CN103068523A - Polishing cloth and method for producing same - Google Patents
Polishing cloth and method for producing same Download PDFInfo
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- CN103068523A CN103068523A CN2011800409357A CN201180040935A CN103068523A CN 103068523 A CN103068523 A CN 103068523A CN 2011800409357 A CN2011800409357 A CN 2011800409357A CN 201180040935 A CN201180040935 A CN 201180040935A CN 103068523 A CN103068523 A CN 103068523A
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- abrasive cloth
- superfine fibre
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
- G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
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- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Nonwoven Fabrics (AREA)
- Treatment Of Fiber Materials (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The purpose of the present invention is to provide a high performance polishing cloth which has excellent smoothness and a dense surface state wherein extra-fine fiber bundles are uniformly dispersed, said smoothness and surface state not having been achieved by polishing cloths that are composed of conventional extra-fine fibers. A polishing cloth of the present invention is configured of a polymer elastic body and a nonwoven fabric that is obtained by entwining extra-fine fiber bundles which are obtained by converging extra-fine fibers having an average single fiber diameter of 0.05-2.0 [mu]m. The polishing cloth is characterized in that the average size of the extra-fine fiber bundles in the width direction in a surface fiber piloerection part of the nonwoven fabric, said surface fiber piloerection part being composed of the extra-fine fiber bundles, is 50-180 [mu]m.
Description
Technical field
The present invention relates to that the substrate classes such as the aluminium alloy base plate that uses in the disk etc. or glass substrate are carried out the attrition process of superhigh precision and/or cleaning adds and is fit to abrasive cloth and the manufacture method thereof used man-hour.
Background technology
For disk, along with high storage density in recent years, require optical disc surface close to the smoothing of the limit.In recent years for the recording mode of disk, the perpendicular recording medium that magnetized axle is orientated in vertical direction that is easy in the magnetic film becomes main flow.Therefore, the substrate before magnetosphere forms exists concavo-convex or during cut, is easy to magnetized axle after the possible magnetic film film forming and tilts to become abnormal portion.For above-mentioned problem, form front optical disc surface for magnetic film, requiring to make the substrate surface roughness is below the 0.2nm, and makes the cut minimization of the substrate surface that is known as scratch defects.In addition, in the recording mode of later on exploitation of perpendicular recording medium, to the requirement of the substrate before the magnetosphere film forming and above-mentioned similarly be smoothing close to the limit.
Up to now, by slurry grinding and/or the cleaning processing of using banded abrasive cloth, carry out be used to the low surface treatment of floating of satisfying magnetic head.In the above-mentioned situation, in order to tackle the high record density that is used for recently rapid high recording capacity, require the following substrate surface roughness of realization 0.2nm, and the cut of the substrate surface that is known as scratch defects is seldom changed, urgent expectation can be satisfied the abrasive cloth of above-mentioned requirements.
Following proposal is disclosed at present, that is, in order to reduce the substrate surface roughness, make superfineization of fiber of the nonwoven that consists of abrasive cloth, and then the cut on the substrate surface is seldom changed, macromolecular elastomer is impregnated in the nonwoven of abrasive cloth that formation should have resiliency.A kind of abrasive cloth is for example disclosed, described abrasive cloth contains in the nonwoven that the superfine fibre that by single fiber diameter is 0.05～2.0 μ m forms with the abrasive cloth (referring to patent documentation 1 and 2) of polyurethane as the macromolecular elastomer of main component, in the such scheme, realize the surface roughness about 0.2nm.
Patent documentation 1: TOHKEMY 2009-83093 communique
Patent documentation 2: TOHKEMY 2009-214205 communique
Summary of the invention
Yet recently the desired flatness of disk of perpendicular recording, fewization that namely suppress cut further improve.In addition, in the above-mentioned existing scheme, the comprehensive general common Condition of Acupuncture of the artificial leather that is formed by nonwoven is disclosed just.That is the optimum condition and being used for of structure that, require to set the surface fiber pile part on abrasive cloth surface obtains keeping the general Condition of Acupuncture on the surface of sufficient dispersiveness.
Therefore, in view of above-mentioned existing problem, the object of the present invention is to provide a kind of in attrition process scratch defects lack, can carry out the high performance abrasive cloth of high-precision attrition process than the existing abrasive cloth that is formed by superfine fibre.
Other purposes of the present invention are to provide a kind of method of effectively making above-mentioned abrasive cloth.
The present invention can solve above-mentioned problem, abrasive cloth of the present invention consists of as main body with nonwoven and macromolecular elastomer, described nonwoven be will be by the average single fiber diameter superfine fibre of 0.05～2.0 μ m assemble the superfine fibre wrapping that forms around obtaining, it is characterized in that the average-size of surface fiber pile part on superfine fibre beam width direction that the above-mentioned superfine fibre bundle of above-mentioned nonwoven consists of is 50～180 μ m.
According to the preferred version of abrasive cloth of the present invention, the average-size of above-mentioned surface fiber pile part on superfine fibre beam width direction is 50～120 μ m.
According to the preferred version of abrasive cloth of the present invention, the surface roughness of above-mentioned abrasive cloth is 5～18 μ m.
According to the preferred version of abrasive cloth of the present invention, the CV value of above-mentioned superfine fibre is 1～30%.
In addition, the manufacture method of abrasive cloth of the present invention is the manufacture method of abrasive cloth that comprises the combination of following at least operation (1)～(5), it is characterized in that, with following operation (2) utilize that acupuncture introduces can superfine fibre the radical of islands-in-sea bicomponent fibre be made as 3～6/1 hook.
Operation (1): making can turn to the islands-in-sea bicomponent fibre that the average single fiber fiber number is 0.05～2.0 μ m by superfine fibre;
Operation (2): use this islands-in-sea bicomponent fibre, utilize carding machine, cross lapping machine to form and laminated fiber mesh material, utilize acupuncture to obtain nonwoven;
Operation (3): giving with respect to the superfine fibre quality after superfineization to this nonwoven is the macromolecular elastomer of 10～200 quality %;
Operation (4): at least simultaneously polishing processing; And
Operation (5): this islands-in-sea bicomponent fibre is carried out superfineization processing.
According to the preferred version of the manufacture method of abrasive cloth of the present invention, above-mentioned operation (2) utilize that acupuncture introduces can superfine fibre the radical of islands-in-sea bicomponent fibre be 3～4/1 hook.
According to the present invention, can obtain comparing with existing abrasive cloth the abrasive cloth that the size of surface fiber pile part on superfine fibre beam width direction that is formed by the superfine fibre bundle is little and have excellent flatness.Therefore, can obtain substrate surface to recording disk uses the slurry grinding of banded abrasive cloth and/or uses in the cleaning processing of slurry and can reduce cut and grind the high performance abrasive cloth of the surface roughness of object.
The aluminium alloy base plate that abrasive cloth of the present invention uses in to magneto-optic disk or glass substrate carry out attrition process with the yield rate of superhigh precision and/or clean to add being suitable for man-hour using.
Manufacturing method according to the invention can be made above-mentioned abrasive cloth effectively.
Description of drawings
Fig. 1 amplifies (40 times) photo for the SEM of the replacement accompanying drawing of an example on expression abrasive cloth of the present invention surface.
