JP5761896B2 - 液滴塗布方法及び装置 - Google Patents

液滴塗布方法及び装置 Download PDF

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Publication number
JP5761896B2
JP5761896B2 JP2009034232A JP2009034232A JP5761896B2 JP 5761896 B2 JP5761896 B2 JP 5761896B2 JP 2009034232 A JP2009034232 A JP 2009034232A JP 2009034232 A JP2009034232 A JP 2009034232A JP 5761896 B2 JP5761896 B2 JP 5761896B2
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image
droplet
nozzle
substrate
droplets
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Japanese (ja)
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JP2010188263A5 (enExample
JP2010188263A (ja
Inventor
梓 平野
梓 平野
林　正和
正和 林
鶴岡　保次
保次 鶴岡
昭宏 重山
昭宏 重山
昌之 飛内
昌之 飛内
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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JP2009034232A 2009-02-17 2009-02-17 液滴塗布方法及び装置 Active JP5761896B2 (ja)

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JP2009034232A JP5761896B2 (ja) 2009-02-17 2009-02-17 液滴塗布方法及び装置

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JP2009034232A JP5761896B2 (ja) 2009-02-17 2009-02-17 液滴塗布方法及び装置

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JP2010188263A JP2010188263A (ja) 2010-09-02
JP2010188263A5 JP2010188263A5 (enExample) 2012-04-12
JP5761896B2 true JP5761896B2 (ja) 2015-08-12

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107464877A (zh) * 2016-06-06 2017-12-12 东京毅力科创株式会社 检查装置、检查方法和功能液排出装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014008481A (ja) * 2012-07-02 2014-01-20 Seiko Epson Corp 液滴吐出方法
JP6876487B2 (ja) 2016-06-06 2021-05-26 東京エレクトロン株式会社 検査装置、検査方法、機能液吐出装置及び補正方法
CN113019841B (zh) * 2021-03-04 2023-03-17 业成科技（成都）有限公司 水胶涂布方法及其多点压电式喷涂装置
JP7526150B2 (ja) 2021-09-13 2024-07-31 芝浦メカトロニクス株式会社 塗布装置、液滴吐出検査方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4406569B2 (ja) 2004-01-28 2010-01-27 富士フイルム株式会社 印刷管理システム
JP4768358B2 (ja) 2005-08-22 2011-09-07 株式会社日立ソリューションズ 画像検索方法
JP2008102311A (ja) 2006-10-19 2008-05-01 Toppan Printing Co Ltd インクジェット印刷におけるインク液吐出不良を検出する検査方法及び検査装置
JP2008142654A (ja) 2006-12-12 2008-06-26 Seiko Epson Corp 画素観察システム、描画システム、液状体の描画方法、カラーフィルタの製造方法、有機ｅｌ素子の製造方法
JP2008283130A (ja) 2007-05-14 2008-11-20 Panasonic Corp 配線基板及びその製造方法ならびに半導体装置及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107464877A (zh) * 2016-06-06 2017-12-12 东京毅力科创株式会社 检查装置、检查方法和功能液排出装置
CN107464877B (zh) * 2016-06-06 2020-01-14 东京毅力科创株式会社 检查装置、检查方法和功能液排出装置

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