JP5876767B2 - Plating apparatus and plating solution management method - Google Patents

Description

  The present invention relates to, for example, a plating apparatus used for forming a plating film made of Sn alloy such as Sn-Ag which is lead-free and has good solderability on a substrate surface, and plating used in the plating apparatus. The present invention relates to a plating solution management method for managing a solution.

  It is known that a plating film made of an Sn alloy such as Sn—Ag formed on the surface of a substrate by electroplating is used for a lead-free solder bump. In this Sn alloy plating, an insoluble anode is generally used as an electrode, and an Sn alloy plating film is formed on the surface by applying a voltage between the insoluble anode immersed in the plating solution facing each other and the substrate surface. I try to make a film. In addition to Sn—Ag, Sn alloy plating such as Sn—Cu and Sn—Bi generally uses an insoluble anode as an electrode.

When Sn alloy plating, for example, Sn-Ag plating, is performed continuously, the plating solution is a salt or complex of an acid or complexing agent that forms a water-soluble salt or complex with Sn ions (Sn ²⁺ ), such as methane. Using a plating solution containing tin sulfonate and a salt or complex of an acid or complexing agent that forms a water-soluble salt or complex with Ag ions (Ag ⁺ ), for example, silver methanesulfonate as a component, and the progress of the plating process It is known that these salts or complexes are supplied to the plating solution in order to replenish the metal ions (Sn ions and Ag ions) consumed along with (see Patent Document 1).

  In such metal ion replenishment methods, as the plating process proceeds, metal ions and free acids such as methanesulfonic acid are separated from each other, and the metal ions are consumed by plating. Gradually increases. For this reason, it has been proposed to take out a part of the plating solution and remove the free acid in the plating solution by an ion exchange resin method, an electrodialysis method, a diffusion dialysis method, or the like (see Patent Document 2).

  In electroplating using an insoluble anode, a plating solution is circulated by diffusion dialysis to remove free acid in the plating solution and adjust the pH of the plating solution (see Patent Document 3). . In addition, the liquid supply to the electrolytic cell and the dialysis cell is optimized (see Patent Document 4), and in the acid recovery using diffusion dialysis, the direction of the stock solution and the direction of the water flow are reversed. (See Patent Document 5).

Japanese Patent No. 4698904 Japanese Unexamined Patent Publication No. 1-312099 JP-A-57-29600 JP 59-28584 A Japanese Patent Laid-Open No. 9-75681

  In the invention described in Patent Literature 3, the pH of the plating solution is adjusted by removing the free acid in the plating solution by dialysis without measuring the free acid concentration of the plating solution. For this reason, if the plating process is performed continuously while supplying metal ions, the amount of free acid removed is too much and the free acid concentration in the plating solution becomes too low, or the amount of free acid removed is too small. It is thought that the free acid concentration of the plating solution may become too high. As described above, when plating treatment is performed using a plating solution whose free acid concentration is too low or too high, the in-plane uniformity of the appearance and thickness of the plating film formed by the plating treatment is poor. Thus, it becomes necessary to discard the plating solution, leading to an increase in cost. The same applies to other prior arts.

  The present invention has been made in view of the above circumstances, and by performing a plating process while adjusting the free acid concentration of the plating solution within a preferable range, a plating apparatus that enables use of the plating solution for a longer time. It is another object of the present invention to provide a plating solution management method.

  The plating apparatus of the present invention is a plating apparatus for depositing a Sn alloy plating film on the surface of a substrate, a plating tank in which an insoluble anode and a substrate are immersed in a plating solution held inside the plating tank, and the plating tank A plating solution dialysis line that draws and circulates the plating solution back to the plating bath, and a dialysis bath that is installed in the plating solution dialysis line and removes free acid from the plating solution by dialysis using an anion exchange membrane, A free acid concentration analyzer connected to the plating tank for measuring the free acid concentration in the plating solution, and plating flowing along the plating solution dialysis line based on the free acid concentration analysis value of the free acid concentration analyzer And a control unit for controlling the amount of liquid.

  Thus, based on the free acid concentration analysis value of the free acid concentration analyzer, by controlling the amount of the plating solution flowing along the plating solution dialysis line having a dialysis tank that removes free acid from the plating solution, The plating treatment can be performed while adjusting the free acid concentration of the plating solution within a preferable range.

  Another plating apparatus of the present invention is a plating apparatus for forming a Sn alloy plating film on the surface of a substrate, a plating tank in which an insoluble anode and a substrate are immersed facing each other in a plating solution held inside, A plating solution dialysis line that draws out the plating solution from the plating tank and circulates it back to the plating tank, and a dialysis tank that is installed in the plating solution dialysis line and removes free acid from the plating solution by dialysis using an anion exchange membrane. And a control unit that controls the amount of the plating solution flowing along the plating solution dialysis line based on the integrated value of the amount of electricity applied to the plating solution in the plating tank.

  Thus, based on the integrated value of the amount of electricity applied to the plating solution in the plating tank, the amount of the plating solution flowing along the plating solution dialysis line having a dialysis tank that removes free acid from the plating solution is controlled. Thus, the plating treatment can be performed while adjusting the free acid concentration of the plating solution within a preferable range.

  In a preferred aspect of the present invention, a plating solution circulation line is provided for extracting and circulating the plating solution in the plating tank back to the plating vessel during the plating process, and the plating solution dialysis line is connected to the plating solution circulation line. ing.

  Thereby, while circulating the plating solution through the plating solution circulation line, the amount of the plating solution flowing along the plating solution dialysis line can be controlled to remove the free acid from the plating solution.

In a preferred aspect of the present invention, the control unit controls the flow rate of the plating solution flowing along the plating solution dialysis line so that the free acid concentration of the plating solution is 60 to 250 g / L.
As a result, the free acid concentration of the plating solution becomes less than 60 g / L, the plating solution becomes cloudy and is not suitable for use, or the free acid concentration of the plating solution exceeds 250 g / L, and the thickness of the plating film is uniform. It can prevent that property deteriorates.

