JP5877602B2 - 赤外光源 - Google Patents
赤外光源 Download PDFInfo
- Publication number
- JP5877602B2 JP5877602B2 JP2011164741A JP2011164741A JP5877602B2 JP 5877602 B2 JP5877602 B2 JP 5877602B2 JP 2011164741 A JP2011164741 A JP 2011164741A JP 2011164741 A JP2011164741 A JP 2011164741A JP 5877602 B2 JP5877602 B2 JP 5877602B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- heating element
- infrared light
- wavelength
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 claims description 61
- 239000000758 substrate Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000010408 film Substances 0.000 description 38
- 230000005855 radiation Effects 0.000 description 13
- 239000010931 gold Substances 0.000 description 11
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 10
- 229910052737 gold Inorganic materials 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 230000005457 Black-body radiation Effects 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 125000006850 spacer group Chemical group 0.000 description 9
- 238000010521 absorption reaction Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000006185 dispersion Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 229910001120 nichrome Inorganic materials 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000010248 power generation Methods 0.000 description 2
- 238000006057 reforming reaction Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
例えば、熱光起電力(ThermoPhotoVoltaic;TPV)発電においては、起電力を発生する光電変換セルの特性が良い波長に、選択出射される波長を合わせることで、発電効率を向上できる。
[数1] L=(2kx ")-1
図3に金の表面プラズモンの波長に対する伝播距離の計算値を示す。界面を構成する金と空気の複素屈折率から求めることができる。例えば可視光の領域では伝播距離は数十μmである。一方で赤外領域では数百μmから数mm程度にまで伸びる。伝搬距離が長い性質は、伝搬中の損失を少なくして波連を長くするのに有利であり、鋭い波長選択性を実現し易くなる。
2 回折格子部
3a 回折格子(反射型回折格子、平面状反射型回折格子)
4 反射膜
5 ヒータ部(発熱体によって昇温する素子)
9 反射膜もしくは反射構造
10 スペーサ
11 赤外線
12 表面プラズモン
Claims (5)
- 表面が金属の反射型回折格子と、発熱体によって昇温する素子を有し、前記発熱体によって昇温する素子と前記反射型回折格子の前記表面の一部のみが向き合い、前記反射型回折格子の前記表面の前記発熱体によって昇温する素子と向き合っていない露出部分から主たる波長の赤外線を出射することを特徴とする赤外光源。
- 前記反射型回折格子が平面状反射型回折格子で構成され、前記発熱体によって昇温する素子の少なくとも一部が平面であることを特徴とする請求項1に記載の赤外光源。
- 前記反射型回折格子の基板面と、前記発熱体によって昇温する素子の一部である平面が、互いに平行に配置されていることを特徴とする請求項1または2に記載の赤外光源。
- 前記反射型回折格子のピッチは、出射される赤外線の主たる波長と一致していることを特徴とする請求項1乃至3のうちいずれか一項に記載の赤外光源。
- 前記発熱体によって昇温する素子の、前記反射型回折格子と向かい合う面以外には、自身が発する赤外線を反射する反射膜や反射構造が設けられていることを特徴とする請求項1乃至4のうちいずれか一項に記載の赤外光源。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011164741A JP5877602B2 (ja) | 2010-09-13 | 2011-07-27 | 赤外光源 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010204108 | 2010-09-13 | ||
JP2010204108 | 2010-09-13 | ||
JP2011164741A JP5877602B2 (ja) | 2010-09-13 | 2011-07-27 | 赤外光源 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012083335A JP2012083335A (ja) | 2012-04-26 |
JP5877602B2 true JP5877602B2 (ja) | 2016-03-08 |
Family
ID=46242335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011164741A Active JP5877602B2 (ja) | 2010-09-13 | 2011-07-27 | 赤外光源 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5877602B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6242229B2 (ja) * | 2014-02-10 | 2017-12-06 | 矢崎総業株式会社 | 赤外光源 |
JP6441707B2 (ja) * | 2015-02-24 | 2018-12-19 | 矢崎総業株式会社 | 赤外光源 |
JP6828920B2 (ja) * | 2017-03-31 | 2021-02-10 | 国立大学法人横浜国立大学 | 加熱式光源 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01230241A (ja) * | 1988-03-10 | 1989-09-13 | Oki Electric Ind Co Ltd | 埋込拡散層の不良検出方法 |
JP4396464B2 (ja) * | 2003-10-27 | 2010-01-13 | パナソニック電工株式会社 | 赤外線放射素子およびそれを用いたガスセンサ |
JP2007324126A (ja) * | 2006-05-26 | 2007-12-13 | Nalux Co Ltd | 赤外光源 |
-
2011
- 2011-07-27 JP JP2011164741A patent/JP5877602B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2012083335A (ja) | 2012-04-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Wang et al. | Narrowband thermal emission realized through the coupling of cavity and Tamm plasmon resonances | |
CN109642822B (zh) | 光谱仪和利用其的光谱测量方法 | |
Nishijima et al. | Kirchhoff’s metasurfaces towards efficient photo-thermal energy conversion | |
JP5939016B2 (ja) | 光学デバイス及び検出装置 | |
JP5640592B2 (ja) | 光デバイスユニット及び検出装置 | |
JP5545144B2 (ja) | 光デバイスユニット及び検出装置 | |
JP5452140B2 (ja) | 水素検出用表面プラズモン共鳴素子、表面プラズモン共鳴式光学水素検出器及び表面プラズモン共鳴を利用して光学的に水素を検出する方法 | |
Streyer et al. | Selective absorbers and thermal emitters for far-infrared wavelengths | |
Feng et al. | Fiber coupled waveguide grating structures | |
JP5877602B2 (ja) | 赤外光源 | |
US20150098085A1 (en) | Sensor chip, sensor cartridge, and detection apparatus | |
CN111665211A (zh) | 气体传感器 | |
Jena et al. | Rabi-like splitting and refractive index sensing with hybrid Tamm plasmon-cavity modes | |
Pandey et al. | On the application of stacked periodic tungsten grating nanostructure in wide-range plasmonic sensing and other photonic devices | |
JP6327349B2 (ja) | ガス測定装置、集合基板、および、それらの製造方法、並びに、赤外線光源およびセンサの製造方法 | |
Sun et al. | Ultra-narrow bandwidth mid-infrared thermal emitters achieved with all-dielectric metasurfaces | |
JP6269008B2 (ja) | 電磁波−表面ポラリトン変換素子。 | |
JP2016065786A (ja) | 赤外線放射素子、及びその製造方法、並びにガス分析装置 | |
JP5200848B2 (ja) | 分光装置 | |
JP2014044164A (ja) | ボロメータ及びボロメータアレイ | |
Sarkar et al. | Lithography-free directional control of thermal emission | |
Fenollosa et al. | Thermal emission of silicon at near-infrared frequencies mediated by Mie resonances | |
JP6242229B2 (ja) | 赤外光源 | |
Salakhutdinov et al. | Highly efficient diffraction gratings for use in the Littman—Metcalf mounting | |
Sawada et al. | Enhanced wavelength selective infrared emission using surface plasmon polariton and thermal energy confined in micro-heater |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140619 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150127 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150130 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150306 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150318 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150818 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151013 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20160112 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160125 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5877602 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |