JP5845833B2 - シリケート複合研磨パッド - Google Patents

シリケート複合研磨パッド Download PDF

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Publication number
JP5845833B2
JP5845833B2 JP2011246632A JP2011246632A JP5845833B2 JP 5845833 B2 JP5845833 B2 JP 5845833B2 JP 2011246632 A JP2011246632 A JP 2011246632A JP 2011246632 A JP2011246632 A JP 2011246632A JP 5845833 B2 JP5845833 B2 JP 5845833B2
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JP
Japan
Prior art keywords
polymer
silicate
polishing
microelement
polishing pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2011246632A
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English (en)
Japanese (ja)
Other versions
JP2012101354A5 (enExample
JP2012101354A (ja
Inventor
アンドリュー・アール・ワンク
ドナ・エム・オールデン
ジョセフ・ケー・ソォー
ロバート・ジョルジョーネ
マーク・イー・ガッツェ
デヴィッド・ドロップ
コリン・エフ・キャメロン
マイ・ティウ・バン
シャウン・ライリー
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DuPont Electronic Materials Holding Inc
Original Assignee
Rohm and Haas Electronic Materials CMP Holdings Inc
DuPont Electronic Materials Holding Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm and Haas Electronic Materials CMP Holdings Inc, DuPont Electronic Materials Holding Inc filed Critical Rohm and Haas Electronic Materials CMP Holdings Inc
Publication of JP2012101354A publication Critical patent/JP2012101354A/ja
Publication of JP2012101354A5 publication Critical patent/JP2012101354A5/ja
Application granted granted Critical
Publication of JP5845833B2 publication Critical patent/JP5845833B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0054—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by impressing abrasive powder in a matrix
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
JP2011246632A 2010-11-12 2011-11-10 シリケート複合研磨パッド Active JP5845833B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/945,557 US8257152B2 (en) 2010-11-12 2010-11-12 Silicate composite polishing pad
US12/945,557 2010-11-12

Publications (3)

Publication Number Publication Date
JP2012101354A JP2012101354A (ja) 2012-05-31
JP2012101354A5 JP2012101354A5 (enExample) 2015-03-05
JP5845833B2 true JP5845833B2 (ja) 2016-01-20

Family

ID=45999137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011246632A Active JP5845833B2 (ja) 2010-11-12 2011-11-10 シリケート複合研磨パッド

Country Status (7)

Country Link
US (1) US8257152B2 (enExample)
JP (1) JP5845833B2 (enExample)
KR (1) KR101915318B1 (enExample)
CN (1) CN102528647B (enExample)
DE (1) DE102011117867B4 (enExample)
FR (1) FR2967367B1 (enExample)
TW (1) TWI515082B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8894732B2 (en) * 2012-05-11 2014-11-25 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Hollow polymeric-alkaline earth metal oxide composite
US8888877B2 (en) 2012-05-11 2014-11-18 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Forming alkaline-earth metal oxide polishing pad
US9073172B2 (en) * 2012-05-11 2015-07-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Alkaline-earth metal oxide-polymeric polishing pad
US20150306731A1 (en) * 2014-04-25 2015-10-29 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Chemical mechanical polishing pad
US9731398B2 (en) * 2014-08-22 2017-08-15 Rohm And Haas Electronic Materials Cmp Holding, Inc. Polyurethane polishing pad
US11524390B2 (en) * 2017-05-01 2022-12-13 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Methods of making chemical mechanical polishing layers having improved uniformity
CN112743443A (zh) * 2019-10-29 2021-05-04 山西钜星超硬工具制品有限公司 一种珩磨油石
CN112812743A (zh) * 2019-11-15 2021-05-18 圣戈班磨料磨具有限公司 磨料制品及其形成方法

