JP5797413B2 - Heater unit and heat treatment apparatus - Google Patents

Description

  The present invention relates to a heater unit and a heat treatment apparatus, and more particularly to a heater unit and a heat treatment apparatus suitable for heat treatment in a relatively low temperature region (for example, 300 ° C. or less) using radiant heat.

  In order to evaporate liquid components by heat from a treatment object wetted with liquids such as water or an organic solvent, or to be dried by these liquids, a drying apparatus having a heat source is used.

  In Patent Document 1, as a drying device for drying water droplets on a silicon wafer, an infrared lamp is used as a heat source, and a filter made of the same material (Si) as the silicon wafer is disposed between the wafer mounting table and the far infrared lamp. Has been proposed. The filter transmits infrared light having a wavelength for efficiently drying water droplets, but has a function of removing infrared light having a wavelength for heating the silicon wafer. Accordingly, it is possible to quickly dry only the droplets without heating the silicon wafer.

JP-A-8-122232

  In the drying apparatus described in Patent Document 1, the filter itself has heat because the filter absorbs infrared rays, and the air around the filter is also heated. For this reason, when flammable gas (N-methylpyrrolidone (hereinafter referred to as MMP) gas, etc.) is generated from the product to be treated during drying, the ambient temperature rises to the ignition point temperature and there is a risk of ignition. It was. For example, in the case of an electrode for a lithium ion battery, NMP may be used as a solvent for preparing a current collector slurry to be applied to the surface of a metal foil, and thus there is this danger.

  The present invention has been made in view of the above problems of the prior art, and an object of the present invention is to efficiently heat-treat a product to be processed while suppressing an increase in ambient temperature.

  The heater unit of the present invention includes a heat source, a filter, and a translucent member. A heat source that emits infrared rays is used. The filter is disposed adjacent to the heat source, and cuts infrared rays having a predetermined wavelength or longer. The translucent member is disposed on the opposite side of the heat source so as to face the filter, and transmits the infrared light transmitted through the filter.

  According to this configuration, the infrared rays radiated from the heat source are cut off light beams having a predetermined wavelength or more when passing through the filter. And only the infrared rays which permeate | transmitted the filter permeate | transmit a translucent member. Therefore, if the light transmitting member is objectively arranged on the object to be processed, the object to be processed is radiatively heated by the infrared rays transmitted through the light transmitting member, and the object to be processed can be heat-treated (for example, dried). At this time, since the infrared ray absorbed by the translucent member is hardly present, the translucent member does not overheat. Therefore, it is possible to efficiently heat-treat the product to be processed while suppressing an increase in the atmospheric temperature.

Further, in order to heat radiated from the filter surface so as not transmitted to the light transmitting member, the space between the translucent member and the filter that are vacuum insulation.

  As a material for the filter and the translucent member, quartz glass which is easily available can be suitably used.

  The heat treatment apparatus of the present invention includes a heat treatment furnace, a heat source, a filter, and a translucent member. The heat treatment furnace accommodates the product to be processed. A heat source that emits infrared rays is used. The filter is disposed adjacent to the heat source, and cuts infrared rays having a predetermined wavelength or longer. The translucent member is disposed on the opposite side of the heat source so as to face the filter, and transmits infrared rays not cut by the filter and separates the filter from the atmosphere in the heat treatment path.

  According to this configuration, the infrared rays radiated from the heat source are cut off light beams having a predetermined wavelength or more when passing through the filter. And only the infrared rays which permeate | transmitted the filter permeate | transmit a translucent member. Therefore, if the light transmitting member is objectively arranged on the object to be processed, the object to be processed is radiatively heated by the infrared rays transmitted through the light transmitting member, and the object to be processed can be heat-treated (for example, dried). At this time, since the infrared ray absorbed by the translucent member is hardly present, the translucent member does not overheat. Therefore, it is possible to efficiently heat-treat the product to be processed while suppressing an increase in the atmospheric temperature.

  In addition, the heat treatment apparatus of the present invention includes a heat transfer prevention unit that prevents heat radiated from the filter surface from being transmitted to the transmission member. According to this configuration, heat radiated from the filter surface can be prevented from being transmitted, which contributes to suppression of an increase in ambient temperature. Specifically, the space between the filter and the translucent member is realized by vacuum insulation or by providing cooling means for cooling the surface of the filter.

