, the magnet 312 and the support spring 410). ) And a descent assist mechanism (for example, magnets 520 and 521).

  In particular, the liquid material application device according to the first embodiment, as shown in FIGS. 5 and 6, moves the application needle support portion 18 that supports the application needle 11 and the application needle support portion 18 downward. A stopper portion 27 for limiting, and a contact pressure reducing mechanism (for example, the magnet 110 and the electromagnet 112 include a magnet 110 provided at the lower end of the application needle support portion 18 and an electromagnet 112 provided at the stopper portion 27. The first magnet 110 and the second magnet 112 are arranged on the same axis as the axis perpendicular to the substrate 5. Furthermore, although the magnet 110 and the electromagnet 112 are used in the first embodiment, the present invention is not limited to this. Any one of the magnets may be an electromagnet, and the contact pressure reducing mechanism (eg, magnets 110 and 112) further includes a control unit that adjusts the magnitude of the current applied to the electromagnet 112, and the control unit includes an electromagnet. By adjusting the magnitude of the applied current to the stone 112, the contact pressure between the application needle 11 and the substrate 5 is adjusted, and the control unit turns the applied current on from the off state when the tip of the application needle 11 is lowered. By switching to the state, the contact pressure between the application needle 11 and the substrate 5 is reduced.

  Next, as shown in FIGS. 7 and 8, the liquid material application apparatus according to the second embodiment has an application needle support portion 18 that supports the application needle 11 and a downward movement of the application needle support portion 18. And the air injection mechanism 210 that injects air between the application needle support portion 18 and the stopper portion 27. The air injection mechanism 210 adjusts the injection of air to thereby apply the application needle 11. And the contact pressure between the substrate 5 is reduced. The contact pressure reduction mechanism (for example, the air injection mechanism 210) further includes a control unit that adjusts the air flow rate of the air injection mechanism 210. The control unit changes the strength of the air injection mechanism 210 to change the application needle 11 and the substrate. Adjust the contact pressure. The controller reduces the contact pressure between the application needle 11 and the substrate by switching the air injection mechanism from the stopped state to the injection state when the tip of the application needle 11 is lowered.

  Furthermore, in the liquid material application device according to the third embodiment, as shown in FIGS. 9 and 10, the application needle support portion 18 includes the first magnet 310, and the stopper portion 27 includes the second magnet 312. In addition, the first magnet 310 and the second magnet 312 are arranged on the same axis as the vertical axis of the substrate 5, and the opposing magnetic poles of the first magnet 310 and the second magnet 312 are magnetic poles of the same nature. A repulsive force is generated between the first magnet 310 and the second magnet 312. The liquid material application apparatus according to the third embodiment further includes an interval adjustment mechanism 320 that adjusts the distance between the first magnet 310 and the second magnet 312.

  Next, as shown in FIGS. 11 and 12, the liquid material application device of the fourth embodiment includes an application needle support portion 18 that supports the application needle 11, a support member 26, and an application needle support portion 18. And a support spring 410 provided therebetween. Further, the application needle support portion 18 is provided so as to be suspended from the support member 26 by a support spring 410, and a contraction force is generated between the support member 26 and the application needle support portion 18. Further, the liquid material application device of the fourth embodiment further includes a spring adjustment mechanism 420 provided on either the support member 26 side or the application needle support portion 18 side.

  Next, as shown in FIGS. 16 and 17, the liquid material coating apparatus according to the fifth embodiment further includes a magnet 520 in the liquid material coating apparatus according to the third or fourth aspect. In the liquid material application device of the fifth embodiment, when the application needle support portion 18 is lowered by the cylinder 28, the support pin 29 and the magnet 520 are attracted by magnetic force to assist the lowering, and the application needle support portion 18 up to the stopper 27 is supported. Is lowered. After the lowering, the cylinder 28 is further lowered so that the support pin 29 and the magnet 520 are separated. Alternatively, the magnet 520 is used as an electromagnet to turn on / off.

  Preferably, the liquid material application device according to the fifth embodiment has a coating pin support 18 and a support pin 29 for holding the coating needle support 18 at the rising end (the coating needle rising end as shown in FIGS. 16 and 17). Magnet 520 and magnet 521 provided in each of the holding mechanisms), and the magnets 520 and 521 are attracted to each other so that the support pin 29 (application needle rising end holding mechanism) and the application needle support portion 18 are interlocked. Enable operation.

More preferably, one of magnets 520 and 521 includes an electromagnet.
Preferably, the liquid material application device 6D according to the fifth embodiment is provided on one of the application needle support 18 and the support pin 29 (application needle ascending end holding mechanism) that holds the application needle support 18 at the ascending end. And a magnetic body provided on the other, and the magnet and the magnetic body are attracted to each other, so that the support pin 29 (application needle rising end holding mechanism) and the application needle support portion 18 can operate in conjunction with each other. To.

