JP2012047748A - Connection terminal and manufacturing method of connection terminal - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a connection terminal having insulation coating that can be mounted to a connection tool without requiring any additional step on a stage where a core is removed.SOLUTION: The present invention relates to a connection terminal which is integrated into a connection tool electrically connected to an object point of an object. The connection terminal includes a cylindrical tube comprised of a plating layer of a conductive material, the cylindrical tube has front end and rear end portions over a predetermined length in opposed directions from both terminals, and a spring portion having a spiral wall surface in a long axis direction formed between the front end portion and the rear end portion, the spring portion has an insulation layer formed along the spiral wall surface and further, side etching is present in the front end portion and the rear end portion of the cylindrical tube.

Description

  The present invention relates to a connection terminal having an insulating coating used for a connection jig for electrically connecting a target point set in advance to an object and an inspection apparatus, and a method of manufacturing the connection terminal. In addition, the connection terminal of this invention is not limited to a test | inspection apparatus as a connection object, It is used also for electrically connecting between two predetermined points.

  The connection jig includes a connection terminal (contact, probe, probe, contact pin, etc.), and a current or electrical signal from an inspection device or the like passes through them to a target point set in advance on the object. , And by detecting an electrical signal from the target point, the electrical characteristics between the target points are detected, and an operation test such as a continuity test or a leak test is performed.

  Examples of such objects include printed wiring boards, flexible boards, ceramic multilayer wiring boards, electrode boards for liquid crystal displays and plasma displays, package boards for semiconductor packages and film carriers, semiconductor wafers and semiconductor chips. And semiconductor devices such as LSI (Large Scale Integration) such as CSP (chip size package). In addition, this connection terminal can also aim at electrically connecting said object and apparatus, and also as a connection jig which connects an electrode end and an electrode end like an interposer or a connector. Can also be adopted.

  In the present specification, the above-described objects are collectively referred to as “objects”, and a portion that is set as an object and is brought into conduction by contact with a connection terminal is simply referred to as “object point”. Note that the portion sandwiched between the target points is set as “between target points”.

  When the object is an LSI, an electronic circuit formed on the LSI is a target portion, and each surface pad of the electronic circuit is a target point. In this case, in order to ensure that the electronic circuit formed in the LSI has the desired electrical characteristics, the electrical characteristics between the target points are measured to judge the quality of the electronic circuit. .

  Further, when the object is a substrate on which electric / electronic components are mounted, the wiring formed on the substrate is the target portion, and both ends of the wiring are the target points. In this case, in order to ensure that the wiring as the target part can accurately transmit the electrical signal to them, between the predetermined target points on the wiring formed on the wiring board before mounting the electric / electronic component. The electrical characteristics such as resistance value and leakage current are measured to judge the quality of the wiring.

  Specifically, the quality of the wiring is determined by bringing the current supply terminal and / or the tip of the voltage measurement connection terminal into contact with each target point, and the target point from the current supply terminal of the connection terminal. Measures the voltage generated in the wiring between the tips of the connection terminals that are in contact with the target point while supplying the measurement current to the target point, and the resistance value of the wiring between the predetermined target points based on the supply current and the measured voltage This is done by calculating

  For example, when any of the above-mentioned substrates is inspected using a substrate inspection apparatus, a connection terminal (contact, probe, probe, contact pin, etc.) for inspecting the substrate connection jig by the jig moving means Is controlled to move the jig from the target point to the standby position by the jig moving means when the inspection is completed. Done.

2004-115838 2008-25833 Patent Document 1 discloses a technique in which a gold plating layer is formed on the outer peripheral surface of a linear material, a nickel plating layer is further formed thereon, and then the linear material is pulled to reduce a cross-sectional area of the linear material. A method of manufacturing a nickel electroformed pipe by removing linear material is disclosed.

  In Patent Document 2, an insulating coating is formed on the outer peripheral surface of the SUS wire, and a spiral groove is formed on the outer surface of the SUS wire to expose the outer peripheral surface of the SUS wire, and a nickel coating having the same thickness as the insulating coating is formed there. Then, a method of manufacturing a nickel electroformed pipe having a coil spring structure in part by removing the insulation coating and pulling off the SUS wire is disclosed.

  Patent Document 3 separately manufactures a micropipe, forms a resist film on the outer peripheral surface of the micropipe, forms a helical space pattern on the resist film by, for example, developing a helical portion by dissolving the photosensitive portion in a spiral shape, Disclosed is a method of simultaneously forming a plurality of microcoils separated by a space pattern by forming a space pattern that circulates around a micropipe at predetermined intervals and etching it.

  In recent years, the LSI formation process has been improved, LSI miniaturization has been promoted, and the pitch and number of LSI inspection pads have been reduced, resulting in more complex and miniaturized substrates to be inspected. Since the target point set to (2) is formed narrower or smaller, the connection terminal is formed thinner. Therefore, it is required to manufacture a large number of fine connection terminals more efficiently. In order to prevent the adjacent connection terminals from coming into contact with each other and short-circuiting the connection terminals, it is preferable to form an insulating film on the connection terminal surface. It is also very difficult to form a film.

  Patent Documents 1 and 2 disclose a method of manufacturing a nickel electroformed pipe partially including a fine nickel electroformed pipe or a coiled spring structure at the stage where a linear material or SUS wire is removed. However, in order to manufacture a connection terminal to be attached to the connection jig from the manufactured nickel electroformed pipe, the pipe is further cut to a length suitable for the connection terminal, or locked with the connection jig. An additional process such as forming a part is required.

  Patent Document 3 discloses a method of manufacturing a microcoil through an additional process after manufacturing a micropipe manufactured according to Patent Document 1 or the like. In order to manufacture the connection terminal attached to the connection jig from the microcoil, an additional process as described above in connection with Patent Documents 1 and 2 is further required.

  Then, this invention aims at providing the connection terminal attached to the connection jig which has an insulating film manufactured without requiring an additional process in the step which removed the linear material and the SUS wire. .

  An object of this invention is to provide a connection terminal provided with the latching | locking part for hold | maintaining to a connection jig in the step which removed the linear raw material and the SUS wire.

  It is another object of the present invention to provide a method of manufacturing a connection terminal having an insulating film that is attached to a connection jig without requiring an additional step when a linear material or SUS wire is removed.

  Furthermore, the present invention provides a manufacturing method having high mass productivity of connection terminals having an insulating coating that is attached to a connection jig without requiring an additional step at the stage of removing a linear material or SUS wire. For the purpose.

  Furthermore, in order to improve the contact characteristics with the target point, the present invention includes a cylindrical portion having a contact portion with the target point, and an axis line between the edge of the inner wall surface and the edge of the outer wall surface of the cylindrical portion. An object of the present invention is to provide a connection terminal having different positions along the direction.

