JP5951589B2 - 光導波路素子 - Google Patents

光導波路素子 Download PDF

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Publication number
JP5951589B2
JP5951589B2 JP2013245782A JP2013245782A JP5951589B2 JP 5951589 B2 JP5951589 B2 JP 5951589B2 JP 2013245782 A JP2013245782 A JP 2013245782A JP 2013245782 A JP2013245782 A JP 2013245782A JP 5951589 B2 JP5951589 B2 JP 5951589B2
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Japan
Prior art keywords
ridge portion
thin layer
optical waveguide
ridge
tape
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JP2013245782A
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Japanese (ja)
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JP2015102844A (ja
JP2015102844A5 (enExample
Inventor
浅井　圭一郎
圭一郎 浅井
山口　省一郎
省一郎 山口
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NGK Insulators Ltd
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NGK Insulators Ltd
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Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2013245782A priority Critical patent/JP5951589B2/ja
Priority to US14/534,373 priority patent/US10564513B2/en
Priority to TW103140004A priority patent/TWI693438B/zh
Priority to CN201410705957.6A priority patent/CN104678494B/zh
Publication of JP2015102844A publication Critical patent/JP2015102844A/ja
Publication of JP2015102844A5 publication Critical patent/JP2015102844A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35—Non-linear optics
    • G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
    • G02F1/3503—Structural association of optical elements, e.g. lenses, with the non-linear optical device

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2013245782A 2013-11-28 2013-11-28 光導波路素子 Active JP5951589B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013245782A JP5951589B2 (ja) 2013-11-28 2013-11-28 光導波路素子
US14/534,373 US10564513B2 (en) 2013-11-28 2014-11-06 Optical waveguide devices
TW103140004A TWI693438B (zh) 2013-11-28 2014-11-19 光波導元件
CN201410705957.6A CN104678494B (zh) 2013-11-28 2014-11-27 光波导器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013245782A JP5951589B2 (ja) 2013-11-28 2013-11-28 光導波路素子

Publications (3)

Publication Number Publication Date
JP2015102844A JP2015102844A (ja) 2015-06-04
JP2015102844A5 JP2015102844A5 (enExample) 2015-07-16
JP5951589B2 true JP5951589B2 (ja) 2016-07-13

Family

ID=53182748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013245782A Active JP5951589B2 (ja) 2013-11-28 2013-11-28 光導波路素子

Country Status (4)

Country Link
US (1) US10564513B2 (enExample)
JP (1) JP5951589B2 (enExample)
CN (1) CN104678494B (enExample)
TW (1) TWI693438B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106154426A (zh) * 2016-06-30 2016-11-23 派尼尔科技（天津）有限公司 一种用于铌酸锂薄膜波导的耦合方式及其实现方法
JP7037287B2 (ja) * 2017-06-01 2022-03-16 株式会社フジクラ 光導波路素子
CN107505736B (zh) * 2017-10-13 2019-11-08 上海交通大学 基于周期性极化铌酸锂脊型波导结构的电光偏振旋转器
US10589255B1 (en) 2018-10-11 2020-03-17 Imam Abdulrahman Bin Faisal University Tantalum vanadate nanorods and methods of their make and use
JP7160194B2 (ja) * 2019-05-30 2022-10-25 日本電信電話株式会社 波長変換素子
US12656637B1 (en) 2019-11-27 2026-06-16 HyperLight Corporation Lithium niobate photonic devices having engineered lithium niobate, silicon dioxide, and electrode extension thickness
JP7701354B2 (ja) 2019-11-27 2025-07-01 ハイパーライト・コーポレーション 改良電極を有する電気光学デバイス
US12282214B2 (en) 2019-11-27 2025-04-22 HyperLight Corporation Thin film lithium niobate optical device having an engineered substrate for heterogeneous integration
US12601938B2 (en) 2019-11-27 2026-04-14 HyperLight Corporation Electro-optic devices having closely spaced engineered electrodes
CN115885208A (zh) * 2020-06-02 2023-03-31 超光公司 高性能光调制器和驱动器
CN112099286B (zh) * 2020-09-29 2021-09-03 清华大学 光学谐波产生器及其制备方法
US11940713B2 (en) * 2020-11-10 2024-03-26 International Business Machines Corporation Active electro-optic quantum transducers comprising resonators with switchable nonlinearities
CN115145062A (zh) * 2021-03-30 2022-10-04 Tdk株式会社 光学器件
CN114878505A (zh) * 2022-07-11 2022-08-09 中国科学院长春光学精密机械与物理研究所 一种基于平面弯曲光波导的芯片式微型气室
JP7861632B2 (ja) * 2022-09-30 2026-05-19 住友大阪セメント株式会社 光導波路素子及びそれを用いた光変調デバイス並びに光送信装置