Fig. 2 is the ideograph of presuming method of introducing the radical of composite fibre when being used for explanation acupuncture for the relation of acupuncture hour hands and composite fibre.
The specific embodiment
Next, the embodiment of abrasive cloth of the present invention and manufacture method thereof described.
For above-mentioned problem, namely reduce the scratch defects of substrate surface and grind the problem of the surface roughness of object, in the surface fiber pile structure partly that the inventor etc. are conceived to be formed by the superfine fibre bundle on the abrasive cloth surface, the superfine fibre bundle consists of, superfine fibre is arranged in fact equably in the longitudinal direction and is conducted in-depth research along regular size and the surface smoothness of part on width of direction.Found that the lip-deep compactness of abrasive cloth and dispersiveness are conducive to high-precision slurry grinding and/or cleaning processing greatly.
Its result has verified by the nonwoven that will consist of abrasive cloth and has made following nonwoven, can solve at one stroke above-mentioned problem, as main body, the structure of the surface fiber pile part that the superfine fibre bundle by the abrasive cloth surface of described nonwoven forms is of a size of 50～180 μ m on the width that above-mentioned superfine fibre bundle consists of around the nonwoven that obtains in the superfine fibre wrapping that the superfine fibre gathering of described abrasive cloth take the average single fiber diameter as 0.05～2.0 μ m forms.
Consider that from fixed viewpoint of compactness, fibre strength and the abrasive particle of abrasive cloth surface fiber the average single fiber diameter of the superfine fibre that importantly uses among the present invention is 0.05～2.0 μ m.Be below the 2.0 μ m by making the average single fiber diameter, the surface roughness that can reduce to grind object.On the other hand, be more than the 0.05 μ m by making the average single fiber diameter, can keep fibre strength and rigidity, therefore can efficient grind well.
As the polymer that forms the superfine fibre that uses among the present invention, can enumerate such as polyester, polyamide, Polyolefin and polyphenylene sulfide (PPS) etc.Higher take polyester and polyamide as the fusing point major part of the polycondensation base polymer of representative, the excellent heat resistance of the heat that produces during to attrition process preferably uses above-mentioned polymer.As the concrete example of polyester, can enumerate PETG, polybutylene terephthalate (PBT) and PTT etc.In addition, as the concrete example of polyamide, can enumerate nylon 6, nylon 66 and nylon 12 etc.
In addition, can be in consisting of the polymer of superfine fibre other copolymer compositions of copolymerization, perhaps can also in these polymer, contain in addition the additives such as particle, fire retardant and antistatic additive.As other copolymer compositions, can enumerate such as 5-sodium sulfo isophthalate, 3-hydroxybutyrate, nylon 6, nylon 66 and nylon 12 etc.In addition, as particle, can enumerate for example titanium oxide.In addition, as fire retardant, can enumerate for example organic fire retardant and mineral-type fire retardant.As antistatic additive, can enumerate for example alcohols antistatic additive.
Be nonwoven as the Filament-wound Machine body that uses in the abrasive cloth of the present invention, the following staple fiber nonwoven fabric of preferred use, described staple fiber nonwoven fabric is to use carding machine and cross lapping machine, make short fiber form laminated fiber mesh material after, carry out acupuncture or the water spray perforation obtains.In addition, can suitably adopt the nonwoven fabric of long fibers that obtained by spun-bond process or meltblown etc., and by copying nonwoven that the paper method obtains etc.Wherein, staple fiber nonwoven fabric or spun-bonded non-woven fabrics can utilize acupuncture to process the scheme that obtains following superfine fibre bundle, therefore preferred the use.
For abrasive cloth of the present invention, must contain macromolecular elastomer as the nonwoven of above-mentioned Filament-wound Machine body.By in the Filament-wound Machine body, containing macromolecular elastomer, can utilize the adhesive effect of macromolecular elastomer to prevent that superfine fibre from dropping from abrasive cloth, can form uniform pile during fluffing.In addition, by in the nonwoven as the Filament-wound Machine body, containing macromolecular elastomer, can give resiliency to abrasive cloth, can further reduce the scratch defects by the substrate surface that grinds the grinding object that produces.
As the macromolecular elastomer that uses among the present invention, can use such as polyurethane, polyureas, polyurethane polyureas urea elastomers, polyacrylic acid, acrylonitrile butadiene elastomer and styrene butadiene elastomer etc.Wherein, preferably use the polyurethanes elastomers such as polyurethane and polyurethane polyureas urea elastomers.
The weight average molecular weight of the polymer diol composition of the polyurethane that uses as the main component of above-mentioned macromolecular elastomer is preferably 500～5000, more preferably is 1000～3000.By making weight average molecular weight be more than 500, more preferably more than 1000, can keep the intensity of abrasive cloth, and can prevent that superfine fibre from coming off.In addition, by make weight average molecular weight be below 5000, more preferably below 3000, the viscosity that can suppress polyurethane solutions increases, and is easy to carry out in the superfine fibre layer polyurethane impregnation.
In addition, be diol component as the raw material of above-mentioned polyurethane, preferably use PTMEG, polyester-diol, PCDL, polylactone glycol and their copolymer.
In addition, be the vulcabond composition as the raw material of polyurethane, can use aromatic diisocyanate, ester ring type isocyanates and aliphatic category isocyanates etc.In addition, in order to improve with the adaptability of grinding charge and to be conducive to suppress the resiliency of cut, consider that from the viewpoint of flexibility the ratio of the PTMEG composition in the preferred polymers glycol is more than the 60 quality %, more preferably is more than the 70 quality %.
The weight average molecular weight of the polyurethane that uses among the present invention is preferably 100,000～300, and 000, more preferably be 150,000～250,000.Be more than 100,000 by the weight average molecular weight that makes polyurethane, can keep the intensity of gained abrasive cloth, and can prevent that the superfine fibre on the pile face from coming off.In addition, be below 300,000 by the weight average molecular weight that makes polyurethane, the viscosity that can suppress polyurethane solutions increases, and is easy to carry out the impregnation in nonwoven.
In addition, consider that from the inhomogeneity viewpoint of the compactness that satisfies the lip-deep superfine fibre of abrasive cloth and distribution the gel point of polyurethane is preferably in the scope of 2.5～6.0ml.Gel point is more preferably in the scope of 3.0～5.0ml.
The gel point of so-called polyurethane, refer to stir the N that polyurethane concentration is 1 quality % on one side, N '-dimethyl formamide (following sometimes the abbreviation made DMF) solution 100g, splash into distilled water on one side in this solution, polyurethane solidifies the value of the water amount of splashing into when beginning to form the micro white muddiness under 25 ± 1 temperature conditions.Therefore, the DMF that uses in the mensuration of gel point must use the DMF of moisture below 0.03%.The assay method of above-mentioned gel point is put down in writing as prerequisite as transparent take polyurethane DMF solution, but polyurethane DMF solution is in the situation of micro white muddiness in advance, polyurethane can be solidified just begin, the water amount of splashing into during white casse degree initial change is as gel point.