  Therefore, the connection terminal attached to the connection jig according to the present invention is a connection terminal incorporated in a connection jig that is electrically connected to a target point provided on the object, and is formed from a plating layer of a conductive material. A cylindrical tube, and the cylindrical tube is formed between a front end and a rear end over a predetermined length in a direction opposite to both ends thereof, and between the front end and the rear end. A spring portion having an axial spiral wall surface, the spring portion having an insulating layer formed along the spiral wall surface, and further, the tip end portion and the rear end of the cylindrical tube Side etching exists in the part.

  In the connection terminal, the spring portion has a side surface formed by side etching.

  In the connection terminal, the end surface of the insulating layer forming the end surface of the spiral wall surface of the spring portion is the end surface of the plating layer of the conductive material forming the end surface of the spiral wall surface of the spring portion. Is overhanging.

  In the connection terminal, the outer diameter of the spring portion is 30 to 100 μm.

  In the connection terminal, the cylindrical tube may be composed of a nickel plating layer.

  In the connection terminal, the cylindrical tube may be provided with a gold plating layer inside the nickel plating layer.

  The jig electrically connected to the target point provided on the object according to the present invention is a plurality of connection terminals incorporated in the jig, and each connection terminal is a plating layer of a conductive material. The cylindrical tube is formed between the front end and the rear end over a predetermined length in a direction facing the both ends, and between the front end and the rear end. A spring portion having a helical wall surface in the long axis direction, the spring portion having an insulating layer formed along the helical wall surface, and further, the tip portion and the rear portion of the cylindrical tube Electrically connected to the rear end portions of the plurality of connection terminals, a plurality of connection terminals having side etching at the ends, a head plate having a hole through which the tip ends of the connection terminals are inserted. A base plate having electrodes for performing the operation, and the head plate Characterized in that it comprises a support plate for holding said base plate by a predetermined distance.

  Further, according to the present invention, a method of manufacturing a connection terminal incorporated in a connection jig that is electrically connected to a target portion of an object includes forming a plating layer of a conductive material around a core material to form a cylindrical shape A step of forming a tube, a step of forming an insulating film on the outer peripheral surface of the cylindrical tube, a part of the insulating film is removed to form grooves that circulate at equal intervals, and between adjacent grooves Forming a spiral groove in the insulating film; removing the circular groove portion and the cylindrical tube exposed in the spiral groove by etching; and rotating the insulating film. The method includes a step of removing the insulating film over a predetermined distance from an end face forming the groove to expose the cylindrical tube, and a step of removing the core material.

  In the method of manufacturing the connection terminal, in a step of removing a part of the insulating film to form a groove that circulates at equal intervals, and forming a spiral groove in the insulating film between adjacent grooves, A part of the insulating film may be removed using a laser, and a spiral groove may be formed in the insulating film between the adjacent grooves.

  In the method of manufacturing the connection terminal, a plurality of the connection terminals are manufactured when the step of removing the core material is completed.

  In the method, the end face of the insulating film forming the spiral groove overhangs the end face of the plating layer of the conductive material forming the spiral groove.

  In the method, the outer diameter of the connection terminal is 30 to 100 μm.

  In addition, the connection terminal according to the present invention is a connection terminal for electrically connecting a target point provided on the target object and a predetermined connection point, and is composed of a plating layer of a conductive material, and contacts the target point. A cylindrical portion having a contact portion, wherein the abutting portion connects the edge of the inner wall surface of the cylindrical portion, the edge of the outer wall surface, and the edge of the inner wall surface and the edge of the outer wall surface. The position of the edge part of the inner wall surface of the said contact part and the edge part of an outer wall surface along the axial direction of the said cylindrical part is different including a surface.

  In the connection terminal, the surface between the edge of the inner wall surface and the edge of the outer wall surface of the contact portion includes a curved surface.

  In the connection terminal, the contact portion including the curved surface is formed in a tapered shape at the tip.

  In the connection terminal, the curved shape surface is positioned between the edge of the inner wall surface and the edge of the outer wall surface of the contact portion along the axial direction of the cylindrical portion. It is formed.

  In the connection terminal, the curved shape surface has a bottom surface on the rear end side along the axial direction of the cylindrical portion with respect to the positions of the edge of the inner wall surface and the edge of the outer wall surface of the contact portion. It is characterized in that the curved surface is formed in a concave shape.

  In the connection terminal, the plating layer of the conductive material of the cylindrical portion may include at least a nickel plating layer.

  In the connection terminal, the plating layer of the conductive material of the cylindrical portion may include at least an outer conductive material plating layer and a gold plating layer formed on the inner side.

  According to the present invention, it is possible to provide a connection terminal that can be attached to a connection jig having an insulating film without requiring an additional step when the linear material or the SUS wire is removed.

  According to the present invention, it is possible to provide a connection terminal including a locking portion to be attached to a connection jig at the stage where a linear material or SUS wire is removed.

  In addition, according to the present invention, it is possible to manufacture a connection terminal having an insulating film that is attached to a connection jig without requiring an additional step when the linear material or the SUS wire is removed.

  Furthermore, according to the present invention, it is possible to manufacture a connection terminal having an insulating coating attached to a connection jig without requiring an additional process at a stage where the linear material or the SUS wire is removed with high productivity.

  In addition, since the connecting terminal of the present invention is formed with an inclined cylindrical side surface, it has excellent contact stability when it contacts an object, and solder dust is present at the contact portion of the connecting terminal. Adhesion can be prevented.

FIG. 1A is a cross-sectional view showing an embodiment of a nickel plating layer forming step in a stage of manufacturing a connection terminal according to the present invention. FIG. 1B is a cross-sectional view showing an embodiment of the insulating film forming process in the stage of manufacturing the connection terminal according to the present invention. FIG. 1C is a cross-sectional view showing an example of a part of the insulating film removing process in the stage of manufacturing the connection terminal according to the present invention. FIG. 1D is a cross-sectional view showing an embodiment of the nickel plating layer etching process in the stage of manufacturing the connection terminal according to the present invention. FIG. 1E is a cross-sectional view showing an example of the insulating film removing process at a predetermined portion in the stage of manufacturing the connection terminal according to the present invention. FIG. 1F is a cross-sectional view showing an embodiment of a gold plating layer removing process in the stage of manufacturing the connection terminal according to the present invention. FIG. 1G is a cross-sectional view showing an embodiment of a core material stretching step at the stage of manufacturing a connection terminal according to the present invention. FIG. 1H is a cross-sectional view showing an embodiment of a core material drawing process at the stage of manufacturing the connection terminal according to the present invention. FIG. 2 (A) is a front view showing one embodiment of the connection terminal according to the present invention, and FIG. 2 (B) is a front view showing another embodiment of the connection terminal according to the present invention. FIG. 3A is a schematic configuration diagram for explaining a state in which the connection terminal according to the embodiment shown in FIG. 2A is attached to the connection jig according to the embodiment. FIG. 3B is a schematic configuration diagram for explaining a state in which the connection terminal according to the embodiment shown in FIG. 2B is attached to the connection jig according to another embodiment. FIG. 3C is a schematic configuration diagram for explaining a state in which the connection terminal according to the embodiment shown in FIG. 2B is attached to the connection jig according to another embodiment. FIG. 4A is an enlarged front view showing the contact portion of the connection terminal according to the embodiment of the present invention. FIG. 4B is an enlarged bottom view showing the contact portion of the connection terminal according to the embodiment of the present invention shown in FIG. 4A. FIG. 5A is a partially enlarged cross-sectional view of a contact portion of a connection terminal according to an embodiment of the present invention. FIG. 5B is a partially enlarged cross-sectional view of a contact portion of a connection terminal according to another embodiment of the present invention. FIG. 6A is an enlarged front view showing a contact portion of a connection terminal according to another embodiment of the present invention. 6B is an enlarged bottom view showing the contact portion of the connection terminal shown in FIG. 6A. FIG. 7 is a front view showing an embodiment of a connection terminal including a contact portion having the shape shown in FIG. 6A. FIG. 8 is a front view for explaining an embodiment in which the distal end portion of the connection terminal shown in FIG. 2 (A) has the same shape as the contact portion of FIG. 6A. FIG. 9 is a front view showing another embodiment of the connection terminal including the contact portion shown in FIG. 6A. FIG. 10 is a schematic configuration diagram for explaining a state in which the connection terminal shown in FIG. 9 is attached to the connection jig of one embodiment. FIG. 11A is an enlarged photograph of a contact portion corresponding to the contact portion of the connection terminal according to FIGS. 4A and 4B by a scanning electron microscope. FIG. 11B is an enlarged photograph of a contact portion corresponding to the contact portion of the connection terminal according to FIGS. 6A and 6B by a scanning electron microscope.

  1A to 1H are cross-sectional views showing an example of each process for manufacturing a connection terminal according to an embodiment of the present invention. In all the drawings, the thickness, length, shape, spacing between members, gaps, and the like of each member are appropriately enlarged, reduced, deformed, simplified, etc. for easy understanding. In the description of the drawing, the vertical and horizontal expressions represent directions along the plane of the drawing in the state of facing the drawing.

  FIG. 1A shows a cross-sectional view of an electroformed tube (cylindrical tube) manufactured by forming a gold plating layer 12 on the outer peripheral surface of a core material 10 and further forming a nickel plating layer 14 thereon. As the core material 10, for example, a metal wire or a resin wire having an outer diameter of 5 μm to 300 μm can be used. For example, a SUS wire can be used as the metal wire, and a synthetic resin wire such as a nylon resin or a polyethylene resin can be used as the resin wire. The gold plating layer 12 has a thickness of about 0.1 μm to 1 μm, and the nickel plating layer 14 has a thickness of about 5 μm to 50 μm. The length of the electroformed tube is preferably 50 cm or less from the viewpoint of ease of carrying work and the like, but is not limited thereto, and may be continuously manufactured without being cut.

  FIG. 1B shows the insulating film 16 formed on the outer peripheral surface of the nickel plating layer 14 of the electroformed pipe shown in FIG. 1A. The insulating film 16 also functions as a resist when a predetermined groove described later is formed. The thickness of the insulating film is about 2 μm to 50 μm. The insulating film 16 may be formed using, for example, a fluorine coating or a silicone resin material.

  Next, as shown in FIG. 1C, the insulating film 16 is removed by rotating around a predetermined width, for example, at intervals of 3 mm to 30 mm to form grooves 22a, 22b, and 22c. A part of the insulating film between them is spirally removed to form spiral grooves 24a and 24b. The nickel plating layer 14 is exposed in the portions where the grooves are formed.

  When forming these grooves, a method of irradiating the insulating film 16 with a laser beam and removing the insulating film 16 can be employed. In this case, the position of the groove is directly irradiated with a laser beam while rotating the core member 10 in the circumferential direction, and the insulating film 16 is removed by the irradiation. The output of the laser beam used in this method is adjusted so that only the insulating film 16 can be removed and the nickel plating layer is not damaged.

  Next, as shown in FIG. 1D, using the insulating film 16 as a mask, the nickel plating layer 14 exposed in the grooves 22a, 22b, 22c, 24a, and 24b is removed by etching to expose the gold plating layer 12. At this time, since the gold plating layer 12 exists between the nickel plating layer 14 and the core material 10, it is possible to prevent the nickel etching solution from reaching the core material during etching. The end surfaces exposed in the grooves 22a, 22b, 22c, 24a, and 24b of the nickel plating layer 14 removed by the etching process have a feature that side etching portions are formed in order to use the corrosive action of the etching solution. (Described later).

  Further, since the spiral grooves 24a and 24b are formed by removing the insulating film 16 in the portions by laser and then removing the nickel plating layer 14 exposed in the portions by etching, the spiral grooves 24a and 24b are formed between the spiral grooves. A side-etched portion is formed on the end face of the nickel plating layer 14 in a portion (spring portion to be described later), and the laminated insulating film 16 is overhanging with respect to the nickel plating layer 14 It becomes.

  In FIG. 1E, the nickel plating layer 14 is exposed by irradiating a laser beam to remove a predetermined length from the end face of the insulating film 16 forming the grooves 22a, 22b, and 22c. When the exposed nickel plating layer 14 is formed on the connection terminal for the connection jig, the exposed nickel plating layer 14 serves as a front end part that contacts the inspection target part or a rear end part that contacts the electrode of the connection jig connected to the inspection apparatus. They become functional parts, and their required lengths are determined according to the structure of the connecting jig. Therefore, the length for removing the insulating film 16 may be determined in consideration of them.

  Next, ultrasonic cleaning is performed to remove the gold plating layer 12 exposed in the grooves 22a, 22b, 22c, 24a, and 24b as shown in FIG. 1F.

  Next, as shown in FIG. 1G, the core material 10 is deformed so that the cross-sectional area is reduced by pulling the core material 10 in the direction away from both ends as indicated by the white arrows. One end may be fixed and only the other end may be pulled. When the core material 10 is stretched and its cross-sectional area is reduced, the gold plating layer 12 covering the outer peripheral surface of the core material 10 is peeled off from the outer peripheral surface and remains inside the electroformed tube. A space 18 is formed between the plated layer 12.

