JP2013191333A5 - - Google Patents

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Publication number
JP2013191333A5
JP2013191333A5 JP2012055233A JP2012055233A JP2013191333A5 JP 2013191333 A5 JP2013191333 A5 JP 2013191333A5 JP 2012055233 A JP2012055233 A JP 2012055233A JP 2012055233 A JP2012055233 A JP 2012055233A JP 2013191333 A5 JP2013191333 A5 JP 2013191333A5
Authority
JP
Japan
Prior art keywords
soundproof cover
charged particle
cylindrical body
particle beam
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012055233A
Other languages
English (en)
Japanese (ja)
Other versions
JP5838106B2 (ja
JP2013191333A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2012055233A external-priority patent/JP5838106B2/ja
Priority to JP2012055233A priority Critical patent/JP5838106B2/ja
Priority to PCT/JP2013/053788 priority patent/WO2013136909A1/ja
Priority to DE112013000944.7T priority patent/DE112013000944T8/de
Priority to CN201380007222.XA priority patent/CN104081491A/zh
Priority to US14/378,688 priority patent/US20150041676A1/en
Publication of JP2013191333A publication Critical patent/JP2013191333A/ja
Publication of JP2013191333A5 publication Critical patent/JP2013191333A5/ja
Publication of JP5838106B2 publication Critical patent/JP5838106B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012055233A 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置 Expired - Fee Related JP5838106B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012055233A JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置
US14/378,688 US20150041676A1 (en) 2012-03-13 2013-02-18 Soundproof cover for charged-particle beam device, and charged-particle beam device
DE112013000944.7T DE112013000944T8 (de) 2012-03-13 2013-02-18 Störschalldämmende Abdeckung für Ladungsteilchenstrahlvorrichtung und Ladungsteilchenstrahlvorrichtung
CN201380007222.XA CN104081491A (zh) 2012-03-13 2013-02-18 带电粒子线装置用隔音罩以及带电粒子线装置
PCT/JP2013/053788 WO2013136909A1 (ja) 2012-03-13 2013-02-18 荷電粒子線装置用防音カバー及び荷電粒子線装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012055233A JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2013191333A JP2013191333A (ja) 2013-09-26
JP2013191333A5 true JP2013191333A5 (enExample) 2015-02-05
JP5838106B2 JP5838106B2 (ja) 2015-12-24

Family

ID=49160828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012055233A Expired - Fee Related JP5838106B2 (ja) 2012-03-13 2012-03-13 荷電粒子線装置用防音カバー及び荷電粒子線装置

Country Status (5)

Country Link
US (1) US20150041676A1 (enExample)
JP (1) JP5838106B2 (enExample)
CN (1) CN104081491A (enExample)
DE (1) DE112013000944T8 (enExample)
WO (1) WO2013136909A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6604704B2 (ja) * 2014-12-22 2019-11-13 アプライド マテリアルズ インコーポレイテッド 基板の検査装置、基板の検査方法、大面積基板検査装置、及びその操作方法
JP2017050046A (ja) 2015-08-31 2017-03-09 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6916281B2 (ja) * 2018-02-22 2021-08-11 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ ディスプレイ製造用基板上での自動限界寸法測定方法、ディスプレイ製造用大面積基板の検査方法、ディスプレイ製造用大面積基板の検査装置及びその操作方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769706B2 (ja) * 1993-01-21 1995-07-31 株式会社東和製作所 吸音ゴム板
JP2006079870A (ja) * 2004-09-08 2006-03-23 Hitachi High-Technologies Corp 荷電粒子線装置
JP2008009014A (ja) * 2006-06-28 2008-01-17 Kobe Steel Ltd 多孔質防音構造体
JP5308006B2 (ja) * 2006-11-02 2013-10-09 株式会社神戸製鋼所 吸音構造体
NL1036433A1 (nl) * 2008-01-31 2009-08-03 Asml Netherlands Bv Lithographic apparatus, method and device manufacturing method.
JP2009220652A (ja) * 2008-03-14 2009-10-01 Tokai Rubber Ind Ltd 防音カバー
WO2011158458A1 (ja) * 2010-06-16 2011-12-22 株式会社 日立ハイテクノロジーズ 荷電粒子線装置および防音カバー
JP5537386B2 (ja) * 2010-11-09 2014-07-02 株式会社日立ハイテクノロジーズ 荷電粒子線装置

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