In the situation of gel point less than 2.5ml, polyurethane is carried out wet type when solidifying, because setting rate is too fast, become large, coarse foaming so sometimes be present in the foaming of the polyurethane of nonwoven inner space.In addition, in the situation of gel point less than 2.5ml, it is bad to produce part foaming, when the result carries out grinding by following polishing processing to sheet surface, the pile length of the superfine fibre on the pile face produces irregular, perhaps the distribution in pile fiber produces deviation, sometimes can't obtain grinding the state that abrasive particle disperses equably on the pile face, can't realize the yield rate of superhigh precision.
On the other hand, when gel point surpasses 6.0ml, polyurethane is carried out wet type when solidifying, because setting rate is excessively slow, substantially do not confirm foaming so be present in the polyurethane of nonwoven inner space, the form with the very thick and hard polyurethane of thickness exists sometimes.Therefore, process by polishing sheet surface is carried out being difficult to carry out the grinding of polyurethane in the situation of grinding, the pile length of the superfine fibre on the pile face is very short, and fibre bundle to open fibre poor, the thick close irregular change of surface fiber radical density is large.Therefore, sometimes cause grinding the local aggegation of abrasive particle, relevant with the generation of scratch defects.
In addition, among the present invention, as macromolecular elastomer, preferably use polyurethane as main component, but in the scope of not destroying as the homogeneously dispersed state of the performance of adhesive and pile fiber, also can in macromolecular elastomer, contain other resins.As other resins, can enumerate such as elastomer resins such as polyesters, polyamide-based and TPOs; Acrylic resin and ethane-acetic acid ethyenyl ester resin etc.
In addition, macromolecular elastomer also can contain following various additive, fire retardants such as Phosphorus, halogen, mineral-type by trace; Phenols, sulphur class, the antioxidant such as Phosphorus; The ultra-violet absorbers such as benzotriazole, benzophenone, salicylic acid salt, cyanoacrylate, oxanilide class; The light stabilizer such as hindered amines and benzoate; The stabilizer against hydrolysis such as polycarbodiimide; Plasticizer, antistatic additive, surfactant and coagulation regulator etc.
In addition, form for the nonwoven inside of macromolecular elastomer, few from fibre shedding, as to make pile fiber directionality equably consistent viewpoint considers that preferred scheme is: the state of joint occurs in the filamentary at least a portion that is positioned at the fibre bundle most peripheral that is formed by superfine fibre.
Such scheme can obtain by following method (B).That is, because more than half part of polyvinyl alcohol protection superfine fibre bundle periphery is invaded the inside of the fibre bundle of superfine fibre so prevent polyurethane, polyurethane partly is bonded in the peripheral part of the fibre bundle that does not have the polyvinyl alcohol protection.
By the macromolecular elastomer bonding fiber that is positioned at superfine fibre bundle most peripheral that fetters partly, can suitably control the free degree of the pile superfine fibre on the pile face.The freely directionality of the pile fiber after as a result, polishing is processed becomes few.That is, pile fiber can be adjusted to along a state that direction is regular.Thus, pile fiber becomes equably along a state that direction is regular, is present in the thick close irregular little of superfine fibre on the pile face, can form the state that superfine fibre is arranged equably.As mentioned above, can form following structure: pile fiber is with fine and close and distribute along a regular state of direction equably, and is that fiber orientation is along a state that direction is regular.By forming said structure, the dispersiveness of abrasive particle in the time of can improving attrition process can make the lip-deep abrasive particle of abrasive cloth be evenly distributed, and therefore can extremely reduce scratch defects.
In the abrasive cloth of the present invention, except grinding precision, resiliency and adaptability are important.Above-mentioned resiliency and adaptability can be controlled, regulate according to ratio and the voidage (representing with apparent density) of superfine fibre and macromolecular elastomer.
In the abrasive cloth of the present invention, with respect to the gross mass of abrasive cloth, superfine fibre and macromolecular elastomer are preferably 50～100 quality %, more preferably are 80～100 quality %.With respect to the gross weight of abrasive cloth, superfine fibre is preferably 40～90 quality %, more preferably is 50～80 quality %.With respect to the gross mass of abrasive cloth, the containing ratio of macromolecular elastomer is preferably 10～50 quality %, more preferably is 10～40 quality %.Can suitably regulate by the content of macromolecular elastomer surface state, voidage, resiliency, hardness and the intensity etc. of abrasive cloth.When the containing ratio of macromolecular elastomer surpasses 50 quality %, processability and produce rate variance, and be difficult to obtain superfine fibre and be dispersed in the lip-deep pile face of tablet.The generation of the scratch defects in the time of therefore, sometimes can't suppressing the slurry grinding.On the other hand, the containing ratio of macromolecular elastomer is during less than 10 quality %, the intensity step-down of abrasive cloth, and abrasive cloth is easily deformable during the slurry grinding, is undesirable.In addition, also can in abrasive cloth of the present invention, contain the reinforcement materials such as fabric as the composition outside superfine fibre and the macromolecular elastomer.
In the abrasive cloth of the present invention, consider from the compactness of the superfine fibre on abrasive cloth surface and dispersed viewpoint that importantly at least one side of abrasive cloth is the pile face that is formed by superfine fibre.
Fig. 1 amplifies (40 times) photo for the SEM of the replacement accompanying drawing of an example of the structure of the surface fiber pile part of the superfine fibre bundle formation on expression abrasive cloth of the present invention surface.
As shown in Figure 1, the pile face of abrasive cloth is formed by following structure, and described structure contains the surface fiber pile part that is formed by the superfine fibre bundle.The surface fiber pile partly represents with the quadrangle of Fig. 1.Among the present invention, in the quadrangle shown in Figure 1, superfine fibre Shu Fangxiang (width of fibre bundle) is the horizontal of surface fiber pile structure partly, and the length direction that the superfine fibre of superfine fibre bundle is arranged is the length direction of the structure of surface fiber pile part.As the form of the structure of surface fiber pile part, superfine fibre can be arranged equably, and can slightly separate between the superfine fibre, perhaps can the part combination, and also can aggegation.
So-called combination herein refers to be produced by the reaction of chemistry or physics bonding etc., and so-called aggegation refers to be produced by power between the hydrogen bond equimolecular.
In the abrasive cloth of the present invention, the average-size of structure on superfine fibre beam width direction of surface fiber pile part is in the scope of 50～180 μ m, preferably in the scope of 50～120 μ m.The average-size of structure on superfine fibre beam width direction of surface fiber pile part is that 180 μ m are when following, the superfine fibre bundle of surface fiber pile part does not overlap each other, the concavo-convex of abrasive cloth surface diminishes, be difficult to give scratch defects to grinding charge when being used for attrition process, can reduce the surface roughness of grinding charge.In addition, the average-size of structure on superfine fibre beam width direction of surface fiber pile part is 50 μ m when above, and the quantitative change of superfine fibre that is present in the abrasive cloth surface is many, and surface coverage uprises, and is preferred scheme.
For abrasive cloth of the present invention, the average-size of structure on superfine fibre bundle length direction of surface fiber pile part is preferably 100 μ m～500 μ m.The length direction of superfine fibre bundle is the length direction of superfine fibre, is equivalent to rectangular length direction among Fig. 1.The structure average-size in the longitudinal direction of surface fiber pile part is that 500 μ m are when following, be difficult to overlap between the superfine fibre bundle, the concavo-convex of abrasive cloth surface diminishes, and is difficult to give scratch defects to grinding charge when being used for attrition process, can reduce the surface roughness that is polished cloth.In addition, the average-size on the length direction is 100 μ m when above, and the quantitative change of superfine fibre that is present in the surface is many, and surface coverage is high, is preferred scheme.
