JP5868615B2 - 光音響ガスセンサ用の集積化されたir源および音響検出器 - Google Patents
光音響ガスセンサ用の集積化されたir源および音響検出器 Download PDFInfo
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- JP5868615B2 JP5868615B2 JP2011120579A JP2011120579A JP5868615B2 JP 5868615 B2 JP5868615 B2 JP 5868615B2 JP 2011120579 A JP2011120579 A JP 2011120579A JP 2011120579 A JP2011120579 A JP 2011120579A JP 5868615 B2 JP5868615 B2 JP 5868615B2
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- gas sensor
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- photoacoustic gas
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/37—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using pneumatic detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
Description
20a 外面
21 構成要素パッケージ
22 測定セル体積
23 ガス透過性膜
24 穴
25 平面型赤外線源
26 波長選択フィルタ
27 MEMS型マイクロホン
28 開口部
29 内部バッフル構造
30 開口部
31 外部リード
32 ワイヤボンド
36 処理回路
Claims (14)
- 赤外線源と、集積化マイクロホンと、赤外波長選択帯域通過フィルタと、を一緒に収容した集積化構成要素パッケージを備え、
前記集積化構成要素パッケージは、ガス測定セルに取り付け可能であり、
前記赤外線源及び前記赤外波長選択帯域通過フィルタは、該赤外線源から発生した変調した赤外線が前記赤外波長選択帯域通過フィルタを通って前記ガス測定セル内の目標ガスに照射されるように前記集積化構成要素パッケージ内に担持され、
前記集積化マイクロホンは、前記変調された赤外線の照射により前記ガス測定セル内の目標ガスに発生した変調された音圧波を検出するように前記集積化構成要素パッケージ内に担持され、
前記集積化構成要素パッケージは、前記赤外波長選択帯域通過フィルタによって覆われた第1の開口部と、前記変調された音圧波が通過する第2の開口部であって、該第2の開口部を通過した音圧波は前記集積化マイクロホンに至る、前記第2の開口部と、前記赤外線源からの放射が前記集積化マイクロホンに直接結合することを防止すると共に前記赤外線源を封止するバッフル構造と、を備える、光音響ガスセンサ構成要素。 - 請求項1に記載の光音響ガスセンサ構成要素において、前記集積化構成要素パッケージ内の半導体基板上に形成された信号収集および信号処理回路をさらに含む、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記マイクロホンがMEMS型トランスデューサとして実装される、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記集積化構成要素パッケージが、金属缶トランジスタ外形パッケージまたは他の工業標準半導体デバイス・パッケージング・フォーマットの要件に適合する、光音響ガスセンサ構成要素。
- 請求項2に記載の光音響ガスセンサ構成要素において、前記集積化構成要素パッケージが、金属缶トランジスタ外形パッケージまたは他の工業標準半導体デバイス・パッケージング・フォーマットの要件に適合する、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記赤外線源がほぼ平面である、光音響ガスセンサ構成要素。
- 請求項2に記載の光音響ガスセンサ構成要素において、前記赤外線源がほぼ平面である、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記赤外線源が薄膜導体を含む、光音響ガスセンサ構成要素。
- 請求項2に記載の光音響ガスセンサ構成要素において、前記赤外線源が薄膜導体を含む、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記赤外線源がフィラメント導体を含む、光音響ガスセンサ構成要素。
- 請求項2に記載の光音響ガスセンサ構成要素において、前記赤外線源がフィラメント導体を含む、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記赤外線源が赤外発光ダイオードを含む、光音響ガスセンサ構成要素。
- 請求項2に記載の光音響ガスセンサ構成要素において、前記赤外線源が赤外発光ダイオードを含む、光音響ガスセンサ構成要素。
- 請求項1に記載の光音響ガスセンサ構成要素において、前記波長選択帯域通過フィルタが、少なくとも誘電体またはダイクロイック型IRフィルタを含むクラスから選択される、光音響ガスセンサ構成要素。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US12/792,822 | 2010-06-03 | ||
US12/792,822 US8695402B2 (en) | 2010-06-03 | 2010-06-03 | Integrated IR source and acoustic detector for photoacoustic gas sensor |
Publications (2)
Publication Number | Publication Date |
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JP2011252906A JP2011252906A (ja) | 2011-12-15 |
JP5868615B2 true JP5868615B2 (ja) | 2016-02-24 |
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JP2011120579A Active JP5868615B2 (ja) | 2010-06-03 | 2011-05-30 | 光音響ガスセンサ用の集積化されたir源および音響検出器 |
Country Status (6)
Country | Link |
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US (1) | US8695402B2 (ja) |
EP (1) | EP2392916B1 (ja) |
JP (1) | JP5868615B2 (ja) |
KR (1) | KR101837073B1 (ja) |
CN (1) | CN102279156B (ja) |
CA (1) | CA2741788A1 (ja) |
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-
2010
- 2010-06-03 US US12/792,822 patent/US8695402B2/en active Active
-
2011
- 2011-05-27 CA CA2741788A patent/CA2741788A1/en not_active Abandoned
- 2011-05-27 EP EP11167903.1A patent/EP2392916B1/en active Active
- 2011-05-30 JP JP2011120579A patent/JP5868615B2/ja active Active
- 2011-05-31 KR KR1020110051793A patent/KR101837073B1/ko active IP Right Grant
- 2011-06-02 CN CN201110184435.2A patent/CN102279156B/zh active Active
Also Published As
Publication number | Publication date |
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CN102279156B (zh) | 2017-03-01 |
EP2392916A2 (en) | 2011-12-07 |
CA2741788A1 (en) | 2011-12-03 |
KR20110132982A (ko) | 2011-12-09 |
KR101837073B1 (ko) | 2018-03-09 |
JP2011252906A (ja) | 2011-12-15 |
EP2392916B1 (en) | 2019-11-27 |
US20110296900A1 (en) | 2011-12-08 |
CN102279156A (zh) | 2011-12-14 |
EP2392916A3 (en) | 2012-02-15 |
US8695402B2 (en) | 2014-04-15 |
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