JP5822042B1 - Inspection jig, substrate inspection apparatus, and manufacturing method of inspection jig - Google Patents

Abstract

An inspection jig and a substrate inspection apparatus capable of improving the contact stability of a probe with respect to an inspection point are provided. A counter plate 51 and a support plate 61 are provided. The counter plate 51 has a current insertion hole Hf for inserting a probe Pf and a detection insertion hole Hs for inserting a probe Ps. A plurality of pairs are formed as a pair, and the support plate 61 is provided corresponding to the current insertion hole Hf and the detection insertion hole Hs, and includes a support hole H61 and a probe Ps for inserting the probe Pf. A support hole H61 for insertion is formed, and each insertion hole of the current insertion hole Hf and the detection insertion hole Hs to be paired has wall surfaces F1 and S1 on the inner wall surface away from the other insertion hole. As the distance from the facing surface F increases, the distance from the other insertion hole is inclined. [Selection] Figure 5

Description

The present invention is inspecting jig for contacting a probe to the inspection point which is provided on the substrate to be inspected, a substrate inspection apparatus having the same, and a method of manufacturing a test fixture.

  The inspection jig supplies electric power (electric signal, etc.) from the inspection device to a predetermined inspection position to the inspection target part of the inspection object via the contact, and detects an electric signal from the inspection target part. Is used to detect the electrical characteristics of the inspection target part, perform an operation test, and the like.

  Examples of substrates to be inspected include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode plates for liquid crystal displays and plasma displays, package substrates for semiconductor packages, film carriers, semiconductor wafers, This corresponds to a semiconductor substrate such as a semiconductor chip or a CSP (Chip size package). In the present specification, inspection target portions set on these substrates are referred to as “inspection points”.

  For example, when an electric or electronic component such as a semiconductor circuit such as an IC or a resistor is mounted on a substrate to be inspected, the target portion to be inspected is an electrode such as a wiring or a solder bump. In that case, the wiring formed on the printed wiring board, liquid crystal panel or plasma display panel before mounting the electrical and electronic components to ensure that the target part can accurately transmit electrical signals to those mounted components. The electrical characteristics such as the resistance value between the predetermined inspection points above are measured to judge the quality of the wiring.

  Specifically, the quality of the wiring is determined by bringing the probe for current supply and the tip of the voltage measurement probe into contact with each inspection point, and measuring from the current supply probe to the inspection point. Measure the voltage generated in the wiring between the tips of the voltage measurement probe that supplies current and contacts the inspection point, and the resistance value of the wiring between the predetermined inspection points based on the supply current and the measured voltage Is done by calculating Such a measuring method is known as a four-terminal measuring method.

  There has been known an inspection jig that holds a large number of such probes of 1000 or more (see, for example, Patent Document 1). This inspection jig inserts the probe into the insertion hole formed in the distal end side support body that supports the distal end side of the probe and the insertion hole formed in the rear end side support body that supports the rear end side of the probe. By doing so, a large number of probes are held.

  Such a probe has, for example, a thin wire shape with a diameter of 100 μm or less, and the insertion hole through which the probe is inserted is a fine hole that is slightly larger than the probe diameter.

JP 2009-047512 A

  By the way, there are cases where the inspection point protrudes in a hemispherical shape from the substrate surface, like a solder bump. In such a case, the inclination angle of the bump surface increases as the distance from the bump center increases, and the bump surface becomes nearly perpendicular to the substrate surface. In the above four-terminal measurement method, the current supply probe and the voltage measurement probe need to be in contact with one bump, so that the tips of both probes are separated from each other across the center of the bump. Touch the bump.

  For this reason, when both probes are pressed against the bumps perpendicularly to the substrate surface, both probes are brought into contact with the bump surface while being inclined. Then, due to the inclination of the surfaces, both probes are separated from each other at the tip portions of both probes, and a force acts in the direction in which both probes slide on the surface of the bump. As a result, the contact stability of the probe with respect to the bumps is disadvantageous.

An object of the present invention is to provide an inspection jig , a substrate inspection apparatus , and an inspection jig manufacturing method capable of improving the contact stability of a probe with respect to an inspection point.

An inspection jig according to the present invention is for contacting a rod-shaped current probe for supplying current and a rod-shaped detection probe for detecting voltage with respect to one inspection point provided on a substrate to be inspected. An inspection jig, comprising: a counter plate having a counter surface to be disposed opposite to the substrate; and a support plate disposed opposite to the counter surface of the counter plate. Is a pair of a current insertion hole for inserting the current probe and a detection insertion hole for inserting the detection probe, and a plurality of such pairs are formed. provided corresponding to the insertion hole and the respective detection through hole current, the detection support hole for inserting the current supporting hole and the detection probe for inserting the current probe is formed, the respective conductive The insertion hole for detection and each of the detection insertion holes have a tapered shape that increases in diameter as the distance from the facing surface increases, and the radius of the opening end of the front-side current hole that opens the current insertion hole on the facing surface and its current The center of the current insertion hole and the detection insertion hole that form the pair is the sum of the radius of the opening end of the detection hole where the detection insertion hole that is paired with the detection insertion hole opens on the facing surface. And the current insertion hole is paired with the current insertion hole and the radius of the opening end of the rear end side current hole that opens on the opposite surface opposite to the opposite surface of the counter plate. The sum of the radii of the rear end side detection hole opening ends where the detection insertion holes open on the opposite surface side is larger than the distance between the centers of the pair of the current insertion hole and the detection insertion hole. An edge of the rear end side current hole opening end and the rear end of the pair The edge of the detection hole opening end is continuous, and the edge of the rear end side current hole opening end and the edge of the rear end side detection hole opening end that form the pair are not paired with each other. The edge of the end side current hole opening end is separated from the edge of the rear end side detection hole opening end .

  Moreover, the board | substrate inspection apparatus which concerns on this invention is equipped with the above-mentioned inspection jig.

  According to these configurations, each insertion hole of the current insertion hole and the detection insertion hole that form a pair is inserted into the other insertion hole as the wall surface of the inner wall surface away from the other insertion hole is separated from the opposing surface. Therefore, both the current probe and the detection probe are easily bent in a direction in which the inside is concave. As a result, even when the inspection point has a protruding shape like a solder bump, the angle at which the tips of both probes come into contact with the surface of the inspection point approaches vertical. Thereby, the contact stability of the probe with respect to the inspection point can be improved.

  According to this configuration, each current insertion hole and each detection insertion hole have a tapered shape that increases in diameter as the distance from the opposing surface increases, and the current insertion hole opens at the distal end side current hole opening end that opens on the opposing surface. The sum of the radius and the radius of the open end of the detection hole where the detection insertion hole paired with the current insertion hole opens on the opposite surface is the center of the pair of current insertion hole and detection insertion hole. Since the distance between them is smaller than the distance between them, the open end of the front end current hole and the open end of the front end detection hole are separated from each other. As a result, the front end portion of the current probe and the detection probe are accurately guided to the inspection point of the substrate by the front end side current hole opening end and the front end side detection hole opening end.

  Then, the current insertion hole opens on the opposite surface opposite to the opposing surface of the opposing plate, and the detection current insertion hole that is paired with the radius of the rear end current hole opening end and the current insertion hole is on the opposite surface side. The sum of the radius of the opening end of the rear end side detection hole to be opened is larger than the distance between the centers of the current insertion hole and the detection insertion hole to be the pair, and the rear end side current hole opening end to be the pair. And the end edge of the rear end side detection hole opening end are continuous. As a result, on the opposite surface, the rear end side current hole opening end and the rear end side detection hole opening end that form a pair are connected to form a so-called gourd type. Therefore, the operator can visually confirm the shape of the gourd-shaped hole so that the current insertion hole and the detection insertion hole into which the pair of current probe and detection probe are to be inserted can be identified. Probe mounting workability can be improved.

  Further, the current insertion hole and the detection insertion hole that are the pair are cut in the radius of the current hole cross section that is a cross section of the current insertion hole cut in a direction parallel to the facing surface, and in that direction. The sum of the radius of the cross section of the detection hole, which is the cross section of the detection insertion hole, is such that the distance of the cross section position from the facing surface is at least 3/4 of the depth of the current insertion hole and the detection insertion hole. In the following range, the distance is preferably smaller than the distance between the centers of the current insertion hole and the detection insertion hole.

  About the current insertion hole and the detection insertion hole to be paired, the radius of the current hole cross section which is a cross section of the current insertion hole cut in the direction parallel to the facing surface, and the cross section of the detection insertion hole cut in that direction When the sum of the radius of a certain detection hole cross section is larger than the distance between the centers of the current insertion hole and the detection insertion hole, there is no wall separating the current insertion hole and the detection insertion hole. Therefore, the possibility that the current probe and the detection probe come into contact with each other increases. On the other hand, if the distance from the opposing surface of the cross-sectional position is 3/4 or less of the depth of the insertion hole, the total is smaller than the distance between the centers of the current insertion hole and the detection insertion hole. A wall separating the current probe and the detection probe is provided by 3/4 or more of the depth of the insertion hole. Thereby, a possibility that a current probe and a detection probe may contact is reduced.

  Moreover, it is preferable that the inclination angle with respect to the plate | board thickness direction of the said counter plate of the inner wall surface of each said current insertion hole and each said detection insertion hole exists in the range of 1-5 degree | times.

  In order to separate the opening at the opposite surface while making the opening end on the opposite surface of the pair of current insertion hole and detection insertion hole into a gourd type, the inclination angle is in the range of 1 to 5 degrees. Is preferred.

The inspection jig according to the present invention makes a rod-shaped current probe for supplying a current and a rod-shaped detection probe for detecting a voltage contact one inspection point provided on a substrate to be inspected. An inspection jig for an inspection jig, comprising: a counter plate having a counter surface to be disposed opposite to the substrate; and a support plate disposed opposite to the counter surface of the counter plate. The plate is formed with a plurality of pairs of a current insertion hole for inserting the current probe and a detection insertion hole for inserting the detection probe. the insertion hole and the for each current provided corresponding to the respective detection through hole, the detection support hole for inserting the current supporting hole and the detection probe for inserting the current probe is formed, prior to Each of the current insertion holes and each of the detection insertion holes has a tapered shape that increases in diameter as the distance from the opposing surface increases, and each of the insertion holes for the current insertion hole and the detection insertion hole that form a pair includes: wall surface of the side closer to the other of the insertion hole in the inner wall surface of each other, that extend along the thickness direction of the opposing plate.

According to this configuration, when the current probe and the detection probe try to bend in the direction in which the inside is convex, the wall surface on the side close to the other insertion hole in the inner wall surface of each other interferes with the current probe and the detection probe, The current probe and the detection probe are prevented from bending in a direction in which the inside is convex. As a result, the certainty of bending the current probe and the detection probe in the direction in which the inside is concave is improved, and the certainty of improving the contact stability of the current probe and the detection probe with respect to the inspection point is improved.
In addition, the front end side current hole opening end where the current insertion hole opens in the opposing surface and the front end side detection hole opening end where the detection insertion hole opens in the opposing surface are the current insertion hole and the detection end. It is preferable that the major axis is substantially elliptical along the direction away from the insertion hole.
Further, the rear end side current hole opening end where the current insertion hole opens on the opposite surface opposite to the facing surface and the rear end side detection hole opening end where the detection insertion hole opens on the opposite surface are: The current insertion hole and the detection insertion hole have a substantially elliptical shape along the major axis direction, and the long radius of the rear end side current hole opening end of the current insertion hole and the current insertion hole, The sum of the major radius of the rear end side detection hole opening end of the paired detection insertion hole is the tip side current hole opening end of the pair of current insertion hole and the detection insertion hole of the detection insertion hole. It is preferable that the distance is greater than the distance between the center of the front end side detection hole opening end.

  Further, the counter plate is formed with a thin region that is thinner than the outer peripheral portion of the counter plate, and each of the current insertion holes and each of the detection insertion holes penetrates the thin region. Preferably it is.

  According to this configuration, since the plate thickness that must be penetrated to form the current insertion hole and the detection insertion hole is reduced, the formation of the minute current insertion hole and the detection insertion hole is facilitated.

  Further, on the opposite surface side of the counter plate, guide holes are formed corresponding to the current insertion holes and the detection insertion holes, respectively, and capable of inserting the current probe and the detection probe, respectively. The current probe in which the guide plate is laminated and the pair of the current insertion hole and the detection insertion hole corresponding to each of the guide holes are inserted into the current insertion hole and the detection insertion hole. It is preferable that a positional relationship between the current insertion hole and the detection insertion hole is set so that the distance between the detection probe and the detection probe is reduced so that the distance between the detection probe and the detection probe decreases.

  According to this configuration, the current probe and the detection probe are inclined by the guide hole so that the distance between the current probe and the detection probe becomes shorter as approaching the facing surface. Therefore, when the inspection point protrudes like a solder bump, the tips of the current probe and the detection probe are more perpendicular to the curved surface of the inspection point surface than when the current probe and the detection probe are along the normal direction of the opposing surface. Abut at an angle close to. As a result, the tips of the current probe and the detection probe are less likely to slip on the inspection point surface.

  Further, the inclination angle of the inner wall surface of the guide hole with respect to the plate thickness direction of the counter plate is smaller than the inclination angle of the inner wall surface of each of the current insertion holes and each detection insertion hole with respect to the plate thickness direction. Is preferred.

  According to this configuration, the range of play in which the current probe and the detection probe move in the guide hole is reduced as compared with the current insertion hole and the detection insertion hole, so that the stability of holding the current probe and the detection probe is improved. To do.

  Moreover, it is preferable to further include the current probe inserted into the current insertion hole and the detection probe inserted into the detection insertion hole.

According to this configuration, the inspection jig can be quickly used for inspection.
The inspection jig manufacturing method according to the present invention is a method for manufacturing the counter plate in the above-described inspection jig, and performs laser processing by irradiating a laser beam from the opposite surface side of the counter plate. The manufacturing method of the inspection jig which forms each said current insertion hole and each said detection insertion hole by this.

  The inspection jig and the substrate inspection apparatus having such a configuration can improve the contact stability of the probe with respect to the inspection point.

It is a front view showing roughly the composition of the substrate inspection device provided with the inspection jig concerning one embodiment of the present invention. It is a perspective view which shows an example of the test | inspection jig | tool shown in FIG. FIG. 3 is a side view of the inspection jig shown in FIG. 2. It is the top view which looked at the inspection jig shown in Drawing 1 and Drawing 2 from the counter surface side. It is the VV sectional view taken on the line of the test | inspection side support body and probe shown in FIG. It is the VV sectional view taken on the line of the electrode side support body, electrode plate, and probe which are shown in FIG. It is an enlarged view showing the details of a pair of current insertion holes and detection insertion holes. It is sectional drawing which shows the state by which the board | substrate was press-contacted to the test | inspection side support body shown in FIG. It is a top view which shows an example of the opposite surface of an opposing plate. It is explanatory drawing for demonstrating an example of a structure of the inspection jig which concerns on 2nd Embodiment of this invention. It is explanatory drawing which shows the comparative example for demonstrating the other effect by having the taper shape which diameter-expands as the current insertion hole and the detection insertion hole leave | separate from an opposing surface.

Embodiments according to the present invention will be described below with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.
(First embodiment)

  FIG. 1 is a front view schematically showing a configuration of a substrate inspection apparatus 1 including an inspection jig according to an embodiment of the present invention. A substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate to be inspected.

  A substrate inspection apparatus 1 shown in FIG. In the internal space of the housing 112, a substrate fixing device 110, a first inspection unit 121, and a second inspection unit 122 are mainly provided. The substrate fixing device 110 is configured to fix the substrate 100 to be inspected at a predetermined position.

  The substrate 100 is, for example, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a transparent conductive plate for a touch panel, and a variety of substrates such as a package substrate for a semiconductor package or a film carrier. There may be. Inspection points such as wiring patterns and solder bumps are formed on the substrate 100.

  The first inspection unit 121 is located above the substrate 100 fixed to the substrate fixing device 110. The second inspection unit 122 is located below the substrate 100 fixed to the substrate fixing device 110. The first inspection unit 121 and the second inspection unit 122 include inspection jigs 4U and 4L for inspecting a circuit pattern formed on the substrate 100. A plurality of probes Pf and Ps are attached to the inspection jigs 4U and 4L. In addition, the first inspection unit 121 and the second inspection unit 122 include an inspection unit moving mechanism 125 in order to appropriately move within the housing 112.

  The substrate inspection apparatus 1 includes a control unit 20 that controls operations of the substrate fixing device 110, the first inspection unit 121, the second inspection unit 122, and the like. The control unit 20 is configured using, for example, a microcomputer. The control unit 20 appropriately moves the first inspection unit 121 and the second inspection unit 122, and the probe Pf (current probe) and the probe Ps (detection) of the inspection jigs 4U and 4L on the substrate 100 fixed to the substrate fixing device 110. The circuit pattern formed on the substrate 100 is inspected by the inspection jigs 4U and 4L by contacting the probe). Since the inspection jigs 4U and 4L are configured in the same manner, the inspection jigs 4U and 4L are hereinafter collectively referred to as an inspection jig 4.

  FIG. 2 is a perspective view showing an example of the inspection jig 4 shown in FIG. FIG. 3 is a side view of the inspection jig 4 shown in FIG. The inspection jig 4 includes an inspection-side support body 5 and an electrode-side support body 6, and a connecting member 7 that holds the inspection-side support body 5 and the electrode-side support body 6 in parallel at a predetermined distance. The inspection side support 5 and the electrode side support 6 are formed with insertion holes at positions corresponding to each other.

  The inspection jig 4 is an inspection jig for a so-called four-terminal measurement method, and includes a probe Pf for supplying inspection current and a probe Ps for measuring voltage. The distal ends of the probes Pf and Ps are inserted through the insertion holes of the inspection-side support 5, and the rear ends of the probes Pf and Ps are inserted through the insertion holes of the electrode-side support 6. As a result, a plurality of pairs of probes Pr including a pair of probes Pf and Ps are held by the inspection-side support 5 and the electrode-side support 6.

  The inspection-side support 5 is configured by laminating a counter plate 51 and guide plates 52 and 53 in order from the side (front side) on which the substrate 100 is disposed. The facing plate 51 has a facing surface F that is disposed facing the substrate 100. The opposing plate 51 is fixed to the guide plates 52 and 53 by fixing means such as bolts that can be attached and detached. Thereby, the opposing plate 51 can be attached to and detached from the guide plates 52 and 53.

  The electrode side support 6 is configured by stacking support plates 61, 62, 63 in order from the side opposite to the facing surface F. The surface of the support plate 61 is a back surface R that comes into contact with an electrode plate 9 on which an electrode 91 described later is formed (FIG. 6). The electrode 91 is connected to a scanner circuit (not shown) including, for example, an ammeter, a voltmeter, and a current source. As a result, the electrode plate 9 is attached to the support plate 61, whereby the rear ends of the probes Pf and Ps are connected to the scanner circuit via the electrode 91.

  The distance from the facing surface F of the facing plate 51 to the back surface R of the support plate 61 is slightly shorter than the lengths of the probes Pf and Ps. Thereby, as shown in FIG. 6 described later, when the electrode plate 9 is attached to the support plate 61, the rear ends of the probes Pf and Ps abut against the electrode 91 to be stopped, and the tips of the probes Pf and Ps It protrudes slightly from the facing surface F.

