JP5753831B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP5753831B2
JP5753831B2 JP2012260586A JP2012260586A JP5753831B2 JP 5753831 B2 JP5753831 B2 JP 5753831B2 JP 2012260586 A JP2012260586 A JP 2012260586A JP 2012260586 A JP2012260586 A JP 2012260586A JP 5753831 B2 JP5753831 B2 JP 5753831B2
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JP
Japan
Prior art keywords
fluid control
control device
pipe
control devices
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2012260586A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014105817A5 (enExample
JP2014105817A (ja
Inventor
英宏 堂屋
英宏 堂屋
鈴木　貴之
貴之 鈴木
和洋 藤根
和洋 藤根
新也 野島
新也 野島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2012260586A priority Critical patent/JP5753831B2/ja
Application filed by Fujikin Inc filed Critical Fujikin Inc
Priority to PCT/JP2013/080074 priority patent/WO2014084014A1/ja
Priority to US14/648,258 priority patent/US9869405B2/en
Priority to CN201380062674.8A priority patent/CN104822979B/zh
Priority to SG11201503890WA priority patent/SG11201503890WA/en
Priority to KR1020157011434A priority patent/KR101674849B1/ko
Priority to TW102143377A priority patent/TWI554705B/zh
Publication of JP2014105817A publication Critical patent/JP2014105817A/ja
Publication of JP2014105817A5 publication Critical patent/JP2014105817A5/ja
Application granted granted Critical
Publication of JP5753831B2 publication Critical patent/JP5753831B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/6416—With heating or cooling of the system

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Valve Housings (AREA)
  • Details Of Valves (AREA)
  • Chemical & Material Sciences (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
JP2012260586A 2012-11-29 2012-11-29 流体制御装置 Expired - Fee Related JP5753831B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2012260586A JP5753831B2 (ja) 2012-11-29 2012-11-29 流体制御装置
US14/648,258 US9869405B2 (en) 2012-11-29 2013-11-07 Fluid control apparatus
CN201380062674.8A CN104822979B (zh) 2012-11-29 2013-11-07 流体控制装置
SG11201503890WA SG11201503890WA (en) 2012-11-29 2013-11-07 Fluid control apparatus
PCT/JP2013/080074 WO2014084014A1 (ja) 2012-11-29 2013-11-07 流体制御装置
KR1020157011434A KR101674849B1 (ko) 2012-11-29 2013-11-07 유체 제어 장치
TW102143377A TWI554705B (zh) 2012-11-29 2013-11-28 Fluid control means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012260586A JP5753831B2 (ja) 2012-11-29 2012-11-29 流体制御装置

Publications (3)

Publication Number Publication Date
JP2014105817A JP2014105817A (ja) 2014-06-09
JP2014105817A5 JP2014105817A5 (enExample) 2014-09-04
JP5753831B2 true JP5753831B2 (ja) 2015-07-22

Family

ID=50827660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012260586A Expired - Fee Related JP5753831B2 (ja) 2012-11-29 2012-11-29 流体制御装置

Country Status (7)

Country Link
US (1) US9869405B2 (enExample)
JP (1) JP5753831B2 (enExample)
KR (1) KR101674849B1 (enExample)
CN (1) CN104822979B (enExample)
SG (1) SG11201503890WA (enExample)
TW (1) TWI554705B (enExample)
WO (1) WO2014084014A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6475950B2 (ja) * 2014-10-29 2019-02-27 株式会社フジキン 流体制御器用加熱装置および流体制御装置
KR102148090B1 (ko) * 2016-01-28 2020-08-25 가부시키가이샤 후지킨 유체 제어 장치 및 가스 라인부의 착탈 방법
WO2017138077A1 (ja) * 2016-02-08 2017-08-17 富士機械製造株式会社 粘性流体供給装置
WO2020261985A1 (ja) * 2019-06-28 2020-12-30 株式会社フジキン 流体制御装置
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3733459A (en) * 1971-02-09 1973-05-15 C Lengstorf Internal heating device for air valves
JPH07122500A (ja) * 1993-10-28 1995-05-12 Fujitsu Ltd ガス機器及びこれを利用したガス供給装置
AU2988099A (en) * 1998-03-05 1999-09-20 Swagelok Company, The Modular surface mount manifold
US7036528B2 (en) * 1998-05-18 2006-05-02 Swagelok Company Modular surface mount manifold assemblies
JP3482601B2 (ja) * 2000-06-30 2003-12-22 東京エレクトロン株式会社 流体制御装置
JP4487135B2 (ja) * 2001-03-05 2010-06-23 東京エレクトロン株式会社 流体制御装置
JP4653358B2 (ja) * 2001-08-28 2011-03-16 シーケーディ株式会社 集積弁
CN101372991B (zh) * 2002-11-26 2012-06-27 斯瓦戈洛克公司 模块化表面安装的流体系统
JP4567370B2 (ja) * 2004-05-10 2010-10-20 シーケーディ株式会社 ガス供給集積ユニット
JP4677805B2 (ja) * 2005-03-22 2011-04-27 株式会社フジキン 流体制御装置
JP4753173B2 (ja) * 2005-06-17 2011-08-24 株式会社フジキン 流体制御装置
US7604217B2 (en) * 2005-10-07 2009-10-20 Grundfos Pumps Corporation Electrolysis-resistant coupling assembly for valves
JP4355724B2 (ja) * 2006-12-25 2009-11-04 シーケーディ株式会社 ガス集積ユニット
JP2010053907A (ja) * 2008-08-26 2010-03-11 Eagle Ind Co Ltd 流体供給系加熱装置

Also Published As

Publication number Publication date
CN104822979B (zh) 2016-12-28
TWI554705B (zh) 2016-10-21
KR101674849B1 (ko) 2016-11-09
JP2014105817A (ja) 2014-06-09
KR20150059794A (ko) 2015-06-02
US20150337985A1 (en) 2015-11-26
TW201430259A (zh) 2014-08-01
CN104822979A (zh) 2015-08-05
US9869405B2 (en) 2018-01-16
WO2014084014A1 (ja) 2014-06-05
SG11201503890WA (en) 2015-06-29

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