JP5906393B2 - 太陽電池及び太陽電池の製造方法 - Google Patents
太陽電池及び太陽電池の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title description 21
- 238000000034 method Methods 0.000 title description 21
- 239000004065 semiconductor Substances 0.000 claims description 351
- 239000000758 substrate Substances 0.000 claims description 58
- 238000000926 separation method Methods 0.000 claims description 42
- 238000002161 passivation Methods 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 397
- 239000000969 carrier Substances 0.000 description 24
- 238000005215 recombination Methods 0.000 description 10
- 230000006798 recombination Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 239000010953 base metal Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000003513 alkali Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
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Description
(1)太陽電池1Aの概略構成
本発明の実施形態に係る太陽電池1Aの概略構成について、図2及び図3を参照しながら説明する。図2は、本発明の実施形態に係る太陽電池1Aの裏面12側から視た平面図である。図3は、図2のA−A’線における断面図である。
(2)太陽電池1Bの概略構成
本発明の実施形態に係る太陽電池1Bの概略構成について、図4を参照しながら説明する。以下において、太陽電池1Aと同一部分については、説明を省略する。すなわち、太陽電池1Aとの相違点を主に説明する。図4は、本発明の実施形態に係る太陽電池1Bの配列方向x及び長手方向yに垂直な垂直方向zと配列方向xとに沿った断面図である。
(3)太陽電池1Bの製造方法
本発明の実施形態に係る太陽電池1Bの製造方法について、図5から図12を参照しながら説明する。図5は、本発明の実施形態に係る太陽電池1Bの製造方法を説明するためのフローチャートである。図6から図12は、本発明の実施形態に係る太陽電池1Bの製造方法を説明するための図である。
(4)作用・効果
本発明の実施形態に係る太陽電池1によれば、端点39から第2絶縁層端部45bまでの配列方向xに沿った長さLpは、端点39から第1絶縁層端部45aまでの配列方向xに沿った長さLnよりも短い。これによって、半導体基板10n内の第1半導体層20n付近で生成した少数キャリアは、第2電極50pへと移動する際に、絶縁層40で覆われた第2半導体層30pと半導体基板10nとの接合付近を通過する長さが短くなる。従って、配列方向xにおける絶縁層40の幅が同一の太陽電池と比べた場合、太陽電池1の方が、第2半導体層30p下での少数キャリアが第2電極50pに到達するまでの距離が短くなり、少数キャリアの再結合を減少させることができる。
(5)その他の実施形態
上述したように、本発明の実施形態を通じて本発明の内容を開示したが、この開示の一部をなす論述及び図面は、本発明を限定するものであると理解すべきではない。
Claims (11)
- 受光面と裏面とを有する第1導電型の結晶系半導体基板と、第1導電型を有する第1非晶質半導体層と、第2導電型を有する第2非晶質半導体層と、前記第1非晶質半導体層と電気的に接続された第1電極と、前記第2非晶質半導体層と電気的に接続された第2電極と、絶縁性を有する絶縁層と、を備え、前記第1非晶質半導体層及び前記第2非晶質半導体層は、前記裏面上に形成される太陽電池であって、
前記第1非晶質半導体層と前記第2非晶質半導体層とが交互に配列された配列方向において、前記第1非晶質半導体層の端部を第1非晶質半導体層端部とし、前記第1非晶質半導体層と隣り合う前記第2非晶質半導体層の端部を第2非晶質半導体層端部とし、前記第1非晶質半導体層上に形成され、前記第1電極側にある一方の前記絶縁層の端部を第1絶縁層端部とし、前記第2電極側にある他方の前記絶縁層の端部を第2絶縁層端部とすると、
前記第1非晶質半導体層端部と前記第2非晶質半導体層端部とは接していて、前記絶縁層は前記第1非晶質半導体層端部上と前記第2非晶質半導体層端部上に跨って形成され、前記第2非晶質半導体層は、前記絶縁層上を含んで前記結晶系半導体基板の前記裏面上に設けられ、
前記第2非晶質半導体層端部の前記裏面と接する端点から前記第2絶縁層端部までの前記配列方向に沿った長さは、前記端点から前記第1絶縁層端部までの前記配列方向に沿った長さよりも短い太陽電池。 - 前記端点から前記第2絶縁層端部までの前記配列方向に沿った長さは、0.1mm以内である請求項1に記載の太陽電池。
- 前記第2絶縁層端部と前記第1非晶質半導体層端部とが並んでいる請求項1に記載の太陽電池。
- 前記第2絶縁層端部と前記第1非晶質半導体層端部とは、前記配列方向において、同一位置にある請求項1に記載の太陽電池。
- 前記太陽電池は、短絡を防ぐための分離溝を備えており、
前記分離溝は、前記絶縁層上に位置する、請求項1に記載の太陽電池。 - 前記裏面上に形成された前記第1非晶質半導体層と前記裏面上に形成された前記第2非晶質半導体層とのうち、p型の導電型を有する非晶質半導体層をp型非晶質半導体層とすると、
前記配列方向において、前記分離溝の中心は、前記絶縁層の中心よりも、前記p型非晶質半導体層の中心に近い請求項5に記載の太陽電池。 - 前記受光面の全面で受光が可能である、請求項1に記載の太陽電池。
- 前記受光面は、パッシベーション層で覆われている、請求項7に記載の太陽電池。
- 前記パッシベーション層は、実質的に真正な非晶質半導体層を含む、請求項8に記載の太陽電池。
- 前記受光面は、テクスチャ構造を有する、請求項7に記載の太陽電池。
- 前記結晶系半導体基板の前記裏面は、前記受光面よりも平坦にされている、請求項10に記載の太陽電池。
