JP2640968B2 - Quartz lamp heating device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention relates to an improvement of a quartz lamp heating apparatus capable of accurately detecting the temperature of a heated object, and relates to a quartz lamp capable of accurately detecting the temperature of a heated object such as a semiconductor wafer. With the object of providing a heating device, a quartz lamp and a quartz lamp,
Absorbs light in the long wavelength band of the light emitted by the quartz lamp,
A first quartz filter cooled by cooling means, and a first quartz filter disposed opposite to the first quartz filter;
A second quartz filter that transmits light transmitted through the quartz filter; and a second quartz filter that faces the second quartz filter;
The apparatus comprises a quartz lamp heating device including a heated body supporting means for supporting the heated body, and a heated body temperature detecting means arranged in contact with the heated body.

[Industrial applications]

The present invention relates to an improvement in a quartz lamp heating device. In particular, the present invention relates to an improvement that enables accurate detection of the temperature of an object to be heated.

[Conventional technology]

A quartz lamp heating device according to the related art will be briefly described with reference to the drawings.

See FIG. 2. In the figure, reference numeral 1 denotes a quartz lamp having an emission wavelength band of 0.2.
It is about 5 to 10 μm. Numeral 11 denotes a parabolic mirror, which converts the light of the quartz lamp 1, which is a point light source, into parallel light. Reference numeral 2 denotes a filter made of a quartz plate, which absorbs light in a wavelength band of 4 μm or more and transmits only light A in a wavelength band of 4 μm or less. Reference numeral 3 denotes a heated body such as a semiconductor wafer, which is supported by a heated body supporting means 5. 7 is 8 to 13μ such as barium fluoride
This is a reflected light window that transmits light in the wavelength band of m. Reference numeral 4 denotes a heated object temperature detecting unit that detects infrared rays B emitted from the heated object, for example, the semiconductor wafer 3, and detects the temperature of the heated object 3. Reference numeral 6 denotes a chamber for storing the object 3 to be heated.

[Problems to be solved by the invention]

In the above quartz lamp heating apparatus, since the filter 2 must absorb all the light having a wavelength of 4 μm or more, the temperature rises, the filter 2 emits infrared rays, and the infrared rays become a disturbance, and the semiconductor wafer and the like are disturbed. There was a drawback that it hindered accurate detection of the temperature of the object to be heated.

An object of the present invention is to eliminate this drawback, and an object of the present invention is to provide a quartz lamp heating apparatus capable of accurately detecting the temperature of an object to be heated such as a semiconductor wafer.

[Means for solving the problem]

The object of the present invention is to provide a quartz lamp (1) and a lamp disposed opposite to the quartz lamp (1) for absorbing light in a long wavelength band out of the light radiated from the quartz lamp (1) and providing cooling means (23). ), And a second quartz filter (21) that is disposed to face the first quartz filter (21) and that transmits light transmitted through the first quartz filter (21). A quartz filter (22), an object-to-be-heated supporting means (5) disposed opposite to the second quartz filter (22) for supporting the object to be heated, This is attained by a quartz lamp heating device including an object to be heated temperature detecting means (4) arranged.

[Action]

In the present invention, the filter that absorbs the long wavelength band of the light emitted from the quartz lamp 1 is doubled, and the temperature rises because it absorbs most of the long wavelength band near the quartz lamp 1. A cooling means is added to the first filter 21 which is easy to be used, and is particularly separated from the quartz lamp 1, so that only the light whose long wavelength band has already been eliminated by the first filter 21 enters. Since the temperature of the filter 22 does not rise and there is virtually no disturbance, the temperature of the heated object 3 can be accurately detected.

〔Example〕

Hereinafter, a quartz lamp heating apparatus according to two embodiments of the present invention will be described with reference to the drawings.

First Example See FIG. 1a In the figure, 1 is a quartz lamp, and the emission wavelength band is 0.
It is about 5 to 10 μm. Numeral 11 denotes a parabolic mirror, which converts the light of the quartz lamp 1, which is a point light source, into parallel light. Reference numeral 21 denotes a first filter made of a quartz plate, which absorbs light in a wavelength band of 4 μm or more while being cooled by the cooling means 23, and
Only light A in the wavelength band of m or less is transmitted. Reference numeral 22 denotes a second filter which is arranged to face the first filter,
It is made of a quartz plate like the filter 21 of FIG. Since the light A incident on the second filter 22 does not include light having a wavelength of 4 μm or more, the temperature hardly rises. Also, this second filter
22 also transmits light A 'in the wavelength band of 4 μm or less. Reference numeral 3 denotes a heated body such as a semiconductor wafer, which is supported by a heated body supporting means 5. Reference numeral 7 denotes a reflected light window that also transmits light in a wavelength band of 8 to 13 μm, such as barium fluoride. 4 is an infrared ray B emitted from a heated object, for example, a semiconductor wafer 3
Is a heated object temperature detecting means for detecting the temperature of the object 3 to be heated. Reference numeral 6 denotes a chamber for storing the object 3 to be heated.

In the quartz lamp heating device having the above structure,
Since the temperature of the second filter 22 is kept low, no disturbance enters the heated body temperature detecting means 4 and the heated body 3 is accurately detected.
Can be detected.

Second Example See FIG. 1b In the figures, 1 is a quartz lamp, and the emission wavelength band is about 0.5 to 10 μm. 11 is a parabolic mirror,
The light of the quartz lamp 1, which is attached to each quartz lamp 1 and is a point light source, is converted into parallel light. Reference numeral 21 denotes a first filter made of a quartz plate, which absorbs light in a wavelength band of 4 μm or more while being cooled by the cooling means 23, and
Only the light A in the following wavelength band is transmitted. Reference numeral 22 denotes a second filter arranged to face the first filter, and is made of a quartz plate, like the first filter 21. This second filter
22 also transmits the light A ′ in the wavelength band of 4 μm or less,
The direction of the transmitted light A 'is changed to some extent, and the direction of the transmitted light A' is directed to the body 3 to be heated, which will be described later. Since the light A incident on the second filter 22 does not include light having a wavelength of 4 μm or more, the temperature hardly rises. Reference numeral 3 denotes a heated body such as a semiconductor wafer, which is supported by a heated body supporting means 5. Reference numeral 7 denotes a reflected light window that also transmits light in a wavelength band of 8 to 13 μm, such as barium fluoride. Reference numeral 4 denotes a heated object temperature detecting unit that detects infrared rays B emitted from the heated object, for example, the semiconductor wafer 3, and detects the temperature of the heated object 3. Reference numeral 6 denotes a chamber for storing the object 3 to be heated.

Even in the quartz lamp heating device having the above structure,
Since the temperature of the second filter 22 is kept low, no disturbance enters the heated body temperature detecting means 4 and the heated body 3 is accurately detected.
Can be detected.

〔The invention's effect〕

In the quartz lamp heating apparatus according to the present invention, the filter that absorbs the long wavelength band of the light emitted from the quartz lamp is doubled, and the filter absorbs most of the long wavelength band close to the quartz lamp, and thus has a low temperature. A cooling means is added to the first filter, which is likely to rise, so that the second filter is particularly separated from the quartz lamp, so that only the light whose long wavelength band has already been excluded by the first filter is incident. Since the temperature of the object does not rise and there is virtually no disturbance, the temperature of the object to be heated can be accurately detected.

[Brief description of the drawings]

FIG. 1a is a configuration diagram of a quartz lamp heating apparatus according to one embodiment of the present invention. FIG. 1b is a configuration diagram of a quartz lamp heating apparatus according to another embodiment of the present invention. FIG. 2 is a configuration diagram of a quartz lamp heating device according to the prior art. DESCRIPTION OF SYMBOLS 1 ... Quartz lamp, 11 ... Parabolic mirror, 2 ... Filter according to prior art, 21 ... First filter according to the present invention, 22 ... Second filter according to the present invention, 23 ... Cooling means Reference numeral 3 denotes an object to be heated (semiconductor wafer); 4 ... means for detecting the temperature of an object to be heated; 5 ... means for supporting an object to be heated; 6 ... a chamber; 7 ... a reflected light window.

Claims (1)

(57) [Claims] 1. A quartz lamp (1), disposed opposite to the quartz lamp (1), for absorbing light in a long wavelength band out of the light emitted by the quartz lamp (1), A first quartz filter (21) cooled by 23), and disposed opposite to the first quartz filter (21) and transmitting light transmitted through the first quartz filter (21). A second quartz filter (22); heated body support means (5) disposed opposite to the second quartz filter (22) for supporting the heated body; And a heated object temperature detecting means (4) arranged in a vertical direction.