JP5801674B2 - Image display device and program for direct drawing device - Google Patents

Description

  The present invention relates to a technique for displaying drawing data used in a direct drawing apparatus on a display in advance.

  In recent years, a method of drawing a pattern directly on a drawing object such as a semiconductor substrate from design data in a vector format designed by CAD (Computer Aided Design) or the like without using a photomask (hereinafter referred to as a direct drawing method). ) Has begun to be introduced.

  An apparatus for drawing a pattern by a direct drawing method (hereinafter referred to as “direct drawing apparatus”) uses raster data generated by developing vector format design data in RIP (Raster Image Processing). Drawing is performed.

  In the case of such a direct drawing method, it is necessary to inspect the raster data itself as to whether or not the RIP expansion has been correctly executed.

  For example, in Patent Document 1, design data described in vector format is converted into raster data for drawing, and then raster data is converted again into data described in vector format, and converted into design data and vector format. A technique for comparing the obtained data is disclosed.

  In addition, Patent Document 2 compares the design data described in the vector format with the drawing data converted from the design data to obtain a difference graphic, and removes the difference graphic to eliminate the problem caused by data conversion. A technique for removing the error factor and inspecting raster data is disclosed.

  Patent Document 3 discloses a technique for determining the presence / absence of a defect by comparing each value of a drawing condition applied when a wiring pattern is drawn on a substrate with a threshold value used for determining a defect. ing.

JP 2008-242885 A JP 2009-111148 A Japanese Patent No. 4450769

  Incidentally, such RIP deployment is performed based on predetermined RIP parameters set in advance. However, the operator has to change the RIP parameter immediately before the drawing process is performed due to, for example, a process step condition such as the state of the etching solution, a restriction due to the specifications of the direct drawing apparatus, or a change in the drawing policy. There is. In this case, the operator needs to check how the pattern represented by the image data after RIP development has changed before and after the RIP parameter change due to the possibility of an erroneous setting of the RIP parameter after the change. There is.

  In the techniques disclosed in Patent Documents 1 to 3, it is easy to overlook a changed portion of a pattern represented by image data due to a parameter change. Further, since the entire design data has to be RIP-developed when performing the inspection, there is a problem that time loss increases.

  Such a problem is not limited to the case where the RIP parameter is changed before the drawing process is performed, and generally can occur when the difference between the image data after RIP development based on two different RIP parameters is confirmed.

  The present invention has been made in view of the above-described problem, and the difference between two image data used for drawing a graphic generated by RIP development based on two different RIP parameters before execution of the drawing process. The purpose is to provide a technology that can be confirmed quickly without overlooking.

A first invention is an image display device for a direct drawing apparatus that directly draws a predetermined pattern on a drawing object by scanning a drawing beam, and an acquisition unit that acquires design data in a vector format describing the pattern; A designated parameter setting unit for setting a designated parameter used for RIP expansion of the design data, a processing region setting unit for setting a processing region of the design data to be RIP expanded, the specified parameter and a predetermined reference parameter, And a display RIP rasterization unit that obtains a designated image and a reference image by respectively RIP-developing portions corresponding to the processing area in the design data, and superimposing the designated image and the reference image. a display unit for visually displaying a mode setting unit that sets one mode from a plurality of modes for the determination of the reference parameter, setting of In response to said one mode, and a reference parameter setting unit for setting the reference parameter, RIP development in the display RIP processing unit, the data processing amount than drawing RIP development for the direct writing And the display unit displays the difference between the designated image and the reference image so that the common part between the designated image and the reference image is visually distinguishable. It is characterized by.

  A second invention is an image display device for a direct drawing device according to the first invention, wherein the display unit displays the difference visually enhanced than the common part. .

  A third invention is an image display device for a direct drawing device according to the first or second invention, wherein the display RIP is developed in response to the update of the designated parameter, and the display The display in the section is updated.

  4th invention is the image display apparatus for direct drawing apparatuses based on 1st invention thru | or 3rd invention, Comprising: As for the said display RIP expansion | deployment part, the said process area respond | corresponds to the partial area | region of the said pattern In this case, the display RIP expansion is performed at the first resolution, while the display RIP expansion is performed at the second resolution when the processing area corresponds to the entire area of the pattern. The second resolution is lower than the first resolution.

A fifth invention is an image display device for a direct drawing apparatus according to any one of the first to fourth inventions, wherein the designated image, the reference image, and the difference are on one screen. The area is displayed in a composite manner in a state of being aligned with each other.

6th invention is the image display apparatus for direct drawing apparatuses which concerns on 5th invention, Comprising: The display color of the said difference in the said display part is each display color of the said designated image and the said reference image It is characterized by being different.

A seventh invention is an image display device for a direct drawing apparatus according to the sixth invention, wherein the difference display color when the difference value is positive and the difference display color when the difference value is negative The display color of the difference is different.

An eighth invention is a computer-readable program including a display screen for a direct drawing apparatus that directly draws a predetermined pattern on a drawing target by scanning a drawing beam, the computer reading the program, When the computer CPU executes the program using a memory, the computer has an acquisition unit for acquiring design data in a vector format describing the pattern, and designated parameters used for RIP expansion of the design data. Using the designated parameter setting unit to be set, the processing region setting unit for setting the processing region of the design data to be RIP-expanded, and the designated parameter and a predetermined reference parameter, corresponding to the processing region of the design data Each part to be processed is RIP expanded to obtain a designated image and a reference image A display RIP processing unit, a display unit for visually displaying on the display screen by superimposing said reference image and the designated image, the mode setting for setting an mode from a plurality of modes for the determination of the reference parameter And a reference parameter setting unit for setting the reference parameter according to the set one mode, and the RIP expansion in the display RIP expansion unit is a drawing RIP expansion for the direct drawing. And the display unit visually distinguishes the difference between the designated image and the reference image from the common part between the designated image and the reference image. It is made to function as an image display device characterized by being capable of being displayed.

According to the first to eighth aspects of the present invention, RIP expansion is performed in a display RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion. It can be performed. Further, the difference between the designated image obtained by the display RIP development based on the designated parameter and the reference image obtained by the display RIP development based on the reference parameter is displayed on the display unit in a visually distinguishable state. . Therefore, it is possible to confirm without overlooking the difference between the designated image and the reference image. Further, the reference parameter is set according to one mode selected from a plurality of modes related to determination of the reference parameter. Therefore, it is possible to set a reference parameter according to the purpose of comparison with the designated parameter.

  In particular, according to the second invention, the difference is visually emphasized and displayed rather than the common part of the designated image and the reference image, so that the difference can be easily detected.

  In particular, according to the third invention, in response to the update of the designated parameter, the display RIP expansion is performed and the display is updated, so that the image data after the RIP expansion can be confirmed more quickly.

  In particular, according to the fourth invention, when the processing area corresponds to the partial area of the pattern, the display RIP expansion is performed at the first resolution, and the processing area corresponds to the entire area of the pattern. The RIP for display is expanded at a second resolution lower than the first resolution. For this reason, the display RIP expansion can be executed promptly.

In particular, according to the fifth aspect , the designated image, the reference image, and the difference are combined and displayed in a state where they are aligned with each other in one screen area. Therefore, the position where the difference is formed can be easily grasped.

In particular, according to the sixth aspect , the display color of the difference in the display unit is different from the display colors of the designated image and the reference image. For this reason, the difference can be easily detected.

In particular, according to the seventh aspect , since the difference display color when the difference value is positive and the difference display color when the difference value is negative, the designated image and the reference image are It can be easily confirmed whether the difference is due to the large image.

It is a figure which shows the structure of the figure drawing system incorporating the image display apparatus for direct drawing apparatuses in this embodiment. It is a block diagram which shows the hardware constitutions of an image processing apparatus. It is the schematic which shows the operation GUI of an image processing apparatus. It is the schematic which shows the functional structure of an image processing apparatus. It is a flowchart which shows the flow of a process in an image processing apparatus. It is the schematic which shows the difference extraction image in each mode.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. The following embodiment is an example embodying the present invention, and is not an example of limiting the technical scope of the present invention.

  FIG. 1 shows a graphic drawing system 100 in which an image display device for a direct drawing device according to an embodiment of the present invention is incorporated. The graphic drawing system 100 is used as a system for directly drawing a graphic corresponding to a circuit pattern on a resist layer by selectively exposing a resist layer on a semiconductor substrate, for example.

  The graphic drawing system 100 includes a design data creation device 1, an image processing device 2, and a drawing device 3. These devices 1, 2, and 3 are connected to each other via a network N such as a LAN.

  The design data creation device 1 is a device that creates and edits data describing a pattern area to be drawn on a drawing target. Specifically, the data is created as graphic data described in a vector format by CAD. Hereinafter, this data is referred to as design data D0.

  The design data D0 created by the design data creation device 1 can be received by both the image processing device 2 and the drawing device (direct drawing device) 3. Both the image processing device 2 and the drawing device 3 have a RIP development function, but the RIP development is executed for different purposes. In other words, the data processing unit 3a of the drawing apparatus 3 has a function (hereinafter referred to as “drawing RIP development”) that performs RIP development on the design data D0 to obtain raster data for drawing. Based on the raster data thus obtained, the drawing control unit 3b performs selective exposure by performing two-dimensional scanning of the drawing object (substrate) while performing ON / OFF modulation of the laser beam.

  On the other hand, the image processing apparatus 2 obtains the design data D0 from the design data creation apparatus 1 before performing the RIP for drawing, and preliminarily RIP develops the acquired design data D0 for display. A raster data function (hereinafter referred to as “display RIP expansion”) and a function for performing real-time visual display based on the raster data obtained in this way. In other words, the image processing apparatus 2 has a preview function for the image of the pattern area. The preview function can include both a reduced display of the entire pattern area and an enlarged display of the partial pattern area. The image processing apparatus 2 in this embodiment has a function as an “image display apparatus for a direct drawing apparatus” in the present invention.

  The RIP development for drawing is for RIP development of the entire drawing pattern at a resolution necessary for actual drawing. On the other hand, the display RIP expansion is performed for display on a display, and has a lower resolution than the drawing RIP expansion, or RIP expansion is performed on only a partial area rather than the entire pattern area. This process is simpler than drawing RIP development. Therefore, the processing time required for the RIP development is shorter than that of the drawing RIP development, and the amount of data to be stored is smaller than that of the drawing RIP development.

  That is, in the image processing apparatus 2, data processing for preview display of an image is performed by displaying a corresponding portion of the design data D0 by RIP expansion in a display RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion. And the real-time property of image display update for parameter update and the like is ensured.

