JP2015100875A5 - Bellows mechanism and substrate cutting apparatus and apparatus having the same - Google Patents
Bellows mechanism and substrate cutting apparatus and apparatus having the same Download PDFInfo
- Publication number
- JP2015100875A5 JP2015100875A5 JP2013242692A JP2013242692A JP2015100875A5 JP 2015100875 A5 JP2015100875 A5 JP 2015100875A5 JP 2013242692 A JP2013242692 A JP 2013242692A JP 2013242692 A JP2013242692 A JP 2013242692A JP 2015100875 A5 JP2015100875 A5 JP 2015100875A5
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- JP
- Japan
- Prior art keywords
- fold line
- bellows
- mountain fold
- drive mechanism
- movable table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims description 12
- 238000003754 machining Methods 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- 238000003776 cleavage reaction Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 238000001035 drying Methods 0.000 claims 1
- 238000005755 formation reaction Methods 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 1
Description
本発明は、各種の機械加工装置における可動部位と固定部位とに亘って装備される防水用あるいは防塵用の蛇腹機構並びにそれを備えた基板切断装置及び装置に関する。 The present invention relates to a waterproof or dustproof bellows mechanism provided over a movable part and a fixed part in various machining apparatuses, and a substrate cutting apparatus and apparatus including the same.
本発明は、このような実情に着目してなされたものであって、繰り返しの伸縮に対する耐久性に優れた蛇腹機構並びにそれを備えた基板切断装置及び装置を提供することを目的とするものである。 The present invention has been made paying attention to such a situation, and an object thereof is to provide a bellows mechanism excellent in durability against repeated expansion and contraction , and a substrate cutting apparatus and apparatus provided with the bellows mechanism. is there.
（６）本発明に係る基板切断装置または装置は、
基板を吸着保持するチャックテーブルを備えて往復移動する可動台と、可動台を往復移動させる駆動機構と、駆動機構を収容した固定台枠と、基板切断用の回転ブレードとを備え、前記可動台と固定台枠との間に、可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を蛇腹機構で覆うよう構成した基板切断装置、またはテーブルを備えて往復移動する可動台と、前記可動台を往復移動させる駆動機構と、前記駆動機構を収容した固定台枠とを備え、前記可動台の移動方向両端部と前記固定台枠との間に前記可動台の往復移動に伴って伸縮する蛇腹機構を配備して、前記駆動機構を前記蛇腹機構で覆うよう構成した装置において、
前記蛇腹機構を、上記構成（１）ないし（５）のいずれかに記載の構造としてある、
ことを特徴とする。
(6) A substrate cutting apparatus or apparatus according to the present invention includes:
A movable table that includes a chuck table that sucks and holds a substrate, reciprocates, a drive mechanism that reciprocates the movable table, a fixed frame that houses the drive mechanism, and a rotating blade for cutting the substrate, the movable table A bellows mechanism that expands and contracts with the reciprocating movement of the movable base is provided between the base plate and the fixed base frame, and the substrate is cut back and forth with a substrate cutting device or table configured to cover the drive mechanism with the bellows mechanism. A movable table; a drive mechanism for reciprocating the movable table; and a fixed frame that houses the drive mechanism; and the reciprocation of the movable table between both ends of the movable table in the moving direction and the fixed frame. In an apparatus configured to deploy a bellows mechanism that expands and contracts with movement and covers the drive mechanism with the bellows mechanism,
The bellows mechanism is a structure according to any one of the above configurations (1) to (5).
It is characterized by that.
このように、本発明によれば、シート材に形成する折り線の改良によって、繰り返しの伸縮に対する耐久性に優れた蛇腹機構を提供することができ、またこの蛇腹機構を備えることで、メンテナンス性に優れた稼働効率の高い基板切断装置及び装置を提供することができる。
Thus, according to the present invention, by improving the folding line formed on the sheet material, it is possible to provide a bellows mechanism that is excellent in durability against repeated expansion and contraction, and by providing this bellows mechanism, maintainability is improved. It is possible to provide a substrate cutting apparatus and apparatus excellent in operating efficiency and high in operating efficiency.
Claims (12)
前記第１山折り線に屈折点を介して一直線状に連なる第２面蛇腹部形成用の第２山折り線と、
蛇腹の伸縮方向に隣接する前記屈折点同士を繋ぐ第３山折り線と、
隣接する前記第１山折り線の間にあって前記第１山折り線と平行に形成されて前記第３山折り線の中点に接続される第１谷折り線と、
隣接する前記第２山折り線の間にあって前記第２山折り線と平行に形成される第２谷折り線と、
前記第２谷折り線の内方端と前記第３山折り線の中点とに亘って形成される第４山折り線と、
前記屈折点と前記第２谷折り線の内方端とに亘って形成される第３谷折り線と、
を備え、
前記第３山折り線、前記第４山折り線、及び前記第３谷折り線によって囲まれた三角形状の折込み部が、蛇腹圧縮に伴って第２面蛇腹部の内部に畳み込まれるよう構成し、
前記第４山折り線の長さを前記第３山折り線の長さより大きく設定してある、
ことを特徴とする蛇腹機構。 A first mountain fold line for forming a first surface bellows part formed in parallel with each other at a constant interval in the expansion and contraction direction of the bellows;
A second mountain fold line for forming a second surface bellows portion that is continuous with the first mountain fold line through a refraction point;
A third fold line connecting the refraction points adjacent to each other in the direction of expansion and contraction of the bellows;
A first valley fold line between the adjacent first fold lines and formed parallel to the first fold line and connected to a midpoint of the third fold line;
A second valley fold line formed between and adjacent to the second mountain fold line, and parallel to the second mountain fold line;
A fourth mountain fold line formed between an inner end of the second valley fold line and a midpoint of the third mountain fold line;
A third valley fold line formed across the refraction point and the inner end of the second valley fold line;
With
A triangular folded portion surrounded by the third mountain fold line, the fourth mountain fold line, and the third valley fold line is configured to be folded into the second surface bellows portion along with the bellows compression. And
The length of the fourth mountain fold line is set larger than the length of the third mountain fold line,
A bellows mechanism characterized by that.
ことを特徴とする請求項１に記載の蛇腹機構。 An internal angle formed by the fourth mountain fold line and the third valley fold line is set to be less than 45 degrees.
The bellows mechanism according to claim 1.
ことを特徴とする請求項１または２に記載の蛇腹機構。 An internal angle formed by the third mountain fold line and the third valley fold line is set to 45 degrees.
The bellows mechanism according to claim 1 or 2.
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を３〜２７度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same position in the longitudinal direction of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 3 to 27 degrees,
The bellows mechanism according to claim 3.
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を５〜２５度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same longitudinal position of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 5 to 25 degrees,
The bellows mechanism according to claim 3.
前記第３山折り線の中点を、隣接する前記屈折点を結ぶ線上より前記第２谷折り線側に配置し、
隣接する前記屈折点を結ぶ線と前記第３山折り線とでなされる内角を１５度に設定してある、
ことを特徴とする請求項３に記載の蛇腹機構。 Each of the refraction points is provided at the same longitudinal position of the first mountain fold line,
The midpoint of the third mountain fold line is arranged on the second valley fold line side from the line connecting the adjacent refraction points,
The internal angle formed by the line connecting the adjacent refraction points and the third mountain fold line is set to 15 degrees.
The bellows mechanism according to claim 3.
ことを特徴とする請求項１ないし６のいずれかに記載の蛇腹機構。 In the refraction formation state, the midpoint of the third mountain fold line is located outward from the second mountain fold line.
The bellows mechanism according to any one of claims 1 to 6, wherein the bellows mechanism is provided.
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある、
ことを特徴とする基板切断装置。 Comprising a movable table on which the substrate is reciprocated comprises a chuck table held suction, and a drive mechanism for reciprocating the carriage, and a fixed underframe which accommodates the drive mechanism and a rotary blade for substrate cleavage, between said movable base in the moving direction end portions the fixed underframe, deploying the bellows mechanism that expands and contracts with the reciprocating movement of the movable table, and configured to cover the drive mechanism with the bellows mechanism,
The bellows mechanism is a structure according to any one of claims 1 to 7.
A substrate cutting apparatus.
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある、
ことを特徴とする装置。 A movable table that includes a table and reciprocates; a drive mechanism that reciprocates the movable table; and a fixed frame that houses the drive mechanism. A bellows mechanism that expands and contracts with the reciprocating movement of the movable table in between, and is configured to cover the drive mechanism with the bellows mechanism;
The bellows mechanism is a structure according to any one of claims 1 to 7.
A device characterized by that.
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、The bellows mechanism is a device having the structure according to any one of claims 1 to 7,
前記装置は、エレクトロニクスの分野において使用される研磨装置、塗布装置、露光装置又は現像装置のうちいずれか１つである、The apparatus is any one of a polishing apparatus, a coating apparatus, an exposure apparatus, and a developing apparatus used in the field of electronics.
ことを特徴とする装置。A device characterized by that.
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、前記装置は、機械加工装置又は医療装置である、The bellows mechanism is a device having the structure according to any one of claims 1 to 7, wherein the device is a machining device or a medical device.
ことを特徴とする装置。A device characterized by that.
前記蛇腹機構を、請求項１ないし７のいずれかに記載の構造としてある装置であって、前記装置は、洗浄装置、搬送装置、試験装置又は乾燥装置のうちいずれか１つである、The bellows mechanism is a device having the structure according to any one of claims 1 to 7, wherein the device is any one of a cleaning device, a transport device, a test device, and a drying device.