  In addition, if there is a moving means for moving the article to be processed to a region facing the infrared emission side of the light transmissive member in the heat treatment furnace, the article to be treated can be continuously heat-treated and work efficiency is improved. To do.

  According to the present invention, it is possible to efficiently heat-treat a product to be processed while suppressing an increase in ambient temperature. For this reason, even if combustible gas (such as MMP) is generated from the article to be treated during the heat treatment, the ambient temperature does not rise to the ignition point temperature, and there is no risk of explosion.

It is a schematic block diagram which shows the heat processing apparatus which concerns on one Embodiment of this invention. It is a schematic block diagram which shows the heat processing apparatus which concerns on other embodiment of this invention. It is sectional drawing of the principal part of the heat processing apparatus which shows an example of the heater unit which integrated the heat source, the filter, and the translucent member.

  A heat treatment apparatus according to an embodiment of the present invention will be described below with reference to the drawings.

  As shown in FIG. 1, the heat treatment apparatus 10 includes a heat treatment furnace 1, a heat source 21, a filter 3, and a translucent member 4. This heat treatment apparatus 10 is suitable for performing heat treatment in a relatively low temperature region (for example, 300 ° C. or less) using radiant heat.

  The heat treatment furnace 1 includes a frame body 11 and a heat insulating layer 12. The frame 11 is made of a material having heat resistance. The heat insulating layer 12 is provided inside the frame body 11. With this configuration, the heat treatment furnace 1 has heat resistance and heat insulation. A heat insulating material such as a ceramic fiber can be suitably used for the heat insulating layer 12. In addition, you may comprise the heat insulation layer 12 by an air layer by making the inner side of the frame 11 hollow.

  In the present embodiment, it is assumed that the heat treatment furnace 1 has a flat box shape. The shape of the heat treatment furnace 1 is not limited to this. For example, a bottomed cylindrical shape may be used. A rectangular mounting hole 1A for mounting a heater 2 described later passes through the center of the ceiling of the heat treatment furnace 1.

  The interior of the heat treatment furnace 1 is a space whose top and bottom are narrow in the figure. The article to be processed 100 is accommodated in this space. The reason why the inside of the heat treatment furnace 1 is made narrow in the vertical direction is to efficiently irradiate the workpiece 100 with infrared rays emitted from the heater 2 described later.

  Specific examples of the article to be processed 100 include, for example, an electrode for a lithium ion battery. As described above, an electrode for a lithium ion battery uses a slurry using flammable NMP as a solvent at the time of manufacture.

  As the heat source 21, a heating element that emits infrared rays is used. Specifically, a nichrome wire heating element, a halogen heater, a carbon heater, and the like can be given. In addition, arrow IR1 in FIG. 1 represents the infrared rays radiated from the heat source 21. The output required for the heat source 21 varies depending on the size of the heat treatment furnace 1 and the processing conditions of the workpiece 100.

  The heater 2 is manufactured in a predetermined shape by integrating the heat source 21 and the heat insulating material 22 such as ceramic fiber by a vacuum mold. In the present embodiment, it is assumed that the heater 2 has a square plate shape. The shape of the infrared heater 2 is not limited to this. For example, if the heat treatment furnace 1 is a bottomed cylindrical shape, the heater 2 may be formed in a half pipe shape or a quarter pipe shape corresponding to this.

  A part of the heat source 21 is exposed on the bottom surface of the heat insulating material 22. The heat insulating material 22 blocks heat from the heat source 21. Therefore, the heater 2 has directivity in the infrared radiation direction. That is, the heater 2 is configured to emit infrared rays downward from the bottom surface of the heat insulating material 22.

The top of the heat insulating material 2 2, flange 22B is formed. When the heater 2 is attached to the heat treatment furnace 1, the body 22A of the heat insulating material 22 is inserted into the attachment hole 1A. Then, the flange portion 22B of the heat insulating material 22 is fixed to the outer wall of the heat treatment furnace 1 with screws or the like. Thereby, the heater 2 is attached to the heat treatment furnace 1 so that the heat source 21 faces the inside of the heat treatment furnace 1.

  A support member 5 is attached to the inner wall of the heat treatment furnace 1 around the opening of the attachment hole 1A. The support member 5 supports the filter 3 and the translucent member 4 described later.