  Hereinafter, the raster data obtained by the display RIP development is referred to as image data D2.

  As is well known, the raster data (raster image data) in these is data (line data) in which binary image data forming a plurality of pixels is arranged in the main scanning direction, and is orthogonal to the main scanning direction. Data corresponding to a large number of data arranged in the sub-scanning direction.

  In the RIP development for drawing, the design data D0 described in the vector format is converted into raster data. Further, the raster data is run-length encoded, and the compressed drawing run-length data is output to the drawing control unit 3 b incorporated in the drawing apparatus 3. The obtained run length data is data in which the pattern area in the design data D0 is described by a chain in which the length of each exposure section is sequentially arranged for each scanning line.

  In the image processing apparatus 2 according to the present embodiment, a RIP parameter set for rendering RIP development (hereinafter, referred to as a designated parameter Pa1) and a reference RIP to be compared with the designated parameter Pa1. Based on each of the parameters (hereinafter referred to as the reference parameter Pa2), the difference extraction between the two image data D2 generated by developing the design data D0 for display RIP is also performed. This will be described in detail later.

  The drawing apparatus 3 is an apparatus in which the scanning drawing unit 3c directly exposes a pattern region on a substrate (drawing object) based on drawing image data D1 obtained by RIP development of the design data D0 by the data processing unit 3a. It is. The drawing control unit 3b of the drawing device 3 acquires the design data D0 from the design data creation device 1 and the designated parameter Pa1 used for RIP development for drawing from the image processing device 2, and the RIP of the design data D0 according to the designated parameter Pa1. Development (RIP for drawing) is performed. As a result, drawing image data D1 is generated, and the scanning drawing unit 3c executes drawing of the pattern area by light beam scanning based on the image data D1. Thereby, a two-dimensional image corresponding to the graphic pattern is recorded on the drawing object.

  For example, the scanning drawing unit 3c irradiates a resist layer (generally a photosensitive layer) on a semiconductor substrate with a light beam modulated according to drawing image data D1 using a spatial light modulation element such as a digital micromirror device, A wiring pattern is drawn on the substrate.

  In this embodiment, the case where the data processing unit 3a in the drawing apparatus 3 performs the RIP for drawing is described. However, the drawing is performed by the dedicated RIP device provided between the image processing apparatus 2 and the drawing apparatus 3. The image data D1 for drawing may be transmitted to the drawing device 3 after performing the RIP development. Further, the image processing apparatus 2 may be configured to perform drawing RIP development of the design data D0 with the designated parameter Pa1 and transmit the drawing image data D1 generated thereby to the drawing apparatus 3. In these cases, the data processing unit 3a of the drawing apparatus 3 does not need to have the RIP expansion function.

  The image processing device 2 does not need to be installed outside the drawing device 3 and may be integrated with the drawing device 3. Further, the CAD may be mounted on the image processing apparatus 2, and the design data D0 may be directly created by the CAD mounted on the image processing apparatus 2.

  FIG. 2 is a block diagram showing a hardware configuration of the image processing apparatus 2 configured by a computer.

  The image processing apparatus 2 includes a CPU 91, a ROM 92, a memory 93, a media drive 94, a display unit 95, an operation unit 96, and the like. Each piece of hardware is electrically connected by a bus line 97.

  The CPU 91 controls each of the above hardware units based on a program (or a program read by the media drive) P stored in the ROM 92 to realize the functions of the image processing apparatus 2.

  The ROM 92 is a read-only storage device that stores a program P and data necessary for controlling the image processing apparatus 2 in advance.

  The memory 93 is a storage device that can be read and written, and temporarily stores data generated during arithmetic processing by the CPU 91. The memory 93 is configured by SRAM, DRAM or the like.

  The media drive 94 is a functional unit that reads information stored in a recording medium (more specifically, a portable recording medium such as a CD-ROM, a DVD (Digital Versatile Disk), or a flexible disk) M. is there.

  The operation unit 96 is an input device composed of a keyboard and a mouse, and accepts user operations such as input of commands and various data. The user operation received by the operation unit 96 is input to the CPU 91 as a signal.

  The display unit 95 includes a display such as a color LCD and variably displays various data and operation states. The display unit 95 displays an operation GUI (Graphic User Interface) 80 shown in FIG.

  Here, the operation GUI 80 will be described with reference to FIG. For example, as shown in FIG. 3, the operation GUI 80 includes a processing area display screen 81 for displaying a part of the pattern area defined by the design data D0 based on the image data D2 after the RIP for display, and a designated parameter Pa1. And a parameter setting screen 82 for displaying an input field where the setting input is performed. In the operation GUI 80, the processing area display screen 81 and the parameter setting screen 82 are displayed in parallel.

  The designated parameter Pa1 includes items such as the file name of the design data D0, the layer number, the sizing (enlargement and reduction) value, the presence / absence of gradation inversion, the rotation angle, the presence / absence of mirror inversion, and the edge exposure condition. Can be mentioned.

  The reference parameter Pa2 is also composed of the same items as the designated parameter Pa1. The parameter value set as the reference parameter Pa2 is set based on one mode selected from a plurality of modes, which will be described in detail later.

  The name of the CAD file is input in “Input CAD Data” 201 of the parameter setting screen 82 shown in FIG. The CAD file input here is taken in as design data D0, and an initial image obtained by RIP development using predetermined initial parameters is displayed on the processing area display screen 81. The initial parameters are RIP parameters for performing RIP development faithfully to the design data D0 without performing adjustment processing such as sizing and gradation inversion, and are set in advance in the apparatus for initial display.