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL162006C (nl) * 1973-09-26 Norddeutsche Schleifmittel Ind Slijpwerktuig.
MY114512A (en) 1992-08-19 2002-11-30 Rodel Inc Polymeric substrate with polymeric microelements
US5334335A (en) * 1992-10-19 1994-08-02 Clearfix Corporation Compositions and methods for repairing and removing scratches and other imperfections from plastic surfaces
US5934478A (en) * 1995-07-25 1999-08-10 Canon Kabushiki Kaisha Gas stream classifier and process for producing toner
US5976000A (en) * 1996-05-28 1999-11-02 Micron Technology, Inc. Polishing pad with incompressible, highly soluble particles for chemical-mechanical planarization of semiconductor wafers
US6126532A (en) * 1997-04-18 2000-10-03 Cabot Corporation Polishing pads for a semiconductor substrate
GB2334205B (en) * 1998-02-12 2001-11-28 Shinetsu Handotai Kk Polishing method for semiconductor wafer and polishing pad used therein
US6585574B1 (en) * 1998-06-02 2003-07-01 Brian Lombardo Polishing pad with reduced moisture absorption
US6117000A (en) * 1998-07-10 2000-09-12 Cabot Corporation Polishing pad for a semiconductor substrate
US6641463B1 (en) * 1999-02-06 2003-11-04 Beaver Creek Concepts Inc Finishing components and elements
US6454644B1 (en) * 2000-07-31 2002-09-24 Ebara Corporation Polisher and method for manufacturing same and polishing tool
US6659846B2 (en) * 2001-09-17 2003-12-09 Agere Systems, Inc. Pad for chemical mechanical polishing
US6913517B2 (en) * 2002-05-23 2005-07-05 Cabot Microelectronics Corporation Microporous polishing pads
US7579071B2 (en) * 2002-09-17 2009-08-25 Korea Polyol Co., Ltd. Polishing pad containing embedded liquid microelements and method of manufacturing the same
US20050176251A1 (en) * 2004-02-05 2005-08-11 Duong Chau H. Polishing pad with releasable slick particles
US7195544B2 (en) * 2004-03-23 2007-03-27 Cabot Microelectronics Corporation CMP porous pad with component-filled pores
TWI293266B (en) * 2004-05-05 2008-02-11 Iv Technologies Co Ltd A single-layer polishing pad and a method of producing the same
US20060154579A1 (en) * 2005-01-12 2006-07-13 Psiloquest Thermoplastic chemical mechanical polishing pad and method of manufacture
US7591865B2 (en) * 2005-01-28 2009-09-22 Saint-Gobain Abrasives, Inc. Method of forming structured abrasive article
US20070049164A1 (en) * 2005-08-26 2007-03-01 Thomson Clifford O Polishing pad and method for manufacturing polishing pads
RU2301141C1 (ru) * 2005-11-30 2007-06-20 Открытое акционерное общество "ФОМОС-МАТЕРИАЛС" Способ обработки подложек монокристаллического лантангаллиевого силиката
TW200817497A (en) * 2006-08-14 2008-04-16 Nippon Chemical Ind Polishing composition for semiconductor wafer, production method thereof, and polishing method
US8083820B2 (en) * 2006-12-22 2011-12-27 3M Innovative Properties Company Structured fixed abrasive articles including surface treated nano-ceria filler, and method for making and using the same
JP2009184858A (ja) * 2008-02-04 2009-08-20 Nippon Chem Ind Co Ltd ヒドラジンが固定化されたシリカ粒子よりなるコロイダルシリカ
TW201016391A (en) * 2008-10-20 2010-05-01 Bestac Advanced Material Co Ltd Polishing pad having abrasive grains and method for making the same

Also Published As

Publication number Publication date
US8257152B2 (en) 2012-09-04
FR2967367B1 (fr) 2015-05-22
US20120122381A1 (en) 2012-05-17
KR20120057517A (ko) 2012-06-05
CN102528647A (zh) 2012-07-04
FR2967367A1 (fr) 2012-05-18
TW201228769A (en) 2012-07-16
CN102528647B (zh) 2014-12-24
KR101915318B1 (ko) 2018-11-05
DE102011117867A1 (de) 2012-05-16
DE102011117867B4 (de) 2025-11-20
JP2012101354A (ja) 2012-05-31
TWI515082B (zh) 2016-01-01

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