JP5906568B2 - 真空排気方法 - Google Patents

真空排気方法 Download PDF

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Publication number
JP5906568B2
JP5906568B2 JP2011025942A JP2011025942A JP5906568B2 JP 5906568 B2 JP5906568 B2 JP 5906568B2 JP 2011025942 A JP2011025942 A JP 2011025942A JP 2011025942 A JP2011025942 A JP 2011025942A JP 5906568 B2 JP5906568 B2 JP 5906568B2
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Japan
Prior art keywords
exhaust
vacuum
evacuation
flow rate
gas flow
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Expired - Fee Related
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JP2011025942A
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Japanese (ja)
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JP2012163079A (ja
JP2012163079A5 (enExample
Inventor
康享 松本
康享 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP2011025942A 2011-02-09 2011-02-09 真空排気方法 Expired - Fee Related JP5906568B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011025942A JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011025942A JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

Publications (3)

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JP2012163079A JP2012163079A (ja) 2012-08-30
JP2012163079A5 JP2012163079A5 (enExample) 2014-03-06
JP5906568B2 true JP5906568B2 (ja) 2016-04-20

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ID=46842684

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JP2011025942A Expired - Fee Related JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

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JP (1) JP5906568B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6318847B2 (ja) * 2014-05-23 2018-05-09 トヨタ自動車株式会社 負圧検出システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336674U (enExample) * 1986-08-27 1988-03-09
JPH0321579U (enExample) * 1989-07-10 1991-03-04
JP2002174173A (ja) * 2000-12-06 2002-06-21 Denso Corp ポンプ
JP5631539B2 (ja) * 2008-10-10 2014-11-26 ナブテスコオートモーティブ株式会社 真空ポンプ

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Publication number Publication date
JP2012163079A (ja) 2012-08-30

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