  The filter 3 cuts infrared rays having a predetermined wavelength or longer. As a material for the filter 3, quartz glass which is easily available can be suitably used. The material of the filter 3 is not limited to this. The wavelength region of infrared rays to be cut is determined by the material of the filter 3. For example, in the case of quartz glass, infrared rays of about 4 μm or more are cut by the filter 3, and infrared rays of less than that pass through the filter 3. An arrow IR2 in FIG. 1 represents infrared rays that have passed through the filter 3.

  The filter 3 has a plate shape. The filter 3 is supported by the support member 5 so as to be positioned below the heater 2. That is, the filter 3 is disposed adjacent to the heat source 21.

  The light transmissive member 4 transmits infrared rays that have passed through the filter 3 without being cut by the filter 3 and separates the filter 3 from the atmosphere in the heat treatment furnace 1. As a material of the translucent member 4, quartz glass that is easily available can be suitably used. In addition, the material of the translucent member 4 is not restricted to this. For example, although it is somewhat expensive, barium fluoride, calcium fluoride, sapphire, or the like can be used.

  The translucent member 4 has a plate shape. The thickness of the translucent member 4 is, for example, about 3 to 5 mm. In addition, the thickness of the translucent member 4 is not restricted to this range. In terms of transmittance, it is advantageous that the thickness of the translucent member 4 is thin.

The translucent member 4 is supported by the support member 5 so as to be positioned below the filter 3. Translucent member 4 and the filter 3 is supported by a substantially flat row. In other words, the translucent member 4 is disposed opposite to the heat source 21 so as to face the filter 3. It is desirable that the translucent member 4 has higher adhesion with the support member 5 in order to ensure separation of the filter 3 from the atmosphere in the heat treatment furnace 1. In order to improve this adhesion, the translucent member 4 can be attached to the support member 5 via a seal member (not shown). As a material for the seal member, a fluorine-based or Si-based resin having heat resistance and solvent resistance can be suitably used.

  The reason why the translucent member 4 is separated from the filter 3 is to prevent heat radiated from the surface of the filter 3 from being transferred to the transmissive member 4. A wavy line H in FIG. 1 represents heat radiated from the surface of the filter 3. Therefore, the gap between the translucent member 4 and the filter 3 is preferably large, and is set to about 50 mm, for example. This interval can be shortened by the heat transfer prevention means described below.

  The heat transfer blocking means blocks the heat radiated from the surface of the filter 3 from being transmitted to the transmissive member 4. Specifically, the space 9 between the filter 3 and the translucent member 4 is realized by vacuum insulation or by providing a cooling means for cooling the surface of the filter 3. As the cooling means, for example, a blower such as a fan or a blower, or a heat exchanger such as a heat radiating fin or a heat pipe can be suitably used.

  The article to be processed 100 is heat-treated in a region facing the infrared emission side of the translucent member 4 in the heat treatment furnace 1. In addition, you may provide the moving means to move the to-be-processed goods 100 to this area | region. Specifically, a transport roller 6 is provided as shown. The moving means is not limited to the transport roller 6. For example, a conveyance belt may be used. Due to the moving means, the workpiece 100 can be continuously heat-treated, and the working efficiency is improved.

  The article to be processed 100 may be longer than the entire length of the heat treatment furnace 1 (the left and right widths in FIG. 1) as shown. In this case, by providing openings on both side surfaces of the heat treatment furnace 1 (the carry-in entrance 1B and the carry-out exit 1C), the workpiece 100 is carried from the outside of the heat treatment furnace 1 as indicated by the arrow S, and the heat treatment furnace 1 It is possible to automatically perform a series of operations until carrying out while sequentially performing heat treatment. When the article to be processed 100 is a flexible sheet, the delivery roller 7 and the take-up roller 8 are disposed outside the carry-in port 1A and the carry-out port 1B, respectively, as shown in FIG. In addition, it is possible to perform heat treatment continuously by roll-to-roll.

  According to the heat treatment apparatus 10 according to the present embodiment, the infrared ray IR <b> 1 emitted from the heat source 21 is cut off a light beam having a predetermined wavelength or more when passing through the filter 3. Then, only the infrared ray IR 2 that has passed through the filter 3 passes through the light transmitting member 4. Therefore, the article to be processed 100 is radiantly heated by the infrared ray IR3 transmitted through the light transmitting member 100, and the article to be processed 100 can be heat-treated (for example, dried). At this time, since the infrared light absorbed by the light transmissive member 4 is hardly present, the light transmissive member 4 is not overheated. Therefore, it is possible to efficiently heat the workpiece 100 while suppressing an increase in ambient temperature. For this reason, even if combustible gas (such as MMP) is generated from the article to be treated during the heat treatment, the ambient temperature does not rise to the ignition point temperature, and there is no risk of explosion.