  In “Layer Merge” 202, a layer number is set. In “Sizing” 203, the width of the line width in the X direction and the Y direction is input. For example, in the case of the setting values shown in FIG. 3, the line width is set to a line width that is reduced by 1000 nm in the X direction from the default line width and increased by 500 nm in the Y direction. In “Reverse” 204, a selection is made as to whether or not to reverse the gradation of the pattern area of the image data D2. In “Rotation” 205, the rotation angle of the pattern area of the image data D2 is set. An arbitrary value may be input as the rotation angle, or a preset value may be selected. When the pattern area of the image data D2 is not rotated, a value of zero is set.

  In “Mirror” 206, whether to perform mirror inversion is set. In “Wafer Info” 207, the size of the substrate to be drawn and the initial setting position in the apparatus are input. In “Use Edge Expose” 208, an edge exposure condition is input. The edge exposure condition is a condition for setting an exposure region formed so as to surround the outside of the chip formed on the substrate in a circle. Specifically, whether or not edge exposure is performed is set, and when edge exposure is performed, the position (outer position or inner position) on the substrate where the exposure region is formed and the exposure width are set. These are merely examples of the designated parameter Pa1, and are not limited thereto.

  These designated parameters Pa1 are saved in a designated parameter saving unit 23, which will be described later, as a set of designated parameters Pa1 when a save name is input in "Ticket Name" 210 and a "Save" key 214 is clicked.

  The display RIP expansion using the designated parameter Pa1 is executed by clicking the “Update View” key 215 on the operation GUI 80 after these designated parameters Pa1 are input to the parameter setting screen 82 of the operation GUI 80. Is done. The display RIP expansion may be performed every time the designated parameter Pa1 is input to the operation GUI 80.

  Until the designated parameter Pa1 is set for the first time, only the image data D2 (initial image) obtained by RIP development of the design data D0 at a relatively low resolution with the preset initial parameters is displayed on the processing area display screen 81. It is in a state. After the designated parameter Pa1 is set and RIP development using the designated parameter Pa1 is performed, the initial image display is switched to the comparative image display. In the comparative image display, the display RIP developed image with the designated parameter Pa1 (hereinafter referred to as designated image D21) and the display RIP developed image with the reference parameter Pa2 (hereinafter referred to as reference image D22) are superimposed. Is displayed on the processing area display screen 81, where the portion of the difference S is highlighted. The initial parameters are RIP parameters for performing RIP development faithfully to the design data D0 without performing adjustment processing such as sizing and gradation inversion, and are set in advance in the apparatus for initial display.

  The display RIP expansion is executed in real time only for a portion of the pattern region that the operator intends to display on the processing region display screen 81 (hereinafter, “display target portion”). Specifically, when a display target portion of the pattern area is set by a user operation, a two-dimensional coordinate range corresponding to the display target portion is specified. Only the design data D0 corresponding to the specified two-dimensional coordinate range is RIP-developed according to the designated parameter Pa1. Then, the designated image D21 of the display target portion based on the image data D2 obtained by the RIP development is displayed in the processing region display screen 81 together with the reference image D22 corresponding to the portion in a manner in which the difference S is emphasized. The

  The setting of the display target portion as described above is performed by moving the pattern area displayed on the processing area display screen 81 in the X direction or the Y direction by the scroll bar 220 provided on the side of the processing area display screen 81. Alternatively, it is performed by adjusting the display magnification of the pattern area by double clicking the mouse. Note that the pattern area may be moved by dragging and dropping the mouse on the processing area display screen 81.

  A mode setting field 230 is provided below the processing area display screen 81 of the operation GUI 80. When one mode is selected from a plurality of modes in the mode setting field 230, the mode setting unit 31 sets a mode related to determination of the reference parameter Pa2. Then, the reference parameter setting unit 24 sets the reference parameter Pa2 according to the set one mode. This will be described in detail later.

  The RIP parameter is not limited to a value set on the operation GUI 80. For example, the minimum run is determined by the specifications of the drawing apparatus 3. This minimum run represents the minimum pixel value that the drawing apparatus 3 can draw. That is, in the drawing device 3, since a pixel smaller than the minimum run value cannot be drawn due to the specifications of the device, drawing is performed by closing a gap between pixels smaller than the pixel.

  FIG. 4 is a block diagram showing a functional configuration of the image processing apparatus 2.

  The image processing apparatus 2 includes a design data acquisition unit 20, a design data storage unit 21, a specified parameter setting unit 22, a specified parameter storage unit 23, a processing region setting unit 25, a display RIP developing unit 26, a reference parameter setting unit 24, a difference An extraction unit 27, a difference highlighting display unit 28, a transmission unit 30, and a mode setting unit 31 are provided. The functions of these units are realized by reading out the program P stored in advance in the ROM 92 or the program P recorded in the recording medium M by the media drive 94 and executing it in the CPU 91.

  The design data acquisition unit 20 acquires design data D0 in which a pattern area to be drawn is described from the design data creation device 1 via the network N. Note that the design data D0 may be acquired not only via the network N but also via, for example, a portable storage medium.

  The design data storage unit 21 stores the design data D0 acquired by the design data acquisition unit 20. The stored design data D0 is appropriately read and used for display RIP development.

