JP5838106B2 - 荷電粒子線装置用防音カバー及び荷電粒子線装置 - Google Patents

荷電粒子線装置用防音カバー及び荷電粒子線装置 Download PDF

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Publication number
JP5838106B2
JP5838106B2 JP2012055233A JP2012055233A JP5838106B2 JP 5838106 B2 JP5838106 B2 JP 5838106B2 JP 2012055233 A JP2012055233 A JP 2012055233A JP 2012055233 A JP2012055233 A JP 2012055233A JP 5838106 B2 JP5838106 B2 JP 5838106B2
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JP
Japan
Prior art keywords
soundproof cover
charged particle
particle beam
cylindrical body
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012055233A
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English (en)
Japanese (ja)
Other versions
JP2013191333A5 (enExample
JP2013191333A (ja
Inventor
武藤　大輔
大輔 武藤
秀樹 菊池
秀樹 菊池
浩大 上田
浩大 上田
長沖　功
功 長沖
高野　靖
靖 高野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Priority to JP2012055233A priority Critical patent/JP5838106B2/ja
Priority to US14/378,688 priority patent/US20150041676A1/en
Priority to CN201380007222.XA priority patent/CN104081491A/zh
Priority to PCT/JP2013/053788 priority patent/WO2013136909A1/ja
Priority to DE112013000944.7T priority patent/DE112013000944T8/de
Publication of JP2013191333A publication Critical patent/JP2013191333A/ja
Publication of JP2013191333A5 publication Critical patent/JP2013191333A5/ja
Application granted granted Critical
Publication of JP5838106B2 publication Critical patent/JP5838106B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/16—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/172—Methods or devices for protecting against, or for damping, noise or other acoustic waves in general using resonance effects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0216—Means for avoiding or correcting vibration effects

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Soundproofing, Sound Blocking, And Sound Damping (AREA)
JP2012055233A 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置 Expired - Fee Related JP5838106B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012055233A JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置
US14/378,688 US20150041676A1 (en) 2012-03-13 2013-02-18 Soundproof cover for charged-particle beam device, and charged-particle beam device
CN201380007222.XA CN104081491A (zh) 2012-03-13 2013-02-18 带电粒子线装置用隔音罩以及带电粒子线装置
PCT/JP2013/053788 WO2013136909A1 (ja) 2012-03-13 2013-02-18 荷電粒子線装置用防音カバー及び荷電粒子線装置
DE112013000944.7T DE112013000944T8 (de) 2012-03-13 2013-02-18 Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012055233A JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2013191333A JP2013191333A (ja) 2013-09-26
JP2013191333A5 JP2013191333A5 (enExample) 2015-02-05
JP5838106B2 true JP5838106B2 (ja) 2015-12-24

Family

ID=49160828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012055233A Expired - Fee Related JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置

Country Status (5)

Country Link
US (1) US20150041676A1 (enExample)
JP (1) JP5838106B2 (enExample)
CN (1) CN104081491A (enExample)
DE (1) DE112013000944T8 (enExample)
WO (1) WO2013136909A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6604704B2 (ja) * 2014-12-22 2019-11-13 アプライド マテリアルズ インコーポレイテッド 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法
JP2017050046A (ja) 2015-08-31 2017-03-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US11687008B2 (en) * 2018-02-22 2023-06-27 Applied Materials, Inc. Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769706B2 (ja) * 1993-01-21 1995-07-31 株式会社東和製作所 吸音ゴム板
JP2006079870A (ja) * 2004-09-08 2006-03-23 Hitachi High-Technologies Corp 荷電粒子線装置
JP2008009014A (ja) * 2006-06-28 2008-01-17 Kobe Steel Ltd 多孔質防音構造体
JP5308006B2 (ja) * 2006-11-02 2013-10-09 株式会社神戸製鋼所 吸音構造体
NL1036433A1 (nl) * 2008-01-31 2009-08-03 Asml Netherlands Bv Lithographic apparatus, method and device manufacturing method.
JP2009220652A (ja) * 2008-03-14 2009-10-01 Tokai Rubber Ind Ltd 防音カバー
WO2011158458A1 (ja) * 2010-06-16 2011-12-22 株式会社 日立ハイテクノロジーズ 荷電粒子線装置および防音カバー
JP5537386B2 (ja) * 2010-11-09 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
DE112013000944T5 (de) 2014-12-11
JP2013191333A (ja) 2013-09-26
CN104081491A (zh) 2014-10-01
DE112013000944T8 (de) 2014-12-24
WO2013136909A1 (ja) 2013-09-19
US20150041676A1 (en) 2015-02-12

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