JP5933198B2 - 結晶太陽電池の製造方法 - Google Patents
結晶太陽電池の製造方法 Download PDFInfo
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- JP5933198B2 JP5933198B2 JP2011146553A JP2011146553A JP5933198B2 JP 5933198 B2 JP5933198 B2 JP 5933198B2 JP 2011146553 A JP2011146553 A JP 2011146553A JP 2011146553 A JP2011146553 A JP 2011146553A JP 5933198 B2 JP5933198 B2 JP 5933198B2
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- 238000000034 method Methods 0.000 title claims description 75
- 238000004519 manufacturing process Methods 0.000 title claims description 35
- 150000002500 ions Chemical class 0.000 claims description 99
- 239000000758 substrate Substances 0.000 claims description 86
- 238000000137 annealing Methods 0.000 claims description 68
- 238000006243 chemical reaction Methods 0.000 claims description 49
- 238000011282 treatment Methods 0.000 claims description 49
- 239000004065 semiconductor Substances 0.000 claims description 42
- 239000013078 crystal Substances 0.000 claims description 26
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 238000009792 diffusion process Methods 0.000 claims description 7
- -1 oxygen ions Chemical class 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 4
- 229910001882 dioxygen Inorganic materials 0.000 claims description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 32
- 238000002513 implantation Methods 0.000 description 22
- 238000005468 ion implantation Methods 0.000 description 21
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 8
- 229910021419 crystalline silicon Inorganic materials 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000001568 sexual effect Effects 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
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- Photovoltaic Devices (AREA)
Description
図1は、本発明の第一実施形態に係る、結晶太陽電池100の構成について説明する図である。結晶太陽電池100は、光を受光する受光面と、受光面と対向する裏面との間で光電変換機能を発現する結晶性基板101を備えた太陽電池である。結晶性基板101は、p型の単結晶または多結晶シリコンからなる平板状の基体である。
図1に示した、第一実施形態に係る結晶太陽電池100の製造方法について、説明する。図2(a)および図2(b)は、それぞれ結晶太陽電池100を製造する、従来の工程フローおよび第一実施形態に係る工程フローを示している。
102・・・p型半導体層、103・・・n型半導体層、
104・・・窒化膜。
Claims (5)
- 光を受光する受光面と該受光面と対向する裏面との間で光電変換機能を発現する結晶基板を具備する結晶太陽電池の製造方法であって、
前記結晶基板として、p型の単結晶又は多結晶シリコンからなる平板状の基体を用い、
前記基体の裏面をなす他方の主面側に、p型のイオンを注入して、p型半導体層を形成する第一工程と、前記基体に対して、第一アニール処理を行う第二工程と、前記基体の受光面をなす一方の主面側に、n型のイオンを注入して、n型半導体層を形成する第三工程と、前記基体に対して、第二アニール処理を行う第四工程と、を順に少なくとも備え、
さらに、前記第二工程と前記第三工程との間に、前記第一アニール処理の際に前記基体の表面に形成された酸化膜を、該酸化膜中に含まれる酸素イオンが前記基体の内部に拡散することを防ぐために、除去する工程Aと、前記第四工程の後に、前記第二アニール処理の際に前記基体の表面に形成された酸化膜を、該酸化膜中に含まれる酸素イオンが前記基体の内部に拡散することを防ぐために、除去する工程Bの両方、またはそのいずれか一方を有し、
前記第一アニール処理および前記第二アニール処理は、酸素ガスが供給された加熱室において、それぞれ行う、ことを特徴とする結晶太陽電池の製造方法。 - 前記第二工程の温度は、前記第四工程の温度より高い、ことを特徴とする請求項1に記載の結晶太陽電池の製造方法。
- 前記第二工程の温度は900℃以上である、ことを特徴とする請求項2に記載の結晶太陽電池の製造方法。
- 前記第四工程の温度は870℃以下である、ことを特徴とする請求項2または3に記載の結晶太陽電池の製造方法。
- 前記第一工程において、前記基体の二つの主面にテクスチャーを形成したものを用いる、ことを特徴とする請求項1乃至4のいずれか一項に記載の結晶太陽電池の製造方法。
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FR3003687B1 (fr) * | 2013-03-20 | 2015-07-17 | Mpo Energy | Procede de dopage de plaques de silicium |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPS5655039A (en) * | 1979-10-12 | 1981-05-15 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
JPS61198648A (ja) * | 1985-02-27 | 1986-09-03 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
JP4812147B2 (ja) * | 1999-09-07 | 2011-11-09 | 株式会社日立製作所 | 太陽電池の製造方法 |
JP4974183B2 (ja) * | 2008-09-12 | 2012-07-11 | シャープ株式会社 | 光電変換装置 |
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