Family Cites Families (18)

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US3874782A (en) * 1973-10-01 1975-04-01 Bell Telephone Labor Inc Light-guiding switch, modulator and deflector employing antisotropic substrate
US6631231B2 (en) * 2000-03-21 2003-10-07 Matsushita Electric Industrial Co., Ltd. Optical waveguide elements, optical wavelength conversion elements, and process for producing optical waveguide elements
JP3848093B2 (ja) * 2000-03-21 2006-11-22 松下電器産業株式会社 光導波路素子、光波長変換素子および光導波路素子の製造方法
US7469558B2 (en) * 2001-07-10 2008-12-30 Springworks, Llc As-deposited planar optical waveguides with low scattering loss and methods for their manufacture
JP2003131182A (ja) 2001-10-25 2003-05-08 Mitsui Chemicals Inc 光導波路型光素子およびその製造方法
US7295742B2 (en) 2002-05-31 2007-11-13 Matsushita Electric Industrial Co., Ltd. Optical element and method for producing the same
CN1936629A (zh) 2002-05-31 2007-03-28 松下电器产业株式会社 光学元件的制造方法
US8989523B2 (en) * 2004-01-22 2015-03-24 Vescent Photonics, Inc. Liquid crystal waveguide for dynamically controlling polarized light
WO2006041172A1 (ja) * 2004-10-12 2006-04-20 Ngk Insulators, Ltd. 光導波路基板および高調波発生デバイス
DE602007003053D1 (de) 2006-06-28 2009-12-17 Jds Uniphase Corp Waferskalierungsverfahren zur Herstellung optischer Wellenleitervorrichtungen und damit hergestellte optischer Wellenleitervorrichtungen
JP5133571B2 (ja) * 2007-01-25 2013-01-30 住友大阪セメント株式会社 放射モード光モニタ付導波路型光変調器
EP2214049B1 (en) * 2009-02-03 2011-12-07 Optisense B.V. Integrated optical waveguide interferometric sensor
JP5313198B2 (ja) * 2010-03-30 2013-10-09 住友大阪セメント株式会社 導波路型偏光子
JP2012078375A (ja) * 2010-09-30 2012-04-19 Sumitomo Osaka Cement Co Ltd 光導波路素子
JP5363679B2 (ja) * 2011-03-17 2013-12-11 日本碍子株式会社 光変調素子
TW201344265A (zh) 2012-04-27 2013-11-01 Hon Hai Prec Ind Co Ltd 脊型y分支光波導結構的製作方法
CN103383478A (zh) * 2012-05-02 2013-11-06 鸿富锦精密工业（深圳）有限公司 脊型y分支光波导结构的制作方法
US8900899B2 (en) * 2012-07-02 2014-12-02 Payam Rabiei Method for production of optical waveguides and coupling and devices made from the same

Also Published As

Publication number Publication date
CN104678494B (zh) 2019-05-21
US10564513B2 (en) 2020-02-18
TW201535001A (zh) 2015-09-16
TWI693438B (zh) 2020-05-11
US20150147038A1 (en) 2015-05-28
JP2015102844A (ja) 2015-06-04
CN104678494A (zh) 2015-06-03

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