JP5732760B2 - Color filter substrate regeneration processing system - Google Patents

Description

  The present invention relates to a regenerating process for regenerating a color filter substrate that does not satisfy quality standards generated in a color filter manufacturing process used in a color liquid crystal display device and returning it to a state before the process. The present invention relates to a regeneration processing system for performing regeneration processing in a developing processing apparatus in the process.

  FIG. 1 is a cross-sectional view showing an example of a color filter used in a color liquid crystal display device. The color filter 1 includes a black matrix (hereinafter referred to as BM) 3, a red R colored pixel (hereinafter referred to as R pixel) 4-1, a green G colored pixel (hereinafter referred to as G pixel) 4-2, and a blue B on the substrate 2. In this case, a colored pixel (hereinafter referred to as B pixel) 4-3, a transparent electrode 5, a photo spacer (hereinafter referred to as PS) 6, and a vertical alignment (hereinafter referred to as VA) 7 are sequentially formed. It is.

  The manufacturing method of the color filter having the above structure is known to use a photolithography method, a printing method, and an ink jet method, and FIG. 2 is a flowchart showing steps of a commonly used photolithography method. . First, the color filter includes a step of forming a BM on the substrate (C1), a step of cleaning the substrate (C2), a step of applying and pre-drying a colored photoresist (C3), drying the colored photoresist, Pre-bake process for curing (C4), exposure process (C5), developing process (C6), curing process for colored photoresist (C7), film-forming process for transparent electrode (C8), PS , VA forming process (C9) is performed in this order.

  For example, when pixels are formed in the order of R pixel, G pixel, and B pixel, red R is applied between the process of cleaning the color filter substrate (C2) and the process of curing the colored photoresist (C7). The colored photoresist is changed in the order of green G and blue B, and the process is repeated three times to form R pixels, G pixels, and B pixels.

  The color filter to be manufactured requires high reliability, but as described above, there are many steps in the manufacturing process of the color filter. There is a current situation in which a defect due to chipping or the like occurs, resulting in a defective substrate that does not meet the quality standard, and the yield is reduced. Further, due to the increase in size of the color filter substrate accompanying the recent widespread use of large-screen liquid crystal televisions, disposal of the color filter substrate with a thickness of, for example, 1 mm or less and one side of 1 to 2 m or more is dangerous.

  In general, the defect inspection of the color filter substrate is performed after the PS and VA forming process (C9) which is the final process of the manufacturing process, and the process (C1) for forming BM which is an intermediate process. After the pre-baking step (C4) for drying and curing the colored photoresist, the step (C7) for curing the colored photoresist, and the step (C8) for forming the transparent electrode. However, a color filter substrate that does not meet the quality standard has been detected.

  Substrates that do not satisfy the quality standards generated in the color filter manufacturing process are recycled and returned to the manufacturing process for reuse. The reproduction process is roughly divided into two reproduction processes.

In the first regeneration process, the substrate is regenerated using a regeneration processing apparatus in a process dedicated to the regeneration process. In the process of regenerating using the reprocessing apparatus, the photoresist or transparent electrode film (ITO: Indium Tin Oxide) processed in single layer or multilayer in each process is peeled off using a plurality of chemical solutions, It is regenerated into raw glass and charged again from the first step.

  FIG. 3 shows an example of the flow and process contents of a regeneration process for regenerating a color filter substrate using the regeneration processing apparatus.

  The substrate detected by the color filter substrate defect inspection is then subjected to a regeneration process. That is, the reproduction of the color filter substrate is performed after forming the BM, or after applying a photoresist for forming a pattern for the R pixel, the G pixel, and the B pixel, or the BM, R pixel, G pixel, and B pixel. 3 is performed after forming the transparent electrode film, after forming the transparent electrode film, or after forming the PS and VA, but FIG. 3 shows the reproduction of the color filter substrate that does not satisfy the quality standards after forming the PS and VA films. The process and process contents are shown.

  First, the PS and VA films on the uppermost layer of the substrate are peeled and rinsed by alkali treatment (1) (K1), brush cleaning (K2), and water rinse (K3) (N1), (N2), (N3) . Next, after the ITO film of the intermediate layer is peeled off by acid treatment (K4) and rinsed with water (K5) and rinsed (N4) and (N5), the BM and RGB resin films as the lowermost layer are treated with alkali (2) ( The RGB and BM layers are peeled off and rinsed (N6), (N7), and (N8) by K6), brush cleaning (K7), and water rinse (K8), and finally finely applied to the color filter substrate by brush cleaning (K9). A small amount of remaining washing residue is removed (N9) and dried by draining (K10) (N10).

  The second regeneration process is an in-process regeneration process. FIG. 4 shows an example of the substrate flow and the configuration of the processing apparatus related to the in-process regeneration process. A substrate (not shown) is loaded from the loading device 10 to the coating device 11, and after the photoresist is coated by the coating device 11, the film thickness inspecting device 12 and the foreign material inspection device 13 use the film thickness defect and foreign material adhesion. A defect inspection is performed. The substrate on which no defect is found by the film thickness inspection machine 12 and the foreign matter inspection machine 13 is next subjected to exposure processing by the exposure device 14 and then developed by the developing device 16. Depending on the progress of the processing of the developing device 16, a part of the substrate exposed by the exposure device 14 is temporarily stored in the buffer device 15 (hereinafter referred to as buffering). The developed substrate is heated and dried by the next oven 17 to cure the photoresist. Thereafter, the substrate is transported to a coating apparatus, which is the next processing apparatus, or recovered by the recovery apparatus 18.

  The substrate in which the defect is found by the film thickness inspection machine 12 and the foreign substance inspection machine 13 is next buffered in the buffer device 15 as shown by an arrow 21 and then developed as shown by an arrow 21 while avoiding the exposure processing by the exposure device 14. The apparatus 16 is loaded and developed. In this case, the defective substrate developing process is a process of removing the photoresist applied to the substrate, and the defective substrate inspected by the film thickness inspection machine 12 and the foreign substance inspection machine 13 is buffered in the buffer device 15. Then, it is transported to the developing device 16 and the photoresist is stripped by a stripping recipe that is a recipe for the stripping process. The substrate that has been peeled off by the developing device 16 is then transported to the input device 10 as indicated by an arrow 22 or once recovered by the recovery device 18 as indicated by an arrow 23 and then input to the same equipment again. The

The photoresist stripping process by the stripping recipe in the developing device 16 strips the applied photoresist by extending the development processing time significantly beyond the normal development time. In this way, the in-process regeneration process uses a peeling recipe separately from the normal production recipe used for the normal substrate production process in order to extend the development processing time of the developing device 16 significantly than the normal development time. In the peeling recipe, the development processing time is set longer than that of the production recipe, but the development processing time is lengthened by slowing the conveying speed in the developing device. If a release substrate is inserted during normal production processing, the conveyance speed is different, so that the substrate during normal production processing becomes a substrate with poor quality. Therefore, after the development processing of the normal product is finished, the recipe is changed for peeling and the peeling processing is performed.

JP 2003-279915 A JP 2004-109968 A

  When regenerating a substrate using a reprocessing apparatus in the regenerative process, which is the first regenerating process, acid treatment or alkali treatment is stripped using a plurality of chemical solutions and regenerated into raw glass. There is a problem that the material cost loss required is large, and that the substrate is damaged when the substrate is loaded into the recycling processing apparatus or within the recycling processing apparatus.

  For this reason, it is desirable to perform an in-process regeneration process instead of regenerating the substrate using a regeneration processing apparatus. However, in the case of an in-process regeneration process, the normal production processed product and the release processed product are simultaneously placed in the developing device. Since it cannot flow, it is necessary to stop the facilities in the color filter production process in order to perform the in-process regeneration process. For this reason, equipment operation loss will occur. This is because it is necessary to change the processing speed of the developing device between normal production processing and in-process regeneration processing. After the development processing of the production processing substrate, it is necessary to change to a peeling recipe and input a defective substrate. For this reason, it is not possible to input a substrate for the release substrate processing until the production processing substrate processed in the development processing is discharged out of the development processing.

  In addition, there is a problem in that work loss occurs due to manual input control to the developing device, and defective substrates are generated due to forgetting to reset the transport speed in the developing device.