  The designated parameter setting unit 22 sets a RIP parameter (designated parameter Pa1) when the design data D0 is RIP expanded. Specifically, when the operator inputs the value of the designated parameter Pa1 to the parameter setting screen 82 via the operation unit 96, the designated parameter Pa1 is set in the designated parameter setting unit 22.

  The designated parameter storage unit 23 stores the designated parameter Pa1 set by the designated parameter setting unit 22. The stored designated parameter Pa1 is appropriately read because it is set as the reference parameter Pa2, or is set as a RIP parameter used for RIP development for drawing.

  The processing area setting unit 25 sets the processing area RT from the pattern area of the image data D2 in the initial image display or the comparison image display. Specifically, a user operation such as scrolling, zooming in, or zooming out is performed on the pattern area displayed on the processing area display screen 81 via the operation unit 96. As a result, the part of the pattern area or the entire pattern area that the operator wants to visually confirm is displayed on the processing area display screen 81. Thereby, the processing area RT is set. That is, the processing area RT is a part or the whole of the pattern area displayed on the processing area display screen 81, and corresponds to the display target part described above.

  Generally, the operator does not confirm each part of the entire pattern area equally, and the part that the operator particularly wants to confirm is limited. This is mainly a portion having a specific geometric characteristic that is likely to cause an error in a drawing process or process. For example, a partial region such as a curved portion, an acute angle portion, a thin line portion, or a vertex portion of a pattern region is a processing region RT ( Display target part).

  When the entire pattern area image (entire area) is set as the processing area RT, the arrangement state of a plurality of chips, the edge processing state, and the like are confirmed.

  The mode setting unit 31 sets a mode for comparing the designated parameter Pa1 and the reference parameter Pa2. Examples of the mode include an apparatus restriction emphasis mode, a previous condition comparison mode, a parameter adjustment mode, and a default comparison mode. The operator selects one mode from a plurality of modes by performing a selection operation in the mode setting column 230 provided on the operation GUI 80. The mode selected in this way is set in the mode setting unit 31.

  The reference parameter setting unit 24 sets the reference parameter Pa <b> 2 according to the mode set by the mode setting unit 31. Specifically, in the device restriction emphasis mode, the designated parameter Pa1 when the minimum run is zero is the reference parameter Pa2. That is, the designated parameter Pa1 when there is no restriction due to the apparatus conditions of the drawing apparatus 3 is set as the reference parameter Pa2.

  In the previous condition comparison mode, the set of designated parameters Pa1 used in the previous drawing RIP development is the reference parameter Pa2. In this case, when the mode is set, the corresponding designated parameter Pa1 is read from the designated parameter storage unit 23 and set as the reference parameter Pa2.

  In the parameter adjustment mode, the set of designated parameters Pa1 used in the previous display RIP development is the reference parameter Pa2. Also in this case, when the mode is set, the corresponding designated parameter Pa1 is read from the designated parameter storage unit 23 and set as the reference parameter Pa2.

  In the default comparison mode, a set of RIP parameters set in advance as the reference parameter Pa2 in the designated parameter storage unit 23 becomes the reference parameter Pa2. The reference parameter Pa2 is a RIP parameter set and input by the operator. Also in this case, when the mode is set, the corresponding designated parameter Pa1 is read from the designated parameter storage unit 23 and set as the reference parameter Pa2.

  The display RIP developing unit 26 sets the processing region RT (display target portion) in accordance with each of the designated parameter Pa1 set by the designated parameter setting unit 22 and the reference parameter Pa2 set by the reference parameter setting unit 24. Corresponding design data D0 is RIP expanded (RIP for display). As a result, the portion of the design data D0 corresponding to the processing region RT is converted into two sets of image data D2 for display corresponding to the designated parameter Pa1 and the reference parameter Pa2. The display RIP expansion is started and triggered immediately, for example, when the input of the designated parameter Pa1 is completed or when the “Update View” key 215 on the operation GUI 80 is clicked.

  The difference extraction unit 27 extracts a difference S for each pixel of two images, that is, a designated image D21 RIP-developed using the designated parameter Pa1 and a reference image D22 RIP-developed using the reference parameter Pa2. For example, the difference S is extracted by subtracting each pixel of the corresponding reference image D22 from each pixel of the designated image D21. In this case, the part where the value of the difference S is positive corresponds to the part where the drawing (exposure) range has increased. Further, the part where the value of the difference S is negative corresponds to a part where the drawing (exposure) range is reduced. Note that the difference extraction process may be performed by subtracting each pixel of the corresponding designated image D21 from each pixel of the reference image D22.

  The difference emphasis display unit 28 visually enhances the difference S extracted by the difference extraction unit 27 and displays the difference S on the processing region display screen 81. At this time, on the processing area display screen 81, the designated image D21 and the reference image D22 are displayed in an overlapping manner. The difference S is displayed as a non-common part between the designated image D21 and the reference image D22, that is, a part where no overlap occurs.

  The difference S is displayed in a different display color from the common part of the superimposed designated image D21 and reference image D22. For example, different display colors are used for a portion where the value of the difference S is positive and a portion where the value of the difference S is negative. In particular, these colors are preferably in a complementary color relationship.

  Note that the display color is not limited to a different form, and there is a difference, for example, a form in which a different pattern is given to the portion of the difference S (for example, a form with different oblique lines) or a form in which the gradation value of the difference S is different. However, any form may be used as long as it is visually highlighted.

