JP5950087B2 - 物理量検出デバイス、物理量検出器、および電子機器 - Google Patents
物理量検出デバイス、物理量検出器、および電子機器 Download PDFInfo
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- JP5950087B2 JP5950087B2 JP2012070583A JP2012070583A JP5950087B2 JP 5950087 B2 JP5950087 B2 JP 5950087B2 JP 2012070583 A JP2012070583 A JP 2012070583A JP 2012070583 A JP2012070583 A JP 2012070583A JP 5950087 B2 JP5950087 B2 JP 5950087B2
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012070583A JP5950087B2 (ja) | 2012-03-27 | 2012-03-27 | 物理量検出デバイス、物理量検出器、および電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012070583A JP5950087B2 (ja) | 2012-03-27 | 2012-03-27 | 物理量検出デバイス、物理量検出器、および電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013205019A JP2013205019A (ja) | 2013-10-07 |
| JP2013205019A5 JP2013205019A5 (enExample) | 2015-05-07 |
| JP5950087B2 true JP5950087B2 (ja) | 2016-07-13 |
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ID=49524279
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012070583A Expired - Fee Related JP5950087B2 (ja) | 2012-03-27 | 2012-03-27 | 物理量検出デバイス、物理量検出器、および電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5950087B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771358A (zh) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | 一种微型差动式全石英谐振加速度计 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE19719779A1 (de) * | 1997-05-10 | 1998-11-12 | Bosch Gmbh Robert | Beschleunigungssensor |
| WO2002093180A1 (en) * | 2001-05-15 | 2002-11-21 | Honeywell International Inc. | Accelerometer strain relief structure |
| JP4905574B2 (ja) * | 2010-03-25 | 2012-03-28 | 株式会社豊田中央研究所 | 可動部分を備えている積層構造体 |
| WO2011162239A1 (ja) * | 2010-06-21 | 2011-12-29 | 大日本印刷株式会社 | 力学量センサ |
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2012
- 2012-03-27 JP JP2012070583A patent/JP5950087B2/ja not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| JP2013205019A (ja) | 2013-10-07 |
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