JP5915180B2 - Sheet adsorbing device and sheet laminating device - Google Patents

Description

  The present invention relates to a sheet suction device and a sheet stacking device.

  When manufacturing a small part, for example, a multilayer ceramic capacitor, there is a step of conveying the green sheet while adsorbed and pressing the green sheet by a sheet adsorbing device to which a vacuum apparatus is connected. In recent years, with the miniaturization of multilayer ceramic capacitors and the like, green sheets have been made thinner. As conventional sheet suction devices, there are known ones in which a through hole for vacuum suction is formed using a drill or the like on a metal lump that has been subjected to planar processing, or one that performs vacuum suction using a porous body (See Patent Document 1).

  However, the work of drilling a through-hole with a metal lump takes time and increases the cost. Particularly, in order to adsorb the green sheet without damaging the thinned green sheet, it is necessary to reduce the diameter of the through hole. It is difficult to form a through hole having a small diameter in a metal lump. Moreover, when a porous body is used for the sheet adsorbing device, the porous body may not be able to withstand the applied pressure during pressing. Furthermore, since the entire green sheet is vacuum-sucked, the green sheet may be deformed by suction.

JP 2009-23777 A

  The present invention has been made in view of such a situation, and an object of the present invention is to provide a sheet adsorbing device and a sheet laminating device which are excellent in adsorbability even with a thin sheet, and are low in cost and high in rigidity.

In order to achieve the above object, a sheet suction device according to the present invention includes:
A first plate in which a suction surface in contact with a target sheet to be sucked is formed, and a plurality of suction through holes are formed in the suction surface;
A second plate in which communication grooves connecting at least some of the suction through holes are formed;
It has a laminated body at least laminated with a third plate connected to the communication groove and formed with a concentrated flow path for transmitting a suction force to the communication groove.

  In the present invention, each plate is thin enough to allow easy processing of narrow grooves and small diameter holes. Such grooves and holes can be easily formed at a low cost, for example, by etching each plate. In the sheet suction device of the present invention, since such plates are stacked, holes in the stacking direction, grooves perpendicular to the stacking direction, and the like can be easily formed. In addition, for example, by configuring the second plate with a plurality of laminated plates, the thickness of the sheet suction device can be increased, and the rigidity of the sheet suction device as a whole can be increased. Since the pattern of grooves and holes can be defined in units of plates, the degree of freedom in design is increased.

  Moreover, since the sheet | seat adsorption | suction apparatus of this invention is a laminated body of a plate, it can be decomposed | disassembled and it is easy to perform a maintenance. Furthermore, when a specific part deteriorates, only the plate including the part can be exchanged, so that the exchange cost can be reduced.

  Furthermore, in the sheet suction device of the present invention, the central portion of the suction surface is a non-opening portion that does not provide suction through holes, and the area that does not directly suck the sheet is provided in the first plate. Deformation due to suction can be avoided, and transfer of the suction through-hole can be avoided even when a load is applied to the laminate for pressing the target sheet.

  When the area of the target sheet to be sucked is the area of the suction surface and the line connecting the outer ends of the suction through holes provided in the opening is the boundary between the opening and the non-opening, preferably the suction surface The area of the non-opening in is 25 to 95% of the adsorption surface area. If it is less than 25%, a sufficient area that can avoid deformation of the sheet due to suction cannot be secured, and if it exceeds 95%, it is difficult to satisfactorily attract the sheet.

  Furthermore, in the sheet suction device of the present invention, the suction force is transmitted from the concentrated flow path to all the suction through holes formed on the entire suction surface through the communication groove, so that even a thin target sheet can be sucked well. Can do. Moreover, if air is sent from the concentrated flow path to the suction through hole, even a thin target sheet can be peeled off from the suction surface.

Preferably, the first plate is a laminated plate of thin structure plates . Thereby, the thickness of the lamination direction of the 1st plate can be earned, and clogging of an adsorption penetration hole can be prevented.

