JP4657193B2 - Suction board - Google Patents

Suction board Download PDF

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JP4657193B2
JP4657193B2 JP2006302967A JP2006302967A JP4657193B2 JP 4657193 B2 JP4657193 B2 JP 4657193B2 JP 2006302967 A JP2006302967 A JP 2006302967A JP 2006302967 A JP2006302967 A JP 2006302967A JP 4657193 B2 JP4657193 B2 JP 4657193B2
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suction
metal plate
cavity
hole
plate
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JP2008119758A (en
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太進 山田
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株式会社アロン社
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Description

本発明は、金属、ガラス、シリコンウエハ、樹脂、セラミック又は紙などからなるシート状のもの（以下「ワーク」という。）を吸着保持し得る吸着盤に関するものである。   The present invention relates to a suction disk capable of sucking and holding a sheet (hereinafter referred to as “work”) made of metal, glass, silicon wafer, resin, ceramic, paper, or the like.

下記特許文献１には、表裏に貫通する多数の吸引穴が所定ピッチ間隔で分散形成された第１プレートと、表面の周囲に枠部を有し、枠部の内側に上記吸引穴と通じる格子状の通気溝が形成され、通気溝によって残された島状の凸部が上記枠部と同じ高さに形成され、上記枠部と凸部が第１プレートの裏面に接合され、かつ通気溝の底部に裏面に通じる数個の通気穴が形成された第２プレートとを備え、上記通気穴は真空源と接続されている吸着盤が開示されている。   In the following Patent Document 1, a first plate in which a large number of suction holes penetrating the front and back are dispersed and formed at a predetermined pitch interval, and a lattice having a frame portion around the surface and communicating with the suction holes inside the frame portion Air-grooves are formed, island-shaped convex portions left by the air-grooves are formed at the same height as the frame portions, the frame portions and the convex portions are joined to the back surface of the first plate, and the air-groove grooves And a second plate in which several vent holes leading to the back surface are formed at the bottom of the suction plate, and the vent hole is disclosed to be connected to a vacuum source.

しかしながら、かかる吸着盤では、吸着盤に内在する空気を吸引するための吸引口が第２プレートに形成される通気穴から構成されるため、多数の吸引口を有し、しかもすべての吸引口が第２プレートの裏面に開口した構造である。したがって、各吸引口に吸引源に接続された吸引管を接続し、吸着盤に内在する空気を直接吸引する構成は非現実的で採用できないため、すべての吸引口を覆うカバーを設けて、該カバー内の空気を吸引することで、間接的に吸着盤に内在する空気を吸引しなければならない。また、第２プレートにより最上層が構成される吸着盤では、吸引手段を吸着盤の上部に必ず設けなければならない。また、吸着盤の両面を吸着面として機能させることが不可能である。
特開平１０−９５４５６号公報 However, in such a suction plate, the suction port for sucking the air existing in the suction plate is composed of vent holes formed in the second plate, and therefore has a large number of suction ports, and all the suction ports are It is the structure opened to the back surface of the 2nd plate. Therefore, a configuration in which a suction pipe connected to a suction source is connected to each suction port and the air present in the suction disk is directly sucked is impractical and cannot be adopted.Therefore, a cover that covers all the suction ports is provided, By sucking the air in the cover, the air present in the suction plate must be sucked indirectly. In the suction plate in which the uppermost layer is constituted by the second plate, the suction means must be provided on the upper side of the suction plate. In addition, it is impossible to cause both surfaces of the suction disk to function as suction surfaces.
JP-A-10-95456

本発明は、上記事情に鑑みなされたものであり、吸引口に吸引管を接続して、吸着盤に内在する空気を直接吸引することができる吸着盤を提供することを課題とする。   This invention is made | formed in view of the said situation, and makes it a subject to provide the suction disk which can attract | suck directly the air which exists in a suction disk by connecting a suction pipe to a suction port.