More preferably, the magnet includes an electromagnet.
Further, the defect correcting apparatus includes the liquid material applying apparatus according to the first to fifth embodiments as shown in FIG.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  DESCRIPTION OF SYMBOLS 1 Observation lens tube, 2 Objective lens, 3,31 Observation optical system, 5 Substrate, 6,6A-6C Liquid material application apparatus, 7-10 Application unit, 11 Application needle, 13 Application material container, 18 Application needle support part, 20 ink, 21 holding part, 22 coating material container fixing pin, 24, 25 slide mechanism, 26 support member, 27 stopper part, 28 cylinder, 29 support pin, 32 CCD camera, 33 cutting laser device, 34 ink coating mechanism, 35 ink curing light source, 39 control computer, 40 monitor, 41 operation panel, 110 magnet, 112 electromagnet, 210 air ejection mechanism, 320 interval adjustment mechanism, 410 support spring, 420 tension adjustment mechanism, 520,521 magnet.

Claims (18)

In a liquid material coating apparatus for correcting a defect by applying a liquid material to a fine region on a substrate,
An application needle for applying a liquid material to the fine region;
An application needle support part for supporting the application needle;
A slide mechanism for moving the application needle support portion in the vertical direction;
And a support member for movably supporting the slide mechanism in the vertical direction,
The distance between the support member and the substrate is set to be constant,
A liquid material coating apparatus, further comprising a contact pressure reducing mechanism that reduces a contact pressure between the substrate and the application needle from a pressure generated by a weight of the application needle and the application needle support portion . The liquid material applicator is
Further comprising a stopper portion for limiting the downward movement of the front Symbol coated needle support,
The contact pressure reducing mechanism is
A first magnet provided at a lower end of the application needle support portion;
A second magnet provided in the stopper portion,
The liquid material coating apparatus according to claim 1, wherein the first magnet and the second magnet are arranged coaxially with an axis perpendicular to the substrate.   The liquid material coating apparatus according to claim 2, wherein one of the first magnet and the second magnet includes an electromagnet. The contact pressure reducing mechanism is
A controller that adjusts the magnitude of the current applied to the electromagnet;
The liquid material coating apparatus according to claim 3, wherein the control unit adjusts a contact pressure between the coating needle and the substrate by adjusting a magnitude of an electric current applied to the electromagnet.   The liquid material according to claim 4, wherein the controller reduces the contact pressure between the application needle and the substrate by switching the applied current from an off state to an on state when the tip of the application needle descends. Coating device. The liquid material applicator is
A stopper portion for limiting the downward movement of the front Symbol coated needle support,
An air injection mechanism for injecting air between the application needle support portion and the stopper portion,
The liquid material application apparatus according to claim 1, wherein the air injection mechanism reduces the contact pressure between the application needle and the substrate by adjusting the injection of the air. The contact pressure reducing mechanism is
A control unit for adjusting an air flow rate of the air injection mechanism;
The liquid material coating apparatus according to claim 6, wherein the control unit adjusts a contact pressure between the coating needle and the substrate by changing a strength of the air ejection mechanism.   The said control part reduces the contact pressure of the said application needle and the said board | substrate by switching the said air injection mechanism from a stop state to an injection state, when the front-end | tip of the said application needle falls. Liquid material applicator. A stopper part for restricting the downward movement of the application needle support part ;
The application needle support portion includes a first magnet,
The stopper portion includes a second magnet,
The first magnet and the second magnet are arranged coaxially with the substrate and a vertical axis,
The opposing magnetic poles of the first magnet and the second magnet are provided to have the same nature,
The liquid material coating apparatus according to claim 1, wherein a repulsive force is generated between the first magnet and the second magnet. The liquid material applicator is
The liquid material coating apparatus according to claim 9, further comprising an interval adjustment mechanism that adjusts a distance between the first magnet and the second magnet. The liquid material applicator is
The liquid material application device according to claim 1, further comprising a support spring provided between the support member and the application needle support portion.   The liquid according to claim 11, wherein the application needle support portion is provided to be suspended from the support member by the support spring, and a contraction force is generated between the support member and the application needle support portion. Material applicator. The liquid material applicator is
The liquid material application device according to claim 12, further comprising a spring adjustment mechanism provided on either the support member side or the application needle support portion side. The liquid material applicator is
An application needle rising end holding mechanism for holding the application needle support portion at the rising end;
A third magnet and a fourth magnet provided in each of the application needle support portion and the application needle rising end holding mechanism;
The said 3rd and 4th magnet makes the said application needle | hook raising end holding | maintenance mechanism and the said application needle | hook support part operate | moved interlockingly by adsorb | sucking together, The any one of Claims 9-13 The liquid material coating apparatus as described.   The liquid material coating apparatus according to claim 14, wherein one of the third magnet and the fourth magnet includes an electromagnet. The liquid material applicator is
An application needle rising end holding mechanism for holding the application needle support portion at the rising end;
A third magnet provided on one of the application needle support portion and the application needle rising end holding mechanism, and a magnetic body provided on the other,
The said 3rd magnet and the said magnetic body adsorb | suck mutually, The said applicator needle raising end holding mechanism and the said applicator needle support part can operate | move interlockingly, and any one of Claims 9-13. The liquid material coating device described in 1.   The liquid material coating apparatus according to claim 16, wherein the third magnet includes an electromagnet.   A defect correction apparatus comprising the liquid material coating apparatus according to claim 1.

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