  Next, as shown in FIG. 1H, when the core material 10 is extracted, the adjacent portions are separated by the grooves 22a, 22b, and 22c, and the connection terminal 26 and the connection terminal 28 are formed separately. Become. In this way, as shown in FIG. 1H, the connection terminal can be completed without requiring another additional process at the stage of extracting the core material 10. 1A to 1H show only a part of the electroformed pipe in a simplified manner, so that only two connection terminals are manufactured in the process of FIG. 1H. By using a cast pipe, a large number of connection terminals can be manufactured at once.

  As shown in FIG. 1H, the connection terminals 26 and 28 are provided with a nickel-plated layer 14 of a cylindrical tube made of a conductive material, and a leading end portion and a rear end portion where the nickel plating layer is exposed are formed on both ends thereof. In addition, a spring portion having a helical wall surface in the major axis direction is formed between the front end portion and the rear end portion, and the insulating layer 16 is formed along the helical wall surface. Yes.

  The connection terminal of the present invention can be manufactured under the conditions of the dimensions as described above. In particular, when the outer diameter is 30 to 100 μm, the inner diameter is 20 to 90 μm, and the thickness of the insulating coating is 2 to 15 μm. Can be suitably used as a connection terminal used in a connection jig.

  FIG. 2A discloses a connection terminal 21 according to an embodiment of a cylindrical connection terminal manufactured using the steps of FIGS. 1A to 1H described above. The connection terminal 21 includes a front end portion 21a, a cylindrical tube spring portion 21c, and a rear end portion 21b. The rear end 21b is shorter than the front end 21a. 2B shows a connection terminal 20 according to another embodiment of the cylindrical connection terminal manufactured by the steps of FIGS. 1A to 1H described above, similarly to the connection terminal 21 of FIG. 2A. Disclose. However, although the order of the manufacturing process of the connection terminal of FIG. 2A and the connection terminal of FIG. 2B is the same, in the process of FIG. 1E in the manufacturing stage of the connection terminal of FIG. Since the widths of the insulating layer 16 to be removed are different in the two grooves 22a and 22b that match, the connection terminal 21 in FIG. On the other hand, the lengths of both end portions 20a of the connection terminal 20 in FIG. 2B are the same.

  2A has an outer diameter of about 50 μm, an inner diameter of about 35 μm, an overall length of about 5 mm, and a length of the end portion 21a of about 1.5 mm. It is not limited.

  The front end portion 21a of the connection terminal 21 in FIG. 2A is in contact with the inspection target portion of the object, and the rear end portion 21b is connected to an electrode of a connection jig connected to the inspection apparatus. The spring portion 21c is formed with a spring portion in which a spiral gap is formed, and exhibits an elastic force. Therefore, the spring portion 21c can expand and contract, and the spring load is determined in proportion to the magnitude of the expanding and contracting displacement. The spiral spring portions 21c and 20c shown in FIGS. 2 (A) and 2 (B) are merely examples, and the spiral portions are formed for the purpose of exerting a predetermined spring load without being limited thereto. The width, pitch, thickness and number of turns of the spring portion can be changed.

  The connection terminal 20 in FIG. 2B includes a central spring portion 20c and two end portions 20a having the same length located on both sides thereof. In other words, the connection terminal 20 is vertically symmetric. Therefore, when one of the end portions 20a of the connection terminal 20 is used as a front end portion that contacts the inspection target portion of the object, the other becomes a rear end portion connected to the electrode of the connection jig connected to the inspection apparatus. .

  The lengths of the front end portion 21a and the rear end portion 21b of the connection terminal 21 in FIG. 2A and the lengths of the two end portions 20a of the connection terminal 20 in FIG. It is determined by the length of the nickel plating exposed by removing 16 from the end face.

  When a connection terminal having two end portions 20a having the same length is used as in the connection terminal 20 in FIG. 2B, the two end portions have the same shape, the function is not specified, and the front end portion or the rear end Since it can be used for either of the parts, it is not necessary to certify the upper and lower sides when assembling into the connection jig, and assembly is facilitated.

  FIG. 3A is a partial cross-sectional view showing only a part of the connection jig in order to explain the state of the connection terminal 21 attached to the connection jig 32 according to one embodiment. In this embodiment, a head plate 38, a support plate 36, and a base plate 35 are provided to hold the plurality of connection terminals 21. These plates are held at a predetermined distance apart by a support portion (not shown) in the form of a rod or a frame. For this reason, in this embodiment, a space is formed between the head plate 38 and the support plate 36.

  A through hole 38h is formed in the head plate 38, and the distal end portion 21a of each connection terminal 21 is penetrated to guide the distal end portion 21a to the inspection point. The inner diameter of the through hole 38h is larger than the outer diameter of the tip portion 21a and smaller than the outer diameter of the insulating film 16. Therefore, since the insulating film 16 is locked to the head plate 38, the connection terminal 21 does not come out of the through hole 38h. The plurality of through-holes 38h are formed close to each other so as to have a high density so as to correspond to the positions where the target points are formed, but it is necessary to set a distance so that adjacent connection terminals 21 do not contact each other. . A through hole 36 h is formed in the support plate 36, and the rear end portion 21 b of each connection terminal 21 is inserted therethrough, and the rear end portion 21 b is guided to the electrode 40. The inner diameter of the through hole 36 h is slightly larger than the outer diameter of the insulating film 16 of the connection terminal 21. The through hole 36h of the support plate 36 preferably has a length that does not accommodate the spring portion 20c therein. This is to prevent the connection terminal 21 from being damaged by contacting the support plate 36 forming the through hole 36h during the contraction movement of the spring portion 20c. The support plate 36 is disposed so as to contact the base plate 35.

  Here, since the insulating film is formed on the outer periphery of the connection terminal according to the present invention, a plurality of through holes can be formed close to each other so as to attach the connection terminal at a considerably high density.

  Further, as shown in FIG. 3A, the electrode 40 is fixed to the base plate 35 at a position facing the through hole 38h of the head plate 38. If the base plate 35 is not provided, the connection terminal 21 is set to a length that the rear end portion 21b protrudes slightly from the position where the base plate 35 is fixed in the natural length, and therefore the state shown in FIG. 3A Then, the rear end portion 21b collides with the electrode 40, and the spring portion 21c is contracted slightly to exert a biasing force that pushes the electrode. Therefore, the state which the electrode 40 and the connecting terminal 21 contact reliably is hold | maintained. Further, since the lower end portion of the insulating film 16 is locked to the head plate 38 around the through hole 38h, the connection terminal 21 does not change the protruding amount of the tip portion 21a, and the pressing force against the target point can be reduced. Can be kept constant.

