JP5769877B2 - ダイヤモンドセンサ、検出器及び量子装置 - Google Patents
ダイヤモンドセンサ、検出器及び量子装置 Download PDFInfo
- Publication number
- JP5769877B2 JP5769877B2 JP2014509687A JP2014509687A JP5769877B2 JP 5769877 B2 JP5769877 B2 JP 5769877B2 JP 2014509687 A JP2014509687 A JP 2014509687A JP 2014509687 A JP2014509687 A JP 2014509687A JP 5769877 B2 JP5769877 B2 JP 5769877B2
- Authority
- JP
- Japan
- Prior art keywords
- less
- single crystal
- diamond material
- defects
- cvd diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/25—Diamond
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
- C30B25/105—Heating of the reaction chamber or the substrate by irradiation or electric discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161484550P | 2011-05-10 | 2011-05-10 | |
| US61/484,550 | 2011-05-10 | ||
| GB1107730.2 | 2011-05-10 | ||
| GBGB1107730.2A GB201107730D0 (en) | 2011-05-10 | 2011-05-10 | Diamond sensors, detectors and quantum devices |
| PCT/EP2012/058231 WO2012152685A1 (en) | 2011-05-10 | 2012-05-04 | Diamond sensors, detectors, and quantum devices |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014522364A JP2014522364A (ja) | 2014-09-04 |
| JP2014522364A5 JP2014522364A5 (enExample) | 2015-04-30 |
| JP5769877B2 true JP5769877B2 (ja) | 2015-08-26 |
Family
ID=44243844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014509687A Active JP5769877B2 (ja) | 2011-05-10 | 2012-05-04 | ダイヤモンドセンサ、検出器及び量子装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8686377B2 (enExample) |
| EP (1) | EP2707523B1 (enExample) |
| JP (1) | JP5769877B2 (enExample) |
| CN (1) | CN103620093B9 (enExample) |
| GB (2) | GB201107730D0 (enExample) |
| WO (1) | WO2012152685A1 (enExample) |
Families Citing this family (73)
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| EP2888596B1 (en) * | 2012-08-22 | 2022-07-20 | President and Fellows of Harvard College | Nanoscale scanning sensors |
| US9245551B2 (en) | 2014-03-18 | 2016-01-26 | Seagate Technology Llc | Nitrogen-vacancy nanocrystal magnetic source sensor |
| US10088336B2 (en) | 2016-01-21 | 2018-10-02 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensed ferro-fluid hydrophone |
| US9829545B2 (en) | 2015-11-20 | 2017-11-28 | Lockheed Martin Corporation | Apparatus and method for hypersensitivity detection of magnetic field |
| US9614589B1 (en) | 2015-12-01 | 2017-04-04 | Lockheed Martin Corporation | Communication via a magnio |
| US9551763B1 (en) | 2016-01-21 | 2017-01-24 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensor with common RF and magnetic fields generator |
| US10006973B2 (en) | 2016-01-21 | 2018-06-26 | Lockheed Martin Corporation | Magnetometer with a light emitting diode |
| US9824597B2 (en) | 2015-01-28 | 2017-11-21 | Lockheed Martin Corporation | Magnetic navigation methods and systems utilizing power grid and communication network |
| US10338162B2 (en) | 2016-01-21 | 2019-07-02 | Lockheed Martin Corporation | AC vector magnetic anomaly detection with diamond nitrogen vacancies |
| US10168393B2 (en) | 2014-09-25 | 2019-01-01 | Lockheed Martin Corporation | Micro-vacancy center device |
| US9638821B2 (en) | 2014-03-20 | 2017-05-02 | Lockheed Martin Corporation | Mapping and monitoring of hydraulic fractures using vector magnetometers |
| US9557391B2 (en) | 2015-01-23 | 2017-01-31 | Lockheed Martin Corporation | Apparatus and method for high sensitivity magnetometry measurement and signal processing in a magnetic detection system |
