TW201224237A - Polishing cloth and method for producing the same - Google Patents

Abstract

This present invention aims to provide a high-performance polishing cloth having a densified surface state of uniform dispersion of microfiber bundles and excellent smoothness that the polishing cloth constituted by the micro fibers heretofore is unable to achieve. The polishing cloth of this invention is constituted by the non-woven fabric wound by microfiber bundles into which the microfibers with an average monofilament diameter of 0.05-2.0 μ m are tied up, and the polymer elastomer. The polishing cloth is characterized by an average size of 50-180 μ m in the width direction of the said microfiber bundles of the raised pile part of the surface fibers which are constituted by the said microfiber bundles of the said non-woven fabric.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultra-high-precision grind and/or cleaning for substrates such as substrates and glass substrates used for magnetic recording discs and the like. A polishing cloth suitable for use in processing and a manufacturer thereof [Prior Art] The magnetic δ-recorded disc has a high memory density in recent years, and smoothes to the surface of the disc. In recent years, recording methods for magnetic recording have become mainstream by arranging vertical recording media in the vertical direction with the easy magnetization axis in the magnetic film. Therefore, when the magnetic layer is formed on the front plate, there is unevenness or damage. When the magnetic film is formed, the axis tends to be inclined and becomes an abnormal portion. For the problem as described above, the surface of the disk before film formation is required to have a surface roughness of 基板.2 nm or less, and the surface of the substrate which is called a scratch defect is reduced. Further, in the formulation developed after the perpendicular recording medium, the requirements for the substrate before the magnetic layer is formed are also smoothed as described above to the limit. In the past, the use of a slurry of a polishing cloth and/or a cleaning process has been carried out to meet the high surface of the magnetic head. In order to achieve the surface roughness of the substrate of 〇2 nm or less, the damage of the surface of the substrate called the scratching defect is extremely small, and the polishing cloth which is required for this is expected. Conventionally, in order to reduce the surface roughness of the substrate, the fibers constituting the polishing nonwoven fabric are extremely refined, and in order to apply aluminum grinding to the surface of the substrate. It is required that the base magnetization magnetic force of the disc is set to be the grinding polarity. Record and will be able to damage the cloth

S 201224237

The damage is extremely small, and in order to have the paint & μ, L is %, the k case of the impregnated polymer elastomer constituting the abrasive cloth is proposed. For example, in a non-woven fabric composed of a very fine fiber in which a single fiber is directly cast into 〇·05~2.〇μΓΠ, a polishing cloth containing a molecular elastic body mainly composed of poly' 曱酉 "day" has been proposed (see ', (Patent Documents 1 and 2) 'In this proposal, the surface roughness of 〇2_ is achieved. [Prior Art Document] [Patent Document] [Patent Document 1] JP-A-2009-83-93 (Patent Document 2)曰本特开2〇〇9_2142〇5 Bulletin [Summary of the Invention] [Problems to be Solved by the Invention] In this paper, the smoothness required for the magnetic recording discs of the vertical recording method, that is, the 彳 彳; 13⁄4, Bu, ^%% of the v-inhibition system is more improved. In addition, in the § hai special knowledge of the technology of the Φ, # Μ catching tea, only the general leather made of non-woven fabrics are common - The condition of need 1 epunch is also required. That is, the optimum condition for the structure of the surface fiber velvet portion of the surface of the 矣 矣 要求 要求 及 及 及 、 及 准 准 矣 矣 矣 矣 矣 矣 矣 矣 矣 矣 矣 矣The setting of universal acupuncture conditions. The purpose of the above is to solve the problems of the above-mentioned prior art, and to provide a wind in the grinding process. Fortunately, the polishing cloth composed of ultrafine fibers is a small scratch and has a mildew effect. Abrasive cloth. High performance of the same precision grinding process. Other objects of the present invention are the method of grinding the cloth. ', " - The above-mentioned research is efficiently performed. 201224237 [Means for Solving the Problem] The present invention is to solve the above problems. The subject is a polishing cloth composed of a main body composed of a bundle of ultrafine fiber bundles having an average single fiber diameter of 〇〇5 to 2', and a non-woven fabric and a two-molecular elastomer. The average size of the surface in the extreme direction of the non-woven fabric of the surface composed of the fine fiber bundle is . The width of the ultrafine fiber bundle of the file is 1 8 〇μηι. Preferably, the fine fiber bundle of the woven portion of the present invention, the ultrafine fiber bundle of the velvet portion, and the average surface size of the surface fiber are 50 Å to 50° by the polishing cloth of the present invention. The table of the 5~18μηΐβ' river polishing cloth is preferably the CV値 by the polishing cloth of the present invention! ~3〇0/〇. Further, in the present invention, the method of the following steps (1) to (5) is carried out, and at least the combination thereof is carried by the needling of the following step (2). : The law 'its characteristics are: the number of island-type composite fibers < the main. < extremely fine fiberized sea μ, ° 芍 3~6 strips/丨 barbs: (1) The step of making island-type composite fibers with an average single fiber fineness of Q Q5. Producing extremely fine fibers (7) using the island Type composite fiber: Forming, layering a fiber web, sound hunting by curling, cross-rolling into a roll (3) Material 兮τ & A step of obtaining a non-woven fabric by acupuncture (for the non-woven fabric, the ancient p-machi, The step of imparting the extremely high mass 〇/〇 of the 1 〇~2 π elastomer relative to the extremely fine fiber, and the step of performing the α 仃 first treatment on one side;

S -6- .201224237 (5) The step of extremely fine-treating the island-in-the-sea composite fiber-and-paper. According to the preferred embodiment of the method for grinding the right and f cow clothes of the present invention, the number of available fine-fibrillated island-type fusible fibers from the acupuncture of the previous step (2) For 3~4 strips/丨 barbs. I啜 [Effects of the Invention] According to the present invention, it is possible to obtain a small ultrafine fiber type of the surface of the table which is composed of a very fine fiber bundle as compared with the known polishing cloth. The size of the direction, the Umbrella + and the abrasive cloth with excellent smoothness. Therefore, it is possible to obtain a kind of polishing on a surface of a substrate on which a recording sheet is used, and a slurry polishing using a belt-shaped polishing cloth and/or a cleaning process using water hydrazine can reduce and polish the object. High performance abrasive cloth with surface roughness. The polishing cloth of the present invention is suitable for use in polishing and/or performing a process of using a fruss alloy substrate or a glass substrate used for a magnetic disk with a high precision of Gula & When cleaning and processing. According to the manufacturing method of the present invention, the ancient grinding cloth is used to efficiently manufacture the above-mentioned polishing. [Embodiment] [Formation for Carrying Out the Invention] Next, the polishing cloth, the potting, the raw W woven fabric and the manufacturing thereof according to the present invention The method will be described with respect to the form for carrying out the invention. The present inventors have dealt with the above-mentioned ambiguity, t,, &, 沭砀, that is, the 缺点 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 减小 3 3 The surface of the fiber bundle constitutes the structure of the velvet portion of the fiber ' 着重 着重 着重 着重 着重 着重 着重 着重 着重 炻 炻 炻 炻 炻 炻 炻 炻 炻 炻 炻 炻 炻 炻 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚 诚Ministry of Public Officials # I knife's visibility direction size and