  FIG. 3B is a partial cross-sectional view showing only a part of the connection jig in order to explain the state of the connection terminal 20 attached to the connection jig 30 according to one embodiment. The connection jig 30 includes a support plate 36 and a head plate 38. They are made of insulating materials such as resin materials and ceramics. The support plate 36 holds the head plate 38 at a predetermined distance from the base plate 35.

  A through hole 38 h is formed in the head plate 38, and the distal end portion 20 a of the connection terminal 20 is inserted. At this time, the inner diameter of the through hole 38h is larger than the outer diameter of the nickel plating layer 14 (see FIG. 1H) covering the outer periphery of the tip portion 20a, but smaller than the outer diameter of the insulating film 16.

  Further, a through hole 36 h is formed in the support plate 36, and the through hole 36 h has an inner diameter slightly larger than the outer diameter of the insulating film 16, and holds the connection terminal 20 through.

  As a result of the inner diameter of the through-hole 38h being smaller than the outer diameter of the insulating film 16 of the connection terminal 20, the portion of the insulating film 16 is locked to the head plate 38, so that the connection terminal 20 does not come out of the through-hole 38h.

  Further, as shown in FIG. 3B, the base plate 35 that holds the electrode 40 is fixed so as to face the opening of the through hole 36 h of the support plate 36. If the base plate 35 is not provided, the connection terminal 20 is set to such a length that the rear end 20a protrudes slightly from the opening above the through hole 36h of the support plate 36 in the natural length. In the state shown to 3B, the rear-end part 20a collides with the electrode 40, and the spring part 20c is shrinking a little and exhibits the urging | biasing force which pushes an electrode. Therefore, the state which the electrode 40 and the connecting terminal 20 contact reliably is hold | maintained. Further, since the lower end portion of the insulating film 16 is locked to the head plate 38 around the through hole 38h, the connecting terminal 20 does not change the protruding amount of the tip portion 20a, and the pressing force against the inspection object is reduced. Can be kept constant.

  FIG. 3C is a partial cross-sectional view illustrating only a part of the connection jig in order to explain a state in which the connection terminal 20 is attached to the connection jig 31 according to another embodiment. The connection jig 31 is different from the connection jig 30 in that a portion corresponding to the support plate 36 of the connection jig 30 includes two support plates 36a and 36b. In the support plate 36 b, a tapered inclined surface 34 i is formed in the through hole 36 h, and the inner diameter of the opening portion toward the electrode 40 of the base plate 35 is smaller than the outer diameter of the insulating film 16 of the connection terminal 20.

  When the connection terminal 20 is incorporated into the connection jig 31, the head plate 38 is attached to the support plate 36a, and the head portion 20a of the connection terminal 20 is routed from above through the through hole 36h of the support plate 36a. 38 is inserted into the through hole 38h. The inserted tip portion 20a enters the through hole 38h along the support plate 36a. However, since the outer diameter of the insulating film 16 of the spring portion 20c is larger than the inner diameter of the through hole 38h, the lower end portion of the insulating film 16 is The connection terminal 20 is held by the head plate 38 by being locked to the head plate 38 around the through hole 38h.

  Next, after the connection terminal 20 is held on the head plate 38, the support plate 36b and the base plate 35 are placed on the upper end of the support plate 36a with the wide opening portion facing downward in order to attach the support plate 36b and the base plate 35 to the connection jig 31. Place it on the club. At that time, the rear end portion 20a is positioned and inserted into a wide opening portion of the through hole 36h of the support plate 36b. Since the through hole 36h of the support plate 36b is gradually narrowed along the inclined surface 34i, the rear end portion 20a is guided to the inclined surface 34i and guided to the upper narrow opening. As described above, since the through hole 36h is formed to have the inclined surface 34i that leads from the wide opening portion to the narrow opening portion, the support plate in which the end surface of the rear end portion 20a of the connection terminal 20 forms the through hole 36h. The rear end portion 20a of the connection terminal 20 can be easily inserted into the through hole 36h of the support plate 36b without being caught by the support plate 36b, and the connection terminal 20 can be reliably inserted along the inclined surface 34i. The rear end portion 20a can be guided to a narrow opening portion of the through hole 36h.

  When the rear end 20a of the connection terminal 20 reaches a narrow opening, it contacts the electrode 40 electrically connected to the inspection apparatus. If there is no electrode 40, the connection terminal 20 is set to a length that allows the rear end 20a to protrude slightly from the narrow opening of the through hole 36h of the support plate 36b. In FIG. 3C, the rear end portion 20a collides with the electrode 40, and the spring portion 20c is slightly contracted to exert a biasing force that pushes the electrode. Therefore, as in the connection jig 30 shown in FIG. 3B, the connection jig 31 can also maintain a reliable contact state between the electrode 40 and the connection terminal 20. Further, since the lower end portion of the insulating film 16 is locked to the head plate 38 around the through hole 38h, the connecting terminal 20 does not change the protruding amount of the tip portion 20a, and the pressing force against the inspection object is reduced. Can be kept constant.

  For example, when inspecting a substrate or the like, the tip surface of the tip portion 20a of the connection terminal 20 is brought into contact with the target point. Since the tip portion 20a is retracted by the drag force caused by the pressing force, the spring portion of the spring portion 20c contracts accordingly, and the tip portion of the tip portion 20a is retracted by the force of returning the spring portion. And contact with the object to be inspected. In this state, the resistance value to be inspected can be detected and the presence or absence of conduction can be determined. In addition, by having the spring part 20c in this way, even when the length of the connection terminal 20 and the height of the object vary, the spring part 20c contracts appropriately when pressed against the target point. And the edge part 20a of the connecting terminal 20 can be press-contacted to an object point, and it can prevent that an object point is damaged.

  FIG. 4A to FIG. 9 show some embodiments characterized by the shape of the contact portion of the tip end portion of the connection terminal. These connection terminals are connected not only to inspection probes, but also to connection jigs that electrically connect an object to a predetermined device, and connection treatments that connect electrode ends to electrode ends like interposers and connectors. Can also be used on tools.

  FIG. 4A is an enlarged front view showing the contact portion 41a of the connection terminal 46 according to one embodiment of the present invention. The abutting portion 41a is a portion that makes electrical connection with at least a part of the object point of the target object. 4B is a bottom view of the connection terminal 46 of FIG. 4A. The connection terminal 46 electrically connects a target point provided on the target and a predetermined connection point, and includes a cylindrical portion 41 made of a plating layer of a conductive material.

  As shown in FIG. 4B, the cylindrical portion 41 is formed of an inner wall surface and an outer wall surface, and has a space in the center. An abutting portion 41 a including an outer wall 42, an inner wall 44, and a surface 43 connecting them is formed at the tip of the cylindrical portion 41 (the lower portion in FIG. 4A). ing.

  The surface 43 of the contact portion 41a can be formed by etching, for example. The method will be described. For example, as shown in FIG. 1B, an insulating film 16 is formed on the outer peripheral surface of the nickel plating layer 14 of the electroformed tube to make a cylindrical body. Depending on the length of the connection terminal, the insulating film 16 is used as a mask, the laser beam is used to remove the insulating film 16 having a predetermined length from the cylindrical body according to the necessity as a contact, and an etching process. Then, the contact portion shown in FIG. 4A is exposed.

  By the isotropic etching, a side etching portion is formed at the end of the nickel plating layer 14. At that time, at each end of the cylindrical body, the etching solution wraps around the outer wall surface of the cylindrical body of the nickel plating layer 14 close to the insulating film 16 and erodes the outer wall surface. More eroded than. Note that since the insulating film 16 is not necessarily required, etching is performed using a resist film when the insulating film is not formed.

  As a result of forming the side etching portion at the end of the cylindrical body, as shown in FIG. 4A, the shape of the surface 43 is not flat but curved (curved shape surface 43). The breadth, size, and curvature of the curve can be changed by changing the compounding ratio, concentration, temperature, etc. of the chemical solution of the etching solution, or by changing various conditions such as the magnitude of the applied voltage during etching. .

  FIG. 5A shows a partial cross section of the contact portion 51-1a of the connection terminal 56-1. The contact portion 51-1a includes an edge portion 52-1 of the outer wall surface, an edge portion 54-1 of the inner wall surface, and a surface 53-1 therebetween. The contact part 51-1a has a curved surface 53-1, similar to the contact part 41a shown in FIGS. 4A and 4B. As shown in the figure, the edge 52-1 of the outer wall surface and the edge 54-1 of the inner wall surface are at different positions along the axial direction of the connection terminal 56-1 (vertical direction in FIG. 5A). . That is, in FIG. 5A, the position of the edge portion 52-1 on the outer wall surface is above the position of the inner wall surface edge portion 54-1 along the axial direction (on the rear end side of the connection terminal). Therefore, the surface 53-1 extends so as to connect the edge portion 52-1 of the outer wall surface and the edge portion 54-1 of the inner wall surface in an oblique direction, whereby the edge portion 54-1 of the inner wall surface is sharp. The tip is formed. Thereby, since the sharp tip can easily bite into the target point of the target object, the contact characteristic (contact stability) between the connection terminal and the target object is improved. Moreover, the adhering matter to the sharp tip portion is easily peeled off at the time of the next contact, and the contact characteristics between the connection terminal and the object are improved by the self-cleaning action.

  FIG. 5B shows a partial cross section of the contact portion 51-2a of the connection terminal 56-2 according to another embodiment. The contact portion 51-2a includes an edge portion 52-2 of the outer wall surface, an edge portion 54-2 of the inner wall surface, and a surface 53-2 therebetween. As shown in FIG. 5B, the edge portion 54-2 of the inner wall surface of the contact portion 51-2a has a sharp tip like the contact portion 51-1a in FIG. 5A, but the contact portion 51 in FIG. 5A. -1a has a smaller curvature of the curved surface of the surface 53-2 of the contact portion 51-2a in FIG. 5B than the edge 52-2 of the outer wall surface (the connection terminal 56). -2 (the rear end side), the apex (or the bottom surface) of the surface 53-2 is located and formed in a concave shape.

  FIG. 11A is an enlarged photograph taken by a scanning electron microscope for explaining an example in which a contact portion is formed by side etching at an end portion of a nickel-plated layer of a cylindrical body. The contact part contact portion shown in the photograph has an outer diameter of about 50 μm, an inner diameter of about 40 μm, and the axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 4 μm. As such, the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.

  FIG. 5A and FIG. 5B show the outline of the difference in inclination between the edges 54-1 and 54-2 of the inner wall surface, that is, the surfaces 53-1 and 53-2 near the tip. In 5A, the angle from the inner wall surface to the tangent line of the surface 54-1 is about 20 degrees while the position of the contact point of the tangent line moves from the edge portion 54-1 of the inner wall surface to the edge portion 52-1 of the outer wall surface. 5B, in FIG. 5B, the angle from the inner wall surface to the tangent line of the surface 53-2 is such that the position of the tangent line changes from the edge portion 54-2 of the inner wall surface to the edge portion 52-2 of the outer wall surface. Change from about 15 degrees to 120 degrees. That is, the tip of the contact portion 51-1a in FIG. 5A is sharper than the tip of the contact portion 51-2a in FIG. 5B.

  6A is an enlarged front view of the connection terminal 66 including a contact portion 61a having a shape different from the contact portion 41a of the connection terminal 46 of FIG. 4A. 6B is a bottom view of the connection terminal 66 of FIG. 6A. Similar to the connection terminal 46 of FIG. 4A, the connection terminal 66 electrically connects a target point provided on the target and a predetermined connection point, and is a cylindrical part 61 made of a plating layer of a conductive material. Is provided.

  As shown in FIG. 6B, the cylindrical portion 61 is formed of an inner wall surface and an outer wall surface, and has a space in the center. A contact portion 61a including an outer wall edge 62, an inner wall edge 64, and a surface 63 connecting them is formed at the tip of the cylindrical portion 61 (the lower portion in FIG. 6A). ing.

  However, unlike the surface 43 of FIG. 4A, as shown in FIG. 6A, the edge portions 62 and 64 of the surface 63 of the contact portion 61a are equidistant along the circumferential surface of the cylindrical portion 61. A substantially U-shaped notch is formed. Such a notch can be formed by an etching process like the surface 43 of the contact part 41a.

  For example, as shown in FIG. 1B, an insulating film 16 is formed on the outer peripheral surface of the nickel plating layer 14 of the electroformed tube to make a cylindrical body. Depending on the length of the connection terminal, the insulating film 16 is removed in a substantially U shape along the circumference of each end of the cylindrical body by a laser beam to expose the nickel plating layer 14. In this state, the cylindrical body is etched using the remaining insulating film 16 as a mask. At that time, at each end of the cylindrical body, the etching solution wraps around the outer wall surface of the cylindrical body of the nickel plating layer 14 from the edge of the insulating film 16 and erodes the outer wall surface. More corroded than the wall. As a result, the nickel plating layer 14 at the position where the insulating film 16 is removed in a substantially U shape is also eroded into a substantially U shape.

  As a result, as shown in FIG. 6A, in the contact portion 61a, the most protruding position 62t of the outer wall surface edge 62 and the most retracted position 62b of the outer wall surface edge 62 are the axis of the connection terminal 66. Further, the most protruded position 64 t of the inner wall edge 64 and the most retracted position 64 b of the inner wall edge 64 are also greatly separated along the axial direction of the connection terminal 66. Yes.

  FIG. 11B shows an example in which a contact portion of the shape shown in FIG. 6A (hereinafter referred to as “crown shape”) different from the shape of FIG. 11A is formed by side etching at the end of the nickel plating layer of the cylindrical body. It is an enlarged photograph by the scanning electron microscope for demonstrating. The contact portion contact portion shown in the photograph has an outer diameter of about 50 μm, an inner diameter of about 40 μm, and an axial distance between the edge of the outer wall surface and the edge of the inner wall surface is about 5 μm. The distance between the most protruding position of the edge of the outer wall surface and the lowest position of the edge of the outer wall surface is about 18 μm, and the most protruding position of the edge of the inner wall surface and the lowest of the edge of the inner wall surface The distance from the position is about 15 μm. As is apparent from the photograph, the surface between the edge of the outer wall surface and the edge of the inner wall surface is curved.

  7 to 10 show different embodiments of the connection terminal including the crown-shaped contact portion shown in FIG. 6A.

  FIG. 7 is a side view of the connection terminal 76 in which the inner cylindrical portion 71 is incorporated in the outer cylindrical portion 78. The outer cylindrical portion 78 includes a spring portion 78c between the front end portion 78a and the rear end portion 78b. The inner cylindrical portion 71 includes a crown-shaped contact portion 71a at the tip. The inner cylindrical portion 71 is fixed to the outer cylindrical portion 78 by caulking 78d. The tip of the abutting portion 71a is sharp, and when it abuts on the object, the portion extending from the most protruding position 74t of the edge of the outer wall surface to the U-shape functions to bite into the object. For this reason, the contact characteristic of the front-end | tip part with respect to a target object improves.

  FIG. 8 shows a connection terminal 86 in which a crown-shaped contact portion 81a is formed on the connection terminal 21 shown in FIG. That is, the connection terminal 86 is manufactured by forming a cylindrical contact body 81a at the tip of the cylindrical body in the steps of FIGS. 1A to 1H.

  The connection terminal 86 has a contact portion 81a at the front end, a spring portion 81c, and a rear end portion 81b formed in a cylindrical body in which the nickel plating layer 14 is formed on the gold plating layer 12. An insulating film 16 is formed on the outer peripheral surface of the cylindrical body.

  The tip of the abutting portion 81a is sharp, and when it abuts on the object, the portion extending from the most protruding position 84t of the edge of the outer wall surface to the U-shape functions to bite into the object. For this reason, the contact characteristic of the front-end | tip part with respect to a target object improves.

  FIG. 9 shows a connection terminal 96 according to another embodiment. The connection terminal 96 is a cylindrical body obtained by removing the outer insulating film 16 from the connection terminal 86 of FIG. That is, the cylindrical body is obtained by forming the nickel plating layer 14 on the gold plating layer 12, and includes a contact portion 91a at the front end, a spring portion 91c, and a rear end portion 91b.

  Insulator annular portions 95a and 95b are fixed to the outer peripheries of the contact portion 91a and the rear end portion 91b, respectively. As the annular portions 95a and 95b of the insulator, for example, those obtained by molding a resin into an annular shape can be used. These functions will be described with reference to FIG.

  A crown shape is formed in the tip contact portion 91a. The tip is sharp, and when it comes into contact with the object, the portion extending from the most protruding position 94t of the edge of the outer wall surface to the U-shape functions to bite into the object. For this reason, the contact characteristic of the front-end | tip part with respect to a target object improves.

  FIG. 10 is a partial cross-sectional view for explaining a state where a plurality of connection terminals 96 shown in FIG. 9 are attached to a connection jig 132 similar to the connection jig 32 shown in FIG. 3A. As shown in the figure, through the through holes 38h of the head plate 38, the crown-shaped contact portions 91a of the connection terminals 96 are inserted, and the most protruding position 94t of the edge of the outer wall surface is the contact target. Guided to things.

  The insulating annular portion 95 a of the contact portion 91 a is located above the head plate 38 and functions as a locking portion of the connection terminal 96. In other words, when the insulating annular portion 95 a contacts the upper surface of the head plate 38, the insulating annular portion 95 a ensures insulation between the connection terminal 96, the support plate 36, and the head plate 38. At the same time, the connection terminals are separated from each other by a predetermined distance to prevent contact therebetween.

  The insulating annular portion 95a functions to prevent the connection terminal 96 from falling out of the through hole 38h and to apply a preload to the spring portion 91c.

  Further, the annular portion 95b of the rear end portion 91b is formed to have an outer diameter slightly smaller than the inner diameter of the through hole 36h of the support plate 36, whereby the rear end portion 91b of the connection terminal 96 is formed in the through hole 36h. Since the central axis of the connection terminal 96 is held at an appropriate position by preventing the large movement, the end of the rear end 91b on the electrode side can easily and reliably come into contact with the electrode 40. Further, when the connection terminal 96 is attached to the connection jig 132 by the annular portions 95a and 95b, positioning within the through hole 36h can be easily performed, and the connection terminal 96 is pulled out from the through hole 38h by being locked to the head plate 38. Therefore, the connection jig 132 can be easily assembled.

  The contact terminal manufactured using the manufacturing method described in the manufacturing method of the present invention has its end surface (side surface) inclined in a curve from the inside to the outside.

  In the embodiment shown in FIGS. 1 to 3C, the insulating film 16 is formed and used as a resist film as necessary. In the above-described embodiments shown in FIGS. 4A to 11B, an insulating film is not always necessary. Therefore, a resist film may be used for etching.

  4A to 11B, the abutting portion 41a and the like of the cylindrical portion 41 and the like are drawn so as to be formed of a single plating layer. For example, a gold plating layer may be formed on the central axis side of the portion 41 or the like from the viewpoint of formation of the surface 43 or the like and contact stability with the target point of the target object. However, in that case, the gold plating layer may be peeled off and not present around the edge of the inner wall surface of the tip of the contact portion.

  Therefore, when the contact portion 41a and the like of the cylindrical portion 41 and the like are formed of a plurality of plating layers such as a nickel plating layer and an inner gold plating layer, The edge 42 and the like mean the edge of the outer wall surface of the plating layer formed on the outermost side in the contact portion, and the edge 44 and the like of the inner wall surface are the edges of the inner wall surface of the inner plating layer. Meaning, when a part of the plating layer is peeled off and does not exist at the tip of the contact portion, it means the edge of the inner wall surface of the inner plating layer.

  As described above, several embodiments of the connection terminal for the connection jig according to the present invention have been described, but the present invention is not limited to those embodiments, and additions, deletions, and the like that can be easily made by those skilled in the art. It should be understood that modifications and the like are included in the present invention, and that the technical scope of the present invention is defined by the description of the appended claims.

DESCRIPTION OF SYMBOLS 10 ... Core material 12 ... Gold plating layer 14 ... Nickel plating layer 16 ... Insulating film 18 ... Space 20, 21 ... Connection terminal 20a, 21a, 21b ... End part 20c , 21c: spring portions 22a, 22b, 22c, 24a, 24b ... grooves 30, 32, 132 ... connection jigs 36, 36a, 36b ... support plates 38 ... head plates 36h, 38h ... through holes 41a, 51-1a, 51-2a, 61, 71, 81a, 91a ... abutting parts 42, 52-1, 52-2, 62 ... edges 44, 54 of the outer wall surface -1, 54-2, 64 ... inner side wall edge 43, 53-1, 53-2, 63 ... surface 46, 56-1, 56-2, 66, 76, 86, 96 ... .Connection terminals 95a, 95b ... annular part

Claims (20)

A connection terminal incorporated in a connection jig electrically connected to a target point provided on the object,
Provided with a cylindrical tube made of a conductive material plating layer,
The cylindrical tube is formed between a front end portion and a rear end portion having a predetermined length in a direction opposite to both ends thereof, and a helical wall surface in a long axis direction formed between the front end portion and the rear end portion. A spring portion having
The connection terminal, wherein the spring portion has an insulating layer formed along the spiral wall surface, and side etching exists at the tip and rear ends of the cylindrical tube.   The connection terminal according to claim 1, wherein the plating layer of the conductive material of the spring portion has a side surface formed by side etching.   3. The conductive material according to claim 1, wherein an end surface of the insulating layer forming an end surface of the spiral wall surface of the spring portion forms an end surface of the spiral wall surface of the spring portion. Connection terminal that is overhanging against the end face of the plating layer.   The connection terminal according to claim 1, wherein an outer diameter of the spring portion is 30 to 100 μm.   The connection terminal according to claim 1, wherein the cylindrical tube is formed of a nickel plating layer.   6. The connection terminal according to claim 5, wherein the cylindrical tube includes a gold plating layer inside the nickel plating layer. A connection jig electrically connected to a target point provided on a target object,
A plurality of connection terminals incorporated in the jig, each connection terminal,
Provided with a cylindrical tube made of a conductive material plating layer,
The cylindrical tube is formed between a front end portion and a rear end portion having a predetermined length in a direction opposite to both ends thereof, and a helical wall surface in a long axis direction formed between the front end portion and the rear end portion. A spring portion having
The spring portion has an insulating layer formed along the spiral wall surface, and further, there are a plurality of connection terminals in which side etching exists at the front end portion and the rear end portion of the cylindrical tube,
A head plate having a hole through which the tip ends of the plurality of connection terminals are inserted;
A base plate comprising an electrode for electrically connecting to the rear ends of the plurality of connection terminals;
A connection jig comprising: a support portion that holds the head plate and the base plate spaced apart from each other by a predetermined distance. A method of manufacturing a connection terminal incorporated in a connection jig electrically connected to a target portion of an object,
Forming a cylindrical tube by forming a plating layer of a conductive material around the core; and
Forming an insulating film on the outer peripheral surface of the cylindrical tube;
Removing a part of the insulating film to form a groove that circulates at equal intervals, and forming a spiral groove in the insulating film between adjacent grooves;
Removing the cylindrical tube exposed in the circumferential groove portion and the spiral groove by an etching process;
Removing the insulating film over a predetermined distance from an end face of the insulating film forming the circulating groove, exposing the cylindrical tube;
And a step of removing the core material.   9. The method of manufacturing a connection terminal according to claim 8, wherein a part of the insulating film is removed to form grooves that circulate at equal intervals, and a spiral groove is formed in the insulating film between adjacent grooves. A method of manufacturing a connection terminal, wherein in the step, a part of the insulating film is removed using a laser and a spiral groove is formed in the insulating film between the adjacent grooves.   The method of manufacturing a connection terminal according to claim 8 or 9, wherein a plurality of the connection terminals are manufactured when the step of removing the core material is completed.   11. The method of manufacturing a connection terminal according to claim 8, wherein an end face of the insulating film forming the spiral groove is an end face of the plating layer of the conductive material forming the spiral groove. A method of manufacturing a connection terminal that is overhanging.   12. The method for manufacturing a connection terminal according to claim 8, wherein the connection terminal has an outer diameter of 30 to 100 [mu] m.   13. The method of manufacturing a connection terminal according to claim 8, wherein the insulating film is removed over a predetermined distance from an end surface of the insulating film forming the circumferential groove to expose the cylindrical tube. A method for manufacturing a connection terminal, wherein the insulating film is removed by a laser. A connection terminal for electrically connecting a target point provided on the target and a predetermined connection point,
It consists of a plating layer of a conductive material, and comprises a cylindrical portion with a contact portion with the target point,
The contact portion includes an edge of the inner wall surface of the cylindrical portion, an edge of the outer wall surface, and a surface connecting the edge of the inner wall surface and the edge of the outer wall surface,
The connection terminal in which the position along the axial direction of the cylindrical part of the edge of the inner wall surface of the contact portion and the edge of the outer wall surface is different. The connection terminal of claim 14,
The connection terminal, wherein a surface between an edge of the inner wall surface of the contact portion and an edge of the outer wall surface includes a curved surface. The connection terminal according to claim 14 or 15,
The contact terminal including the curved surface is formed in a tapered tip shape. The connection terminal according to any one of claims 14 to 16,
The curved surface is formed so that the bottom surface thereof is positioned between the edge of the inner wall surface and the edge of the outer wall surface of the contact portion along the axial direction of the cylindrical portion. A connection terminal characterized by. The connection terminal according to any one of claims 14 to 17,
The curved shape surface has a bottom surface located along the axial direction of the cylindrical portion at the rear end side of the edge of the inner wall surface and the edge of the outer wall surface of the contact portion, thereby The connecting terminal is characterized in that the curved surface is formed in a concave shape. The connection terminal according to any one of claims 14 to 18,
The connecting terminal, wherein the plating layer of the conductive material of the cylindrical portion includes at least a nickel plating layer. The connection terminal according to any one of claims 14 to 18,
The conductive material plating layer of the cylindrical portion includes at least an outer conductive material plating layer and a gold plating layer formed on the inner side thereof.