JP5874271B2 - Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus - Google Patents

Description

  The present invention relates to a wavelength tunable interference filter, an optical filter device, an optical module, and an electronic apparatus.

  2. Description of the Related Art Conventionally, there has been known a wavelength variable interference filter in which reflection films are arranged on opposite surfaces of a pair of substrates with a predetermined gap therebetween (see, for example, Patent Document 1).

  In the tunable interference filter described in Patent Document 1, a semi-transmissive film (reflective film) and an electrode are provided on surfaces of two substrates facing each other. In addition, a deformable diaphragm is provided on one of these substrates, and the distance between the semipermeable membranes can be changed by applying a voltage between the electrodes.

JP 2000-162516 A

  By the way, in the wavelength tunable interference filter as in the above-mentioned Patent Document 1, when the semi-transmissive film is charged due to adhesion of a charged substance existing in the air to the semi-transmissive film or the influence of electromagnetic waves, the Coulomb force is generated between the semi-transmissive films. Acts, which makes it difficult to control the distance between the semipermeable membranes.

  In view of the above problems, an object of the present invention is to provide a variable wavelength interference filter, an optical filter device, an optical module, and an electronic apparatus that can prevent charging of a reflective film.

The wavelength tunable interference filter of one aspect of the present invention is provided on the first substrate, the second substrate facing the first substrate, the first reflective film provided on the first substrate, and the second substrate. A second reflective film facing the first reflective film via a gap between the reflective films, a gap changing unit for changing the gap between the reflective films, and a first electrode provided on the first substrate. The first electrode includes an optical interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. The first reflective film is provided on the first substrate via the first electrode, the second reflective film is electrically connected to the first electrode, and the second substrate. In the plan view of the second substrate viewed from the thickness direction of the substrate, the light drying is performed. A driving electrode is disposed outside the region, and the first electrode further has a driving electrode facing the optical interference region and the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction. And the gap changing portion includes the driving electrode and the first electrode provided in the driving electrode opposing region.
The wavelength variable interference filter according to the present invention is provided on the first substrate, the second substrate facing the first substrate, the first reflective film provided on the first substrate, and the second substrate. A second reflective film facing the first reflective film via a gap between the reflective films, a gap changing unit for changing the gap between the reflective films, a first electrode provided on the first substrate and grounded The first electrode is a light in which the first reflective film and the second reflective film are opposed to each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided to cover the interference region, the first reflective film is provided on the first substrate via the first electrode, and the second reflective film is electrically connected to the first electrode It is characterized by.

In the present invention, the first reflective film is formed by being laminated on the grounded first electrode. The second reflective film provided on the second substrate is also connected to the first electrode. Thereby, an electric charge is not hold | maintained at a 1st reflective film and a 2nd reflective film, and the approach of the charged substance to a 1st reflective film or a 2nd reflective film can also be suppressed.
Furthermore, the first reflective film and the second reflective film are electrically connected via the first electrode and maintained at the same potential. For this reason, even when a charged substance adheres to the first reflective film and the second reflective film, the Coulomb force does not act on the gap between the reflective films, and the fluctuation of the gap between the reflective films due to the Coulomb force is prevented. it can. Thereby, when changing the gap between reflection films by a gap change part, the influence of Coulomb force can be excluded and adjustment of the gap between reflection films with high precision can be performed.
Furthermore, since the grounded first electrode is formed so as to cover the region where the first reflective film is provided, the first electrode functions as a shield against electromagnetic waves even when receiving electromagnetic waves from the outside. That is, it is possible to prevent the first reflection film due to electromagnetic waves from being charged or magnetized, and to prevent fluctuations in the gap between the reflection films.
As described above, in the wavelength tunable interference filter of the present invention, charging in the first reflective film and the second reflective film can be prevented, and when the light is dispersed by the wavelength tunable interference filter, the gap between the reflective films is set to a desired setting value. Since it can be set easily and the influence of electromagnetic waves or the like can be excluded, the gap between the reflective films can be maintained well.

  In the wavelength tunable interference filter according to the aspect of the invention, the second substrate is provided with a second electrode at a position overlapping the optical interference region in a plan view of the second substrate viewed from the substrate thickness direction. It is preferable that the film is provided on the second substrate via the second electrode, and the first electrode is electrically connected to the second electrode.

In the present invention, the second reflective film is provided on the second substrate via the second electrode, and the second electrode is electrically connected to the first electrode and grounded.
In such a configuration, even when an electromagnetic wave enters from the second substrate side, it is possible to prevent the second reflective film from being charged or magnetized due to the influence of the electromagnetic wave. For this reason, generation | occurrence | production of the Coulomb force between a 1st reflective film and a 2nd reflective film can be prevented more reliably. Thereby, adjustment of the gap between reflective films by a gap change part can be implemented more accurately.

  In the wavelength tunable interference filter according to the aspect of the invention, the first substrate is a fixed substrate that does not change in shape, and the second substrate holds the movable portion provided with the second reflective film and the movable portion. A movable substrate, wherein the movable portion is movable relative to the first substrate by a shape change of the retaining portion, and the gap changing unit is configured to move the movable portion relative to the first substrate. It is preferable that the gap between the reflective films is changed by moving it back and forth.

In the present invention, when the gap between the reflective films is changed by the gap changing portion, the shape change does not occur in the first substrate which is a fixed substrate. On the other hand, in the second substrate which is a fixed substrate, the movable portion is displaced and the gap between the reflection films is changed by the shape of the holding portion being bent and bending.
Such a second substrate is formed in a shape that is easily deformed, for example, by reducing the thickness dimension. For this reason, if a film member such as an electrode is provided over a wide area on the second substrate, the film may be bent due to the film stress. In this case, the second reflective film may be bent.
On the other hand, in the present invention, since the first electrode is provided on the first substrate having no shape change, the first substrate is not bent by the first electrode, and the first reflective film is bent. There is nothing. Therefore, the first reflective film and the second reflective film can be maintained in parallel, and a decrease in resolution in the wavelength variable interference filter can be prevented.

In the wavelength tunable interference filter according to the aspect of the invention, it is preferable that the first electrode has translucency.
Here, translucency refers to transmitting light in a target wavelength range desired to be extracted by optical interference of a wavelength variable interference filter. For example, when the target wavelength range is the visible light range, the first electrode only needs to be able to transmit visible light.
As the wavelength variable interference filter, the light incident from the first substrate or the second substrate is subjected to multiple interference between the first reflective film and the second reflective film, and then the light extracted by the multiple interference is transferred to the opposite substrate side. There are a transmission type that transmits light and a reflection type that reflects light extracted by multiple interference in the direction in which the light is incident. Here, when the first electrode is non-translucent, it can be used only for the latter reflection type. On the other hand, in the present invention, since the first electrode has translucency, the wavelength variable interference filter can be adapted to both the transmission type and the reflection type, and the use can be expanded.

  In the wavelength tunable interference filter of the present invention, the second substrate includes a driving electrode outside the optical interference region in a plan view when the second substrate is viewed from the substrate thickness direction. In the plan view of the first substrate viewed from the substrate thickness direction, the first substrate is provided so as to cover from the light interference region to the driving electrode facing region facing the driving electrode, and the gap changing portion is provided on the driving electrode. And the driving electrode facing region of the first electrode.

  In the present invention, the gap changing unit can be driven as an electrostatic actuator. That is, the gap changing unit is configured by the driving electrode and the first electrode, and by applying a voltage between them, an electrostatic attraction is generated, and the gap between the reflective films is set to a predetermined value corresponding to the magnitude of the voltage. Change. Here, since the first electrode is grounded, the potential difference between the driving electrode and the first electrode can be increased only by setting the potential of the driving electrode to a potential corresponding to the desired gap between the reflective films. Therefore, the control of the gap between the reflection films is facilitated.

In the variable wavelength interference filter according to the aspect of the invention, it is preferable that the driving electrode includes an inner driving electrode and an outer driving electrode provided at a position farther from the optical interference region than the inner driving electrode. .
In the present invention, the above-described driving electrode includes an inner driving electrode and an outer driving electrode with the optical interference region as the center. In such a configuration, the potentials of the inner driving electrode and the outer driving electrode can be set to different values. For this reason, the gap between the reflective films can be minutely changed with high accuracy, and the light of the target wavelength desired to be extracted with the variable wavelength interference filter can be extracted with high accuracy.

In the wavelength tunable interference filter according to the aspect of the invention, it is preferable that the dimension of the interelectrode gap between the driving electrode and the driving electrode facing region of the first electrode is larger than the dimension of the gap between the reflection films.
In the present invention, the gap between the electrodes is larger than the gap between the reflective films. In such a configuration, the gap between the reflection films can be changed in a larger fluctuation range, and the wavelength range that can be extracted by the wavelength variable interference filter can be widened.
In general, the electrostatic attractive force acting between the electrodes is inversely proportional to the square of the distance. Therefore, if the gap between the electrodes becomes small, it becomes difficult to control the electrostatic attractive force, and it is difficult to adjust the gap between the reflective films. On the other hand, in the present invention, the gap between the electrodes is formed larger than the gap between the reflective films, so that the electrostatic attractive force can be easily controlled, and the gap between the reflective films can be accurately set to a desired value. it can.

  In the variable wavelength interference filter according to the aspect of the invention, the first electrode includes an inner driving electrode facing region facing the inner driving electrode and an outer driving electrode facing region facing the outer driving electrode, The dimension of the gap between the outer electrodes between the outer driving electrode and the outer driving electrode facing area is smaller than the dimension of the inner electrode gap between the inner driving electrode and the inner driving electrode facing area. And it is preferable that it is larger than the dimension of the gap between the reflection films.

In the present invention, a relationship of “a gap between reflection films” <“a gap between outer electrodes” <“a gap between inner electrodes” is established between the first substrate and the second substrate.
This is because, when changing the gap between the reflective films, the ease of bending changes depending on the position of the substrate. For example, the optical interference region is located at the center of the first substrate and the second substrate, and the outer periphery of the first substrate and the second substrate is joined to each other. In order to bend the second substrate, the farther from the center of the second substrate and the closer to the bonding portion, the greater the force required to bend the second substrate. On the other hand, in the present invention, the gap dimension of the outer interelectrode gap that is far from the optical interference region is formed smaller than the inner interelectrode gap. Therefore, in the gap between the outer electrodes, when a voltage is applied between the outer driving electrode and the first electrode, for example, compared with a case where the same voltage is applied between the inner driving electrode and the first electrode, a larger static voltage is applied. An electric attractive force can be applied. As a result, it is possible to change the gap between the reflection films with a smaller voltage, and it is possible to save power in the wavelength variable interference filter.

