JP5821482B2 - オゾン発生装置 - Google Patents
オゾン発生装置 Download PDFInfo
- Publication number
- JP5821482B2 JP5821482B2 JP2011216942A JP2011216942A JP5821482B2 JP 5821482 B2 JP5821482 B2 JP 5821482B2 JP 2011216942 A JP2011216942 A JP 2011216942A JP 2011216942 A JP2011216942 A JP 2011216942A JP 5821482 B2 JP5821482 B2 JP 5821482B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- supplied
- dehumidifying
- reactor
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
- Drying Of Gases (AREA)
Description
11…エアフィルタ
12…コンプレッサ
13…除湿部
131…中空糸膜ユニット
131a…膜
133…センサ
134…制御手段
135…ヒータ
14…反応器
15…筺体
Claims (2)
- 供給されるガスを連続的に除湿可能な除湿手段と、
前記除湿手段で除湿されたガスが供給され、オゾンを発生させる反応器と、
供給されるガスの温度が閾値より高い場合、前記除湿手段で除湿したガスを前記反応器に導入させ、供給されるガスの温度が閾値より低い場合、前記除湿手段にガスを供給せずに、供給されるガスを前記反応器に導入する制御手段と、
を備えることを特徴とするオゾン発生装置。 - 前記除湿手段を加温する加温手段を備え、
前記制御手段は、供給されるガスの温度が前記閾値より低い場合であっても、前記除湿手段の温度が第2閾値より高くなったとき、供給されるガスを前記除湿手段に供給する
ことを特徴とする請求項1記載のオゾン発生装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011216942A JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011216942A JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013075792A JP2013075792A (ja) | 2013-04-25 |
JP5821482B2 true JP5821482B2 (ja) | 2015-11-24 |
Family
ID=48479569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011216942A Active JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5821482B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2605100B2 (ja) * | 1988-04-28 | 1997-04-30 | 東京エレクトロン株式会社 | オゾン発生装置 |
JP2658422B2 (ja) * | 1989-09-06 | 1997-09-30 | 富士電機株式会社 | 膜式ドライヤ付のオゾナイザ |
JPH05254804A (ja) * | 1992-03-06 | 1993-10-05 | Nippon Steel Chem Co Ltd | オゾン発生装置 |
JPH0859211A (ja) * | 1994-08-19 | 1996-03-05 | Toshiba Corp | オゾン発生装置 |
JPH09301702A (ja) * | 1996-05-14 | 1997-11-25 | Toshiba Corp | オゾン発生装置 |
-
2011
- 2011-09-30 JP JP2011216942A patent/JP5821482B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2013075792A (ja) | 2013-04-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2023964B1 (en) | Decontamination system with air bypass | |
JP2012151144A (ja) | 吸湿呼吸器及び吸湿呼吸装置 | |
KR101774862B1 (ko) | 에어 드라이어를 제어하는 방법 | |
JP5268401B2 (ja) | ヒートポンプ式乾燥装置 | |
KR101805252B1 (ko) | 건조공기 일부를 재생공정에 사용하는 퍼지 및 논퍼지 겸용 압축공기 건조방법 및 장치 | |
KR20140107922A (ko) | 냉각단계 중 압축습공기 냉각 후 제습탱크로 순환시키는 압축공기 건조방법 및 장치 | |
CN109100389B (zh) | 一种高低温环境舱露点控制系统 | |
JP2008011928A (ja) | 滅菌システム | |
JP5821482B2 (ja) | オゾン発生装置 | |
JP6094569B2 (ja) | 環境試験装置 | |
JP5686311B2 (ja) | ガス除去システム | |
JP5761733B2 (ja) | 除染装置 | |
JP2005344987A (ja) | 除湿乾燥装置 | |
KR101483628B1 (ko) | 흡착식 제습기 및 이의 제어방법 | |
JP2004255350A (ja) | 吸着式除湿装置 | |
KR101838367B1 (ko) | 유지 보수가 용이한 퍼지 및 논퍼지 겸용 압축공기 건조방법 및 장치 | |
KR101728241B1 (ko) | 재생공정 중 냉각과정에 사용된 건조공기를 회수하는 압축공기 건조방법 및 장치 | |
CA2811835A1 (en) | Reverse cooling desiccant regeneration | |
JP2008011926A (ja) | 滅菌システム | |
US20140260978A1 (en) | Reverse cooling desiccant regeneration | |
JP2013075797A (ja) | オゾン発生装置 | |
JP2015177560A (ja) | 水素ガス乾燥装置およびこれを備えた回転電機システム | |
KR200335257Y1 (ko) | 제습기의 안전장치 | |
KR101728279B1 (ko) | 압축공기 건조방법 및 장치 | |
KR101878928B1 (ko) | 압축공기 건조장치 및 재생방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20140723 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20150310 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20150422 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150616 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150908 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150921 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5821482 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |