JP5780040B2 - Abrasive cloth and method for producing the same - Google Patents

Description

  The present invention relates to a polishing cloth and a method for manufacturing the same that are suitably used when performing ultra-high-precision polishing and / or cleaning on substrates such as aluminum alloy substrates and glass substrates used for magnetic recording disks and the like. Is.

  With the recent increase in storage density, magnetic recording disks are required to be smooth to the limit of the disk surface. In recent years, a perpendicular recording medium in which an easy axis of magnetization in a magnetic film is oriented in a perpendicular direction has become the mainstream as a recording method for a magnetic recording disk. For this reason, if there are irregularities or scratches on the substrate before the magnetic layer is formed, the easy axis of magnetization may become an abnormally tilted part after the magnetic film is formed. In order to deal with such problems, the disk surface before the formation of the magnetic film is required to have a substrate surface roughness of 0.2 nm or less and to minimize scratches on the substrate surface called scratch defects. In the recording method developed after the perpendicular recording medium, the requirement for the substrate before forming the magnetic layer is the smoothing to the limit as described above.

  Up to now, surface treatment for satisfying low flying height of the magnetic head has been performed by slurry grinding and / or cleaning using a tape-like polishing cloth. In this case, in order to cope with the recent increase in recording density for rapidly increasing recording capacity, the substrate surface roughness of 0.2 nm or less is achieved, and scratches on the substrate surface called scratch defects are minimized. There is a demand for polishing cloth that can meet the demand.

  Conventionally, in order to reduce the surface roughness of the substrate, the fibers constituting the nonwoven fabric of the polishing cloth are made ultrafine, and in order to minimize scratches on the substrate surface, the nonwoven fabric is impregnated with a polymer elastic body to provide cushioning properties. The proposal is made.

  For example, a polishing cloth has been proposed in which a non-woven fabric made of ultrafine fibers having a single fiber diameter of 0.05 to 2.0 μm contains a polymer elastic body mainly composed of polyurethane (see Patent Documents 1 and 2). In this proposal, a surface roughness of about 0.2 nm is achieved.

JP 2009-83093 A JP 2009-214205 A

  However, the smoothness required for recent perpendicular recording magnetic recording disks, that is, the suppression of minimization of scratches, has been further increased. In addition, these conventional proposals only describe general needle punching conditions common to all artificial leather made of nonwoven fabric. That is, the optimum conditions for the structure of the surface fiber raised portion on the surface of the polishing cloth and the setting of universal needle punch conditions for obtaining a surface capable of maintaining sufficient dispersibility have been demanded.

  Accordingly, in view of the above-described conventional problems, an object of the present invention is to provide a polishing cloth that has fewer scratch defects than polishing cloth made of conventional ultrafine fibers in polishing and enables high-precision polishing and a method for manufacturing the same. There is.

  The present invention is to solve the above-mentioned problems, and the polishing cloth of the present invention is entangled with an ultrafine fiber bundle formed by converging ultrafine fibers having an average single fiber diameter of 0.05 to 2.0 μm. An abrasive cloth mainly composed of a non-woven fabric and a polymer elastic body, and the average size in the width direction of the ultrafine fiber bundle of the surface fiber raised portion that is constituted by the ultrafine fiber bundle of the non-woven fabric is 50 to 180 μm A polishing cloth characterized by

  According to a preferred aspect of the polishing cloth of the present invention, the average size in the width direction of the ultrafine fiber bundle of the surface fiber raised portion is 50 to 120 μm.

  According to a preferred aspect of the polishing pad of the present invention, the surface roughness of the polishing pad is 5 to 18 μm.

  According to the preferable aspect of the polishing cloth of the present invention, the CV value of the ultrafine fiber is 1 to 30%.

Moreover, the manufacturing method of the polishing cloth of this invention is a manufacturing method of the polishing cloth which combines at least following process (1)-(5), Comprising: The ultrafine fiber brought in by the needle punch of the following process (2) is possible. The number of sea-island type composite fibers is 3 to 6/1 barb, and before the following step (5), after adding polyvinyl alcohol to the nonwoven fabric intertwined with sea-island type composite fibers that can be made into ultrafine fibers, In step (5), the dissolved and removed polymer component of the sea-island composite fiber that can be made into ultrafine fibers is dissolved and removed with a solvent that does not dissolve polyvinyl alcohol, and then in step (3) below, a polymer elastic body is applied, It is a manufacturing method of polishing cloth characterized by including the process of removing polyvinyl alcohol .
(1) A step of producing a sea-island type composite fiber that can be made into an ultrafine fiber with an average single fiber fineness of 0.05 to 2.0 μm,
(2) A step of laminating a fiber web by a card or a cross wrapper using the sea-island type composite fiber, and obtaining a nonwoven fabric by needle punch,
(3) A step of applying a polymer elastic body to the nonwoven fabric in an amount of 10 to 200% by mass with respect to the mass of the ultrafine fiber after ultrafinening,
(4) A step of performing buffing treatment on at least one surface, and (5) a step of performing ultrafine processing on the sea-island type composite fiber.

  According to a preferred aspect of the method for producing an abrasive cloth of the present invention, the number of sea-island type composite fibers that can be made into ultrafine fibers brought in by the needle punch in the step (2) is 3 to 4 per barb.

  According to the present invention, it is possible to obtain an abrasive cloth that has a smaller size in the width direction of the ultrafine fiber bundle at the surface fiber raised portion made of the ultrafine fiber bundle and has excellent smoothness than the conventional abrasive cloth. Therefore, it is possible to reduce the surface roughness of scratches and objects to be polished in slurry grinding using a tape-like polishing cloth and / or cleaning using a slurry on the substrate surface of the recording disk. A cloth is obtained.

  The polishing cloth of the present invention is preferably used when an aluminum alloy substrate or a glass substrate used for a magnetic disk is polished or cleaned with an ultra-high precision finish.

FIG. 1 is an enlarged (40 ×) photograph of a drawing substitute SEM showing an example of the surface of the polishing cloth of the present invention. FIG. 2 is a schematic diagram for explaining a method of estimating the number of composite fibers brought in at the time of needle punching with respect to the relationship with the needle composite fibers at the time of needle punching.

  Next, the form for implementing about the abrasive cloth of this invention and its manufacturing method is demonstrated.

  With regard to the above-described problem, that is, the problem of reducing the surface roughness of the object to be scratched and polished, the ultrafine fiber bundle is configured in the structure of the surface fiber raised portion composed of the ultrafine fiber bundle on the polishing cloth surface. The inventors studied diligently, focusing on the size in the width direction and the surface smoothness of the portion in which the ultrafine fibers are substantially uniformly arranged in the length direction and aligned in one direction.

  It was also found that the denseness and dispersibility on the surface of the polishing cloth greatly contributed to highly accurate slurry grinding and / or cleaning processing. As a result, the nonwoven fabric constituting the polishing cloth is mainly composed of a nonwoven fabric in which ultrafine fiber bundles formed by converging ultrafine fibers having an average single fiber diameter of 0.05 to 2.0 μm are entangled, and the ultrafine fibers on the polished surface It has been clarified that the above-mentioned problems can be solved at once by using a nonwoven fabric having a size of 50 to 180 μm in the width direction formed by the ultrafine fiber bundle of the structure of the surface fiber raised portion composed of a bundle. .

  It is important that the average single fiber diameter of the ultrafine fibers used in the present invention is 0.05 to 2.0 μm from the viewpoint of the density of the polishing cloth surface fibers, the fiber strength, and the gripping ability of the abrasive grains. By setting the average single fiber diameter to 2.0 μm or less, the surface roughness of the object to be polished can be reduced. On the other hand, since the fiber strength and rigidity can be maintained by setting the average single fiber diameter to 0.05 μm or more, polishing can be performed efficiently.

  Examples of the polymer forming the ultrafine fiber used in the present invention include polyester, polyamide, polyolefin, polyphenylene sulfide (PPS), and the like. Many polycondensation polymers represented by polyester and polyamide have a high melting point, are excellent in heat resistance against heat generated during polishing, and are preferably used. Specific examples of the polyester include polyethylene terephthalate, polybutylene terephthalate, and potytrimethylene terephthalate. Specific examples of the polyamide include nylon 6, nylon 66, nylon 12, and the like.

  In addition, the polymer constituting the ultrafine fiber may be copolymerized with other components, and may further contain additives such as particles, a flame retardant, and an antistatic agent. Examples of other copolymer components include sodium 5-sulfoisophthalate, 3-hydroxybutanoic acid, nylon 6, nylon 66, nylon 12, and the like. Examples of the particles include titanium oxide. Examples of the flame retardant include organic flame retardants and inorganic flame retardants. Examples of the antistatic agent include alcohol-based antistatic agents.

  As a nonwoven fabric which is a fiber entangled body used for the polishing cloth of the present invention, a short fiber nonwoven fabric obtained by forming a laminated fiber web using a card and a cross wrapper and then performing needle punching or water jet punching. Are preferably used. Moreover, the long fiber nonwoven fabric obtained from the spunbond method, the melt blow method, etc., the nonwoven fabric obtained by the papermaking method, etc. can be employ | adopted suitably. Especially, since the short fiber nonwoven fabric and the spun bond nonwoven fabric can obtain the aspect of the ultrafine fiber bundle as will be described later by the needle punch treatment, they are preferably used.

  In the polishing cloth of the present invention, it is necessary that the nonwoven fabric which is the fiber entangled body contains a polymer elastic body. By including a polymer elastic body in the fiber entangled body, it is possible to prevent the ultrafine fibers from falling off from the polishing cloth due to the binder effect of the polymer elastic body, and to form uniform napping at the time of raising. Further, by incorporating a polymer elastic body into the nonwoven fabric which is a fiber entangled body, cushioning properties can be imparted to the polishing cloth and scratch defects can be reduced.

  Examples of the polymer elastic body used in the present invention include polyurethane, polyurea, polyurethane-polyurea elastomer, polyacrylic acid, acrylonitrile-butadiene elastomer, and styrene-butadiene elastomer. Of these, polyurethane elastomers such as polyurethane and polyurethane / polyurea elastomer are preferably used.

  The weight average molecular weight of the polymer diol component of the polyurethane used as the main component of the polymer elastic body is preferably 500 to 5000, more preferably 1000 to 3000. By setting the weight average molecular weight to 500 or more, more preferably 1000 or more, it is possible to maintain the strength of the polishing cloth and to prevent the fine fibers from falling off. Moreover, by making a weight average molecular weight into 5000 or less, More preferably, 3000 or less, the increase in the viscosity of a polyurethane solution can be suppressed and it can make it easy to impregnate an ultrafine fiber layer.

  In addition, as the raw material diol component, polyether diol, polyester diol, polycarbonate diol, polylactone diol, or a copolymer thereof is preferably used.

  Moreover, aromatic diisocyanate, alicyclic isocyanate, aliphatic isocyanate, etc. can be used as a diisocyanate component. Among them, in order to enhance the cushioning property that contributes to the fit to the object to be polished and the suppression of scratches, the ratio of the polyether diol component in the polymer diol is preferably 60% by mass or more from the viewpoint of flexibility. It is a more preferable aspect that it is 70 mass% or more.

  The weight average molecular weight of the polyurethane used in the present invention is preferably 100,000 to 300,000, more preferably 150,000 to 250,000. By setting the weight average molecular weight to 100,000 or more, it is possible to maintain the strength of the resulting polishing cloth and to prevent the fine fibers on the napped surface from falling off. Moreover, by making a weight average molecular weight into 300,000 or less, the increase in the viscosity of a polyurethane solution can be suppressed and it can make it easy to impregnate a nonwoven fabric.

  In addition, from the viewpoint of satisfying the fineness and distribution uniformity of the ultrafine fibers on the surface of the polishing cloth, the gel point of the polyurethane is preferably in the range of 2.5 to 6.0 ml. The gel point is more preferably in the range of 3.0 to 5.0 ml.

  With the gelation point of polyurethane, while stirring 100 g of a N, N′-dimethylformamide (hereinafter sometimes abbreviated as DMF) solution having a polyurethane concentration of 1% by mass, distilled water was dropped into this solution, This is the value of the amount of water dripping when the solidification of polyurethane starts and becomes slightly cloudy under a temperature condition of 25 ± 1 ° C. For this reason, it is necessary to use the DMF used for the measurement having a water content of 0.03% or less. The above-described measurement method is described on the assumption that the polyurethane DMF solution is transparent. However, when the polyurethane DMF solution is slightly cloudy in advance, the solidification of the polyurethane starts and the degree of cloudiness changes. The amount of water dripping can be regarded as the gel point.

