JP5815271B2 - Method for manufacturing thin plate-like SiC / Al composite material - Google Patents
Method for manufacturing thin plate-like SiC / Al composite material Download PDFInfo
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- JP5815271B2 JP5815271B2 JP2011096118A JP2011096118A JP5815271B2 JP 5815271 B2 JP5815271 B2 JP 5815271B2 JP 2011096118 A JP2011096118 A JP 2011096118A JP 2011096118 A JP2011096118 A JP 2011096118A JP 5815271 B2 JP5815271 B2 JP 5815271B2
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- 239000002131 composite material Substances 0.000 title claims description 26
- 238000000034 method Methods 0.000 title claims description 24
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- 238000005242 forging Methods 0.000 claims description 30
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 25
- 239000000843 powder Substances 0.000 claims description 19
- 238000005266 casting Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 229910052749 magnesium Inorganic materials 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 52
- 229910010271 silicon carbide Inorganic materials 0.000 description 52
- 239000011777 magnesium Substances 0.000 description 20
- 239000002245 particle Substances 0.000 description 10
- 238000005096 rolling process Methods 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 239000011812 mixed powder Substances 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000003961 penetration enhancing agent Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- -1 magnesium nitride Chemical class 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Description
本発明は、ＳｉＣ（炭化ケイ素）とＡｌ（アルミニウム）を主成分とするＳｉＣ／Ａｌ系複合材料からなる薄板材の製造方法に関する。 The present invention relates to a method for manufacturing a thin plate material made of a SiC / Al based composite material mainly composed of SiC (silicon carbide) and Al (aluminum).
ＳｉＣ／Ａｌ系複合材料は、軽量で熱伝導率が高く熱膨張率が広範囲で制御可能であるという優れた特性を有し、原料のＳｉＣとＡｌが共に比較的安価であるので、液晶製造装置や半導体製造装置等の構成部材を形成する材料として使用されている。ＳｉＣ／Ａｌ系複合材料の製造方法は、種々提案されている。 The SiC / Al composite material has excellent characteristics that it is lightweight, has high thermal conductivity, and the thermal expansion coefficient can be controlled over a wide range. Since both raw materials SiC and Al are relatively inexpensive, a liquid crystal manufacturing apparatus It is used as a material for forming structural members such as semiconductor manufacturing equipment. Various methods for producing SiC / Al based composite materials have been proposed.
例えば、特許文献１には、Ｍｇ（マグネシウム）などの浸透増加剤の存在下で、ＳｉＣ多孔体の空隙に溶融Ａｌを非加圧浸透させる方法が記載されている。特許文献２には、金型内でＳｉＣ多孔体の空隙に溶融Ａｌを加圧浸透させる方法が記載されている。 For example, Patent Document 1 describes a method in which molten Al is non-pressurized and permeated into the voids of a SiC porous body in the presence of a penetration enhancer such as Mg (magnesium). Patent Document 2 describes a method in which molten Al is pressed and infiltrated into a void of a SiC porous body in a mold.
特許文献３には、溶融ＡｌにＳｉＣ粒子を添加した混合物を鋳造する方法が記載されている。特許文献４には、ＳｉＣ粉末とＡｌ粉末との混合粉末を成形し、この成形体を液相焼結させる方法が記載されている。 Patent Document 3 describes a method of casting a mixture obtained by adding SiC particles to molten Al. Patent Document 4 describes a method of forming a mixed powder of SiC powder and Al powder and liquid-phase sintering the formed body.
特許文献５には、溶融ＡｌにＳｉＣ粒子を添加した混合物を双ロール式鋳造装置で鋳造してシート状に形成し、さらに圧延して、薄板状に成形する方法が記載されている。 Patent Document 5 describes a method in which a mixture obtained by adding SiC particles to molten Al is cast into a sheet by a twin roll casting apparatus, and further rolled to form a thin plate.
特許文献６には、ＳｉＣ粉末とＡｌ粉末との混合粉末を成形し、この成形体を６００℃以上Ａｌの融点以下の温度範囲で焼結し、さらに、この焼結体を６００℃以上の温度に予備加熱し、金型内で加圧加熱処理（熱間鍛造）する方法が記載されている。 In Patent Document 6, a mixed powder of SiC powder and Al powder is molded, the molded body is sintered in a temperature range of 600 ° C. or higher and below the melting point of Al, and the sintered body is further heated to a temperature of 600 ° C. or higher. Describes a method of preheating and pressurizing and heating (hot forging) in a mold.
しかしながら、特許文献１，２に記載の方法では、中間体としてＳｉＣの多孔体（プリフォーム）を形成するが、プリフォームを厚さ２ｍｍ前後の薄板形状に形成することは非常に困難であり、薄板状のＳｉＣ／Ａｌ系複合材料を形成することができない。 However, in the methods described in Patent Documents 1 and 2, a SiC porous body (preform) is formed as an intermediate, but it is very difficult to form the preform into a thin plate shape with a thickness of about 2 mm. A thin plate-like SiC / Al-based composite material cannot be formed.
特許文献３，４に記載の方法では、冷却時のＡｌ収縮による引け巣が発生して、ボイドが存在しやすい。 In the methods described in Patent Documents 3 and 4, shrinkage cavities are generated due to Al contraction during cooling, and voids tend to exist.
特許文献５に記載の方法では、冷却時のＡｌ収縮による引け巣が発生して、ボイドが存在しやすい。さらに、ＳｉＣとＡｌとの濡れ性が悪いので、Ａｌ含浸されない空隙部分が残りやすい。 In the method described in Patent Document 5, shrinkage cavities are generated due to Al contraction during cooling, and voids tend to exist. Furthermore, since the wettability between SiC and Al is poor, voids that are not impregnated with Al tend to remain.
特許文献６に記載の方法では、ＳｉＣとＡｌとの濡れ性が悪いので、Ａｌ含浸されない空隙部分が残りやすい。さらに、０．５〜１．０ＧＰａと高い加圧力で鍛造する必要があるので、鍛造装置が過大となり、製造コストが非常に高くなる。 In the method described in Patent Document 6, since the wettability between SiC and Al is poor, void portions that are not impregnated with Al tend to remain. Furthermore, since it is necessary to forge with a high pressure of 0.5 to 1.0 GPa, the forging device becomes excessive and the production cost becomes very high.
本発明は、これらの問題に鑑みてなされたものであり、ボイドが存在するおそれが少なく、製造コストが安価な薄板状のＳｉＣ／Ａｌ系複合材の製造方法を提供することを目的とする。 The present invention has been made in view of these problems, and an object of the present invention is to provide a method for producing a thin plate-like SiC / Al-based composite material that is less likely to have voids and is low in production cost.
本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法は、溶融ＡｌにＳｉＣ粉末と前記溶融Ａｌに対して１〜３重量％のＭｇとを添加した溶湯を生成する工程と、前記溶湯を鋳造して中間板状体を形成する工程と、前記中間板状体を１ＭＰａ以下の加圧力で熱間鍛造して薄厚化し、厚さ２ｍｍ以下の薄板材を形成する工程とを備えることを特徴とする。 A method for producing a thin plate-like SiC / Al-based composite material according to the present invention includes a step of generating a melt in which SiC powder and 1-3 wt% Mg are added to molten Al, and the molten metal. And forming a thin plate material having a thickness of 2 mm or less by hot forging the intermediate plate with a pressure of 1 MPa or less to form a thin plate material. Features.
本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法によれば、一旦中間板状体を形成して、この中間板状体に対して熱間鍛造を行うことにより、ＳｉＣ／Ａｌ系複合材料からなる薄板材を形成している。そして、Ｍｇを添加しているので、溶湯におけるＳｉＣとＡｌとの濡れ性は良好となり、この溶湯を鋳造して形成した中間板状体におけるＳｉＣとＡｌとの濡れ性も良好となる。 According to the method for producing a thin plate-like SiC / Al-based composite material according to the present invention, an intermediate plate-like body is once formed, and hot forging is performed on the intermediate plate-like body, thereby producing a SiC / Al-based material. A thin plate made of a composite material is formed. Since Mg is added, the wettability between SiC and Al in the molten metal is good, and the wettability between SiC and Al in an intermediate plate formed by casting the molten metal is also good.
これにより、中間板状体に対する熱間鍛造の加圧力を１ＭＰａ以下にすることができる。よって、上記特許文献５に記載の方法とは異なり、加圧力が１ＭＰａ以下の安価な鍛造装置を使用することが可能となり、製造コストが低下する。熱間鍛造の加圧力は１０〜３０ｋＰａとすることも可能である。 Thereby, the pressure of the hot forging with respect to an intermediate plate-like body can be 1 MPa or less. Therefore, unlike the method described in Patent Document 5, an inexpensive forging device having a pressure of 1 MPa or less can be used, and the manufacturing cost is reduced. Pressure of hot forging is also possible to 10 to 30 k Pa.
また、中間板状体を熱間鍛造して薄厚化するので、緻密化され、薄板材の冷却時にＡｌ収縮による引け巣が発生せず、ボイドが存在するおそれが少なくなる。 Further, since the intermediate plate-like body is thinned by hot forging, it is densified, shrinkage cavities due to Al contraction do not occur when the thin plate material is cooled, and there is less possibility of voids.
本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法において、前記ＭｇはＭｇ３Ｎ２の態様で添加されることが好ましい。この場合、溶湯及び中間板状におけるＳｉＣとＡｌとの濡れ性が特に良好となる。 In the method for producing a thin plate-like SiC / Al-based composite material according to the present invention, the Mg is preferably added in the form of Mg 3 N 2 . In this case, the wettability between SiC and Al in the molten metal and intermediate plate is particularly good.
本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法において、前記熱間鍛造時の温度は５００〜７００℃であることが好ましい。熱間鍛造時の温度が５００℃未満の場合には、中間板状体の粘度が高過ぎるため、鍛造が困難となる。７００℃を越える場合には、中間板状体の粘度が低過ぎるため、Ａｌが溶出しやすくなる。 In the method for manufacturing a thin plate-like SiC / Al composite material according to the present invention, the temperature during the hot forging is preferably 500 to 700 ° C. When the temperature during hot forging is less than 500 ° C., forging becomes difficult because the viscosity of the intermediate plate is too high. When it exceeds 700 ° C., the viscosity of the intermediate plate is too low, so that Al is likely to elute.
本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法は、図１を参照して、溶融ＡｌにＳｉＣ粉末とＭｇとを添加した溶湯Ｍを生成する工程と、溶湯Ｍを鋳造して中間板状体Ｃを形成する工程と、中間板状体Ｃを熱間鍛造して薄厚化し、厚さ２ｍｍ以下の薄板材を形成する工程とを備えている。以下、各工程について、詳細に説明する。 With reference to FIG. 1, a method for producing a thin plate-like SiC / Al composite material according to the present invention includes a step of producing a molten metal M obtained by adding SiC powder and Mg to molten Al, and casting the molten metal M. A step of forming the intermediate plate-like body C, and a step of hot-forging the intermediate plate-like body C to reduce the thickness to form a thin plate material having a thickness of 2 mm or less. Hereinafter, each step will be described in detail.
最初に、溶融ＡｌにＳｉＣ粉末と金属Ｍｇとを添加して攪拌し、溶湯Ｍを生成する工程を行う。 First, a step of adding molten SiC powder and metal Mg to molten Al and stirring to generate molten metal M is performed.
溶融Ａｌとしては、純アルミニウムの他、各種圧延用合金、鋳造用合金を用いることができる。ただし、複合材の熱伝導性が重要とされる場合には、高純度であることが好ましく、その純度は９９．５％以上であることが好ましい。 As the molten Al, various rolling alloys and casting alloys can be used in addition to pure aluminum. However, when the thermal conductivity of the composite material is important, high purity is preferable, and the purity is preferably 99.5% or more.
ＳｉＣ粉末は、９９．０％以上の高純度であることが好ましい。純度が低い場合には、微量成分により浸透増加剤Ｍｇの効果が低下し、さらに、炉材に長期的な損傷を与えるなどの影響を及ぼすおそれがある。ＳｉＣ粉末の平均粒径は、１〜３０μｍであることが好ましい。粒径が粗大である場合には、ＳｉＣ粉末を溶湯Ｍ中に好適に分散させることが困難となる。粒径が微細過ぎる場合には、粒子同士が凝集しやすくなり、やはりＳｉＣ粉末を溶湯Ｍ中に好適に分散させることが困難となる。 The SiC powder preferably has a high purity of 99.0% or more. When the purity is low, the effects of the penetration enhancer Mg are reduced by a trace amount component, and there is a possibility that the furnace material may be damaged for a long time. The average particle size of the SiC powder is preferably 1 to 30 μm. When the particle size is coarse, it is difficult to suitably disperse the SiC powder in the molten metal M. If the particle size is too fine, the particles tend to aggregate and it is difficult to disperse the SiC powder in the melt M.
ＳｉＣ粉末の充填率（ＳｉＣ粉末等を含む溶湯Ｍ全体に対するＳｉＣ粉末の体積占有率）は、好ましくは１０〜４０体積％であり、より好ましくは２０〜３０体積％である。ＳｉＣ粉末の充填率が１０体積％未満の場合には、剛性等の物性面でＡｌに対する優位性が乏しく、複合材とする意味が薄れる。４０体積％を超える場合には、ＳｉＣ粉末を溶湯Ｍ中に好適に分散させることが困難となる。 The filling rate of SiC powder (volume occupation ratio of SiC powder with respect to the entire molten metal M containing SiC powder and the like) is preferably 10 to 40% by volume, and more preferably 20 to 30% by volume. When the filling rate of the SiC powder is less than 10% by volume, the advantage over Al is poor in terms of physical properties such as rigidity, and the meaning of the composite material is reduced. When exceeding 40 volume%, it becomes difficult to disperse | distribute SiC powder in the molten metal M suitably.
金属Ｍｇは、その窒化物であるＭｇ３Ｎ２（窒化マグネシウム）の態様で添加されることが好ましい。Ｍｇ３Ｎ２の添加により、ＳｉＣとＡｌとの濡れ性が向上する。ＭｇはＳｉＣの粒子表面に接触すると、粒子表面を活性化させるため、Ａｌ溶湯との濡れ性が良くなる。この濡れ性向上効果は、Ｍｇが窒化物の形態（Ｍｇ３Ｎ２）である場合に特に高い。 Metal Mg is preferably added in the form of its nitride, Mg 3 N 2 (magnesium nitride). Addition of Mg 3 N 2 improves wettability between SiC and Al. When Mg comes into contact with the SiC particle surface, the particle surface is activated, so that the wettability with the molten Al is improved. This wettability improving effect is particularly high when Mg is in the form of nitride (Mg 3 N 2 ).
Ｍｇ３Ｎ２の溶解Ａｌに対する添加量は、１．０〜３．０重量％であることが好ましい。Ｍｇ３Ｎ２の添加量が１．０重量％未満の場合には、濡れ性の改善効果がない。３．０重量％を超える場合には、長期的に複合材が変質又は崩壊するおそれがある。 The amount of Mg 3 N 2 added to dissolved Al is preferably 1.0 to 3.0% by weight. When the added amount of Mg 3 N 2 is less than 1.0% by weight, there is no effect of improving wettability. If it exceeds 3.0% by weight, the composite material may deteriorate or collapse over the long term.
次に、溶湯Ｍを鋳造して中間板状体Ｃを形成する工程を行う。この工程は、例えば、図１に示すような鋳造装置１を用いて行われる。ただし、双ロール式、片ロール式、ベルト車輪式、双ベルト式など、鋳造装置の形式は限定されない。 Next, the process of casting the molten metal M to form the intermediate plate-like body C is performed. This step is performed using, for example, a casting apparatus 1 as shown in FIG. However, the type of casting apparatus is not limited, such as a twin roll type, a single roll type, a belt wheel type, and a double belt type.
溶湯Ｍは、回転する攪拌羽根などを備えた攪拌器２によって適宜攪拌されて、ＳｉＣ粒子が好適に分散した状態でルツボ３内に収容される。ルツボ３から堰４内に供給された溶湯Ｍは、回転ロール５，６の隙間を通過して、シート状体Ｓとなって下方に排出される。 The molten metal M is appropriately stirred by a stirrer 2 equipped with a rotating stirring blade and the like, and is accommodated in the crucible 3 in a state where SiC particles are suitably dispersed. The molten metal M supplied from the crucible 3 into the weir 4 passes through the gap between the rotary rolls 5 and 6, and is discharged downward as a sheet-like body S.
ルツボ３内の溶湯Ｍの温度は、溶湯Ｍが溶融状態で回転ロール５，６間に供給され、且つ回転ロール５，６間を通過する間に凝固するよう、溶融Ａｌの種類に応じて設定するが、好ましくは液相温度以上、より好ましくは液相温度より２０〜３０℃高い温度である。 The temperature of the molten metal M in the crucible 3 is set according to the type of molten Al so that the molten metal M is supplied in a molten state and is solidified while passing between the rotating rolls 5 and 6. However, the temperature is preferably equal to or higher than the liquidus temperature, more preferably 20 to 30 ° C higher than the liquidus temperature.
回転ロール５，６の隙間は、得ようとするシート状体Ｓの厚みに応じ、任意に調整可能である。ただし、隙間が２ｍｍより狭くなると、溶融Ａｌの種類によってはシート状体Ｓが形成され難くなる場合がある。 The gap between the rotary rolls 5 and 6 can be arbitrarily adjusted according to the thickness of the sheet S to be obtained. However, if the gap is narrower than 2 mm, the sheet-like body S may be difficult to be formed depending on the type of molten Al.
なお、必要に応じて、ルツボ３内の溶湯Ｍに対して加圧する押し湯を行ってもよい。加圧力は１〜３ＭＰａ程度でよい。 In addition, you may perform the hot water pressurized with respect to the molten metal M in the crucible 3 as needed. The applied pressure may be about 1 to 3 MPa.
鋳造装置１の下流側には、圧延機７が配置されており、この圧延機７でシート状体Ｓが薄厚化される。ただし、必ずしも圧延する必要はない。 A rolling mill 7 is disposed on the downstream side of the casting apparatus 1, and the sheet S is thinned by the rolling mill 7. However, it is not always necessary to roll.
圧延機７の下流側には、切断機８が配置されている。この切断機８でシート状体Ｓは所望の寸法に切断されて、中間板状体Ｃが形成される。切断機８は、ウォータジェット機など、シート状体Ｓを切断可能なものであればよく、切断方法などは任意である。 A cutting machine 8 is arranged on the downstream side of the rolling mill 7. The sheet-like body S is cut into a desired dimension by the cutting machine 8 to form an intermediate plate-like body C. The cutting machine 8 should just be what can cut | disconnect the sheet-like body S, such as a water jet machine, and the cutting method etc. are arbitrary.
最後に、中間板状体Ｃを熱間鍛造して厚さ２ｍｍ以下の薄板材を形成する工程を行う。この工程は、例えば、熱プレス機９の金型内に中間板状体Ｃを配置して行われる。 Finally, a step of hot forging the intermediate plate C to form a thin plate material having a thickness of 2 mm or less is performed. This step is performed, for example, by placing the intermediate plate-like body C in the mold of the hot press machine 9.
熱間鍛造の加圧力は、１０ｋＰａ〜１ＭＰａであり、より好ましくは１０〜３０ｋＰａである。加圧力が１０ｋＰａ未満である場合には、鍛造による緻密化の効果が発揮され難い。１ＭＰａを超える場合には、鍛造装置が過大となり、製造コストが高くなる。 Pressure of hot forging is 10 k Pa~1MPa, more preferably 10 to 30 k Pa. If pressure is less than 10 k Pa is hardly effect of densification is exhibited by forging. If it exceeds 1 MPa, the forging device becomes excessive and the production cost increases.
熱間鍛造時の温度は、好ましくは５００〜７００℃であり、さらに好ましくは５１０〜６５０℃である。熱間鍛造時の温度が５００℃未満の場合には、中間板状体Ｃの粘度が高過ぎるため、鍛造が困難となる。７００℃を越える場合には、中間板状体Ｃの粘度が低過ぎるため、Ａｌが溶出しやすくなる。 The temperature during hot forging is preferably 500 to 700 ° C, more preferably 510 to 650 ° C. When the temperature during hot forging is less than 500 ° C., the forging is difficult because the viscosity of the intermediate plate-like body C is too high. When the temperature exceeds 700 ° C., the viscosity of the intermediate plate-like body C is too low, so that Al is easily eluted.
熱間鍛造は、大気中で行えばよいが、Ｎ２中、Ａｒ等の不活性ガス中などの雰囲気で行ってもよい。 The hot forging may be performed in the air, but may be performed in an atmosphere such as N 2 or an inert gas such as Ar.
これにより、厚さ２ｍｍ以下の薄板状のＳｉＣ／Ａｌ系複合材を得ることができる。 Thereby, a thin plate-like SiC / Al-based composite material having a thickness of 2 mm or less can be obtained.
以上のように、本発明に係る薄板状のＳｉＣ／Ａｌ系複合材の製造方法によれば、一旦中間板状体Ｃを形成して、この中間板状体Ｃに対して熱間鍛造を行うことにより、ＳｉＣ／Ａｌ系複合材料からなる薄板材を形成している。 As described above, according to the method for manufacturing a thin plate-like SiC / Al-based composite material according to the present invention, the intermediate plate C is once formed and hot forging is performed on the intermediate plate C. Thereby, the thin plate material which consists of a SiC / Al type composite material is formed.
Ｍｇ３Ｎ２が添加されているので溶湯ＭにおけるＳｉＣとＡｌとの濡れ性は良好となり、この溶湯Ｍを鋳造して形成した中間板状体ＣにおけるＳｉＣとＡｌとの濡れ性も良好となる。これにより、中間板状体Ｃに対する熱間鍛造の加圧力を１ＭＰａ以下にすることができる。よって、上記特許文献５に記載の方法とは異なり、加圧力が１ＭＰａ以下の安価な鍛造装置を使用することが可能となり、製造コストが低下する。熱間鍛造の加圧力は１０〜３０ｋＰａとすることも可能である。 Since Mg 3 N 2 is added, the wettability between SiC and Al in the molten metal M is good, and the wettability between SiC and Al in the intermediate plate C formed by casting the molten metal M is also good. . Thereby, the pressure of the hot forging with respect to the intermediate plate-like body C can be 1 MPa or less. Therefore, unlike the method described in Patent Document 5, an inexpensive forging device having a pressure of 1 MPa or less can be used, and the manufacturing cost is reduced. Pressure of hot forging is also possible to 10 to 30 k Pa.
また、中間板状体Ｃを熱間鍛造して薄厚化するので、緻密化され、薄板材の冷却時のＡｌ収縮により引け巣が発生せず、ボイドが存在するおそれが少ない。 Further, since the intermediate plate C is thinned by hot forging, the intermediate plate C is densified, shrinkage cavities do not occur due to Al shrinkage during cooling of the thin plate material, and there is little possibility that voids exist.
得られたＳｉＣ／Ａｌ系複合材は、薄板で熱伝導が高いので、放熱基板として好適に使用され得る。また、得られたＳｉＣ／Ａｌ系複合材は、薄板で緻密な組織を有するので、シール材として好適に使用され得る。 Since the obtained SiC / Al composite material is a thin plate and has high thermal conductivity, it can be suitably used as a heat dissipation substrate. Moreover, since the obtained SiC / Al type composite material is a thin plate and has a dense structure, it can be suitably used as a sealing material.
以下、本発明の実施例を具体的に挙げ、本発明を説明する。 Hereinafter, the present invention will be described with specific examples of the present invention.
まず、図１を参照して、純度９９．５％の溶融Ａｌに、純度９９．０％で平均粒径１３μｍのＳｉＣ粉末とＭｇ３Ｎ２とを添加し、攪拌器２で攪拌して、ルツボ３内に溶湯Ｍを生成した。溶融ＡｌとＳｉＣ粉末との体積比は７０：３０であり、Ｍｇ３Ｎ２の溶融Ａｌに対する添加量は２．０重量％であった。 First, referring to FIG. 1, SiC powder having a purity of 99.0% and an average particle size of 13 μm and Mg 3 N 2 are added to molten Al having a purity of 99.5%, and the mixture is stirred with a stirrer 2. Molten metal M was generated in the crucible 3. The volume ratio of molten Al to SiC powder was 70:30, and the amount of Mg 3 N 2 added to molten Al was 2.0% by weight.
次に、図１に示した鋳造装置を用いて、溶湯Ｍを鋳造して厚さ３．５ｍｍのシート状体Ｓを形成した。ルツボ３内の溶湯Ｍの温度は６５０℃であった。 Next, using the casting apparatus shown in FIG. 1, the molten metal M was cast to form a sheet S having a thickness of 3.5 mm. The temperature of the molten metal M in the crucible 3 was 650 ° C.
次に、圧延機７で、シート状体Ｓを熱間圧延し、厚さ２．０ｍｍのシート状体Ｓを得た。 Next, the sheet-like body S was hot-rolled by the rolling mill 7 to obtain a sheet-like body S having a thickness of 2.0 mm.
次に、ウォータジェット機からなる切断機８で、圧延後のシート状体Ｓを１５０×２００ｍｍの長方形板状に切断して、中間板状体Ｃを得た。 Next, with the cutting machine 8 which consists of a water jet machine, the sheet-like body S after rolling was cut | disconnected to the rectangular plate shape of 150x200 mm, and the intermediate plate-like body C was obtained.
最後に、中間板状体Ｃを熱プレス機９で熱間鍛造して薄板材を得た。熱間鍛造は、大気中で、６００℃の温度と２０ｋＰａの加圧力で行った。これにより、厚さ２．０ｍｍで１５０×２００ｍｍの長方形板状の薄板材を得た。そして、この薄板材の見掛密度、気孔率、常温２３℃における熱伝導率を測定した。これらの結果を表１の実施例の欄にまとめた。 Finally, the intermediate plate C was hot forged with a hot press 9 to obtain a thin plate material. Hot forging, in air, were carried out under a pressure of temperature and 20 k Pa of 600 ° C.. Thereby, a rectangular plate-like thin plate material having a thickness of 2.0 mm and 150 × 200 mm was obtained. And the apparent density of this thin plate | board material, the porosity, and the heat conductivity in normal temperature 23 degreeC were measured. These results are summarized in the column of Examples in Table 1.
また、比較例１として上記特許文献３に記載されたような鋳造法、比較例２として上記特許文献５に記載されたような双ロール式の鋳造圧延法、及び比較例３として上記特許文献６に記載されたような熱間鍛造法によって、ＳｉＣ／Ａｌ系複合材料を作製した。これらの結果を表１の比較例１〜３の欄にまとめた。 Moreover, the casting method as described in the said patent document 3 as the comparative example 1, the twin roll type casting rolling method as described in the said patent document 5 as the comparative example 2, and the said patent document 6 as the comparative example 3. A SiC / Al composite material was produced by a hot forging method as described in 1). These results are summarized in the columns of Comparative Examples 1 to 3 in Table 1.
表１から、実施例は、比較例１〜３と比較して、熱伝導率が向上し、且つ気孔率が低下していることが分かる。よって、実施例では、良好な緻密化が行われたことが分かる。 From Table 1, it can be seen that in the example, the thermal conductivity is improved and the porosity is reduced as compared with Comparative Examples 1 to 3. Therefore, it can be seen that good densification was performed in the examples.
１…鋳造装置、 ２…攪拌器、 ３…ルツボ、 ４…堰、 ５，６…回転ロール、 ７…圧延機、 ８…切断機、 ９…熱プレス機、 Ｃ…中間板状体、 Ｍ…溶湯、 Ｓ…シート状体。 DESCRIPTION OF SYMBOLS 1 ... Casting apparatus, 2 ... Stirrer, 3 ... Crucible, 4 ... Weir, 5, 6 ... Rotating roll, 7 ... Rolling mill, 8 ... Cutting machine, 9 ... Hot press machine, C ... Intermediate plate, M ... Molten metal, S ... sheet-like body.
Claims (4)
前記溶湯を鋳造して中間板状体を形成する工程と、
前記中間板状体を１ＭＰａ以下の加圧力で熱間鍛造して薄厚化し、厚さ２ｍｍ以下の薄板材を形成する工程とを備えることを特徴とする薄板状のＳｉＣ／Ａｌ系複合材の製造方法。 Producing a molten metal obtained by adding SiC powder to molten Al and 1-3 wt% Mg based on the molten Al;
Casting the molten metal to form an intermediate plate,
Manufacturing the thin plate-like SiC / Al composite material comprising a step of thinning the intermediate plate body by hot forging with a pressure of 1 MPa or less to form a thin plate material having a thickness of 2 mm or less. Method.
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