| US9853837B2 (en) | 2014-04-07 | 2017-12-26 | Lockheed Martin Corporation | High bit-rate magnetic communication |
| US9910104B2 (en) | 2015-01-23 | 2018-03-06 | Lockheed Martin Corporation | DNV magnetic field detector |
| US9910105B2 (en) | 2014-03-20 | 2018-03-06 | Lockheed Martin Corporation | DNV magnetic field detector |
| CA2945016A1 (en) | 2014-04-07 | 2015-10-15 | Lockheed Martin Corporation | Energy efficient controlled magnetic field generator circuit |
| EP3181736B1 (en) * | 2014-08-11 | 2019-07-03 | Sumitomo Electric Industries, Ltd. | Diamond composite body and diamond manufacturing method |
| DE102014219550A1 (de) * | 2014-09-26 | 2016-03-31 | Robert Bosch Gmbh | Kombinationssensor zur Messung von Druck und/oder Temperatur und/oder Magnetfeldern |
| US11229131B2 (en) * | 2015-01-19 | 2022-01-18 | Corning Incorporated | Enclosures having an anti-fingerprint surface |
| EP3251193A4 (en) | 2015-01-28 | 2018-08-08 | Lockheed Martin Corporation | In-situ power charging |
| WO2016126436A1 (en) | 2015-02-04 | 2016-08-11 | Lockheed Martin Corporation | Apparatus and method for recovery of three dimensional magnetic field from a magnetic detection system |
| WO2016126435A1 (en) | 2015-02-04 | 2016-08-11 | Lockheed Martin Corporation | Apparatus and method for estimating absolute axes' orientations for a magnetic detection system |
| AU2015230816B2 (en) * | 2015-07-28 | 2021-07-15 | Royal Melbourne Institute Of Technology | A sensor for measuring an external magnetic field |
| US10495698B2 (en) | 2015-07-28 | 2019-12-03 | Royal Melbourne Institute Of Technology | Magneto-encephalography device |
| WO2017078766A1 (en) | 2015-11-04 | 2017-05-11 | Lockheed Martin Corporation | Magnetic band-pass filter |
| WO2017087013A1 (en) | 2015-11-20 | 2017-05-26 | Lockheed Martin Corporation | Apparatus and method for closed loop processing for a magnetic detection system |
| GB201522650D0 (en) | 2015-12-22 | 2016-02-03 | Element Six Technologies Ltd | Nitrogen containing single crystal diamond materials optimized for magnetometr applications |
| WO2017123261A1 (en) | 2016-01-12 | 2017-07-20 | Lockheed Martin Corporation | Defect detector for conductive materials |
| EP3405603A4 (en) | 2016-01-21 | 2019-10-16 | Lockheed Martin Corporation | DIAMOND NITROGEN SENSOR WITH SWITCHING ON DIAMOND |
| WO2017127096A1 (en) | 2016-01-21 | 2017-07-27 | Lockheed Martin Corporation | Diamond nitrogen vacancy sensor with dual rf sources |
| AU2016387312A1 (en) | 2016-01-21 | 2018-09-06 | Lockheed Martin Corporation | Magnetometer with light pipe |
| WO2017127090A1 (en) | 2016-01-21 | 2017-07-27 | Lockheed Martin Corporation | Higher magnetic sensitivity through fluorescence manipulation by phonon spectrum control |
| US10901062B2 (en) | 2016-05-25 | 2021-01-26 | President And Fellows Of Harvard College | Synchronized-readout for narrowband detection of time-varying electromagnetic fields using solid state spins |
| US10228429B2 (en) | 2017-03-24 | 2019-03-12 | Lockheed Martin Corporation | Apparatus and method for resonance magneto-optical defect center material pulsed mode referencing |
| US10527746B2 (en) | 2016-05-31 | 2020-01-07 | Lockheed Martin Corporation | Array of UAVS with magnetometers |
| US10345395B2 (en) | 2016-12-12 | 2019-07-09 | Lockheed Martin Corporation | Vector magnetometry localization of subsurface liquids |
| US10145910B2 (en) | 2017-03-24 | 2018-12-04 | Lockheed Martin Corporation | Photodetector circuit saturation mitigation for magneto-optical high intensity pulses |
| US10274550B2 (en) | 2017-03-24 | 2019-04-30 | Lockheed Martin Corporation | High speed sequential cancellation for pulsed mode |
| US10345396B2 (en) | 2016-05-31 | 2019-07-09 | Lockheed Martin Corporation | Selected volume continuous illumination magnetometer |
| US10281550B2 (en) | 2016-11-14 | 2019-05-07 | Lockheed Martin Corporation | Spin relaxometry based molecular sequencing |
| US10338163B2 (en) | 2016-07-11 | 2019-07-02 | Lockheed Martin Corporation | Multi-frequency excitation schemes for high sensitivity magnetometry measurement with drift error compensation |
| US10317279B2 (en) | 2016-05-31 | 2019-06-11 | Lockheed Martin Corporation | Optical filtration system for diamond material with nitrogen vacancy centers |
| US10408890B2 (en) | 2017-03-24 | 2019-09-10 | Lockheed Martin Corporation | Pulsed RF methods for optimization of CW measurements |
| US10571530B2 (en) | 2016-05-31 | 2020-02-25 | Lockheed Martin Corporation | Buoy array of magnetometers |
| US10330744B2 (en) | 2017-03-24 | 2019-06-25 | Lockheed Martin Corporation | Magnetometer with a waveguide |
| US10677953B2 (en) | 2016-05-31 | 2020-06-09 | Lockheed Martin Corporation | Magneto-optical detecting apparatus and methods |
| US10359479B2 (en) | 2017-02-20 | 2019-07-23 | Lockheed Martin Corporation | Efficient thermal drift compensation in DNV vector magnetometry |
| US10371765B2 (en) | 2016-07-11 | 2019-08-06 | Lockheed Martin Corporation | Geolocation of magnetic sources using vector magnetometer sensors |
| US20170343621A1 (en) | 2016-05-31 | 2017-11-30 | Lockheed Martin Corporation | Magneto-optical defect center magnetometer |
| WO2017213928A1 (en) * | 2016-06-06 | 2017-12-14 | President And Fellows Of Harvard College | Simultaneous vector magnetometry with nitrogen vacancy centers in diamond or other solid-state spin sensors |
| US10910004B2 (en) * | 2016-09-02 | 2021-02-02 | Mmi Technologies Pte Ltd. | Disk drive suspension baseplate having enhanced torque retention and method of manufacture |
| RU2661442C2 (ru) * | 2016-11-28 | 2018-07-16 | Общество С Ограниченной Ответственностью "Сенсор Спин Технолоджис" | Гироскоп на nv-центрах в алмазе |
| US10983184B2 (en) * | 2016-12-22 | 2021-04-20 | The Regents Of The University Of California | Specialized diamond materials for NMR applications |
| EP3376245A1 (en) * | 2017-03-16 | 2018-09-19 | ETH Zurich | Scanning sensor comprising a spin defect |
| US10338164B2 (en) | 2017-03-24 | 2019-07-02 | Lockheed Martin Corporation | Vacancy center material with highly efficient RF excitation |
| US10459041B2 (en) | 2017-03-24 | 2019-10-29 | Lockheed Martin Corporation | Magnetic detection system with highly integrated diamond nitrogen vacancy sensor |
| US10379174B2 (en) | 2017-03-24 | 2019-08-13 | Lockheed Martin Corporation | Bias magnet array for magnetometer |
| US10371760B2 (en) | 2017-03-24 | 2019-08-06 | Lockheed Martin Corporation | Standing-wave radio frequency exciter |
| WO2018226784A2 (en) | 2017-06-06 | 2018-12-13 | President And Fellows Of Harvard College | Order of magnitude improvement in t*2 via control and cancellation of spin bath induced dephasing in solid-state ensembles |
| CN107807315B (zh) * | 2017-10-31 | 2023-12-19 | 国网安徽省电力公司电力科学研究院 | 用于检测电气设备的绝缘缺陷的方法 |
| JP6795803B2 (ja) | 2018-03-02 | 2020-12-02 | 国立大学法人京都大学 | センサ素子、測定装置、センサ素子の製造方法、電子回路素子、および量子情報素子 |
| DE102018203845A1 (de) * | 2018-03-14 | 2019-09-19 | Robert Bosch Gmbh | Verfahren und Vorrichtung zum Messen einer Magnetfeldrichtung |
| WO2019177092A1 (ja) * | 2018-03-16 | 2019-09-19 | アダマンド並木精密宝石株式会社 | ダイヤモンド結晶の研磨方法とダイヤモンド結晶 |
| KR20210006946A (ko) * | 2018-05-08 | 2021-01-19 | 엠7디 코포레이션 | 단결정 다이아몬드 매트릭스에서 다중 cvd 성장한 소립자 다이아몬드를 포함하는 다이아몬드 물질 |
| GB201904435D0 (en) * | 2019-03-29 | 2019-05-15 | Element Six Tech Ltd | Single crystal synthetic diamond material |
| DE102019117423A1 (de) * | 2019-06-27 | 2020-12-31 | Universität Leipzig | Verfahren zur Erzeugung zumindest eines deterministischen Farbzentrums in einer Diamantschicht |
| US12014246B2 (en) | 2019-07-17 | 2024-06-18 | President And Fellows Of Harvard College | Nanophotonic quantum memory |
| CN112688160A (zh) * | 2020-12-24 | 2021-04-20 | 南方科技大学 | 一种宽禁带半导体器件及其制备方法、探测器和调制器 |
| GB2614218B (en) * | 2021-07-06 | 2024-06-19 | Element Six Tech Ltd | Single crystal diamond component and method for producing |
| KR102765079B1 (ko) * | 2021-09-17 | 2025-02-06 | 울산과학기술원 | 고체 큐빗 이미징 장치 |
| KR102709221B1 (ko) * | 2021-12-17 | 2024-09-25 | 한국과학기술연구원 | 단일 광자 광원을 이용한 표면 기능화 방법 |
| WO2024176584A1 (ja) * | 2023-02-24 | 2024-08-29 | 国立研究開発法人量子科学技術研究開発機構 | 窒素-空孔複合欠陥を有する材料の製造方法、製造装置、製造プログラム、及び窒素-空孔複合欠陥を有する材料 |
| WO2025094988A1 (ja) * | 2023-11-02 | 2025-05-08 | 信越化学工業株式会社 | ダイヤモンド基板及びその製造方法並びにセンサー |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1292726B8 (en) | 2000-06-15 | 2008-10-29 | Element Six (PTY) Ltd | Single crystal diamond prepared by cvd |
| AU6624601A (en) | 2000-06-15 | 2001-12-24 | De Beers Ind Diamond | Thick single crystal diamond layer method for making it and gemstones produced from the layer |
| US7122837B2 (en) * | 2005-01-11 | 2006-10-17 | Apollo Diamond, Inc | Structures formed in diamond |
| JP2008526682A (ja) * | 2005-01-11 | 2008-07-24 | アポロ ダイヤモンド,インク | ダイヤモンド製医療装置 |
| GB0704516D0 (en) * | 2007-03-08 | 2007-04-18 | Element Six Ltd | Diamond |
| GB0813491D0 (en) | 2008-07-23 | 2008-08-27 | Element Six Ltd | Diamond Material |
| GB0813490D0 (en) | 2008-07-23 | 2008-08-27 | Element Six Ltd | Solid state material |
| US8986646B2 (en) * | 2009-06-26 | 2015-03-24 | Element Six Technologies Limited | Diamond material |
-
2011
- 2011-05-10 GB GBGB1107730.2A patent/GB201107730D0/en not_active Ceased
-
2012
- 2012-05-04 EP EP12719687.1A patent/EP2707523B1/en active Active
- 2012-05-04 GB GB1207846.5A patent/GB2493236C/en not_active Expired - Fee Related
- 2012-05-04 CN CN201280030089.5A patent/CN103620093B9/zh active Active
- 2012-05-04 WO PCT/EP2012/058231 patent/WO2012152685A1/en not_active Ceased
- 2012-05-04 US US14/115,031 patent/US8686377B2/en active Active
- 2012-05-04 JP JP2014509687A patent/JP5769877B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US8686377B2 (en) | 2014-04-01 |
| GB201107730D0 (en) | 2011-06-22 |
| CN103620093B (zh) | 2016-02-24 |
| GB2493236B (en) | 2015-07-29 |
| JP2014522364A (ja) | 2014-09-04 |
| GB2493236A (en) | 2013-01-30 |
| CN103620093B9 (zh) | 2016-08-10 |
| CN103620093A (zh) | 2014-03-05 |
| US20140061510A1 (en) | 2014-03-06 |
| EP2707523A1 (en) | 2014-03-19 |
| EP2707523B1 (en) | 2015-01-14 |
| WO2012152685A1 (en) | 2012-11-15 |
| GB201207846D0 (en) | 2012-06-20 |
| GB2493236C (en) | 2019-02-27 |
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