  In this state, when the substrate 100 to be inspected is pressed against the opposing plate 51, the tips of the probes Pf and Ps are pressed by the substrate 100, and the probes Pf and Ps are bent (FIG. 8). As a result, the tips of the probes Pf and Ps are brought into elastic contact with the inspection point of the substrate 100 by the biasing force generated by the elastic restoring force of the probes Pf and Ps.

  The scanner circuit supplies a predetermined current between predetermined probes Pf and Pf, for example, in response to a control signal from the control unit 20, and sets a voltage between the probes Ps and Ps paired with the probes Pf and Pf, respectively. The measurement result is transmitted to the control unit 20.

  Based on the measurement result obtained from the scanner circuit, the control unit 20 performs, for example, a substrate inspection by a four-terminal measurement method. Specifically, for example, as shown in FIG. 8 to be described later, the control unit 20 presses the inspection-side support 5 of the inspection jig 4 against the substrate 100 and sets a probe pair to each inspection point such as the bump B. Pr, that is, probes Pf and Ps are brought into contact with each other. Then, the control unit 20 performs an inspection preset by the scanner circuit between the two inspection points to be inspected and between the probe Pf in contact with one inspection point and the probe Pf in contact with the other inspection point. And a scanner circuit measures the voltage between the probe Ps in contact with one inspection point and the probe Ps in contact with the other inspection point as a detection voltage. For example, the control unit 20 performs the pass / fail determination of the substrate 100 by comparing the detected voltage, a resistance value between inspection points obtained from the detected voltage, and the like with a preset reference value.

  FIG. 4 is a plan view of the inspection jig 4 shown in FIGS. 1 and 2 as viewed from the facing surface F side. As shown in FIG. 3, a pair of a current insertion hole Hf and a detection insertion hole Hs for inserting the probes Pf and Ps of the probe pair Pr respectively correspond to the probe pair Pr in the inspection-side support 5. A plurality of pairs are formed. The current insertion hole Hf and the detection insertion hole Hs are formed corresponding to the arrangement of the inspection points in order to guide the probes Pf and Ps to the inspection points of the substrate 100, respectively.

  FIG. 5 is a cross-sectional view taken along line VV of the inspection-side support 5 and the probes Pf and Ps shown in FIG. As shown in FIG. 5, the opposing plate 51 has a thin region 511 that is thinner than the outer peripheral portion 512 of the opposing plate 51. The current insertion hole Hf and the detection insertion hole Hs are formed through the thin region 511. The central axes of the current insertion hole Hf and the detection insertion hole Hs are substantially perpendicular to the facing surface F. Note that the central axes of the current insertion hole Hf and the detection insertion hole Hs may be inclined with respect to the normal of the facing surface F.

  The thin region 511 can be obtained by, for example, cutting a plate-like member having a uniform thickness with a tool such as a router. The current insertion hole Hf and the detection insertion hole Hs are fine holes whose inner diameters are slightly larger than the diameters of the probes Pf and Ps. For this reason, when forming the current insertion hole Hf and the detection insertion hole Hs so as to penetrate through a thick plate, there is difficulty in drilling. Therefore, by forming the thin region 511 and forming the current insertion hole Hf and the detection insertion hole Hs in the thin region 511, the formation of the current insertion hole Hf and the detection insertion hole Hs is facilitated.

  The current insertion hole Hf and the detection insertion hole Hs have a tapered shape that increases in diameter as the distance from the facing surface F increases. The cross-sectional shapes of the current insertion hole Hf and the detection insertion hole Hs cut in parallel to the facing surface F are substantially circular. Such a tapered shape can be formed, for example, by performing laser processing by irradiating laser light in the direction perpendicular to the facing surface F from the opposite surface C side opposite to the facing surface F of the facing plate 51. . In addition, the processing method of the current insertion hole Hf and the detection insertion hole Hs is not limited to laser processing, and various processing methods capable of forming a tapered hole can be used.

  The guide plate 52 is formed with a guide hole H52 penetrating the guide plate 52 corresponding to the current insertion hole Hf and the detection insertion hole Hs of the adjacent counter plate 51, respectively. In the guide plate 53, guide holes H53 penetrating the guide plate 53 are formed corresponding to the guide holes H52 of the adjacent guide plates 52, respectively.

  6 is a cross-sectional view taken along line VV of the electrode-side support 6, the electrode plate 9, and the probes Pf and Ps shown in FIG. 4. Probes Pf and Ps shown in FIGS. 5 and 6 include, for example, a rod-shaped conductor portion 81 having a diameter of about 100 μm and an insulating portion 82 that covers the outer peripheral surface of the conductor portion 81. The insulating part 82 is formed of an insulator such as a synthetic resin. The insulating part 82 can use an insulating film formed by applying an insulating coating to the surface of the conductor part 81. Insulating portions 82 are not formed at both ends of the probes Pf and Ps, and the conductor portions 81 are exposed.

  Referring to FIG. 5, the conductor portion 81 on the distal end side of the probe Pf is inserted from the guide plate 53 side into the communication hole formed by communicating the current insertion hole Hf and the guide holes H52 and H53, and the detection insertion hole. A conductor portion 81 on the distal end side of the probe Ps is inserted from the guide plate 53 side into a communication hole formed by communicating Hs and the guide holes H52 and H53. The inner diameter of the guide hole H53 is smaller than the diameter of the insulating portion 82 of the probes Pf and Ps. Thereby, the front end side end portion of the insulating portion 82 is engaged with the guide hole H53 so that the probes Pf and Ps do not fall off from the inspection side support body 5.

  The guide holes H52 and H53 that form communication holes corresponding to the pair of current insertion holes Hf and the detection insertion holes Hs are spaced apart from each other as the probes Pf and Ps of the probe pair Pr approach the facing surface F. The positional relationship between the current insertion hole Hf and the detection insertion hole Hs is set so as to be inclined so as to be shorter. Specifically, the distance between the centers of the pair of guide holes H52 and H52 is shorter than the distance between the centers of the pair of guide holes H53 and H53, and is shorter than the distance between the centers of the pair of guide holes H52 and H52. In addition, the distance between the centers of the pair of current insertion holes Hf and the detection insertion holes Hs is shortened.

  FIG. 7 is an enlarged view showing details of the pair of current insertion holes Hf and detection insertion holes Hs. FIG. 7A is a cross-sectional view of the pair of current insertion holes Hf and detection insertion holes Hs cut in a direction perpendicular to the facing surface F. FIG. FIG. 7B is a plan view of the counter plate 51 as viewed from the opposite surface C. FIG.

  The inclination angles Rf and Rs of the inner wall surfaces of the current insertion hole Hf and the detection insertion hole Hs with respect to the plate thickness direction are, for example, in the range of 1 to 5 degrees. The inclination angles of the inner wall surfaces of the guide holes H52 and H53 of the guide plates 52 and 53 with respect to the thickness direction of the counter plate 51 are smaller than the inclination angles Rf and Rs. For example, the inner wall surfaces of the guide holes H52 and H53 may extend along the plate thickness direction, and the guide holes H52 and H53 may be cylindrical. As a result, the range of play in which the probes Pf and Ps move within the guide holes H52 and H53 is reduced, and the holding stability of the probes Pf and Ps is improved.

  5 shows an example in which the guide plate 53 is formed with a thin portion 531 having a reduced thickness, and the guide hole H53 is formed in the thin portion 531. However, the guide plate 53 may be a plate-like member having a uniform thickness. Moreover, although the example which laminates | stacks two guide plates on the opposing plate 51 was shown, one guide plate may be sufficient and three or more may be sufficient as it. In addition, the guide plate may not necessarily be provided, and the inspection-side support 5 may be configured with only the counter plate 51. The guide holes H52 and H53 may have the same tapered shape as the current insertion hole Hf and the detection insertion hole Hs. The inclination angle of the inner wall surface of the guide holes H52 and H53 is determined by the current insertion hole Hf and the detection hole Hf. It may be larger than the inclination angle of the inner wall surface of the insertion hole Hs.

  FIG. 8 is a cross-sectional view showing a state in which the substrate 100 is pressed against the inspection-side support 5 shown in FIG. Bumps B are formed on the substrate 100 as inspection points. The bump B protrudes from the surface of the substrate 100 in a hemispherical shape, for example. Therefore, the inclination of the surface of the bump B increases with respect to the surface direction of the opposing surface F as the distance from the center of the bump B increases. Since the two probes Pf and Ps of the probe pair Pr need to be brought into contact with one bump B, the tips of the probes Pf and Ps are in contact with the bump B in a state of being spaced apart on both sides of the center of the bump B. .

  Therefore, if the probes Pf and Ps are held by the inspection-side support 5 so as to extend along the normal direction (plate thickness direction) of the facing surface F, the probes Pf and Ps are placed on the surface of the bump B. It inclines and abuts against. Due to the inclination of the surface, the probes Pf and Ps are separated from each other at the tips of the probes Pf and Ps, and a force acts in the direction in which the probes Pf and Ps slide on the surface of the bump B. As a result, the contact stability of the probes Pf and Ps with respect to the bump B is lowered.

  On the other hand, according to the inspection-side support body 5 shown in FIG. 5, the probes Pf and Ps of the probe pair Pr are inclined by the guide holes H52 and H53 so that the distance between them becomes shorter as the opposing surface F is approached. Yes. Therefore, the tips of the probes Pf and Ps are in contact with the curved surface of the bump B surface at an angle closer to the vertical than when the probes Pf and Ps are along the normal direction of the opposing surface F. As a result, the tips of the probes Pf and Ps are less likely to slip on the bump B surface. The inspection jig 4 may have a shape in which the inspection points protrude like bumps B as long as the probes Pf and Ps can be contacted, and the inspection points may be flat.

  Further, since the probes Pf and Ps are inclined so that the distance between the probes Pf and Ps approaches the facing surface F, when the bump B is pressed against the tips of the probes Pf and Ps, as shown in FIG. The probes Pf and Ps bend in a direction in which the inner sides facing each other are concave. When the inner sides facing each other are bent in a concave direction, the directions of the tips of the probes Pf and Ps further approach perpendicular to the curved surface of the bump B surface. As a result, the tips of the probes Pf and Ps are less likely to slip on the surface of the bump B, and the contact pressure of the probes Pf and Ps can be easily applied to the bump B without escaping. Stability is improved.

  Here, since the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that increases in diameter as the distance from the facing surface F increases, the current insertion hole Hf and the detection insertion hole Hs are mutually inside. Wall surfaces F1 and S1 on the wall surface on the side away from the other insertion hole are inclined in a direction away from the other insertion hole as the distance from the facing surface F increases.

  As a result, the bulging portion of the probe to the outside caused by bending in the direction in which the insides of the probes Pf and Ps are concave is received in the space produced by the expansion of the current insertion hole Hf and the detection insertion hole Hs. That is, since the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that increases in diameter as they move away from the facing surface F, the probes Pf and Ps are easily bent in a direction in which the inside becomes concave, and consequently This contributes to improvement in contact stability of the probes Pf and Ps with respect to the bump B.

  FIG. 11 is an explanatory diagram illustrating a comparative example for explaining another effect of the taper shape in which the current insertion hole Hf and the detection insertion hole Hs have a diameter that increases as the distance from the facing surface F increases. The comparative example shown in FIG. 11 includes a counter plate K instead of the counter plate 51. The counter plate K is formed with a cylindrical current insertion hole M and a detection insertion hole N having a constant inner diameter instead of the current insertion hole Hf and the detection insertion hole Hs.

  If the shape of the current insertion hole M and the detection insertion hole N is a cylindrical shape with a constant inner diameter, the probes Pf and Ps are connected to the current insertion hole M and the detection hole as shown in FIG. There is a possibility of causing damage to the probes Pf and Ps by hitting the corner portion X of the insertion hole N. Further, the counter plate K and the probes Pf and Ps are rubbed at the corner portion X to generate dust, and the dust may adhere to the probes Pf and Ps, resulting in poor contact.

  On the other hand, according to the inspection-side support 5 shown in FIG. 5, the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that increases in diameter with increasing distance from the facing surface F. As a result of the corners of Hf and the detection insertion hole Hs moving away from the probes Pf and Ps, the probes Pf and Ps hit the corners of the insertion hole and the probes Pf and Ps are damaged or dust is generated, resulting in poor contact. Is less likely to occur.

  Referring to FIG. 6, the electrode side support 6 is provided corresponding to the current insertion hole Hf and the detection insertion hole Hs, and the other ends of the probes Pf and Ps are inserted through the probes Pf and Ps. A support hole for guiding to 91 is formed. Specifically, support holes 61, 62, and 63 support holes H61, H62, and H63 (current support holes) for inserting the probe Pf, and support holes H61 and H62 for inserting the probe Ps, respectively. , H63 (detection support hole).

  The support holes H61, H62, and H63 are connected to form one through hole. FIG. 6 shows an example in which the support holes H61, H62, and H63 each have a large-diameter portion with a large diameter and a small-diameter portion with a small diameter, but the diameters of the support holes H61, H62, and H63 are constant. Also good. Moreover, the electrode side support body 6 may be comprised by the single guide plate, and may be comprised by the guide plate of 2 sheets or 4 sheets or more.

