JP5874271B2 - 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 - Google Patents
波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 Download PDFInfo
- Publication number
- JP5874271B2 JP5874271B2 JP2011210326A JP2011210326A JP5874271B2 JP 5874271 B2 JP5874271 B2 JP 5874271B2 JP 2011210326 A JP2011210326 A JP 2011210326A JP 2011210326 A JP2011210326 A JP 2011210326A JP 5874271 B2 JP5874271 B2 JP 5874271B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electrode
- reflective film
- gap
- facing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 74
- 239000000758 substrate Substances 0.000 claims description 361
- 238000001514 detection method Methods 0.000 claims description 38
- 230000008859 change Effects 0.000 claims description 13
- 238000000605 extraction Methods 0.000 description 34
- 239000007789 gas Substances 0.000 description 34
- 230000002093 peripheral effect Effects 0.000 description 28
- 238000012545 processing Methods 0.000 description 27
- 239000011521 glass Substances 0.000 description 18
- 239000000126 substance Substances 0.000 description 18
- 238000007689 inspection Methods 0.000 description 17
- 238000003384 imaging method Methods 0.000 description 15
- 238000005259 measurement Methods 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 239000000306 component Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 8
- 238000001069 Raman spectroscopy Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 239000010410 layer Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910001316 Ag alloy Inorganic materials 0.000 description 5
- 238000013459 approach Methods 0.000 description 5
- 238000005304 joining Methods 0.000 description 5
- 230000003595 spectral effect Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 238000004186 food analysis Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 235000012041 food component Nutrition 0.000 description 3
- 239000005428 food component Substances 0.000 description 3
- 229910052500 inorganic mineral Inorganic materials 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000011707 mineral Substances 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000008280 blood Substances 0.000 description 2
- 210000004369 blood Anatomy 0.000 description 2
- 210000001124 body fluid Anatomy 0.000 description 2
- 239000010839 body fluid Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000004497 NIR spectroscopy Methods 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000012491 analyte Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000004204 blood vessel Anatomy 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 150000001720 carbohydrates Chemical class 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013075 data extraction Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 210000000554 iris Anatomy 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 239000005355 lead glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 210000001525 retina Anatomy 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Landscapes
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Filters (AREA)
- Spectrometry And Color Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210326A JP5874271B2 (ja) | 2011-09-27 | 2011-09-27 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011210326A JP5874271B2 (ja) | 2011-09-27 | 2011-09-27 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013072930A JP2013072930A (ja) | 2013-04-22 |
| JP2013072930A5 JP2013072930A5 (enExample) | 2014-10-23 |
| JP5874271B2 true JP5874271B2 (ja) | 2016-03-02 |
Family
ID=48477501
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011210326A Expired - Fee Related JP5874271B2 (ja) | 2011-09-27 | 2011-09-27 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5874271B2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105704267A (zh) * | 2016-01-27 | 2016-06-22 | 广东欧珀移动通信有限公司 | 移动终端 |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013238755A (ja) | 2012-05-16 | 2013-11-28 | Seiko Epson Corp | 光学モジュール、電子機器、食物分析装置、分光カメラ、及び波長可変干渉フィルターの駆動方法 |
| JP6107186B2 (ja) | 2013-02-05 | 2017-04-05 | セイコーエプソン株式会社 | 光学モジュール、電子機器、及び分光カメラ |
| JP2015066611A (ja) | 2013-09-27 | 2015-04-13 | セイコーエプソン株式会社 | アクチュエーターの駆動システム、光学モジュール及び電子機器 |
| JP6264838B2 (ja) * | 2013-10-29 | 2018-01-24 | セイコーエプソン株式会社 | 光学素子 |
| JP6543884B2 (ja) | 2014-01-27 | 2019-07-17 | セイコーエプソン株式会社 | アクチュエーター制御装置、光学モジュール、電子機器、及びアクチュエーター制御方法 |
| JP6413325B2 (ja) | 2014-05-01 | 2018-10-31 | セイコーエプソン株式会社 | アクチュエーター装置、電子機器、及び制御方法 |
| WO2018124814A1 (ko) * | 2017-01-02 | 2018-07-05 | 엘지이노텍(주) | 광 감지 소자 및 입자 센싱 장치 |
| KR102791866B1 (ko) * | 2017-02-28 | 2025-04-07 | 엘지이노텍 주식회사 | 광 감지 소자 및 입자 센싱 장치 |
| JP7351610B2 (ja) | 2018-10-30 | 2023-09-27 | 浜松ホトニクス株式会社 | 光検出装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001221913A (ja) * | 2000-02-08 | 2001-08-17 | Yokogawa Electric Corp | ファブリペローフィルタ及び赤外線ガス分析計 |
| JP2003233016A (ja) * | 2002-02-12 | 2003-08-22 | Dainippon Printing Co Ltd | 表示部フィルム部材及びその製造方法 |
| US7734131B2 (en) * | 2006-04-18 | 2010-06-08 | Xerox Corporation | Fabry-Perot tunable filter using a bonded pair of transparent substrates |
| JP2008233878A (ja) * | 2007-02-20 | 2008-10-02 | Hoya Corp | 防塵性反射鏡及びそれを具備する光学系装置 |
| JP5370246B2 (ja) * | 2009-05-27 | 2013-12-18 | セイコーエプソン株式会社 | 光フィルター、光フィルター装置、分析機器、および光フィルターの製造方法 |
-
2011
- 2011-09-27 JP JP2011210326A patent/JP5874271B2/ja not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105704267A (zh) * | 2016-01-27 | 2016-06-22 | 广东欧珀移动通信有限公司 | 移动终端 |
| CN105704267B (zh) * | 2016-01-27 | 2019-03-29 | Oppo广东移动通信有限公司 | 移动终端 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013072930A (ja) | 2013-04-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5874271B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP6136356B2 (ja) | 測定装置 | |
| JP6019863B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、および電子機器、並びに波長可変干渉フィルターの製造方法 | |
| JP6182918B2 (ja) | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5786424B2 (ja) | 波長可変干渉フィルター、光モジュール、及び電子機器 | |
| JP6264810B2 (ja) | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP6098197B2 (ja) | 光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP6107254B2 (ja) | 光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP6119090B2 (ja) | 光学フィルターデバイス、光学モジュール、及び電子機器 | |
| CN102540312B (zh) | 波长可变干涉滤波器、光学组件以及电子设备 | |
| JP6003168B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5834718B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| CN103969727B (zh) | 光学模块以及电子设备 | |
| JP2015106107A (ja) | 波長可変干渉フィルター、光学モジュール、および電子機器 | |
| JP5987618B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP6024086B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの製造方法 | |
| JP2014164068A (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、および電子機器 | |
| JP2013113900A (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5888002B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP2014182323A (ja) | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5884393B2 (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5747623B2 (ja) | 波長可変干渉フィルター、光モジュール、及び電子機器 | |
| JP5790116B2 (ja) | 波長可変干渉フィルター、光モジュール、及び電子機器 | |
| JP2014013339A (ja) | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 | |
| JP5958620B2 (ja) | 波長可変干渉フィルター、光モジュール、及び電子機器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140909 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140909 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20150107 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150422 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150512 |
|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150708 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20151222 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20160104 |
|
| R150 | Certificate of patent or registration of utility model |
Ref document number: 5874271 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |