JP5918197B2 - Bellows mechanism and substrate cutting apparatus and apparatus having the same - Google Patents

Bellows mechanism and substrate cutting apparatus and apparatus having the same Download PDF

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JP5918197B2
JP5918197B2 JP2013242692A JP2013242692A JP5918197B2 JP 5918197 B2 JP5918197 B2 JP 5918197B2 JP 2013242692 A JP2013242692 A JP 2013242692A JP 2013242692 A JP2013242692 A JP 2013242692A JP 5918197 B2 JP5918197 B2 JP 5918197B2
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fold line
bellows
mountain fold
bellows mechanism
drive mechanism
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JP2015100875A (en
JP2015100875A5 (en
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秀和 東
秀和 東
山本　雅之
雅之 山本
新田　一法
一法 新田
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Towa Corp
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Towa Corp
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Priority to CN201410538238.XA priority patent/CN104646385B/en
Priority to KR1020140152630A priority patent/KR101692113B1/en
Priority to TW103139727A priority patent/TW201524663A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • B23Q11/0816—Foldable coverings, e.g. bellows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q11/00—Accessories fitted to machine tools for keeping tools or parts of the machine in good working condition or for cooling work; Safety devices specially combined with or arranged in, or specially adapted for use in connection with, machine tools
    • B23Q11/08—Protective coverings for parts of machine tools; Splash guards
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Auxiliary Devices For Machine Tools (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
  • Dicing (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Diaphragms And Bellows (AREA)

Description

本発明は、各種の機械加工装置における可動部位と固定部位とに亘って装備される防水用あるいは防塵用の蛇腹機構並びにそれを備えた基板切断装置及び装置に関する。 The present invention relates to a waterproof or dustproof bellows mechanism provided over a movable part and a fixed part in various machining apparatuses, and a substrate cutting apparatus and apparatus including the same.

機械加工装置の一例である基板切断装置（ダイシング装置）は、切削加工箇所に切削水を供給しながら切断処理を行うため、飛散した切削水や切削粉が装置内部に入り込むことを防止するための防水防塵構造が備えられる。例えば、特許文献１に示されている基板切断装置においては、基板（半導体ウエハ）が保持されるチャックテーブルを備えた可動台をボールねじを用いて水平に往復移動させるよう構成するとともに、可動台と固定台枠とに亘って蛇腹機構を装着して、ねじ送り駆動機構などを蛇腹機構で囲繞するようにしている。   A substrate cutting device (dicing device), which is an example of a machining device, performs cutting processing while supplying cutting water to a portion to be cut, and thus prevents scattered cutting water and cutting powder from entering the inside of the device. Waterproof and dustproof structure is provided. For example, in the substrate cutting apparatus disclosed in Patent Document 1, a movable table including a chuck table on which a substrate (semiconductor wafer) is held is configured to reciprocate horizontally using a ball screw. A bellows mechanism is mounted over the fixed base frame so that the screw feed drive mechanism is surrounded by the bellows mechanism.

特開平７−１５６０３９号公報JP-A-7-156039

従来の蛇腹機構を構成するシート材１１の展開平面図が図１１に示されている。このシート材１１には、第１山折り線Ｒ１が、蛇腹の伸縮方向に一定間隔をもって形成されるとともに、第２山折り線Ｒ２が第１山折り線Ｒ１に屈折点ａを介して一連に形成され、かつ、蛇腹の伸縮方向に隣接する屈折点ａ同士が、一直線状の第３山折り線Ｒ３で繋がれている。蛇腹の伸縮方向に隣接する第１山折り線Ｒ１の間の中央位置に、第１谷折り線Ｖ１が形成されるとともに、蛇腹の伸縮方向に隣接する第２山折り線Ｒ２の間の中央位置に、第２谷折り線Ｖ２がシート端から所定長さに亘って形成されている。また、第２谷折り線Ｖ２の内方端ｂと第３山折り線Ｒ３の中点ｃに亘って第４山折り線Ｒ４が形成されるとともに、第２谷折り線Ｖ２の内方端ｂと屈折点ａとに亘って第３谷折り線Ｖ３が第３山折り線Ｒ３に対して４５度の傾斜をもって形成されている。   FIG. 11 shows a developed plan view of the sheet material 11 constituting the conventional bellows mechanism. In the sheet material 11, the first mountain fold line R1 is formed at a constant interval in the bellows expansion / contraction direction, and the second mountain fold line R2 is formed in series with the first mountain fold line R1 via the refraction point a. The refraction points a that are formed and adjacent in the direction of expansion and contraction of the bellows are connected by a straight third fold line R3. A first valley fold line V1 is formed at a central position between first mountain fold lines R1 adjacent to the bellows expansion / contraction direction, and a central position between second mountain fold lines R2 adjacent to the bellows expansion / contraction direction. In addition, the second valley fold line V2 is formed over a predetermined length from the sheet end. In addition, a fourth mountain fold line R4 is formed across the inner end b of the second valley fold line V2 and the middle point c of the third mountain fold line R3, and the inner end b of the second valley fold line V2 is formed. The third valley fold line V3 is formed with an inclination of 45 degrees with respect to the third mountain fold line R3.

図１２、図１３に示すように、シート材１１を各折り線Ｒ１〜Ｒ３、Ｖ１〜Ｖ３に沿って折り曲げて第１面蛇腹部１０Ｕと第２面蛇腹部１０Ｓを形成すると、第２面蛇腹部１０Ｓの上端部に、第４山折り線Ｒ４を稜線として折り込まれた直角三角形状の折込み部１２が蛇腹の伸縮方向に一対形成されて、この折込み部１２が第１面蛇腹部１０Ｕの外端部に前後及び下方から被さった状態で蛇腹機構の伸縮に応じて変形することになる。   As shown in FIGS. 12 and 13, when the sheet material 11 is bent along the folding lines R1 to R3 and V1 to V3 to form the first surface bellows portion 10U and the second surface bellows portion 10S, the second surface bellows portion is formed. A pair of right-angled triangular folded portions 12 that are folded with the fourth mountain fold line R4 as a ridgeline are formed at the upper end of the portion 10S in the bellows expansion / contraction direction, and the folded portions 12 are formed outside the first surface bellows portion 10U. The end portion is deformed in accordance with the expansion and contraction of the bellows mechanism in a state where the end portion is covered from the front and rear and the lower side.

上記仕様の折り線を備えた蛇腹機構の伸縮作動が図１４に示されている。この図は、屈折点ａ、内方端ｂ、中点ｃを単純に前後方向に平行移動させて作図したものである。なお図中、ａ'、ｂ'、ｃ'は、移動途中の屈折点ａ、内方端ｂ、中点ｃを示している。   FIG. 14 shows the expansion / contraction operation of the bellows mechanism provided with the folding line having the above specifications. In this figure, the refraction point a, the inner end b, and the middle point c are simply translated in the front-rear direction. In the figure, a ′, b ′, and c ′ indicate a refraction point a, an inward end b, and a midpoint c that are being moved.

蛇腹を最も圧縮した状態では、第２面蛇腹部１０Ｓの上端部に形成される直角三角形状の折込み部１２の稜線、つまり、第４山折り線Ｒ４は第１面蛇腹部１０Ｕにおける谷底線（第１谷折り線Ｖ１）の下方に平行に重複されるが、蛇腹の伸展に伴って折込み部１２の稜線（第４山折り線Ｒ４）は外上がりに傾斜してゆく。そして、図１４（ｂ）で示される正面図上では、作図上（理論上）、内方端ｂと中点ｃとの距離、つまり、折込み部１４の稜線（第４山折り線Ｒ４）は蛇腹が伸展されるほど短くなる。実際には、蛇腹が伸展されるほど折込み部１４の稜線（第４山折り線Ｒ４）は圧縮応力を受けることになり、稜線（第４山折り線Ｒ４）の周辺のシート材が撓まされることで長さ変化が吸収されることになる。即ち、作図上、図１４（ｂ）において、第４山折り線Ｒ４の両端となる内方端ｂと中点ｃとに関して言えば、内方端ｂは水平方向に左右に移動し、中点ｃは垂直方向に上下に移動することを前提に描かれている。このため、作図上、第４山折り線Ｒ４の距離は蛇腹が伸展されるほど短くなる。実際には、第４山折り線Ｒ４の距離は短くなったり長くなったりせず、一定の距離を有するものである。第４山折り線Ｒ４が実際は距離が変わらないにもかかわらず、作図上では短くなり、その差の分だけ、第４山折り線Ｒ４の中点ｃには内方端ｂの方向に圧縮する力が発生してその力が内方端ｂに集中することになる。このとき、第４山折り線Ｒ４の周辺のシート材が撓まされることで距離変化が吸収されることになるが、蛇腹の伸縮回数が増加すると、内方端ｂが疲労して破損することになる。   In the most compressed state of the bellows, the ridgeline of the right-angled triangular folded portion 12 formed at the upper end portion of the second surface bellows portion 10S, that is, the fourth mountain fold line R4 is the valley bottom line ( Although overlapped in parallel below the first valley fold line V1), the ridgeline (fourth mountain fold line R4) of the folding portion 12 inclines upward as the bellows extend. On the front view shown in FIG. 14B, on the drawing (theoretical), the distance between the inner end b and the middle point c, that is, the ridgeline (fourth mountain fold line R4) of the folding portion 14 is The shorter the bellows are, the shorter it becomes. Actually, as the bellows are extended, the ridgeline (fourth mountain fold line R4) of the folding portion 14 is subjected to compressive stress, and the sheet material around the ridgeline (fourth fold line R4) is bent. Thus, the length change is absorbed. That is, in the drawing, in FIG. 14B, regarding the inner end b and the middle point c which are both ends of the fourth mountain fold line R4, the inner end b moves to the left and right in the horizontal direction. c is drawn on the assumption that it moves up and down in the vertical direction. For this reason, on drawing, the distance of 4th mountain fold line R4 becomes so short that a bellows is extended. Actually, the distance of the fourth mountain fold line R4 does not become shorter or longer, and has a certain distance. In spite of the fact that the distance does not change, the fourth mountain fold line R4 is shortened on the drawing, and is compressed in the direction of the inner end b to the middle point c of the fourth mountain fold line R4 by the difference. A force is generated and concentrated at the inner end b. At this time, the sheet material around the fourth mountain fold line R4 is bent to absorb the change in distance. However, when the number of times the bellows is expanded and contracted, the inner end b is fatigued and damaged. become.

従って、折込み部１２における稜線（第４山折り線Ｒ４）の端部、例えば、内方端ｂ、中点ｃなどにおいて、数万回程度の伸縮作動でピンホール状の疲労破損が発生しやすく、耐久性の点で改良の余地があった。   Accordingly, pinhole-like fatigue damage is likely to occur at the end of the ridge line (fourth mountain fold line R4) in the folding part 12, for example, the inner end b, the middle point c, etc., by stretching and contracting several tens of thousands of times. There was room for improvement in terms of durability.

本発明は、このような実情に着目してなされたものであって、繰り返しの伸縮に対する耐久性に優れた蛇腹機構並びにそれを備えた基板切断装置及び装置を提供することを目的とするものである。 The present invention has been made paying attention to such a situation, and an object thereof is to provide a bellows mechanism excellent in durability against repeated expansion and contraction , and a substrate cutting apparatus and apparatus provided with the bellows mechanism. is there.

上記目的を達成するために、本発明では次のように構成している。   In order to achieve the above object, the present invention is configured as follows.

（１）本発明に係る蛇腹機構は、
蛇腹の伸縮方向に一定間隔をもって互いに平行に複数形成される第１面蛇腹部形成用の第１山折り線と、
前記第１山折り線に屈折点を介して一直線状に連なる第２面蛇腹部形成用の第２山折り線と、
蛇腹の伸縮方向に隣接する前記屈折点同士を繋ぐ第３山折り線と、
隣接する前記第１山折り線の間にあって前記第１山折り線と平行に形成されて前記第３山折り線の中点に接続される第１谷折り線と、
隣接する前記第２山折り線の間にあって前記第２山折り線と平行に形成される第２谷折り線と、
前記第２谷折り線の内方端と前記第３山折り線の中点とに亘って形成される第４山折り線と、
前記屈折点と前記第２谷折り線の内方端とに亘って形成される第３谷折り線と、
を備え、
前記第３山折り線、前記第４山折り線、及び前記第３谷折り線によって囲まれた三角形状の折込み部が、蛇腹圧縮に伴って第２面蛇腹部の内部に畳み込まれるよう構成し、
前記第４山折り線の長さを前記第３山折り線の長さより大きく設定してある、
ことを特徴とする。 (1) The bellows mechanism according to the present invention is:
A first mountain fold line for forming a first surface bellows portion formed in parallel with each other at a constant interval in the bellows expansion and contraction direction;
A second mountain fold line for forming a second surface bellows portion that is continuous with the first mountain fold line through a refraction point;
A third fold line connecting the refraction points adjacent to each other in the direction of expansion and contraction of the bellows;
A first valley fold line between the adjacent first fold lines and formed parallel to the first fold line and connected to a midpoint of the third fold line;
A second valley fold line formed between and adjacent to the second mountain fold line, and parallel to the second mountain fold line;
A fourth mountain fold line formed between an inner end of the second valley fold line and a midpoint of the third mountain fold line;
A third valley fold line formed across the refraction point and the inner end of the second valley fold line;
With
A triangular folded portion surrounded by the third mountain fold line, the fourth mountain fold line, and the third valley fold line is configured to be folded into the second surface bellows portion along with the bellows compression. And
The length of the fourth mountain fold line is set larger than the length of the third mountain fold line,
It is characterized by that.

この構成によると、蛇腹機構が圧縮状態から伸展する際に、第３山折り線の中点と第２谷折り線の内端点との距離の変化が可及的に少ないものとなって、折込み部の稜線に作用する応力が小さくなり、蛇腹機構が繰返し伸縮されてもピンホールなどの損傷が発生することが長期間に亘って抑制される。   According to this configuration, when the bellows mechanism is extended from the compressed state, the change in the distance between the midpoint of the third fold line and the inner end point of the second valley fold line becomes as small as possible. The stress acting on the ridgeline of the portion is reduced, and even if the bellows mechanism is repeatedly expanded and contracted, the occurrence of damage such as pinholes is suppressed over a long period of time.

（２）本発明の好ましい実施態様では、前記第４山折り線と前記第３谷折り線とでなされる内角を４５度未満に設定してある。この構成によると、第４山折り線の長さを第３山折り線の長さより大きく設定することができ、所期の機能を発揮する折込み部を形成することができる。   (2) In a preferred embodiment of the present invention, an interior angle formed by the fourth mountain fold line and the third valley fold line is set to be less than 45 degrees. According to this configuration, the length of the fourth mountain fold line can be set larger than the length of the third mountain fold line, and a folded portion that exhibits the intended function can be formed.

（３）本発明の他の実施態様においては、前記第３山折り線と前記第３谷折り線とでなされる内角を４５度に設定してある。この構成によると、第２面蛇腹部を第１面蛇腹部に対して直交させた蛇腹機構を構成することができる。   (3) In another embodiment of the present invention, an inner angle formed by the third mountain fold line and the third valley fold line is set to 45 degrees. According to this structure, the bellows mechanism which made the 2nd surface bellows part orthogonal to the 1st surface bellows part can be comprised.

（４）本発明の他の実施態様においては、
前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を３〜２７度に設定してある。 (4) In another embodiment of the present invention,
Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third fold line is set to 3 to 27 degrees.

この構成によると、第２面蛇腹部を第１面蛇腹部に対して直交させた蛇腹機構の構成において、隣接する前記屈折点を結ぶ線と第３山折り線とでなされる内角を３〜２７度に設定することで、蛇腹機構が伸縮された際の応力発生を抑制することができ、耐久性を効果的に向上させることができる。   According to this configuration, in the configuration of the bellows mechanism in which the second surface bellows portion is orthogonal to the first surface bellows portion, the inner angle formed by the line connecting the adjacent refraction points and the third mountain fold line is 3 to 3. By setting the angle to 27 degrees, the generation of stress when the bellows mechanism is expanded and contracted can be suppressed, and the durability can be effectively improved.

（４）本発明の他の実施態様においては、
前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を５〜２５度に設定してある。 (4) In another embodiment of the present invention,
Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 5 to 25 degrees.

この構成によると、第２面蛇腹部を第１面蛇腹部に対して直交させた蛇腹機構の構成において、隣接する前記屈折点を結ぶ線と第３山折り線とでなされる内角を５〜２５度に設定することで、蛇腹機構が伸縮された際の応力発生をより確実に抑制することができ、耐久性を効果的に向上させることができる。   According to this configuration, in the configuration of the bellows mechanism in which the second surface bellows portion is orthogonal to the first surface bellows portion, the inner angle formed by the line connecting the adjacent refraction points and the third mountain fold line is 5 to 5. By setting the angle to 25 degrees, the generation of stress when the bellows mechanism is expanded and contracted can be more reliably suppressed, and the durability can be effectively improved.

（４）本発明の他の実施態様においては、
前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を１５度に設定してある。 (4) In another embodiment of the present invention,
Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third fold line is set to 15 degrees.

この構成によると、第２面蛇腹部を第１面蛇腹部に対して直交させた蛇腹機構の構成において、蛇腹機構が伸縮された際の応力発生を最小限にすることができ、耐久性を効果的に向上させることができる。   According to this configuration, in the configuration of the bellows mechanism in which the second surface bellows portion is orthogonal to the first surface bellows portion, it is possible to minimize the generation of stress when the bellows mechanism is expanded and contracted. It can be improved effectively.

（５）本発明の他の実施態様においては、屈折形成状態では、前記第３山折り線の中点が前記第２山折り線よりも外方に位置する。この構成によると次のような作用効果がある。すなわち、第４山折り線の長さを第３山折り線の長さより大きく設定してなる本発明の蛇腹機構を屈曲成形すると、この実施形態の構成となる。その結果、前述した所期の機能を発揮する折込み部を形成することができる。   (5) In another embodiment of the present invention, in the refraction formation state, the midpoint of the third mountain fold line is located outward from the second mountain fold line. This configuration has the following operational effects. That is, when the bellows mechanism of the present invention in which the length of the fourth mountain fold line is set larger than the length of the third mountain fold line is bent, the configuration of this embodiment is obtained. As a result, it is possible to form a folded portion that exhibits the intended function described above.

（６）本発明に係る基板切断装置または装置は、
基板を吸着保持するチャックテーブルを備えて往復移動する可動台と、可動台を往復移動させる駆動機構と、駆動機構を収容した固定台枠と、基板切断用の回転ブレードとを備え、前記可動台と固定台枠との間に、可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を蛇腹機構で覆うよう構成した基板切断装置、またはテーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成した装置において、
前記蛇腹機構を、上記構成（１）ないし（５）のいずれかに記載の構造としてある、
ことを特徴とする。 (6) A substrate cutting apparatus or apparatus according to the present invention includes:
A movable table that includes a chuck table that sucks and holds a substrate, reciprocates, a drive mechanism that reciprocates the movable table, a fixed frame that houses the drive mechanism, and a rotating blade for cutting the substrate, the movable table A bellows mechanism that expands and contracts with the reciprocating movement of the movable base is provided between the base plate and the fixed base frame, and the substrate is cut back and forth with a substrate cutting device or a table configured to cover the drive mechanism with the bellows mechanism. A movable table; a drive mechanism for reciprocating the movable table; and a fixed frame that houses the drive mechanism; and the reciprocation of the movable table between both ends of the movable table in the moving direction and the fixed frame. In an apparatus configured to deploy a bellows mechanism that expands and contracts with movement and covers the drive mechanism with the bellows mechanism,
The bellows mechanism is a structure according to any one of the above configurations (1) to (5).
It is characterized by that.

この構成によると、蛇腹機構を頻繁に点検する必要がなくなってメンテナンス性が向上するとともに、亀裂発生に伴う蛇腹機構の取替えのために運転休止の頻度が著しく少なくなり、装置の稼働効率を高める上で有効となる。   According to this configuration, it is not necessary to frequently check the bellows mechanism to improve the maintainability, and the frequency of operation stoppage is significantly reduced due to the replacement of the bellows mechanism due to the occurrence of cracks, thereby improving the operating efficiency of the apparatus. It becomes effective in.

このように、本発明によれば、シート材に形成する折り線の改良によって、繰り返しの伸縮に対する耐久性に優れた蛇腹機構を提供することができ、またこの蛇腹機構を備えることで、メンテナンス性に優れた稼働効率の高い基板切断装置及び装置を提供することができる。
Thus, according to the present invention, by improving the folding line formed on the sheet material, it is possible to provide a bellows mechanism that is excellent in durability against repeated expansion and contraction, and by providing this bellows mechanism, maintainability is improved. It is possible to provide a substrate cutting apparatus and apparatus excellent in operating efficiency and high in operating efficiency.

本発明の第１の実施形態の基板切断装置の概略構成を示す第２面図である。It is a 2nd surface figure which shows schematic structure of the board | substrate cutting device of the 1st Embodiment of this invention. 第１の実施形態の蛇腹機構の斜視図である。It is a perspective view of the bellows mechanism of 1st Embodiment. 第１の実施形態の蛇腹機構を構成するシート材の展開平面図である。It is a development top view of the sheet material which constitutes the bellows mechanism of a 1st embodiment. 第１の変形例の蛇腹機構を構成するシート材の展開平面図である。It is a development top view of the sheet material which constitutes the bellows mechanism of the 1st modification. 第２の変形例の蛇腹機構を構成するシート材の展開平面図である。It is a development top view of the sheet material which constitutes the bellows mechanism of the 2nd modification. 第３の変形例の蛇腹機構を構成するシート材の展開平面図である。It is a development top view of the sheet material which constitutes the bellows mechanism of the 3rd modification. 第１の実施形態における伸展された蛇腹機構の要部を示す斜視図である。It is a perspective view which shows the principal part of the extended bellows mechanism in 1st Embodiment. 第１の実施形態における圧縮された蛇腹機構の要部を示す斜視図である。It is a perspective view which shows the principal part of the compressed bellows mechanism in 1st Embodiment. 第１の実施形態における圧縮された蛇腹機構の要部を示す正面図である。It is a front view which shows the principal part of the compressed bellows mechanism in 1st Embodiment. 第１の実施形態における蛇腹機構の伸縮作動を示す説明図であり、（ａ）は側面、（ｂ）は正面、（ｃ）は底面をそれぞれ示している。It is explanatory drawing which shows the expansion-contraction operation | movement of the bellows mechanism in 1st Embodiment, (a) is a side surface, (b) is the front, (c) has shown the bottom face, respectively. 第１の変形例における蛇腹機構の伸縮作動を示す説明図であり、（ａ）は側面、（ｂ）は正面、（ｃ）は底面をそれぞれ示している。It is explanatory drawing which shows the expansion-contraction operation | movement of the bellows mechanism in a 1st modification, (a) is a side surface, (b) is the front, (c) has shown the bottom face, respectively. 第２の変形例における蛇腹機構の伸縮作動を示す説明図であり、（ａ）は側面、（ｂ）は正面、（ｃ）は底面をそれぞれ示している。It is explanatory drawing which shows the expansion-contraction operation | movement of the bellows mechanism in a 2nd modification, (a) is a side surface, (b) is the front, (c) has shown the bottom face, respectively. 第３の変形例における蛇腹機構の伸縮作動を示す説明図であり、（ａ）は側面、（ｂ）は正面、（ｃ）は底面をそれぞれ示している。It is explanatory drawing which shows the expansion-contraction operation | movement of the bellows mechanism in a 3rd modification, (a) has shown the side, (b) has shown the front, (c) has shown the bottom. 第２の実施形態の蛇腹機構を構成するシート材の展開平面図である。It is an expansion | deployment top view of the sheet | seat material which comprises the bellows mechanism of 2nd Embodiment. 第２の実施形態における圧縮された蛇腹機構の要部を示す正面図である。It is a front view which shows the principal part of the compressed bellows mechanism in 2nd Embodiment. 第２の実施状態における蛇腹機構の要部を示す正面図である。It is a front view which shows the principal part of the bellows mechanism in a 2nd implementation state. 従来の蛇腹機構におけるシート材の展開平面図である。It is a development top view of the sheet material in the conventional bellows mechanism. 従来の蛇腹機構の要部を示す斜視図である。It is a perspective view which shows the principal part of the conventional bellows mechanism. 従来の圧縮された蛇腹機構の要部を示す正面図である。It is a front view which shows the principal part of the conventional compressed bellows mechanism. 従来の蛇腹機構の伸縮作動を示す説明図であり、（ａ）は側面、（ｂ）は正面、（ｃ）は底面をそれぞれ示している。It is explanatory drawing which shows the expansion-contraction operation | movement of the conventional bellows mechanism, (a) has shown the side, (b) has shown the front, (c) has shown the bottom.

以下、本発明の実施の形態について図面を参照しながら説明する。なお、この実施の形態によって本発明が限定されるものではない。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the present invention is not limited to the embodiments.

図１に、本発明の第１の実施形態である蛇腹機構１０を備えた基板切断装置の要部が示されている。この基板切断装置は、半導体ウエハ、樹脂封止済み基板などの基板ｗを載置して吸着保持するチャックテーブル１、チャックテーブル１を支持して前後方向に水平移動する可動台２、モータ３で正逆転駆動されるボールねじ４によって可動台２を所定ストロークで前後に往復移動させるよう構成した駆動機構５、駆動機構５を収容支持した固定台枠６、テーブル移動径路の上方において昇降可能、かつ、その回転軸心方向である左右水平方向に位置変更可能に配備された回転ブレード７などを備えており、所定切断高さまで下降されて回転駆動される回転ブレード７に対して、チャックテーブル１に保持された基板ｗを所定ストロークで前後に往復移動させ、かつ、基板ｗの往動および復動のつど、回転ブレード７をその回転軸心方向に所定ピッチずつ位置変更することで、所定ピッチでの平行切断を行い、その後、基板ｗを９０度姿勢変更して同様な平行切断を行うことで、基板ｗを格子状に切削切断するようになっている。   The principal part of the board | substrate cutting device provided with the bellows mechanism 10 which is the 1st Embodiment of this invention is shown by FIG. This substrate cutting apparatus includes a chuck table 1 for placing and holding a substrate w such as a semiconductor wafer or a resin-sealed substrate, a movable table 2 that supports the chuck table 1 and moves horizontally in the front-rear direction, and a motor 3. A drive mechanism 5 configured to reciprocate the movable table 2 back and forth with a predetermined stroke by a ball screw 4 that is driven forward and backward, a fixed frame 6 that houses and supports the drive mechanism 5, and can be moved up and down above the table moving path, and The rotating table 7 includes a rotating blade 7 and the like arranged so that its position can be changed in the horizontal direction, which is the axis of rotation. The rotating blade 7 is lowered to a predetermined cutting height and is driven to rotate. The held substrate w is reciprocated back and forth with a predetermined stroke, and each time the substrate w is moved forward and backward, the rotary blade 7 is moved in the direction of the rotation axis. By changing the position in increments of steps, parallel cutting at a predetermined pitch is performed, and then the substrate w is changed in posture by 90 degrees and similar parallel cutting is performed, whereby the substrate w is cut and cut into a lattice shape. ing.

基板切断処理に際しては、図示されていないノズルなどによって切削箇所に切削水を供給して、切削粉の排除と切削箇所の冷却を行うものであり、回転ブレード７によって飛散された切削水や切削粉が駆動機構５に降りかかるのを防止するために、防水防塵用の蛇腹機構１０が装備される。   In the substrate cutting process, cutting water is supplied to the cutting portion by a nozzle (not shown) to remove the cutting powder and cool the cutting portion. The cutting water and cutting powder scattered by the rotating blade 7 are used. Is provided with a waterproof and dust-proof bellows mechanism 10.

蛇腹機構１０は、駆動機構５を収容した固定台枠６の前端部と可動台２の前端部との間、及び、固定台枠６の後端部と可動台２の後端部との間にそれぞれ前後方向に伸縮自在に装備され、可動台２の前後移動に拘わらず常に駆動機構５が防水囲繞されるようになっている。   The bellows mechanism 10 is provided between the front end of the fixed frame 6 that houses the drive mechanism 5 and the front end of the movable table 2, and between the rear end of the fixed frame 6 and the rear end of the movable table 2. The drive mechanism 5 is always waterproofed regardless of the movement of the movable base 2 in the front-rear direction.

図２に示すように、蛇腹機構１０は、防水性のシート材を所定の折り線に沿って折り曲げることで、第１面蛇腹部１０Ｕの左右から一対の第２面蛇腹部１０Ｓ、１０Ｓが下向きに延出された門形に形成されており、図３Ａに、展開したシート材１１の一部が示されている。なお、図３Ａにおいて、山折り線Ｒは一点鎖線で、また、谷折り線Ｖは破線でそれぞれ表されている。   As shown in FIG. 2, the bellows mechanism 10 has a pair of second surface bellows portions 10S and 10S facing downward from the left and right of the first surface bellows portion 10U by folding a waterproof sheet material along a predetermined fold line. A part of the developed sheet material 11 is shown in FIG. 3A. In FIG. 3A, the mountain fold line R is represented by a one-dot chain line, and the valley fold line V is represented by a broken line.

シート材１１には、第１面蛇腹部１０Ｕの峰部を形成する複数の第１山折り線Ｒ１が、伸縮方向である前後方向に一定間隔をもって互いに平行に形成されるとともに、第２面蛇腹部１０Ｓの峰部を形成する第２山折り線Ｒ２が第１山折り線Ｒ１に屈折点ａを介して一連に形成されている。蛇腹の伸縮方向に隣接する第１山折り線Ｒ１、Ｒ１の間の中央位置には、第１面蛇腹部１０Ｕの谷底部を形成する第１谷折り線Ｖ１がそれぞれ平行に形成されるとともに、蛇腹の伸縮方向に隣接する第２山折り線Ｒ２、Ｒ２の間の中央位置には、第２面蛇腹部１０Ｓの谷底部を形成する第２谷折り線Ｖ２がシート端から所定長さに亘ってそれぞれ平行に形成されている。蛇腹の伸縮方向に隣接する屈折点ａ同士は第３山折り線Ｒ３で繋がれている。第２谷折り線Ｖ２の内方端ｂと第３山折り線Ｒ３の中点ｃに亘って第４山折り線Ｒ４が形成されるとともに、第２谷折り線Ｖ２の内方端ｂと屈折点ａとに亘って第３谷折り線Ｖ３が形成されている。屈折点ａそれぞれは、第１山折り線Ｒ１の長手方向同一位置に配置されている。第３山折り線Ｒ３は、所定の屈折角度αをもって横外方向に屈折配置されている。第３山折り線Ｒ３と屈曲角度αとについてさらに詳細に説明する。   In the sheet material 11, a plurality of first mountain fold lines R1 forming the ridges of the first surface bellows portion 10U are formed in parallel to each other at a predetermined interval in the front-rear direction, which is the expansion and contraction direction, and the second surface bellows A second mountain fold line R2 forming a peak of the portion 10S is formed in series with the first mountain fold line R1 via a refraction point a. A first valley fold line V1 that forms a valley bottom of the first surface bellows portion 10U is formed in parallel at the center position between the first mountain fold lines R1 and R1 adjacent to the bellows expansion and contraction direction, and A second valley fold line V2 forming the valley bottom of the second surface bellows portion 10S extends from the sheet end to a predetermined length at a central position between the second mountain fold lines R2 and R2 adjacent to the bellows expansion / contraction direction. Are formed in parallel. The refraction points a adjacent to the bellows expansion / contraction direction are connected by a third mountain fold line R3. A fourth mountain fold line R4 is formed across the inner end b of the second valley fold line V2 and the midpoint c of the third mountain fold line R3, and the inner end b of the second valley fold line V2 is refracted. A third valley fold line V3 is formed across the point a. Each of the refraction points a is disposed at the same position in the longitudinal direction of the first mountain fold line R1. The third mountain fold line R3 is refracted in the laterally outward direction with a predetermined refraction angle α. The third mountain fold line R3 and the bending angle α will be described in more detail.