  Therefore, the present invention processes a part of the substrate to be regenerated by the regenerative processing apparatus in place of the in-process regeneration, further increases the equipment efficiency, reduces the chemical solution required for the regenerative processing by the regenerative processing apparatus, and performs the regenerative processing. It is an object of the present invention to provide a color filter substrate regeneration processing system that can prevent the occurrence of cracking of the substrate at the time.

The invention according to claim 1 of the present invention, even without low, a dosing device for introducing the substrate into the manufacturing process, a coating apparatus for coating a photoresist on a substrate, the film thickness inspection machine for inspecting the thickness of the photoresist When a foreign substance inspection apparatus for inspecting a foreign matter adhering to the substrate, an exposure apparatus for exposing a substrate, a buffer unit for temporarily storing the defective substrate a defect is found by the film thickness inspection machine and particle inspection apparatus, wherein A color filter substrate regeneration processing system for performing development processing for stripping the photoresist with the developing device for a defective substrate housed in the buffer device in a color filter manufacturing process having a developing device for developing the photoresist; In the following 1. ~ 3. If the provided system control unit a defective substrate from pre Symbol housed issuing payout instruction to the developing device in step, the buffer device receives the payout instruction, characterized in that the interrupt-on the defective substrate to said developing device The color filter substrate regeneration processing system.
1. The substrate dispensing interval time for dispensing substrates from each device between the preset starting device and the buffer device in the color filter manufacturing process is collected.
2. A delay time is determined from a difference between a substrate discharge interval time for discharging the substrate of each apparatus and a preset substrate discharge reference time in the starting apparatus, and a total sum of the delay times is determined.
3. When the sum of the delay times is longer than the time required for the peeling process in the developing device, the buffer device is instructed to deliver the stored defective substrate to the developing device.

In the invention according to claim 2 of the present invention, means for peeling off the photoresist applied to the defective substrate paid out from the buffer device includes:
2. The color filter substrate regeneration processing system according to claim 1, wherein the photoresist is removed by lowering a conveying speed of the developing device and extending a developing time.

The invention according to claim 3 of the present invention, reproduction of a color filter substrate according to claim 1 or 2, characterized in that the conveying speed of the developing device is set on the basis of the previously registered peeling process recipe It is a processing system.

Invention, the color filter according to any one of claims 1 to 3, the developing device characterized in that it comprises a pin-up mechanism for moving the defective substrate after receiving the defective substrate upwards according to claim 4 of the present invention This is a substrate recycling processing system.

In the invention according to claim 5 of the present invention, the means for judging the payout destination of the substrate from which the photoresist has been peeled,
If the lot number of the substrate on which the photoresist has been peeled off is the same as the lot number of the substrate on the input device and the payout destination instruction request, issue a payout instruction to the coating device,
When the lot number of the substrate on the loading device is different from the lot number of the substrate from which the photoresist requested to be dispensed is peeled off, a dispensing instruction is issued to the collecting device that stores the substrate. The color filter substrate regeneration processing system according to claim 1.

  ADVANTAGE OF THE INVENTION According to this invention, while improving the efficiency of a color filter manufacturing equipment, it becomes possible to reduce the chemical | medical solution required for the reproduction | regeneration processing by a reproduction | regeneration exclusive processing apparatus, and generation | occurrence | production of the crack of the board | substrate at the time of a reproduction | regeneration exclusive process. In addition, it is possible to prevent errors in manual setting of the developing device, and as a result, it is possible to prevent generation of defective products due to speed setting errors.

The figure which showed an example of the color filter used for a color liquid crystal display device in a cross section. The flowchart of the process of the photolithographic method generally used. The figure which shows an example of the flow of a reproduction | regeneration process of the board | substrate for color filters, and process content. The figure which shows an example of the structure of the flow of the board | substrate concerning the reproduction process in a process, and a processing apparatus. The figure which shows an example of the structure of the color filter manufacturing equipment with which the reproduction | regeneration processing system of the substrate for color filters concerning this invention is applied, and the flow of a board | substrate. The figure which shows an example of the implementation environment of the reproduction | regeneration processing system of the board | substrate for color filters which concerns on this invention The figure for demonstrating issuing of the discharge | payout instruction | indication of the board | substrate with a peeling flag buffered by the buffer apparatus. The operation | movement flowchart of the reproduction | regeneration processing system of the board | substrate for color filters concerning this invention. FIG. 2 is a schematic diagram illustrating a developing device according to the present invention. The figure for demonstrating issuing of the instruction | indication of the board | substrate discharge destination of the reproduction | regeneration processing system of the substrate for color filters concerning this invention.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment for implementing a color filter substrate regeneration processing system according to the invention will be described with reference to the drawings.

  FIG. 5 is a diagram showing an example of the configuration of a color filter manufacturing facility and the flow of the substrate to which the color filter substrate regeneration processing system according to the embodiment of the present invention is applied. A substrate (not shown) is loaded into a coating device 31 by a loading device 30 and coated with a photoresist, and then a film thickness inspection device 32 and a foreign material inspection device 33 detect a photoresist film thickness defect or a foreign material adhesion failure. The

The substrate for which no defect is found by the film thickness inspection machine 32 and the foreign matter inspection machine 33 is then subjected to exposure processing by the exposure device 34 and then developed by the developing device 36. A part of the substrate subjected to the exposure processing by the exposure device 34 is temporarily buffered in the buffer device 35 depending on the progress of the processing of the developing device 36. The developed substrate is heated and dried by the next oven 37 to cure the photoresist. Then the substrate is sent to branching unit 39, it is collected in the collection apparatus 38 as shown in the next processing apparatus in which either Ru is conveyed to the coating device or the arrow 44, as indicated by arrow 43.

  The substrate in which the defect is found by the film thickness inspection machine 32 and the foreign matter inspection machine 33 is conveyed to the buffer device 35 and buffered as indicated by the arrow 41 while avoiding the exposure processing by the next exposure device 34. . The substrate buffered in the buffer device 35 is carried out from the buffer device 35 to the developing device 36 in accordance with a defective substrate discharge instruction command described later, and is developed. The development process in this case is a process of removing the photoresist applied to the substrate, and the photoresist is removed by a peeling recipe. The substrate that has been peeled off by the developing device 36 is then transferred to the branching device 39 as indicated by an arrow 42. In the branching device 39, in accordance with a payout instruction command issued by means for determining the payout destination of the substrate from which the photoresist has been peeled, which will be described later, the peel-off processing substrate is circulated in the process as indicated by an arrow 43, and the next coating process is performed. Or is once recovered by the recovery device 39 as indicated by an arrow 44.

  FIG. 6 shows an example of the implementation environment of the color filter substrate regeneration processing system according to the present invention. The color filter substrate regeneration processing system 50 includes a loading device 30, a coating device 31, a film thickness inspection device 32, a foreign matter inspection device 33, an exposure device 34, a buffer device 35, a developing device 36, an oven 37, a recovery device 38, and a branch. The device group 51 includes devices 39, and the device group 51 is connected to the system control unit 52 via the network 53 so as to be capable of bidirectional communication.

  A processing flow of the color filter substrate regeneration processing system according to the present invention will be described with reference to FIGS. The system control unit 52 makes a request to remove the applied photoresist on the substrate on which the film thickness inspection machine 32 or the foreign matter inspection machine 33 has detected a quality abnormality. In this case, each device in the device group 51 and the system control unit 52 manage board information associated with the board. Substrate information is tracked and managed between devices as the substrate moves. The system control unit 52 collects and manages the substrate information during the flow in the process. The film thickness inspection device 32 and the foreign matter inspection device 33 update the “substrate information management address indicating an in-process reproduction request” managed by the device group 51 and the system control unit 52 for the substrate determined to be abnormal in quality. In the following description, the substrate information managed in order to perform the “request for stripping the coated photoresist” is referred to as a “stripping flag”.

A case where the film thickness inspection machine 32 and the foreign matter inspection machine 33 arranged in the device group 51 issue a peeling request will be described below.

In the case of a request to remove the coated photoresist by the film thickness inspection machine 32,
(1) Measure the photoresist film thickness after coating. (2) If the film thickness is abnormal, the substrate information is used when the substrate is discharged to the downstream device (the downstream device in this case indicates the foreign matter inspection machine 33). A peeling flag is given.

