JP5922542B2 - 積層膜の形成方法およびその形成装置 - Google Patents
積層膜の形成方法およびその形成装置 Download PDFInfo
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- JP5922542B2 JP5922542B2 JP2012205788A JP2012205788A JP5922542B2 JP 5922542 B2 JP5922542 B2 JP 5922542B2 JP 2012205788 A JP2012205788 A JP 2012205788A JP 2012205788 A JP2012205788 A JP 2012205788A JP 5922542 B2 JP5922542 B2 JP 5922542B2
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- 238000000034 method Methods 0.000 title claims description 49
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 71
- 229910052710 silicon Inorganic materials 0.000 claims description 71
- 239000010703 silicon Substances 0.000 claims description 71
- 239000007789 gas Substances 0.000 claims description 68
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 51
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 49
- 239000007800 oxidant agent Substances 0.000 claims description 35
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 29
- 230000008569 process Effects 0.000 claims description 22
- 229910052739 hydrogen Inorganic materials 0.000 claims description 19
- 239000001257 hydrogen Substances 0.000 claims description 18
- 239000003795 chemical substances by application Substances 0.000 claims description 16
- 238000005121 nitriding Methods 0.000 claims description 16
- 229910052760 oxygen Inorganic materials 0.000 claims description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 8
- 230000001590 oxidative effect Effects 0.000 claims description 5
- 239000001272 nitrous oxide Substances 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims 1
- 150000004767 nitrides Chemical class 0.000 claims 1
- 238000010926 purge Methods 0.000 description 19
- 235000012431 wafers Nutrition 0.000 description 19
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 17
- 239000004065 semiconductor Substances 0.000 description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- 238000010438 heat treatment Methods 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 14
- 238000005530 etching Methods 0.000 description 12
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 229910001882 dioxygen Inorganic materials 0.000 description 4
- 230000006641 stabilisation Effects 0.000 description 4
- 238000011105 stabilization Methods 0.000 description 4
- 238000003860 storage Methods 0.000 description 4
- 230000002411 adverse Effects 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- LXEXBJXDGVGRAR-UHFFFAOYSA-N trichloro(trichlorosilyl)silane Chemical compound Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl LXEXBJXDGVGRAR-UHFFFAOYSA-N 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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Description
反応室内に収容された複数枚の被処理体にシリコン酸化膜を形成するシリコン酸化膜形成工程と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給して、前記複数枚の被処理体にシリコン酸窒化膜を形成するシリコン酸窒化膜形成工程と、
を、有し、
前記シリコン酸化膜形成工程及び前記シリコン酸窒化膜形成工程を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成するステップを備え、
前記積層膜を形成するステップにおける前記シリコン酸化膜形成工程では、
(a)前記反応室内にシリコンソースと酸化剤とを供給する工程、
(b)前記反応室内に水素ガスを供給して当該反応室内を水素雰囲気下とした状態で当該反応室内にシリコンソースと酸化剤とを供給する工程、
(c)前記反応室内にシリコンソースと酸化剤とを供給し、前記複数枚の被処理体にシリコン酸化膜を形成した後、前記反応室内に水素及び酸素を供給して当該反応室内を水素及び酸素雰囲気下とする工程、及び、
(d)前記反応室内に水素ガスを供給して当該反応室内を水素雰囲気下とした状態で当該反応室内にシリコンソースと酸化剤とを供給し、前記複数枚の被処理体にシリコン酸化膜を形成した後、前記反応室内に水素及び酸素を供給して当該反応室内を水素及び酸素雰囲気下とする工程、
の少なくとも1つの工程を用いて、前記複数枚の被処理体にシリコン酸化膜を形成する、ことを特徴とする。
反応室内に収容された複数枚の被処理体にシリコン酸化膜を形成するシリコン酸化膜形成工程と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給して、前記複数枚の被処理体にシリコン酸窒化膜を形成するシリコン酸窒化膜形成工程と、
を、有し、
前記シリコン酸化膜形成工程及び前記シリコン酸窒化膜形成工程を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成するステップを備え、
前記シリコン酸窒化膜形成工程では、前記酸化剤を前記シリコンソースの0.01倍〜10倍供給する、ことを特徴とする。
前記シリコン酸窒化膜形成工程では、例えば、前記酸化剤に亜酸化窒素を用いる。
複数枚の被処理体が収容された反応室内にシリコン酸化膜形成用ガスを供給するシリコン酸化膜形成用ガス供給手段と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給するシリコン酸窒化膜形成用ガス供給手段と、
装置の各部を制御する制御手段と、を備え、
前記制御手段は、
前記シリコン酸化膜形成用ガス供給手段を制御して、前記反応室内にシリコン酸化膜形成用ガスを供給することにより前記複数枚の被処理体にシリコン酸化膜を形成する工程と、
前記シリコン酸窒化膜形成用ガス供給手段を制御して、前記反応室内にシリコンソースと窒化剤と酸化剤とを供給することにより前記複数枚の被処理体にシリコン酸窒化膜を形成する工程と、
を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成し、
前記シリコン酸窒化膜を形成する工程では、前記シリコン酸窒化膜形成用ガス供給手段を制御して、前記反応室内に前記酸化剤を前記シリコンソースの0.01倍〜10倍供給する、ことを特徴とする。
圧力計(群)123は、反応管2内、処理ガス導入管13内、排気管16内等の各部の圧力を測定し、その測定値を制御部100に通知する。
RAM113は、CPU115のワークエリアなどとして機能する。
バス116は、各部の間で情報を伝達する。
2 反応管
3 内管
4 外管
5 マニホールド
6 支持リング
7 蓋体
8 ボートエレベータ
9 ウエハボート
10 半導体ウエハ
11 断熱体
12 昇温用ヒータ
13 処理ガス導入管
14 排気口
15 パージガス供給管
16 排気管
17 バルブ
18 真空ポンプ
100 制御部
111 レシピ記憶部
112 ROM
113 RAM
114 I/Oポート
115 CPU
116 バス
121 操作パネル
122 温度センサ
123 圧力計
124 ヒータコントローラ
125 MFC制御部
126 バルブ制御部
Claims (5)
- 反応室内に収容された複数枚の被処理体にシリコン酸化膜を形成するシリコン酸化膜形成工程と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給して、前記複数枚の被処理体にシリコン酸窒化膜を形成するシリコン酸窒化膜形成工程と、
を、有し、
前記シリコン酸化膜形成工程及び前記シリコン酸窒化膜形成工程を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成するステップを備え、
前記積層膜を形成するステップにおける前記シリコン酸化膜形成工程では、
(a)前記反応室内にシリコンソースと酸化剤とを供給する工程、
(b)前記反応室内に水素ガスを供給して当該反応室内を水素雰囲気下とした状態で当該反応室内にシリコンソースと酸化剤とを供給する工程、
(c)前記反応室内にシリコンソースと酸化剤とを供給し、前記複数枚の被処理体にシリコン酸化膜を形成した後、前記反応室内に水素及び酸素を供給して当該反応室内を水素及び酸素雰囲気下とする工程、及び、
(d)前記反応室内に水素ガスを供給して当該反応室内を水素雰囲気下とした状態で当該反応室内にシリコンソースと酸化剤とを供給し、前記複数枚の被処理体にシリコン酸化膜を形成した後、前記反応室内に水素及び酸素を供給して当該反応室内を水素及び酸素雰囲気下とする工程、
の少なくとも1つの工程を用いて、前記複数枚の被処理体にシリコン酸化膜を形成する、ことを特徴とする積層膜の形成方法。 - 前記積層膜を形成するステップにおける前記シリコン酸化膜形成工程では、前記(a)〜(d)の工程をこの順に複数回ずつ繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成する、ことを特徴とする請求項1に記載の積層膜の形成方法。
- 反応室内に収容された複数枚の被処理体にシリコン酸化膜を形成するシリコン酸化膜形成工程と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給して、前記複数枚の被処理体にシリコン酸窒化膜を形成するシリコン酸窒化膜形成工程と、
を、有し、
前記シリコン酸化膜形成工程及び前記シリコン酸窒化膜形成工程を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成するステップを備え、
前記シリコン酸窒化膜形成工程では、前記酸化剤を前記シリコンソースの0.01倍〜10倍供給する、ことを特徴とする積層膜の形成方法。 - 前記シリコン酸窒化膜形成工程では、前記酸化剤に亜酸化窒素を用いる、ことを特徴とする請求項1乃至3のいずれか1項に記載の積層膜の形成方法。
- 複数枚の被処理体が収容された反応室内にシリコン酸化膜形成用ガスを供給するシリコン酸化膜形成用ガス供給手段と、
前記反応室内にシリコンソースと窒化剤と酸化剤とを供給するシリコン酸窒化膜形成用ガス供給手段と、
装置の各部を制御する制御手段と、を備え、
前記制御手段は、
前記シリコン酸化膜形成用ガス供給手段を制御して、前記反応室内にシリコン酸化膜形成用ガスを供給することにより前記複数枚の被処理体にシリコン酸化膜を形成する工程と、
前記シリコン酸窒化膜形成用ガス供給手段を制御して、前記反応室内にシリコンソースと窒化剤と酸化剤とを供給することにより前記複数枚の被処理体にシリコン酸窒化膜を形成する工程と、
を複数回繰り返し、前記複数枚の被処理体に前記シリコン酸化膜と前記シリコン酸窒化膜との積層膜を形成し、
前記シリコン酸窒化膜を形成する工程では、前記シリコン酸窒化膜形成用ガス供給手段を制御して、前記反応室内に前記酸化剤を前記シリコンソースの0.01倍〜10倍供給する、ことを特徴とする積層膜の形成装置。
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