JP5955262B2 - 半導体冷却装置 - Google Patents
半導体冷却装置 Download PDFInfo
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- JP5955262B2 JP5955262B2 JP2013090875A JP2013090875A JP5955262B2 JP 5955262 B2 JP5955262 B2 JP 5955262B2 JP 2013090875 A JP2013090875 A JP 2013090875A JP 2013090875 A JP2013090875 A JP 2013090875A JP 5955262 B2 JP5955262 B2 JP 5955262B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3675—Cooling facilitated by shape of device characterised by the shape of the housing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/367—Cooling facilitated by shape of device
- H01L23/3672—Foil-like cooling fins or heat sinks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/467—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing gases, e.g. air
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
- H01L23/4735—Jet impingement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Description
本発明の実施の形態1について、図面を用いて以下に説明する。図1は、実施の形態1に係る半導体冷却装置1を備えた半導体装置の断面図である。半導体装置は、半導体チップ10a,10bと、半導体冷却装置1とを備えている。
次に、実施の形態2に係る半導体冷却装置1Bについて説明する。図3は、実施の形態2に係る半導体冷却装置1Bを備えた半導体装置の断面図である。なお、実施の形態2において、実施の形態1で説明したものと同一の構成要素については同一符号を付して説明は省略する。
次に、実施の形態3に係る半導体冷却装置1Dについて説明する。図5は、実施の形態3に係る半導体冷却装置1Dを備えた半導体装置の断面図である。なお、実施の形態3において、実施の形態1,2で説明したものと同一の構成要素については同一符号を付して説明は省略する。
次に、実施の形態4に係る半導体冷却装置1Eについて説明する。図6は、実施の形態4に係る半導体冷却装置1Eを備えた半導体装置の断面図である。なお、実施の形態4において、実施の形態1〜3で説明したものと同一の構成要素については同一符号を付して説明は省略する。
Claims (4)
- 絶縁層を介して搭載された半導体チップを冷却する半導体冷却装置であって、
前記半導体チップを冷却するための冷却媒体が流動する冷却媒体流路と、
前記冷却媒体流路の上流側の領域に設けられ、かつ、前記冷却媒体を層流にして流動させる層流部と、
前記冷却媒体流路において前記層流部よりも下流側の領域に設けられ、かつ、前記層流部から層流にして流動された冷却媒体を乱流にして流動させる乱流部と、
を備え、
前記層流部において前記半導体チップが搭載された側の領域に、網目状の層流材が設けられ、前記層流部において前記半導体チップが搭載されない側の領域に、水平方向に延びる複数の層流材が設けられた、半導体冷却装置。 - 前記乱流部において前記半導体チップが搭載された側の領域に突起が設けられた、請求項1記載の半導体冷却装置。
- 前記乱流部に柱部材が設けられた、請求項1記載の半導体冷却装置。
- 前記半導体チップはワイドバンドギャップ半導体を用いて形成された、請求項1から請求項3のいずれか1つに記載の半導体冷却装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013090875A JP5955262B2 (ja) | 2013-04-24 | 2013-04-24 | 半導体冷却装置 |
US14/145,310 US9123697B2 (en) | 2013-04-24 | 2013-12-31 | Semiconductor cooling device |
DE201410200223 DE102014200223A1 (de) | 2013-04-24 | 2014-01-09 | Halbleiterkühlvorrichtung |
US14/706,850 US9171776B2 (en) | 2013-04-24 | 2015-05-07 | Semiconductor cooling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013090875A JP5955262B2 (ja) | 2013-04-24 | 2013-04-24 | 半導体冷却装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014216397A JP2014216397A (ja) | 2014-11-17 |
JP5955262B2 true JP5955262B2 (ja) | 2016-07-20 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2013090875A Active JP5955262B2 (ja) | 2013-04-24 | 2013-04-24 | 半導体冷却装置 |
Country Status (3)
Country | Link |
---|---|
US (2) | US9123697B2 (ja) |
JP (1) | JP5955262B2 (ja) |
DE (1) | DE102014200223A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180063704A (ko) * | 2016-12-02 | 2018-06-12 | 엘지전자 주식회사 | 방열 장치 |