In the case of a request to remove the coated photoresist by the foreign matter inspection machine 33,
(1) Measure the “number of foreign matter” and “foreign matter size” of the substrate to be inspected. (2) If the detected “number of foreign matter” and “foreign matter size” are out of process standard, Indicates a peeling flag to the substrate information when the substrate is dispensed to the exposure apparatus 34).

  Next, when the exposure apparatus 34 receives the substrate with the peeling flag from the upstream apparatus, the exposure apparatus 34 pays out to the downstream apparatus (in this case, the buffer apparatus 36) without performing the exposure process. The buffer device 36 buffers the substrate to which the peeling flag is given from the upstream device.

  The buffer device 35 continues the buffering until the system controller 52 issues an instruction to pay out the substrate to which the peeling flag is given. The system control unit 52 issues an instruction to pay out the buffered substrate with the separation flag to the buffer device 35.

  Issuing a payout instruction for a substrate with a peeling flag buffered in the buffer device 35 will be described with reference to FIG. The system control unit 52 performs temporary maintenance on the developing device 36 that occurs in the case of maintenance such as “cleaning of the exposure mask used in the exposure apparatus” and “pipe cleaning of the coating apparatus”, or when the apparatus is stopped due to a setting change of the apparatus. When the substrate supply is stopped or delayed, a substrate dispensing instruction is issued to the buffer device 35 so that the developing device 36 can strip the photoresist on the substrate with the stripping flag using the time.

  The system control unit 52 issues an instruction for paying out a substrate with a separation flag to the buffer device 35 based on the following “collection / management information” obtained from the device group 51.

The “collection / management information” includes the following information.
(1) T (t) is a substrate payout interval time (actual time) of a certain starting device 70 and is located upstream of the developing device 36 and the buffer device 35. Among the devices existing in the device group 51, such as an attached RB (robot), a device in which the substrate payout interval is kept constant is selected as the starting device 70. The selected starting point device 70 collects and manages the interval at which the substrate is discharged downstream (between the time when the substrate is discharged and the next substrate is discharged downstream) from the starting point device 70.
(2) E (t) is a reference time (set time) for delivering the substrate to the downstream device in the starting point device 70, and the set value is set by the system control unit 52.
(3) Tn (t) is the substrate payout interval time (real time) (n = 1 to n) of each device located between the starting device 70 and the buffer device 35, and the starting device 70 and the buffer device 35. Collecting and managing the substrate discharge interval time of each device located between the devices.
(4) En (t) is a payout reference time (set time) (n = 1 to n) to the downstream device of each device located between the starting device 70 and the buffer device 35, and The substrate delivery reference time of each device located between the buffer devices 35 is collected and managed from each device. The set value may be set by the system control unit 52.
(5) Σ (En (t) −Tn (t)) is calculated from the reference time (En (t)) to the downstream device in each device located between the starting device 70 and the buffer device 35. Sum of values obtained by subtracting time (Tn (t)) (however, the device (E
This variable is defined only for n (t) −Tn (t)> 0, n = 1 to n). ).
(6) α is a set value of the processing time required for the developing device to perform the peeling process when performing in-process regeneration.

  The flow of the instruction for paying out a substrate with a separation flag executed by the system control unit 52 from the “collection / management information” shown above will be described with reference to the flowchart of FIG. 8 and FIG.

  After the start (H1), if the substrate payout interval in the starting device 70 is “Tn (t)> E (t)” (YES in H2), the production substrate input interval to the developing device 36 may be disturbed. . In this case, the process proceeds to step (H3), and the control system unit 51 monitors the processing status of each device located from the starting device 70 to the buffer device 35, thereby Σ (En (t) −Tn (t)). Is calculated. As a result, the total sum of “delay time of substrate processing time” in each device between the starting device 70 and the buffer device 35 is calculated. If this value is larger than α (YES in H3), it is determined that there is a margin for performing the peeling process in the developing device 36. Next, when a substrate with a separation flag is present in the buffer device 35 (YES in H4), an instruction to pay out the substrate with a separation flag is issued to the buffer device 35 (H5). Thereafter, the process proceeds to step (H3). In this case, even if there is a production substrate in the upstream apparatus, the substrate with the separation flag is interrupted to the developing device 36 based on the determination made in step (H3).

