JP2012163079A5 - - Google Patents

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Publication number
JP2012163079A5
JP2012163079A5 JP2011025942A JP2011025942A JP2012163079A5 JP 2012163079 A5 JP2012163079 A5 JP 2012163079A5 JP 2011025942 A JP2011025942 A JP 2011025942A JP 2011025942 A JP2011025942 A JP 2011025942A JP 2012163079 A5 JP2012163079 A5 JP 2012163079A5
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JP
Japan
Prior art keywords
chamber
vacuum exhaust
vacuum
exhaust device
driving sound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011025942A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012163079A (ja
JP5906568B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011025942A priority Critical patent/JP5906568B2/ja
Priority claimed from JP2011025942A external-priority patent/JP5906568B2/ja
Publication of JP2012163079A publication Critical patent/JP2012163079A/ja
Publication of JP2012163079A5 publication Critical patent/JP2012163079A5/ja
Application granted granted Critical
Publication of JP5906568B2 publication Critical patent/JP5906568B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011025942A 2011-02-09 2011-02-09 真空排気方法 Expired - Fee Related JP5906568B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011025942A JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011025942A JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

Publications (3)

Publication Number Publication Date
JP2012163079A JP2012163079A (ja) 2012-08-30
JP2012163079A5 true JP2012163079A5 (enExample) 2014-03-06
JP5906568B2 JP5906568B2 (ja) 2016-04-20

Family

ID=46842684

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011025942A Expired - Fee Related JP5906568B2 (ja) 2011-02-09 2011-02-09 真空排気方法

Country Status (1)

Country Link
JP (1) JP5906568B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6318847B2 (ja) * 2014-05-23 2018-05-09 トヨタ自動車株式会社 負圧検出システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336674U (enExample) * 1986-08-27 1988-03-09
JPH0321579U (enExample) * 1989-07-10 1991-03-04
JP2002174173A (ja) * 2000-12-06 2002-06-21 Denso Corp ポンプ
JP5631539B2 (ja) * 2008-10-10 2014-11-26 ナブテスコオートモーティブ株式会社 真空ポンプ

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