An optical filter device according to an aspect of the present invention includes a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, and provided on the second substrate, A second reflective film facing the reflective film via the gap between the reflective films, a gap changing unit for changing the gap between the reflective films, and a wavelength tunable interference filter including a first electrode provided on the first substrate; A housing for housing the wavelength tunable interference filter, and the first electrode includes the first reflective film and the first substrate in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Two reflective films are provided in a region including a light interference region provided to face each other, the first reflective film is provided on the first substrate via the first electrode, and the second reflective film is Electrically connected to the first electrode; The substrate has a driving electrode disposed outside the light interference region in a plan view of the second substrate viewed from the substrate thickness direction, and the first electrode further includes the first substrate in the substrate thickness direction. In plan view as viewed from above, provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode, and the gap changing portion includes the driving electrode and the driving electrode. It includes the first electrode provided in the facing region.
The optical filter device according to the present invention includes a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, provided on the second substrate, A second reflective film facing the reflective film via the gap between the reflective films, a gap changing unit for changing the gap between the reflective films, and a wavelength variable provided with the grounded first electrode provided on the first substrate An interference filter; and a housing that houses the wavelength tunable interference filter, wherein the first electrode includes the first reflective film in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. And the second reflective film is provided so as to cover an optical interference region provided facing each other, and the first reflective film is provided on the first substrate via the first electrode, and the second reflective film Is electrically connected to the first electrode It is characterized in.

In the present invention, like the above-described invention, the first reflective film is formed by being laminated on the grounded first electrode, and the second reflective film provided on the second substrate is also connected to the first electrode. Has been. Thereby, an electric charge is not hold | maintained at a 1st reflective film and a 2nd reflective film, and the approach of the charged substance to a 1st reflective film or a 2nd reflective film can also be suppressed. In addition, since the first reflective film and the second reflective film are maintained at the same potential, even when a charged substance adheres to the first reflective film and the second reflective film, the Coulomb force acts on the gap between the reflective films. Therefore, fluctuations in the gap between the reflective films can be prevented. Further, since the grounded first electrode is formed so as to cover the region where the first reflective film is provided, a shielding effect against electromagnetic waves from the outside can be obtained, for example, when driving a wavelength variable interference filter, Inconveniences such as fluctuation of the gap between the reflecting films due to the influence of electromagnetic waves can also be avoided.
In addition, since the wavelength tunable interference filter is housed in the casing, it is difficult for an external impact to be transmitted to the wavelength tunable interference filter, and damage can be prevented.

An optical module according to an aspect of the present invention includes a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, and the second substrate. A second reflective film opposed to the first reflective film via a gap between the reflective films, a gap changing section for changing the gap between the reflective films, a first electrode provided on the first substrate, and the first reflective film And a detection unit that detects light extracted by the film and the second reflective film, and the first electrode includes the first substrate and the second substrate in a plan view when viewed from the substrate thickness direction. One reflective film and the second reflective film are provided in a region including a light interference region provided facing each other, the first reflective film is provided on the first substrate via the first electrode, The second reflective film is electrically connected to the first electrode, and the second substrate In the plan view of the second substrate viewed from the substrate thickness direction, a driving electrode is disposed outside the optical interference region, and the first electrode further includes the first substrate viewed from the substrate thickness direction. The planar view is provided in a region including the light interference region and a driving electrode facing region facing the driving electrode, and the gap changing unit includes the driving electrode and the driving electrode facing region. Including the first electrode.
The optical module according to the present invention is provided on the first substrate, the second substrate facing the first substrate, the first reflective film provided on the first substrate, and the second substrate, A second reflective film facing the first reflective film via a gap between the reflective films, a gap changing portion for changing the gap between the reflective films, a first electrode provided on the first substrate and grounded, and A detection unit that detects light extracted by the first reflection film and the second reflection film, and the first electrode is a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. The first reflective film and the second reflective film are provided so as to cover an optical interference region provided opposite to each other, and the first reflective film is provided on the first substrate via the first electrode. The second reflective film is electrically connected to the first electrode. And wherein the door.

In the present invention, like the above-described invention, the first reflective film is formed by being laminated on the grounded first electrode, and the second reflective film provided on the second substrate is also connected to the first electrode. Has been. Thereby, an electric charge is not hold | maintained at a 1st reflective film and a 2nd reflective film, and the approach of the charged substance to a 1st reflective film or a 2nd reflective film can also be suppressed. In addition, since the first reflective film and the second reflective film are maintained at the same potential, even when a charged substance adheres to the first reflective film and the second reflective film, the Coulomb force acts on the gap between the reflective films. Therefore, fluctuations in the gap between the reflective films can be prevented. Further, since the grounded first electrode is formed so as to cover the region where the first reflective film is provided, a shielding effect against electromagnetic waves from the outside can be obtained, for example, when driving a wavelength variable interference filter, Inconveniences such as fluctuation of the gap between the reflecting films due to the influence of electromagnetic waves can also be avoided.
In addition, since the Coulomb force due to charging does not act between the first reflecting film and the second reflecting film, the gap changing unit can set the gap between the reflecting films with high accuracy, and the light having a desired target wavelength is tunable. Can be taken out from. Therefore, by detecting the light amount of the light in the detection unit, it is possible to accurately detect the accurate light amount of the target wavelength.

An electronic apparatus according to an aspect of the present invention includes a first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate, and the second substrate. A second reflective film facing the first reflective film via a gap between the reflective films, a gap changing unit for changing the gap between the reflective films, and a first electrode provided on the first substrate, The first electrode includes an optical interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. The first reflective film is provided on the first substrate via the first electrode, the second reflective film is electrically connected to the first electrode, and the second substrate In the plan view of the second substrate viewed from the substrate thickness direction, outside the light interference region, The first electrode further includes the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction. The gap changing section includes the driving electrode and the first electrode provided in the driving electrode opposing region.
In the electronic device according to the present invention , the first substrate, the second substrate facing the first substrate, the first reflective film provided on the first substrate, the second substrate, A second reflective film facing the first reflective film via a gap between the reflective films, a gap changing section for changing the gap between the reflective films, and a first electrode provided on the first substrate and grounded And the first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. The first reflective film is provided on the first substrate via the first electrode, and the second reflective film is electrically connected to the first electrode. And

In the present invention, like the above-described invention, the first reflective film is formed by being laminated on the grounded first electrode, and the second reflective film provided on the second substrate is also connected to the first electrode. Has been. Thereby, an electric charge is not hold | maintained at a 1st reflective film and a 2nd reflective film, and the approach of the charged substance to a 1st reflective film or a 2nd reflective film can also be suppressed. In addition, since the first reflective film and the second reflective film are maintained at the same potential, even when a charged substance adheres to the first reflective film and the second reflective film, the Coulomb force acts on the gap between the reflective films. Therefore, fluctuations in the gap between the reflective films can be prevented. Further, since the grounded first electrode is formed so as to cover the region where the first reflective film is provided, a shielding effect against electromagnetic waves from the outside can be obtained, for example, when driving a wavelength variable interference filter, Inconveniences such as fluctuation of the gap between the reflecting films due to the influence of electromagnetic waves can also be avoided.
Therefore, in an electronic device, for example, when detecting light of a target wavelength extracted by light interference by the first reflective film and the second reflective film, and performing various processes based on the light quantity, Since the amount of light can be detected accurately, the processing accuracy of various processes can be improved.

1 is a block diagram showing a schematic configuration of a color measuring device according to a first embodiment of the present invention. The top view which shows schematic structure of the wavelength variable interference filter of 1st embodiment. 1 is a cross-sectional view showing a schematic configuration of a variable wavelength interference filter according to a first embodiment. The top view which looked at the fixed board | substrate of the wavelength variable interference filter of 1st embodiment from the movable substrate side. The top view which looked at the movable substrate of the wavelength variable interference filter of the first embodiment from the fixed substrate side. Sectional drawing which shows schematic structure of the wavelength variable interference filter of 2nd embodiment. Sectional drawing which shows schematic structure of the wavelength variable interference filter of 3rd embodiment. Sectional drawing which shows schematic structure of the wavelength variable interference filter of 4th embodiment. Sectional drawing which shows schematic structure of the optical filter device which concerns on 5th embodiment. Schematic which shows the gas detection apparatus provided with the wavelength variable interference filter in other embodiment. The block diagram which shows the structure of the control system of the gas detection apparatus of FIG. The figure which shows schematic structure of the food-analysis apparatus provided with the wavelength variable interference filter in other embodiment. The schematic diagram which shows schematic structure of the spectroscopic camera in other embodiment.

Hereinafter, an embodiment according to the present invention will be described with reference to the drawings.
[1. (Schematic configuration of the color measuring device)
FIG. 1 is a block diagram illustrating a schematic configuration of a color measurement device 1 (electronic device) according to the present embodiment.
As shown in FIG. 1, the color measurement device 1 includes a light source device 2 that emits light to the inspection object A, a color measurement sensor 3 (optical module), and a control device 4 that controls the overall operation of the color measurement device 1. Is provided. The colorimetric device 1 reflects the light emitted from the light source device 2 by the inspection object A, receives the reflected inspection light by the colorimetric sensor 3, and outputs the light from the colorimetric sensor 3. This is an apparatus that analyzes and measures the chromaticity of the inspection target light, that is, the color of the inspection target A, based on the detection signal.

[2. Configuration of light source device]
The light source device 2 includes a light source 21 and a plurality of lenses 22 (only one is shown in FIG. 1), and emits white light to the inspection target A. The plurality of lenses 22 may include a collimator lens. In this case, the light source device 2 converts the white light emitted from the light source 21 into parallel light by the collimator lens and inspects from a projection lens (not shown). Inject toward the subject A. In the present embodiment, the colorimetric device 1 including the light source device 2 is illustrated. However, for example, when the inspection target A is a light emitting member such as a liquid crystal panel, the light source device 2 may not be provided.

[3. (Configuration of colorimetric sensor)
As shown in FIG. 1, the colorimetric sensor 3 has a variable wavelength interference filter 5, a detection unit 31 that receives light transmitted through the variable wavelength interference filter 5, and a variable wavelength of light transmitted through the variable wavelength interference filter 5. Voltage control unit 32. Further, the colorimetric sensor 3 includes an incident optical lens (not shown) that guides the reflected light (inspection light) reflected by the inspection object A at a position facing the variable wavelength interference filter 5. In the colorimetric sensor 3, the wavelength variable interference filter 5 separates the light having a predetermined wavelength from the inspection target light incident from the incident optical lens, and the detected light is received by the detection unit 31.
The detection unit 31 includes a plurality of photoelectric exchange elements, and generates an electrical signal corresponding to the amount of received light. And the detection part 31 is connected to the control apparatus 4, and outputs the produced | generated electric signal to the control apparatus 4 as a light reception signal.

(3-1. Configuration of wavelength tunable interference filter)
FIG. 2 is a plan view showing a schematic configuration of the variable wavelength interference filter 5, and FIG. 3 is a cross-sectional view showing a schematic configuration of the variable wavelength interference filter 5.
As shown in FIG. 2, the variable wavelength interference filter 5 is, for example, a planar square plate-like optical member. As shown in FIG. 3, the tunable interference filter 5 includes a fixed substrate 51 that is the second substrate of the present invention and a movable substrate 52 that is the first substrate of the present invention. The fixed substrate 51 and the movable substrate 52 are each formed of, for example, various types of glass such as soda glass, crystalline glass, quartz glass, lead glass, potassium glass, borosilicate glass, and non-alkali glass, or crystal. . And these fixed board | substrate 51 and movable board | substrate 52 are the joining films | membranes in which the 1st junction part 523 formed in the outer peripheral part vicinity and the 2nd junction part 513 were comprised by the plasma polymerization film etc. which have siloxane as a main component, for example. By being joined by 53, it is comprised integrally.

The fixed substrate 51 is provided with a fixed reflective film 54 constituting the second reflective film of the present invention, and the movable substrate 52 is provided with a movable reflective film 55 constituting the first reflective film of the present invention. Here, the fixed reflective film 54 is provided on the surface of the fixed substrate 51 facing the movable substrate 52 via the antistatic electrode 561 which is the second electrode of the present invention. The movable reflective film 55 is fixed to the surface of the movable substrate 52 facing the fixed substrate 51 via the movable electrode 562 that is the first electrode of the present invention. Further, the fixed reflection film 54 and the movable reflection film 55 are disposed to face each other via the inter-reflection film gap G1.
The wavelength variable interference filter 5 is provided with an electrostatic actuator 56 that is used to adjust the dimension of the inter-reflective film gap G1 between the fixed reflective film 54 and the movable reflective film 55. The electrostatic actuator 56 includes a fixed inner electrode 563 (an inner driving electrode of the present invention) provided on the fixed substrate 51, a fixed outer electrode 564 (an outer driving electrode of the present invention), and the movable electrode 562 described above. It is comprised by. Here, these electrodes 561, 562, 563, and 564 may be configured to be provided directly on the substrate surfaces of the fixed substrate 51 and the movable substrate 52, respectively, and are configured to be provided via other film members. Also good.
Further, in a plan view as shown in FIG. 2 in which the wavelength variable interference filter 5 is viewed from the thickness direction of the fixed substrate 51 (movable substrate 52), the plane center point O of the fixed substrate 51 and the movable substrate 52 is a fixed reflection film. 54 and the center point of the movable reflective film 55 and the center point of the movable part 521 described later. Here, a plan view seen from the thickness direction of the fixed substrate 51 or the movable substrate 52, that is, a plan view seen from the stacking direction of the fixed substrate 51, the bonding film 53, and the movable substrate 52, The filter is in plan view.

(3-1-1. Configuration of Fixed Substrate)
FIG. 4 is a plan view of the fixed substrate of the first embodiment as viewed from the movable substrate side.
The fixed substrate 51 is formed by processing a glass base material having a thickness of, for example, 500 μm. Specifically, as shown in FIGS. 3 and 4, the electrode placement groove 511 is formed in the fixed substrate 51 by etching.
Further, the fixed substrate 51 is formed to have a larger thickness than the movable substrate 52, and electrostatic attraction when a voltage is applied between the antistatic electrode 561 and the movable electrode 562, or the antistatic electrode 561 is fixed. There is no bending of the fixed substrate 51 due to the internal stress of the inner electrode 563 and the fixed outer electrode 564.

The electrode placement groove 511 is formed in a circular shape centered on the plane center point O of the fixed substrate 51 in the filter plan view. Here, the groove bottom surface of the electrode arrangement groove 511 is an electrode fixing surface 511A on which the antistatic electrode 561, the fixed inner electrode 563, and the fixed outer electrode 564 are arranged.
The fixed substrate 51 is provided with three electrode extraction grooves 511 </ b> B extending from the electrode arrangement groove 511 toward the vertices C <b> 1, C <b> 2, C <b> 3 of the outer peripheral edge of the fixed substrate 51.

On the electrode fixing surface 511A, an antistatic electrode 561 (second electrode of the present invention) is formed in a circular region including the optical interference region Ar1 having a radius R1 with the plane center point O as the center. Here, the light interference region Ar1 is a region from which light having a target wavelength is extracted by multiple interference of light when light is incident on the wavelength variable interference filter 5. Specifically, this is a region where the fixed reflective film 54 and the movable reflective film 55 face each other (a region where the fixed reflective film 54 and the movable reflective film 55 overlap in the filter plan view).
In the present embodiment, the antistatic electrode 561 is provided in the circular light interference region Ar1, but it may be configured such that a part of the circular outer peripheral portion is missing, and further in a circular shape. It may be formed in a rectangular shape without limitation.
In addition, on the electrode fixing surface 511 </ b> A and the electrode extraction groove 511 </ b> B toward the vertex C <b> 1 of the fixed substrate 51, an antistatic extraction electrode 561 </ b> A extending from the outer peripheral edge of the antistatic electrode 561 is provided. The antistatic lead electrode 561A is formed to extend from the outer peripheral edge of the antistatic electrode 561 to the vertex C1 of the fixed substrate 51, and the tip portion (the portion located at the vertex C1 of the fixed substrate 51) is the voltage control unit 32. An anti-static electrode pad 561P connected to is configured.

A fixed inner electrode 563 is formed on the electrode fixing surface 511A. The fixed inner electrode 563 is formed on the outer peripheral side of the antistatic electrode 561 so as not to contact the antistatic electrode 561 and the antistatic extraction electrode 561A. The fixed inner electrode 563 is provided in a substantially C shape in an annular region having radii R2 to R3 with the plane center point O as the center. The C-shaped opening portion of the fixed inner electrode 563 is formed in a direction from the plane center point O toward the vertex C1, and the antistatic lead electrode 561A is wired in the C-shaped opening portion.
A fixed inner extraction electrode 563A is provided on the electrode extraction surface 511A and the electrode extraction groove 511B toward the vertex C2 of the fixed substrate 51. This fixed inner lead electrode 563A extends from the C-shaped opening end of the fixed inner electrode 563 to the outer peripheral edge of the electrode placement groove 511 in the radially outward direction, and from there along the outer peripheral edge of the electrode placement groove 511, the vertex C2 To the electrode lead-out groove 511B, and further to the vertex C2 along the electrode lead-out groove 511B. The distal end portion of the fixed inner lead electrode 563A (the portion located at the vertex C2 of the fixed substrate 51) constitutes a fixed inner electrode pad 563P connected to the voltage control unit 32.

Further, a fixed outer electrode 564 is formed on the electrode fixing surface 511A. The fixed outer electrode 564 is formed on the outer peripheral side of the fixed inner electrode 563 so as not to contact the fixed inner electrode 563, the fixed inner extraction electrode 563A, and the antistatic extraction electrode 561A. The fixed outer electrode 564 is provided in a substantially C shape in an annular region having radii R4 to R5 centered on the plane center point O, and the antistatic extraction electrode 561A and the fixed inner extraction electrode are provided in the C-shaped opening. 563A is wired.
Further, a fixed outer extraction electrode 564A is provided on the electrode extraction surface 511A and the electrode extraction groove 511B toward the vertex C3 of the fixed substrate 51. The fixed outer lead electrode 564A is formed to extend from the outer peripheral edge of the fixed outer electrode 564 to the vertex C3 of the fixed substrate 51. The distal end portion of the fixed outer lead electrode 564A (the portion located at the vertex C3 of the fixed substrate 51) constitutes a fixed outer electrode pad 564P connected to the voltage control unit 32.

Here, the antistatic electrode 561 (antistatic extraction electrode 561A) is formed of a light-transmitting conductive film (for example, ITO: Indium Tin Oxide), and the light introduced into the wavelength variable interference filter 5 and fixed reflection. Light extracted by multiple interference is transmitted between the film 54 and the movable reflective film 55. In this embodiment, the visible light region is set as the inspection target wavelength region in order to perform the colorimetry of the inspection target A. However, in the case where the inspection target light is other than visible light such as infrared light, A conductive film capable of transmitting inspection target light is used.
The fixed inner electrode 563 (fixed inner extraction electrode 563A) and the fixed outer electrode 564 (fixed outer extraction electrode 564A) are preferably formed of the same conductive film as the antistatic electrode 561. When the antistatic electrode 561, the fixed inner electrode 563, and the fixed outer electrode 564 are the same conductive film, the antistatic electrode 561, the fixed inner electrode 563, and the fixed outer electrode 564 are formed in one step at the time of wiring formation. Therefore, the manufacturing efficiency can be improved. In the present embodiment, an example in which each of the electrodes 561, 563, and 564 is made of the same conductive film material is shown. For example, the fixed inner electrode 563 and the fixed outer electrode 564 are made of a conductive film different from the antistatic electrode 561. The fixed inner electrode 563 and the fixed outer electrode 564 may be different conductive films.

On the antistatic electrode 561, a circular fixed reflection film 54 is provided in the light interference region Ar1.
The fixed reflective film 54 may be formed of a metal film or a dielectric multilayer film, and an Ag alloy is formed on the dielectric multilayer film. It is good also as a structure. As the metal single layer film, for example, a single layer film of Ag or an Ag alloy can be used. In the case of a dielectric multilayer film, for example, a dielectric multilayer film in which the high refractive layer is TiO ₂ and the low refractive layer is SiO ₂ can be used, and the surface layer is covered with a conductive reflective film such as an Ag alloy. Thus, it is possible to reliably establish conduction with the antistatic electrode 561.

  Further, an antireflection film may be formed on the fixed substrate 51 at a position corresponding to the fixed reflection film 54 on the surface opposite to the movable substrate 52. Such an antireflection film can be formed by alternately laminating a low refractive index film and a high refractive index film, reducing the reflectance of visible light on the surface of the fixed substrate 51 and increasing the transmittance. Can be made.

(3-1-2. Configuration of movable substrate)
FIG. 5 is a plan view of the movable substrate of the first embodiment viewed from the fixed substrate side.
The movable substrate 52 is formed by processing a glass substrate having a thickness of, for example, 200 μm by etching.
Specifically, the movable substrate 52 includes a circular movable portion 521 centered on a plane center point O and a coaxial portion with the movable portion 521 in the filter plan view as shown in FIGS. And a holding portion 522 for holding the.
Further, as shown in FIGS. 2 and 5, the movable substrate 52 is formed with notches 524 corresponding to the vertices C1, C2, and C3, and the wavelength variable interference filter 5 is viewed from the movable substrate 52 side. The antistatic electrode pad 561P, the fixed inner electrode pad 563P, and the fixed outer electrode pad 564P are exposed on the surface.

The movable part 521 is formed to have a thickness dimension larger than that of the holding part 522. For example, in this embodiment, the movable part 521 is formed to be 200 μm, which is the same dimension as the thickness dimension of the movable substrate 52. The movable portion 521 is formed to have a diameter larger than at least the diameter of the outer peripheral edge of the fixed outer electrode 564 in the filter plan view. That is, the movable part 521 is formed in a circular shape having a radius R5 or more in the filter plan view.
Similar to the fixed substrate 51, an antireflection film may be formed on the surface of the movable portion 521 opposite to the fixed substrate 51. Such an antireflection film can be formed by alternately laminating a low refractive index film and a high refractive index film, reducing the reflectance of visible light on the surface of the movable substrate 52 and increasing the transmittance. Can be made.

The movable surface 521A of the movable portion 521 that faces the fixed substrate 51 is provided with a movable inner electrode 563 and a fixed outer electrode 564, and a movable electrode 562 that faces the gap G2 between the electrodes.
The movable electrode 562 is provided over the entire surface of the movable surface 521A including the light interference area Ar1 of the second substrate. That is, the movable electrode 562 is provided in a circular region having a radius R5 centered on the plane center point O on the movable surface 521A. Similar to the antistatic electrode 561, the movable electrode 562 is formed of a light-transmitting conductive film such as ITO. In the present invention, the movable electrode 562 being provided over the entire surface of the movable surface 521A includes a configuration in which the movable electrode 562 is provided over substantially the entire surface of the movable surface 521A. That is, a slight error is included as long as the object of the present invention can be achieved. Specifically, the movable electrode 562 only needs to be formed so that the radius from the plane center point O is at least the radius R5 of the outer peripheral edge of the fixed outer electrode 564 and the radius of the outer peripheral edge of the movable surface.

  The movable substrate 52 is provided with a movable extraction electrode 562A that extends from the outer peripheral edge of the movable electrode 562. The movable extraction electrode 562A extends from the outer peripheral edge of the movable electrode 562 toward the vertex C1 of the movable substrate 52. The leading end of the movable lead electrode 562A faces the antistatic electrode pad 561P at the vertex C1, and is connected to the antistatic electrode pad 561P through a conductive member 562B such as Ag paste. Here, the antistatic electrode pad 561P is connected to the GND circuit by the voltage control unit 32 and grounded. Therefore, the movable electrode 562 and the antistatic electrode 561 are maintained at 0 potential.

  In the filter plan view, the movable electrode 562 includes an inner driving electrode facing region 5621 facing the fixed inner electrode 563 and an outer driving electrode facing region 5622 facing the fixed outer electrode 564. Therefore, by setting the potentials of the fixed inner electrode 563 and the fixed outer electrode 564 to a predetermined value, the fixed inner electrode 563 and the inner driving electrode facing region 5621, and between the fixed outer electrode 564 and the inner driving electrode facing region 5621 are set. A potential difference is generated in each case, and electrostatic attraction is generated. In other words, the movable electrode 562, the fixed inner electrode 563, and the fixed outer electrode 564 constitute the electrostatic actuator 56 that is the gap changing portion of the present invention.

  In addition, a movable reflective film 55 is provided at a position of the movable electrode 562 that overlaps the light interference region Ar1 in the filter plan view. As the movable reflective film 55, a reflective film having the same configuration and the same diameter as the above-described fixed reflective film 54 is used.

The holding part 522 is a diaphragm surrounding the periphery of the movable part 521. For example, the holding part 522 is formed to have a thickness dimension of 50 μm and is smaller in rigidity in the thickness direction than the movable part 521.
For this reason, the holding part 522 is more easily bent than the movable part 521 and can be bent toward the fixed substrate 51 by a slight electrostatic attraction. At this time, since the movable portion 521 has a thickness dimension larger than that of the holding portion 522 and has a large rigidity, even when a force that bends the movable substrate 52 by electrostatic attraction acts, the movable portion 521 is hardly bent. The bending of the movable reflective film 55 formed on the movable portion 521 can also be prevented.
In this embodiment, the diaphragm-like holding part 522 is illustrated, but the present invention is not limited to this. For example, a configuration in which beam-like holding parts arranged at equiangular intervals around the plane center point O are provided. And so on.

(3-2. Configuration of voltage control means)
The voltage control unit 32 has a GND circuit and grounds the antistatic electrode pad 561P. Thereby, as described above, the antistatic electrode 561 and the movable electrode 562 connected to the antistatic electrode pad 561P are maintained at zero potential. The voltage control unit 32 is connected to the fixed inner electrode pad 563P and the fixed outer electrode pad 564P, and based on the control signal input from the control device 4, the fixed inner electrode pad 563P and the fixed outer electrode pad 564P. Is set to a predetermined potential, and a voltage is applied to the electrostatic actuator 56 to drive it.

[4. Configuration of control device]
The control device 4 controls the overall operation of the color measurement device 1.
As the control device 4, for example, a general-purpose personal computer, a portable information terminal, other color measurement dedicated computer, or the like can be used.
As shown in FIG. 1, the control device 4 includes a light source control unit 41, a colorimetric sensor control unit 42, a colorimetric processing unit 43 that constitutes an analysis processing unit of the present invention, and the like.
The light source control unit 41 is connected to the light source device 2. Then, the light source control unit 41 outputs a predetermined control signal to the light source device 2 based on, for example, a user setting input, and causes the light source device 2 to emit white light with a predetermined brightness.
The colorimetric sensor control unit 42 is connected to the colorimetric sensor 3. The colorimetric sensor control unit 42 sets a wavelength of light received by the colorimetric sensor 3 based on, for example, a user's setting input, and outputs a control signal for detecting the amount of light received at this wavelength. Output to the colorimetric sensor 3. Thereby, the voltage control unit 32 of the colorimetric sensor 3 sets the voltage applied to the electrostatic actuator 56 so as to transmit only the wavelength of light desired by the user based on the control signal.
The colorimetric processing unit 43 analyzes the chromaticity of the inspection object A from the amount of received light detected by the detection unit 31.

[5. (Effects of Embodiment)
In the variable wavelength interference filter 5 of the present embodiment, a movable electrode 562 is provided on the entire movable surface 521A of the movable substrate 52, and a movable reflective film 55 is provided on the movable electrode 562. Further, an antistatic electrode 561 is provided in the electrode arrangement groove 511 of the fixed substrate 51, and a fixed reflective film 54 is provided on the antistatic electrode 561. The movable electrode 562 and the antistatic electrode 561 are electrically connected by a conductive member and grounded by the GND circuit of the voltage control unit 32.
For this reason, the fixed reflective film 54 and the movable reflective film 55 are maintained at zero potential, and adhesion of the charged substance to the fixed reflective film 54 and the movable reflective film 55 can be prevented. Further, the fixed reflection film 54 and the movable reflection film 55 have the same potential. Therefore, no Coulomb force such as electrostatic attractive force is generated between the fixed reflective film 54 and the movable reflective film 55, and the dimension of the inter-reflective film gap G1 can be accurately changed to a desired value by the electrostatic actuator 56. it can.
In addition, since the movable electrode 562 is provided on the entire surface of the movable portion 521 and grounded in a filter plan view, a shielding effect can be obtained and the influence of electromagnetic waves can be suppressed. That is, when the potentials set on the fixed inner electrode 563 and the fixed outer electrode 564 are changed by the electromagnetic wave, the light of noise components other than the target wavelength originally transmitted through the wavelength tunable interference filter 5 is transmitted to the wavelength tunable interference filter 5. The inconvenience which permeate | transmits can be suppressed. Therefore, it is possible to detect the amount of light of the target wavelength with high accuracy in the colorimetric sensor 3, and to accurately measure the chromaticity of the inspection object A in the colorimetric device 1.
Furthermore, in the wavelength tunable interference filter 5 of the present embodiment, the antistatic electrode 561 is provided in the optical interference region Ar1 that overlaps the fixed reflective film 54 of the fixed substrate 51, so that the above-described shielding effect can be more effectively exhibited. And the influence of electromagnetic waves can be eliminated more reliably.

  The movable electrode 562 and the antistatic electrode 561 are made of ITO which is a light-transmitting conductive film. For this reason, the light incident on the wavelength variable interference filter 5 and the light extracted by the wavelength variable interference filter 5 can be transmitted.

The movable electrode 562 is provided so as to cover the entire surface of the movable portion 521, and the inner driving electrode facing region 5621 facing the fixed inner electrode 563 provided on the fixed substrate 51 and the outer driving electrode facing the fixed outer electrode 564. An electrode facing region 5622 is provided.
For this reason, it is not necessary to form another electrode facing the fixed inner electrode 563 and the fixed outer electrode 564 on the movable substrate 52, and the movable actuator 562, the fixed inner electrode 563, and the fixed outer electrode 564 constitute the electrostatic actuator 56. be able to. Therefore, the wiring structure can be simplified, and the wiring work when the variable wavelength interference filter 5 is incorporated in the colorimetric sensor 3 can be simplified.
Further, different potentials can be set for the fixed inner electrode 563 and the fixed outer electrode 564, respectively, and electrostatic attraction generated in the fixed inner electrode 563 and the inner driving electrode facing region 5621, the fixed outer electrode 564, and the outer electrode. The electrostatic attractive force generated in the driving electrode facing region 5622 can be varied. Therefore, the displacement amount of the movable part 521 can be controlled more precisely.

[Second Embodiment]
Next, a second embodiment of the present invention will be described based on the drawings.
In the first embodiment, the example in which the antistatic electrode 561 is provided in the optical interference region Ar1 with respect to the fixed substrate 51 and the fixed reflective film 54 is provided on the antistatic electrode 561 has been described. On the other hand, in this embodiment, a fixed reflective film that is a second reflective film is provided directly on a fixed substrate that is a second substrate, and the fixed reflective film is electrically connected to a movable electrode that is a first electrode. This is different from the first embodiment.
That is, when a conductive reflective film such as an Ag alloy is used as the reflective film, it is not always necessary to provide the fixed-side antistatic electrode that is the second electrode, and the second reflective film may be electrically connected to the first electrode. Thus, the object of the present invention can be achieved. In the present embodiment, such an example will be described below.

FIG. 6 is a cross-sectional view illustrating a schematic configuration of a wavelength tunable interference filter according to the second embodiment.
In the description after the second embodiment liquid, the same reference numerals are given to the same configurations as those in the first embodiment, and the description thereof is omitted.
In FIG. 6, the variable wavelength interference filter 5 </ b> A includes a fixed substrate 51 and a movable substrate 52, similarly to the variable wavelength interference filter 5 of the first embodiment.
The fixed substrate 51 of the present embodiment is provided with the conductive fixed reflection film 54 directly on the electrode fixing surface 511A at a position overlapping the light interference region Ar1 in the filter plan view. As the fixed reflection film 54, any reflection film may be used as long as it has conductivity. For example, a metal film such as Ag or an alloy film such as Ag alloy can be used.

Although not shown, the fixed substrate 51 is provided with an antistatic lead electrode (not shown) extending from the outer peripheral edge of the fixed reflective film 54. As in the first embodiment, the antistatic lead electrode extends from the fixed reflective film 54 toward the vertex C1 (see FIG. 2) of the fixed substrate 51, and forms an antistatic electrode pad at the tip. Further, the antistatic electrode pad is connected to the movable extraction electrode 562A provided on the movable substrate 52 in the vicinity of the vertex C1, for example, by a conductive member such as Ag paste. Thereby, the movable electrode 562 and the fixed reflective film 54 are electrically connected.
Similarly to the first embodiment, the antistatic electrode pad is connected to the voltage control unit 32 and grounded by a GND circuit provided in the voltage control unit 32.

In the second embodiment as described above, the same effects as in the first embodiment can be obtained.
That is, in the wavelength variable interference filter 5A of the second embodiment, the movable electrode 562 is provided on the entire movable surface 521A of the movable substrate 52, the movable reflective film 55 is provided on the movable electrode 562, and the movable electrode 562 is fixed. It is electrically connected to a fixed reflective film 54 provided on the substrate 51. The movable electrode 562 and the fixed reflective film 54 are electrically connected by a conductive member, and are grounded by the GND circuit of the voltage control unit 32.
For this reason, the fixed reflection film 54 and the movable reflection film 55 are maintained at 0 potential, and the charging substance can be prevented from adhering to the fixed reflection film 54 and the movable reflection film 55. The generation of Coulomb force such as electrostatic attraction between them can be prevented. Thereby, the dimension of the gap G1 between reflective films can be accurately changed to a desired value by the electrostatic actuator 56.
In addition, since the movable electrode 562 is provided on the entire surface of the movable portion 521 and grounded in a filter plan view, a shielding effect can be obtained and the influence of electromagnetic waves can be suppressed.

  In the present embodiment, since the antistatic electrode 561 is not provided on the fixed substrate 51, the configuration can be simplified correspondingly, the manufacturing cost can be reduced, and the manufacturing efficiency can be improved. it can.

[Third embodiment]
Next, a third embodiment of the present invention will be described based on the drawings.
In the first and second embodiments, the first substrate of the present invention is the movable substrate 52, and the movable electrode 562 that is the first electrode is provided over the entire surface of the movable portion 521 of the movable substrate 52. On the other hand, the third embodiment is different from the first and second embodiments in that the first substrate of the present invention is a fixed substrate, and the fixed electrode which is the first electrode is provided on the fixed substrate.
FIG. 7 is a cross-sectional view illustrating a schematic configuration of a wavelength tunable interference filter according to the third embodiment.

The wavelength tunable interference filter 5B of the third embodiment includes a fixed substrate 51 that constitutes the first substrate of the present invention, and a movable substrate 52 that constitutes the second substrate of the present invention.
The movable substrate 52 includes a circular movable portion 521 centered on the plane center point O in the filter plan view, and a holding portion 522 that is coaxial with the movable portion 521 and holds the movable portion 521.

In this embodiment, the movable surface 521A of the movable portion 521 is not in contact with the movable reflective film 55 having a radius R1 centered on the plane center point O and the movable reflective film 55 on the outer peripheral side of the movable reflective film 55. The substantially inner C-shaped movable inner electrode 566 (inner driving electrode of the present invention) provided on the outer peripheral side of the movable inner electrode 566 and the movable reflective film 55 and the movable inner electrode 566 in a non-contact manner. A C-shaped movable outer electrode 567 (an outer driving electrode of the present invention).
Here, although illustration is omitted, the movable inner electrode 566 includes an inner movable extraction electrode extending from the outer peripheral edge toward the outer peripheral portion (for example, apex) of the movable substrate 52, and an end of the inner movable extraction electrode. The unit constitutes an inner movable electrode pad connected to the voltage control unit 32. Similarly, the movable outer electrode 567 includes an outer movable extraction electrode extending from the outer peripheral edge toward the outer peripheral portion of the movable substrate 52, and an end portion of the outer movable extraction electrode is connected to the voltage control unit 32. The outer movable electrode pad is configured.
Although illustration is omitted, the movable substrate 52 includes a connection electrode extending from the outer peripheral edge of the movable reflective film 55 toward the outer peripheral portion of the movable substrate 52, and a fixed later described at the end of the connection electrode. The electrode 565 is connected.
In addition, about the electrode shape (wiring position) of these connection electrodes, an inner side movable extraction electrode, and an outer side movable extraction electrode, the electrode routing shape substantially the same as FIG. 4 can be used.

  Since the holding part 522 has the same configuration as that of the first embodiment, description thereof is omitted here.

  As shown in FIG. 7, the fixed substrate 51 includes an electrode arrangement groove 511 and a reflective film fixing portion 512 formed by etching. Further, the fixed substrate 51 is formed to have a larger thickness dimension than the movable substrate 52 as in the first embodiment and the second embodiment, and the fixed substrate 51 is not bent due to electrostatic attraction or the like.

The electrode arrangement groove 511 is formed in an annular shape in the filter plan view. The reflective film fixing portion 512 is formed to protrude from the central portion of the electrode arrangement groove 511 toward the movable substrate 52 side. Further, the reflection film fixing surface 512A of the reflection film fixing portion 512 facing the movable substrate 52 overlaps with the light interference region Ar1 in the filter plan view, and the fixed reflection film 54 which is the first reflection film of the present invention is provided. That is, the reflective film fixing surface 512A is formed in a circular shape with a radius R1 with the plane center point O as the center.
In addition, the fixed substrate 51 is provided with an electrode extraction groove (not shown) extending from the electrode arrangement groove 511 as in the above embodiment.

On the surface of the fixed substrate 51 facing the movable substrate 52, the fixed electrode 565, which is the first electrode of the present invention, covers the entire region (movable portion facing region Ar2) overlapping the movable portion 521 in the filter plan view. Is provided. As the fixed electrode 565, for example, a light-transmitting conductive film such as ITO is used.
In such a configuration, the portion of the fixed electrode 565 facing the movable inner electrode 566 in the filter plan view becomes the inner driving electrode facing region 5651 and the portion facing the movable outer electrode 567 is the outer driving electrode facing region. 5562. Therefore, by setting the potentials of the movable inner electrode 566 and the movable outer electrode 567 to predetermined values, the movable inner electrode 566 and the inner driving electrode opposing region 5651 are interposed, and the movable outer electrode 567 and the outer driving electrode opposing region 5562 are interposed. A potential difference is generated in each case, and electrostatic attraction is generated. That is, the electrostatic actuator 56 is configured by the fixed electrode 565, the movable inner electrode 566, and the movable outer electrode 567.

  Although not shown, the fixed substrate 51 is provided with a fixed extraction electrode extending from the outer peripheral edge of the fixed electrode 565, and the end of the fixed extraction electrode constitutes an antistatic electrode pad. Further, the wiring electrode extending from the movable reflective film 55 is opposed to the end portion of the fixed extraction electrode, and the fixed extraction electrode and the wiring electrode are connected via a conductive member such as Ag paste. The antistatic electrode pad is connected to the GND circuit by the voltage control unit 32 and grounded.

  A fixed reflective film 54 is laminated on the fixed electrode 565 on the reflective film fixing surface 512A. Therefore, in this embodiment, the inter-reflection film gap G1 between the fixed reflection film 54 and the movable reflection film 55 is between the movable inner electrode 566 and the inner driving electrode facing region 5651 (the movable outer electrode 567 and the outer driving electrode facing each other). This is smaller than the inter-electrode gap G2 between the regions 5562).