In a preferred aspect of the present invention, a plating solution amount adjusting mechanism is provided between the plating vessel and the dialysis vessel of the plating solution dialysis line, and the control unit is a unit m ² of the anion exchange membrane of the dialysis vessel. The plating solution amount adjusting mechanism is controlled so that a coefficient obtained by dividing the effective film area shown by (1) by the flow rate of the plating solution shown by the unit L / h is 0.3 to 0.7.

  In a preferred aspect of the present invention, the dialysis tank is connected to a water supply line having a water amount adjusting mechanism installed therein, and the control unit has a flow rate range of water supplied into the dialysis tank through the water supply line. The water amount adjusting mechanism is controlled so as to be 30% to 100% of the flow rate range of the plating solution supplied into the dialysis tank through the plating solution dialysis line.

  In the plating solution management method of the present invention, a voltage is applied between an insoluble anode immersed in a plating solution so as to face each other and a substrate surface to form a plating film made of Sn alloy on the surface, and the plating tank The free acid concentration in the plating solution is measured with a free acid concentration analyzer, and based on the free acid concentration analysis value of the free acid concentration analyzer, the plating solution in the plating tank is extracted and returned to the plating tank for circulation. The free acid is removed from the plating solution flowing along the plating solution dialysis line by dialysis using an anion exchange membrane in the dialysis tank while controlling the flow rate of the plating solution flowing along the plating solution dialysis line.

  According to another plating solution management method of the present invention, a voltage is applied between an insoluble anode immersed in a plating solution so as to face each other and a substrate surface to form a plating film made of an Sn alloy on the surface. Based on the integrated value of the amount of electricity applied to the plating solution in the tank, while controlling the flow rate of the plating solution flowing along the plating solution dialysis line that draws the plating solution in the plating tank back to the plating tank and circulates it, Free acid is removed from the plating solution flowing along the plating solution dialysis line by dialysis using an anion exchange membrane in a dialysis tank.

  According to the present invention, based on the analysis value of the free acid concentration of the plating solution and the integrated value of the amount of electricity applied to the plating solution in the plating tank, the flow rate of the plating solution supplied to the dialysis tank to remove the free acid By controlling the plating, the plating treatment can be performed while adjusting the free acid concentration of the plating solution within the preferred range, which makes it possible to produce a plating film with good in-plane uniformity of appearance and film thickness for a longer time. Thus, the film can be stably formed and the life of the plating solution can be extended.

It is a schematic diagram showing a plating apparatus of an embodiment of the present invention. It is a perspective view which shows the outline of the substrate holder shown in FIG. It is a top view of the substrate holder shown in FIG. It is a right view of the substrate holder shown in FIG. It is the A section enlarged view of FIG. It is a schematic diagram which shows the plating apparatus of other embodiment of this invention. It is a schematic diagram which shows the plating apparatus of other embodiment of this invention. The integrated value (Ah / L) and free of the amount of electricity applied to the plating solution when the plating treatment is performed while the dialysis treatment of the plating solution is performed and when the plating treatment is performed without performing the dialysis treatment of the plating solution. It is a graph which shows the relationship of an acid concentration (g / L). The integrated value (Ah / L) of the amount of electricity applied to the plating solution and the bump when the plating treatment is performed while the plating solution is dialyzed and when the plating treatment is performed without the dialysis treatment of the plating solution. It is a graph which shows the relationship of the in-plane uniformity (%) of the height (film thickness of a plating film). It is a figure which shows typically the change of the cross-sectional shape of a bump accompanying the increase in the integrated value of the electric quantity applied to the plating solution at the time of performing the plating treatment while performing the dialysis treatment of the plating solution. It is a figure which shows typically the change of the cross-sectional shape of a bump accompanying the increase in the integrated value of the electric quantity applied to the plating solution at the time of performing the plating process without performing the dialysis treatment of the plating solution. The effective membrane area A (m ² ) of the anion exchange membrane when plating is performed while dialysis of the plating solution in the dialysis tank is the amount of plating solution v (L / h) supplied to the dialysis tank. It is a graph which shows the relationship between the coefficient a (= A / v) divided by (2) and the free acid removal rate (%). Ratio of flow rate V (L / h) of water supplied to the dialysis tank and flow rate v (L / h) of plating solution supplied to the dialysis tank when the flow rate of water supplied to the dialysis tank is constant. It is a graph which shows the relationship between (V / v) and a free acid removal rate (%). The flow rate V (L / h) of water supplied to the dialysis tank and the flow rate v (L / h) of plating liquid supplied to the dialysis tank when the amount of plating solution supplied to the dialysis tank is constant. It is a graph which shows the relationship between ratio (V / v) and free acid removal rate (%).

Embodiments of the present invention will be described below with reference to the drawings. In the following example, a plating solution using tin methanesulfonate as Sn ions (Sn ²⁺ ) and silver methanesulfonate as Ag ions (Ag ⁺ ) is used. A film is formed. 1 to 7, the same or corresponding members are denoted by the same reference numerals, and redundant description is omitted.

  FIG. 1 is a schematic view showing a plating apparatus according to an embodiment of the present invention. As shown in FIG. 1, this plating apparatus has a plating tank 10 that holds a plating solution Q therein and an insoluble anode 12 made of, for example, titanium, and is immersed in the plating solution Q of the plating tank 10 to be in a predetermined position. An anode holder 14 to be disposed, and a substrate holder 16 that is detachably held and immersed in a plating solution Q in the plating tank 10 and disposed at a predetermined position facing the insoluble anode 12 are provided.

  During the plating process, the insoluble anode 12 is connected to the anode of the plating power source 18, and a conductive layer (not shown) such as a seed layer formed on the surface of the substrate W is connected to the cathode of the plating power source 18. A plating film made of an Sn—Ag alloy is formed on the surface of the conductive layer. This plating film is used, for example, for lead-free solder bumps.

  The plating tank 10 includes an inner tank 20 that stores the plating solution Q therein, and an overflow tank 22 that surrounds the inner tank 20. The plating solution Q that overflows the upper end of the inner tank 20 is contained in the overflow tank 22. Inflow. One end of a plating solution circulation line 32 including a pump 24, a heat exchanger (temperature controller) 26, a filter 28, and a flow meter 30 is connected to the bottom of the overflow tank 22. The other end is connected to the bottom of the inner tank 20 via a plating solution return pipe 34.

  An adjustment plate (regulation plate) 36 for adjusting the potential distribution in the plating tank 10 is disposed in the plating tank 10 between the insoluble anode 12 and the substrate holder 16 disposed in the plating tank 10. Has been. In this example, the adjustment plate 36 is made of vinyl chloride, which is a dielectric material, and has a central hole 36a having a size that can sufficiently limit the expansion of the electric field. The lower end of the adjustment plate 36 reaches the bottom plate of the plating tank 10.

  Inside the plating tank 10 is positioned between the substrate holder 16 disposed in the plating tank 10 and the adjustment plate 36, extends in the vertical direction, reciprocates in parallel with the substrate W, and A stirring paddle 38 is disposed as a stirring tool for stirring the plating solution Q between the adjusting plate 36 and the adjusting plate 36. Sufficient ions can be uniformly supplied to the surface of the substrate W by stirring the plating solution Q with the stirring paddle (stirring tool) 38 during plating.

  The plating solution return pipe 34 of the plating solution circulation line 32 is connected to a plating solution supply pipe 44 for supplying the plating solution Q to a dialysis tank 42 in which an anion exchange membrane 40 is incorporated. The liquid discharge pipe 46 is connected to the top of the overflow tank 22. The plating solution supply pipe 44 and the plating solution discharge pipe 46 are connected to the plating solution circulation line 32, and a plating solution dialysis line 48 for taking out a part of the plating solution Q from the plating solution circulation line 32 and circulating it is configured. Yes. The plating solution supply pipe 44 is provided with a liquid amount meter 50 and a plating solution amount adjusting valve 52 as a plating solution amount adjusting mechanism. A water supply line 54 for supplying water (pure water) is connected to the dialysis tank 42, and a flow meter 56 and a water amount adjustment valve 58 as a water amount adjustment mechanism are interposed in the water supply line 54. . Further, a drain line 60 is connected to the dialysis tank 42.

  As a result, the plating solution Q flowing along the plating solution dialysis line 48 is supplied into the dialysis tank 42, and after the free acid (for example, methanesulfonic acid) is removed by dialysis using the anion exchange membrane 40, it overflows. Returned to the tank 22. The free acid removed from the plating solution Q by this dialysis diffuses into the water (pure water) supplied into the dialysis tank 42 through the water supply line 54 and is discharged from the drain line 60 to the outside.

As the anion exchange membrane 40, for example, DSV (effective membrane area 0.0172 m ² ) manufactured by AGC Engineering Co., Ltd. is used, and an arbitrary number (for example, the amount of free acid removed) is selected according to the dialysis amount (free acid removal amount) , 19) anion exchange membranes 40 are assembled in the dialysis tank 42.

  The plating solution return pipe 34 of the plating solution circulation line 32 is connected to a plating solution extraction pipe 66 of a plating solution analysis line 64 having a free acid concentration analyzer 62 interposed therein, and the extraction extends from the free acid concentration analyzer 62. The liquid discharge pipe 68 is connected to the top of the overflow tank 22. As a result, a part of the plating solution Q circulating in the plating solution circulation line 32 is extracted through the plating solution extraction pipe 66 and sent to the free acid concentration analyzer 62, and the free acid concentration analyzer 62 removes the plating solution Q. After the free acid concentration is measured, it is returned to the overflow tank 22.

A replenisher supply line 69 for supplying replenisher is connected to the top of the overflow tank 22. Through this replenisher supply line 69, a plating solution and metal ions, that is, a plating solution in which tin methanesulfonate as Sn ions (Sn ²⁺ ) and silver methanesulfonate as Ag ions (Ag ⁺ ) circulate through the plating solution circulation line 32. Q is replenished.

  The analysis result (free acid concentration analysis value) of the free acid concentration analyzer 62 and the measurement results of the flow meters 30, 50, 56 are input to the control unit 70, and the plating solution amount is adjusted by the output from the control unit 70. The opening degree of the valve (plating solution amount adjusting mechanism) 52 and the water amount adjusting valve (water amount adjusting mechanism) 58 is adjusted, whereby the plating solution Q flowing along the plating solution dialysis line 48 and supplied to the dialysis tank 42 is supplied. The liquid amount and the flow rate of water that flows along the water supply line 54 and is supplied to the dialysis tank 42 are controlled.

  As shown in FIGS. 2 to 5, the substrate holder 16 is, for example, a first holding member (fixed holding member) 154 made of vinyl chloride and having a rectangular flat plate shape, and the first holding member 154 can be opened and closed via a hinge 156. And a second holding member (movable holding member) 158 attached thereto. In this example, the second holding member 158 is configured to be openable and closable via the hinge 156. However, for example, the second holding member 158 is disposed at a position facing the first holding member 154. The second holding member 158 may be advanced toward the first holding member 154 to open and close.

  The second holding member 158 includes a base portion 160 and a ring-shaped seal holder 162, and is made of, for example, vinyl chloride to improve sliding with the presser ring 164 described below. On the surface of the seal holder 162 facing the first holding member 154, when the substrate W is held by the substrate holder 16, a substrate-side seal member 166 that presses the outer peripheral portion of the surface of the substrate W and seals it is inward. Protrusively installed. Further, on the surface of the seal holder 162 that faces the first holding member 154, a holder side sealing member 168 that presses against the first holding member 154 and seals it at an outer position of the substrate side sealing member 166 is attached. Yes.

  As shown in FIG. 5, the board-side seal member 166 is sandwiched between the seal holder 162 and a first fixing ring 170 a attached to the seal holder 162 via a fastener 169 a such as a bolt, and the seal holder 162. The holder side seal member 168 is sandwiched between the seal holder 162 and a second fixing ring 170b attached to the seal holder 162 via a fastener 169b such as a bolt, and is attached to the seal holder 162. ing.

  A step portion is provided on the outer peripheral portion of the seal holder 162 of the second holding member 158, and a presser ring 164 is rotatably attached to the step portion via a spacer 165. The presser ring 164 is mounted so as not to escape by a presser plate 172 (see FIG. 3) attached to the side surface of the seal holder 162 so as to protrude outward. The presser ring 164 is made of, for example, titanium having excellent corrosion resistance against acid and alkali and sufficient rigidity, and the spacer 165 is made of a material having a low coefficient of friction so that the presser ring 164 can smoothly rotate, for example, It is composed of PTFE.

  Located on the outer side of the presser ring 164, the first holding member 154 is provided with inverted L-shaped clampers 174 having protrusions protruding inward at equal intervals along the circumferential direction. . On the other hand, a projecting portion 164 b that protrudes outward is provided at a position facing the clamper 174 along the circumferential direction of the presser ring 164. The lower surface of the inward protruding portion of the clamper 174 and the upper surface of the protrusion 164a of the presser ring 164 are tapered surfaces that are inclined in opposite directions along the rotation direction. At a plurality of locations (for example, 3 locations) along the circumferential direction of the presser ring 164, potts 164a projecting upward are provided. Accordingly, the presser ring 164 can be rotated by rotating a rotary pin (not shown) and pushing the potch 164a from the side.

  Thus, with the second holding member 158 opened, the substrate W is inserted into the center of the first holding member 154, the second holding member 158 is closed via the hinge 156, and the presser ring 164 is rotated clockwise. Then, the protrusion 164b of the presser ring 164 is slid into the inner projecting portion of the clamper 174, so that the first holding member 154 and the first holding member 154 are connected to each other via the tapered surfaces provided on the presser ring 164 and the clamper 174, respectively. 2 The holding member 158 is tightened and locked, and the press ring 164 is rotated counterclockwise to release the protrusion 164b of the press ring 164 from the reverse L-shaped clamper 174, thereby releasing the lock. ing. When the second holding member 158 is locked in this way, the lower end of the lower protrusion on the inner peripheral surface side of the substrate side sealing member 166 is placed on the outer peripheral portion of the surface of the substrate W held by the substrate holder 16. In 168, the lower end of the lower projecting portion on the outer peripheral side presses against the surface of the first holding member 154 and presses the seal members 166 and 168 uniformly to seal them.

  At the center of the first holding member 154, a protrusion 182 protrudes in a ring shape according to the size of the substrate W, and the surface abuts on the outer peripheral portion of the substrate W to form a support surface 180 that supports the substrate W. A recess 184 is provided at a predetermined position along the circumferential direction of the protrusion 182.

  As shown in FIG. 3, a plurality (12 in the figure) of conductors (electrical contacts) 186 respectively connected to a plurality of wires extending from external contacts provided on the hand 190 are disposed in the respective recesses 184. When the substrate W is placed on the support surface 180 of the first holding member 154, the end of the conductor 186 has a spring property on the surface of the first holding member 154 on the side of the substrate W. It is exposed to come into contact with the lower part of the electrical contact 188 shown in FIG.

  An electrical contact 188 electrically connected to the conductor 186 is fixed to the seal holder 162 of the second holding member 158 via a fastener 189 such as a bolt. This electrical contact 188 is formed in a leaf spring shape, and has a contact portion that is located outside the board-side sealing member 166 and protrudes inwardly in the shape of a leaf spring. When the substrate W is held by the first holding member 154 and the second holding member 158, the contact portion of the electrical contact 188 becomes the support surface 180 of the first holding member 154. It is comprised so that it may contact elastically with the outer peripheral surface of the board | substrate W supported on the top.

  The second holding member 158 is opened and closed by the weight of a cylinder (not shown) and the second holding member 158. That is, the first holding member 154 is provided with a through hole 154a, and the second holding member 158 is opened by pushing up the seal holder 162 of the second holding member 158 upward with a pressing rod through the through hole 154a. By contracting, the second holding member 158 is closed by its own weight.

At the end of the first holding member 1 54 of the substrate holder 16, or conveying the substrate holder 16, a pair of substantially T-shaped hand 1 90 serving as a supporting portion at the time of or lowering support hanging is connected Yes.

  In this example, the opening degree of the plating solution amount adjustment valve 52 and the water amount adjustment valve 58 is adjusted based on the free acid concentration analysis value of the free acid concentration analyzer 62, and flows along the plating solution dialysis line 48. Used in the plating process by controlling the amount of the plating solution Q that is supplied to the dialysis tank 42 and free acid is removed, and the flow rate of the water that flows along the water supply line 54 and is supplied to the dialysis tank 42. The free acid concentration of the plating solution Q is adjusted, for example, to be preferably 60 to 250 g / L.

  That is, the substrate 24 held by the substrate holder 16 is placed in a predetermined position in the plating tank 10 in a state where the pump 24 is driven and the plating solution Q in the plating tank 10 is circulated through the plating solution circulation line 32. Then, the insoluble anode 12 is connected to the anode of the plating power source 18, and a conductive layer such as a seed layer formed on the surface of the substrate W is connected to the cathode of the plating power source 18. At this time, the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 are closed.

  As described above, when the plating solution Q in the plating tank 10 is circulated through the plating solution circulation line 32, a part of the plating solution Q is extracted through the plating solution extraction pipe 66 and sent to the free acid concentration analyzer 62. In this free acid concentration analyzer 62, the free acid concentration analysis of the plating solution Q is performed several times a day, for example. This analysis result (free acid concentration analysis value) is input to the control unit 70.

  Based on the analysis result (free acid concentration analysis value) of the free acid concentration analyzer 62, the control unit 70 sets the free acid concentration of the plating solution Q used for the plating process to, for example, 60 to 250 g / L. Then, a signal is sent to the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 to adjust the opening degree of the plating solution amount adjusting valve 52 and the water amount adjusting valve 58. That is, the amount of the plating solution that is sent to the dialysis tank 42 through the plating solution dialysis line 48 to remove free acid (methanesulfonic acid), and the flow rate of water used to remove this free acid (methanesulfonic acid). Is controlled so that the free acid concentration of the plating solution Q used in the plating process is, for example, 60 to 250 g / L. The opening degree of the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 is adjusted each time the free acid concentration analysis of the plating solution Q is performed by the free acid concentration analyzer 62.

  Thus, based on the free acid concentration analysis value of the free acid concentration analyzer 62, the amount of the plating solution flowing along the plating solution dialysis line 48 having the dialysis tank 42 for removing the free acid from the plating solution is controlled. Thus, the plating treatment can be performed while adjusting the free acid concentration of the plating solution within a preferable range of 60 to 250 g / L, for example.

Here, the effective membrane area A (m ² ) of the anion exchange membrane 40 in the dialysis tank 42 is divided by the amount v (L / h) of the plating solution supplied to the dialysis tank 42 through the plating solution dialysis line 48. It is preferable to adjust the opening degree of the plating solution amount adjusting valve 52 so that the coefficient a (= A / v) is 0.3 to 0.7 (a = 0.3 to 0.7). The flow rate V (L / h) of water supplied into the dialysis tank 42 through the water supply line 54 is equal to the flow rate v (L / h) of the plating solution supplied into the dialysis tank 42 through the plating solution dialysis line 48. It is preferable to adjust the opening degree of the water amount adjustment valve 58 so as to be 30% to 100% (V / v = 0.3 to 1).

  Furthermore, in this example, the integrated value of the amount of electricity applied to the plating solution Q in the plating tank 10 is calculated by the control unit 70. Here, the amount of electricity applied to the plating solution Q is the current flowing from the anode of the plating power source 18 to the cathode of the plating power source 18 through the insoluble anode 12, the plating solution Q, and the conductive layer formed on the surface of the substrate W. The integrated value is, for example, the electricity applied to the plating solution Q between the time when the new plating solution Q is put in the plating tank 10 and the time when the plating solution Q is discarded. It is the total amount. Since the free acid of the plating solution Q is generated as the metal ions contained in the plating solution Q are consumed by plating, the integrated value of the amount of electricity applied to the plating solution Q should be used as a guide for increasing the free acid concentration. Can do. Therefore, the control unit 70 is based on the integrated value of the amount of electricity applied to the plating solution Q so that the free acid concentration of the plating solution Q used for the plating process is, for example, 60 to 250 g / L. Signals are sent to the amount adjusting valve 52 and the water amount adjusting valve 58 so that the opening degree of the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 can be adjusted. For example, when a predetermined amount of plating solution Q is used to replenish metal ions and the plating process is continuously performed, when the integrated value of the amount of electricity applied to the plating solution reaches a certain value, the plating solution amount adjustment valve 52 and the amount of water The adjustment valve 58 is opened to a certain degree of opening and dialysis is performed to remove free acid.

  Thus, based on the integrated value of the amount of electricity applied to the plating solution Q in the plating tank 10, the plating solution flowing along the plating solution dialysis line 48 having the dialysis tank 42 that removes free acid from the plating solution. By controlling the amount, the plating treatment can be performed while adjusting the free acid concentration of the plating solution within a preferable range of, for example, 60 to 250 g / L.

  In this example, the liberation of the plating solution Q used in the plating process based on at least one of the free acid concentration analysis value analyzed by the free acid concentration analyzer 62 and the integrated value of the amount of electricity applied to the plating solution Q. A signal is sent to the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 to adjust the opening degree of the plating solution amount adjusting valve 52 and the water amount adjusting valve 58 so that the acid concentration becomes, for example, 60 to 250 g / L. ing. The plating solution amount adjustment valve 52 and the water amount adjustment valve 58 may be controlled on the basis of the free acid concentration analysis value analyzed by the free acid concentration analyzer 62 and the integrated value of the amount of electricity applied to the plating solution Q.

  Further, instead of the plating solution amount adjusting valve 52 and the water amount adjusting valve 58, an on-off valve that is controlled on and off via a timer is used to constitute a plating solution amount adjusting mechanism and a water amount adjusting mechanism. The amount of the plating solution Q that flows along the plating solution dialysis line 48 and is supplied to the dialysis tank 42, and flows along the water supply line 54 to the dialysis tank 42. The flow rate of the supplied water may be controlled.

  FIG. 6 is a schematic view of a plating apparatus according to another embodiment of the present invention. In this example, the difference from the example shown in FIG. 1 is that an on-off valve 80 and a first tube pump 82 as a plating solution amount adjusting mechanism are installed in the plating solution dialysis line 48 instead of the plating solution amount adjusting valve 52. In the water supply line 54, an on-off valve 84 and a second tube pump 86 as a water liquid amount adjusting mechanism are installed in place of the water amount adjusting valve 58, and an on-off valve 80 and a first tube pump 82 as a plating liquid amount adjusting mechanism are installed. In addition, the control unit 70 controls the on-off valve 84 and the second tube pump 86 as a water / liquid amount adjusting mechanism.

  According to this example, the flow rate of the plating solution flowing along the plating solution dialysis line 48 is adjusted by controlling the first tube pump 82 with the control unit 70 while the on-off valve 80 is opened, and the on-off valve 84 is adjusted. By controlling the second tube pump 86 with the control unit 70 in a state where is opened, the flow rate of the water flowing along the water supply line 54 can be adjusted.

  FIG. 7 is a schematic view of a plating apparatus according to still another embodiment of the present invention. This example differs from the example shown in FIG. 6 in that the plating solution supply pipe 44 of the plating solution dialysis line 48 enters the bottom of the overflow tank 22 instead of connecting to the plating solution return pipe 34 of the plating solution circulation line 32. It is in the point. According to this example, a part of the plating solution Q that has flowed into the overflow tank 22 is supplied to the dialysis tank 42 through the plating solution dialysis line 48, and free acid is removed in the dialysis tank 42. 22 can be returned.

In order to confirm that the free acid (methanesulfonic acid) in the plating solution can be removed, DSV (effective membrane area 0.0172 m ² ) manufactured by AGC Engineering Co., Ltd. was used as an anion exchange membrane. The free acid removal test of the plating solution was performed in a dialysis tank alone incorporating nine anion exchange membranes. The supply flow rate of the plating solution to the dialysis tank was 2.9 ml / min, and the supply flow rate of pure water to the dialysis tank was 2.9 ml / min. Therefore, the coefficient a (= A / v) obtained by dividing the effective membrane area A (m ² ) of the anion exchange membrane of the dialysis tank by the volume v (L / h) of the plating solution supplied to the dialysis tank is At 0.9 (a = A / v = 0.9), the flow rate V (L / h) of water supplied to the dialysis tank is equal to the flow rate v (L / h) of the plating solution supplied to the dialysis tank. 100% (V / v = 1).

  As a result, the plating solution having a free acid concentration of 242 g / L before dialysis became a plating solution having a free acid concentration of 45 g / L after dialysis. This confirmed that the free acid could be removed from the plating solution. However, the plating solution after dialysis was so cloudy that it was not suitable for plating treatment. Therefore, a plating solution having a free acid concentration of less than 60 g / L is not suitable for the plating treatment, and the plating solution has a free acid concentration of 60 g / L or more, preferably 80 g / L or more.

Next, using a dialysis tank with a reduced area of the anion exchange membrane, that is, using DSV (effective membrane area 0.0172 m ² ) manufactured by AGC Engineering Co., Ltd. as an anion exchange membrane, The free acid removal test of the plating solution was performed in a dialysis tank alone incorporating five exchange membranes. The supply flow rate of the plating solution to the dialysis tank was 2.9 ml / min, and the supply flow rate of pure water to the dialysis tank was 1.7 ml / min. Therefore, the coefficient a (= A / v) obtained by dividing the effective membrane area A (m ² ) of the anion exchange membrane of the dialysis tank by the volume v (L / h) of the plating solution supplied to the dialysis tank is At 0.45 (a = A / v = 0.45), the flow rate V (L / h) of water supplied to the dialysis tank is equal to the flow rate v (L / h) of the plating solution supplied to the dialysis tank. 59% (V / v = 0.59).

  As a result, the plating solution having a free acid concentration of 256 g / L before dialysis became a plating solution having a free acid concentration of 115 g / L after dialysis.

Furthermore, the supply flow rate of the plating solution to the dialysis tank incorporating five anion exchange membranes was kept at 2.9 ml / min, and the supply flow rate of pure water to the dialysis tank was changed from 1.7 ml / min to 1.23 ml / min. It changed to min and the free acid removal test of the plating solution was done. Therefore, the coefficient a (= A / v) obtained by dividing the effective membrane area A (m ² ) of the anion exchange membrane of the dialysis tank by the volume v (L / h) of the plating solution supplied to the dialysis tank is At 0.45 (a = A / v = 0.45), the flow rate V (L / h) of water supplied to the dialysis tank is equal to the flow rate v (L / h) of the plating solution supplied to the dialysis tank. 42% (V / v = 0.42).

  As a result, the plating solution having a free acid concentration of 256 g / L before dialysis became a plating solution having a free acid concentration of 150 g / L after dialysis. Thereby, it turns out that the removal effect of a free acid reduces by reducing the flow volume of the water supplied to a dialysis tank.

  Next, in order to investigate the effect of the free acid concentration of the plating solution on the plating film formed on the substrate surface, an electric quantity of 8.7 Ah / L per day was applied to the plating solution in the single tank plating tank (capacity 28 L). Then, while performing the dialysis treatment (free acid removal treatment) of the plating solution in the dialysis tank, when the plating film serving as the bump is formed on the surface of the substrate, the dialysis treatment (free acid removal treatment) of the plating solution is performed. Without change, the change in the free acid concentration of the plating solution accompanying the change (increase) in the integrated value of the amount of electricity when the plating film that forms the bump is formed on the surface of the substrate, the height of the bump formed on the substrate surface A test was conducted to confirm the change in uniformity (uniformity in the substrate surface) of the entire surface of the substrate (film thickness of the plating film).

As a dialysis tank, a dialysis tank incorporating 19 anion exchange membranes made of DSV (effective membrane area 0.0172 m ² ) manufactured by AGC Engineering Co., Ltd. was used. The plating solution flow rate and water flow rate were controlled by tube pumps so that the plating solution with a flow rate of 9 to 10 ml / min and water with a flow rate of 6 to 7 ml / min were sent to the dialysis tank. Therefore, the coefficient a (= A / v) obtained by dividing the effective membrane area A (m ² ) of the anion exchange membrane of the dialysis tank by the volume v (L / h) of the plating solution supplied to the dialysis tank is The flow rate V (L / h) of the water supplied to the dialysis tank at 0.5 to 0.6 (a = A / v = 0.5 to 0.6) is that of the plating solution supplied to the dialysis tank. It is 60 to 80% of the flow rate v (L / h) (V / v = 0.6 to 0.8).

  When performing dialysis treatment (free acid removal treatment) of the plating solution in a dialysis tank, the dialysis treatment of the plating solution was started when the integrated value of the amount of electricity applied to the plating solution exceeded 20 Ah / L. Since the free acid concentration of the solution is likely to exceed 200 g / L, when the integrated value of the amount of electricity applied to the plating solution reaches 59 Ah / L, plating is performed without applying current to the plating solution in the plating tank. The solution was dialyzed for one day to reduce the free acid concentration of the plating solution.

  FIG. 8 shows the integrated value (Ah / L) and free acid concentration (g / L) of the amount of electricity applied to the plating solution, when the dialysis treatment of the plating solution was performed and when it was not performed. ). FIG. 9 shows the integrated value (Ah / L) of the amount of electricity applied to the plating solution and the height of the bump (plating film) when the dialysis treatment of the plating solution was performed and when it was not performed. (Film thickness) of substrate in-plane uniformity (%).

  From FIG. 8 and FIG. 9, by performing dialysis treatment (free acid removal treatment) of the plating solution, the free acid concentration of the plating solution is suppressed to 200 g / L or less so that the in-plane uniformity becomes 10% or less. However, if the plating solution is not dialyzed (free acid removal treatment), the free acid concentration of the plating solution exceeds 250 g / L as the integrated value of the amount of electricity applied to the plating solution increases. It can be seen that the in-plane uniformity is 10% or more.

  Here, the in-plane uniformity of the substrate is generally required to be within 10%. From FIG. 8 and FIG. 9, by setting the free acid concentration of the plating solution to 250 g / L or less, preferably 200 g / L or less, more preferably 170 g / L or less, the in-plane uniformity can be suppressed to within 10%. I understand that. Therefore, in each of the above-described plating apparatuses, it is preferable to control the free acid concentration of the plating solution to 250 g / L, preferably 200 g / L or less, more preferably 170 g / L or less. In order to prevent the plating solution from becoming cloudy to the extent that it is not suitable, it is preferable to control the free acid concentration of the plating solution to 60 g / L or more, preferably 80 g / L or more.

  FIG. 10 shows the increase in the integrated value (Ah / L) of the amount of electricity applied to the plating solution and the change in the cross-sectional shape of the bump (plating film) when the dialysis treatment of the plating solution obtained by the above experiment is performed. Is shown schematically. 10A shows the cross-sectional shape of the bump (plating film) when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 0 Ah / L, and FIG. 10B shows the plating solution. FIG. 10C shows the cross-sectional shape of the bump (plating film) when the integrated value (Ah / L) of the electricity applied to the electrode is 20 Ah / L, and FIG. 10C shows the integrated value (Ah / L) of the electricity applied to the plating solution. L) shows the cross-sectional shape of the bump (plating film) when 40 Ah / L, and FIG. 10D shows the bump when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 59 Ah / L ( FIG. 10E shows the cross-sectional shape of the bump (plating film) when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 80 Ah / L. f) Bump (plating film) when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 130 Ah / L Respectively schematically illustrates a cross-sectional shape.

  From FIG. 10, it can be seen that the appearance of the bump (plating film) is normal until the integrated value of the amount of electricity applied to the plating solution is up to 80 Ah / L. When the integrated value of the amount of electricity applied to the plating solution reaches 130 Ah / L, the crystal grains become coarse, and this appears in the appearance of the bump (plating film), so the surface of the bump (plating film) is considered to be somewhat rough. It is done.

  FIG. 11 shows an increase in the integrated value (Ah / L) of the amount of electricity applied to the plating solution and the cross-sectional shape of the bump (plating film) obtained when the dialysis treatment of the plating solution was not performed. The change is shown schematically. That is, FIG. 11A shows the cross-sectional shape of the bump (plating film) when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 0 Ah / L, and FIG. 11B shows the plating solution. FIG. 11C shows the cross-sectional shape of the bump (plating film) when the integrated value (Ah / L) of the amount of electricity applied to A is 19 Ah / L. FIG. 11 (c) shows the integrated value (Ah / L) of the amount of electricity applied to the plating solution. L) shows the cross-sectional shape of the bump (plating film) when 59 Ah / L, and FIG. 11D shows the bump when the integrated value (Ah / L) of the amount of electricity applied to the plating solution is 100 Ah / L ( Each of the cross-sectional shapes of the plating film is schematically shown.

  From FIG. 11, when the integrated value of the amount of electricity applied to the plating solution reaches 59 Ah / L, the surface of the bump (plating film) becomes rough, and when the integrated value of the amount of electricity applied to the plating solution reaches 100 Ah / L, It can be seen that the surface of the bump (plating film) is considerably roughened. Thus, it is thought that the surface of the bump (plating film) is rough because the Ag in the film decreases as the free acid concentration increases.

FIG. 12 shows the effective membrane area A of the anion exchange membrane when the dialysis treatment (free acid removal treatment) of the plating solution is carried out in a dialysis tank incorporating 19 of the above anion exchange membranes. is a graph showing the relationship between the (m ²⁾ coefficient obtained by dividing the liquid volume v of the plating solution supplied to the dialysis tank (L / h) a (= a / v) and the free acid removal rate. The flow rate of water supplied to the dialysis tank at this time is 6.3 ml / min.

From FIG. 12, it can be seen that the free acid removal rate can be adjusted to an appropriate value of about 30 to 65% by controlling the coefficient a (= A / v) to be 0.3 to 0.7. This also applies to each of the above-described plating apparatuses. As described above, the effective membrane area A (m ² ) of the anion exchange membrane 40 of the dialysis tank 42 is converted into the dialysis tank 42 through the plating solution dialysis line 48. So that the coefficient a (= A / v) divided by the liquid volume v (L / h) of the plating solution supplied to 0.3 to 0.7 (a = 0.3 to 0.7) The free acid removal rate can be adjusted to an appropriate value of about 30 to 65% by adjusting the opening degree of the plating solution amount adjusting valve 52.

  FIGS. 13 and 14 show the flow rate V (L of water supplied to the dialysis tank when the dialysis process (free acid removal process) of the plating solution using a dialysis tank incorporating 19 of the anion exchange membranes is performed. / H) is a graph showing the relationship between the ratio (V / v) of the flow rate v (L / h) of the plating solution supplied to the dialysis tank and the free acid removal rate. In FIG. 13, the flow rate of the water supplied to the dialysis tank is constant at 6.3 ml / min, and the flow rate of the plating solution supplied to the dialysis tank is changed. In FIG. 14, the flow rate of the water supplied to the dialysis tank is changed with the plating solution flow rate supplied to the dialysis tank being constant at 10.3 ml / min.

  From FIG. 13 and FIG. 14, it is understood that the free acid removal rate can be adjusted to an appropriate value of about 30 to 65% by controlling the ratio (= V / v) to be 0.3 to 1. This also applies to each of the above-described plating apparatuses. As described above, the flow rate V (L / h) of water supplied into the dialysis tank 42 through the water supply line 54 passes through the plating solution dialysis line 48. The opening degree of the water amount adjustment valve 58 is adjusted so that the flow rate v (L / h) of the plating solution supplied into the dialysis tank 42 is 30% to 100% (V / v = 0.3 to 1). Thus, the free acid removal rate can be adjusted to an appropriate value of about 30 to 65%.

  Although one embodiment of the present invention has been described so far, it is needless to say that the present invention is not limited to the above-described embodiment, and may be implemented in various forms within the scope of the technical idea.

DESCRIPTION OF SYMBOLS 10 Plating tank 12 Insoluble anode 20 Inner tank 22 Overflow tank 32 Plating solution circulation line 34 Plating solution return pipe 40 Anion exchange membrane 42 Dialysis tank 44 Plating solution supply pipe 46 Plating solution discharge pipe 48 Plating solution dialysis line 52 Plating solution amount adjustment Valve 54 Water supply line 58 Water amount adjustment valve 62 Free acid concentration analyzer 64 Plating solution analysis line 66 Plating solution extraction pipe 70 Control units 80, 84 On-off valves 82, 86 First tube pump

Claims (11)

In a plating apparatus for forming a Sn alloy plating film on the surface of a substrate,
A plating bath in which an insoluble anode and a substrate are immersed in a plating solution held inside the substrate, facing each other;
A plating solution dialysis line for drawing and recirculating the plating solution in the plating tank back to the plating tank;
A dialysis tank that is installed in the plating solution dialysis line and removes free acid from the plating solution by dialysis using an anion exchange membrane;
A free acid concentration analyzer connected to the plating tank to measure the free acid concentration in the plating solution;
A plating apparatus comprising: a control unit that controls the amount of a plating solution flowing along the plating solution dialysis line based on a free acid concentration analysis value of the free acid concentration analyzer. In a plating apparatus for forming a Sn alloy plating film on the surface of a substrate,
A plating bath in which an insoluble anode and a substrate are immersed in a plating solution held inside the substrate, facing each other;
A plating solution dialysis line for drawing and recirculating the plating solution in the plating tank back to the plating tank;
A dialysis tank that is installed in the plating solution dialysis line and removes free acid from the plating solution by dialysis using an anion exchange membrane;
A plating apparatus comprising: a control unit that controls the amount of the plating solution flowing along the plating solution dialysis line based on an integrated value of the amount of electricity applied to the plating solution in the plating tank. A plating solution circulation line that draws the plating solution in the plating tank during the plating process and circulates it back to the plating tank,
The plating apparatus according to claim 1, wherein the plating solution dialysis line is connected to the plating solution circulation line.   The said control part controls the flow volume of the plating solution which flows along the said plating solution dialysis line so that the free acid density | concentration of a plating solution may be 60-250 g / L. The plating apparatus according to claim 1. A plating solution amount adjusting mechanism is provided between the plating tank and the dialysis tank of the plating solution dialysis line, and the control unit has an effective membrane area in units of m ² of the anion exchange membrane of the dialysis tank. 5. The plating solution amount adjusting mechanism is controlled so that a coefficient divided by a plating solution flow rate indicated by L / h is 0.3 to 0.7. The plating apparatus as described in the item.   The dialysis tank is connected to a water supply line having a water amount adjusting mechanism installed therein, and the control unit has a flow rate range of water supplied into the dialysis tank through the water supply line through the plating solution dialysis line. The plating apparatus according to claim 5, wherein the water amount adjusting mechanism is controlled so as to be 30% to 100% of a flow rate range of the plating solution supplied into the dialysis tank. A voltage is applied between the insoluble anode immersed in the plating solution facing each other and the substrate surface to form a plating film made of Sn alloy on the surface,
Measure the free acid concentration in the plating solution in the plating tank with a free acid concentration analyzer,
While controlling the flow rate of the plating solution flowing along the plating solution dialysis line that draws and circulates the plating solution in the plating tank back to the plating tank based on the free acid concentration analysis value of the free acid concentration analyzer, dialysis A plating solution management method, wherein free acid is removed from a plating solution flowing along the plating solution dialysis line by dialysis using an anion exchange membrane of a tank. A voltage is applied between the insoluble anode immersed in the plating solution facing each other and the substrate surface to form a plating film made of Sn alloy on the surface,
Based on the integrated value of the amount of electricity applied to the plating solution in the plating tank, while controlling the flow rate of the plating solution flowing along the plating solution dialysis line that draws the plating solution in the plating tank back to the plating tank and circulates it A plating solution management method comprising removing free acid from a plating solution flowing along the plating solution dialysis line by dialysis using an anion exchange membrane in a dialysis tank.   The plating solution management method according to claim 7 or 8, wherein a flow rate of the plating solution flowing along the plating solution dialysis line is controlled so that a free acid concentration of the plating solution is 60 to 250 g / L. . A plating solution amount adjusting mechanism is provided between the plating tank and the dialysis tank of the plating solution dialysis line, and the effective membrane area in units of m ² of the anion exchange membrane of the dialysis tank is indicated by the unit L / h. The plating solution according to any one of claims 7 to 9, wherein the plating solution amount adjusting mechanism is controlled so that a coefficient divided by a flow rate of the plating solution is 0.3 to 0.7. Liquid management method.   The dialysis tank is connected to a water supply line having a water amount adjusting mechanism therein, and a flow range of water supplied into the dialysis tank through the water supply line is supplied into the dialysis tank through the plating solution dialysis line. The plating solution management method according to claim 10, wherein the water amount adjusting mechanism is controlled so as to be 30% to 100% of a flow rate range of the plating solution.

Images