  The support holes H61, H62, and H63 have a positional relationship between the support holes so that the probes Pf and Ps of the probe pair Pr are inclined so that the distance between them becomes shorter as the back surface R is approached. As a result, the probes Pf and Ps inserted through the inspection-side support 5 and the electrode-side support 6 are curved in a curved state so that the interval is narrowed near both ends and the interval is expanded near the center. The support 5 and the electrode-side support 6 are held. As a result, when the bumps B are pressed against the tips of the probes Pf and Ps, the probes Pf and Ps are easily bent.

  Referring to FIG. 7, radius rf2 of front-end-side current hole opening end Ef2 in which current insertion hole Hf opens on opposing surface F and detection insertion hole Hs that is paired with current insertion hole Hf are provided on opposing surface F. The sum of the opening end detection hole opening end Es2 and the radius rs2 is smaller than the distance L between the centers of the current insertion hole Hf and the detection insertion hole Hs. Thereby, the front end side current hole opening end Ef2 and the front end side detection hole opening end Es2 have a substantially circular shape separated from each other.

  By forming the current insertion hole Hf and the detection insertion hole Hs in this manner, the tip-side current hole opening end Ef2 and the tip-side detection hole opening end Es2 are separated into fine circles. The tips of the probes Pf and Ps are accurately guided to the inspection point of the substrate 100 by the tip side current hole opening end Ef2 and the tip side detection hole opening end Es2.

  Further, the detection through-hole Hs that is paired with the radius rf1 of the rear-end-side current hole opening end Ef1 in which the current insertion hole Hf opens on the opposite surface C of the opposing plate 51 and the current insertion hole Hf is formed on the opposing plate 51. The sum of the radius rs1 of the rear end side detection hole opening end Es1 opening in the opposite surface C is made larger than the distance L between the centers of the current insertion hole Hf and the detection insertion hole Hs to be the pair. The end edge of the rear end side current hole opening end Ef1 and the end edge of the rear end side detection hole opening end Es1 are continuous.

  By forming the current insertion hole Hf and the detection insertion hole Hs in this manner, the edge of the rear end side current hole opening end Ef1 and the end edge of the rear end detection hole opening end Es1 that are paired are continuous. As shown in FIG. 7, the open ends of the pair of current insertion holes Hf and the detection insertion hole Hs have a gourd shape in which the center is constricted on the opposite surface C side.

  FIG. 9 is a plan view showing an example of the opposite surface C of the counter plate 51. As shown in FIG. 9, when the opposite surface C is visually observed, the current insertion hole Hf and the detection insertion hole Hs through which the probes Pf and Ps of the probe pair Pr are to be inserted in pairs form a gourd type. appear.

  The inner diameter of the distal end side current hole opening end Ef2 and the inner diameter of the distal end side detection hole opening end Es2 need to bring the distal ends of the probes Pf and Ps into contact with inspection points such as the bumps B with high accuracy. It is made smaller than the internal diameter of hole H61, H62, H63. For this reason, it is difficult to insert the probes Pf and Ps into the inspection-side support 5 while the counter plate 51 and the guide plates 52 and 53 are stacked.

  Therefore, for example, when the probes Pf and Ps are inserted into the inspection-side support 5 such as when the deteriorated probes Pf and Ps are replaced or when the inspection jig 4 is assembled, the counter plate 51 is removed from the inspection-side support 5. When the probes Pf and Ps are inserted into the guide plates 52 and 53 and then the probes Pf and Ps are inserted into the counter plate 51 and the counter plate 51 is attached, the probes Pf and Ps can be easily inserted.

  Conventionally, when assembling an inspection jig, an operator manually inserts a fine probe into a fine hole while looking at a loupe. At the time of such assembling work, it is necessary to insert the probe into a correct insertion hole corresponding to each other between the insertion hole of the front end side support body and the insertion hole of the rear end side support body. However, since it is necessary to insert a large number of ultrafine probes exceeding 1000 in the fine insertion holes, there is an inconvenience that it is not easy to insert the probes into the correct corresponding insertion holes.

  On the other hand, according to the inspection jig 4, the operator can remove the counter plate 51 from the guide plates 52 and 53 in this way, while looking at the counter surface C of the counter plate 51 with a magnifying glass or the like, while facing the counter surface C side. The probes Pf and Ps are inserted through the current insertion hole Hf and the detection insertion hole Hs. In particular, when the inspection-side support 5 is not provided with a guide plate and is composed of only the counter plate 51, the operator can always see the opposite surface C without removing the guide plate.

  At this time, according to the counter plate 51 shown in FIG. 7, the edge of the paired rear end side current hole opening end Ef1 and the end edge of the rear end side detection hole opening end Es1 are continuous, and a pair of current The open ends of the insertion hole Hf and the detection insertion hole Hs have a gourd shape with a constricted center on the opposite surface C side (FIG. 9).

  Therefore, the operator can visually check the rear end side current hole opening end Ef1 of the current insertion hole Hf and the rear end side detection hole opening end Es1 of the detection insertion hole Hs connected to the gourd type, It can be easily recognized that the current insertion hole Hf and the detection insertion hole Hs are holes into which the probes Pf and Ps of the pair of probe pairs Pr are to be inserted, respectively. As a result, it becomes easy for the operator to insert the probes Pf and Ps into the correct current insertion hole Hf and the detection insertion hole Hs, and the work efficiency of the insertion work of the probes Pf and Ps into the inspection-side support 5 is improved. Will improve.

  In order to separate the openings at the opposing surface F while making the opening ends of the pair of current insertion holes Hf and the detection insertion holes Hs on the opposite surface C gourd-shaped, the inclination angles Rf and Rs are 1 to 5 degrees. It is preferable to be within the range. However, the inclination angles Rf and Rs are not limited to the range of 1 to 5 degrees, and may be less than 1 degree or may exceed 5 degrees.

  In addition, the current insertion hole Hf and the detection insertion hole Hs have a tapered shape that increases in diameter as they move away from the facing surface F, and have a so-called funnel shape. Therefore, the probe Pf from the large inlet side of the funnel. , Ps is inserted into the distal ends of the probes Pf, Ps to the distal end current hole opening end Ef2 and the distal end detection hole opening end Es2, thereby facilitating insertion of the probes Pf, Ps.

  Referring to FIG. 7, for current insertion hole Hf and detection insertion hole Hs that form a pair, radius rf3 of a current hole cross section that is a cross section of current insertion hole Hf cut in a direction parallel to opposing surface F; The total of the detection hole cross-section radius rs3, which is a cross-section of the detection insertion hole Hs cut in that direction, is the distance from the opposing surface of the cross-sectional position is the depth of the current insertion hole Hf and the detection insertion hole Hs. In the range of 3/4 or less of D, the distance is smaller than the distance between the centers of the current insertion hole Hf and the detection insertion hole Hs.