  When the gel point is less than 2.5 ml, when the polyurethane is wet-coagulated, the coagulation rate is too fast, and foaming of the polyurethane existing in the interior space of the nonwoven fabric may be largely rough. In addition, when the gel point is less than 2.5 ml, as a result of partial foaming failure, when the sheet surface is ground by buffing to be described later, unevenness occurs in the napped length of the ultrafine fibers on the napped surface, In some cases, the distribution of the napped fibers is uneven, and the state in which the abrasive grains are uniformly dispersed on the napped surface cannot be obtained, and an ultra-high precision finish may not be realized.

  On the other hand, when the gel point exceeds 6.0 ml, when the polyurethane is wet-coagulated, the coagulation rate is too slow. May exist as thick hard polyurethane. For this reason, when the sheet surface is ground by buffing treatment, it is difficult to grind polyurethane, the nap length of the ultrafine fibers on the napped surface is very short, the fiber bundle density is inferior, and the surface fiber number density Since the unevenness of density becomes large, local agglomeration of abrasive grains may be caused, which may lead to generation of scratches.

  In the present invention, polyurethane is preferably used as the main component as the polymer elastic body, and other resins such as polyester are used as long as the performance and the uniform dispersion state of the napped fibers are not impaired. In addition, elastomer resins such as polyamide and polyolefin, acrylic resins, and ethylene-vinyl acetate resins may be included.

  In addition, the polymer elastic body includes various additives such as phosphorus-based, halogen-based, inorganic-based flame retardants, phenol-based, sulfur-based, phosphorus-based antioxidants, benzotriazole-based, benzophenone-based, salicylate. UV absorbers such as cyanoacrylates, oxalic acid anilides, light stabilizers such as hindered amines and benzoates, hydrolysis stabilizers such as polycarbodiimides, plasticizers, antistatic agents, surfactants and It may contain a trace amount of a coagulation modifier.

  In addition, the shape of the polymer elastic body inside the nonwoven fabric is at least part of the single fibers located on the outermost periphery of the fiber bundle made of ultrafine fibers from the viewpoint that the fibers are not dropped off and the directionality of the napped fibers is uniform. It is a preferable aspect that is in a state of being bonded.

  This form can be obtained by the method (B) described later. That is, since the polyvinyl alcohol protects most of the outer periphery of the ultrafine fiber bundle, polyurethane is prevented from entering the inside of the ultrafine fiber bundle, and the outer periphery of the fiber bundle that is not partially protected by polyvinyl alcohol The polyurethane will adhere.

  The polymer elastic body partially adheres and restrains the fiber located at the outermost periphery of the ultrafine fiber bundle, so that the degree of freedom of the napped ultrafine fiber on the raised surface can be appropriately controlled. As a result, the free directionality of the napped fibers after the buffing treatment is extremely reduced, that is, it can be adjusted to be aligned in one direction. As a result, the napped fibers are uniformly aligned in one direction, and the unevenness of the fine fibers existing on the napped surface is small, and the ultra fine fibers can be uniformly arranged. In this way, the napped fibers are distributed in a state where the napped fibers are densely and uniformly aligned in one direction, and the directionality of the fibers is aligned in one direction, thereby dispersing the abrasive grains during polishing. Therefore, it is possible to make the distribution of abrasive grains uniform on the surface of the polishing cloth, so that scratch defects can be extremely reduced.

  In the polishing cloth of the present invention, cushioning and fitting properties are important in terms of polishing accuracy, and can be controlled and adjusted by the ratio of fine fibers and polymer elastic body and the porosity (which can be seen by apparent density). . In the polishing cloth of the present invention, the ultrafine fibers and the polymer elastic body are preferably 50 to 100% by mass, more preferably 80 to 100% by mass, based on the total mass of the polishing cloth. The content of the polymer elastic body is preferably 10 to 50% by mass, more preferably 10 to 40% by mass, based on the total mass of the polishing pad. The surface state, porosity, cushioning property, hardness, strength, and the like of the polishing cloth can be appropriately adjusted depending on the content of the polymer elastic body. When the content of the elastic polymer exceeds 50% by mass, the processability and productivity are inferior, and it is difficult to obtain a raised surface in which ultrafine fibers are uniformly dispersed on the surface of the sheet-like material. For this reason, the generation of scratch defects during slurry grinding may not be suppressed. On the other hand, when the content of the polymer elastic body is less than 10% by mass, the strength of the polishing cloth is lowered, and the polishing cloth is liable to be deformed during slurry grinding, which is not preferable.

  In the polishing cloth of the present invention, it is important that at least one surface of the polishing cloth is a raised surface made of ultrafine fibers from the viewpoint of the density and dispersibility of the ultrafine fibers on the surface of the polishing cloth.

  FIG. 1 is an enlarged (40 ×) drawing substitute SEM photograph showing an example of the structure of a surface fiber raised portion formed by the ultrafine fiber bundle on the surface of the polishing cloth of the present invention.

  As shown in FIG. 1, the napped surface of the polishing cloth is formed with a structure including a surface fiber napped portion made of an ultrafine fiber bundle. The surface fiber raised portion is shown by a square in FIG. In the present invention, in the quadrangle shown in FIG. 1, the direction of the ultrafine fiber bundle (the width direction of the fiber bundle) is the transverse direction of the structure of the surface fiber napped portion, and the length direction in which the ultrafine fibers of the ultrafine fiber bundle are aligned. Is the length direction of the structure of the surface fiber raised portion. As the form of the structure of the surface fiber raised portion, the ultrafine fibers may be evenly arranged, the ultrafine fibers may be somewhat separated from each other, may be partially bonded, or are aggregated. May be.

  Here, the bond refers to a chemical reaction or physical fusion, and the aggregation refers to a molecular force such as a hydrogen bond.

  In the present invention, the average size in the width direction of the ultrafine fiber bundle having the structure of the surface fiber raised portion is in the range of 50 to 180 μm, preferably in the range of 50 to 120 μm. When the average size in the width direction of the ultrafine fiber bundle having the structure of the surface fiber raised portion is 180 μm or less, the ultrafine fiber bundles of the surface fiber raised portion do not overlap each other, and the unevenness on the surface of the polishing cloth is reduced. When used, it is difficult to give scratch defects to the object to be polished, and the surface roughness of the object to be polished can be reduced. Moreover, when the average size in the width direction of the ultrafine fiber bundle having the structure of the surface fiber raised portion is 50 μm or more, the amount of ultrafine fibers existing on the surface of the polishing pad is increased, and the surface coverage is increased.

  In this invention, it is preferable that the average size of the length direction of the ultrafine fiber bundle of the structure of a surface fiber napping part is 100 micrometers-500 micrometers. The length direction of the ultrafine fiber bundle is the length direction of the ultrafine fiber, and corresponds to the length direction of the rectangle in FIG. When the average size in the length direction of the structure of the surface fiber raised portion is 500 μm or less, the superfine fiber bundles hardly overlap each other, the unevenness on the surface of the polishing cloth is reduced, and when used for polishing, the surface is polished. It is difficult to give scratch defects, and the surface roughness of the cloth to be polished can be reduced. Moreover, when the average size of a length direction is 100 micrometers or more, the quantity of the ultrafine fiber which exists on the surface increases, and it is a preferable aspect with high surface coverage.

  The polishing cloth of the present invention preferably has a surface roughness of 5 to 18 μm. The surface roughness is more preferably 5 to 15 μm, and further preferably 5 to 8 μm. When surface roughness is larger than 5 micrometers, it is preferable from a viewpoint of the retainability of the abrasive grain at the time of slurry grinding, and a dispersibility. When the surface roughness is smaller than 18 μm, it is difficult to give scratch defects to the object to be polished when used for polishing, and the surface roughness of the object to be polished can be reduced.

When the polishing cloth of the present invention is formed into a tape shape and undergoes slurry grinding and cleaning processing, if a dimensional change occurs, the substrate surface cannot be uniformly polished. For this reason, it is preferable that the basis weight of the polishing cloth of the present invention is 100 to 400 g / m ² , more preferably 150 to 300 g / m ² from the viewpoint of the form stability of the polishing cloth.

  Next, a method for producing the polishing cloth of the present invention will be described.

The polishing cloth of the present invention is suitably obtained by combining at least the following steps (1) to (5). At that time, in order to achieve the surface fiber raised portion of the polishing cloth of the present invention, the number of sea-island type composite fibers that can be made into ultrafine fibers brought in by the needle punch in the step (2) is 3 to 6/1 barb. Is important.
(1) A step of producing a sea-island type composite fiber that can be made into an ultrafine fiber with an average single fiber fineness of 0.05 to 2.0 μm,
(2) A step of laminating a web with a card and a cross wrapper using the sea-island type composite fiber, and obtaining a nonwoven fabric by needle punching,
(3) The process of providing 10-200 mass% with respect to the ultra-fine fiber mass after ultrafine-izing a polymeric elastic body to this nonwoven fabric,
(4) A step of performing buffing treatment on at least one surface, and (5) a step of performing ultrafine processing on the sea-island type composite fiber.

  As a means for obtaining a fiber entangled body such as a nonwoven fabric in which ultrafine fiber bundles are entangled, ultrafine fiber generating fibers such as sea-island type composite fibers can be used. Although it is difficult to produce a fiber entanglement directly from an ultrafine fiber, a fiber entanglement is produced from an ultrafine fiber-generating fiber, and an ultrafine fiber is generated from a sea-island composite fiber in the fiber entanglement. A fiber entangled body in which the bundle is entangled can be obtained.

  As a composite fiber that can be made into ultrafine fibers, two islands of thermoplastic resin with different solvent solubility are used as sea components and island components, and the island components are converted into ultrafine fibers by dissolving and removing the sea components using a solvent. It is possible to employ a release type composite fiber that splits into ultrafine fibers by alternately disposing a mold fiber or a two-component thermoplastic resin in a radial or multilayered manner on the fiber cross section and separating and separating each component.

  For the sea-island type composite fiber, the sea-island type composite fiber, in which the sea component and the island component are spun together by using the sea-island type composite base, or the sea component and the island component are mixed and spun to mix. There are spinning fibers. Among these, sea-island type composite fibers are preferably used from the viewpoint that ultrafine fibers having a uniform fineness are obtained, and that a sufficiently long ultrafine fiber is obtained and contributes to the strength of the sheet-like material.

  As the sea component of the sea-island composite fiber, polyethylene, polypropylene, polystyrene, copolymerized polyester obtained by copolymerizing sodium sulfoisophthalic acid, polyethylene glycol, or the like, polylactic acid, or the like can be used.

  The dissolution removal of the sea component may be performed at any timing before, after applying, and after raising the elastic polymer.

  As a method for obtaining a fiber entangled body such as a non-woven fabric, as described above, a method in which a fiber web is entangled with a needle punch or a water jet punch, a spun bond method, a melt blow method, and a paper making method can be employed. Among these, in order to obtain the above-described embodiment of the ultrafine fiber bundle, a method that undergoes processing such as needle punching or water jet punching is preferably used.

The number of punches in the needle punching process is preferably 2000 to 8000 / cm ² from the viewpoint of forming a dense raised surface by high entanglement of fibers. If the number of punchings is 2000 / cm ² or more, the surface fibers are excellent in density and a desired high-precision finish can be obtained. Further, when the number of punching is 8000 / cm ² or less, the workability is not deteriorated and the fiber is not damaged and the strength is not lowered. The fiber density of the nonwoven fabric after needle punching is preferably 0.15 to 0.4 g / cm ³ and more preferably 0.2 to 0.3 g / cm ³ from the viewpoint of densification of the number of surface fibers. More preferred.

  The average size in the width direction of the structure of the surface fiber napped portion needs to be 50 to 180 μm, and preferably 50 to 120 μm. For that purpose, it is important that the number of composite fibers such as ultrafine fiber generating fibers brought in by one needle punch is 3 to 6/1 barb, preferably 3 to 4/1 barb. It is.

  The number of composite fibers such as a composite fiber that can be turned into a fine fiber is determined by the shape of the barb and the diameter of the composite fiber. Here, the idea about the number of composite fibers that can be made into ultrafine fibers caught on barbs will be described. That is, an isosceles triangle is assumed in which the angle formed at the back of the barb (α in FIG. 2) is the apex angle, and the tip of the barb (A in FIG. 2) is one side from the back of the barb (B in FIG. 2). . The composite fibers are densely packed and arranged from the back of the isosceles triangle (back of the barb). Conjugate fibers that can be made into ultrafine fibers arranged out of an isosceles triangle are considered as composite fibers that can be brought into ultrafine fiber that can be brought into the isosceles triangle when the area occupancy of the composite fiber is 50% or more. Was defined as the number brought in.

  Therefore, in the present invention, among the steps (1) to (5), it is important that the needle punching step in the step (2) is before the step of performing the ultrafine treatment on the nonwoven fabric in the step (5). It is.

  In addition, the needle used in the needle punching process has 1 to 3 barbs, the barb shape has a kick-up of 0 to 50 μm, an undercut angle of 0 to 40 °, and a throat depth of 40 to 80 μm. Those having a slow length of 0.5 to 1.0 mm are preferably used.

  From the viewpoint of densification of the number of surface fibers, it is preferable that the nonwoven fabric containing the elastic polymer thus obtained is contracted by dry heat and / or wet heat, and further densified.

  In the polishing cloth of the present invention, it is important that the above-described ultrafine fiber bundle is mainly composed of a non-woven fabric.

  In the polishing cloth of the present invention, from the viewpoint of excellent fitability to the object to be polished and the effect of suppressing scratches on the surface of the object to be polished, the non-woven fabric is made mainly of polyurethane before and / or after the ultrafine fiber treatment. It is preferable to give a molecular elastic body. Such a polymer elastic body has functions such as surface unevenness and cushioning for vibration absorption and fiber shape maintenance, and is filled with a polymer elastic body in the internal space of the nonwoven fabric to integrate it. It is excellent in the fitting property to the object and the effect of suppressing scratches on the surface of the object to be polished.

  As a method for applying the polymer elastic body such as polyurethane to the nonwoven fabric, a method in which the polymer elastic body is applied to the nonwoven fabric or impregnated and then solidified can be employed. Among these, from the viewpoint of processability, a method of wet coagulation after impregnating the elastic polymer solution into the nonwoven fabric is preferably used.

  For example, polyurethane used as a polymer elastic body is made into a solution with a solvent such as dimethylformamide, and (A) a nonwoven fabric entangled with a composite fiber that can be made into ultrafine fibers is impregnated with the polyurethane solution, and water or an organic solvent aqueous solution A method of dissolving and removing the polymer component of the composite fiber that can be made into ultrafine fibers after solidifying in a solvent that does not dissolve polyurethane is exemplified. Alternatively, (B) a composite capable of forming ultrafine fibers after applying polyvinyl alcohol having a saponification degree of preferably 80% or more to a nonwoven fabric intertwined with composite fibers capable of forming ultrafine fibers and protecting most of the periphery of the fibers. It is preferable to use a method in which the polymer component is dissolved and removed with a solvent that does not dissolve polyvinyl alcohol, then impregnated with a polyurethane solution, solidified in water or an organic solvent aqueous solution, and then the polyvinyl alcohol is removed. Can do.

  The napping of the nonwoven fabric sheet thus obtained can be performed using sandpaper, a roll dancer or the like. In particular, uniform and dense nappings can be formed by using sand perper.

  Furthermore, for the purpose of applying slurry grinding and cleaning to the substrate surface with an ultra-high precision finish and suppressing scratches, the uniformity and density of surface fiber distribution on the surface is improved, and the direction of napped fibers is extremely improved. In order to reduce it, it is preferable to make the grinding load smaller. When the grinding load is high, there are many napped fibers that are curly, and the napped fibers are likely to be stuck together in a bundle. In order to reduce the grinding load, it is preferable to appropriately adjust the number of buffs, the sandpaper count, and the like. Among them, the number of buff stages is preferably multistage buffing of 3 or more stages, and the sandpaper used for each stage is preferably in the range of 150 to 600 in JIS regulations.

  As a method for suitably performing slurry grinding and cleaning using the polishing cloth of the present invention, from the viewpoint of processing efficiency and stability, the polishing cloth is cut into a tape of 30 to 50 mm width, It is preferably used as a cleaning tape. In the present invention, a method of performing slurry grinding and cleaning of an aluminum alloy magnetic recording disk or a glass magnetic recording disk using such a polishing tape and a slurry containing loose abrasive grains is a preferable method.

  As a polishing condition, a slurry in which high-hardness abrasive grains such as diamond fine particles are dispersed in an aqueous dispersion medium is preferably used. Among them, the abrasive grains suitable for the ultrafine fibers constituting the polishing cloth of the present invention are composed of single crystal diamond from the viewpoints of abrasive retention, dispersibility, scratch suppression and surface roughness reduction. The thickness is preferably 1 to 20 nm, and more preferably 1 to 10 nm.

  That is, the polishing cloth of the present invention is suitably used when an aluminum alloy base or a glass base used for a magnetic disk is polished with an ultra-high precision finish or is subjected to a cleaning process.

  Next, the abrasive cloth of the present invention and the method for producing the same will be described more specifically with reference to examples, but the present invention is not limited thereto. The evaluation methods used in the examples and the evaluation conditions are as follows.

(1) Melting | fusing point of polymer The peak top temperature which shows melting | fusing of a polymer by 2nd run was made into melting | fusing point of a polymer using DSC-7 by Perkin Elmer (Perkin Elmaer). At this time, the rate of temperature increase was 16 ° C./min, and the sample amount was 10 mg.

(2) Polymer melt flow rate (MFR)
4-5 g of sample pellets are placed in a cylinder of an MFR electric furnace and the amount of resin extruded in 10 minutes under a load of 2160 gf and a temperature of 285 ° C. using a Toyo Seiki melt indexer (S101) (g) Was measured. The same measurement was repeated 3 times, and the average value was defined as MFR.

(3) Number of composite fibers brought in at the time of needle punching FIG. 2 is a schematic diagram for explaining a method for estimating the number of composite fibers brought in at the time of needle punching, regarding the relationship between needles and composite fibers at the time of needle punching. A method for estimating the number of composite fibers brought in at the time of needle punching will be described using the schematic diagram of the needle and the composite fiber shown in FIG. First, a point D having the same length as the length of the tip of the barb (A in FIG. 2) and the depth of the barb (B in FIG. 2) is obtained on BC of FIG. Next, the ends A and D of the barb in FIG. 2 are connected by a line segment to create an isosceles triangle BAD where BA = BD. In this isosceles triangle, the composite fibers are closely packed and arranged. Conjugate fibers arranged out of an isosceles triangle BAD are considered to be composite fibers that can be brought into the isosceles triangle BAD when the area occupancy of the composite fiber is 50% or more, and the total number of them is defined as the number did.