  If NO in Steps (H2), (H3), and (H4), the process proceeds to Step (H6), and the instruction for paying out the substrate with the separation flag is not issued to the buffer device 35 (H5). Move to H2). The flow of the instruction to pay out the substrate with the peeling flag is always operated by the system control unit 52 based on the “collection / management information”.

  When the developing device 36 receives a substrate with a peeling flag from an upstream device (in this case, indicates the buffer device 35), the developing conditions such as the development processing time are changed from those for normal production processing (production recipe) to within the process. Change to a recipe for reprocessing (peeling recipe).

  FIG. 9 is a schematic diagram showing the developing device 36 according to the present invention. The developing device 36 develops the developer by spraying the developer solution from the developer jet nozzle 54 onto the substrate conveyed on the conveyor in the developing device. Is a developing device for performing The developing device 36 holds the substrate 57, to which the peeling flag is given, above the conveying conveyor 58 by raising the pin 56 in the direction of the arrow 60 (pin-up) at the substrate receiving position (entrance of the developing device 36). And a mechanism for spraying the developer onto the substrate 57 on which the photoresist is peeled off. On the other hand, the substrate 59 to be processed is developed by the developer solution ejected by the developer ejecting nozzle 54 while being transported in the direction indicated by the arrow 60. In this way, “production substrates” and “release substrates” having different processing recipes can be processed simultaneously without changing the conveyor conveyance speed.

  In the developing device 36, an in-process regeneration recipe for processing a substrate with a peeling flag is set in advance. When the received substrate is a substrate with a peeling flag, the developing device 36 changes the normal production recipe to an in-process reproduction recipe. If a substrate without a peeling flag is received, the set recipe is returned to the normal production recipe.

Based on an instruction from the system control unit 52, the branching device 39 pays out the substrate from which the photoresist has been peeled according to the substrate payout destination instruction. Issuance of a substrate payout destination instruction to the branch device 39 will be described with reference to FIG. The system control unit 52 circulates the release substrate from which the photoresist has been peeled off as shown by the arrow 43 in the process and performs the coating process again, or temporarily collects it in the cassette of the collecting device as shown by the arrow 44. Is determined on the basis of the processing status of the processing apparatus in the manufacturing process, and an instruction for the release destination of the separation substrate is issued to the branching device 39.

  The branching device 39 transmits a “substrate delivery destination instruction request” to the system control unit 52 when receiving the substrate to which the peeling flag is assigned. In response to the “substrate payout destination instruction request” from the branching device 39, the system control unit 52 instructs the payout destination by the following method from the information of the substrate flowing in the process.

  Based on the data in the substrate data management table shown in Table 1, the system control unit 51 determines the substrate lot number (La) on the loading device 30 and the separation substrate having the “substrate delivery destination instruction request” in the branch device 39. The lot number (Lb) is verified. Note that, when there is no substrate on the loading device 30, La is the last of the substrates flowing in the process.

  In the substrate data management table shown in Table 1, there is a substrate management number indicating the serial number of the substrate, a lot number indicating a management number for each product type, a peeling flag which is information given to the substrate to be peeled, and a substrate in the process. Each data of the board position indicating the in-stock position is included.

  As a result of the collation, when La = Lb, the system control unit 51 issues an instruction (circulation instruction) to dispense the substrate to the coating device 31 to the branching device 39 as indicated by an arrow 43. On the other hand, in the case of La ≠ Lb, an instruction is given to pay out the substrate of the branching device 39 to the collecting device 38 as shown in FIG. In this way, the processing of all the substrates is completed.

  As described above, according to the color filter substrate regeneration processing system of the present invention, it is determined whether or not there is a surplus time for performing the peeling process in the developing device. It is possible to replace part of the substrate that has been reclaimed by the equipment with in-process regeneration, and to improve equipment efficiency by automatically setting the development device to normal production and in-process regeneration. In addition, it is possible to prevent the occurrence of defective substrates due to the operator forgetting to reset the developing device settings, and further reduce the chemicals required for the regeneration processing by the regeneration-only processing device and cause the substrate to crack during the regeneration-only processing. Can be prevented.

