JP5747241B2 - 半導体レーザ構造体 - Google Patents
半導体レーザ構造体 Download PDFInfo
- Publication number
- JP5747241B2 JP5747241B2 JP2009119394A JP2009119394A JP5747241B2 JP 5747241 B2 JP5747241 B2 JP 5747241B2 JP 2009119394 A JP2009119394 A JP 2009119394A JP 2009119394 A JP2009119394 A JP 2009119394A JP 5747241 B2 JP5747241 B2 JP 5747241B2
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- JP
- Japan
- Prior art keywords
- layer
- region
- iii
- active
- active region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
- H01S5/0265—Intensity modulators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/028—Coatings ; Treatment of the laser facets, e.g. etching, passivation layers or reflecting layers
- H01S5/0287—Facet reflectivity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/062—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes
- H01S5/0625—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying the potential of the electrodes in multi-section lasers
- H01S5/06251—Amplitude modulation
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Description
Claims (3)
- InGaN活性層を備えるGaN半導体レーザ構造体であって、
C面の堆積面を有する基板と、
前記基板上のIII−V族窒化物バッファ層と、
前記バッファ層上の第1のIII−V族窒化物導波層と、
前記第1のIII−V族窒化物導波層上の、少なくとも1つのInGaN量子井戸層を有する活性層と、
前記活性層上の第2のIII−V族窒化物導波層と、
前記活性層内に形成され、p型物質とn型物質の間に少なくとも1つの接合を有し、増幅器として機能する第1の活性領域と、
前記活性層内に形成され、p型物質とn型物質の間に少なくとも1つの接合を有し、光学変調器として機能する第2の活性領域と、
前記第2のIII−V族窒化物導波層の一部に形成され前記活性層に達しないトレンチ
を有し、前記トレンチにより前記第1の活性領域と前記第2の活性領域が形成され、誘導放出が前記第1の活性領域の中で引き起こされるように前記第1の活性領域に順方向バイアスが印加され、前記誘導放出の一部は前記第2の活性領域内に向けられ、前記第2の活性領域の光損失を変化させてレージングを生じさせる
半導体レーザ構造体。 - 請求項1記載の半導体レーザ構造体において、
前記第2の活性領域の光損失は、前記第2の活性領域へ順方向バイアス電流を印加することで変化させる
半導体レーザ構造体。 - 請求項1記載の半導体レーザ構造体において、
前記第2の活性領域の光損失は、前記第2の活性領域へ逆方向バイアス電圧を印加することで変化させる
半導体レーザ構造体。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/972,361 US6526083B1 (en) | 2001-10-09 | 2001-10-09 | Two section blue laser diode with reduced output power droop |
US09/972,361 | 2001-10-09 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002289449A Division JP2003158334A (ja) | 2001-10-09 | 2002-10-02 | 半導体レーザ構造体 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009182346A JP2009182346A (ja) | 2009-08-13 |
JP2009182346A5 JP2009182346A5 (ja) | 2009-09-24 |
JP5747241B2 true JP5747241B2 (ja) | 2015-07-08 |
Family
ID=25519563
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002289449A Pending JP2003158334A (ja) | 2001-10-09 | 2002-10-02 | 半導体レーザ構造体 |
JP2009119394A Expired - Fee Related JP5747241B2 (ja) | 2001-10-09 | 2009-05-18 | 半導体レーザ構造体 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002289449A Pending JP2003158334A (ja) | 2001-10-09 | 2002-10-02 | 半導体レーザ構造体 |
Country Status (4)
Country | Link |
---|---|
US (2) | US6526083B1 (ja) |
EP (1) | EP1304778A3 (ja) |
JP (2) | JP2003158334A (ja) |
BR (1) | BR0204088A (ja) |
Families Citing this family (40)
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US7368421B2 (en) * | 2001-06-27 | 2008-05-06 | Probiodrug Ag | Use of dipeptidyl peptidase IV inhibitors in the treatment of multiple sclerosis |
US6834068B2 (en) * | 2001-06-29 | 2004-12-21 | Matsushita Electric Industrial Co., Ltd. | Semiconductor laser device and method for fabricating the same |
US7067849B2 (en) * | 2001-07-17 | 2006-06-27 | Lg Electronics Inc. | Diode having high brightness and method thereof |
US6949395B2 (en) | 2001-10-22 | 2005-09-27 | Oriol, Inc. | Method of making diode having reflective layer |
US7148520B2 (en) | 2001-10-26 | 2006-12-12 | Lg Electronics Inc. | Diode having vertical structure and method of manufacturing the same |
US6724013B2 (en) * | 2001-12-21 | 2004-04-20 | Xerox Corporation | Edge-emitting nitride-based laser diode with p-n tunnel junction current injection |
US20050141800A1 (en) * | 2002-09-17 | 2005-06-30 | Mitsubishi Denki Kabushiki Kaisha | Waveguide semiconductor optical device and process of fabricating the device |
US7039078B2 (en) * | 2002-09-17 | 2006-05-02 | Nippon Telegraph And Telephone Corporation | Semiconductor optical modulator and laser with optical modulator |
KR100493089B1 (ko) * | 2002-12-17 | 2005-06-02 | 삼성전자주식회사 | 집적광학장치 |
JP2005019533A (ja) * | 2003-06-24 | 2005-01-20 | Oki Electric Ind Co Ltd | 光半導体素子,及び光半導体素子の製造方法 |
GB0424253D0 (en) * | 2004-05-20 | 2004-12-01 | Bookham Technology Plc | Laterally implanted electro-absorption modulated laser |