隣接する第３山折り線Ｒ３どうしは一直線上に配列されることなく、中点ｃで屈折した状態で連結されている。すなわち、中点ｃは隣接する屈折点ａを結ぶ線上より第２谷折り線Ｖ２側に変位した位置にあり、隣接する第３山折り線Ｒ３どうしは横外方向に屈折された状態で連結されている。これにより、第３山折り線Ｒ３それぞれは、隣接する屈折点ａを結ぶ線に対して傾斜する向きに配置されている。屈折角度αは隣接する屈折点ａ，ａを結ぶ線と第３山折り線Ｒ３とでなされる内角となる。   The adjacent third mountain fold lines R3 are connected in a state of being refracted at the midpoint c without being arranged on a straight line. That is, the middle point c is located at a position displaced from the line connecting the adjacent refraction points a toward the second valley fold line V2, and the adjacent third mountain fold lines R3 are connected in a state of being refracted laterally outward. ing. Thereby, each 3rd mountain fold line R3 is arrange | positioned in the direction which inclines with respect to the line | wire which connects the adjacent refraction point a. The refraction angle α is an inner angle formed by a line connecting adjacent refraction points a and a and the third fold line R3.

本実施の形態では、屈折角度αは１５度に設定されている。第３谷折り線Ｖ３は、第３山折り線Ｒ３に対して４５度の内角βをもって形成されている。さらには第４山折り線Ｒ４と第３山折り線Ｒ３との間に形成される内角γは３０度（４５度未満）となっている。これにより第４山折り線Ｒ４の長さは第３山折り線Ｒ３の長さより大きいものとなっている。   In the present embodiment, the refraction angle α is set to 15 degrees. The third valley fold line V3 is formed with an internal angle β of 45 degrees with respect to the third mountain fold line R3. Furthermore, the interior angle γ formed between the fourth mountain fold line R4 and the third mountain fold line R3 is 30 degrees (less than 45 degrees). Thereby, the length of the fourth mountain fold line R4 is larger than the length of the third mountain fold line R3.

以上の形状設定により本実施形態では、図４〜６に示すように、シート材１１を各山折り線Ｒ１〜Ｒ４，谷折り線Ｖ１〜３に沿って折り曲げて形成した蛇腹機構１０は第１面蛇腹部１０Ｕの稜線（第１の山折り線Ｒ１）と第２面蛇腹部１０Ｓの稜線（第２の山折り線Ｒ２）とが直交し、かつ、第１面蛇腹部１０Ｕの谷底部のおける外端となる第３山折り線Ｒ３の中点ｃが、第２山折り線Ｒ２より外側、すなわち第２面蛇腹部１０Ｓより横外方に突出した状態となっている（図６を参照）。   In the present embodiment, the bellows mechanism 10 formed by bending the sheet material 11 along the mountain fold lines R1 to R4 and the valley fold lines V1 to 3 as shown in FIGS. The ridgeline (first mountain fold line R1) of the surface bellows portion 10U and the ridgeline (second mountain fold line R2) of the second surface bellows portion 10S are orthogonal to each other and at the bottom of the valley of the first surface bellows portion 10U. The midpoint c of the third mountain fold line R3, which is the outer end of the second fold line, protrudes laterally outward from the second mountain fold line R2, that is, from the second surface bellows portion 10S (see FIG. 6). ).

このように構成された本実施形態では、第１面蛇腹部１０Ｕの稜線と第２面蛇腹部１０Ｓの稜線とが直交する構成において屈折角度αを最適値（１５度）に設定した構成となっている。以下、本実施形態の蛇腹機構１０が伸縮される際の要部の作動状態について図７Ａを参照して説明する。図７Ａは屈折点ａ、中点ｃを単純に前後方向に平行移動させて作図したものである。なお図中、ａ'、ｂ'、ｃ'は、移動途中の屈折点ａ、内方端ｂ、中点ｃを示している。   In this embodiment configured as described above, the refraction angle α is set to an optimum value (15 degrees) in a configuration in which the ridge line of the first surface bellows portion 10U and the ridge line of the second surface bellows portion 10S are orthogonal to each other. ing. Hereinafter, the operation state of the main part when the bellows mechanism 10 of the present embodiment is expanded and contracted will be described with reference to FIG. 7A. FIG. 7A is a diagram in which the refraction point a and the midpoint c are simply translated in the front-rear direction. In the figure, a ′, b ′, and c ′ indicate a refraction point a, an inward end b, and a midpoint c that are being moved.

蛇腹を最も圧縮した状態では、第２面蛇腹部１０Ｓの上端部に形成される三角形状の折込み部１２の稜線、つまり、第４山折り線Ｒ４は第１面蛇腹部１０Ｕにおける谷底線（第１谷折り線Ｖ１）に対して内下がりに傾斜した姿勢にあり、蛇腹の伸展に伴って折込み部１２の稜線（第４山折り線Ｒ４）は更に外上がりに傾斜してゆくとともに、稜線（第４山折り線Ｒ４）の内方端、つまり、第２面蛇腹部１０Ｓの谷底部が横外方に移動してゆく。   In the most compressed state of the bellows, the ridgeline of the triangular folding portion 12 formed at the upper end portion of the second surface bellows portion 10S, that is, the fourth mountain fold line R4 is a valley bottom line (first The ridgeline (fourth fold line R4) of the folding portion 12 is further inclined outwardly with the extension of the bellows, and the ridgeline ( The inner end of the fourth mountain fold line R4), that is, the valley bottom of the second surface bellows portion 10S moves laterally outward.

この場合、折込み部１２における内方端ｂと中点ｃとの距離Ｌの変化は極めて少ないものとなっている。換言すれば、蛇腹機構１０が伸縮される際に折込み部１２の稜線（第４山折り線Ｒ４）に作用する応力は少ないものとなり、その分、伸縮に対する耐久性が高いものとなる。   In this case, the change in the distance L between the inner end b and the middle point c in the folded portion 12 is extremely small. In other words, when the bellows mechanism 10 is expanded and contracted, the stress acting on the ridge line (fourth mountain fold line R4) of the folding portion 12 is small, and accordingly, durability against expansion and contraction is high.