  Preferably, the number of the communication grooves is smaller than the number of the suction through holes, and the number of the concentration channels is smaller than the number of the communication grooves. Thereby, a path | route can be collected and suction force can be transmitted with a simple structure. In addition, a large number of adsorption through holes can be formed, and the sheet can be adsorbed stably.

  Preferably, the diameter of the suction through hole is larger than the thickness of the first plate. By doing in this way, a hole diameter can be stabilized.

  Preferably, the total area of the suction through holes formed in the suction surface is 50% or less with respect to the total area of the suction surface. By setting in this way, even when a load is applied to the laminate for the purpose of pressing the target sheet, the laminate is less likely to be deformed.

  Preferably, the number of the adsorption through holes per unit area on the adsorption surface is at least 1 / cm 2. Preferably, the diameter of the adsorption through hole is 200 μm or less. Since many such holes are formed, the load on the target sheet is small, and the target sheet can be adsorbed stably. Further, at the time of pressing, it is possible to secure a large suction surface (area of a portion that directly transmits pressure to the target sheet) in contact with the target sheet, and uniform pressure applied to the target sheet.

  The communication groove may be a through hole.

The sheet laminating apparatus according to the present invention is
A sheet adsorbing device as described above;
A vacuum device for transmitting a suction force to the sheet suction device;
A sheet laminating device having a pressurizing device for applying pressure to the sheet adsorbing device,
The sheet suction device is movable between the vacuum device and the pressurizing device.

FIG. 1 is an explanatory diagram of a sheet laminating apparatus according to an embodiment of the present invention. 2A is a plan view of the sheet suction device of FIG. 1 as viewed from the IIA direction, FIG. 2B is a cross-sectional view taken along the line IIB-IIB of FIG. 2A, and FIG. It is IIC-IIC sectional drawing of (A). 3A is an exploded plan view of the third plate of FIG. 2B viewed from the IIIA direction, and FIG. 3B is an exploded plane of the third plate of FIG. 2B viewed from the IIIB direction. FIG. 3C is an exploded plan view of the third plate of FIG. 2B viewed from the IIIC direction, and FIG. 3D is the second plate of FIG. 2B viewed from the IIID direction. FIG. 3E is an exploded plan view, FIG. 3E is a plan view of the first plate of FIG. 2B viewed from the IIIE direction, and FIG. 3F is a plan view of the first plate of FIG. It is the top view seen from the formed surface. FIG. 4 is a plan view showing a state in which the first plate and the second plate shown in FIG. 3 are stacked. FIG. 5 is an explanatory diagram showing the relationship between the thickness of the first plate and the size of the suction through hole. FIG. 6A is an explanatory diagram illustrating a process of adsorbing and pressing a target sheet using the sheet stacking apparatus illustrated in FIG. 1. FIG. 6B is an explanatory diagram illustrating a process of sucking and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 6C is an explanatory diagram illustrating a process of sucking and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 6D is an explanatory diagram illustrating a process of sucking and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 6E is an explanatory diagram illustrating a process of sucking and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 6F is an explanatory diagram illustrating a process of sucking and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 6G is an explanatory diagram illustrating a process of attracting and pressing the target sheet using the sheet stacking apparatus illustrated in FIG. 6A. FIG. 7A is a plan view showing a modification of the second plate of the sheet suction device, FIG. 7B is a plan view showing a modification of the second plate of the sheet suction device, and FIG. FIG. 10 is a plan view showing a modification of the first plate of the sheet suction device. FIG. 8A is an exploded plan view of the third plate of FIG. 2B viewed from the IIIA direction when the first plate is provided with a non-opening, and FIG. 8B is FIG. FIG. 8C is an exploded plan view of the third plate of FIG. 2B viewed from the IIIC direction, FIG. 8C is an exploded plan view of the third plate of FIG. 2B viewed from the IIIC direction, and FIG. FIG. 8 (E) is a plan view provided with a non-opening and an opening when the first plate of FIG. 2 (B) is viewed from the IIIE direction. FIG. 8 (F) is a plan view in which the first plate of FIG. 2 (B) is provided with a non-opening and an opening. FIG. 9 is a plan view showing a state in which the first plate and the second plate shown in FIG. 8 are stacked. FIG. 10 is a photograph showing a trace of the deformation of the green sheet due to vacuum suction by the sheet suction device.

First Embodiment As shown in FIG. 1, a sheet laminating apparatus 2 according to an embodiment of the present invention includes a vacuum apparatus 4, a first valve 6, a compressed air apparatus 8, a second valve 10, and a sheet adsorbing apparatus. 12, a sheet setting table 14, and a pressurizing device 18.

  The vacuum device 4 is connected to the sheet suction device 12 via the first valve 6 disposed in the middle of the flow path 11, and can transmit a negative pressure as a suction force to the sheet suction device 12. ing. The compressed air device 8 is connected to the sheet suction device 12 via the second valve 10 disposed in the middle of the flow path 11, and can transmit a positive pressure as a peeling force to the sheet suction device 12. ing.

  For example, each ceramic green sheet (target sheet) 16 cut into a predetermined size is installed on the sheet installation table 14. The pressure device 18 includes a press body 18a and a press receiving flat plate 18b. The pressurizing device 18 is arranged at a predetermined distance from the sheet setting table 14.

  The sheet suction device 12 is movable between the upper portion of the sheet setting table 14 and the pressure device 18 (details of the movement operation will be described later). The sheet adsorbing device 12 has an adsorbing surface 13 capable of adsorbing the ceramic green sheet 16 on a flat surface facing the sheet setting table 14 when located on the upper portion of the sheet setting table 14. As shown in FIGS. 2A to 2C, the sheet suction device 12 is a stacked body of a first plate 21, a second plate 22, and third plates 23a to 23c. Each plate is thermocompression bonded.

  As shown in FIG. 3 (F), the first plate 21 viewed from the direction of the suction surface 13 has n × n suction through holes 21h formed at equal intervals in a matrix. As shown in FIG. 2B and FIG. 2C, the suction through-hole 21h is formed so as to penetrate perpendicularly to the suction surface 13, so that as shown in FIG. Even when viewed from the side opposite to the suction surface 13, suction through holes 21 h are similarly formed at regular intervals in a matrix.

  As shown in FIG. 2B, the second plate 22 is stacked on the upper side of the first plate 21. The second plate 22 is formed with a communication groove 24 that penetrates the front and back surfaces. As shown in FIG. 3D, when the second plate 22 is viewed from above in the stacking direction, the communication groove 24 has a first communication groove 24a and a second communication groove 24b formed in a cross shape. From the intersection 24o of the first communication groove 24a and the second communication groove 24b, the length is gradually increased along the first communication groove 24a at a predetermined interval, and is orthogonal to the first communication groove 24a. In this manner, a third communication groove 24c, a fourth communication groove 24d, a fifth communication groove 24e, and a sixth communication groove 24f are formed. Similarly, a third communication groove to a sixth communication groove are formed in the second communication groove 24b.

  As shown in FIG. 3C, the lowermost third plate 23a is formed with a first communication groove (concentrated flow path) 25a and a second communication groove (concentrated flow path) 25b penetrating the front and back surfaces in a cross shape. Has been. For this reason, when the lowermost third plate 23a shown in FIG. 3C is laminated on the second plate 22 shown in FIG. 3D, the first through groove 25a and the second through groove 25b become the second plate. In the vicinity of the center of the communication groove 24 formed in 22, all the communication grooves 24 a to 24 f communicate with each other.