本発明は、上記課題を解決するため、以下の吸着盤を提供する。
１．複数の金属板を接合して構成される吸着盤であって、
前記金属板同士が、拡散接合法により、互いの原子の相互拡散により固相のまま接合され、
前記金属板には、吸着面を有するとともに、該吸着面に開口する、厚さ方向に貫通する孔部を有する第１金属板と、渦巻き状に連続し、厚さ方向に貫通する穴からなり、吸引源に接続された吸引管が接続される吸引口と連通する第１空洞部を有する第２金属板と、厚さ方向に貫通する穴からなり、前記孔部と前記第１空洞部とを連通させる第２空洞部を有する第３金属板とが含まれることを特徴とする吸着盤。
２．前記第１金属板の周面に突出部が設けられ、該突出部に前記吸引口が設けられていることを特徴とする前記１記載の吸着盤。
３．前記第２金属板に、前記吸引口が設けられていることを特徴とする前記１記載の吸着盤。
４．前記第１金属板により最上層及び最下層が構成されることを特徴とする前記１記載の吸着盤。
５．前記孔部、第１空洞部、第２空洞部及び吸引口から構成される一連の吸引構造を複数有するとともに、各吸引構造が独立していることを特徴とする前記１記載の吸着盤。 In order to solve the above problems, the present invention provides the following suction disk.
1. An adsorption disk constructed by joining a plurality of metal plates,
The metal plates are bonded together in a solid phase by mutual diffusion of atoms with each other by a diffusion bonding method,
The metal plate includes a first metal plate having a suction surface and having a hole that penetrates in the thickness direction and opens in the suction surface, and a hole that is continuous in a spiral shape and penetrates in the thickness direction. A second metal plate having a first cavity communicating with a suction port to which a suction pipe connected to a suction source is connected; a hole penetrating in a thickness direction; and the hole and the first cavity And a third metal plate having a second cavity for communicating with the suction plate.
2. 2. The suction cup according to claim 1, wherein a protrusion is provided on a peripheral surface of the first metal plate, and the suction port is provided in the protrusion.
3. 2. The suction plate according to claim 1, wherein the suction port is provided in the second metal plate.
4). 2. The suction disk according to claim 1, wherein an uppermost layer and a lowermost layer are constituted by the first metal plate.
5. 2. The suction cup according to 1, wherein the suction plate includes a plurality of a series of suction structures including the hole portion, the first cavity portion, the second cavity portion, and a suction port, and each suction structure is independent.

前記１に記載の本発明によれば、金属板同士が、拡散接合法により、互いの原子の相互拡散により固相のまま接合され、しかも各金属板における孔部、第１空洞部及び第２空洞部以外の部分が面接触で接合される構造であるため、変形や歪みが生じ難く、ワークに接触する吸着面の平面度を良好なものにすることが可能となる。また、金属板には、吸着面を有するとともに、該吸着面に開口する、厚さ方向に貫通する孔部を有する第１金属板と、渦巻き状に連続し、厚さ方向に貫通する穴からなり、吸引源に接続された吸引管が接続される吸引口と連通する第１空洞部を有する第２金属板と、厚さ方向に貫通する穴からなり、前記孔部と前記第１空洞部とを連通させる第２空洞部を有する第３金属板とが含まれるため、吸引口に吸引管を接続して、吸着盤に内在する空気を直接吸引することが可能になる。
前記２に記載の本発明によれば、第１金属板の周面に突出部が設けられ、該突出部に吸引口が設けられているため、吸着盤の上部に吸引手段を設けなくてよい。
前記３に記載の本発明によれば、第２金属板に、吸引口が設けられているため、吸着盤の上部に吸引手段を設けなくてよい。
前記４に記載の本発明によれば、第１金属板により最上層及び最下層が構成されるため、吸着盤の両面を吸着面として機能させることが可能となる。
前記５に記載の本発明によれば、孔部、第１空洞部、第２空洞部及び吸引口から構成される一連の吸引構造を複数有するため、各吸引構造により、一度に複数のワークを吸着することが可能になる。また、各吸引構造が独立しているため、一の吸引構造によりワークを吸着しているときに、他の吸引構造ではワークを吸着しないという使用が可能となる。 According to the first aspect of the present invention, the metal plates are bonded to each other in a solid phase by mutual diffusion of atoms by a diffusion bonding method, and the hole, the first cavity, and the second in each metal plate. Since the portion other than the hollow portion is joined by surface contact, deformation and distortion hardly occur, and the flatness of the suction surface that contacts the workpiece can be improved. In addition, the metal plate has a suction surface, a first metal plate having a hole portion that penetrates in the thickness direction and opens in the suction surface, and a hole that is continuous in a spiral shape and penetrates in the thickness direction. A second metal plate having a first cavity portion communicating with a suction port to which a suction pipe connected to a suction source is connected, and a hole penetrating in the thickness direction, the hole portion and the first cavity portion And the third metal plate having the second cavity portion that communicates with each other, it is possible to connect the suction pipe to the suction port and directly suck the air present in the suction disk.
According to the second aspect of the present invention, since the protruding portion is provided on the peripheral surface of the first metal plate and the suction port is provided in the protruding portion, it is not necessary to provide the suction means on the upper portion of the suction disk. .
According to the third aspect of the present invention, since the suction port is provided in the second metal plate, it is not necessary to provide the suction means on the upper part of the suction disk.
According to the present invention described in 4 above, since the uppermost layer and the lowermost layer are constituted by the first metal plate, it is possible to cause both surfaces of the suction disk to function as suction surfaces.
According to the present invention described in 5 above, since there are a plurality of a series of suction structures composed of the hole portion, the first cavity portion, the second cavity portion, and the suction port, a plurality of workpieces can be formed at a time by each suction structure. It becomes possible to adsorb. In addition, since each suction structure is independent, it is possible to use that the workpiece is not sucked by another suction structure when the workpiece is sucked by one suction structure.

以下、本発明の実施の形態を図面に示した実施例に基づいて説明する。   Hereinafter, embodiments of the present invention will be described based on examples shown in the drawings.

図１は、本発明の実施例１に係る吸着盤の構造を示す分解斜視図である。この図に示したように、本実施例に係る吸着盤は、複数の金属板が接合されて構成される。ここで、複数の金属板には、第１金属板１、第２金属板２及び第３金属板３が含まれる。また、これらの金属板同士は、拡散接合法により、互いの原子の相互拡散により固相のまま接合される。   FIG. 1 is an exploded perspective view showing the structure of the suction cup according to the first embodiment of the present invention. As shown in this figure, the suction disk according to the present embodiment is configured by joining a plurality of metal plates. Here, the plurality of metal plates include a first metal plate 1, a second metal plate 2, and a third metal plate 3. In addition, these metal plates are bonded to each other in a solid phase by mutual diffusion of atoms by a diffusion bonding method.

第１金属板１は、吸着面ａを有するとともに、該吸着面ａに開口する、厚さ方向に貫通する孔部ｂを有して構成される。ここで、吸着面ａとは、ワーク７が接触し吸着される面をいい、本実施例では、第１金属板１の下面が吸着面ａとなる。ワーク７としては、シート状のものが典型例として挙げられるが、これに限定されるものではなく、例えば、ブロック状のものであってもよい。孔部ｂの数量、大きさ及び配置は、任意に設定し得る。本実施例における孔部ｂは、図１に示したように、一定の直径を有し、放射状に多数点在するように設けられている。孔部ｂは、機械加工により形成されたものであってもよいが、孔部ｂの加工方法としては、エッチングを採用することが好ましい。エッチングによれば、孔部ｂの形状、配置及び大きさを自由に設定でき、しかも加工が容易である。   The first metal plate 1 has a suction surface a and a hole b that opens in the suction surface a and penetrates in the thickness direction. Here, the suction surface a refers to a surface on which the workpiece 7 comes into contact and is sucked. In this embodiment, the lower surface of the first metal plate 1 is the suction surface a. A typical example of the workpiece 7 is a sheet shape, but is not limited thereto, and may be a block shape, for example. The quantity, size and arrangement of the holes b can be arbitrarily set. As shown in FIG. 1, the holes b in this embodiment have a constant diameter and are provided so as to be scattered in a large number radially. Although the hole b may be formed by machining, it is preferable to employ etching as a method for processing the hole b. According to the etching, the shape, arrangement and size of the hole b can be freely set, and the processing is easy.

第２金属板２は、渦巻き状に連続し、厚さ方向に貫通する穴からなる第１空洞部ｃを有して構成される。第１空洞部ｃは、ポンプなどから構成される吸引源に接続された吸引管９が接続される吸引口ｆと連通する。第１空洞部ｃは、孔部ｂと同様に、エッチングにより形成されることが好ましい。   The second metal plate 2 has a first cavity c that is continuous in a spiral shape and includes a hole that penetrates in the thickness direction. The first cavity c communicates with a suction port f to which a suction pipe 9 connected to a suction source composed of a pump or the like is connected. The first cavity c is preferably formed by etching in the same manner as the hole b.

第３金属板３は、厚さ方向に貫通する穴からなる第２空洞部ｄを有して構成される。第２空洞部ｄは、第１金属板１に形成される孔部ｂと第２金属板２に形成される第１空洞部ｃとを連通させるように形成される。第２空洞部ｄは、孔部ｂと同様に、エッチングにより形成されることが好ましい。   The third metal plate 3 is configured to have a second cavity portion d made of a hole penetrating in the thickness direction. The second cavity d is formed so that the hole b formed in the first metal plate 1 communicates with the first cavity c formed in the second metal plate 2. The second cavity d is preferably formed by etching in the same manner as the hole b.

本実施例に係る吸着盤は、さらに第４金属板４を有して構成される。第４金属板４は、第２金属板２に形成された第１空洞部ｃの開口部を閉塞する働きをするものである。本実施例では、第４金属板４の周面に突出部ｅが設けられ、該突出部ｅに、厚さ方向に貫通する穴からなる吸引口ｆが設けられている。吸引口ｆは、第２金属板２の周面に設けられた突出部ｅに存する第１空洞部ｃの一端に連通する。そして、第２金属板２の下面側に開口する第１空洞部ｃの一端の開口部は、第３金属板３の周面に設けられた突出部ｅによって閉塞される。   The suction disk according to the present embodiment further includes a fourth metal plate 4. The fourth metal plate 4 functions to close the opening of the first cavity c formed in the second metal plate 2. In the present embodiment, a protruding portion e is provided on the peripheral surface of the fourth metal plate 4, and a suction port f including a hole penetrating in the thickness direction is provided in the protruding portion e. The suction port f communicates with one end of the first cavity c existing in the protrusion e provided on the peripheral surface of the second metal plate 2. Then, an opening at one end of the first cavity c that opens to the lower surface side of the second metal plate 2 is closed by a protruding portion e provided on the peripheral surface of the third metal plate 3.

図２は、第１乃至第４金属板１〜４を重ね合わせた状態を示す部分断面図である。この図に示したように、本実施例では、第４金属板４が最上層を構成し、第２金属板２及び第３金属板３が中間層を構成し、第１金属板１が最下層を構成するように、第１乃至第４金属板１〜４が上記の拡散接合法により接合される。そして、第２金属板２に形成された第１空洞部ｃが吸引口ｆと連通し、さらに第１金属板１に形成されたすべての孔部ｂが、第３金属板３に形成された第２空洞部ｄを介して第１空洞部ｃに連通している。したがって、図３に示したように、吸引口ｆに吸引管９を接続して、吸着盤に内在する空気を直接吸引することができる。また、１つの吸引口ｆから空気を吸引することによって、第１金属板１の吸着面ａに均一な吸着力を作用させることができる。   FIG. 2 is a partial cross-sectional view illustrating a state in which the first to fourth metal plates 1 to 4 are overlapped. As shown in this figure, in this embodiment, the fourth metal plate 4 constitutes the uppermost layer, the second metal plate 2 and the third metal plate 3 constitute the intermediate layer, and the first metal plate 1 is the outermost layer. The 1st thru | or 4th metal plates 1-4 are joined by said diffusion bonding method so that a lower layer may be comprised. The first cavity c formed in the second metal plate 2 communicates with the suction port f, and all the holes b formed in the first metal plate 1 are formed in the third metal plate 3. It communicates with the first cavity c through the second cavity d. Therefore, as shown in FIG. 3, the suction pipe 9 can be connected to the suction port f to directly suck the air present in the suction disk. Further, by sucking air from one suction port f, a uniform suction force can be applied to the suction surface a of the first metal plate 1.

また、本実施例によれば、第１乃至第４金属板１〜４が、拡散接合法により、互いの原子の相互拡散により固相のまま接合され、しかも第１乃至第３金属板１〜３における孔部ｂ、第１空洞部ｃ及び第２空洞部ｄ以外の部分が互いに面接触で接合される構造であるため、変形や歪みが生じ難く、ワーク７に接触する第１金属板１の吸着面ａの平面度を良好なものにすることができる。なお、孔部ｂ、第１空洞部ｃ及び第２空洞部ｄがエッチングにより形成されることにより、第１金属板１の吸着面ａの平面度をより良好なものにすることができる。   In addition, according to the present embodiment, the first to fourth metal plates 1 to 4 are bonded in a solid phase by mutual diffusion of atoms by a diffusion bonding method, and the first to third metal plates 1 to 3 are bonded. Since the parts other than the hole b, the first cavity c, and the second cavity d in FIG. 3 are joined together in surface contact, the first metal plate 1 that contacts the workpiece 7 is less likely to be deformed or distorted. The flatness of the adsorption surface a can be made favorable. The flatness of the suction surface a of the first metal plate 1 can be improved by forming the hole b, the first cavity c, and the second cavity d by etching.

上記のように構成される吸着盤は、例えば、図３に示したように、ワーク７を積層する際の移送手段として用いられる。この場合に、本実施例によれば、１つの吸引口ｆから空気を吸引できるため、吸着盤の上部全体が吸引手段によって覆われることがない。   For example, as shown in FIG. 3, the suction disk configured as described above is used as a transfer unit when the workpieces 7 are stacked. In this case, according to the present embodiment, since air can be sucked from one suction port f, the entire upper part of the suction disk is not covered by the suction means.

図４は、本発明の実施例２に係る吸着盤の構造を示す分解斜視図である。この図に示したように、本実施例に係る吸着盤は、最上層が第４金属板４に代えて第１金属板１から構成される点、最上層及び最下層を構成する第１金属板１，１の周面に設けられた突出部ｅ，ｅに、厚さ方向に貫通する穴からなる吸引口ｆ，ｆが設けられる点、及び第３金属板３の周面に設けられた突出部ｅに貫通孔ｇが設けられる点で、実施例１に係る吸着盤と異なる。   FIG. 4 is an exploded perspective view showing the structure of the suction cup according to the second embodiment of the present invention. As shown in this figure, the suction disk according to the present embodiment has a point that the uppermost layer is formed of the first metal plate 1 instead of the fourth metal plate 4, and the first metal constituting the uppermost layer and the lowermost layer. Protrusions e, e provided on the peripheral surfaces of the plates 1, 1 are provided with suction ports f, f consisting of holes penetrating in the thickness direction, and provided on the peripheral surface of the third metal plate 3. It differs from the suction cup according to the first embodiment in that a through hole g is provided in the protruding portion e.

最上層を構成する第１金属板１の上面は、吸着面ａとして機能するものであり、該第１金属板１は、その上面に開口する、厚さ方向に貫通する孔部ｂを有して構成される。貫通孔ｇは、第２金属板２に形成された第１空洞部ｃと最下層を構成する第１金属板１に形成された吸引口ｆとを連通させるものである。   The upper surface of the first metal plate 1 constituting the uppermost layer functions as an adsorption surface a, and the first metal plate 1 has a hole b that opens in the upper surface and penetrates in the thickness direction. Configured. The through hole g allows the first cavity c formed in the second metal plate 2 to communicate with the suction port f formed in the first metal plate 1 constituting the lowermost layer.

図５は、第１乃至第３金属板１〜３を重ね合わせた状態を示す部分断面図である。この図に示したように、本実施例では、第１金属板１，１により最上層及び最下層が構成され、第２金属板２及び第３金属板３により中間層が構成されるように、第１乃至第３金属板１〜３が上記の拡散接合法により接合される。そして、第２金属板２に形成された第１空洞部ｃが最上層を構成する第１金属板１の吸引口ｆと連通するとともに、該第１空洞部ｃが第３金属板３の貫通孔ｇを介して最下層を構成する第１金属板１の吸引口ｆと連通し、さらに最上層を構成する第１金属板１に形成されたすべての孔部ｂが第１空洞部ｃに直接連通するとともに、最下層を構成する第１金属板１に形成されたすべての孔部ｂが第３金属板３に形成された第２空洞部ｄを介して第１空洞部ｃに連通している。したがって、図６に示したように、上下に配置された吸引口ｆ，ｆに吸引管９をそれぞれ接続して、吸着盤に内在する空気を直接吸引することができる。この場合、２つの吸引管９のうち、いずれの吸引管９を用いても吸着盤に内在する空気を吸引可能である。また、１つ又は２つの吸引口ｆから空気を吸引することによって、最上層及び最下層を構成する第１金属板１，１の吸着面ａに均一な吸着力を作用させることができる。   FIG. 5 is a partial cross-sectional view illustrating a state in which the first to third metal plates 1 to 3 are overlapped. As shown in this figure, in this embodiment, the first metal plate 1, 1 constitutes the uppermost layer and the lowermost layer, and the second metal plate 2 and the third metal plate 3 constitute an intermediate layer. The 1st thru | or 3rd metal plates 1-3 are joined by said diffusion bonding method. The first cavity c formed in the second metal plate 2 communicates with the suction port f of the first metal plate 1 constituting the uppermost layer, and the first cavity c penetrates the third metal plate 3. All the holes b formed in the first metal plate 1 constituting the uppermost layer communicate with the suction port f of the first metal plate 1 constituting the lowermost layer through the holes g and are formed in the first cavity c. In addition to direct communication, all the holes b formed in the first metal plate 1 constituting the lowermost layer communicate with the first cavity c via the second cavity d formed in the third metal plate 3. ing. Therefore, as shown in FIG. 6, the suction pipes 9 are respectively connected to the suction ports f, f arranged above and below, and the air present in the suction disk can be directly sucked. In this case, the air existing in the suction disk can be sucked by using any one of the two suction tubes 9. Further, by sucking air from one or two suction ports f, a uniform suction force can be applied to the suction surfaces a of the first metal plates 1 and 1 constituting the uppermost layer and the lowermost layer.