For abrasive cloth of the present invention, surface roughness is preferably 5～18 μ m.Surface roughness more preferably is 5～15 μ m, more preferably 5～8 μ m.Surface roughness is during greater than 5 μ m, and the retentivity of abrasive particle and dispersed viewpoint are considered during from the slurry grinding, for preferably.In addition, surface roughness is difficult to give scratch defects to grinding charge when being used for attrition process during less than 18 μ m, can reduce the surface roughness of grinding charge.
Abrasive cloth of the present invention is made band shape, implement slurry grinding and cleaning and add man-hour, if produce change in size, then can't grind equably substrate surface.Therefore, consider that from the viewpoint of the morphological stability of abrasive cloth the weight per unit area of abrasive cloth of the present invention is preferably 100～400g/m
2, weight per unit area more preferably is 150～300g/m
2
Then, the method for making abrasive cloth of the present invention is described.
Abrasive cloth of the present invention is by can preferably obtaining to the following operation of major general (1)～(5) combination.At this moment, in order to realize the surface fiber pile part of abrasive cloth of the present invention, importantly with following operation (2) utilize that acupuncture introduces can superfine fibre the radical of islands-in-sea bicomponent fibre be made as 3～6/1 hook.
Operation (1): making can turn to the islands-in-sea bicomponent fibre that the average single fiber fiber number is 0.05～2.0 μ m by superfine fibre;
Operation (2): use this islands-in-sea bicomponent fibre, utilize carding machine, the laminated net of cross lapping machine, utilize acupuncture to obtain nonwoven;
Operation (3): giving with respect to the superfine fibre quality after superfineization to this nonwoven is the macromolecular elastomer of 10～200 quality %;
Operation (4): at least simultaneously polishing processing; And
Operation (5): this islands-in-sea bicomponent fibre is carried out superfineization processing.
As obtaining the method for superfine fibre wrapping around the such Filament-wound Machine body of the nonwoven that forms, can use the superfine fibre generation fiber types such as islands-in-sea bicomponent fibre.It is difficult directly making the Filament-wound Machine body by superfine fibre, but make the Filament-wound Machine body by producing fiber type by superfine fibre, produce superfine fibre by the islands-in-sea bicomponent fibre in the above-mentioned Filament-wound Machine body, can obtain the superfine fibre wrapping around the Filament-wound Machine body that forms.
As composite fibre that can superfine fibre, can use following (a) and (b) etc., namely, (a) 2 kinds of composition thermoplastic resins that solvent solubility is different are as sea component and island component, use solvent etc. is removed the sea component dissolving, obtains thus the islands-in-sea bicomponent fibre of island component as superfine fibre; (b) be radial in the fibre section 2 kinds of composition thermoplastic resins or the multilayer shape is alternately arranged, each composition peeled off cut apart, obtain thus cutting the fine exfoliated composite fibre of superfine fibre that is.
Islands-in-sea bicomponent fibre comprises following fiber: use the compound islands-in-sea bicomponent fibre that carries out the spinning gained with nozzle, with sea component and 2 kinds of composition alternative arrangements of island component of fabric of island-in-sea type; 2 kinds of compositions of sea component and island component are mixed and the blend spinning fiber of spinning gained etc.Wherein, from the aspect of the superfine fibre that obtains even fiber number and the viewpoint that obtains the superfine fibre of abundant length and be conducive to the intensity of tablet consider, preferably use islands-in-sea bicomponent fibre.
As the sea component of islands-in-sea bicomponent fibre, can use copolyester that the copolymerization such as polyethylene, polypropylene, polystyrene, sodiosulfoisophthalic acid or polyethylene glycol are obtained, and PLA etc.
The dissolving of sea component is removed can be before giving elastomeric polymer, give after, fluffing after processing any moment and operation in carry out.
As the method that obtains the Filament-wound Machine bodies such as nonwoven, as mentioned above, can adopt and utilize method, spun-bond process, the meltblown that acupuncture or water spray perforation twine fiber mesh material and copy paper method etc.Wherein, except the scheme that adopts above-mentioned superfine fibre bundle, also preferably use the method through processing such as acupuncture or water spray perforation.
Consider that from the viewpoint of the pile face of the height windingization formation densification that utilizes fiber the perforation radical that acupuncture is processed is preferably 2000～8000/cm
2, more preferably be 3000～5000/cm
2The perforation radical is 2000/cm
2When above, the compactness of surface fiber is excellent, can obtain desired high-precision yield rate.In addition, the perforation radical is 8000/cm
2When following, can not cause processability to worsen, can not cause fibre damage and strength decreased yet.
Consider that from the densified viewpoint of surface fiber radical the fibre density of the nonwoven after the acupuncture is preferably 0.15～0.4g/cm
3, more preferably be 0.2～0.3g/cm
3
The average-size of structure on width of surface fiber pile part is necessary for 50～180 μ m, and its average-size is preferably 50～120 μ m.Therefore, importantly making the radical of the composite fibres such as superfine fibre generation fiber type of being introduced by 1 acupuncture is 3～6/1 hook, and this radical is preferably 3～4/1 hook.
Snag in hook can superfine fibre the radical of the composite fibres such as composite fibre determined by the shape of hook and the diameter of composite fibre.Herein, utilize Fig. 2 illustrate for snag in hook can superfine fibre the imagination of radical of composite fibre.
That is, set following isosceles triangle, described isosceles triangle will be formed at the angle (α among Fig. 2) of hook inside as drift angle, will be from hook inner (B Fig. 2) to hook front end (A among Fig. 2) as on one side.The filled composite fiber makes its arrangement densely from this isoceles triangle shape inside (hook is inner).For from isosceles triangle, overflow, arrange can superfine fibre composite fibre, will be in isosceles triangle the area ratio/occupancy ratio of composite fibre be more than 50% situation as introduce can superfine fibre composite fibre, their total radical is defined as the introducing radical.
Therefore, in the present application, in the operation of the manufacturing process of above-mentioned abrasive cloth (1)～(5), importantly the acupuncture operation of operation (2) operation (5) nonwoven is carried out the operation of superfineization processing before.
In addition, for the pin that uses in the acupuncture operation, preferably to use the hook number be 1～3, hook shape for (kick up) 0～50 μ m that kicks up, undercut corner be 0～40 °, the pin of hole depth (throat depth) 40～80 μ m, long (throat length) 0.5～1.0mm in hole.
For the nonwoven that contains elastomeric polymer that obtains as mentioned above, consider preferred following proposal from the densified viewpoint of surface fiber radical: by xeothermic or damp and hot or both make its contraction its, and then carry out densification.
In the abrasive cloth of the present invention, importantly above-mentioned superfine fibre wrapping is consisted of as main body around the nonwoven that forms.