  The transmission unit 30 transmits a set of designated parameters Pa1 determined to be used in the RIP for drawing to the drawing apparatus 3.

  Here, the flow of processing will be described according to the flowchart shown in FIG.

  First, the design data acquisition unit 20 acquires the design data D0 created by the design data creation device 1 via the network N (step S1). The acquired design data D0 is stored in the design data storage unit 21.

  The operator selects desired design data D0 from various design data D0 stored in the design data storage unit 21 via the operation GUI 80. The selected design data D0 is developed for display RIP using the initial parameters, whereby an initial image faithful to the design data D0 is displayed on the processing area display screen 81 of the operation GUI 80. Note that the design data D0 acquired by the design data acquisition unit 20 may be directly expanded into RIP for display with initial parameters and displayed on the processing area display screen 81 of the operation GUI 80.

  Subsequently, the mode is set (step S2). Specifically, the mode is set by the operator selecting one mode from a plurality of modes in the mode setting field 230 of the operation GUI 80.

  Subsequently, the operator sets a processing region RT via the operation unit 96 (step S3). Specifically, the operator performs an operation while viewing the pattern area displayed on the processing area display screen 81, and causes the processing area display screen 81 to display the area to be confirmed. At this time, if the operator wants to confirm the partial area, by performing the enlargement operation, a part of the image is enlarged and displayed, and the line width or the shape can be confirmed finely.

  Subsequently, the operator inputs the designated parameter Pa1 on the parameter setting screen 82 of the operation GUI 80. Thereby, the designated parameter Pa1 is set (step S4). When the input of the designated parameter Pa1 to the operation GUI 80 is completed or when the “Save” key 214 is clicked, the set of the designated parameter Pa1 is saved in the designated parameter storage unit 23.

  Then, the reference parameter Pa2 is set by the reference parameter setting unit 24 (step S5). That is, a set of RIP parameters corresponding to the set mode is read from the designated parameter storage unit 23, and the reference parameter Pa2 is set. In particular, when the mode is the device restriction mode, the reference parameter Pa2 is generated by setting the designated parameter Pa1. When the mode is a mode other than the device restriction mode, a set of RIP parameters corresponding to the set mode is read from the designated parameter storage unit 23 when the mode is set, and the reference parameter is set. It may be set as Pa2.

  When the designated parameter Pa1 is input, the “Update View” key 215 on the parameter setting screen 82 is clicked by the operator. In response to this, the display RIP expansion is immediately executed (step S6).

  At this time, the display RIP expansion is executed at a resolution corresponding to the display magnification of the processing region RT on the processing region display screen 81. Specifically, when the display magnification is increased, that is, when the display target portion that is the processing region RT is a partial region of the pattern region, and the partial region is enlarged and displayed on the processing region display screen 81, the comparison is performed. RIP for display is developed at a high resolution.

  Further, when the display magnification is small, that is, when the display target portion that is the processing region RT is the entire region of the pattern region, and the entire region is displayed in a reduced size on the processing region display screen 81, the display region is relatively low. RIP display for display is performed at the resolution. That is, the resolution of RIP development when the processing area RT is a partial area of the pattern area is smaller than the resolution of RIP development when the processing area RT is the entire area of the pattern area.

  That is, when the processing area RT corresponds to a partial area of the pattern area, the display RIP expansion is limited to a part of the design data D0, and the processing area RT corresponds to the entire area of the pattern area. In this case, since the display RIP expansion is performed roughly, the display RIP expansion is an RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion.

  The common part (overlapping part) of the designated image D21 and the reference image D22 is specified as a logical composite image obtained by taking the logical product of each corresponding pixel with each pixel to be rendered as a logical value “1”. can do.

  The difference extraction unit 27 extracts the difference S between the designated image D21 and the reference image D22 (step S7). Specifically, the difference S is extracted by subtracting the reference image D22 from the designated image D21 for each pixel.

  Then, the difference emphasis display unit 28 displays the difference S on the processing region display screen 81 so as to overlap the designated image D21 and the reference image D22. Specifically, the designated image D21, the reference image D22, and the difference S are combined and displayed in the same screen area while being aligned with each other.

  At this time, the difference S is displayed in a display color different from the designated image D21 and the reference image D22. Also, different display colors are displayed in a portion where the value of the difference S is positive and a portion where the value of the difference S is negative. In this way, the area of the difference S is visually highlighted (step S8).

  More specifically, in the background portion displayed in black, the common portion (overlapping portion) of the designated image D21 and the reference image D22 is displayed with a reference color (for example, white), and the value of the difference S becomes positive. The part is displayed in red color, and the part where the difference S value is negative is displayed in blue color, so that four types of background part (non-drawing part), common part, increasing part and decreasing part are displayed. Display in different visual aspects. In this way, the background portion and the common portion are achromatic, and the difference S (increasing portion, decreasing portion) is chromatic, thereby visually enhancing the difference S.

  It should be noted that other modes may be used as long as the difference S and other parts (background part or common part) can be visually distinguished. For example, it is also possible to adopt a mode in which, for example, the difference S is intermittently flash-displayed so that the difference S is more emphasized.

  FIG. 6 shows a designated image D21, a reference image D22, and an image in which the difference S is displayed (hereinafter referred to as a difference display image D23) in each comparison mode. In FIG. 6, the processing area RT is displayed as a partial area of the pattern area. Here, the difference extraction process is performed by subtracting each pixel of the corresponding designated image D21 from each pixel of the reference image D22.

  FIG. 6 shows a designated image D21, a reference image D22, and a difference display image D23 in the device restriction emphasis mode (ST11). Since the minimum run is set, in the designated image D21, an area (a collapsed area) in which a gap between pixels is collapsed and displayed is partially formed. On the other hand, in the reference image D22, since the minimum run is zero, such a collapsed area is not formed. Accordingly, in the difference display image D23, the portion of the collapsed area is highlighted as the difference Sa (for convenience of illustration, the difference Sa is shown as a satin area).

  FIG. 6 shows a designated image D21, a reference image D22, and a difference display image D23 in the previous condition comparison mode or the default comparison mode (ST12). The difference between the designated parameter Pa1 and the reference parameter Pa2 is the line width value. Therefore, in the difference display image D23, the part having a different line width is highlighted as a difference Sb in a form distinguished from the other parts (for the sake of illustration, the difference Sb is shown as a hatched area). .

  FIG. 6 also shows a designated image D21, a reference image D22, and a difference display image D23 in the parameter adjustment mode (ST13). The difference between the designated parameter Pa1 and the reference parameter Pa2 is an item setting relating to the presence or absence of the edge exposure region ER. In the reference image D22, the processing region RT in which the edge exposure region ER is not formed on the inner portion of the substrate is shown. On the other hand, the designated image D21 shows the processing region RT in a state where the edge exposure region ER is formed on the inner portion of the substrate. Accordingly, in the difference display image D23, the inner portion where the edge exposure region ER is formed is highlighted as the difference Sc (for convenience of illustration, the difference Sc is shown as a satin region).

  Note that the difference Sa and the difference Sc are differences S due to the fact that some pixels of the designated image D21 are larger than some pixels of the corresponding reference image D22, that is, portions where the exposure range has increased, and the difference Sb is The difference S due to the fact that some pixels of the designated image D21 are smaller than some pixels of the corresponding reference image D22, that is, a portion where the exposure range is reduced. Therefore, the differences Sa and Sc and the difference Sb are displayed in different display colors.

  When the highlighting process of the difference S is performed, it is determined whether or not the processing area RT is reset and the display RIP expansion is performed again (step S9). When the processing area RT displayed on the processing area display screen 81 is newly set (step S10), the display RIP expansion is newly performed.

  When the highlighting process of the difference S is performed, it is determined whether or not the designated parameter Pa1 is reset and the display RIP expansion is performed again (step S11). When the drawing apparatus 3 performs the drawing process, if it is determined that the difference S adversely affects the exposure quality, the designated parameter Pa1 is updated, and the display RIP development is newly performed.

  The operator updates the designated parameter Pa1 or the processing region RT in various ways, updates the display image displayed with the difference S highlighted, and visually confirms these display images. Then, the value of the designated parameter Pa1 for obtaining an optimal display image is determined as the RIP parameter used for the RIP development for drawing. The determined designated parameter Pa1 is read from the designated parameter storage unit 23 and transmitted to the drawing apparatus 3 by the transmission unit 30.

  As described above, in the display RIP development, the difference extraction process, and the difference highlighting process, the processing region RT displayed on the processing region display screen 81 is newly set when the designated parameter Pa1 is newly set. Sometimes it is implemented in real time.

  In response to the update of the designated parameter Pa1 or the update of the processing region RT, the display RIP is expanded again, and the display on the processing region display screen 81 is updated in real time, thereby substantially changing the image. The designated parameter Pa1 and the like can be adjusted while dynamically monitoring. However, the real-time mentioned here is not only when responding to the update of the designated parameter Pa1 or the update of the processing region RT, but the operator gives an update command after the update of the designated parameter Pa1 or after the update of the processing region RT. This includes the case where the display RIP is expanded and the display is updated. In other words, the apparatus of the present embodiment has real-time characteristics in the sense that parameter update and confirmation of the result can be performed without requiring time for developing the drawing RIP.

  As described above, in the image processing apparatus 2 according to the present embodiment, the RIP expansion is performed by the display RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion. Further, processing is performed in a state where the difference S between the designated image D21 obtained by the display RIP development based on the designated parameter Pa1 and the reference image D22 obtained by the display RIP development based on the reference parameter Pa2 is visually divided. It is displayed on the area display screen 81. Therefore, the RIP for display is rapidly developed, and the difference S between the designated image D21 and the reference image D22 is not easily overlooked.

  Further, the difference S can be visually clearly distinguished by being visually emphasized from the common part of the designated image D21 and the reference image D22. Therefore, the oversight of the difference S is less likely to occur.

  Further, the display RIP is expanded in response to the update of the designated parameter Pa1, and the display of the image on the processing area display screen 81 is updated. That is, since an image can be confirmed in real time, a time loss required for displaying the difference S can be suppressed. For this reason, the difference S can be confirmed easily by resetting the designated parameter Pa1 and the processing area.

  In particular, in a semiconductor substrate having a fine pattern and a large drawing area, it takes time to develop a drawing RIP, so that a time loss due to a setting error of a RIP parameter is a serious problem. In addition, since the pattern is fine, the difference is easily overlooked, and it takes time for the confirmation work. The image processing apparatus 2 can solve these problems.