上記のように構成される吸着盤は、第１金属板１，１により最上層及び最下層が構成されるため、吸着盤の両面を吸着面ａとして機能させることができる。したがって、例えば、図７に示したように、ワークステージ８に最上層を構成する第１金属板１の吸着面ａを吸着固定し、最下層を構成する第１金属板１の吸着面ａによって、ワーク７を吸着させることができる。この場合に、本実施例によれば、最上層及び最下層を構成する第１金属板１，１の周面に突出部ｅが設けられ、該突出部ｅに吸引口ｆが設けられているため、吸引手段を吸着盤の上部に設けなくてよい。また、ワークステージ８に吸着盤を固定するに際して、ねじ等の固定具を必要としないという利点がある。   Since the uppermost layer and the lowermost layer are constituted by the first metal plates 1 and 1 in the suction disk configured as described above, both surfaces of the suction disk can function as the suction surface a. Therefore, for example, as shown in FIG. 7, the suction surface a of the first metal plate 1 constituting the uppermost layer is sucked and fixed to the work stage 8, and the suction surface a of the first metal plate 1 constituting the lowermost layer is used. The workpiece 7 can be adsorbed. In this case, according to the present embodiment, the protruding portion e is provided on the peripheral surface of the first metal plates 1 and 1 constituting the uppermost layer and the lowermost layer, and the suction port f is provided in the protruding portion e. Therefore, it is not necessary to provide the suction means on the upper part of the suction disk. Further, there is an advantage that a fixing tool such as a screw is not required when fixing the suction disk to the work stage 8.

図８は、本発明の実施例３に係る吸着盤の構造を示す分解斜視図である。この図に示したように、本実施例に係る吸着盤は、第２金属板２に、吸引口ｆが設けられる点、及び最上層を構成する第１金属板１と第２金属板２との間に第３金属板３が設けられる点で、実施例２に係る吸着盤と異なる。   FIG. 8 is an exploded perspective view showing the structure of the suction cup according to the third embodiment of the present invention. As shown in this figure, in the suction disk according to the present embodiment, the second metal plate 2 is provided with a suction port f, and the first metal plate 1 and the second metal plate 2 constituting the uppermost layer, It differs from the suction disk according to the second embodiment in that the third metal plate 3 is provided between the two.

すなわち、第１空洞部ｃを有する第２金属板２には、第１空洞部ｃに連通し、厚さ方向に貫通しない溝からなり、第２金属板２の周面に開口する吸引口ｆが設けられている。最上層を構成する第１金属板１と第２金属板２との間に設けられる第３金属板３は、厚さ方向に貫通する穴からなり、第１金属板１に形成された孔部ｂと第２金属板２に形成された第１空洞部ｃとを連通させる第２空洞部ｄを有して構成される。   That is, the second metal plate 2 having the first cavity c is formed of a groove that communicates with the first cavity c and does not penetrate in the thickness direction, and opens to the peripheral surface of the second metal plate 2. Is provided. The third metal plate 3 provided between the first metal plate 1 and the second metal plate 2 constituting the uppermost layer is formed of a hole penetrating in the thickness direction, and a hole formed in the first metal plate 1. b and the 2nd cavity part d which connects the 1st cavity part c formed in the 2nd metal plate 2 are comprised.