*7- S 201224237 Surface smoothness and careful study. The density 盥 dispersibility #, found that the surface of the abrasive cloth on the surface of the knife is the opposite of the precision of the surname - a considerable contribution. , ^ grinding and / or cleaning processing results, the study will form a non-woven fabric that will constitute a grinding uniform ^ ^ 呷 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 形成 〇 〇 〇 〇 〇 〇 〇 〇 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 〜 iR Η , 极 The extremely fine fibers of the 收 bundle are extremely fine and reduced. The 隹 bundles are intertwined with each other, and the ribs are not ar, the fine fiber is only the east % AM t, the cloth is the main body, and the fiber surface of the polishing cloth is the gentleman. In the width direction of the ultrafine fiber and the quasi-bundle of the structure of 〜4, 戎4, and the non-woven fabric of the skin V λ 为 50 to 180 μm, the above problem can be solved at one time. u From the aspect of the holding property of the surface fiber of the polishing cloth, the "", "cutting, quasi-strength and abrasive grains of the present invention are used for the average fiber count of the ultrafine fibers used in the granules." 5~2 〇um 73⁄4 tray to form Α20 ·〇μηι is extremely important. By setting the average single fiber diameter bath to 2.0 μm or less, the surface roughness of the a W latent object can be reduced. The average single-fiber difficult-to-use flower {+ from the flat/traditional layer is formed to be 0.05 μm or more, and the fiber strength and rigidity can be maintained, so that the efficiency can be polished from the thousand-seat. As a fine layer for forming the crucible used in the present invention The polymer of the fiber may, for example, be a polyglycol, a polyamine, a polystyrene, a polytetraphenyl sulfide (PPS), or a polyester or a polyamine. Most of the polymers of the ancient clothes are made of the melting point, which is excellent in the heat resistance of the heat generated by the grinding process. These are suitable for use. For example, polyethylene terephthalate or polybutylene terephthalate can be cited. 3, and polytrimethylene terephthalate, etc. Further, as a specific example of polyamine, nylon 6, nylon 66, nylon 12, etc. are mentioned. Moreover, the polymer system which comprises a very fine fiber is common. Polymerizing other copolymerized components, and may also contain particles, flame retardants, and the like in the polymers A ^ ^

-8 - S , 201224237 Additives such as antistatic agents. Examples of the other copolymerization component include, for example, sodium isophthalate sulfonate, 3-hydroxybutyric acid, nylon 6, nylon 66, and nylon. Examples of the particles include titanium oxide. Further, 乍 is a resist; the agent 'is exemplified by an organic flame retardant or an inorganic flame retardant. The antistatic agent' may, for example, be an alcohol-based antistatic agent. The non-woven fabric which is a fiber intertwined body used as the polishing cloth of the present invention is suitably used for performing acupuncture or water jet acupuncture after the use of the short fibers to form a laminated fiber web by crimping and cross-rolling. :ch) The obtained short fiber non-woven fabric. Further, a long fiber 2 cloth obtained by a punbond method or a melt blow method or the like, and a non-woven fabric obtained by a papermaking method can be suitably used. Among them, the short fiber, the cloth or the spunbonded nonwoven fabric can be obtained by needle punching to obtain the form of the ultrafine fiber bundle as described later, and is therefore suitable for use. The polishing cloth of the present invention must be used as described above: The can contains a polymeric elastomer. By entanglement of the fibers: the two-component elastomer prevents the falling of the polishing cloth by the bonding effect of the polymeric elastomer, and the uniform pile can be formed at the time of raising. = 2, the non-woven fabric as a fiber intertwined body contains a polymer: 1 body can impart cushioning properties to the polishing cloth, and the scratching disadvantage of the surface of the substrate to be polished by polishing can be further reduced. As the polymeric elastomer used in the present invention, it is possible to: :: polyurethane vinegar, poly gland, polyamine f vinegar _ polyglandelastic, polypropylene. : acrylonitrile-butadiene dilute elastomer and styrene-butadiene-elastomer elastomer, etc. Μ^-amine f acid s and polycarbamic acid brewing-poly-gland elastomer.

S 201224237 As the main component of the above-mentioned high eight 77 sub-elastic body, the hydrate of the polyurethane hydrate is used, and the weight average molecular weight of the known component is preferably 500 to 5000, preferably a horse 1〇0〇~ 3000. By setting the weight average molecular weight to 50,000 or more, and preferably more than 100%, the strength of the polishing cloth can be maintained, and the extremely fine loss, the wearing, and the quasi-detachment can be prevented. Further, by setting the weight average molecular weight to 5,000 or less, and "the preferred value is 300 Å or less, the viscosity of the polyurethane solution can be suppressed from increasing, and A Α can easily carry out the polyamine on the ultrafine fiber layer. In addition, as # π is a diol component of diol (tetra), preferably an alcohol and such a copolymer: ~ acid @θ - alcohol, poly s The polyisocyanate component of the raw material of the aromatic diterpene can be used as the isocyanate, etc. This is the buffer of the alicyclic isocyanate and the aliphatic group which helps to suppress the damage: The suitability of the object to be polished is preferably 60% by mass or more based on the softness of the polymer, and the ratio of the poly-A^^^-subcomponent in the polymer monool is 60% by mass or more. Preferably, it is 70% by mass or more. In the present invention, ^-00-0-00: ^ is made by filling the polyurethane with a weight of 150 ° ° ° ° 25 °, _. The amount of the knife of the abrasive cloth is 100,000, and the fine fiber is peeled off. In addition, it can prevent the α, πλ λλ from the surface of the pile from being affected by the amine. The average weight fraction of the acid ester is 3 〇〇, and the v 〇〇〇 〇〇〇 , , , , $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ $ 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚 聚It satisfies the compactness of the ultrafine fibers on the right side of the grinding machine and the point of view of the uniformity of the -10-201224237 cloth. The gelation point of the polyurethane is preferably 2.5 to 6. (The range of ^1. The melting point is more preferably in the range of 3. 〇 〇 5 〇 1111. The gel point of the polyamine phthalate refers to N, N, dimethyl | formazan which is stirred at a concentration of 1% by mass of the polyurethane. Sometimes it is abbreviated as dmf) solution ioog, while distilled water is dripped in the solution, and at a temperature of 25 ± 1. 〇, the polyurethane begins to solidify and the amount of water droplets is slightly turbid. Therefore, the gelation point For the DMF used in the measurement, it is necessary to use the water 〇·(4) or less. The method for measuring the shengning point is described before the transparent urethane carboxylic acid DMF solution is used, but if the polyamine A (tetra) DMF solution is slightly turbid in advance. When the polyurethane is solidified, the amount of water droplets when the degree of white turbidity is changed is regarded as a gelation point. The melting point is less than 2.5 ml. When the polyurethane is wet-solidified, since the solidification rate is too fast, the foaming of the polyamine phthalic acid vinegar existing in the inner space of the non-woven fabric becomes large and rough. In addition, if the gelation point is less than 2.5 ml, a part of the foaming failure may occur, and when the surface of the sheet is polished by the polishing treatment described later, the pile length of the ultrafine fibers on the pile surface may be scratched. Or the distribution of the velvet fibers is deviated, and the state in which the abrasive grains are uniformly dispersed in the velvet surface cannot be obtained, and there is a case where the finished product of ultra high precision cannot be realized. On the other hand, if the gelation point exceeds 6.0 ml, When the polyurethane is wet-solidified, 'because the solidification rate is too slow, almost no foaming is observed in the polyurethane present in the inner space of the nonwoven fabric, and there is a polyamine having a very thick and hard film thickness. The case of phthalate. Therefore, when the surface of the sheet subjected to the polishing treatment is polished, it is difficult to polish the polyurethane vinegar. The length of the fine fibers of the pile surface is very short, and

-11- S .201224237 The fiber bundle is large. Therefore, in the case of the disadvantages, the polyurethane resin and the other resin amines and the polyvinyl ester tree, for example, a salt such as a phosphorus-based phosphorus-based acid such as a cyanide-based acid, can be used. In view of the fact that the coarseness of the degree of the fiber's protection against the shape of the alcohol-protecting pole is extremely fine, there will be a problem of causing scratches and poor openness, and the number of surface fibers will cause local agglomeration of the abrasive grains. . · "π 千 分 elastomer, acid ester as the main component, to ^ 杈 马 使 至 , , , , , , , , , , 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可 亦可The resin may be exemplified by an elastomer such as a polyester or a polydecene olefin, an acrylic resin, an ethylene-acetate, etc. The molecular elastomer may also contain a trace amount of various additives. ▲Halogen, inorganic and other flame retardants; phenolic, sulfur, antioxidant, benzotriazole, benzophenone, salicylic acid 1^ vinegar, oxalic acid (Oxalic acid Anilide) external absorbent; hindered amine and benzoic light stabilizer; polycarbodiimide and other water-resistant antimony, antistatic agent, surfactant and coagulation regulator In the form of the inside of the non-woven fabric of the knives elastomer, the state in which the directionality of the velvet fibers is uniformly aligned is located in the state in which the outermost circumference of the fiber bundle composed of the ultrafine fibers is joined to each other. Good form. The state can be described later. The method of (B), that is, the majority of the outer circumference of the bundle of polyethylene fine fibers, thereby preventing the intrusion of the inside of the fiber bundle of the polyurethane fiber, and the adhesion of the outer portion of the polyvinyl alcohol-free, '隹朿" portion Polyurethane.

-12- S 201224237 The polymer elastic body is partially adhered to and restrains the fibers on the outer circumference of the ultrafine fiber bundle, thereby controlling the degree of freedom of the fine pile fibers and the crepe on the pile surface.钇果' The free orientation of the velvet fibers after polishing is extremely small. That is to say, the position of the velvet fiber can be aligned in a single direction. With this, it is possible to form a state in which the pile fibers are uniformly aligned in a single direction, and it is possible to form a state in which the density of the ultrafine fibers existing on the pile surface is small and the ultrafine fibers are uniformly arranged. As shown above, it is formed as a sinuous structure in which the velvet fibers are aligned in a dense and uniform orientation in a single direction. By forming the structure 4 which is not in the range of τ ^ , the dispersibility of the abrasive grains during the polishing process can be improved, and the abrasive grains on the surface of the polishing cloth can be divided into two, so that the scratch defects can be extremely reduced. In the polishing cloth of the present invention, the hardness and suitability are not critical in the grinding accuracy. The proportion or the rate of the slow-polymer elastomers, the rate = fineness can be adjusted by the ultrafine fibers, and the secondary work gap (known from the apparent density) is controlled in the grinding of the present invention. Compared with the polymer elastic system, the total mass of the abrasive cloth is ~1. The mass is /. The core of the core is "% is better" is preferably 80 4. ~ 9. Mass %, more likely to be relative to the abrasive cloth The oil-containing berry/return molecular elastomer preferably contains 10 to 50% by mass, preferably 10 to 40% by mass, preferably 10 to 40% by mass. The surface state of the polishing cloth can be appropriately adjusted, i. "One y π 丨糸 绫 , 绫 、 、 硬度 硬度 硬度 硬度 硬度 绫 绫 绫 及 及 : 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生 生Difficult to obtain very fine fibers

-13- S 201224237 : Loose velvet. Therefore, there is a disadvantage of scratching during processing. 70 King suppresses slurry polishing ‘,’ 9 is generated. On the other hand, when the content rate of the ancient one is less than that of the 旦 旦 円 right 円 molecular elastomer polishing process, the strength of the 研 研磨 'grinding cloth will become low, and the polishing deformation of the slurry of the present invention is less desirable. . In addition, in addition to the polymer elastomer: the material 4 is used as the reinforcing material to make the ultrafine fiber dense = = the fine fiber of the ultrafine fiber on the surface of the cloth 2 is composed of two fibers: I see at least one side of the polishing cloth. It is extremely important to have a suede from the extreme battle. Composition = 2: The ultrafine fiber bundle on the surface of the polishing cloth of the present invention is placed 2: The structure of the wide part - the picture of the example is a bundle::! As shown in Fig. 1, the woven surface of the polishing cloth is formed by a structure including a surface fiber velvet portion composed of ultrafine fibers. The surface fiber =, 戎 portion is represented by the square of the figure. In the present invention, in the fourth embodiment, the direction of the ultrafine fiber bundle (the width direction of the fiber bundle) is the transverse direction of the structure of the surface fiber velvet portion, and the length direction of the ultrafine fiber bundle of the ultrafine fiber bundle is The length T of the configuration of the surface fiber velvet portion. As a configuration of the structure of the surface fiber velvet portion, the ultrafine fibers can be aligned, and the ultrafine fibers can be slightly separated from each other, or partially bonded or agglomerated. - Here, the term "bonding" refers to a chemical reaction or a physical fusion, and the coacervation refers to an intermolecular force such as hydrogen bonding. In the polishing cloth of the present invention, the surface Construction of the fiber velvet portion

S -14 .201224237 The average width direction of the ultrafine fibers &# + w朿, preferably in the range of 5〇~5 in the range of 5〇~1, the width of the ultrafine fiber bundle is flat; The velvet part of the surface of the fiber velvet part of the ultrafine fiber only, the bundle:: 18 〇, below, the surface of the cloth is four convex small, in the research: skin this ... overlap, research, if A can be reduced Grinding. Surface roughness of the object. In addition, the average size: the structure of the velvet portion, the amount of fibers in the width direction of the ultrafine fiber bundles will increase by 5:2, which is present on the surface of the polishing cloth, and the surface shading rate becomes high, which is preferable. form. Fiber Φ: The fine structure of the surface of the polishing cloth of the polishing cloth is extremely fine: the average size in the longitudinal direction is preferably ΙΟΟμηι~500μΙη. The length direction of the poles is the length direction of the ultrafine fibers, in Fig. 1 1 field; the length direction of the rectangle. When the structure of the surface fiber fleece portion and the average length in the longitudinal direction are 5 Å or less, the ultrafine fiber bundles do not easily overlap each other, and the surface of the polishing cloth has a small unevenness, and when used for polishing, it is difficult to cause scratches on the object to be polished. , can reduce the surface roughness of the cloth to be polished. Further, when the average size in the longitudinal direction is ΙΟΟμηι or more, the amount of the ultrafine fibers present on the surface is increased, and the surface coverage is high, which is a preferred embodiment. The polishing cloth of the present invention preferably has a surface roughness of 5 to 18 μm. The surface roughness is preferably 5 to 15 μm, more preferably 5 to 8 μη. When the surface roughness is more than 5 μηη, it is preferable from the viewpoint of the abrasive grain retainability and the moon-return property at the time of slurry polishing. Further, when the surface roughness is less than 18 pm, it is less likely to cause scratching of the object to be polished during polishing, and the surface roughness of the object to be polished can be reduced. 2 -15- 201224237 The polishing cloth of the present invention is formed into a belt shape, and after performing slurry polishing and cleaning, the right size is changed, and the surface of the substrate cannot be uniformly polished. Therefore, in view of the form stability of the (4) rubbing cloth, the basis weight of the polishing cloth of the present invention is preferably 100 to 400 g/m2, and the basis weight is more preferably 15 〇 to 3 〇〇 g/m2. Next, a method of producing the polishing cloth of the present invention will be described. The polishing cloth of the present invention is obtained by at least combining the following steps (1) to (5). At this time, in order to achieve the surface fiber velvet portion of the polishing cloth of the present invention, the following step (2) is used. It is extremely important that the number of extremely fine-fibrillated island-in-the-sea composite fibers to be brought in by acupuncture is 3 to 6 barbs. (1) a step of producing an island-in-the-sea type composite fiber having an average single fiber fineness of θ 05 to 2 〇_, which is extremely finely fibrillated; (7) using the sea-island type composite fiber, by crimping and cross-rolling to laminate a fiber web by a step of obtaining a non-woven fabric by needle punching; 10 (3) a step of imparting a mass of 200% by mass of the polymer elastomer to the ultrafine fiber after the non-woven fabric; (4) a step of performing a polishing treatment on at least one side; (5) A step of subjecting the island-in-the-sea composite fiber to a pole-and-segment treatment. In order to obtain a non-woven fabric-like intertwined body in which the ultrafine fiber bundles are intertwined with each other, it is possible to use a microfiber-forming fiber such as a sea-island composite composite. Although it is not easy to make fibers from the ultrafine fibers, the fibers are entangled with each other. However, the fibers can be made of extremely fine fibers, and the fibers are intertwined. The fibers are intertwined with each other. Fibers, thereby obtaining extremely fine fibers. #成@ c -16- 201224237 For the ultrafine fiber conjugated fiber, it is possible to use: (a) a two-component thermoplastic resin having different solvent solubility as a sea component and an island component. Dissolving and removing, thereby forming island components into ultrafine-fiber island-in-sea type composite fibers; the thermoplastic resin of the component is alternately placed on the fiber. The cross section of the fiber is radial _ multilayered, and each component is peeled and divided, thereby cutting the fiber. In the island-in-the-sea composite fiber system, the island-in-the-sea composite fiber is a sea-island composite fiber in which a sea-island composite metal cover is used, and two components of a sea component and an island component are arranged to each other and spun; or A mixed-spun yarn or the like in which a sea component and a component of the island component are mixed and spun. :&Zhongyi from __', 兀 from the viewpoint of obtaining a fine fiber of uniform fineness, and obtaining a full length of the extreme έ ' ^ J eclipse, · Tian fiber also contribute to the strength of the sheet 1 Look, the more sturdy 庶 nt slave 1 soil is the use of island-type composite fiber. As a sea-breeding compound of the island-type composite fiber, it is possible to use polyethylene, polypropylene, polystyrene, acid, pq, Yin, k-n-dibenzoic acid or polyethylene glycol. Polymerized copolymerized polyester, polylactic acid, and the like. The dissolution and removal of the sea component may also be carried out at any timing and step after the kinetic treatment of the elastomeric polymer. In order to obtain a method in which fibers such as non-woven fabrics are mutually entangled, as described above, a method in which the webs are entangled by needle punching or water jet acupuncture, a spinning adhesive, a sleek, a sleek, a ^ ^ Pei spray and papermaking methods. In the form of the shape of the ultrafine fiber bundle as described above, the car is used by acupuncture or water jet acupuncture. The number of acupuncture needles treated by acupuncture is very a ^ The right needle is formed by the dense velvet surface formed by the twisting of the fibers by the fins, and the ΟΠΛΑ m J gauge point is 2000 to 8000.