図３Ｂには、屈折角度α＝２０度、内角β＝４５度となった本実施形態の第１の変形例である蛇腹機構１０を構成するシート材の展開平面図が、図３Ｃには、屈折角度α＝２５度、内角β＝４５度となった本実施形態の第２の変形例である蛇腹機構１０を構成するシート材の展開平面図が、図３Ｄには、屈折角度α＝５度、内角β＝４５度となった本実施形態の第３の変形例である蛇腹機構１０を構成するシート材の展開平面図がそれぞれ示されている。また、図７Ｂには、屈折角度α＝２０度、内角β＝４５度となった本実施形態の第１の変形例である蛇腹機構１０が伸縮される際の要部の作動状態が、図７Ｃには、屈折角度α＝２５度、内角β＝４５度となった本実施形態の第２の変形例である蛇腹機構１０が伸縮される際の要部の作動状態が、図７Ｄには、屈折角度α＝５度、内角β＝４５度となった本実施形態の第３の変形例である蛇腹機構１０が伸縮される際の要部の作動状態がそれぞれ示されている。   FIG. 3B is a developed plan view of the sheet material constituting the bellows mechanism 10 which is the first modification of the present embodiment in which the refraction angle α = 20 degrees and the inner angle β = 45 degrees, and FIG. FIG. 3D shows a developed plan view of the sheet material constituting the bellows mechanism 10 which is the second modification of the present embodiment in which the refraction angle α = 25 degrees and the inner angle β = 45 degrees. FIG. 3D shows the refraction angle α = 5. The development plan view of the sheet material which comprises the bellows mechanism 10 which is the 3rd modification of this embodiment which became the angle | corner and internal angle (beta) = 45 degree | times is each shown. FIG. 7B shows the operating state of the main part when the bellows mechanism 10 which is the first modified example of the present embodiment having the refraction angle α = 20 degrees and the inner angle β = 45 degrees is expanded and contracted. 7C shows the operating state of the main part when the bellows mechanism 10 which is the second modification of the present embodiment in which the refraction angle α = 25 degrees and the inner angle β = 45 degrees is expanded and contracted, The operating states of the main parts when the bellows mechanism 10 which is the third modification of the present embodiment in which the refraction angle α = 5 degrees and the inner angle β = 45 degrees are expanded and contracted are shown.

これらのデータから明らかなように、本発明の第１の実施形態、ならびにその第１〜第３の変形例では、同様の効果（蛇腹伸縮に伴う変形応力の抑制）が得られるものの、折込み部１２における内方端ｂと中点ｃとの距離Ｌの蛇腹伸縮に伴う作図上の長さ変化は、第３山折り線Ｒ３の屈折角度αによって変動し、図３Ａに示す構成、すなわち、屈折角度α（＝１５度）の構成において上記長さ変化が最も少なく、屈折角度αが１５度より大きくても小さくても上記長さ変化が大きくなって、蛇腹伸縮に伴う変形応力の発生が若干ながら大きくなる。このことから明らかなように、第１面蛇腹部１０Ｕの稜線（第１山折り線Ｒ１）と第２面蛇腹部１０Ｓの稜線（第２山折り線Ｒ２）とが屈折点ａを中心にして直交する（９０度で交わる）構成においては、５〜２５度の屈折角度αにおいて、蛇腹伸縮に伴う変形応力発生を抑制する効果が得られ、１５度の屈折角度αが最適値となる。なお、防水性のシート材を屈折成形する蛇腹機構１０では、ある程度の成形誤差が生じるは避けられない。そのため、成形誤差を考慮すると、上述した屈折角度αの範囲（５〜２５度）は、３〜２７度とすることができ、このような屈折角度αの範囲（３〜２７度）においても上述した効果が得られる。また、第１の実施形態やその第１〜第３の変形例では、第１面蛇腹部１０Ｕの稜線と第２面蛇腹部１０Ｓの稜線とが直交する構成となっており、３〜２７度の屈折角度αの範囲や、５〜２５度の屈折角度αの範囲や、１５度の屈折角度αは、このような直交構成における最適値である。   As is clear from these data, the first embodiment of the present invention and the first to third modifications thereof have the same effect (suppression of deformation stress associated with bellows expansion / contraction), but the folding portion The length change in the drawing due to the bellows expansion and contraction of the distance L between the inner end b and the midpoint c in FIG. 12 varies depending on the refraction angle α of the third mountain fold line R3, and the configuration shown in FIG. In the configuration of the angle α (= 15 degrees), the length change is the smallest, and the length change is large regardless of whether the refraction angle α is larger or smaller than 15 degrees. While getting bigger. As is clear from this, the ridgeline (first mountain fold line R1) of the first surface bellows portion 10U and the ridgeline (second mountain fold line R2) of the second surface bellows portion 10S are centered on the refraction point a. In an orthogonal configuration (intersecting at 90 degrees), an effect of suppressing the generation of deformation stress associated with bellows expansion and contraction is obtained at a refraction angle α of 5 to 25 degrees, and the refraction angle α of 15 degrees is an optimum value. In the bellows mechanism 10 that refracts and forms a waterproof sheet material, it is inevitable that a certain amount of molding error occurs. Therefore, in consideration of molding errors, the above-described range of the refraction angle α (5 to 25 degrees) can be set to 3 to 27 degrees, and the above-described refraction angle α range (3 to 27 degrees) is also described above. Effect. In the first embodiment and the first to third modifications, the ridgeline of the first surface bellows portion 10U and the ridgeline of the second surface bellows portion 10S are orthogonal to each other, and the angle is 3 to 27 degrees. The range of the refraction angle α, the range of the refraction angle α of 5 to 25 degrees, and the refraction angle α of 15 degrees are optimum values in such an orthogonal configuration.

第１の実施形態では、第１面蛇腹部１０Ｕの左右から第２面蛇腹部１０Ｓが直角下方に延出されて、第１面蛇腹部１０Ｕにおける谷部の左右端が第２面蛇腹部１０Ｓよりも横外方に突出された仕様となっているが、基板切断装置に実際に装備するに際しては、既存の付属装置などの寸法仕様に対応する必要があり、それに対応した第２の実施形態が図８〜図１０に示されている。   In the first embodiment, the second surface bellows portion 10S extends from the left and right sides of the first surface bellows portion 10U to a right angle downward, and the left and right ends of the valley portions in the first surface bellows portion 10U are the second surface bellows portion 10S. However, when actually mounting the substrate cutting device, it is necessary to correspond to the dimensional specifications of the existing accessory device, and the second embodiment corresponding to it. Are shown in FIGS.

第２の実施形態では、第３山折り線Ｒ３の屈折角度α、内角β、及び折込み部１２の内角γは、α≒１３度＜１５度、β＜４５度、γ＜４５度である。また、図９に示すように、蛇腹機構１０を屈曲成形した際に、折込み部１２における稜線である第４山折り線Ｒ４及び第３山折り線Ｒ３の外端位置（中点ｃ）と、第２面蛇腹部１０Ｓにおける稜線である第２山折り線Ｒ２の下端位置ｄとを比較すると、前者が後者より第１面蛇腹部１０Ｕの幅方向の内側（第１山折り線線Ｒ１の長手方向の内側）に位置するよう仕様設定されている。従って、後述するガイドレール１５に対して、第４山折り線Ｒ４の外端位置（中点ｃ）が接触しないように構成されている。また、折り曲げ成形した状態において、屈折点ａを中心として、第２面蛇腹部１０Ｓの稜線（第２の山折り線Ｒ２）が第１面蛇腹部１０Ｕの稜線（第１の山折り線Ｒ１）に対して９０度より大きい角度で屈折するようになっている（図９を参照）。   In the second embodiment, the refraction angle α and the inner angle β of the third mountain fold line R3 and the inner angle γ of the folding portion 12 are α≈13 degrees <15 degrees, β <45 degrees, and γ <45 degrees. Further, as shown in FIG. 9, when the bellows mechanism 10 is bent, the outer end positions (middle points c) of the fourth mountain fold line R4 and the third mountain fold line R3, which are ridge lines in the folding portion 12, Comparing the lower end position d of the second mountain fold line R2 that is the ridge line in the second surface bellows portion 10S, the former is the inner side in the width direction of the first surface bellows portion 10U than the latter (the length of the first mountain fold line R1). The specification is set to be located inside the direction). Accordingly, the outer end position (middle point c) of the fourth mountain fold line R4 is configured not to contact the guide rail 15 described later. In the bent state, the ridgeline (second mountain fold line R2) of the second surface bellows portion 10S is centered on the refraction point a and the ridgeline (first mountain fold line R1) of the first surface bellows portion 10U. Is refracted at an angle larger than 90 degrees (see FIG. 9).

このように仕様設定された蛇腹機構１０では、折込み部１２の稜線長さ、つまり、図示はしていないが、内方端ｂと中点ｃとの距離の作図上の長さ変化は、第３山折り線Ｒ３の屈折角度αがα＝１５度の場合に比べて若干ながら大きくなる（図７Ａ（ｂ）を参照）。このため、蛇腹伸縮に伴う折込み部１２での応力は若干ながら大きくなるが、実用上での耐久性は十分であり、２００万回を越える伸縮に対してもピンホールの発生が見られないことが確認されている。   In the bellows mechanism 10 set as described above, the ridgeline length of the folding portion 12, that is, the length change in the drawing of the distance between the inner end b and the middle point c is not shown. The refraction angle α of the three-fold fold line R3 is slightly larger than when α = 15 degrees (see FIG. 7A (b)). For this reason, the stress at the folding part 12 due to the bellows expansion and contraction is slightly increased, but the durability in practical use is sufficient, and no pinhole is observed even when the expansion and contraction exceeds 2 million times. Has been confirmed.

図１０に示すように、この実施形態では、蛇腹機構１０の上下及び前後方向での撓み変形を防止するために、伸縮ピッチごとに、金属板あるいは硬質樹脂材板からなる門形の中間板１３がシート材の裏面にカシメ付け装備され、かつ、これら中間板１３を介して耐摩耗性の樹脂材からなるスライド部材１４が装着されている。そして、金属板材を屈折してなる前後に長いガードレール１５が、第２面蛇腹部１０Ｓの横側方及び下側方を覆うように前後水平に固定配備されており、このガードレール１５でスライド部材１４を摺接案内することで、蛇腹機構１０の伸縮作動に伴って左右に振れ動くことが防止されている。なお、第２面蛇腹部１０Ｓが第１面蛇腹部１０Ｕに対して９０度より大きい角度で屈折して、蛇腹機構１０全体が下拡がりの門形となるこの実施形態では、蛇腹機構１０の伸展作動に伴って第２面蛇腹部１０Ｓの稜線が左右内方に変形されることになるので、中間板１３の横外端１３ｅを第２面蛇腹部１０Ｓの稜線から内方に逃がした形状とし、第２面蛇腹部１０Ｓの稜線が内方に変形することを許容するようにしている。
〔他の実施例〕 As shown in FIG. 10, in this embodiment, in order to prevent bending deformation in the vertical and longitudinal directions of the bellows mechanism 10, a portal-shaped intermediate plate 13 made of a metal plate or a hard resin material plate is provided for each expansion / contraction pitch. Are mounted on the back surface of the sheet material, and a slide member 14 made of a wear-resistant resin material is mounted via the intermediate plate 13. A guard rail 15, which is long before and after the metal plate material is refracted, is fixedly arranged in the front and back horizontally so as to cover the lateral side and the lower side of the second surface bellows portion 10 </ b> S. By sliding and guiding the movement of the bellows mechanism, it is possible to prevent the bellows mechanism 10 from swinging left and right as the bellows mechanism 10 expands and contracts. In this embodiment, the second surface bellows portion 10S is refracted at an angle larger than 90 degrees with respect to the first surface bellows portion 10U, and the entire bellows mechanism 10 has a downwardly expanding portal shape. Since the ridgeline of the second surface bellows portion 10S is deformed inward and leftward in accordance with the operation, the lateral outer end 13e of the intermediate plate 13 is made to escape from the ridgeline of the second surface bellows portion 10S inward. The ridgeline of the second surface bellows portion 10S is allowed to deform inward.
[Other Examples]

本発明は、以下のような形態で実施することもできる。   The present invention can also be implemented in the following forms.

（１）必要に応じて、蛇腹機構１０の伸縮ピッチごとに、ステンレス板などの鎧板（スラッツ）を装備して順次積層し、蛇腹機構１０に切削液や切削粉が直接に降り掛かることを抑制する形態で実施することもできる。   (1) If necessary, equipped with an armor plate (slats) such as a stainless steel plate for each expansion / contraction pitch of the bellows mechanism 10 and sequentially stacking them to prevent the cutting fluid or cutting powder from directly falling on the bellows mechanism 10. It can also be implemented in the form.

（２）上述した実施形態の蛇腹機構１０では、第１面蛇腹部１０Ｕの左右から一対の第２面蛇腹部１０Ｓ、１０Ｓが下向きに延出された門形に形成されていた。しかしながら、図示はしないが、第２面蛇腹部１０Ｓの左右から一対の第１面蛇腹部１０Ｕ、１０Ｕが下向きに延出された門形に形成されていてもよい。   (2) In the bellows mechanism 10 of the above-described embodiment, the pair of second surface bellows portions 10S and 10S are formed in a gate shape extending downward from the left and right of the first surface bellows portion 10U. However, although not shown, the pair of first surface bellows portions 10U, 10U may be formed in a gate shape extending downward from the left and right sides of the second surface bellows portion 10S.

（３）上述した実施形態の蛇腹機構１０では、第１面蛇腹部１０Ｕを蛇腹機構１０の上方に配置し、第２面蛇腹部１０Ｓ、１０Ｓを側方に配置していた。しかしながら、図示はしないが、蛇腹機構１０の向きを９０度回転させて、第１面蛇腹部１０Ｕを蛇腹機構１０の側方に配置し、一方の第２面蛇腹部１０Ｓを蛇腹機構１０の上方に、他方の第２面蛇腹部１０Ｓを蛇腹機構１０の下方に配置してもよい。   (3) In the bellows mechanism 10 of the above-described embodiment, the first surface bellows portion 10U is disposed above the bellows mechanism 10, and the second surface bellows portions 10S, 10S are disposed laterally. However, although not shown, the direction of the bellows mechanism 10 is rotated by 90 degrees, the first surface bellows portion 10U is disposed on the side of the bellows mechanism 10, and one second surface bellows portion 10S is disposed above the bellows mechanism 10. In addition, the other second surface bellows portion 10 </ b> S may be disposed below the bellows mechanism 10.

（４）本発明に係る蛇腹機構１０は、基板切断装置のみならず、その他の防水や防塵が要求される以下に例示する装置に対しても同様に適用することができる。すなわち、エレクトロニクスの分野では、基板を研磨する研磨装置、塗布装置、露光装置、現像装置、基板に装着された電子部品が樹脂封止された樹脂封止済み基板を切断する切断装置などにおいて本発明に係る蛇腹機構１０を適用することができる。機械加工の分野では、マシニングセンタ、研削盤、旋盤、研磨装置などにおいて本発明に係る蛇腹機構１０を適用することができる。医療の分野では、ＣＴスキャナ（Computed Tomography Scanner）、ＭＲＩ(magnetic resonance imaging)装置などにおいて本発明に係る蛇腹機構１０を適用することができる。その他、特定の分野に限定されない装置として、洗浄装置、搬送装置、試験装置、乾燥装置などにおいても本発明に係る蛇腹機構１０を適用することができる。   (4) The bellows mechanism 10 according to the present invention can be similarly applied not only to the substrate cutting device but also to other devices exemplified below that require waterproofing and dustproofing. That is, in the field of electronics, the present invention is applied to a polishing apparatus for polishing a substrate, a coating apparatus, an exposure apparatus, a developing apparatus, a cutting apparatus for cutting a resin-sealed substrate in which an electronic component mounted on the substrate is resin-sealed, and the like. The bellows mechanism 10 according to the above can be applied. In the field of machining, the bellows mechanism 10 according to the present invention can be applied to a machining center, a grinding machine, a lathe, a polishing apparatus, and the like. In the medical field, the bellows mechanism 10 according to the present invention can be applied to a CT scanner (Computed Tomography Scanner), an MRI (magnetic resonance imaging) apparatus, or the like. In addition, the bellows mechanism 10 according to the present invention can be applied to a cleaning device, a transport device, a test device, a drying device, and the like as a device that is not limited to a specific field.