  FIG. 3 is a cross-sectional view of a main part of a heat treatment apparatus showing an example of a heater unit in which a heat source, a filter, and a translucent member are integrated. In the example of the heater unit 200 shown in FIG. 3, the support member 5 has a cylindrical shape having a flange portion 5B at the top, and the body portion 22A of the heater 2 is inserted into the cylinder of the support member 5 to use the flange portion 22A. The heater 2 is fixed to the support member 5. Thereby, the heater unit 200 in which the heat source 21, the filter 3, and the translucent member 4 are integrated is formed.

  When attaching the heater unit 200 to the heat treatment furnace 1, the body portion 5 </ b> A of the support member 5 is inserted into the attachment hole 1 </ b> A of the heat treatment furnace 1. And it fixes to the outer wall of the heat processing furnace 1 with a screw etc. using the flange part 5A. Thereby, it becomes possible to comprise the heater unit 200 so that attachment or detachment is possible.

  The above description of the embodiment is to be considered in all respects as illustrative and not restrictive. The scope of the present invention is shown not by the above-described embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the claims.

10-heat treatment apparatus 1-heat treatment furnace 2-heater 21-heat source 3-filter 4-translucent member 6-conveying roller 100-processed product 200-heater unit

Claims (9)

A heat source that emits infrared radiation;
A filter that is arranged adjacent to the heat source and cuts infrared rays of a predetermined wavelength or more;
A translucent member disposed opposite to the heat source opposite to the filter and transmitting infrared rays transmitted through the filter;
I have a,
A heater unit in which a vacuum insulated space is formed between the filter and the translucent member .   The heater unit according to claim 1, further comprising a support member that supports the filter and the translucent member by providing the space between the filter and the translucent member. A heat insulating material that supports the heat source;
  The support member has an opening into which the heat insulating material is inserted,
  3. The heater unit according to claim 2, wherein the heat source is exposed to a surface of the heat insulating material inserted into the support member from the opening portion and facing the filter. The heater unit according to any one of claims 1 to 3, wherein the filter and the translucent member are made of quartz glass. A heat treatment furnace for storing the article to be treated;
A heat source that emits infrared radiation;
A filter that is arranged adjacent to the heat source and cuts infrared rays of a predetermined wavelength or more;
A light-transmitting member that is disposed on the opposite side of the heat source to face the filter, transmits infrared rays that pass through the filter, and separates the filter from the atmosphere in the heat treatment furnace ;
I have a,
The heat processing apparatus which formed the space thermally insulated by vacuum between the said filter and the said translucent member . A heat treatment furnace for storing the article to be treated;
A heater unit according to any one of claims 1 to 4,
The heat processing apparatus which heats the to-be-processed goods in the said heat processing furnace with the infrared rays radiated | emitted from the said heat source . A heat treatment furnace for storing the article to be treated;
  A heater unit according to claim 3,
The heat treatment furnace includes a furnace body in which a mounting hole for arranging the heater unit is formed,
  The support member is attached around the opening of the attachment hole inside the furnace body,
  The heat insulating material has a body portion inserted into the mounting hole, and a flange portion extending from the body portion toward the periphery of the opening of the mounting hole on the outside of the furnace body,
  The heat processing apparatus which heats the to-be-processed goods in the said heat processing furnace with the infrared rays radiated | emitted from the said heat source. A heat treatment furnace for storing the article to be treated;
A heater unit according to claim 3,
The heat treatment furnace includes a furnace body in which a mounting hole for arranging the heater unit is formed,
The support member includes a cylindrical first body portion that is inserted into the attachment hole, and a first body portion that extends from the first body portion toward the periphery of the opening of the attachment hole outside the furnace body. And having a flange portion,
The heat insulating material includes: a second body portion that is inserted into the first body portion; a second flange portion that extends from the second body portion along the outside of the first flange portion; Have
The heat processing apparatus which heats the to-be-processed goods in the said heat processing furnace with the infrared rays radiated | emitted from the said heat source . The heat processing apparatus in any one of Claims 5-8 which has a moving means to move the said to-be-processed item to the area | region which opposes the infrared radiation side of the said translucent member in the said heat processing furnace.

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