At a depth position where the sum of the radius rf3 and the radius rs3 is larger than the distance between the centers of the current insertion hole Hf and the detection insertion hole Hs, a wall separating the current insertion hole Hf and the detection insertion hole Hs is present. Absent. Therefore, the possibility that the probes Pf and Ps come into contact increases. On the other hand, the sum of the radius rf3 and the radius rs3 is the center of the current insertion hole Hf and the detection insertion hole Hs in a range where the distance from the opposing surface F of the cross-sectional position is 3/4 or less of the depth D. If the distance is smaller than the distance between them, the wall separating the probes Pf and Ps is provided by 3/4 or more of the depth D. Thereby, the possibility that the probes Pf and Ps come into contact with each other is reduced.
(Second Embodiment)

  Next, a substrate inspection apparatus 1 'according to a second embodiment of the present invention will be described. The substrate inspection apparatus 1 ′ is shown in FIG. 1 like the substrate inspection apparatus 1. The substrate inspection apparatus 1 'differs from the substrate inspection apparatus 1 in the configuration of inspection jigs 4U' and 4L '. Hereinafter, the inspection jigs 4U 'and 4L' are collectively referred to as an inspection jig 4 '. The inspection jig 4 'shown in FIGS. 2 and 3 is different from the inspection jig 4 in the configuration of the counter plate 51' constituting the inspection-side support 5 '. Since other configurations are the same as those of the substrate inspection apparatus 1 shown in FIG. 1, the description thereof is omitted, and the characteristic points of the present embodiment will be described below.

  FIG. 10 is an explanatory diagram for explaining an example of the configuration of the inspection jig 4 ′ according to the second embodiment of the present invention. The inspection jig 4 ′ is configured, for example, by laminating a counter plate 51 ′ and guide plates 52 and 53. Since the guide plates 52 and 53 are configured in the same manner as the inspection jig 4, description thereof is omitted.

  The counter plate 51 ′ shown in FIG. 10 is different from the counter plate 51 in the configuration of the current insertion hole Hf ′ and the detection insertion hole Hs ′. The current insertion hole Hf ′ and the detection insertion hole Hs ′ are tapered through holes. The cross-sectional shapes of the current insertion hole Hf 'and the detection insertion hole Hs' cut perpendicular to the axial direction are substantially circular. The central axes of the current insertion hole Hf ′ and the detection insertion hole Hs ′ are inclined in directions opposite to each other with respect to the thickness direction of the counter plate 51 ′. Therefore, a front end side current hole opening end Ef2 ′ in which the current insertion hole Hf ′ opens in the opposing surface F, a rear end side current hole opening end Ef1 ′ in which the current insertion hole Hf ′ opens in the opposite surface C, and the detection insertion The front end side detection hole opening end Es2 ′ in which the hole Hs ′ opens in the facing surface F and the rear end side detection hole opening end Es1 ′ in which the detection insertion hole Hs ′ opens in the opposite surface C are substantially elliptical. Yes.

  The current insertion hole Hf ′ and the detection insertion hole Hs ′ are inclined in a direction away from the other insertion hole as the wall surfaces F1 and S1 on the inner wall surface away from the other insertion hole move away from the opposing surface F. doing.

  As a result, as with the inspection-side support 5 shown in FIG. 8, the bulging portion of the probe outward caused by bending in the direction in which the inside of the probes Pf and Ps becomes concave is received in the space generated by the inclination of the wall surfaces F1 and S1. It is done. That is, the wall surfaces F1 and S1 are inclined in a direction away from the other insertion hole as they are away from the opposing surface F, so that the probes Pf and Ps are easily bent in a direction in which the inside is concave, and as a result, the probes Pf and Ps. This contributes to improvement in contact stability with respect to the bump B.

  Furthermore, the current insertion hole Hf ′ and the detection insertion hole Hs ′ are arranged such that the wall surfaces F2 and S2 on the inner wall surface close to the other insertion hole are in the thickness direction of the opposing plate 51 ′ (with respect to the opposing surface F). In the vertical direction).

  As a result, when the probes Pf and Ps try to bend in the direction in which the inside is convex, the wall surfaces F2 and S2 interfere with the probes Pf and Ps, and as a result, the probes Pf and Ps bend in the direction in which the inside is convex. Is disturbed. As a result, the certainty of bending the probes Pf and Ps in the direction in which the inside becomes concave is improved, and as a result, the certainty of improving the contact stability of the probes Pf and Ps to the bump B is improved.

  The long radius rf2 ′ of the front end side current hole opening end Ef2 ′ where the current insertion hole Hf ′ opens in the facing surface F and the detection insertion hole Hs ′ paired with the current insertion hole Hf ′ are opened in the facing surface F. The total of the major radius rs2 ′ of the leading end side detection hole opening end Es2 ′ is smaller than the distance L between the centers of the current insertion hole Hf ′ and the detection insertion hole Hs ′. Thereby, the front end side current hole opening end Ef2 'and the front end side detection hole opening end Es2' are separated from each other.

  By forming the current insertion hole Hf ′ and the detection insertion hole Hs ′ in this way, the distal end side current hole opening end Ef2 ′ and the distal end side detection hole opening end Es2 ′ are separated from each other, and the probes Pf, Ps. It is assumed that the major axis direction is an elliptical shape along the bending direction. As a result, the tips of the probes Pf and Ps are easily oriented in the direction of the bump B due to the bending, and the positions of the probes Pf and Ps are accurately regulated in the direction perpendicular to the bending direction.

  Further, a detection insertion hole paired with the major radius rf1 ′ of the rear end side current hole opening end Ef1 ′ in which the current insertion hole Hf ′ opens on the opposite surface C of the counter plate 51 ′ and the current insertion hole Hf ′. The sum of the major radius rs1 ′ of the rear end side detection hole opening end Es1 ′ where Hs ′ opens on the opposite surface C of the counter plate 51 ′ is the current insertion hole Hf ′ and the detection insertion hole Hs ′. Is larger than the distance L between the centers.

  Accordingly, it is possible to secure a sufficient space for bending the probes Pf and Ps while bringing the current insertion hole Hf ′ and the detection insertion hole Hs ′ close to each other.

