JP5767096B2 - 薄板収納容器 - Google Patents
薄板収納容器 Download PDFInfo
- Publication number
- JP5767096B2 JP5767096B2 JP2011269127A JP2011269127A JP5767096B2 JP 5767096 B2 JP5767096 B2 JP 5767096B2 JP 2011269127 A JP2011269127 A JP 2011269127A JP 2011269127 A JP2011269127 A JP 2011269127A JP 5767096 B2 JP5767096 B2 JP 5767096B2
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- 230000000149 penetrating effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 description 52
- 210000000078 claw Anatomy 0.000 description 32
- 238000005452 bending Methods 0.000 description 11
- 230000035515 penetration Effects 0.000 description 7
- 230000002452 interceptive effect Effects 0.000 description 2
- -1 polybutylene terephthalate Polymers 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004697 Polyetherimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010445 mica Substances 0.000 description 1
- 229910052618 mica group Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001601 polyetherimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920002725 thermoplastic elastomer Polymers 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000013585 weight reducing agent Substances 0.000 description 1
Images
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (5)
- 開口部を有して薄板を収納する容器本体と、
前記開口部に嵌め合わされて前記容器本体を密封する蓋体と、
前記容器本体に取り付けられて前記薄板を支持する複数のサポート冶具と、
を備えた薄板収納容器であって、
前記容器本体の対向する内側壁には、前記サポート冶具を支持する支持棚が上下方向に一定間隔で形成されており、
前記支持棚には、上下方向に貫通した貫通溝と、下方に窪んで肉厚の薄くなった支持棚側載置部と、が形成されており、
前記サポート冶具には、前記貫通溝に貫通されて前記支持棚に係止される係止突部と、前記支持棚側載置部に載置される冶具側載置部と、が形成されている、
薄板収納容器。 - 前記サポート冶具が、U字状の板状に形成されている、
請求項1に記載の薄板収納容器。 - 前記容器本体及び前記サポート冶具の少なくとも一方に、前記容器本体に対する前記サポート冶具の位置決めを行う位置決め用突起が形成されている、
請求項1又は2に記載の薄板収納容器。 - 前記支持棚が、複数に分割されている、
請求項1〜3の何れか一項に記載の薄板収納容器。 - 前記支持棚が、開口部側に配置される開口側棚部と、前記開口部とは反対の奥側に配置される奥側棚部と、前記開口側棚部と前記奥側棚部との間に配置される中間棚部と、に分割されており、前記開口側棚部と前記中間棚部との間、及び、前記中間棚部と前記奥側棚部との間に、前記貫通溝が形成されている、
請求項1〜4の何れか一項に記載の薄板収納容器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011269127A JP5767096B2 (ja) | 2011-12-08 | 2011-12-08 | 薄板収納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011269127A JP5767096B2 (ja) | 2011-12-08 | 2011-12-08 | 薄板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013120896A JP2013120896A (ja) | 2013-06-17 |
JP5767096B2 true JP5767096B2 (ja) | 2015-08-19 |
Family
ID=48773389
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011269127A Active JP5767096B2 (ja) | 2011-12-08 | 2011-12-08 | 薄板収納容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5767096B2 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105564021B (zh) * | 2015-12-17 | 2017-12-15 | 江苏实为半导体科技有限公司 | 一种设有收纳装置的导光板降温设备 |
WO2024105879A1 (ja) * | 2022-11-18 | 2024-05-23 | ミライアル株式会社 | 収納容器及びアダプター部材 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1373099A4 (en) * | 2001-04-01 | 2008-05-28 | Entegris Inc | FINE PLATE INSERT |
JP4965472B2 (ja) * | 2008-01-28 | 2012-07-04 | 信越ポリマー株式会社 | 処理治具用の収納容器 |
JP2011060877A (ja) * | 2009-09-08 | 2011-03-24 | Shin Etsu Polymer Co Ltd | 基板用支持体及び基板収納容器 |
JP5363277B2 (ja) * | 2009-11-11 | 2013-12-11 | 信越ポリマー株式会社 | 基板収納容器、及び支持部材 |
JP5409343B2 (ja) * | 2009-12-28 | 2014-02-05 | 信越ポリマー株式会社 | 基板収納容器 |
-
2011
- 2011-12-08 JP JP2011269127A patent/JP5767096B2/ja active Active
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Publication number | Publication date |
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JP2013120896A (ja) | 2013-06-17 |
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