JP5764002B2 - 真空成膜装置 - Google Patents
真空成膜装置 Download PDFInfo
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- JP5764002B2 JP5764002B2 JP2011161264A JP2011161264A JP5764002B2 JP 5764002 B2 JP5764002 B2 JP 5764002B2 JP 2011161264 A JP2011161264 A JP 2011161264A JP 2011161264 A JP2011161264 A JP 2011161264A JP 5764002 B2 JP5764002 B2 JP 5764002B2
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- 238000001771 vacuum deposition Methods 0.000 title claims description 3
- 230000007246 mechanism Effects 0.000 claims description 101
- 238000001704 evaporation Methods 0.000 claims description 96
- 230000008020 evaporation Effects 0.000 claims description 96
- 238000004544 sputter deposition Methods 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 27
- 230000015572 biosynthetic process Effects 0.000 claims description 17
- 239000000696 magnetic material Substances 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 239000010408 film Substances 0.000 description 46
- 239000013077 target material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 6
- 230000035699 permeability Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910001172 neodymium magnet Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3492—Variation of parameters during sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/026—Shields
- H01J2237/0264—Shields magnetic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/3447—Collimators, shutters, apertures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Description
図1に示すように真空成膜装置100は、成膜チャンバー3と、この成膜チャンバー3内の中央に配される成膜対象である基材4を取り囲むように配設される複数のスパッタリング蒸発源用磁場印加機構1(1a,1b)及び複数のアーク蒸発源用磁場印加機構2(2a,2b)とを主として備える。
なお、上記実施形態では磁場遮蔽部21,22を独立で設けることとしたが、磁場遮蔽部21,22を、通常設けられる蒸発源のシャッター機構と兼用させる構成を採用してもよい。
単体の蒸発源用磁場印加機構(磁場遮蔽部無し)における磁場解析を行った。磁場の干渉度合いを評価するために、相互の蒸発源用磁場印加機構の中央付近における磁場の強さを計算した。単体の蒸発源用磁場印加機構としてスパッタリング蒸発源用磁場印加機構又はアーク蒸発源用磁場印加機構を使用した場合、磁場の強さは、スパッタリング蒸発源用磁場印加機構単体の場合が7.65ガウスとなり、アーク蒸発源用磁場印加機構単体の場合が1.99ガウスとなった。
上述の図1に示すようなスパッタリング蒸発源用磁場印加機構(バランスド・マグネトロンスパッタリング(BMS型)、又はアンバランスド・マグネトロンスパッタリング(UBMS型))、及びアーク蒸発源用磁場印加機構を有する真空成膜装置において、磁場解析を行って磁場遮蔽部の磁場遮蔽効果を調査した。
2,2a,2b アーク蒸発源用磁場印加機構
3 成膜チャンバー
3a 成膜チャンバー内壁
4 基材
12 ターゲット材
21,22 磁場遮蔽部
21a,22a 非磁性体
21b,22b 開閉部
21c,22c 固定部
32 ターゲット材
100 真空成膜装置
Claims (3)
- 成膜チャンバーと、
前記成膜チャンバーに設けられる、スパッタリング蒸発源が有する磁場印加機構及びアーク蒸発源が有する磁場印加機構のうち少なくとも2以上の磁場印加機構と、
少なくとも一つの前記磁場印加機構の一部又は全部を覆うように設けられる磁場遮蔽部と、を有し、
前記磁場遮蔽部は、一部が非磁性体からなり、残部が磁性体からなり、
前記非磁性体は、前記磁場遮蔽部が閉じた状態にあるときに蒸発源と向かい合う前記磁場遮蔽部の位置に配される
ことを特徴とする真空成膜装置。 - 前記磁場遮蔽部は開閉可能に取り付けられている請求項1に記載の真空成膜装置。
- 前記スパッタリング蒸発源の磁場印加機構はアンバランスド・マグネトロン(UBM)型であり、
1以上の前記スパッタリング蒸発源の磁場印加機構と1以上の前記アーク蒸発源の磁場印加機構とを有し、
前記磁場遮蔽部は、少なくとも1つの前記スパッタリング蒸発源の磁場印加機構側に配される請求項1又は2に記載の真空成膜装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011161264A JP5764002B2 (ja) | 2011-07-22 | 2011-07-22 | 真空成膜装置 |
EP12004988.7A EP2548992B1 (en) | 2011-07-22 | 2012-07-05 | Vacuum deposition apparatus |
US13/543,330 US9017534B2 (en) | 2011-07-22 | 2012-07-06 | Vacuum deposition apparatus |
KR1020120079046A KR101430809B1 (ko) | 2011-07-22 | 2012-07-20 | 진공 성막 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011161264A JP5764002B2 (ja) | 2011-07-22 | 2011-07-22 | 真空成膜装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013023744A JP2013023744A (ja) | 2013-02-04 |