１ チャックテーブル
２ 可動台
５ 駆動機構
６ 固定台枠
７ 回転ブレード
１０ 蛇腹機構
１０Ｕ 第１面蛇腹部
１０Ｓ 第２面蛇腹部
１２ 折込み部
ａ 屈折点
ｂ 内端点
ｃ 中点
α 屈折角度
β 内角
γ 内角
Ｒ１ 第１山折り線
Ｒ２ 第２山折り線
Ｒ３ 第３山折り線
Ｒ４ 第４山折り線
Ｖ１ 第１谷折り線
Ｖ２ 第２谷折り線
Ｖ３ 第３谷折り線 DESCRIPTION OF SYMBOLS 1 Chuck table 2 Movable base 5 Drive mechanism 6 Fixed base frame 7 Rotating blade 10 Bellows mechanism 10U 1st surface bellows part 10S 2nd surface bellows part 12 Folding part a Refraction point b Inner end point c Middle point α Refraction angle β Interior angle γ Interior angle R1 First mountain fold line R2 Second mountain fold line R3 Third mountain fold line R4 Fourth mountain fold line V1 First valley fold line V2 Second valley fold line V3 Third valley fold line

Claims (12)

蛇腹の伸縮方向に一定間隔をもって互いに平行に複数形成される第１面蛇腹部形成用の第１山折り線と、
前記第１山折り線に屈折点を介して一直線状に連なる第２面蛇腹部形成用の第２山折り線と、
蛇腹の伸縮方向に隣接する前記屈折点同士を繋ぐ第３山折り線と、
隣接する前記第１山折り線の間にあって前記第１山折り線と平行に形成されて前記第３山折り線の中点に接続される第１谷折り線と、
隣接する前記第２山折り線の間にあって前記第２山折り線と平行に形成される第２谷折り線と、
前記第２谷折り線の内方端と前記第３山折り線の中点とに亘って形成される第４山折り線と、
前記屈折点と前記第２谷折り線の内方端とに亘って形成される第３谷折り線と、
を備え、
前記第３山折り線、前記第４山折り線、及び前記第３谷折り線によって囲まれた三角形状の折込み部が、蛇腹圧縮に伴って第２面蛇腹部の内部に畳み込まれるよう構成し、
前記第４山折り線の長さを前記第３山折り線の長さより大きく設定してある、
ことを特徴とする蛇腹機構。 A first mountain fold line for forming a first surface bellows part formed in parallel with each other at a constant interval in the expansion and contraction direction of the bellows;
A second mountain fold line for forming a second surface bellows portion that is continuous with the first mountain fold line through a refraction point;
A third fold line connecting the refraction points adjacent to each other in the direction of expansion and contraction of the bellows;
A first valley fold line between the adjacent first fold lines and formed parallel to the first fold line and connected to a midpoint of the third fold line;
A second valley fold line formed between and adjacent to the second mountain fold line, and parallel to the second mountain fold line;
A fourth mountain fold line formed between an inner end of the second valley fold line and a midpoint of the third mountain fold line;
A third valley fold line formed across the refraction point and the inner end of the second valley fold line;
With
A triangular folded portion surrounded by the third mountain fold line, the fourth mountain fold line, and the third valley fold line is configured to be folded into the second surface bellows portion along with the bellows compression. And
The length of the fourth mountain fold line is set larger than the length of the third mountain fold line,
A bellows mechanism characterized by that. 前記第４山折り線と前記第３谷折り線とでなされる内角を４５度未満に設定してある、
ことを特徴とする請求項１に記載の蛇腹機構。 An internal angle formed by the fourth mountain fold line and the third valley fold line is set to be less than 45 degrees.
The bellows mechanism according to claim 1. 前記第３山折り線と前記第３谷折り線とでなされる内角を４５度に設定してある、
ことを特徴とする請求項１または２に記載の蛇腹機構。 An internal angle formed by the third mountain fold line and the third valley fold line is set to 45 degrees.
The bellows mechanism according to claim 1 or 2. 前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を３〜２７度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 3 to 27 degrees,
The bellows mechanism according to claim 3. 前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を５〜２５度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 5 to 25 degrees,
The bellows mechanism according to claim 3. 前記屈折点それぞれを、前記第１山折り線の長手方向同一位置に設け、
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を１５度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 15 degrees.
The bellows mechanism according to claim 3. 屈折形成状態では、前記第３山折り線の中点が前記第２山折り線よりも外方に位置する、
ことを特徴とする請求項１ないし６のいずれかに記載の蛇腹機構。 In the refraction formation state, the midpoint of the third mountain fold line is located outward from the second mountain fold line.
The bellows mechanism according to any one of claims 1 to 6, wherein the bellows mechanism is provided. 基板が吸着保持されるチャックテーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠と、基板切断用の回転ブレードとを備え、前記可動台の移動方向両端部と前記固定台枠との間に、前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成し、
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある、
ことを特徴とする基板切断装置。 Comprising a movable table on which the substrate is reciprocated comprises a chuck table held suction, and a drive mechanism for reciprocating the carriage, and a fixed underframe which accommodates the drive mechanism and a rotary blade for substrate cleavage, between said movable base in the moving direction end portions the fixed underframe, deploying the bellows mechanism that expands and contracts with the reciprocating movement of the movable table, and configured to cover the drive mechanism with the bellows mechanism,
The bellows mechanism is a structure according to any one of claims 1 to 7.
A substrate cutting apparatus. テーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成し、
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある、
ことを特徴とする装置。 A movable table that includes a table and reciprocates; a drive mechanism that reciprocates the movable table; and a fixed frame that houses the drive mechanism. A bellows mechanism that expands and contracts with the reciprocating movement of the movable table in between, and is configured to cover the drive mechanism with the bellows mechanism;
The bellows mechanism is a structure according to any one of claims 1 to 7.
A device characterized by that. テーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成し、A movable table that includes a table and reciprocates; a drive mechanism that reciprocates the movable table; and a fixed frame that houses the drive mechanism. A bellows mechanism that expands and contracts with the reciprocating movement of the movable table in between, and is configured to cover the drive mechanism with the bellows mechanism;
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、The bellows mechanism is a device having the structure according to any one of claims 1 to 7,
前記装置は、エレクトロニクスの分野において使用される研磨装置、塗布装置、露光装置又は現像装置のうちいずれか１つである、The apparatus is any one of a polishing apparatus, a coating apparatus, an exposure apparatus, and a developing apparatus used in the field of electronics.
ことを特徴とする装置。A device characterized by that. テーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成し、A movable table that includes a table and reciprocates; a drive mechanism that reciprocates the movable table; and a fixed frame that houses the drive mechanism. A bellows mechanism that expands and contracts with the reciprocating movement of the movable table in between, and is configured to cover the drive mechanism with the bellows mechanism;
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、前記装置は、機械加工装置又は医療装置である、The bellows mechanism is a device having the structure according to any one of claims 1 to 7, wherein the device is a machining device or a medical device.
ことを特徴とする装置。A device characterized by that. テーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成し、A movable table that includes a table and reciprocates; a drive mechanism that reciprocates the movable table; and a fixed frame that houses the drive mechanism. A bellows mechanism that expands and contracts with the reciprocating movement of the movable table in between, and is configured to cover the drive mechanism with the bellows mechanism;
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、前記装置は、洗浄装置、搬送装置、試験装置又は乾燥装置のうちいずれか１つである、The bellows mechanism is a device having the structure according to any one of claims 1 to 7, wherein the device is any one of a cleaning device, a transport device, a test device, and a drying device.
ことを特徴とする装置。A device characterized by that.
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