In the abrasive cloth of the present invention, from considering with the aspect of the inhibition excellence of the cut on the adaptability of grinding charge and grinding charge surface, preferably before above-mentioned nonwoven is carried out the superfine fibre processing and/or after, give with the macromolecular elastomer of polyurethane as main component.Above-mentioned macromolecular elastomer has resiliency and the effect such as fibre morphology maintenance of or vibration concavo-convex for sorbent surface.That is, make it integrated by macromolecular elastomer being filled in the nonwoven inner space, with the adaptability of grinding charge and the inhibition excellence of grinding charge surface scratch.
As nonwoven being given the elastomeric adding methods of macromolecule such as above-mentioned polyurethane, can adopt and macromolecular elastomer be coated nonwoven or make method of its impregnation after coagulation etc.Wherein, consider from the processability aspect, after preferred use is impregnated in the high polymer elastic liquid solution in the nonwoven, carry out the method that wet type is solidified.
For example can enumerate following method (A): (A) utilize the dimethyl formamide equal solvent to make solution as the polyurethane of macromolecular elastomer, with above-mentioned polyurethane solutions be impregnated in can superfine fibre composite fibre twine in the nonwoven that obtains, after in water or aqueous solutions of organic solvent it being solidified, the dissolving of composite fibre that can superfine fibre is removed component of polymer and is removed with the dissolution with solvents of dissolve polyurethane not.Perhaps; can preferably use following method (B) etc.; (B) composite fibre that can superfine fibre being twined the nonwoven that obtains gives saponification degree and is preferably polyvinyl alcohol more than 80%; after the major part around the protection fiber; the dissolving of composite fibre that can superfine fibre is removed component of polymer and is removed with the dissolution with solvents of dissolve polyvinyl alcohol not; then with the polyurethane solutions impregnation, after in water or aqueous solutions of organic solvent, solidifying, remove polyvinyl alcohol.
The fluffing of the nonwoven surface that obtains as mentioned above can be preferably as follows and carry out in processing, that is, use sand paper or drum sander (roll sander) etc. to polish.Particularly by using sand paper, can form even and fine and close pile in nonwoven surface.
And then, in order with the yield rate take superhigh precision substrate surface to be implemented slurry grinding and cleaning processing and to be suppressed scratch defects as purpose, and improve uniformity that surperficial upper surface fiber distributes and compactness, extremely reduce the directionality of pile fiber, preferably further reduce the grinding load.Under the high state of grinding load, the pile fiber that forms the frizzle shape is many, and pile fiber is easy to form the deadlocked state of pencil that is.In order to reduce the grinding load, the preferred polishing sum of series sand paper number etc. of suitably regulating.Wherein, preferably polishing progression is that number number of sand paper of the multistage polishing more than 3 grades, middle uses at different levels is in No. 150～No. 600 scope of JIS regulation.
As the method for using abrasive cloth of the present invention to carry out aptly slurry grinding and cleaning processing, consider from the viewpoint of working (machining) efficiency and stability, preferably abrasive cloth is cut into the band shape of wide 30～50mm, use with band as slurry grinding and cleaning processing.Among the present invention, preferred method is carried out the method for slurry grinding and the cleaning processing of aluminium alloy disk or glass disk for using above-mentioned lapping tape and the slurry that contains free abrasive.
As grinding condition, slurry preferably uses the high rigidity abrasive particles such as diamond particle is scattered in the slurry that obtains in the water system decentralized medium.Wherein, consider from retentivity, dispersiveness and the inhibition scratch defects of abrasive particle and the viewpoint of reduction surface roughness, the scheme of abrasive particle that is suitable for consisting of the superfine fibre of abrasive cloth of the present invention is: be made of the single crystals diamond, 1 particle diameter is preferably 1～20nm, more preferably is 1～10nm.
That is, abrasive cloth of the present invention carries out attrition process or cleans to add being fit to man-hour use at the aluminium alloy basal disc or the glass basal disc that use in to magneto-optical disk with the yield rate of superhigh precision.
Embodiment
Then, according to embodiment abrasive cloth of the present invention and manufacture method thereof are described more specifically, but the present invention is not limited to these embodiment.In addition, the evaluation assessment and the appreciation condition thereof that use among the embodiment are as described below.
(1) fusing point of polymer
Use the DSC-7 processed of Perkinelmer company (Perkin Elmaer), in second takes turns, will represent the fusing point of the summit temperature of polymer melting as polymer.The programming rate of this moment is 16/ minute, and sample size is 10mg.
(2) melt flow rate (MFR) of polymer (MFR)
4～5g sample particle is dropped in the cylinder of MFR meter electric furnace, use the smart machine melt indexer processed of company (S101) of Japan, under the condition of load 2160gf, temperature 285, measure the amount of resin (g) of extruding in 10 minutes.Repeat same mensuration 3 times, with mean value as MFR.
(3) composite fibre is introduced radical during acupuncture
Fig. 2 is the ideograph that composite fibre is introduced the presuming method of radical when being used for explanation acupuncture for the relation of acupuncture hour hands and composite fibre.Utilize pin shown in Figure 2 and the ideograph of composite fibre, the presuming method of composite fibre introducing radical describes during to acupuncture.At first, BC obtains some D with the length equal length of hook front end (A among Fig. 2) and hook inner (B among Fig. 2) in Fig. 2.Then, with hook front-end A and the D of segment link Fig. 2, make the isosceles triangle BAD of BA=BD.In above-mentioned isosceles triangle, fill densely and arrange composite fibre.For the composite fibre that from isosceles triangle BAD, overflows arrangement, will be in isosceles triangle BAD the area ratio/occupancy ratio of composite fibre be situation more than 50% as the composite fibre of introducing, their total radical is defined as the introducing radical.
(4) fiber diameter and fibre diameter CV
Cross section that will cutting and grinding cloth obtains on thickness direction is as sightingpiston, utilizes SEM (SEM) to observe measuring under 5000 times of the multiplying powers, measures 50 single fiber diameters extracting out at random.Carry out said determination at 3 places, measure altogether 150 filamentary diameters, it as female group, is calculated its mean value and standard deviation value.This mean value as fiber diameter, divided by this mean value, is represented with the value that obtains this standard deviation value with percentage (%), with it as fibre diameter CV.
(5) physical dimension of surface fiber pile part is measured
As shown in Figure 1, as sightingpiston, utilize SEM to observe under 40 times of multiplying powers on the abrasive cloth surface, the superfine fibre that is present in the surface each other phase ground connection is arranged, and the superfine fibre bundle that forms thus is defined as the structure of surface fiber pile part.Extract at random the structure of 50 above-mentioned surface fiber pile parts out, measure the size of 50 surface fiber pile structures on width and length direction of extracting out, calculate their mean value.
(6) surface roughness measurement of abrasive cloth
Surface roughness measurement device SE-40C as the mensuration face, is used in the surface of abrasive cloth, blocking 2.5mm, evaluation length 12.5mm, estimating under the condition of speed 0.5m/s, carry out surface roughness measurement.Measure 3 times in the direction along fine hair, calculate mean value.
(7) utilize abrasive cloth to carry out attrition process
Abrasive cloth is made the band of wide 30mm.As grinding object, use glass substrate, described glass substrate is formed by the amorphous glass that with Roughness Surface on Control is the KMG company system below the 0.3nm.Surface at abrasive cloth splashed into slurry with 50ml/ minute, and described slurry is 0.01% slurry for the concentration of the single crystals diamond particles of 1 particle diameter 5nm being assembled the free abrasive that changes into average diameter 80nm.In addition, the band gait of march is 70mm/ minute, and the optical disk rotary number is 600rpm, and shaking is 100 beats/mins, and squeeze pressure is 1.5kgf, grinds 15 seconds.Above-mentioned attrition process is implemented on the two sides of each CD.
(8) the substrate surface roughness of grinding object
Use Veeco company's system " AFM NanoScope " (registration mark) IIIa, under the pattern of rapping, measure.Viewing area on the substrate is made as 10 μ m * 10 μ m, measures any 1 point on the substrate, with any 3 mean value as surface roughness (Ra).It is good that the substrate surface roughness is that situation below the 2.0nm is considered as nonferromagnetic substance.
(9) cut that grinds object is counted
With the two sides of 5 plate bases after the attrition process, namely amount to the overall area on 10 surfaces as determination object, use optical surface analysis meter (Candela6100), ditch more than the dark 2nm as cut, is measured cut and counted, utilize the mean value of the measured value on 10 surfaces to estimate.The lower performance that shows of numerical value is higher.Be that situation below 20 is good as nonferromagnetic substance with the cut number.
[embodiment 1]
(raw cotton)
(sea component and island component)
With fusing point be 220, MFR be 10.5 nylon 6 as island component, with fusing point be 53, MFR is 12, copolymerization the copolymerization polystyrene (co-PSt) of 22mol% 2-ethylhexyl acrylate as sea component.
(spin-drawing)
Use above-mentioned sea component and island component, use the fabric of island-in-sea type combining nozzle in 376 islands/hole, under the condition of spinning temperature 285, island/extra large quality ratio 40/60, spray volume 1.7g/ minute hole, spinning speed 1200m/ minute, the island composite fibre is carried out melt spinning.Then, be stretched to 3.0 times in the spinning of temperature 85 in the finish bath of liquid, use to be pressed into the type crimping machine and to give curlingly, cut, obtain fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 6.5dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Use the raw cotton of above-mentioned islands-in-sea bicomponent fibre, through comb and parallel cotton fibers prior to spinning and cross lapping operation, form laminated fiber mesh material.Then, use the needing machine of the pin implanted hole depth 60 μ m, the 0 μ m that kicks up, 4 ° of undercut corner, the long 0.9mm in hole, with pin degree of depth 8mm, 3200/cm of radical bores a hole
2The laminated fiber mesh material of gained is carried out acupuncture, making by weight per unit area is 800g/m
2, apparent density is 0.190g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.Utilizing the radical of the islands-in-sea bicomponent fibre of acupuncture introducing is 3/1 hook.
(abrasive cloth)
The above-mentioned nonwoven that is formed by islands-in-sea bicomponent fibre is carried out the hot water shrink process, then, be impregnated in it in aqueous solution of polyvinyl alcohol 12% and carry out drying.Afterwards, sea component co-PST is removed in dissolving in trichloro-ethylene, carries out drying, obtains the superfine fibre wrapping around the superfine fibre nonwoven that forms.
The nonwoven that obtains is as mentioned above given take solid state component with respect to the polyurethane (gel point 4.2ml) of fiber quality as 20 quality %, the polymer diol of described polyurethane is made of 75 quality % polyethers and 25 quality % polyesters, in the 30%DMF of liquid temperature 35 aqueous solution, polyurethane is solidified, remove DMF and polyvinyl alcohol with the hot water of temperature about 85.Afterwards, utilize half sanction machine with circulating belt cutter to carry out half sanction at thickness direction, use JIS#240 sand paper, non-half sanction face is carried out 3 grades of grindings, form pile, thereby make abrasive cloth.
For the gained abrasive cloth, the average single fiber diameter of superfine fibre is 0.72 μ m, and the CV value of fibre diameter is 7.0%, and thickness is 0.5mm, and weight per unit area is 180g/m
2, apparent density is 0.36g/cm
3Use the gained abrasive cloth, carry out the nonferromagnetic substance evaluation, substrate surface roughness, a cut number average satisfy as a result, and the uniformity on the surface after the grinding is also high.The results are shown in table 1.
[embodiment 2]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Use above-mentioned sea component and island component, use the fabric of island-in-sea type combining nozzle in 200 islands/hole, under the condition of spinning temperature 285, island/extra large quality ratio 40/60, spray volume 0.9g/ minute hole, spinning speed 1200m/ minute, islands-in-sea bicomponent fibre is carried out melt spinning.Then, be stretched to 3.0 times in the spinning of temperature 85 in the finish bath of liquid, use and be pressed into the type crimping machine, give curlingly, cut, obtain fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 5.2dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 1 by weight per unit area is 680g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the average single fiber diameter of superfine fibre is 1.53 μ m, and the CV value of fibre diameter is 5.8%, and thickness is 0.51mm, and weight per unit area is 186g/m
2, apparent density is 0.365g/cm
3The results are shown in table 1.
[embodiment 3]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 1.
(nonwoven that is formed by composite fibre that can superfine fibre)
Except the pin that uses hole depth 60 μ m, the 10 μ m that kick up, 27 ° of undercut corner, the long 0.8mm in hole, production unit's area weight is 800g/m similarly to Example 1
2, apparent density is 0.190g/cm
3Superfine fibre produce the fiber type nonwoven.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.
For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.72 μ m, and the CV value of fibre diameter is 7.0%, and thickness is 0.49mm, and weight per unit area is 175g/m
2, apparent density is 0.357g/cm
3The results are shown in table 1.
[embodiment 4]
(raw cotton)
The same composition of composition that uses among sea component and island component use and the embodiment 2.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 2.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 3 by weight per unit area is 680g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.
For the gained abrasive cloth, the fiber diameter of superfine fibre is 1.53 μ m, and the CV value of fibre diameter is 5.8%, and thickness is 0.5mm, and weight per unit area is 180g/m
2, apparent density is 0.360g/cm
3The results are shown in table 1.
[embodiment 5]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Use above-mentioned sea component and island component, use the fabric of island-in-sea type combining nozzle in 800 islands/hole, under the condition of spinning temperature 285, island/extra large quality ratio 30/70, spray volume 2.1g/ minute hole, spinning speed 1200m/ minute, islands-in-sea bicomponent fibre is carried out melt spinning.Then, give curlingly, cut, obtain fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 12.1dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 3 by weight per unit area is 680g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 3 abrasive cloth.
For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.50 μ m, and the CV value of fibre diameter is 7.7%, and thickness is 0.48mm, and weight per unit area is 175g/m
2, apparent density is 0.365g/cm
3The results are shown in table 1.
[embodiment 6]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Utilize so-called blend spinning method, the islands-in-sea bicomponent fibre that to arrange 1000 island components of having an appointment in sea component carries out melt spinning under spinning speed 1200m/ minute condition, described blend spinning method is mixed above-mentioned sea component and the island component of 50 % by weight, spinning temperature 285 times islands-in-sea bicomponent fibre is carried out melt spinning.Then, be stretched to 3.0 times in the spinning of temperature 85 in the finish bath of liquid, use and be pressed into the type crimping machine, give curlingly, cut, obtain fiber number and be that 11.6dtex, fiber are long is the raw cotton of 51mm islands-in-sea bicomponent fibre.
(nonwoven that is formed by composite fibre that can superfine fibre)
Except using JIS#320 sand paper, obtain similarly to Example 1 the nonwoven that is formed by islands-in-sea bicomponent fibre.
(abrasive cloth)
Make the above-mentioned nonwoven that is formed by islands-in-sea bicomponent fibre carry out hot water and shrink, then be impregnated in the aqueous solution of polyvinyl alcohol 12% and carry out drying.Above-mentioned nonwoven is given take solid state component with respect to the polyurethane of fiber quality as 20 quality %, the polymer diol of described polyurethane is made of 75 quality % polyethers and 25 quality % polyesters, in the 30%DMF of liquid temperature 35 aqueous solution, polyurethane is solidified, remove DMF with the hot water of temperature about 85.Afterwards, the co-PST of sea component is removed in dissolving in trichloro-ethylene, carries out drying, obtains the superfine fibre nonwoven that is formed by superfine fibre bundle and polyurethane.
Afterwards, gained superfine fibre nonwoven is carried out half sanction with half sanction machine with circulating belt cutter at thickness direction, use double sanction face of JIS#320 sand paper to carry out 3 grades of grindings, form pile, thereby make abrasive cloth.
For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.72 μ m, and the CV value of fibre diameter is 32.3%, and thickness is 0.55mm, and weight per unit area is 180g/m
2, apparent density is 0.327g/cm
3The results are shown in table 1.
[embodiment 7]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 5.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 5.
(nonwoven that is formed by composite fibre that can superfine fibre)
Obtain similarly to Example 3 the nonwoven that formed by islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 5 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.72 μ m, and the CV value of fibre diameter is 32.3%, and thickness is 0.5mm, and weight per unit area is 190g/m
2, apparent density is 0.380g/cm
3The results are shown in table 1.
[embodiment 8]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Except the fabric of island-in-sea type combining nozzle that uses several 600 islands, Shimane/hole, spray volume as 1.0g/ minute hole, obtain similarly to Example 1 the ultimate fibre fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 2.2dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Obtain similarly to Example 6 the nonwoven that formed by islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.35 μ m, and the CV value of fibre diameter is 6.2%, and thickness is 0.5mm, and weight per unit area is 177g/m
2, apparent density is 0.354g/cm
3The results are shown in table 1.
[embodiment 9]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Except the fabric of island-in-sea type combining nozzle, the island/extra large quality ratio that use 448 islands/hole are 50/50, spray volume is 2.0/ minute hole, obtain similarly to Example 1 fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 6.8dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 1 by weight per unit area is 680g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.Utilizing the radical of the islands-in-sea bicomponent fibre of acupuncture introducing is 3/1 hook.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.52 μ m, and the CV value of fibre diameter is 5.5%, and thickness is 0.5mm, and weight per unit area is 180g/m
2, apparent density is 0.36g/cm
3Use the gained abrasive cloth to carry out the nonferromagnetic substance evaluation, substrate surface roughness, a cut number average satisfy as a result, and the uniformity on the surface after the grinding is also high.The results are shown in table 1.
[embodiment 10]
(raw cotton)
(sea component and island component)
With fusing point be 260, MFR be 46.5 PETG as island component, with fusing point be 85, MFR is that 117 polystyrene is as sea component.
(spin-drawing)
Except the fabric of island-in-sea type combining nozzle, the island/extra large quality ratio that use 200 islands/hole are 50/50, spray volume is 1.0/ minute hole, obtain similarly to Example 1 fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 2.5dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 1 by weight per unit area is 650g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.Utilizing the radical of the islands-in-sea bicomponent fibre of acupuncture introducing is 4/1 hook.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.75 μ m, and the CV value of fibre diameter is 6.8%, and thickness is 0.5mm, and weight per unit area is 190g/m
2, apparent density is 0.38g/cm
3Use the gained abrasive cloth to carry out the nonferromagnetic substance evaluation, substrate surface roughness, a cut number average satisfy as a result, and the uniformity on the surface after the grinding is also high.The results are shown in table 1.
[embodiment 11]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 11.
(spin-drawing)
Except the fabric of island-in-sea type combining nozzle, the island/extra large quality ratio that use 200 islands/hole are 50/50, spray volume is 1.6/ minute hole, obtain similarly to Example 1 fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 4.1dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 1 by weight per unit area is 650g/m
2, apparent density is 0.224g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.Utilizing the radical of the islands-in-sea bicomponent fibre of acupuncture introducing is 3/1 hook.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.94 μ m, and the CV value of fibre diameter is 5.2%, and thickness is 0.5mm, and weight per unit area is 190g/m
2, apparent density is 0.38g/cm
3Use the gained abrasive cloth to carry out the nonferromagnetic substance evaluation, substrate surface roughness, a cut number average satisfy as a result, and the uniformity on the surface after the grinding is also high.The results are shown in table 1.
[comparative example 1]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 1.
(nonwoven that is formed by composite fibre that can superfine fibre)
Except the pin that uses hole depth 65 μ m, the 10 μ m that kick up, 35 ° of undercut corner, the long 0.9 μ m in hole, making similarly to Example 1 by weight per unit area is 870g/m
2, apparent density is 0.220g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.72 μ m, and the CV value of fibre diameter is 7.0%, and thickness is 0.51mm, and weight per unit area is 180g/m
2, apparent density is 0.360g/cm
3Use the gained abrasive cloth to carry out the nonferromagnetic substance evaluation, as a result the discontented foot of a substrate surface roughness and cut number average.The results are shown in table 2.
[comparative example 2]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 2.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 2.
(nonwoven that is formed by composite fibre that can superfine fibre)
Similarly obtain the nonwoven that formed by islands-in-sea bicomponent fibre with comparative example 1.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 1.53 μ m, and the CV value of fibre diameter is 5.8%, and thickness is 0.51mm, and weight per unit area is 180g/m
2, apparent density is 0.353g/cm
3The results are shown in table 2.
[comparative example 3]
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 1.
(spin-drawing)
Use above-mentioned sea component and island component, use the fabric of island-in-sea type combining nozzle in 36 islands/hole, be 285 at spinning temperature, island/extra large quality ratio is 50/50, spray volume is that 1.5g/ minute hole, spinning speed are to carry out melt spinning under 1000m/ minute the condition.Then, be stretched to 3.0 times in the spinning of temperature 85 in the finish bath of liquid, utilize to be pressed into the type crimping machine and to give curlingly, cut, obtain fiber number and be the raw cotton of the long islands-in-sea bicomponent fibre for 51mm of 3.8dtex, fiber.
(nonwoven that is formed by composite fibre that can superfine fibre)
Similarly obtain the nonwoven that formed by islands-in-sea bicomponent fibre with comparative example 1.
(abrasive cloth)
Obtain similarly to Example 6 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 3.73 μ m, and the CV value of fibre diameter is 6.9%, and thickness is 0.53mm, and weight per unit area is 184g/m
2, apparent density is 0.347g/cm
3The results are shown in table 2.
[comparative example 4]
(raw cotton)
(sea component and island component)
The same composition of composition that uses among sea component and island component use and the embodiment 5.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 5.
(nonwoven that is formed by composite fibre that can superfine fibre)
Except the pin that uses hole depth 40 μ m, the 0 μ m that kicks up, 2 ° of undercut corner, the long 0.8mm in hole, making similarly to Example 1 by weight per unit area is 660G/m
2, apparent density is 0.188g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.For the gained abrasive cloth, the fiber diameter of superfine fibre is 0.50 μ m, and the CV value of fibre diameter is 7.7%, and thickness is 0.52mm, and weight per unit area is 162g/m
2, apparent density is 0.311g/cm
3The results are shown in table 2.
[comparative example 5]
(raw cotton)
(sea component and island component)
The same composition of composition that uses in sea component and island component use and the comparative example 3.
(spin-drawing)
Spinning and stretching are carried out similarly to Example 3.
(nonwoven that is formed by composite fibre that can superfine fibre)
Making similarly to Example 1 by weight per unit area is 640g/m
2, apparent density is 0.196g/cm
3The nonwoven that forms of islands-in-sea bicomponent fibre.
(abrasive cloth)
Obtain similarly to Example 1 abrasive cloth.
For the gained abrasive cloth, the fiber diameter of superfine fibre is 3.73 μ m, and the CV value of fibre diameter is 6.8%, and thickness is 0.51mm, and weight per unit area is 192g/m
2, apparent density is 0.376g/cm
3The results are shown in table 2.
[table 2]
Symbol description
A: hook front end
B: hook is inner
C: the arbitrfary point before from B to the pin on the extreme direction (wherein, satisfying the point of BC＞BA)
D: be positioned at BC upper and with the point of BA equal length
Claims (6)
1. abrasive cloth, described abrasive cloth consists of as main body with nonwoven and macromolecular elastomer, described nonwoven is that the superfine fibre wrapping that forms of the superfine fibre that will be 0.05～2.0 μ m is around obtaining by the average single fiber diameter, it is characterized in that the average-size of surface fiber pile part on superfine fibre beam width direction that the described superfine fibre bundle of described nonwoven consists of is 50～180 μ m.
2. abrasive cloth as claimed in claim 1 is characterized in that, the average-size of surface fiber pile part on superfine fibre beam width direction is 50～120 μ m.
3. abrasive cloth as claimed in claim 1 or 2 is characterized in that, the surface roughness of abrasive cloth is 5～18 μ m.
4. such as each described abrasive cloth in the claim 1～3, it is characterized in that the CV value of superfine fibre is 1～30%.
5. the manufacture method of an abrasive cloth, the manufacture method of described abrasive cloth comprises the combination of following at least operation (1)～(5), it is characterized in that, with following operation (2) utilize that acupuncture introduces can superfine fibre the radical of islands-in-sea bicomponent fibre be made as 3～6/1 hook
Operation (1): making can turn to the islands-in-sea bicomponent fibre that the average single fiber fiber number is 0.05～2.0 μ m by superfine fibre;
Operation (2): use described islands-in-sea bicomponent fibre, utilize carding machine, the laminated net of cross lapping machine, utilize acupuncture to obtain nonwoven;
Operation (3): giving with respect to the superfine fibre quality after superfineization to described nonwoven is the macromolecular elastomer of 10～200 quality %;
Operation (4): at least simultaneously polishing processing; And
Operation (5): described islands-in-sea bicomponent fibre is carried out superfineization processing.
6. the manufacture method of abrasive cloth as claimed in claim 5 is characterized in that, utilizing the radical of the islands-in-sea bicomponent fibre of acupuncture introducing is 3～4/1 hook.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010194353 | 2010-08-31 | ||
| JP2010-194353 | 2010-08-31 | ||
| PCT/JP2011/068645 WO2012029547A1 (en) | 2010-08-31 | 2011-08-18 | Polishing cloth and method for producing same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103068523A true CN103068523A (en) | 2013-04-24 |
| CN103068523B CN103068523B (en) | 2016-08-03 |
Family
ID=45772651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180040935.7A Expired - Fee Related CN103068523B (en) | 2010-08-31 | 2011-08-18 | Abrasive cloth and manufacture method thereof |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20130157551A1 (en) |
| JP (1) | JP5780040B2 (en) |
| KR (1) | KR101865430B1 (en) |
| CN (1) | CN103068523B (en) |
| MY (1) | MY165869A (en) |
| SG (1) | SG187879A1 (en) |
| TW (1) | TWI575131B (en) |
| WO (1) | WO2012029547A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105829975A (en) * | 2013-12-27 | 2016-08-03 | 东丽株式会社 | Toner cleaning sheet and method for manufacturing same |
| CN110023034A (en) * | 2016-11-16 | 2019-07-16 | 帝人富瑞特株式会社 | Grinding pad and its manufacturing method |
| CN113226642A (en) * | 2018-12-27 | 2021-08-06 | 株式会社可乐丽 | Polishing pad |
| CN113473893A (en) * | 2019-02-28 | 2021-10-01 | 花王株式会社 | Cleaning member and method for manufacturing same |
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| JP6180873B2 (en) * | 2013-08-30 | 2017-08-16 | 株式会社クラレ | Fiber composite sheet, polishing pad and manufacturing method thereof |
| JP6398467B2 (en) * | 2014-08-27 | 2018-10-03 | 東レ株式会社 | Sheet |
| DE202014010385U1 (en) * | 2014-11-10 | 2015-06-17 | J.H. Ziegler Gmbh | Kaschierungstextilverbundmaterial |
| DE102014116356A1 (en) * | 2014-11-10 | 2016-05-12 | J.H. Ziegler Gmbh | Kaschierungstextilverbundmaterial |
| WO2016123505A1 (en) * | 2015-01-30 | 2016-08-04 | Applied Materials, Inc. | Multi-layered nano-fibrous cmp pads |
| JP2019084294A (en) * | 2017-11-10 | 2019-06-06 | 花王株式会社 | Wiping sheet |
| JP2022061310A (en) * | 2020-10-06 | 2022-04-18 | 旭化成株式会社 | Nonwoven fabric |
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- 2011-08-18 KR KR1020137003510A patent/KR101865430B1/en active IP Right Grant
- 2011-08-18 CN CN201180040935.7A patent/CN103068523B/en not_active Expired - Fee Related
- 2011-08-18 SG SG2013011788A patent/SG187879A1/en unknown
- 2011-08-18 WO PCT/JP2011/068645 patent/WO2012029547A1/en active Application Filing
- 2011-08-18 MY MYPI2013000666A patent/MY165869A/en unknown
- 2011-08-29 TW TW100130881A patent/TWI575131B/en not_active IP Right Cessation
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| CN113473893B (en) * | 2019-02-28 | 2022-10-28 | 花王株式会社 | Cleaning member and method for manufacturing same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2012071415A (en) | 2012-04-12 |
| SG187879A1 (en) | 2013-03-28 |
| KR101865430B1 (en) | 2018-07-13 |
| TWI575131B (en) | 2017-03-21 |
| WO2012029547A1 (en) | 2012-03-08 |
| US20130157551A1 (en) | 2013-06-20 |
| KR20130138720A (en) | 2013-12-19 |
| CN103068523B (en) | 2016-08-03 |
| TW201224237A (en) | 2012-06-16 |
| JP5780040B2 (en) | 2015-09-16 |
| MY165869A (en) | 2018-05-18 |
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