1, 1 'Substrate inspection device 4, 4U, 4L, 4', 4U ', 4L' Inspection jig 5, 5 'Inspection side support body 6 Electrode side support body 7 Connecting member 9 Electrode plate 20 Control part 51, 51' Opposing plates 52, 53 Guide plates 61, 62, 63 Support plate 81 Conductor portion 82 Insulating portion 91 Electrode 100 Substrate 110 Substrate fixing device 112 Housing 121 First inspection portion 122 Second inspection portion 125 Inspection portion moving mechanism 511 Thin region 512 Outer part 531 Thin part B Bump (inspection point)
C opposite surface Ef1, Ef1 ′ rear end side current hole opening end Ef2, Ef2 ′ front end side current hole opening end Es1, Es1 ′ rear end side detection hole opening end Es2, Es2 ′ front end side detection hole opening end F opposing surface H52, H53 Guide hole H61, H62, H63 Support hole Hf Current insertion hole Hs Detection insertion hole L Distance Pf Probe (current probe)
Ps probe (detection probe)
R Back surface Rf, Rs Inclination angle rf1, rf2, rf3, rs1, rs2, rs3 Radius rf1 ′, rf2 ′, rs1 ′, rs2 ′ Long radius X Corner

Claims (12)

An inspection jig for contacting a rod-shaped current probe for supplying current and a rod-shaped detection probe for detecting voltage with respect to one inspection point provided on a substrate to be inspected,
An opposing plate having an opposing surface for opposing placement with the substrate;
A support plate disposed opposite to the opposite surface of the counter plate;
In the opposing plate, a plurality of pairs are formed, with a pair of a current insertion hole for inserting the current probe and a detection insertion hole for inserting the detection probe,
The support plate is provided corresponding to each of the current insertion holes and each of the detection insertion holes, and a current support hole for inserting the current probe and a detection support for inserting the detection probe. Holes are formed,
Each of the current insertion holes and each of the detection insertion holes has a tapered shape that increases in diameter as the distance from the opposing surface increases.
Radius of the tip end side current hole opening end where the current insertion hole opens on the opposing surface and radius of the tip end detection hole opening end where the detection insertion hole which is paired with the current insertion hole opens on the opposing surface Is smaller than the distance between the centers of the pair of the current insertion hole and the detection insertion hole, and the current insertion hole is opposite to the opposite surface of the opposing plate. The sum of the radius of the rear end side current hole opening end that opens in the surface and the radius of the rear end side detection hole opening end in which the detection insertion hole that is paired with the current insertion hole opens on the opposite surface side, The distance between the pair of the current insertion hole and the detection insertion hole is larger than the distance between the centers, and the edge of the rear end side current hole opening end and the rear end detection hole opening end of the pair. The edge is continuous,
The end edge of the rear end side current hole opening end and the end edge of the rear end side detection hole opening end which are the pair are the other end edge of the rear end side current hole opening end and the rear end side which are not paired. Inspection jig separated from the edge of the detection hole opening end . About the current insertion hole and the detection insertion hole that form the pair, the radius of the current hole cross section that is a cross section of the current insertion hole cut in a direction parallel to the facing surface, and the detection cut in that direction The sum of the radius of the cross section of the detection hole, which is the cross section of the insertion hole for use, is such that the distance of the cross section position from the facing surface is at least 3/4 or less of the depth of the insertion hole for current and the detection insertion hole. The inspection jig according to claim 1 , wherein the inspection jig is smaller in distance than the distance between the centers of the current insertion hole and the detection insertion hole. The inspection jig according to claim 1 or 2 , wherein an inclination angle of an inner wall surface of each of the current insertion holes and each of the detection insertion holes with respect to a plate thickness direction of the counter plate is within a range of 1 to 5 degrees. . An inspection jig for contacting a rod-shaped current probe for supplying current and a rod-shaped detection probe for detecting voltage with respect to one inspection point provided on a substrate to be inspected,
An opposing plate having an opposing surface for opposing placement with the substrate;
A support plate disposed opposite to the opposite surface of the counter plate;
In the opposing plate, a plurality of pairs are formed, with a pair of a current insertion hole for inserting the current probe and a detection insertion hole for inserting the detection probe,
The support plate is provided corresponding to each of the current insertion holes and each of the detection insertion holes, and a current support hole for inserting the current probe and a detection support for inserting the detection probe. Holes are formed,
Each of the current insertion holes and each of the detection insertion holes has a tapered shape that increases in diameter as the distance from the opposing surface increases.
The current for through holes and each of through holes of the detection through hole form a pair, the wall surface of the side closer to the other of the insertion hole in the inner wall surface of each other, that extend along the thickness direction of the opposed plate inspection査治tool. The current insertion hole and the detection insertion hole are the current insertion hole and the detection insertion hole. The inspection jig according to claim 4, which has a substantially elliptical shape in which a major axis direction extends in a direction away from the head.   The rear end side current hole opening end where the current insertion hole opens on the opposite surface opposite to the facing surface and the rear end side detection hole opening end where the detection insertion hole opens on the opposite surface are the current A substantially elliptical shape along the major axis direction in the direction of separation between the insertion hole for detection and the detection insertion hole,
  The sum of the long radius of the rear end side current hole opening end of the current insertion hole and the long radius of the rear end side detection hole opening end of the detection insertion hole paired with the current insertion hole is The inspection jig according to claim 5, wherein the inspection jig is larger than a distance between centers of the distal end side current hole opening end of the pair of current insertion holes and the distal end side detection hole opening end of the detection insertion hole. . The counter plate is formed with a thin region having a plate thickness thinner than the outer peripheral portion of the counter plate,
Wherein each current for through holes and each of the detection through hole, the inspection jig according to any one of claims 1 to 6, extending through the thin region. On the opposite surface side of the counter plate, a guide plate is formed with guide holes corresponding to the current insertion holes and the detection insertion holes, respectively, through which the current probe and the detection probe can be inserted. Are stacked,
The guide holes respectively corresponding to the current insertion holes and the detection insertion holes to be paired are inserted into the current insertion holes and the detection insertion holes to form the pair of the current probe and the detection probe. , according to any one of claims 1 to 7, positional relationship between the current for the insertion hole and the detection through hole so as to tilt as distance from each other becomes shorter as approaching the opposing surface is set Inspection jig. Of the inner wall surface of the guide hole, the inclination angle with respect to the thickness direction of the opposed plate, the inner wall surface of each current for through holes and each of the detection through hole, the inclination angle is less than 8. relative to the thickness direction The inspection jig described. The current probe inserted into the current insertion hole;
The inspection jig according to any one of claims 1 to 9 , further comprising the detection probe inserted into the detection insertion hole. Substrate inspection device provided with an inspection jig according to any one of claims 1-10. It is a manufacturing method of the inspection jig given in any 1 paragraph of Claims 1-10,
  A method for manufacturing an inspection jig for forming the current insertion holes and the detection insertion holes by performing laser processing by irradiating laser light from the opposite surface side of the counter plate.

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