-17 S • 201224237 /cm2 is better, preferably 3〇nn~/ 2 勹川00~5000/cm2. If the number of needle punches is more than /cm, the surface fibers are excellent in compactness, and a high-precision finished product can be obtained. Further, if the number of needle punches is noodle/e = , the deterioration of the processing is not caused, and there is no possibility that the fiber damage is lowered. Strength The fiber density of the non-woven fabric after acupuncture is densified by the number of 〇 ss Λ 4 / 3 . 3 〇.15~. The object 4 is preferably '. 2~ Surface fiber ligature v must be - two: flat? The structure of the needle is I:: the size is preferably π~12 - therefore, the number of the strip is 3~6 strips/丨: dimension generation type... composite fiber strip η inverted fishing. Inverted fishing is extremely important, and the number of the strips is preferably from 3 to 4, and the number of strips is extremely small. The number of strips depends on the shape of the barbs. The use of the fiber is determined by the diameter of the card, the second dimension: the dimension. Here, the idea of the number of dimensions/card to the barb of the extremely fine fiber composite fiber, that is, the imaginary to fall to the sentence ^1 φ ρ β 1 as the apex angle, the angle formed by the end of the q fishing ( The α) of the α) figure in Fig. 2 is - the end of Si: the tail (Β of Fig. 2) to the front end of the barb (the end of the second barb) will be complex; (4) The end of the equilateral triangle (by the equilateral triangle:::: finely packed and arranged for it. Regarding the composite fiber which is extremely finely fibrillated in the equilateral _ ,, the case is regarded as == the area occupied by the fiber The number of counts of (10) or more is defined as the strip: the fibrillated composite fiber 'the same

-18-S. 201224237 Therefore, in the invention of the present invention, in the manufacturing steps (1) to ()V of the polishing cloth, the needling step of the step (2) is to refine the non-woven fabric of the step (5). The steps before the process are extremely important. Preferably, the needle used in the needling step has a barb count of one. The three barb shapes are kick up 〇~5〇μηι, lower cut angle 〇 40 stitch depth 40~8〇μιη, and neck length (〇roat length) 〇 5~1〇_. The densifier of the number of fibers obtained as described above is shrunk, and the non-woven fabric which has been developed in the present invention is used as the surface of the polishing material of the present invention to impart the non-woven fabric to the surface of the polyurethane. The suitability of the molecular elastic system for the pulsibility or the retention of the fiber form to the molecular elastic material and the method for the above-mentioned polyamine method can be used for the solidification after impregnation. From the viewpoint of the fact that the solidified layer contains the elastic polymer, it is formed into a relatively fine cloth by the high-densification, and the fine electrode is excellent in the effect of suppressing the effect of the research. The polymer as a main component has a function of surface unevenness or holding. In other words, the body is integrated, and the damage of the surface of the abrasive is suppressed by the acid, and the polymer elastic method is used. It is also made of a non-woven fabric impregnated with a polymer bomb method of 0, which is made of dry or hot heat or its preferred form. The bundle of fine fibers is intertwined with each other. The suitability of the abrasive and the point of view is preferably 'previously and/or after, making it an elastomer. As shown above, the vibration absorbing is used for the internal space of the non-woven fabric, which makes it excellent for the effect of being polished. The role of the body on the non-woven fabric is applied to the non-woven fabric or the workability point of view, after the sexual solution, make -19-

S.201224237 For example, a composite fiber which is dissolved by a dimethyl decylamine or a fibrillated fiber, which is made of a phthalocyanine, etc., a liquid crepe, and a non-woven fabric which is entangled with each other. In the water or organic solvent aqueous solution, the dissolution of the ultrafine fiber conjugated fiber is removed and the solvent used for dissolving the polyamine phthalic acid is dissolved and removed. (B) The alkalinity of the extremely fine fiber conjugate fiber is given to each other. Preferably, the majority of the polyvinyl alcohol is more than 8% by weight, and then the polymer component which is extremely finely fiberized can be removed by dissolving the polyvinyl alcohol, followed by the solution of the impregnated polyamine phthalate. After solidifying in the solution, the surface of the non-woven fabric obtained by the above-mentioned polyvinyl alcohol is removed by polishing using sandpaper or roll sand, etc., and sandpaper can be suitably used to form a uniform surface on the non-woven fabric. The high-precision finished product improves the uniformity and compactness of the surface fiber distribution of the substrate grinding and cleaning process, and suppresses the scratch defects. The directionality of the velvet fiber is further reduced by the grinding load. In a high state, it is easy to form a large number of rolls, and the velvet fibers are bundled into a bundle. The number of polishing segments is preferably adjusted to three or more stages, and the number of polishing segments is preferably three or more. It is set to the range of 150 to 600 specified by JIS. The age of the polyamine phthalate used is (A). After the macropolyamide is impregnated, it can be solidified, and the component can be made into a non-method. Preferably, the non-woven fabric is wrapped in a solvent to dissolve the dehydrated solvent or the organic solvent water in the solvent. The domain treatment can be carried out, in particular, by dense weaving. 'It is better to make the surface extremely thin. It is necessary to reduce the grinding load in the grinding of the velvet-like vertical woven fiber, ° which is preferably the sandpaper number used.