(4) Average fiber diameter and fiber diameter CV
Using a cross-section of the polishing cloth cut in the thickness direction as an observation surface, it was observed with a scanning electron microscope (SEM) at a measurement magnification of 5000 times, and the diameters of 50 single fibers extracted at random were measured. This is performed at three locations, the diameter of a total of 150 single fibers is measured, and an average value and a standard deviation value are calculated using this as a population. The average value was defined as the average fiber diameter, and the value obtained by dividing the standard deviation value by the average value in percentage (%) was defined as the fiber diameter CV.

(5) Structure size measurement of surface fiber napped portion As shown in FIG. 1, it is formed by observing the polishing cloth surface as an observation surface at a magnification of 40 times from SEM and arranging the ultrafine fibers present on the surface in contact with each other. The ultrafine fiber bundle is defined as the structure of the surface fiber napped portion. 50 structures of the surface fiber raised portions were randomly extracted, and the sizes of the 50 extracted surface fiber raised structures in the width direction and the length direction were measured, and an average value thereof was calculated.

(6) Surface roughness measurement of polishing cloth Using the surface of the polishing cloth as a measurement surface and using a surface roughness measuring instrument SE-40C, the cutoff is 2.5 mm, the evaluation length is 12.5 mm, and the evaluation speed is 0.5 m / s. The surface roughness was measured. The average value was calculated by measuring three times in the forward direction with respect to the nap.

(7) Polishing with an abrasive cloth The abrasive cloth was a 30 mm wide tape. As a polishing target, a glass substrate made of amorphous glass manufactured by KMG whose surface roughness was controlled to 0.3 nm or less was used. A slurry having a concentration of 0.01% of free abrasive grains in which single crystal diamond particles having a primary particle diameter of 5 nm were clustered to an average diameter of 80 nm was dropped onto the polishing cloth surface at a rate of 50 ml / min. Further, the tape running speed was 70 mm / min, the disk rotation speed was 600 rpm, the swing was 100 times / min, the pressing pressure was 1.5 kgf, and polishing was performed for 15 seconds. This was performed on both sides of each disk.

(8) Substrate Surface Roughness to be Polished Measurement was performed in a tapping mode using “AFM NanoScope” (registered trademark) IIIa manufactured by Veeco. The observation area on the substrate was 10 μm × 10 μm, an arbitrary point on the substrate was measured, and the average value of the arbitrary three points was defined as the surface roughness (Ra). A substrate surface roughness of 2.0 nm or less was regarded as good polishing performance.

(9) Number of scratches to be polished Using both surfaces of 5 substrates after polishing, that is, the total area on the surface of 10 substrates as a measurement object, using an optical surface analyzer (Candela 6100), a groove having a depth of 2 nm or more is used as a scratch. The number of scratch points was measured, and the average value of the measured values on the 10 surfaces was evaluated. The lower the value, the higher the performance. When the number of scratches was 20 or less, the polishing performance was good.

[Example 1]
(raw cotton)
(Sea component and island component)
Nylon 6 having a melting point of 220 ° C. and MFR 10.5 was used as an island component, and copolymerized polystyrene (co-PSt) obtained by copolymerizing 22 mol% of 2-ethylhexyl acrylate having a melting point of 53 ° C. and MFR 12 was used as a sea component.

(Spinning / drawing)
Using the sea and island components described above, using a 376 island / hole sea-island composite die, spinning temperature of 285 ° C., island / sea mass ratio of 40/60, discharge rate of 1.7 g / min / hole, spinning speed of 1200 m Umijima fiber was melt spun at / min. Next, the film is stretched 3.0 times in an oil solution bath for spinning at a temperature of 85 ° C., crimped using an indentation type crimping machine, and cut to obtain a fineness of 6.5 dtex and a fiber length of 51 mm. The raw cotton of sea-island type composite fiber was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
A laminated fiber web was formed through the card and cross wrapping process using the raw cotton of the above-mentioned sea-island type composite fibers. Subsequently, the obtained laminated fiber web was used with a needle punch machine in which a needle having a throat depth of 60 μm, a kick-up of 0 μm, an undercut angle of 4 °, and a throat length of 0.9 mm was implanted. A needle punch was performed at cm ² , and a nonwoven fabric made of sea-island type composite fibers having a basis weight of 800 g / m ² and an apparent density of 0.190 g / cm ³ was produced. The number of sea-island composite fibers brought in by needle punching was 3/1 barbs.

(Polishing cloth)
The nonwoven fabric composed of the sea-island type composite fiber was subjected to hot water shrinkage treatment, then impregnated with a 12% aqueous solution of polyvinyl alcohol and dried. Thereafter, the sea component co-PST was dissolved and removed in trichlorethylene and dried to obtain an ultrafine fiber nonwoven fabric in which ultrafine fiber bundles were entangled.

  A polyurethane (gel point 4.2 ml) in which the polymer diol is composed of 75% by mass of a polyether and 25% by mass of a polyester is added to the nonwoven fabric thus obtained in a solid content of 20% by mass with respect to the mass of the fiber. The polyurethane was coagulated with a 30% DMF aqueous solution having a liquid temperature of 35 ° C., and DMF and polyvinyl alcohol were removed with hot water having a temperature of about 85 ° C. Thereafter, the paper was cut in the thickness direction by a half-cutting machine having an endless band knife, and the non-half-cut surface was ground in three stages using a JIS # 240 sandpaper to form napped hairs to produce a polishing cloth.

The obtained polishing cloth has an average single fiber diameter of ultrafine fibers of 0.72 μm, a fiber diameter CV value of 7.0%, a thickness of 0.5 mm, and a basis weight of 180 g / m ² . Yes, the apparent density was 0.36 g / cm ³ . When the polishing performance was evaluated using the obtained polishing cloth, the substrate surface roughness and the number of scratches were satisfactory, and the surface after polishing was also highly uniform. The results are shown in Table 1.

[Example 2]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
Using the sea and island components described above, using a 200 island / hole sea-island composite die, spinning temperature of 285 ° C., island / sea mass ratio of 40/60, discharge rate of 0.9 g / min / hole, spinning speed of 1200 m The sea-island type composite fiber was melt-spun under the conditions of / min. Next, the film was stretched 3.0 times in an oil solution bath for spinning at a temperature of 85 ° C., crimped using an indentation type crimping machine, cut, fineness of 5.2 dtex, and fiber length of 51 mm. The raw cotton of sea-island type composite fiber was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 1, a nonwoven fabric made of sea-island composite fibers having a basis weight of 680 g / m ² and an apparent density of 0.224 g / cm ³ was produced.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average single fiber diameter of ultrafine fibers of 1.53 μm, a fiber diameter CV value of 5.8%, a thickness of 0.51 mm, and a basis weight of 186 g / m ² . The apparent density was 0.365 g / cm ³ . The results are shown in Table 1.

[Example 3]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 1.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
Except for using a needle with a throat depth of 60 μm, a kick-up of 10 μm, an undercut angle of 27 °, and a throat length of 0.8 mm, the basis weight is 800 g / m ² and the apparent density is 0.00. A 190 g / cm ³ ultrafine fiber-generating fiber nonwoven fabric was prepared.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1.

The obtained polishing cloth has an average fiber diameter of 0.72 μm, the CV value of the fiber diameter is 7.0%, the thickness is 0.49 mm, and the basis weight is 175 g / m ^2. The density was 0.357 g / cm ³ . The results are shown in Table 1.

[Example 4]
(raw cotton)
The sea component and the island component were the same as those used in Example 2.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 2.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 3, a nonwoven fabric made of sea-island composite fibers having a basis weight of 680 g / m ² and an apparent density of 0.224 g / cm ³ was produced.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1.

The obtained abrasive cloth has an average fiber diameter of ultrafine fibers of 1.53 μm, a fiber diameter CV value of 5.8%, a thickness of 0.5 mm, and a basis weight of 180 g / m ² . The apparent density was 0.360 g / cm ³ . The results are shown in Table 1.

[Example 5]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
Using the sea and island components described above, using a 800-island / hole sea-island type composite die, spinning temperature 285 ° C., island / sea mass ratio 30/70, discharge rate 2.1 g / min / hole, spinning speed 1200 m The sea-island type composite fiber was melt-spun under the conditions of / min. Next, it is stretched 3.0 times in a liquid bath at a temperature of 85 ° C., crimped using an indentation type crimping machine, cut, sea island with a fineness of 12.1 dtex and a fiber length of 51 mm A raw cotton of type composite fiber was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 3, a nonwoven fabric made of sea-island composite fibers having a basis weight of 680 g / m ² and an apparent density of 0.224 g / cm ³ was produced.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 3.

The obtained polishing cloth has an average fiber diameter of 0.50 μm of ultrafine fibers, a CV value of the fiber diameter of 7.7%, a thickness of 0.48 mm, and a basis weight of 175 g / m ² . The apparent density was 0.365 g / cm ³ . The results are shown in Table 1.

[Example 6]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
A sea-island composite in which about 1,000 island components are arranged in the sea component by the so-called mixed spinning method, in which 50% by weight of the sea component and the island component are mixed and the sea-island composite fiber is melt-spun at a spinning temperature of 285 ° C. The fiber was melt-spun at a spinning speed of 1200 m / min. Next, the fiber is stretched 3.0 times in an oil solution bath for spinning at a temperature of 85 ° C., crimped using an indentation type crimping machine, cut, the fineness is 11.6 dtex, the fiber length Was obtained as a raw cotton of a sea-island type composite fiber having a thickness of 51 mm.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
A nonwoven fabric made of sea-island composite fibers was obtained in the same manner as in Example 1 except that JIS # 320 sandpaper was used.

(Polishing cloth)
The nonwoven fabric made of the sea-island type composite fiber was subjected to hot water shrinkage, and then impregnated with a 12% aqueous solution of polyvinyl alcohol and dried. To this non-woven fabric, 20% by mass of a solid content with respect to the mass of fiber is added to a polyurethane whose polymer diol is 75% by mass of polyether and 25% by mass of polyester. Was solidified and DMF was removed with hot water at a temperature of about 85 ° C. Thereafter, the sea component co-PST was dissolved and removed in trichlorethylene and dried to obtain an ultrafine fiber nonwoven fabric composed of an ultrafine fiber bundle and polyurethane.

  Thereafter, the obtained ultra-fine fiber nonwoven fabric was half-cut in the thickness direction by a half-cutting machine having an endless band knife, and the half-cut surface was ground in three steps with JIS # 320 sandpaper to form napped hairs to produce a polishing cloth. .

The obtained polishing cloth has an average fiber diameter of ultrafine fibers of 0.72 μm, a fiber diameter CV value of 32.3%, a thickness of 0.55 mm, and a basis weight of 180 g / m ^2. The density was 0.327 g / cm ³ . The results are shown in Table 1.

[Example 7]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 5.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 5.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 3, a nonwoven fabric made of sea-island composite fibers was obtained.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 5. The obtained polishing cloth has an average fiber diameter of ultrafine fibers of 0.72 μm, a fiber diameter CV value of 32.3%, a thickness of 0.5 mm, and a basis weight of 190 g / m ² . The apparent density was 0.380 g / cm ³ . The results are shown in Table 1.

[Example 8]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
A single fiber fineness of 2.2 dtex and a fiber length of 51 mm were obtained in the same manner as in Example 1 except that a sea-island type composite base having 600 islands / hole was used and the discharge rate was 1.0 g / min / hole. A raw cotton of sea-island type composite fiber was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 6, a nonwoven fabric made of sea-island composite fibers was obtained.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average fiber diameter of 0.35 μm of ultrafine fibers, a CV value of the fiber diameter of 6.2%, a thickness of 0.5 mm, a basis weight of 177 g / m ² , and an apparent density. Was 0.354 g / cm ³ . The results are shown in Table 1.

[Example 9]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
A fineness of 6.8 dtex is obtained in the same manner as in Example 1 except that a sea-island type composite base of 448 islands / holes is used, and an island / sea mass ratio of 50/50 is set to a discharge rate of 2.0 / min / hole. A raw cotton of sea-island type composite fiber having a fiber length of 51 mm was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 1, a nonwoven fabric made of sea-island composite fibers having a basis weight of 680 g / m ² and an apparent density of 0.224 g / cm ³ was produced. The number of sea-island composite fibers brought in by needle punching was 3/1 barbs.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average fiber diameter of ultrafine fibers of 0.52 μm, a fiber diameter CV value of 5.5%, a thickness of 0.5 mm, and a basis weight of 180 g / m ² . The apparent density was 0.36 g / cm ³ . When the polishing performance was evaluated using the obtained polishing cloth, the substrate surface roughness and the number of scratches were satisfactory, and the surface after polishing was also highly uniform. The results are shown in Table 1.

[Comparative Example 1]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 1.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
Except for using a needle with a throat depth of 65 μm, a kick-up of 10 μm, an undercut angle of 35 °, and a throat length of 0.9 μm, the basis weight is 870 g / m ² and the apparent density is 0.220 g / m. A non-woven fabric made of cm ³ sea-island type composite fibers was prepared.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average fiber diameter of ultrafine fibers of 0.72 μm, a fiber diameter CV value of 7.0%, a thickness of 0.51 mm, and a basis weight of 180 g / m ^2. The density was 0.360 g / cm ³ . When the polishing performance was evaluated using the obtained polishing cloth, the substrate surface roughness and the number of scratches were not satisfactory. The results are shown in Table 1.

[Comparative Example 2]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 2.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 2.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Comparative Example 1, a nonwoven fabric made of sea-island composite fibers was obtained.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average fiber diameter of ultrafine fibers of 1.53 μm, a fiber diameter CV value of 5.8%, a thickness of 0.51 mm, and a basis weight of 180 g / m ² . The apparent density was 0.353 g / cm ³ . The results are shown in Table 1.

[Comparative Example 3]
(Sea component and island component)
The sea component and the island component were the same as those used in Example 1.

(Spinning / drawing)
Using the sea and island components described above, a 36 island / hole sea-island type composite die, spinning temperature of 285 ° C., island / sea mass ratio of 50/50, discharge rate of 1.5 g / min / hole, spinning speed of 1000 m / Melt spun in minutes. Next, it is stretched 3.0 times in an oil solution bath for spinning at a temperature of 85 ° C., crimped by an indentation type crimping machine, cut, and has a fineness of 3.8 dtex and a fiber length of A 51 mm sea-island composite fiber raw cotton was obtained.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Comparative Example 1, a nonwoven fabric made of sea-island composite fibers was obtained.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 6. The obtained polishing cloth had an average fiber diameter of ultrafine fibers of 3.73 μm, a fiber diameter CV value of 6.9%, a thickness of 0.53 mm, and a basis weight of 184 g / m ^2. The density was 0.347 g / cm ³ . The results are shown in Table 1.

[Comparative Example 4]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Example 5.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 5.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
Sea island with a weight per unit area of 660 G / m ² and an apparent density of 0.188 g / cm ³ except that a needle with a throat depth of 40 μm, a kick-up of 0 μm, an undercut angle of 2 ° and a throat length of 0.8 mm is used. A non-woven fabric made of mold composite fibers was prepared.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1. The obtained polishing cloth has an average fiber diameter of 0.50 μm of ultrafine fibers, a CV value of the fiber diameter of 7.7%, a thickness of 0.52 mm, and a basis weight of 162 g / m ² . The apparent density was 0.311 g / cm ³ . The results are shown in Table 1.

[Comparative Example 5]
(raw cotton)
(Sea component and island component)
The sea component and the island component were the same as those used in Comparative Example 3.

(Spinning / drawing)
Spinning and drawing were performed in the same manner as in Example 3.

(Nonwoven fabric made of composite fibers that can be made into ultrafine fibers)
In the same manner as in Example 1, a nonwoven fabric made of sea-island type composite fibers having a basis weight of 640 g / m ² and an apparent density of 0.196 g / cm ³ was produced.

(Polishing cloth)
A polishing cloth was obtained in the same manner as in Example 1.

The obtained polishing cloth had an average fiber diameter of ultrafine fibers of 3.73 μm, a fiber diameter CV value of 6.8%, a thickness of 0.51 mm, and a basis weight of 192 g / m ^2. The density was 0.376 g / cm ³ . The results are shown in Table 1.

A: Barb tip B: Barb depth C: Arbitrary point from B to needle tip (provided that BC> BA is satisfied)
D: The point on BC and the same length as BA

Claims (6)

  An abrasive cloth mainly composed of a nonwoven fabric obtained by entanglement of an ultrafine fiber bundle composed of ultrafine fibers having an average single fiber diameter of 0.05 to 2.0 μm and a polymer elastic body, and the ultrafine fibers of the nonwoven fabric An abrasive cloth characterized in that the average size in the width direction of the ultrafine fiber bundle of the surface fiber raised portion constituting the bundle is 50 to 180 μm.   The polishing cloth according to claim 1, wherein the average size in the width direction of the ultrafine fiber bundle of the surface fiber raised portion is 50 to 120 µm.   The polishing cloth according to claim 1 or 2, wherein the polishing pad has a surface roughness of 5 to 18 µm.   The abrasive cloth according to any one of claims 1 to 3, wherein the ultrafine fiber has a CV value of 1 to 30%. A method for producing a polishing cloth comprising at least the following steps (1) to (5), wherein the number of sea-island type composite fibers that can be made into ultrafine fibers brought in by the needle punch in the following step (2) is 3 to 6. / 1 barb, and before the following step (5), after giving polyvinyl alcohol to the nonwoven fabric entangled with the sea-island type composite fiber that can be made into ultrafine fibers, in the following step (5), sea islands that can be made into ultrafine fibers Dissolving and removing the polymer component of the mold composite fiber by dissolving and removing with a solvent that does not dissolve polyvinyl alcohol, and then adding a polymer elastic body and then removing polyvinyl alcohol in the following step (3) A method of manufacturing an abrasive cloth.
(1) A step of producing a sea-island type composite fiber that can be made into an ultrafine fiber with an average single fiber fineness of 0.05 to 2.0 μm,
(2) A step of laminating a web with a card and a cross wrapper using the sea-island type composite fiber, and obtaining a nonwoven fabric by needle punching,
(3) A step of applying a polymer elastic body to the nonwoven fabric in an amount of 10 to 200% by mass with respect to the mass of the ultrafine fiber after ultrafinening,
(4) A step of performing buffing treatment on at least one surface, and (5) a step of performing ultrafine processing on the sea-island type composite fiber.   6. The method for producing an abrasive cloth according to claim 5, wherein the number of sea-island type composite fibers brought in by needle punching is 3 to 4/1 barb.