ことを特徴とする装置。A device characterized by that.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013242692A JP5918197B2 (en) | 2013-11-25 | 2013-11-25 | Bellows mechanism and substrate cutting apparatus and apparatus having the same |
| CN201410538238.XA CN104646385B (en) | 2013-11-25 | 2014-10-13 | Folding mechanism and the substrate cut and the device that possess this folding mechanism |
| KR1020140152630A KR101692113B1 (en) | 2013-11-25 | 2014-11-05 | Bellows mechanism, and substrate cutting apparatus and device comprising the bellows mechanism |
| TW103139727A TW201524663A (en) | 2013-11-25 | 2014-11-17 | Bellow mechanism and transport apparatus having the same, substrate cutting device, processing device and inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013242692A JP5918197B2 (en) | 2013-11-25 | 2013-11-25 | Bellows mechanism and substrate cutting apparatus and apparatus having the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015100875A JP2015100875A (en) | 2015-06-04 |
| JP2015100875A5 true JP2015100875A5 (en) | 2016-01-07 |
| JP5918197B2 JP5918197B2 (en) | 2016-05-18 |
Family
ID=53238312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013242692A Active JP5918197B2 (en) | 2013-11-25 | 2013-11-25 | Bellows mechanism and substrate cutting apparatus and apparatus having the same |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5918197B2 (en) |
| KR (1) | KR101692113B1 (en) |
| CN (1) | CN104646385B (en) |
| TW (1) | TW201524663A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110480411B (en) * | 2019-09-18 | 2024-03-29 | 河北速博机械制造有限公司 | Telescopic displacement limiting device, scale telescopic shield and machine tool |
| CN110449975B (en) * | 2019-09-18 | 2024-03-08 | 河北速博机械制造有限公司 | Scale fixed knot constructs, flexible guard shield and lathe |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1121967B (en) * | 1956-08-24 | 1962-01-11 | Arno Arnold | Accordion-like foldable cover for machine tools, especially for grinding machines |
| DE1213676B (en) * | 1962-05-16 | 1966-03-31 | Arnold Hennig | Bellows, in which reinforcing strips extending transversely to the length of the bellows are attached to the inner surfaces of the bellows folds |
| DE8331544U1 (en) * | 1983-11-03 | 1985-07-11 | Hema Maschinen- Und Apparateschutz Gmbh, 6453 Seligenstadt | Protective cover for parts on machines |
| CH666732A5 (en) * | 1984-07-11 | 1988-08-15 | Gebr Hennig Gmbh | BELLOWS. |
| DE3532702C2 (en) * | 1985-09-13 | 1993-10-07 | Arno Arnold Gmbh | Bellows for covering machine parts |
| JP3103961B2 (en) * | 1993-10-20 | 2000-10-30 | 株式会社ナベル | Bellows manufacturing method |
| JPH07156039A (en) | 1993-11-30 | 1995-06-20 | Disco Abrasive Syst Ltd | Bellows mechanism of cutting device |
| DE4431452C2 (en) * | 1994-09-03 | 1998-04-09 | Moeller Werke Gmbh | Bellows to cover guideways |
| JP3049959U (en) * | 1996-12-20 | 1998-06-30 | 日本ジャバラ工業株式会社 | Fan-shaped cloth bellows |
| JP3848715B2 (en) * | 1997-01-14 | 2006-11-22 | 株式会社ディスコ | Bellows mechanism |
| JP4205249B2 (en) * | 1999-04-26 | 2009-01-07 | 株式会社ナベル | bellows |
| JP4212186B2 (en) * | 1999-06-03 | 2009-01-21 | 株式会社ナベル | Industrial bellows |
| JP2002066866A (en) * | 2000-09-04 | 2002-03-05 | Disco Abrasive Syst Ltd | Bellows device |
| JP4988413B2 (en) * | 2007-04-16 | 2012-08-01 | 株式会社ナベル | Bellows device for preventing waste liquid splash |
| CN201988996U (en) * | 2011-01-31 | 2011-09-28 | 李寿鹏 | Protective sleeve shaped like Chinese character 'hui' |
| CN103381562A (en) * | 2012-05-05 | 2013-11-06 | 文静 | NC machine hydraulic cylinder flexible shield |
| CN202934401U (en) * | 2012-10-19 | 2013-05-15 | 恽建军 | Protective cover of heat radiation machine tool |
-
2013
- 2013-11-25 JP JP2013242692A patent/JP5918197B2/en active Active
-
2014
- 2014-10-13 CN CN201410538238.XA patent/CN104646385B/en active Active
- 2014-11-05 KR KR1020140152630A patent/KR101692113B1/en active IP Right Grant
- 2014-11-17 TW TW103139727A patent/TW201524663A/en unknown
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