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JP5956742B2 (ja) * | 2011-11-14 | 2016-07-27 | シャープ株式会社 | 光電変換素子 |
JP5820265B2 (ja) * | 2011-12-21 | 2015-11-24 | シャープ株式会社 | 裏面電極型太陽電池及びその製造方法 |
US8597970B2 (en) | 2011-12-21 | 2013-12-03 | Sunpower Corporation | Hybrid polysilicon heterojunction back contact cell |
FR2985608B1 (fr) * | 2012-01-05 | 2016-11-18 | Commissariat Energie Atomique | Cellule photovoltaique et procede de realisation |
GB2503515A (en) * | 2012-06-29 | 2014-01-01 | Rec Cells Pte Ltd | A rear contact heterojunction solar cell |
KR101977927B1 (ko) * | 2012-07-11 | 2019-05-13 | 인텔렉츄얼 키스톤 테크놀로지 엘엘씨 | 광전소자 및 그 제조방법 |
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US9640699B2 (en) * | 2013-02-08 | 2017-05-02 | International Business Machines Corporation | Interdigitated back contact heterojunction photovoltaic device |
US9859455B2 (en) | 2013-02-08 | 2018-01-02 | International Business Machines Corporation | Interdigitated back contact heterojunction photovoltaic device with a floating junction front surface field |
JP6360471B2 (ja) * | 2013-03-04 | 2018-07-18 | シャープ株式会社 | 光電変換素子、光電変換モジュールおよび太陽光発電システム |
CN104995747B (zh) * | 2013-03-28 | 2016-12-14 | 夏普株式会社 | 光电转换元件 |
WO2014157525A1 (ja) * | 2013-03-28 | 2014-10-02 | シャープ株式会社 | 光電変換素子 |
US9196758B2 (en) | 2013-12-20 | 2015-11-24 | Sunpower Corporation | Solar cell emitter region fabrication with differentiated p-type and n-type region architectures |
JP6425143B2 (ja) * | 2014-01-28 | 2018-11-21 | パナソニックIpマネジメント株式会社 | 太陽電池及びその製造方法 |
JP2015185743A (ja) * | 2014-03-25 | 2015-10-22 | シャープ株式会社 | 光電変換素子 |
US9837576B2 (en) | 2014-09-19 | 2017-12-05 | Sunpower Corporation | Solar cell emitter region fabrication with differentiated P-type and N-type architectures and incorporating dotted diffusion |
JP2016143862A (ja) * | 2015-02-05 | 2016-08-08 | シャープ株式会社 | 光電変換素子および光電変換素子の製造方法 |
US9525083B2 (en) | 2015-03-27 | 2016-12-20 | Sunpower Corporation | Solar cell emitter region fabrication with differentiated P-type and N-type architectures and incorporating a multi-purpose passivation and contact layer |
US11355657B2 (en) * | 2015-03-27 | 2022-06-07 | Sunpower Corporation | Metallization of solar cells with differentiated p-type and n-type region architectures |
CN108140680B (zh) * | 2015-12-07 | 2020-08-28 | 株式会社钟化 | 光电转换装置及其制造方法 |
WO2017168910A1 (ja) * | 2016-03-28 | 2017-10-05 | パナソニックIpマネジメント株式会社 | 太陽電池セル及びその製造方法 |
US9502601B1 (en) | 2016-04-01 | 2016-11-22 | Sunpower Corporation | Metallization of solar cells with differentiated P-type and N-type region architectures |
FR3073670B1 (fr) * | 2017-11-15 | 2019-12-13 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de formation d'electrodes |
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EP2541617A4 (en) | 2013-12-18 |
EP2541617A1 (en) | 2013-01-02 |
US20130247970A1 (en) | 2013-09-26 |
US9252301B2 (en) | 2016-02-02 |
JPWO2011105554A1 (ja) | 2013-06-20 |
WO2011105554A1 (ja) | 2011-09-01 |
EP2541617B1 (en) | 2017-03-22 |
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