-20- S 201224237 In the method of appropriately performing slurry polishing and cleaning using the polishing cloth of the present invention, the polishing cloth is cut into a belt having a width of 30 to 50 mm from the viewpoint of processing efficiency and stability. It is preferably used as a tape for charging and cleaning. In the present invention, the slurry polishing of the aluminum alloy magnetic recording disk or the glass magnetic recording disk and the method of the raw washing process are more suitable for the use of the abrasive tape and the slurry containing the free abrasive grains as shown above. Methods. In terms of polishing conditions, it is preferred to use a high-hardness abrasive grain such as diamond fine particles in a water-based dispersion medium. Straight, eight-T-study, the suppression of the dispersibility and the scratching of the scratches, and the reduction of the surface defects. The extremely fine-fiber abrasive grains suitable for constituting the polishing cloth of the present invention are composed of single-crystal diamonds. In the case where the i-th particle diameter is 丨~Μη, the best shape is 1~1 Onm. That is, the polishing cloth of the present invention is suitably used when the aluminum alloy substrate or the glass substrate used for magnetic use is polished by a highly precise finished product or subjected to a cleaning process. [Embodiment] Next, the present invention and its manufacturing method will be more specifically described by way of Examples, but the present invention is not limited thereto. In addition, the evaluation method used in the example and its evaluation conditions are as follows. The melting point of the polymer (1) polymer was determined by using Dsc_7 manufactured by Perkin Elmaer Co., Ltd., second run, to indicate the melting point of the polymer of the polymer. The rate of temperature rise at this time is ... minute peak is 10 mg. In the clothes

S -21- 201224237 (2) The melt flow rate (MFR) of the polymer is placed in the sleeve of the electric furnace with 4 to 5 g of the 4 pellets, and the melt indexer (S 1 〇 1) manufactured by Toyo Seiki Co., Ltd. is used. The amount (g) of the resin extruded at 丨〇 minute was measured under the conditions of a load of 2 1 60 gf and a fox degree of 28 5 C. The same measurement was repeated three times, and the average enthalpy was set to MFR. (3) Number of conjugated fibers in the case of needle punching Fig. 2 is a schematic view showing the relationship between the needle and the conjugate fiber at the time of needling, and a method for estimating the number of conjugated fibers at the time of needling. Using the pattern diagram of the needle and the composite fiber shown in Fig. 2, the estimation of the number of the composite fibers brought in the needle punching will be described. First, the front end of the barb is not shown in the second figure (Fig. 2) A) and the end of the barb (B of Figure 2): Point D of the same length. #着, Connect the front end of the barb of Figure 2 to the X-ray slave, and create an equilateral triangle B A D with BA = bD. In the Ma Rong, | & edged triangle, the composite fiber is finely filled and made J force: the composite fiber arranged by the equilateral triangle BAD is occupied by the area of the composite fiber in the BAD of the dim triangle The rate of 5〇% is defined as a wide strip of dimensions, and the totals are

(4) Average fiber diameter and fiber diameter CV: The cross section of the rubbing cloth after cutting in the thickness direction is used as the observation surface, and the second:: scorpion microscope (SEM) is used to measure the magnification of 500... This is the line: 0 single fiber diameter The measurement was carried out. In the three parts, '疋, for the total of 15 5 single fibers straight out, A is Dan-stained A m (four) straight into the staring measurement, and the average standard deviation* is calculated. The average 値 is set to be the fiber diameter CV by dividing the target 35K by the 値 率 rate (%) obtained by dividing the standard 帛 35K by the average 値.

22- S 201224237

(5) The surface size of the surface fiber Aogu A 4 °卩 is measured as shown in Fig. 1 40 ^ magnification 40 times _, 'the surface of the polishing cloth is used as the observation surface, and the SEM is arranged by the alignment ^, By the configuration of the ultrafine fibers existing on the surface. The random ultrafine fiber bundle is defined as a structure in which 50 filaments of the surface fiber are formed in the surface fiber velvet portion, and the width direction and the length direction of the extracted 5 矣 ^ ^ ^ 1 fiber velvet structure are measured. And calculate the average 値. (6) The surface roughness of the abrasive cloth is measured by grinding also Γ Λ Λ Λ , t, and the surface is the measuring surface, using the surface roughness measuring device SE-40C, cutting the cutting length by 2.5 mm, evaluating the length of 12.5 mm, and evaluating the speed. The surface roughness measurement was performed. The average enthalpy was calculated by measuring the piles three times in the direction of the weft. (7) A polishing cloth such as a polishing cloth is used to form a tape having a width of 30 mm. To grind the object. A glass substrate composed of amorphous glass made of KMG Co., Ltd. having a surface roughness of 3 Å or less was used. The primary particle diameter 5 nm single-junction 钻石a diamond particles were clustered into a concentration of free abrasive grains having an average diameter of 8 〇 nm. The slurry of 〇. 〇 1% was dropped onto the surface of the polishing cloth at 50 ml/min. Further, the tape winding speed was 70 mm/min. The number of rotations of the disk was 600 rpm, and the swing was set to 100 times/min. The pressing pressure was set to 15 kgf, and the polishing was performed for 15 seconds. This step is performed for both sides of each disc. (8) Surface roughness of the substrate to be polished The measurement was carried out by intermittent contact (t ap p i n g m 〇 d e) using "AFM NanoScope" (registered trademark) 111 a ' by Veeco Co., Ltd. The observation area on the substrate was set to 10 μm × 10 μm, and any one point on the substrate was measured. The average roughness of the substrate surface roughness of 201224237 was set to the surface roughness (Ra). The polishing performance is good for 2.Onm or less. (9) The number of scratches on the object to be polished is measured by using an optical surface analyzer (Candela 6100) on both sides of the five substrates after the polishing, that is, the entire surface of the surface of the 〇 〇, with a depth of 2 nm or more. The number of scratches was measured as a scratch, and the average enthalpy of the measurement of the surface of 10 was evaluated. The lower the number, the higher the performance. The number of scratches will be 2, and the polishing performance is good. T & @ [Example 1] (raw cotton) (sea component and island component) The melting point was 220. (:, nylon 6 having an MFR of 1 〇.5 as an island component, a copolymerized polystyrene (c〇_pSt) having a melting point of 53 ° C and a MFR of 12 2-ethylhexyl acrylate of 22 mol% copolymerization As a sea component. (Spinning/Extension) The knife uses the above-mentioned sea component and island component, and uses an island-type composite metal cover of 376 islands/hole, with a spinning temperature of 285t and an island/sea mass ratio of 4〇/6〇, spitting. The amount of 1.7 g / min • the hole, the spinning speed of 12 〇〇 m / min, the island composite fiber is melt-spun, and then extended to 3. G times in the oil bath for spinning at 85. , using a plug-type crimping machine. It is a raw cotton with an island-in-the-sea type fiber with a fineness of 6.5 dtex and a fiber length of 51 〇 1 claw. Non-woven fabric constituting) Raw cotton using the above-mentioned island-type composite fiber, via curling and crossover

S -24- .201224237 Rolling step to form a laminated web. Next, the obtained laminated fiber web was used to have a needle neck depth of 60 μm, an upper bend 〇μη, and a lower cut angle 4. The needle punching machine of the needle with a neck length of G.9 mm was needle-punched with a needle depth of 3200 pieces/cm2, and the basis weight was 8〇〇g/m2, and the apparent density was 0.190g/ Non-woven fabric composed of cm3 island-type composite fibers. The number of strips of the island-in-the-sea composite fiber by acupuncture is 3/1 inverted fishing rod. (Polishing cloth) The non-woven fabric composed of the sea-island type composite fiber was subjected to hot water shrinkage treatment, and then impregnated with a 12% aqueous solution of polyvinyl alcohol and dried. Then, in the diethylene glycol, the sea component c〇_psT is dissolved and removed to be dried, and the ultrafine fiber bundles are obtained by intertwining the extremely fine fibers: non-woven fabric. In the non-woven fabric obtained as described above, the polymer diol is a polyurethane condensate composed of a polyether-based 75% by mass and a polyester-based 5% by mass (gelatinization point: 4.2 ml), and the mass is imparted in a solid form relative to the fiber mass. %, the polyamine phthalate was solidified at a liquid temperature of °C in 30% DMF aqueous solution to about 85. 〇 (7) 5 degrees of hot water to remove DMF and polyvinyl alcohol. Thereafter, the half-cutting was performed in the thickness direction by a half-cutting machine having a band knife, and the non-semi-cut surface was subjected to three-stage grinding using a sandpaper of JIS #240 to form a pile fabric to prepare a polishing cloth. . The obtained ultrafine fibers in the obtained polishing cloth had an average single fiber diameter of 〇.72 μm, a fiber diameter of CV 7.0 of 7.0%, a thickness of 〇.5 mm, a basis weight of 180 g/m 2 and an apparent density of 36.36 g/cm 3 . The results of the evaluation of the polishing performance were carried out using the obtained polishing, and the surface roughness and the number of scratches of the substrate were satisfied. The surface after polishing was also uniform. : 2; shown in Table 1.

S -25- 201224237 [Example 2] (Original cotton) (Sea composition and island composition) Sea ingredients and Island considerations ## Same as. The use of the knife-making system and the user in the first embodiment are the cypress (spinning/extension) using the above-mentioned sea bream, the complex-all 芸, and the f-component 'is 200 islands/hole island type ° ^, 'square yarn temperature 285 ° C, island / sea mass ratio 40 / discharge amount 〇.9g / min · 〇 / 6 〇, ^ A hole, spinning speed 1200m / min of the island of the type of right fiber and & ', , will be k-spinning. Take the Bodhisattva and take it. Widely from the oil bath for spinning, the temperature of C in the TL stretches to 3.8 times, and the use of the criminal sister w to shrink, carry the cut treasure, & _ &" .彳', the raw cotton of the island-type composite fiber having a fineness of 5.2 dtex and fiber. ',,., length 5lmm (non-woven fabric composed of a composite which can be extremely fibrillated). "In the same manner as in palladium case 1, the density of the island with a density of 224.224g/cm3 was 68〇g/m. (Appearance (abrasive cloth)] Non-woven fabric composed of complex fibers. The grinding cloth was obtained in the same manner as in Example 1. The average single fiber diameter of the fine fibers was i kg: the polishing cloth order, the pole 5 〇〇 / ^ . μ The fiber diameter has a CV 5.8 of 5.8/〇, the twist is 〇, and the base is 〇; 3 Θ ^6g/m2 'appearance density is U.365g/cm. The results are shown in Table b. [Example 3] (Original cotton) (Sea component and island component) The sea component and the island component are used and the same. (7) /, the user in the example 1 is the phase

S -26-201224237 (spinning/extension) The spinning and the stretching were carried out in the same manner as in Example 1. (Non-woven fabric composed of fused fiber which can be extremely finely fiberized) - In addition to the needle with a neck depth of 60 μΓη, an upper bend of 1〇_, and a lower needle neck length of 0·8 mm, μ Example 1 was similarly made to have a weight of 800 g/m2, and the appearance of the dense a ^ ! on / 3 garment made a base fiber non-woven fabric. Extraction and quasi-generation type (abrasive cloth) A polishing cloth was obtained in the same manner as in Example 1. In the obtained polishing cloth, the total fiber diameter of the old έ ^ 旧 old fiber was, the CV 纤维 of the fiber diameter was 7.0%, the thickness was 〇49_: its 2: HW, and the apparent density was 357.357 g/cm3. The results were as follows: [Example 4] (Original cotton) The sea component and the island component were the same as the disk paste. In the yoke yoke 2, the user (spinning/extension) spinning and the stretching system were carried out in the same manner as in the second embodiment. (Non-woven fabric composed of conjugated fibers which can be extremely finely woven) A non-woven fabric composed of sea-island type composite fibers having a basis weight of 68 〇g/m 2 and an appearance degree of 〇224 g/cm 3 was produced in the same manner as in Example 3. . - (Polishing cloth) A polishing cloth was obtained in the same manner as in Example 1. In the obtained polishing cloth, the average fiber diameter of the ultrafine fibers was I·, the CV値 of the fiber diameter was 5.8%, the thickness Α, and 〇.5 mm, the basis weight was i8〇g/m2, and the apparent density was 0.360 g/cm3. . The results are shown in Table i. -27 - 5 • 201224237 [Example 5J (raw cotton) (sea component and island component) The sea component and the island component are used in the same manner as in the examples. Ma phase (spinning/extension) Using the above-mentioned sea component and island component, an island-type composite metal cover of 800 islands/hole is used, and the spinning temperature is 285 ° C, and the island/sea mass ratio is 3 〇 / 7 (). 2. The sea-island type composite fiber was melt-spun by the conditions of lg/min, hole, and spinning speed of 12 〇〇m/min. Subsequently, the liquid Luoling at a temperature of 85 ° C was extended to 3 times, and the crimp was subjected to crimping using a plug-in type crimping machine to obtain a raw cotton having a fineness of 12.ldtex and a fiber length of 51 mm. Island type (non-woven fabric composed of conjugate fiber which can be extremely fibrillated) In the same manner as in Example 3, an island-in-the-sea type compound woven fabric having a basis weight of 68 〇g/m 2 and an apparent density of 224.224 g/cm 3 was produced. The non-woven fabric. (Polishing cloth) A polishing cloth was obtained in the same manner as in Example 3. In the obtained polishing cloth, the average fiber diameter of the ultrafine fibers was 〇 5 ,, the CV 纤维 of the fiber diameter was 7.7%, the thickness was 〇 48 Å, and the basis weight was I75 g/m 2 '. The apparent density was 0.365 g/cm 3 . The knot & ° fruit is not shown in Table 1. [Example 6] (Original cotton) (Sea component and island component) The sea component and the island component were used in the same manner as in Example 1. -28 - s 201224237 (spinning/extension) Mixing the above sea ingredients with the island ingredients by 50 weights , /, ^ 0 ' by spinning the sea-island composite fiber at a spinning temperature of 2 8 5 C, V: / The so-called (5) combined spinning method 'will be arranged in the sea component with about 1 岛 island component η. This type of composite fiber has a spinning speed of 120 〇 m / min. . Then, in an oil bath for spinning at a temperature of 85 ° C, 卷', "double, and crimping was performed using a plug-in type crimper, and cutting was performed. The cut was extended to 3. i idtex, An island-in-the-sea composite fiber with a fiber length of 51 mm (non-woven fabric composed of a composite fiber which can be extremely finely fiberized) ', cotton. In addition to the sandpaper using JIS #32 No., the fish is obtained by the island-type composite fiber. The non-woven fabric is formed. Similarly (polishing cloth), after the non-woven fabric composed of the above-mentioned sea-island type composite fiber ^ ^ ^ , cut and quasi-shrinkage is shampooed, it contains a 12% aqueous solution of ethylene glycol; The diol is a polyamine f-acid which is composed of 质 系 质 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The solid content is imparted to the solid, and the aqueous solution of the hydrazine solution at a temperature of about 85 〇 is dissolved in the polyurethane condensate to remove the sea-forming = two-de-clear. After that, the chloroform bundle and the polyurethane are shy. τ, after drying, is extremely fine, and has a non-woven fabric of C fine fibers. The ultrafine fiber is not woven to the thick sound π In the semi-cutting machine of the knives, the obtained sandpaper is semi-cut in the 3^ direction, and the JIS#320 sizing cloth is used. The X-grinding is used to form the velvet, and the grinding cloth is obtained.