In the wavelength variable interference filter 5B of the third embodiment as described above, the following effects are obtained in addition to the effects of the first and second embodiments.
In the variable wavelength interference filter 5B, the fixed electrode 565 is provided on the entire movable portion facing area Ar2 of the fixed substrate 51. For this reason, the variable wavelength interference filter 5 </ b> B capable of preventing the fixed reflective film 54 and the movable reflective film 55 from being charged with a simple configuration without considering the film stress of the fixed electrode 565 is obtained.
That is, in the configuration in which the movable electrode 562 is provided over a wide range of the movable substrate 52 as in the first and second embodiments, the movable substrate 52 may be bent by the film stress of the movable electrode 562. In this case, in order to prevent the substrate from being bent due to the film stress, it may be necessary to take a measure such as providing a bend prevention film that counteracts the film stress of the movable electrode 562.
On the other hand, in this embodiment, since the fixed electrode 565 is provided on the fixed substrate 51 that is not easily bent, even when film stress of the fixed electrode 565 occurs over a wide range, The bending of the fixed substrate 51 does not occur. For this reason, the fixed reflective film 54 does not bend, the fixed reflective film 54 and the movable reflective film 55 can be maintained in parallel, and the resolution of the wavelength variable interference filter 5B can be prevented from being lowered. Further, it is not necessary to take a measure such as providing a separate anti-bending film against the film stress, and the variable wavelength interference filter 5B capable of preventing the fixed reflection film 54 and the movable reflection film 55 from being charged with a simple configuration is obtained.

  Moreover, since the gap G1 between the reflection films is smaller than the gap G2 between the electrodes, the changeable region of the gap between the reflection films can be increased, and the measurable wavelength range of the colorimetric device 1 can be widened. In addition, the electrostatic attractive force between the antistatic electrode 561 and the movable electrode 562 can be easily controlled, and the dimension of the gap between the reflective films can be set to a desired value with higher accuracy.

[Fourth embodiment]
Next, a fourth embodiment obtained by modifying the third embodiment will be described with reference to the drawings.
In the wavelength tunable interference filter 5B of the third embodiment, the dimension between the movable inner electrode 566 and the inner driving electrode facing area 5651 and the dimension between the movable outer electrode 567 and the outer driving electrode facing area 5562 are the same. . On the other hand, the variable wavelength interference filter of the fourth embodiment is different in the dimension between the movable inner electrode and the inner driving electrode facing area and the dimension between the movable outer electrode and the outer driving electrode facing area. This is different from the third embodiment.
FIG. 8 is a cross-sectional view illustrating a schematic configuration of a wavelength tunable interference filter according to the fourth embodiment.

In the wavelength tunable interference filter 5C of this embodiment, the fixed substrate 51 includes an electrode arrangement groove 511, a reflective film fixing portion 512, and a second electrode arrangement groove 514.
Here, the second electrode arrangement groove 514 is an annular groove formed on the outer peripheral side of the electrode arrangement groove 511 and shallower than the electrode fixing surface 511 </ b> A of the electrode arrangement groove 511. That is, in the initial state in which the movable portion 521 is not displaced, the distance between the electrode fixing surface 511A and the movable surface 521A, the distance between the reflective film fixing surface 512A and the movable surface 521A, and the bottom surface of the second electrode arrangement groove 514. Comparing the distance between the second electrode fixing surface 514A and the movable surface 521A, the distance between the reflecting film fixing surface 512A and the movable surface 521A <the distance between the second electrode fixing surface 514A and the movable surface 521A <the electrode The distance between the fixed surface 511A and the movable surface 521A ”.

  In the movable substrate 52, the movable inner electrode 566 is provided at a position facing the electrode fixing surface 511A of the electrode placement groove 511, and the movable outer electrode 567 is positioned at a position facing the second electrode fixing surface 514A. Is provided. Therefore, among the fixed electrodes 565 provided on the fixed substrate 51, the inner driving electrode facing region 5651 facing the movable inner electrode 566 becomes a region on the electrode fixing surface 511A, and the outer driving electrode facing the movable outer electrode 567. The electrode facing region 5562 is a region on the second electrode fixing surface 514A. In such a configuration, the inner electrode gap G3 between the movable inner electrode 566 and the inner driving electrode facing region 5651, the outer electrode gap G4 between the movable outer electrode 567 and the outer driving electrode facing region 5562, and the fixed reflective film The gap G1 between the reflection films 54 and the movable reflection film 55 has a relationship of G1 <G4 <G3.

In the fourth embodiment, in addition to the effects of the third embodiment, there is an effect that the control of the inter-reflective film gap G1 by the electrostatic actuator 56 can be performed accurately and efficiently. be able to.
That is, the force required to bend the movable portion 521 toward the fixed substrate 51 by a predetermined amount increases as it approaches the portion bonded by the bonding film 53. Therefore, for example, in the configuration where “(inner electrode gap G3) = (outer electrode gap G4)”, in order to change the movable portion 521, the potential set to the movable outer electrode 567 is increased to be larger. It is necessary to apply electrostatic attraction. On the other hand, the voltage applied between the movable outer electrode 567 and the outer driving electrode opposing region 5562 is reduced by making the size of the outer electrode gap G4 smaller than the inner electrode gap G3 as in this embodiment. The movable portion 521 can be efficiently driven and power saving can be achieved.

[Fifth embodiment]
Next, a fifth embodiment of the present invention will be described based on the drawings.
In the color measurement device 1 of the first embodiment, the wavelength variable interference filter 5 is directly provided to the color measurement sensor 3 that is an optical module. In this case, the wavelength variable interference filter 5 is provided at a predetermined arrangement position provided in the colorimetric sensor 3, and wiring is performed for the antistatic electrode pad 561P, the fixed inner electrode pad 563P, and the fixed outer electrode pad 564P. However, some optical modules have a complicated configuration, and it may be difficult to directly provide the variable wavelength interference filter 5 particularly for a miniaturized optical module. In the present embodiment, an optical filter device that enables the wavelength variable interference filter 5 to be easily installed even for such an optical module will be described below.
FIG. 9 is a cross-sectional view showing a schematic configuration of an optical filter device according to the fifth embodiment of the present invention.

As shown in FIG. 9, the optical filter device 600 includes a housing 610 that houses the variable wavelength interference filter 5.
The housing 610 includes a bottom 611, a lid 612, an incident side glass window 613 (light guide portion), and an exit side glass window 614 (light guide portion).

  The bottom 611 is constituted by, for example, a single layer ceramic substrate. The movable substrate 52 of the wavelength variable interference filter 5 is fixed to the bottom portion 611. In addition, a light incident hole 611A is formed in the bottom 611 in a region facing the optical interference region Ar1 of the wavelength variable interference filter 5. The light incident hole 611A is a window into which incident light (inspection target light) desired to be dispersed by the wavelength variable interference filter 5 is incident, and an incident side glass window 613 is joined thereto. In addition, as joining of the bottom part 611 and the incident side glass window 613, the glass frit joining using the glass frit which is a piece of glass which melt | dissolved the glass raw material at high temperature and rapidly cooled can be used, for example.

In addition, a number of terminal portions 616 corresponding to the electrode pads 561P, 563P, 564P of the wavelength variable interference filter 5 are provided on the upper surface of the bottom portion 611 (inside the housing 610). Further, the bottom portion 611 is formed with through holes 615 at positions where the respective terminal portions 616 are provided, and each terminal portion 616 has a bottom surface (outside of the housing 610) of the bottom portion 611 through the through holes 615. Is connected to a connection terminal 617 provided in the.
Further, a sealing portion 619 to be joined to the lid 612 is provided on the outer peripheral edge of the bottom portion 611.

As shown in FIG. 9, the lid 612 includes a sealing portion 620 joined to the sealing portion 619 of the bottom portion 611, a side wall portion 621 that continues from the sealing portion 620 and rises away from the bottom portion 611, and a side wall portion And a top surface portion 622 that covers the fixed substrate 51 side of the wavelength tunable interference filter 5. The lid 612 can be formed of an alloy such as Kovar or a metal, for example.
The lid 612 is joined to the bottom portion 611 by joining the sealing portion 620 and the sealing portion 619 of the bottom portion 611 by, for example, laser sealing. In addition, a light exit hole 612A is formed in the top surface portion 622 of the lid 612 in an area facing the optical interference area Ar1 of the wavelength variable interference filter 5. The light exit hole 612A is a window through which the light separated and extracted by the wavelength variable interference filter 5 passes, and the exit side glass window 614 is joined by, for example, glass frit joining.
Note that the housing 610 may be configured to enclose an inert gas such as nitrogen or argon gas, or may be configured to maintain a high degree of vacuum. By adopting such a configuration, it is possible to prevent the reflection films 54 and 55 of the wavelength variable interference filter 5 from being deteriorated. Further, when the degree of vacuum is maintained in a high state, the responsiveness of the movable portion 521 when a voltage is applied to the electrostatic actuator 56 of the wavelength variable interference filter 5 can be improved.

In such an optical filter device 600, since the wavelength tunable interference filter 5 is protected by the housing 610, the characteristic change of the wavelength tunable interference filter 5 due to foreign matter or gas contained in the atmosphere can be prevented, and externally. It is possible to prevent damage to the wavelength tunable interference filter 5 due to factors. Therefore, when the wavelength variable interference filter 5 is installed in an optical module such as a colorimetric sensor or an electronic device or during maintenance, damage due to collision with other members can be prevented.
For example, when the wavelength tunable interference filter 5 manufactured in a factory is transported to an assembly line for assembling an optical module or an electronic device, the wavelength tunable interference filter 5 protected by the housing 610 is safely transported. Is possible.
Further, since the optical filter device 600 is provided with the connection terminal 617 exposed on the outer peripheral surface of the housing 610, wiring can be easily performed even when the optical filter device 600 is incorporated in an optical module or an electronic apparatus. .

  In the fifth embodiment, the configuration in which the movable substrate 52 is fixed to the bottom 611 is illustrated, but the present invention is not limited to this. For example, the fixed substrate 51 may be fixed to the bottom 611.

[Other Embodiments]
It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.

For example, in the first and second embodiments, the reflective substrate fixing portion 512 is not provided on the fixed substrate 51. However, as in the fixed substrate 51 of the third and fourth embodiments, the reflective film fixing portion 512 is not provided. It is good also as a structure provided and the gap G1 between reflection films becomes smaller than the gap between electrodes.
By adopting such a configuration, as in the third embodiment and the fourth embodiment, the variable region of the gap G1 between the reflection films can be increased, and the measurable wavelength region of the colorimetric device 1 can be widened. it can. Further, the electrostatic attraction force can be easily controlled by the electrostatic actuator 56, and the dimension of the gap between the reflective films can be set to a desired value with higher accuracy.