  As shown in FIG. 2B, an intermediate third plate 23b is laminated on the uppermost side of the lowermost third plate 23a. As shown in FIG. 3B, a third communication groove (hole) 25c is formed at the center position of the middle third plate 23b. For this reason, when the middle third plate 23b shown in FIG. 3B is laminated on the lowermost third plate 23a shown in FIG. 3C, the third through-hole is formed at the center position of the lowest third plate 23a. The groove (hole) 25c communicates with all the communication grooves 25a and 25b.

  For this reason, when the second plate 22 shown in FIG. 3D is laminated on the first plate 21 shown in FIG. 3E, the communication groove 24 is formed in the first plate 21 as shown in FIG. All the adsorption | suction through-holes 21h made are connected.

  As shown in FIG. 2B, a third plate 23 is laminated on the upper side of the second plate 22. The third plate 23 is laminated on the lowermost third plate 23a laminated on the second plate 22, the middle third plate 23b laminated on the lowermost third plate 23a, and the middle third plate 23b. And an uppermost third plate 23c. The third plate 23 has a concentrated flow path 25 (25a to 25d).

  As shown in FIG. 3C, the lowermost third plate 23a is formed with a first communication groove (concentrated flow path) 25a and a second communication groove (concentrated flow path) 25b penetrating the front and back surfaces in a cross shape. Has been. For this reason, when the lowermost third plate 23a shown in FIG. 3C is laminated on the second plate 22 shown in FIG. 3D, the first through groove 25a and the second through groove 25b become the second plate. In the vicinity of the center of the communication groove 24 formed in 22, all the communication grooves 24 a to 24 f communicate with each other.

  As shown in FIG. 2B, an intermediate third plate 23b is laminated on the uppermost side of the lowermost third plate 23a. As shown in FIG. 3B, a third communication groove (hole) 25c is formed at the center position of the middle third plate 23b. For this reason, when the middle third plate 23b shown in FIG. 3B is laminated on the lowermost third plate 23a shown in FIG. 3C, the third through-hole is formed at the center position of the lowest third plate 23a. The groove (hole) 25c communicates with all the communication grooves 25a and 25b.

  As shown in FIG. 2B, the uppermost third plate 23c is stacked on the upper side of the middle third plate 23b. When the uppermost third plate 23c is viewed from the middle third plate 23b side, as shown in FIG. 3A, the center position 23o of the uppermost third plate 23c and the outer periphery of the uppermost third plate 23c A fourth groove 25d is formed to connect to the connecting portion 26 located at the position. Therefore, when the uppermost third plate 23c shown in FIG. 3A is laminated on the upper side of the middle third plate 23b shown in FIG. 3B, the third through-groove (hole) 25c and the fourth groove 25d are stacked. The center portion 23o and the connection portion 26 located on the opposite side communicate with each other. The fourth groove 25d can be easily formed by forming the uppermost third plate 23c without penetrating the front and back surfaces.

  As shown in FIG. 1, the vacuum device 4 and the compressed air device 8 are connected to the connection portion 26. For this reason, a flow path can be concentrated from many adsorption | suction through-holes 21h mentioned above to the single 4th groove | channel 25d. In addition, it is possible to three-dimensionally transmit the negative pressure as the suction force of the target sheet and the positive pressure as the peeling force of the target sheet from the fourth groove 25d to the suction through hole 21h.

  Next, the suction through hole 21h formed in the suction surface 13 will be described in detail. As shown in FIG. 3F, the suction through hole 21 h is formed over the entire suction surface 13. The total area of all the suction through holes 21h is preferably 50% or less with respect to the total area of the suction surface 13. The number of adsorption through holes 21h per unit area (1 cm 2) on the adsorption surface 13 is preferably at least 1 / cm 2. As shown in FIG. 5, the diameter D of the suction through hole 21 h is preferably D ≦ 200 μm, and preferably larger than the thickness T of the first plate 21.

  Next, based on FIG. 6A-FIG. 6G, the process of adsorb | sucking and pressurizing an object sheet | seat (ceramic green sheet) using the sheet | seat lamination apparatus 2 which has the sheet | seat adsorption apparatus 12 mentioned above is demonstrated.