JP7197921B2 (ja) | 2020-02-25 | 2022-12-28 | 株式会社笠井仏檀工芸 | 作業用フェイスマスク |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9693487B2 (en) | 2015-02-06 | 2017-06-27 | Caterpillar Inc. | Heat management and removal assemblies for semiconductor devices |
TWI635248B (zh) * | 2016-09-02 | 2018-09-11 | 宏碁股份有限公司 | 蒸發器及其製作方法 |
CN109755193B (zh) * | 2017-11-01 | 2020-09-29 | 中车株洲电力机车研究所有限公司 | 功率模块寿命试验冷却装置 |
DE102019202425A1 (de) * | 2019-02-22 | 2020-10-22 | Volkswagen Aktiengesellschaft | Anordnung zum gleichmäßigen Kühlen von Bauteilen und Kraftfahrzeug mit zumindest einer Anordnung |
DE102021123040B4 (de) * | 2021-09-06 | 2023-03-30 | Danfoss Silicon Power Gmbh | Kühler für ein elektronisches Bauteil und solch einen Kühler umfassendes Leistungsmodul |
WO2023063192A1 (ja) * | 2021-10-14 | 2023-04-20 | 日本電産株式会社 | 放熱部材 |
WO2023181913A1 (ja) * | 2022-03-24 | 2023-09-28 | ニデック株式会社 | 放熱部材、および半導体モジュール |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001053207A (ja) | 1999-08-16 | 2001-02-23 | Mitsubishi Electric Corp | モジュール用冷却装置 |
US7215545B1 (en) * | 2003-05-01 | 2007-05-08 | Saeed Moghaddam | Liquid cooled diamond bearing heat sink |
JP2005136278A (ja) * | 2003-10-31 | 2005-05-26 | Mitsubishi Electric Corp | パワー半導体モジュール及びその製造方法 |
JP2007067228A (ja) | 2005-08-31 | 2007-03-15 | Toyota Industries Corp | 回路基板 |
EP1761114A3 (en) | 2005-08-31 | 2009-09-16 | Kabushiki Kaisha Toyota Jidoshokki | Circuit board |
JP4600220B2 (ja) * | 2005-09-01 | 2010-12-15 | 三菱マテリアル株式会社 | 冷却器及びパワーモジュール |
US20090145581A1 (en) * | 2007-12-11 | 2009-06-11 | Paul Hoffman | Non-linear fin heat sink |
JP4985382B2 (ja) * | 2007-12-21 | 2012-07-25 | 株式会社デンソー | 半導体冷却構造 |
JP4819071B2 (ja) * | 2008-02-06 | 2011-11-16 | 本田技研工業株式会社 | 電気車両及び車両用dc/dcコンバータの冷却方法 |
JP5381561B2 (ja) * | 2008-11-28 | 2014-01-08 | 富士電機株式会社 | 半導体冷却装置 |
WO2012042849A1 (ja) * | 2010-09-30 | 2012-04-05 | ダイキン工業株式会社 | 冷却器及びそれを備えた冷凍装置 |
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2013
- 2013-04-24 JP JP2013090875A patent/JP5955262B2/ja active Active
- 2013-12-31 US US14/145,310 patent/US9123697B2/en active Active
-
2014
- 2014-01-09 DE DE201410200223 patent/DE102014200223A1/de active Pending
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2015
- 2015-05-07 US US14/706,850 patent/US9171776B2/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180063704A (ko) * | 2016-12-02 | 2018-06-12 | 엘지전자 주식회사 | 방열 장치 |
KR101880478B1 (ko) * | 2016-12-02 | 2018-07-20 | 엘지전자 주식회사 | 방열 장치 |
JP7197921B2 (ja) | 2020-02-25 | 2022-12-28 | 株式会社笠井仏檀工芸 | 作業用フェイスマスク |
Also Published As
Publication number | Publication date |
---|---|
JP2014216397A (ja) | 2014-11-17 |
DE102014200223A1 (de) | 2014-10-30 |
US9123697B2 (en) | 2015-09-01 |
US20140319674A1 (en) | 2014-10-30 |
US9171776B2 (en) | 2015-10-27 |
US20150243581A1 (en) | 2015-08-27 |
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