  In the first and second embodiments, the example in which the fixed inner electrode 563 and the fixed outer electrode 564 are provided on the fixed substrate 51 as the electrodes constituting the electrostatic actuator 56 has been described. However, the present invention is not limited to this. For example, the fixed substrate 51 may be provided with more driving electrodes (for example, triple electrodes), the fixed outer electrode 564 is not provided, and the electrostatic actuator 56 is configured by the fixed inner electrode 563 and the movable electrode 562. You may do. The same applies to the third and fourth embodiments, and as the electrodes constituting the electrostatic actuator 56, three or more drive electrodes may be provided on the movable substrate 52, or only a single drive electrode is provided. It is good also as a structure to be made.

Moreover, in the said embodiment, although the electrostatic actuator 56 was illustrated as a gap variable part, it is not limited to this. For example, in the first embodiment, instead of the fixed inner electrode 563 and the fixed outer electrode 564, a dielectric actuator in which a dielectric coil is disposed and a permanent magnet is disposed on the movable substrate 52 may be used.
Further, a piezoelectric actuator may be used instead of the electrostatic actuator 56. In this case, for example, the lower electrode layer, the piezoelectric film, and the upper electrode layer are stacked on the holding unit 522, and the voltage applied between the lower electrode layer and the upper electrode layer is changed as an input value, so that the piezoelectric film is expanded and contracted. The holding portion 522 is bent.

  In the first embodiment, in the variable wavelength interference filter 5, the antistatic electrode pad 561 </ b> P and the movable extraction electrode 562 </ b> A are electrically connected via the conductive member 562 </ b> B, so that the fixed reflection film 54 and the movable reflection film 54 are movable. Although the reflection film 55 has the same potential, the present invention is not limited to this. For example, the antistatic electrode pad 561P and the movable extraction electrode 562A may be connected outside the wavelength variable interference filter 5 such as the voltage control unit 32. Alternatively, the antistatic electrode pad 561P and the movable extraction electrode 562A may be grounded separately.

In the above embodiment, the wavelength variable interference filter that causes light incident from the fixed substrate 51 side to interfere with the light between the fixed reflective film 54 and the movable reflective film 55 and emits the extracted light from the movable substrate 52 side. Although 5 is illustrated, it is not limited to this.
For example, the light extracted by the light interference between the fixed reflection film 54 and the movable reflection film 55 may be emitted again to the fixed substrate 51 side. In this case, for example, when the movable electrode 562 that is the first electrode of the present invention is provided on the movable substrate 52 side as in the first embodiment or the second embodiment, a light-shielding conductive member is used as the movable electrode 562. Also good.

Although the colorimetric device 1 is exemplified as the electronic apparatus of the present invention, the wavelength variable interference filter, optical module, and electronic apparatus of the present invention can be used in various other fields.
For example, it can be used as a light-based system for detecting the presence of a specific substance. As such a system, for example, an in-vehicle gas leak detector that detects a specific gas with high sensitivity by adopting a spectroscopic measurement method using the variable wavelength interference filter of the present invention, or a photoacoustic rare gas detection for a breath test. A gas detection device such as a vessel can be exemplified.
An example of such a gas detection device will be described below with reference to the drawings.

FIG. 10 is a schematic diagram illustrating an example of a gas detection apparatus including a wavelength variable interference filter.
FIG. 11 is a block diagram illustrating a configuration of a control system of the gas detection device of FIG.
As shown in FIG. 10, the gas detection device 100 includes a sensor chip 110, a flow path 120 including a suction port 120A, a suction flow path 120B, a discharge flow path 120C, and a discharge port 120D, a main body 130, It is configured with.
The main body unit 130 includes a sensor unit cover 131 having an opening to which the flow path 120 can be attached and detached, a discharge unit 133, a housing 134, an optical unit 135, a filter 136, a wavelength variable interference filter 5, a light receiving element 137 (detection unit), and the like. , A control unit 138 that processes a detected signal and controls the detection unit, a power supply unit 139 that supplies power, and the like. The optical unit 135 emits light, and a beam splitter 135B that reflects light incident from the light source 135A toward the sensor chip 110 and transmits light incident from the sensor chip toward the light receiving element 137. And lenses 135C, 135D, and 135E. In addition, although the structure which uses the wavelength variable interference filter 5 is illustrated, it is good also as a structure which uses the wavelength variable interference filter 5A, 5B, 5C mentioned above. Furthermore, it is good also as a structure using the optical filter device 600 like 5th embodiment in which such a wavelength variable interference filter 5, 5A, 5B, 5C was accommodated.
As shown in FIG. 11, an operation panel 140, a display unit 141, a connection unit 142 for interface with the outside, and a power supply unit 139 are provided on the surface of the gas detection device 100. When the power supply unit 139 is a secondary battery, a connection unit 143 for charging may be provided.
Further, as shown in FIG. 11, the control unit 138 of the gas detection apparatus 100 controls a signal processing unit 144 configured by a CPU or the like, a light source driver circuit 145 for controlling the light source 135A, and the variable wavelength interference filter 5. Voltage control unit 146, a light receiving circuit 147 that receives a signal from the light receiving element 137, a sensor chip detection that reads a code of the sensor chip 110 and receives a signal from a sensor chip detector 148 that detects the presence or absence of the sensor chip 110 A circuit 149, a discharge driver circuit 150 for controlling the discharge means 133, and the like are provided.

Next, operation | movement of the above gas detection apparatuses 100 is demonstrated below.
A sensor chip detector 148 is provided inside the sensor unit cover 131 at the upper part of the main body unit 130, and the sensor chip detector 148 detects the presence or absence of the sensor chip 110. When the signal processing unit 144 detects the detection signal from the sensor chip detector 148, the signal processing unit 144 determines that the sensor chip 110 is attached, and displays a display signal for displaying on the display unit 141 that the detection operation can be performed. put out.

  For example, when the operation panel 140 is operated by the user and an instruction signal to start the detection process is output from the operation panel 140 to the signal processing unit 144, the signal processing unit 144 first sends the signal processing unit 144 to the light source driver circuit 145. A light source activation signal is output to activate the light source 135A. When the light source 135A is driven, a linearly polarized laser beam having a single wavelength is emitted from the light source 135A. The light source 135A includes a temperature sensor and a light amount sensor, and the information is output to the signal processing unit 144. When the signal processing unit 144 determines that the light source 135A is stably operating based on the temperature and light quantity input from the light source 135A, the signal processing unit 144 controls the discharge driver circuit 150 to operate the discharge unit 133. Thereby, the gas sample containing the target substance (gas molecule) to be detected is guided from the suction port 120A to the suction channel 120B, the sensor chip 110, the discharge channel 120C, and the discharge port 120D.

The sensor chip 110 is a sensor that incorporates a plurality of metal nanostructures and uses localized surface plasmon resonance. In such a sensor chip 110, an enhanced electric field is formed between the metal nanostructures by laser light, and when gas molecules enter the enhanced electric field, Raman scattered light and Rayleigh scattered light including information on molecular vibrations are generated. Occur.
These Rayleigh scattered light and Raman scattered light enter the filter 136 through the optical unit 135, and the Rayleigh scattered light is separated by the filter 136, and the Raman scattered light enters the wavelength variable interference filter 5. Then, the signal processing unit 144 controls the voltage control unit 146 to adjust the voltage applied to the wavelength variable interference filter 5, and causes the wavelength variable interference filter 5 to split the Raman scattered light corresponding to the gas molecule to be detected. . Thereafter, when the dispersed light is received by the light receiving element 137, a light reception signal corresponding to the amount of received light is output to the signal processing unit 144 via the light receiving circuit 147.
The signal processing unit 144 compares the spectrum data of the Raman scattered light corresponding to the gas molecule to be detected obtained as described above and the data stored in the ROM, and determines whether or not the target gas molecule is the target gas molecule. To determine the substance. Further, the signal processing unit 144 displays the result information on the display unit 141 or outputs the result information from the connection unit 142 to the outside.

  10 and 11 exemplify the gas detection device 100 that performs gas detection from the Raman scattered light obtained by separating the Raman scattered light by the wavelength variable interference filter 5. You may use as a gas detection apparatus which specifies gas classification by detecting the light absorbency of. In this case, a gas sensor that allows gas to flow into the sensor and detects light absorbed by the gas in the incident light is used as the optical module of the present invention. A gas detection device that analyzes and discriminates the gas flowing into the sensor by such a gas sensor is an electronic apparatus of the present invention. Even in such a configuration, the gas component can be detected by using the variable wavelength interference filter of the present invention.

In addition, the system for detecting the presence of a specific substance is not limited to the detection of the gas as described above, but a non-invasive measuring device for saccharides by near-infrared spectroscopy, and non-invasive information on food, living body, minerals, etc. A substance component analyzer such as a measuring device can be exemplified.
Hereinafter, a food analyzer will be described as an example of the substance component analyzer.

FIG. 12 is a diagram illustrating a schematic configuration of a food analysis apparatus which is an example of an electronic apparatus using the variable wavelength interference filter 5. Although the wavelength variable interference filter 5 is used here, the wavelength variable interference filters 5A, 5B, and 5C may be used. Furthermore, it is good also as a structure using the optical filter device 600 like 5th embodiment in which such a wavelength variable interference filter 5, 5A, 5B, 5C was accommodated.
As shown in FIG. 12, the food analysis device 200 includes a detector 210 (optical module), a control unit 220, and a display unit 230. The detector 210 includes a light source 211 that emits light, an imaging lens 212 into which light from the measurement target is introduced, a wavelength variable interference filter 5 that splits the light introduced from the imaging lens 212, and the dispersed light. And an imaging unit 213 (detection unit) for detecting.
In addition, the control unit 220 controls the light source control unit 221 that controls the turning on / off of the light source 211 and the brightness control at the time of lighting, the voltage control unit 222 that controls the wavelength variable interference filter 5, and the imaging unit 213. , A detection control unit 223 that acquires a spectral image captured by the imaging unit 213, a signal processing unit 224, and a storage unit 225.