JP5764002B2 true JP5764002B2 (ja) | 2015-08-12 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2011161264A Active JP5764002B2 (ja) | 2011-07-22 | 2011-07-22 | 真空成膜装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9017534B2 (ja) |
EP (1) | EP2548992B1 (ja) |
JP (1) | JP5764002B2 (ja) |
KR (1) | KR101430809B1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015017304A (ja) * | 2013-07-11 | 2015-01-29 | ソニー株式会社 | 磁界発生装置、及びスパッタリング装置 |
JP6131145B2 (ja) * | 2013-08-06 | 2017-05-17 | 株式会社神戸製鋼所 | 成膜装置 |
US20170310415A1 (en) * | 2014-11-10 | 2017-10-26 | Telefonaktiebolaget Lm Ericsson | D2d operation approaches in cellular networks |
US10554343B2 (en) * | 2015-08-03 | 2020-02-04 | Lg Electronics Inc. | Method by which terminal receives retransmitted data when virtual terminal scheme is applied |
US10438828B2 (en) * | 2016-10-03 | 2019-10-08 | Applied Materials, Inc. | Methods and apparatus to prevent interference between processing chambers |
JP6868471B2 (ja) * | 2017-05-31 | 2021-05-12 | ファスフォードテクノロジ株式会社 | 半導体製造装置および半導体装置の製造方法 |
JP6986674B2 (ja) * | 2017-10-19 | 2021-12-22 | 株式会社不二越 | プラズマスパッタリング成膜装置 |
CN110423986B (zh) * | 2019-07-24 | 2024-04-16 | 福建华佳彩有限公司 | 一种蒸发源挡板 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5234561A (en) * | 1988-08-25 | 1993-08-10 | Hauzer Industries Bv | Physical vapor deposition dual coating process |
JPH02298267A (ja) * | 1989-05-12 | 1990-12-10 | Osaka Shinku Kiki Seisakusho:Kk | 対向ターゲット式スパッタ装置 |
JPH05247637A (ja) * | 1991-03-29 | 1993-09-24 | Nec Home Electron Ltd | 強磁性体用スパッタリングターゲット |
JP3151031B2 (ja) * | 1992-01-19 | 2001-04-03 | 日本真空技術株式会社 | マグネトロンスパッタ装置 |
DE10001381A1 (de) * | 2000-01-14 | 2001-07-19 | Hauzer Techno Coating Europ B | PVD-Verfahren zur Herstellung einer gefärbten, gegenüber Fingerabdrücken unempfindlichen Beschichtung auf Gegenständen sowie Gegenstände mit einer solchen Beschichtung |
WO2002084702A2 (en) * | 2001-01-16 | 2002-10-24 | Lampkin Curtis M | Sputtering deposition apparatus and method for depositing surface films |
JP4015883B2 (ja) * | 2002-06-11 | 2007-11-28 | 株式会社神戸製鋼所 | 複合成膜装置 |
JP2005048222A (ja) * | 2003-07-31 | 2005-02-24 | Anelva Corp | マグネトロンスパッタリング装置 |
CN100419117C (zh) * | 2004-02-02 | 2008-09-17 | 株式会社神户制钢所 | 硬质叠层被膜、其制造方法及成膜装置 |
JP4500061B2 (ja) * | 2004-02-02 | 2010-07-14 | 株式会社神戸製鋼所 | 硬質皮膜の成膜方法 |
EP1834007A1 (en) * | 2004-12-27 | 2007-09-19 | Cardinal CG Company | Oscillating shielded cylindrical target assemblies and their methods of use |
JP5138892B2 (ja) * | 2006-01-20 | 2013-02-06 | 株式会社神戸製鋼所 | 硬質皮膜 |
CN101368260A (zh) | 2007-09-14 | 2009-02-18 | 山特维克知识产权股份有限公司 | 用于在基底上沉积涂层的方法和设备 |
CZ304905B6 (cs) * | 2009-11-23 | 2015-01-14 | Shm, S.R.O. | Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu |
-
2011
- 2011-07-22 JP JP2011161264A patent/JP5764002B2/ja active Active
-
2012
- 2012-07-05 EP EP12004988.7A patent/EP2548992B1/en not_active Not-in-force
- 2012-07-06 US US13/543,330 patent/US9017534B2/en not_active Expired - Fee Related
- 2012-07-20 KR KR1020120079046A patent/KR101430809B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP2548992B1 (en) | 2017-03-22 |
US9017534B2 (en) | 2015-04-28 |
KR20130011963A (ko) | 2013-01-30 |
KR101430809B1 (ko) | 2014-08-18 |
EP2548992A1 (en) | 2013-01-23 |
US20130020195A1 (en) | 2013-01-24 |
JP2013023744A (ja) | 2013-02-04 |
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