  First, as shown in FIG. 6A, a single green sheet 16 cut to a predetermined size is installed on the sheet installation table 14. Next, as shown in FIG. 6B, the sheet suction device 12 moves so that the suction surface 13 of the sheet suction device 12 contacts the surface of the green sheet 16, and the first valve 6 is opened, and the vacuum device 4. Thus, a negative pressure as a suction force is transmitted to the suction surface 13 to the sheet suction device 12, and the green sheet 16 is suction-held on the suction surface 13 of the sheet suction device 12.

  Next, as shown in FIG. 6C, the sheet suction device 12 moves to the position of the pressurization device 18 while the first valve 6 is kept open and the suction holding state of the green sheet 16 is maintained. It arrange | positions on the receiving plate 18b. Next, the press main body 18a pressurizes the sheet suction device 12 in the direction indicated by the arrow in FIG. 6D. Thereby, the green sheet 16 is pressure-bonded.

  Next, in the direction indicated by the arrow in FIG. 6E, the press main body 18a moves away from the sheet adsorbing device 12, the first valve 6 is closed, the second valve 10 is opened, and the compressed air device 8 to the sheet adsorbing device. 12, a positive pressure as a peeling force is transmitted to the suction surface 13 and air is blown out from the suction through holes 21 h formed in the suction surface 13, and the green sheet 16 is peeled off from the suction surface 13. Therefore, as shown in FIG. 6F, even if the sheet adsorbing device 12 is separated from the press receiving flat plate 18b, the green sheet 16 remains arranged on the press receiving flat plate 18b. Finally, as shown in FIG. 6G, the sheet suction device 12 returns to the original position shown in FIG. 6A.

  As shown in FIG. 7C, the third plate 21 has an adsorption through hole 21h ′ having a smaller diameter than the adsorption through hole 21h shown in FIG. 3E. May also be formed densely. In this case, as shown in FIG. 7B, the interval between the grooves constituting the communication groove 24 ′ is narrowed, and the first plate 21 shown in FIG. When the second plates shown in B) are stacked, the communication groove 24 ′ connects all the suction through holes 21 h ′ formed in the first plate 21.

  In the above-described embodiment, the case has been described in which the flow paths are finally collected in a single concentrated flow path (fourth groove 25d), but the number of final concentrated flow paths is not particularly limited. For example, the air flow path may be divided into two regions inside the sheet adsorbing device 12 while finally being collected into two concentrated flow paths. Moreover, the final concentration flow path may be three or more.

  Moreover, although demonstrated so that each plate might be thermocompression-bonded, it is not limited to this. For example, after laminating each plate, the laminated body may be fixed with bolts.

  Further, in the above-described embodiment, the case where the third plate 23 is configured by three sheets has been described, but the number of configured sheets is not particularly limited. The plate constituted by a plurality of plates is not limited to the third plate, and the second plate 22 may be constituted by a plurality of plates, or the first plate 21 may be constituted by a plurality of plates.

In the present embodiment, since the sheet adsorbing device 12 is configured by a laminated body of the first plate 21, the second plate 22, and the third plates 23a to 23c, each plate easily forms a narrow groove or a small diameter hole. It is thin enough to be processed. Such grooves and holes can be easily formed at low cost, for example, by performing an etching process for each plate. In the sheet suction device 12 of this embodiment, in order to stack such plates, holes in the stacking direction (suction through-holes 21h, communication grooves 24, concentrated channels 25a to 25c) and grooves perpendicular to the stacking direction (first) The four grooves 25d) can be easily formed. In addition, for example, by configuring the second plate 22 with a plurality of structural body plates , the thickness of the sheet suction device 12 can be increased, and the rigidity of the sheet suction device 12 as a whole can be increased. Since the pattern of grooves and holes can be defined in units of plates, the degree of freedom in design is increased.