  Further, when the processing area RT is a partial area of the pattern area, RIP development is performed at a relatively high resolution, and when the processing area RT is the entire area of the pattern area, RIP expansion is performed at a low resolution. Is called. For this reason, it is possible to quickly execute the display RIP expansion.

  Further, the reference parameter Pa2 is set according to one mode selected from a plurality of modes. For this reason, the reference parameter Pa2 can be set according to the purpose of comparison between the designated parameter Pa1 and the reference parameter Pa2.

  In addition, the designated image D21, the reference image D22, and the difference S are compositely displayed on the processing area display screen 81 in a state where they are aligned with each other. Therefore, the position on the image where the difference S is formed can be easily grasped.

  The display color of the difference S on the processing area display screen 81 is different from the display colors of the designated image D21 and the reference image D22. For this reason, the difference S can be more easily confirmed by visual observation.

  Further, the display color of the difference S when the value of the difference S is positive is different from the display color of the difference S when the value of the difference S is negative. For this reason, when the difference S is confirmed, it can be easily discriminated whether the difference S is a difference due to an increase in the drawing range or a difference due to a decrease in the drawing range.

  The apparatus of the above embodiment assumes a light beam direct drawing apparatus for manufacturing a precision electronic substrate such as a semiconductor substrate, a substrate for an FDP display panel, or a printed board. The invention is applicable. The present invention can also be applied to a direct writing apparatus using an electron beam instead of a light beam.

2 Image processing device (image display device)
DESCRIPTION OF SYMBOLS 3 Direct drawing apparatus 20 Design data acquisition part 22 Designated parameter setting part 24 Standard parameter setting part 25 Processing area setting part 26 Display RIP expansion part 27 Difference extraction part 28 Difference emphasis display part 31 Mode setting part 81 Processing area display screen 82 Parameter Setting screen 95 Display unit 100 Graphic drawing system RT processing area R pattern area Pa1 specified parameter Pa2 reference parameter D0 design data D2 image data D21 specified image D22 reference image S difference

Claims (8)

An image display device for a direct drawing device that directly draws a predetermined pattern on a drawing object by scanning a drawing beam,
An acquisition unit for acquiring design data in a vector format describing the pattern;
A designated parameter setting unit for setting designated parameters used for RIP expansion of the design data;
A processing area setting unit for setting a processing area of the design data to be RIP-deployed;
A display RIP developing unit for RIP-developing a portion corresponding to the processing area in the design data using the designated parameter and a predetermined reference parameter, and obtaining a designated image and a reference image;
A display unit that visually displays the designated image and the reference image in an overlapping manner;
A mode setting unit for setting one mode from a plurality of modes related to the determination of the reference parameter;
A reference parameter setting unit for setting the reference parameter according to the set one mode;
With
The RIP expansion in the display RIP expansion unit is a display RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion for the direct drawing, and the display unit includes the designated image, the reference image, The difference between the designated image and the reference image is displayed in a visually distinguishable manner,
An image display device for a direct drawing device characterized by the above. An image display device for a direct drawing device according to claim 1,
The image display apparatus for a direct drawing apparatus, wherein the display unit displays the difference visually emphasized over the common part. An image display device for a direct drawing device according to claim 1 or 2,
An image display device for a direct drawing device, wherein the display RIP is expanded in response to the update of the designated parameter, and the display on the display unit is updated. An image display device for a direct drawing device according to claim 1,
The display RIP developing unit is
When the processing area corresponds to a partial area of the pattern, while performing the display RIP development at the first resolution,
When the processing area corresponds to the entire area of the pattern, the display RIP expansion is performed at the second resolution;
The image display device for a direct drawing device, wherein the second resolution is lower than the first resolution. An image display device for a direct drawing device according to any one of claims 1 to 4,
An image display device for a direct drawing device, wherein the designated image, the reference image, and the difference are combined and displayed in a single screen area in a mutually aligned state . An image display device for a direct drawing device according to claim 5 ,
An image display device for a direct drawing device , wherein the display color of the difference in the display unit is different from the display colors of the designated image and the reference image . An image display device for a direct drawing device according to claim 6,
An image display device for a direct drawing device , wherein the display color of the difference when the difference value is positive and the display color of the difference when the difference value is negative are different.   A computer-readable program having a display screen for a direct drawing apparatus that directly draws a predetermined pattern on a drawing object by scanning a drawing beam,
  The computer reads the program, and the CPU of the computer executes the program using a memory, thereby causing the computer to
  An acquisition unit for acquiring design data in a vector format describing the pattern;
  A designated parameter setting unit for setting designated parameters used for RIP expansion of the design data;
  A processing area setting unit for setting a processing area of the design data to be RIP-deployed;
  A display RIP developing unit for RIP-developing a portion corresponding to the processing area in the design data using the designated parameter and a predetermined reference parameter, and obtaining a designated image and a reference image;
  A display unit that visibly displays the designated image and the reference image on the display screen;
  A mode setting unit for setting one mode from a plurality of modes related to the determination of the reference parameter;
  A reference parameter setting unit for setting the reference parameter according to the set one mode;
Function as an image display device comprising
  The RIP expansion in the display RIP expansion unit is a display RIP expansion in which the data processing amount is suppressed as compared with the drawing RIP expansion for the direct drawing, and
  The display unit displays a difference between the designated image and the reference image so as to be visually distinguishable from a common part between the designated image and the reference image. .