", the average fiber diameter of fine fiber is 0.72μιη -29- S 201224237,. The fiber 2 had a Cv value of 32 3% and a thickness of 〇 55 with 180 g/m, and the apparent soil weight was [Example 7] 4 degrees was 327.327 g/cm. The results are shown in the table (raw cotton) (sea component and island component). The sea and the island component are used in the same way as the user in the example 5 (spinning/extension).

The spinning disk Μ I was stretched in the same manner as in Example 5.

(Non-woven fabric composed of a composite fiber having extremely fine fibers & A - m and bismuth) A sea-island composite nonwoven fabric was obtained in the same manner as in Example 3. A regrind (grinding cloth) was obtained. The polishing cloth was obtained in the same manner as in Example 5. The pulverized right 6 fine fiber of the household...the average fiber diameter is a fiber straight: = letter; 32.3%, the thickness is 〇.5mm, the basis weight is 19 2, 〇, 3 outer < initial, degree is 〇 380g / Cm3. The results are shown in Table 1. 1 [Example 8] (Original cotton) (Sea component and island component) The sea component and the island component were used in the same manner as in Example 1. ", and the phase (spinning/extension) is the same as in the first embodiment except that the island-in-the-sea composite metal seedling having an island number of 600 islands/hole is used as the discharge amount of 1.0 g /min·hole.

S -30- 201224237 Raw cotton with a single fiber fineness of 2 q z ‘ 2dteX and a fiber length of ς , , , ^. Horse 51mm& island-type composite fiber (non-woven fabric composed of extremely fine fibers - and hard/fiber of the second embodiment) is not woven. In the same manner as in the first embodiment, the average fiber diameter of the ground fine fibers was obtained in the same manner as in the first embodiment. · 35_, fiber straight: the thickness of the 'pole' in the abrasive cloth is 〇.5, and the basis weight is 177g/mbu = CV値 is 6.2%. The results are shown in the table]. The degree of visibility is 0.354 g/cm3 [Example 9] (Original cotton) (Sea component and island component) The sea component and the island component are used in the same manner. Only the user in Example 1 is the phase (spinning/extension). In addition to the 4,8 islands/hole of sea soap, the same island type composite metal cover is formed to form an island/sea mass ratio of 50/50. , the amount of spit 2 〇 / 八 & 成 成 horse ft / . In addition to the knife, the hole in the case, #食例1, the same fineness is 6 8d net..., the sentence, - human L x, fiber length 51mm Raw cotton of island-type composite fiber. "Clam meat (non-woven fabric composed of a composite fiber which can be extremely fibrillated and made of ruthenium). In the same manner as in the first embodiment, the bamboo φ 丄宓 sound 3. ^, the basis weight is 680 g/m2, the appearance mountain An island-in-the-sea type with a degree of 0.224 g/cm is woven into a non-woven fabric composed of a sea-island composite composite. approximately. The number of the strips was '3' / 1 pours - 31 - .201224237 (abrasive cloth) A polishing cloth was obtained in the same manner as in the first embodiment. In the obtained polishing cloth, the average fiber diameter of the ultrafine fibers was G.52_, the cv値 of the fiber diameter was 5.5%, the thickness of 3 degrees was 0.5 mm, the basis weight was 18 〇2, and the apparent density was 0.36 g/cm. As a result of evaluating the polishing performance using the obtained polishing cloth', the surface roughness and the number of scratches of the substrate were all satisfied, and the surface after polishing was also high in uniformity. The results are shown in Table 1. [Example 10] (raw cotton) (sea component and island component) A polyethylene terephthalate having a melting point of 26 (TC and MFR of 46.5 was used as an island component, and the melting point was 85. (:, MFR was 1 17) The polystyrene is used as a sea component. (Spinning/extension) An island-type composite metal cover that is formed into an island/system and implements mm in addition to a 200 island/hole, sea mass ratio 50/50, discharge amount 1.〇/ In the same manner as in the first embodiment, the raw cotton having a fineness of 2.5 dtex and a fiber length of 5 1 type composite fiber was obtained in the same manner as in Example 1. (Non-woven fabric composed of a microfiber-formable composite fiber) was produced in the same manner as in Example 1. A non-woven fabric composed of sea-island type composite fibers having a basis weight of 65 〇g/m 2 and an apparent density of 224 224 g/cm 3 . The number of strips of the island-in-the-sea type composite fibers by needle punching is four "barbs". (grinding cloth), very 6.8%

S A polishing cloth was obtained in the same manner as in Example 1. The average fiber diameter of the fine fibers in the obtained abrasive cloth was 〇.75 μιη', and the CV 纤维 of the fiber diameter was -32-. 201224237' thickness was 0.5 mm' basis weight was 190 g/m2, and the apparent density was 〇38 g/cm3. Using the obtained polishing cloth, the results of the evaluation of the polishing performance were carried out, and the surface roughness and the number of scratches of the substrate were all satisfied, and the surface after the polishing was uniform. The results are shown in Table 1 β [Example 1 1 ] (raw cotton) (sea component and island component) The sea component and the island component were used in the same manner as in the examples. (Spinning/Extension) In addition to the island-type composite metal cover with a 200 island/hole, the sea mass ratio is 50/50, and the discharge volume is 66/min. Similarly, a raw cotton having a fineness of 4.ldtex and a fiber length of 51 Å; (Non-woven fabric composed of conjugated fibers which can be extremely finely woven) A non-woven fabric composed of sea-island type composite fibers having a basis weight of 65 〇g/m 2 and an apparent density of 0.224 g/cm 3 was produced in the same manner as in Example 1. The number of strips of the island-in-the-sea composite fiber by acupuncture is 3 pieces/fishing. (Polishing cloth) A polishing cloth was obtained in the same manner as in Example 1. In the obtained polishing cloth, the average fiber diameter of the ultrafine fibers was 0 to 94 μm, and the cv値 of the fiber diameter was 5.2%. The thickness was 〇.5 mm and the basis weight was i90 g/ M2, the apparent density is 38.38g/cm3. The obtained polishing cloth was used to carry out the polishing performance; as a result, the surface roughness of the substrate was satisfied by the number of scratches, and the surface after polishing was also uniform. The results are shown in the table].

S -33- 201224237 Example 11 寸 inch · m Ο (Ν to 122.7 352.4 r- (Ν ψ * CO 实施 Example 10 (Ν JO JO ο oo 120.5 322.5 5 〇 OO Example 9 〇〇ο uS 113.2 388.4 rH CN r—^ o ^T) Example 8 in vd Ό to m ο (Ν j 1 172.3 卜(N 〇\ a\ uS r 1 H Example 7 τ—Η CN Ο Ο 〇〇m 132.4 304.9 r- ( N OO o tH Example 6 1 < m ο ο 〇 6 m inch cK OO <N vd t> o Example 5 τ· Η CN ο Η 451.3 oo yn o α\ Example 4 (Ν ιη <〇 m ΪΤ) oo 138.5 Γ 520.5 1_ in ι—HO) om Example 3 νο CN 〇Ο 147.4 [ I 1 304.4 ι_ rn oo CN ι1 1 Example 2 (Ν inch uo rH οο 116.8 394.1 rn O) oo\ Implementation Example 1 ^6 ro o ρ 114.0 393.2 rn Inch r- i 'o Ό Composite denier (dtex) Number of strips (strips) Average fiber diameter (μιη) Fiber diameter CV (%) Shaving $ ^ Attack: 1 ® Ul^ Surface Thickness (μιη) Substrate Surface Roughness_(A)_ Number of Scraps (1) 1 i Evaluation of Performance of Wool Grinding Abrasive Cloth. 201224237 [Comparative Example 1] (Original Cotton) (Sea Composition and Island Ingredients) sea ingredients The same applies to the island component. Only the user in Example 1 is a phase (spinning/extension), and the spinning and extension are carried out in the same manner as in Example 1. The composite fiber which is extremely finely fiberized is composed of Non-woven fabric: In the same manner as in the first embodiment, a needle depth of 65 coffee, a top f ι〇_, a lower cut (four), and a base of a needle of 9 μm were used to produce: r:/m2: appearance A non-woven fabric composed of a sea-island type composite fiber dermis having a density of 22.22 〇g/cm3. π (abrasive cloth), a polishing cloth was obtained in the same manner as in Example 1. In the obtained polishing cloth

The average fiber of the ultrafine fiber is T ^ 7 7 哉, the standard diameter is 〇.7 2μιη, the diameter of the fiber (^値A / · υ %, thick sound 。 。. Use two mm, basis weight 180g / m2 'appearance density The surface of the plate was 0.360 g/cm3; the grinding cloth was subjected to the evaluation of the grinding performance, and the surface roughness and the surface roughness were shown in Table 2. No number was satisfied. The results are shown in [Comparative Example 2] ( Raw cotton) (sea component and island component) Sea component dish, the same person. The knife system is used as the user in the second embodiment.

S-35-201224237 (spinning/extension) The spinning and the stretching were carried out in the same manner as in Example 2 (a cloth made of a microfiber-formable composite fiber) was obtained in the same manner as in Comparative Example 1. The type of Fu's Ge 1 fiber constitutes a non-woven fabric. (Grinding cloth) In the obtained polishing cloth, the CV 纤维 of the fiber diameter was an apparent density of 0.353 g/cm 3 . The average fiber diameter of the polishing cloth β fine fiber obtained in the same manner as in Example 1 was 1.5 3 μm, 5.8%, and thickness 〇. 51mm, basis weight 180g/m2, . The results are shown in Table 2. [Comparative Example 3] (Sea component and island component) The sea component and the island component were used in the same manner as in the examples. (spinning/extension)

Using the sea component/island component described above, 36 36 island/hole galvanized metal cover, spinning temperature 285t: island/sea mass ratio 5〇/5〇, discharge volume 1.5g/min • hole, spinning speed 1〇〇〇m/min to smash the yarn. Then, it was extended to 3.0 times in an oil bath for spinning at a temperature of 85 t, and was crimped by a plug-in type crimper to perform cutting, and an island having a fiber length of 3.8 dtex and a fiber length of 51 _ The original S of the conjugate fiber (non-woven fabric composed of the conjugate fiber which can be extremely fibrillated) was obtained in the same manner as in Comparative Example 1, except that the sea-island type conjugate fiber was not woven. Item -36 - 1 201224237 (abrasive cloth) a Example 6 obtained the same abrasive cloth. In the obtained abrasive cloth, the average secret of the ultrafine fiber is up to 1 sentence. The quasi-仏 is 3.7 3 μηι, the CV値 of the fiber diameter is 〇.53mm 'the basis weight is i84g/m2, and the apparent density is 0.347g/ Cm3. The results are shown in Table 2. [Comparative Example 4] (Original cotton) (Sea component and island component) The seawater/knife and island component system was the same as that used in Example 5. (Spinning/extension) Spinning and extension Example 5 was carried out in the same manner. (Non-woven fabric composed of conjugate fiber which can be extremely finely fiberized) except for a needle having a neck-and-neck depth of 4 〇 μηι, an upper bend 〇 μπι, a lower cut angle of 2, and a needle neck length of 0.8 mm. In the same manner as in Example 不, a non-woven fabric composed of sea-island type composite fibers having a basis weight of 660 G/m and an apparent density of 11.88 g/cm3 was produced. (Polishing cloth) A polishing cloth was obtained in the same manner as in Example 1 except for κ. In the polishing cloth, the average fiber diameter of the ultrafine fibers is 〇5〇μιη, the cv値 of the fiber diameter is 7.7°/〇, the thickness is 0.52 mm, the basis weight is wag/m2, and the apparent density is 〇.3 11g/cm3. The results are shown in Table 2. [Comparative Example 5] (raw cotton) (sea composition and island composition)

S -37- 201224237 The sea component and the island component are used in the same way. The phase (spinning/extension) spinning and stretching of the user in Comparative Example 3 was carried out in the same manner as in Example 3. (Non-woven fabric composed of conjugated fiber which can be extremely fibrillated) In the same manner as in Example 1, a non-woven fabric composed of sea-island type composite fibers having a basis weight of 64 〇 g/m 2 and an apparent density of 1 1 96 g/cm 3 was produced. . (Polishing cloth) - A polishing cloth was obtained in the same manner as in Example 1. In the obtained polishing cloth, the average fiber diameter of the ultrafine fibers was 3.73 μΠ1, the CV値 of the fiber diameter was 6.8%, the thickness was 0.51 mm, the basis weight was 192 g/m, and the apparent density was 376.376 g/cm 3 . The results are shown in Table 2. [Table 2] _

--~~Comparative Example 1 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Felt (dtex) 6.5 5.2 3.8 12.1 3.8 Number of strips (bar, 8 9 11 2 5 average fine fiber average b (μπι) 0.72 1.53 3.73 0.50 3.73 (%) 7.0 5.8 6.9 7.7 6.8 Abrasive cloth surface velvet structure Width dimension (μπι) 189.0 192.0 225.3 47.6 169.5 Surface fiber velvet structure Length direction dimension (μπι) 311.8 396.4 89.4 320.0 545.3 Surface rough seam ( Ππι) 16.2 17.7 20.4 15.4 17.2 Performance evaluation Thickness of substrate surface ~ (Α) 2.3 2.1 3.3 3.1 2.4 Scratching (32) The surface of one example of the surface of the polishing cloth of the present invention is magnified by a SEM (40 times) photograph. The second figure relates to the relationship between the needle and the composite fiber during needle punching, and is used to illustrate the number of the composite fibers brought in the needle punching. Schematic diagram of the estimation method [Description of main component symbols] A Front end of barb B Any point from the end of the barb to the front end of the needle (where the point of BC > BA is satisfied) D is located on BC, which is the same as BA Point of the

Claims (1)

201224237 VII. Patent application scope: L-type abrasive cloths are made by intertwining extremely fine fiber bundles composed of average single-fiber ultrafine fibers: 1~ one southern molecular elastic body is the main body of grinding + f non-woven fabric and The surface fiber % constituting the ultrafine fiber bundle of the non-woven fabric is: a polishing cloth of the width of the ultrafine fiber bundle in the width direction of the virgin fiber bundle, as in the patent application scope, 8 〇. Average & fiber velvet portion in the width direction of the minute ultrafine fiber bundles. 3. Grinding cloth according to item i or item 2 of the patent application:: &" The surface roughness is 5~18 μηι. ', Table 4 of the abrasive cloth. The CV 细 of the fine fibers of the first to third patents is the 〇3〇%: - the abrasive cloth, the pole 5. The manufacturing method of the abrasive cloth, the system (5 The manufacturing method of the abrasive cloth; the following steps (1) to (7) of the needle-punched microfibers that can be carried in the second step = the barbed type of the following steps: 1) a step of using an island-in-the-sea composite fiber having an average single fiber fineness of 〜5 to 2; _ as a very fine fiber (2) using the sea-island type composite fiber, a fiber web, which is obtained by acupuncture Two crosses are rolled into layers (3) For the non-woven fabric, the polymer elastomer/骡, fiber 詈 is planted; Λ 对 对 对 对 对 极 极 极 极 极 极 极 极 极 极 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 10 5 steps of grinding cloth. a strip of island-in-the-sea composite fibers that is carried by a thorn; a method in which a needle is used, and the number is 3 to 4 pieces/1. 40- 1