  Moreover, since the sheet | seat adsorption | suction apparatus 12 of this embodiment is a laminated body of a plate, it can be decomposed | disassembled and it is easy to perform a maintenance. Furthermore, when a specific part deteriorates, only the plate including the part can be exchanged, so that the exchange cost can be reduced.

  Further, in the sheet suction device 12 of the present embodiment, the suction force is transmitted from the concentrated flow path (fourth groove 25d) to all the suction through holes 21h formed on the entire suction surface through the communication groove 24, so that the thin green Even the sheet 16 can be adsorbed satisfactorily. Further, if air is sent from the concentrated flow path (fourth groove 25d) to the suction through hole 21h, even the thin green sheet 16 can be peeled from the suction surface 13 satisfactorily.

  In the present embodiment, routes can be aggregated, and suction force can be transmitted with a simple configuration. Moreover, a large number of suction through holes 21h can be formed, and the green sheet 16 can be stably suctioned. Further, since the diameter D of the suction through hole 21 is larger than the thickness T of the first plate 21, the hole diameter can be stabilized.

  In this embodiment, even when a load is applied to the laminate due to pressing of the green sheet 16, the laminate is less likely to be deformed.

  In the present embodiment, since a large number of suction through holes 21h having a diameter D of 200 μm or less are formed on the suction surface 13, the load on the green sheet 16 is small and the green sheet 16 can be stably suctioned. Further, at the time of pressing, it is possible to ensure a large suction surface 13 (area of a portion that directly transmits pressure to the green sheet 16) in contact with the green sheet 16, and the pressure applied to the green sheet 16 can be made uniform.

Second Embodiment Except as described below, the second embodiment is the same as the first embodiment described above, and a duplicate description is omitted. As shown in FIG. 8 (F), the first plate 21 viewed from the direction of the suction surface 13 is provided with an opening 21k at the outer edge, and a non-opening in which no suction through hole is formed inside the opening. A portion 21n is provided. As shown in FIG. 9, the through holes 21h are formed in the opening at regular intervals in a lattice shape. The suction through hole 21h is formed so as to penetrate perpendicularly to the suction surface 13 as shown in FIGS. 2 (B) and 2 (C). Therefore, as shown in FIG. Even when viewed from the side opposite to the suction surface 13, suction through holes 21 h are similarly formed at regular intervals in a lattice shape.

  As shown in FIG. 2B, the second plate 22 is stacked on the upper side of the first plate 21. The second plate 22 is formed with a communication groove 24 that penetrates the front and back surfaces. As shown in FIG. 8D, when the second plate 22 is viewed from above in the stacking direction, the communication groove 24 has a first communication groove 24a and a second communication groove 24b formed in a cross shape. From the intersection 24o of the first communication groove 24a and the second communication groove 24b, the length is gradually increased along the first communication groove 24a at a predetermined interval, and is orthogonal to the first communication groove 24a. As described above, the third communication groove 24c and the fourth communication groove 24d are formed. Similarly, the third communication groove to the fourth communication groove are formed in the second communication groove 24b.

  As shown in FIG. 8C, the lowermost third plate 23a is formed with a first communication groove (concentrated flow path) 25a and a second communication groove (concentrated flow path) 25b penetrating the front and back surfaces in a cross shape. Has been. For this reason, when the lowermost third plate 23a shown in FIG. 8C is laminated on the second plate 22 shown in FIG. 8D, the first through groove 25a and the second through groove 25b become the second plate. In the vicinity of the center of the communication groove 24 formed in 22, all the communication grooves 24 a to 24 d communicate with each other.

  In this embodiment, by providing a non-opening portion in the product suction portion of the thin structure plate, the sheet deformation as shown in FIG. 10 occurring in the product portion is avoided, so that the sheet is not damaged even if the sheet becomes thinner. Can be devised. As described above, since the structure plate is thin, it is possible to easily form through holes and grooves according to the sheet to be conveyed by etching or the like.