図９は、第１乃至第３金属板１〜３を重ね合わせた状態を示す部分断面図である。この図に示したように、本実施例では、第１金属板１，１により最上層及び最下層が構成され、最上層を構成する第１金属板１の直下に配置される第３金属板３、第２金属板２及び第２金属板２の直下に配置される第３金属板３により中間層が構成されるように、第１乃至第３金属板１〜３が上記の拡散接合法により接合される。そして、第２金属板２に形成された第１空洞部ｃと吸引口ｆとが連通し、さらに最上層を構成する第１金属板１に形成されたすべての孔部ｂが第３金属板３に形成された第２空洞部ｄを介して第１空洞部ｃに連通するとともに、最下層を構成する第１金属板１に形成されたすべての孔部ｂが第３金属板３に形成された第２空洞部ｄを介して第１空洞部ｃに連通しているため、図１０に示したように、吸引口ｆに吸引管９を接続して、吸着盤に内在する空気を直接吸引することができる。また、１つの吸引口ｆから空気を吸引することによって、最上層及び最下層を構成する第１金属板１，１の吸着面ａに均一な吸着力を作用させることができる。   FIG. 9 is a partial cross-sectional view showing a state in which the first to third metal plates 1 to 3 are overlapped. As shown in this figure, in the present embodiment, the first metal plates 1 and 1 constitute the uppermost layer and the lowermost layer, and the third metal plate disposed immediately below the first metal plate 1 constituting the uppermost layer. 3, the first to third metal plates 1 to 3 are formed by the above-described diffusion bonding method so that the intermediate layer is constituted by the second metal plate 2 and the third metal plate 3 disposed immediately below the second metal plate 2. Are joined together. The first cavity c formed in the second metal plate 2 communicates with the suction port f, and all the holes b formed in the first metal plate 1 constituting the uppermost layer are formed in the third metal plate. All the holes b formed in the first metal plate 1 constituting the lowermost layer are formed in the third metal plate 3 while communicating with the first cavity c via the second cavity d formed in 3. As shown in FIG. 10, the suction pipe 9 is connected to the suction port f so that the air present in the suction plate is directly passed through the second cavity d. Can be aspirated. Further, by sucking air from one suction port f, a uniform suction force can be applied to the suction surfaces a of the first metal plates 1 and 1 constituting the uppermost layer and the lowermost layer.

上記のように構成される吸着盤は、図１０に示したように、第２金属板２に吸引口ｆが設けられているため、吸着盤の側部から吸引管９を接続することができ、吸引手段を吸着盤の上部に設けなくてよい。   As shown in FIG. 10, the suction disk constructed as described above is provided with the suction port f in the second metal plate 2, so that the suction pipe 9 can be connected from the side of the suction disk. The suction means need not be provided at the top of the suction disk.

図１１は、本発明の実施例４に係る吸着盤の構造を示す分解斜視図である。この図に示したように、本実施例に係る吸着盤は、孔部ｂ、第１空洞部ｃ、第２空洞部ｄ及び吸引口ｆから構成される一連の吸引構造を複数有する点で、一連の吸引構造を１つしか有しない実施例１乃至実施例４に係る吸着盤と異なる。   FIG. 11 is an exploded perspective view showing the structure of the suction cup according to the fourth embodiment of the present invention. As shown in this figure, the suction disk according to the present embodiment has a plurality of suction structures composed of a hole b, a first cavity c, a second cavity d, and a suction port f. Different from the suction cups according to Examples 1 to 4 having only one series of suction structures.

本実施例では、一連の吸引構造が１つの吸着盤に６つ設けられており、各吸引構造は独立して設けられている。したがって、本実施例に係る吸着盤によれば、各吸引構造により、一度に複数のワーク７を吸着することができる。また、各吸引構造が独立しているため、一の吸引構造によりワーク７を吸着しているときに、他の吸引構造ではワーク７を吸着しないという使用が可能となる。   In this embodiment, six suction structures are provided in one suction disk, and each suction structure is provided independently. Therefore, according to the suction disk according to the present embodiment, a plurality of workpieces 7 can be sucked at a time by each suction structure. Moreover, since each suction structure is independent, when the workpiece 7 is sucked by one suction structure, it can be used that the workpiece 7 is not sucked by another suction structure.

本発明の実施例１に係る吸着盤の構造を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the suction disk based on Example 1 of this invention. 実施例１における第１乃至第４金属板を重ね合わせた状態を示す部分断面図である。FIG. 3 is a partial cross-sectional view illustrating a state where first to fourth metal plates in Example 1 are overlapped. 実施例１に係る吸着盤の使用状態を示す図である。It is a figure which shows the use condition of the suction disk which concerns on Example 1. FIG. 本発明の実施例２に係る吸着盤の構造を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the suction disk based on Example 2 of this invention. 実施例２における第１乃至第３金属板を重ね合わせた状態を示す部分断面図である。6 is a partial cross-sectional view illustrating a state in which first to third metal plates in Embodiment 2 are overlaid. FIG. 実施例２に係る吸着盤に吸引管を接続した状態を示す図である。It is a figure which shows the state which connected the suction pipe to the suction disk which concerns on Example 2. FIG. 実施例２に係る吸着盤の使用状態を示す図である。It is a figure which shows the use condition of the suction disk which concerns on Example 2. FIG. 本発明の実施例３に係る吸着盤の構造を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the suction cup based on Example 3 of this invention. 実施例３における第１乃至第３金属板を重ね合わせた状態を示す部分断面図である。FIG. 6 is a partial cross-sectional view illustrating a state in which first to third metal plates in Example 3 are overlaid. 実施例３に係る吸着盤に吸引管を接続した状態を示す図である。It is a figure which shows the state which connected the suction pipe to the suction disk which concerns on Example 3. FIG. 本発明の実施例４に係る吸着盤の構造を示す分解斜視図である。It is a disassembled perspective view which shows the structure of the suction disk based on Example 4 of this invention.

符号の説明Explanation of symbols

１ 第１金属板
２ 第２金属板
３ 第３金属板
４ 第４金属板
７ ワーク
８ ワークステージ
９ 吸引管
ａ 吸着面
ｂ 孔部
ｃ 第１空洞部
ｄ 第２空洞部
ｅ 突出部
ｆ 吸引口
ｇ 貫通孔 DESCRIPTION OF SYMBOLS 1 1st metal plate 2 2nd metal plate 3 3rd metal plate 4 4th metal plate 7 Work piece 8 Work stage 9 Suction pipe a Suction surface b Hole part c 1st cavity part d 2nd cavity part e Protrusion part f Suction port g Through hole

Claims (5)

複数の金属板を接合して構成される吸着盤であって、
前記金属板同士が、拡散接合法により、互いの原子の相互拡散により固相のまま接合され、
前記金属板には、吸着面を有するとともに、該吸着面に開口する、厚さ方向に貫通する孔部を有する第１金属板と、渦巻き状に連続し、厚さ方向に貫通する穴からなり、吸引源に接続された吸引管が接続される吸引口と連通する第１空洞部を有する第２金属板と、厚さ方向に貫通する穴からなり、前記孔部と前記第１空洞部とを連通させる第２空洞部を有する第３金属板とが含まれることを特徴とする吸着盤。 An adsorption disk constructed by joining a plurality of metal plates,
The metal plates are bonded together in a solid phase by mutual diffusion of atoms with each other by a diffusion bonding method,
The metal plate includes a first metal plate having a suction surface and having a hole that penetrates in the thickness direction and opens in the suction surface, and a hole that is continuous in a spiral shape and penetrates in the thickness direction. A second metal plate having a first cavity communicating with a suction port to which a suction pipe connected to a suction source is connected; a hole penetrating in a thickness direction; and the hole and the first cavity And a third metal plate having a second cavity for communicating with the suction plate. 前記第１金属板の周面に突出部が設けられ、該突出部に前記吸引口が設けられていることを特徴とする請求項１記載の吸着盤。   The suction plate according to claim 1, wherein a protrusion is provided on a peripheral surface of the first metal plate, and the suction port is provided in the protrusion. 前記第２金属板に、前記吸引口が設けられていることを特徴とする請求項１記載の吸着盤。   The suction plate according to claim 1, wherein the suction port is provided in the second metal plate. 前記第１金属板により最上層及び最下層が構成されることを特徴とする請求項１記載の吸着盤。   The suction disk according to claim 1, wherein an uppermost layer and a lowermost layer are constituted by the first metal plate. 前記孔部、第１空洞部、第２空洞部及び吸引口から構成される一連の吸引構造を複数有するとともに、各吸引構造が独立していることを特徴とする請求項１記載の吸着盤。   The suction cup according to claim 1, wherein a plurality of a series of suction structures including the hole portion, the first cavity portion, the second cavity portion, and the suction port are provided, and each suction structure is independent.
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JP5459829B2 (en) * 2009-03-26 2014-04-02 株式会社アロン社 Suction board
JP2012223860A (en) * 2011-04-20 2012-11-15 Murata Machinery Ltd Suction chuck, and transfer device of workpiece including same
US20130127193A1 (en) * 2011-11-18 2013-05-23 Nike, Inc. Manufacturing Vacuum Tool
JP6527609B2 (en) 2017-02-16 2019-06-05 住友化学株式会社 Sputtering target processing method, sputtering target processing apparatus, and sputtering target product manufacturing method
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