US20060126157A1 (en) * | 2004-12-14 | 2006-06-15 | Electronics And Telecommunications Research Institute | Monolithic integrated semiconductor modulator-SOA-LED broad band light source and method of fabricating the same |
US7751455B2 (en) * | 2004-12-14 | 2010-07-06 | Palo Alto Research Center Incorporated | Blue and green laser diodes with gallium nitride or indium gallium nitride cladding laser structure |
EP2797185B1 (en) * | 2005-06-22 | 2018-09-05 | MACOM Technology Solutions Holdings, Inc. | AIGalnN-based lasers produced using etched facet technology |
CN101882657A (zh) * | 2005-10-29 | 2010-11-10 | 三星电子株式会社 | 半导体器件及其制造方法 |
GB2432456A (en) * | 2005-11-21 | 2007-05-23 | Bookham Technology Plc | High power semiconductor laser diode |
GB2432715A (en) * | 2005-11-25 | 2007-05-30 | Sharp Kk | Nitride semiconductor light emitting devices |
GB2437593A (en) * | 2006-04-25 | 2007-10-31 | Jian-Jun He | A q-modulated semiconductor laser |
DE102006051745B4 (de) * | 2006-09-28 | 2024-02-08 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | LED-Halbleiterkörper und Verwendung eines LED-Halbleiterkörpers |
DE102007058723A1 (de) * | 2007-09-10 | 2009-03-12 | Osram Opto Semiconductors Gmbh | Lichtemittierende Struktur |
JP4769905B2 (ja) * | 2009-12-10 | 2011-09-07 | Dowaエレクトロニクス株式会社 | p型AlGaN層の製造方法およびIII族窒化物半導体発光素子 |
EP2402996A1 (en) * | 2010-06-30 | 2012-01-04 | Alcatel Lucent | A device comprising an active component and associated electrodes and a method of manufacturing such device |
CN103891067B (zh) * | 2011-11-01 | 2016-09-28 | 慧与发展有限责任合伙企业 | 直调式激光器 |
JP6032601B2 (ja) * | 2011-12-21 | 2016-11-30 | 住友電工デバイス・イノベーション株式会社 | 半導体光増幅器の制御方法及び測定方法、並びに半導体光増幅装置 |
US9450152B2 (en) | 2012-05-29 | 2016-09-20 | Micron Technology, Inc. | Solid state transducer dies having reflective features over contacts and associated systems and methods |
DE102013226270B3 (de) * | 2013-12-17 | 2015-04-02 | Forschungsverbund Berlin E.V. | Verfahren zum Ausbilden eines Metallkontakts auf einer Oberfläche eines Halbleiters und Vorrichtung mit einem Metallkontakt |
US10366883B2 (en) | 2014-07-30 | 2019-07-30 | Hewlett Packard Enterprise Development Lp | Hybrid multilayer device |
EP3320566A4 (en) * | 2015-07-10 | 2019-02-27 | The Regents of The University of California | HYBRID GROWTH PROCESS FOR III-NITRIDE TUNNEL TRANSITION DEVICES |
US10658177B2 (en) | 2015-09-03 | 2020-05-19 | Hewlett Packard Enterprise Development Lp | Defect-free heterogeneous substrates |
EP3360210A1 (en) * | 2015-10-05 | 2018-08-15 | King Abdullah University Of Science And Technology | An apparatus comprising a waveguide-modulator and laser-diode and a method of manufacture thereof |
US11088244B2 (en) | 2016-03-30 | 2021-08-10 | Hewlett Packard Enterprise Development Lp | Devices having substrates with selective airgap regions |
CN107664496B (zh) * | 2016-07-28 | 2021-08-17 | 罗伯特·博世有限公司,香港 | 具有适应性热控制功能的激光标线工具 |
US10193634B2 (en) | 2016-09-19 | 2019-01-29 | Hewlett Packard Enterprise Development Lp | Optical driver circuits |
US11095097B2 (en) | 2016-11-28 | 2021-08-17 | King Abdullah University Of Science And Technology | Integrated semiconductor optical amplifier and laser diode at visible wavelength |
KR102621843B1 (ko) * | 2016-12-23 | 2024-01-05 | 엘지이노텍 주식회사 | 반도체 소자 및 이를 포함하는 광 모듈 |
EP3379664B1 (en) * | 2017-03-20 | 2023-06-14 | Nokia Solutions and Networks Oy | A laser and method of controlling a laser to output a signal intermittently |
JP6932345B2 (ja) * | 2017-03-27 | 2021-09-08 | 学校法人 名城大学 | 半導体多層膜反射鏡及び垂直共振器型発光素子 |
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-
2001
- 2001-10-09 US US09/972,361 patent/US6526083B1/en not_active Ceased
-
2002
- 2002-09-25 EP EP02256639A patent/EP1304778A3/en not_active Withdrawn
- 2002-10-02 JP JP2002289449A patent/JP2003158334A/ja active Pending
- 2002-10-07 BR BR0204088-3A patent/BR0204088A/pt not_active Application Discontinuation
-
2003
- 2003-12-15 US US10/737,669 patent/USRE40230E1/en not_active Expired - Lifetime
-
2009
- 2009-05-18 JP JP2009119394A patent/JP5747241B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1304778A2 (en) | 2003-04-23 |
EP1304778A3 (en) | 2005-02-02 |
US6526083B1 (en) | 2003-02-25 |
JP2009182346A (ja) | 2009-08-13 |
JP2003158334A (ja) | 2003-05-30 |
BR0204088A (pt) | 2003-09-16 |
USRE40230E1 (en) | 2008-04-08 |
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