The third embodiment is the same as the first embodiment described above except for the following description, and a duplicate description is omitted. Although not shown, the first plate 21 is configured by laminating a plurality of thin structure plates. The through hole and the groove are formed in units of plates.

  Preferably, the number of stacked structure plates constituting the first plate 21 is 1 to 20. Preferably, the thickness of one structure plate constituting the first plate 21 is 50 to 500 μm.

  Similarly, the second plate 22 may be configured by stacking a plurality of thin structure plates. Similarly, the third plate 23 may be configured by stacking a plurality of thin structure plates.

  In the present embodiment, the thickness in the stacking direction of the plates in which a plurality of thin structure plates are stacked can be increased, and clogging of the suction through holes can be prevented. Moreover, when a specific location deteriorates, only the plate including the location can be exchanged, so that the exchange cost can be further reduced. Furthermore, since the structure plate is thin, the through holes and the grooves can be easily formed by etching or the like.

  As described above, the sheet adsorbing device and the sheet laminating device according to the present invention are useful for manufacturing a small component such as a multilayer ceramic capacitor. In particular, by devising the shape of the plate, it is possible to prevent the surface of the part of the sheet used in the product from being scratched, so even if the stacked sheets are thin and the scratches lead to defects, the yield A laminate can be manufactured well.

2 ... sheet laminating apparatus 4 ... vacuum apparatus 8 ... pressurizing apparatus 12 ... sheet adsorbing apparatus 13 ... adsorption surface 16 ... green sheet 21 ... first plate 21h ... adsorption through hole 21k ... opening 21n ... non-opening 22 ... 2nd plate 23 ... 3rd plate 24 ... Communication groove 25 ... Concentration flow path

Claims (12)

A first plate in which a suction surface in contact with a target sheet to be sucked is formed, and a plurality of suction through holes are formed in the suction surface;
A second plate in which communication grooves connecting at least some of the suction through holes are formed;
Connected to said communication groove, and a third plate concentrated flow path is formed for transmitting the suction force to the communicating groove, but have a laminate that is at least stacked,
A sheet adsorbing device , wherein a plurality of flow paths are concentrated in a single flow path in a direction opposite to a direction in which a suction force is transmitted .
  The sheet suction device according to claim 1, further comprising a non-opening in which no suction through hole is formed inside the opening of the first plate.   The sheet suction device according to claim 2, wherein an area of the non-opening portion of the first plate is 25 to 95% of the entire suction surface. The sheet suction device according to claim 1, wherein the first plate is a laminated plate of structure plates.   5. The number of the communication grooves is smaller than the number of the suction through holes, and the number of the concentrated flow paths is smaller than the number of the communication grooves. The sheet adsorbing device according to 1.   The sheet adsorbing device according to claim 1, wherein the communication groove is a through hole.   The sheet suction apparatus according to claim 1, wherein a diameter of the suction through hole is larger than a thickness of the first plate.   The sheet suction device according to claim 7, wherein a diameter of the suction through hole is 200 μm or less.   The sheet suction device according to claim 1, wherein a total area of the suction through holes formed in the suction surface is 50% or less with respect to a total area of the suction surface.   The number of the said adsorption | suction through-hole per unit area in the said adsorption surface is at least 1 piece / cm <2>, The sheet | seat adsorption | suction apparatus in any one of Claims 1-9 characterized by the above-mentioned. The sheet suction device according to claim 1, wherein the second plate is a laminated plate of structure plates. The sheet suction device according to any one of claims 1 to 11 ,
A vacuum device for transmitting a suction force to the sheet suction device;
A sheet laminating device having a pressurizing device for applying pressure to the sheet adsorbing device,
The sheet stacking apparatus, wherein the sheet adsorbing apparatus is movable between a sheet setting table and the pressurizing apparatus.