  In the food analyzer 200, when the system is driven, the light source 211 is controlled by the light source control unit 221, and light is irradiated from the light source 211 to the measurement object. Then, the light reflected by the measurement object enters the wavelength variable interference filter 5 through the imaging lens 212. The variable wavelength interference filter 5 is applied with a voltage capable of dispersing a desired wavelength under the control of the voltage control unit 222, and the dispersed light is imaged by an imaging unit 213 configured by, for example, a CCD camera or the like. The captured light is accumulated in the storage unit 225 as a spectral image. In addition, the signal processing unit 224 controls the voltage control unit 222 to change the voltage value applied to the wavelength tunable interference filter 5, and acquires a spectral image for each wavelength.

Then, the signal processing unit 224 performs arithmetic processing on the data of each pixel in each image accumulated in the storage unit 225, and obtains a spectrum at each pixel. In addition, the storage unit 225 stores, for example, information related to food components with respect to the spectrum, and the signal processing unit 224 analyzes the obtained spectrum data based on the information related to food stored in the storage unit 225. The food component contained in the detection target and the content thereof are obtained. Moreover, a food calorie, a freshness, etc. are computable from the obtained food component and content. Furthermore, by analyzing the spectral distribution in the image, it is possible to extract a portion of the food to be inspected that has reduced freshness, and to detect foreign substances contained in the food. Can also be implemented.
Then, the signal processing unit 224 performs processing for causing the display unit 230 to display information such as the component and content of the food to be inspected and the calories and freshness obtained as described above.

FIG. 12 shows an example of the food analysis apparatus 200, but it can also be used as a non-invasive measurement apparatus for other information as described above with a substantially similar configuration. For example, it can be used as a biological analyzer for analyzing biological components such as measurement and analysis of body fluid components such as blood. As such a bioanalytical device, for example, a device that detects ethyl alcohol as a device that measures a body fluid component such as blood, it can be used as a drunk driving prevention device that detects the drunk state of the driver. Further, it can also be used as an electronic endoscope system provided with such a biological analyzer.
Furthermore, it can also be used as a mineral analyzer for performing component analysis of minerals.

Furthermore, the variable wavelength interference filter, the optical module, and the electronic apparatus of the present invention can be applied to the following apparatuses.
For example, it is possible to transmit data using light of each wavelength by changing the intensity of light of each wavelength over time. In this case, light of a specific wavelength is transmitted by a wavelength variable interference filter provided in the optical module. The data transmitted by the light of the specific wavelength can be extracted by separating the light and receiving the light at the light receiving unit, and the electronic data having such a data extraction optical module can be used to extract the light data of each wavelength. By processing, optical communication can be performed.

Further, the electronic apparatus can be applied to a spectroscopic camera, a spectroscopic analyzer, or the like that captures a spectroscopic image by dispersing light with the variable wavelength interference filter of the present invention. An example of such a spectroscopic camera is an infrared camera incorporating a wavelength variable interference filter.
FIG. 13 is a schematic diagram showing a schematic configuration of the spectroscopic camera. As shown in FIG. 13, the spectroscopic camera 300 includes a camera body 310, an imaging lens unit 320, and an imaging unit 330 (detection unit).
The camera body 310 is a part that is gripped and operated by a user.
The imaging lens unit 320 is provided in the camera body 310 and guides incident image light to the imaging unit 330. As shown in FIG. 13, the imaging lens unit 320 includes an objective lens 321, an imaging lens 322, and a wavelength variable interference filter 5 provided between these lenses.
The imaging unit 330 includes a light receiving element, and images the image light guided by the imaging lens unit 320.
In such a spectroscopic camera 300, a spectral image of light having a desired wavelength can be captured by transmitting light having a wavelength to be imaged by the variable wavelength interference filter 5.

Furthermore, the wavelength tunable interference filter of the present invention may be used as a bandpass filter. For example, only light in a narrow band centered on a predetermined wavelength out of light in a predetermined wavelength range emitted from the light emitting element can be wavelength-variable. It can also be used as an optical laser device that spectrally transmits through an interference filter.
In addition, the tunable interference filter of the present invention may be used as a biometric authentication device, and can be applied to authentication devices such as blood vessels, fingerprints, retinas, and irises using light in the near infrared region and visible region.

  Furthermore, an optical module and an electronic device can be used as a concentration detection device. In this case, the infrared energy (infrared light) emitted from the substance is spectrally analyzed by the variable wavelength interference filter, and the analyte concentration in the sample is measured.

  As described above, the variable wavelength interference filter, the optical module, and the electronic apparatus of the present invention can be applied to any device that splits predetermined light from incident light. Since the wavelength tunable interference filter according to the present invention can split a plurality of wavelengths with one device as described above, it is possible to accurately measure a spectrum of a plurality of wavelengths and detect a plurality of components. it can. Therefore, compared with the conventional apparatus which takes out a desired wavelength with a plurality of devices, it is possible to promote downsizing of the optical module and the electronic apparatus, and for example, it can be suitably used as a portable or in-vehicle optical device.

  In addition, the specific structure for carrying out the present invention can be appropriately changed to another structure or the like as long as the object of the present invention can be achieved.

  DESCRIPTION OF SYMBOLS 1 ... Color measuring apparatus (electronic device), 3 ... Color measuring sensor (optical module), 5, 5A, 5B, 5C ... Wavelength variable interference filter, 31 ... Detection part, 51 ... Fixed board | substrate (1st board | substrate, 2nd board | substrate) ), 52... Movable substrate (first substrate / second substrate), 54... Fixed reflection film (first reflection film / second reflection film), 55 .. movable reflection film (first reflection film / second reflection film), 56 ... Electrostatic actuator (gap changing part), 561 ... Fixed side antistatic electrode (second electrode), 562 ... Movable electrode (first electrode), 565 ... Fixed electrode (first electrode), 563 ... Fixed inner electrode ( Inner drive electrode), 564... Fixed outer electrode (outer drive electrode), 566... Movable inner electrode (inner drive electrode), 567... Movable outer electrode (outer drive electrode), 100. ), 200 ... Food analyzer (electronic device), 300 Spectroscopic camera (electronic device), 521... Movable part, 522. Holding part, 600... Optical filter device, 610 .. casing, 613 .. incident side glass window (light guide part), 614. ), 5621, 5651... Inner drive electrode facing region, 5622, 5552... Outer drive electrode facing region, Ar1... Optical interference region, G1... Reflection film gap, G2. G4: gap between outer electrodes.

Claims (10)

A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate;
With
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The second reflective film is electrically connected to the first electrode ;
In the second substrate, a driving electrode is disposed outside the light interference region in a plan view of the second substrate viewed from the substrate thickness direction.
The first electrode is further provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction.
The variable wavelength interference filter according to claim 1, wherein the gap changing unit includes the driving electrode and the first electrode provided in the driving electrode facing region . The tunable interference filter according to claim 1,
The second substrate is provided with a second electrode at a position overlapping the light interference region in a plan view when the second substrate is viewed from the substrate thickness direction.
The second reflective film is provided on the second substrate via the second electrode,
The variable wavelength interference filter, wherein the first electrode is electrically connected to the second electrode. The tunable interference filter according to claim 1,
The first substrate is a fixed substrate that does not change shape,
The second substrate includes a movable part provided with the second reflective film, and a holding part that holds the movable part, and the movable part is changed with respect to the first substrate by a shape change of the holding part. It is a movable substrate that can be advanced and retracted,
The variable wavelength interference filter according to claim 1, wherein the gap changing unit changes the gap between the reflection films by moving the movable unit forward and backward with respect to the first substrate. In the wavelength variable interference filter according to any one of claims 1 to 3 ,
The wavelength variable interference filter, wherein the first electrode has translucency. In the wavelength variable interference filter according to any one of claims 1 to 4 ,
The wavelength variable interference filter, wherein the driving electrode includes an inner driving electrode and an outer driving electrode provided at a position farther from the optical interference region than the inner driving electrode. The tunable interference filter according to any one of claims 1 to 5 ,
The variable wavelength interference filter according to claim 1, wherein a dimension of an interelectrode gap between the driving electrode and the driving electrode facing region of the first electrode is larger than a dimension of the gap between the reflection films. The tunable interference filter according to claim 5 ,
Wherein the first electrode comprises an inner driving electrode facing region that faces the inner driving electrode, and the outer driving electrode facing region facing the outer driving electrode,
The dimension of the outer electrode gap between the outer driving electrode and the outer driving electrode facing area is larger than the dimension of the inner electrode gap between the inner driving electrode and the inner driving electrode facing area. A wavelength tunable interference filter, which is small and larger than a dimension of the gap between the reflection films. A first substrate, a second substrate facing the first substrate, a first reflective film provided on the first substrate,
A second reflection film provided on the second substrate and facing the first reflection film via a gap between the reflection films, a gap changing unit for changing the gap between the reflection films, and provided on the first substrate A tunable interference filter having a first electrode;
A housing that houses the variable wavelength interference filter;
With
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode, and the second reflective film is electrically connected to the first electrode ,
In the second substrate, a driving electrode is disposed outside the light interference region in a plan view of the second substrate viewed from the substrate thickness direction.
The first electrode is further provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction.
The gap changing section includes the driving electrode and the first electrode provided in the driving electrode facing region . A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate;
A detection unit for detecting light extracted by the first reflective film and the second reflective film,
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The second reflective film is electrically connected to the first electrode ;
In the second substrate, a driving electrode is disposed outside the light interference region in a plan view of the second substrate viewed from the substrate thickness direction.
The first electrode is further provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction.
The optical module , wherein the gap changing unit includes the driving electrode and the first electrode provided in the driving electrode facing region . A first substrate;
A second substrate facing the first substrate;
A first reflective film provided on the first substrate;
A second reflective film provided on the second substrate and facing the first reflective film via a gap between the reflective films;
A gap changing section for changing the gap between the reflection films;
A first electrode provided on the first substrate;
With
The first electrode includes a light interference region in which the first reflective film and the second reflective film are provided to face each other in a plan view of the first substrate and the second substrate viewed from the substrate thickness direction. Provided in the area,
The first reflective film is provided on the first substrate via the first electrode,
The second reflective film is electrically connected to the first electrode ;
In the second substrate, a driving electrode is disposed outside the light interference region in a plan view of the second substrate viewed from the substrate thickness direction.
The first electrode is further provided in a region including the optical interference region and a driving electrode facing region facing the driving electrode in a plan view of the first substrate viewed from the substrate thickness direction.
The gap changing section includes the driving electrode and the first electrode provided in the driving electrode facing region .

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