DESCRIPTION OF SYMBOLS 1 ... Color filter 2 ... Substrate 3 ... Black matrix (BM)
4-1 ... Red R colored pixels (R pixels)
4-2 ... Green G coloring pixel (G pixel)
4-3 ... Blue B colored pixels (B pixels)
5 ... Transparent electrode 6 ... Photospacer (PS)
7 ... Vertical alignment (VA)
DESCRIPTION OF SYMBOLS 10 ... Loading apparatus 11 ... Coating apparatus 12 ... Film thickness inspection machine 13 ... Foreign substance inspection machine 14 ... Exposure apparatus 15 ... Buffer apparatus 16 ... Development apparatus 17 ... Oven 18 ... Recovery device 21 ... An arrow 22 indicating a direction in which a substrate in which a defect is found is transported 22 ... An arrow 23 indicating a direction in which a peeled substrate is transported 23 ... A substrate becomes a recovery device Arrow 30 indicating transport direction to be collected ... Input device 31 ... Coating device 32 ... Film thickness inspection device 33 ... Foreign matter inspection device 34 ... Exposure device 35 ... Buffer device 36 ...・ Developing device 37 ... Oven 38 ... Recovery device 39 ... Branching device 41 ... Arrow 42 indicating the direction in which the substrate in which the defect is found is conveyed 42 ... The peeled substrate is conveyed Arrow 43 indicating the direction to be transported from the branching device to the coating device Arrow 44 indicating the direction in which the substrate is collected Arrow 50 indicating the transport direction in which the substrate is recovered from the branching device to the recovery device ... Color filter substrate regeneration processing system 51 ... Device group 52 ... System control Portion 53 ... Network 54 ... Developer spray nozzle 56 ... Pin 57 ... Substrate 58 with peeling flag ... Conveyor 59 ... Substrate 60 to be processed ... Pin An arrow 61 indicating the direction in which the substrate is raised An arrow indicating the substrate transport direction in the developing device

Claims (5)

Even without a small,
A loading device for loading the substrate into the manufacturing process;
A coating apparatus for applying a photoresist to a substrate;
A film thickness inspection machine for inspecting the film thickness of the photoresist;
A foreign matter inspection machine for inspecting foreign matter adhering to the substrate;
An exposure apparatus for exposing a substrate,
A buffer device for temporarily storing defective substrates in which defects are found by the film thickness inspection machine and the foreign substance inspection machine;
A developing device for developing the photoresist;
A color filter substrate regeneration processing system for performing a developing process for peeling off the photoresist with the developing device in a defective substrate housed in the buffer device in a color filter manufacturing process having:
1. ~ 3. If the provided system control unit a defective substrate from pre Symbol housed issuing payout instruction to the developing device in step, the buffer device receives the payout instruction, characterized in that the interrupt-on the defective substrate to said developing device A color filter substrate regeneration processing system.
1. The substrate dispensing interval time for dispensing substrates from each device between the preset starting device and the buffer device in the color filter manufacturing process is collected.
2. A delay time is determined from a difference between a substrate discharge interval time for discharging the substrate of each apparatus and a preset substrate discharge reference time in the starting apparatus, and a total sum of the delay times is determined.
3. When the sum of the delay times is longer than the time required for the peeling process in the developing device, the buffer device is instructed to deliver the stored defective substrate to the developing device. Means for peeling off the photoresist applied to the defective substrate paid out from the buffer device,
2. The color filter substrate regeneration processing system according to claim 1, wherein the photoresist is removed by lowering a conveying speed of the developing device and extending a developing time.         The color filter substrate regeneration processing system according to claim 1, wherein the conveyance speed of the developing device is set based on a pre-registered peeling processing recipe.         4. The color filter substrate regeneration processing system according to claim 1, wherein the developing device has a pin-up mechanism for moving the defective substrate upward after receiving the defective substrate. Means for determining the payout destination of the substrate from which the photoresist has been peeled off,
If the lot number of the substrate on which the photoresist has been peeled off is the same as the lot number of the substrate on the input device and the payout destination instruction request, issue a payout instruction to the coating device,
When the lot number of the substrate on the loading device is different from the lot number of the substrate from which the photoresist requested to be dispensed is peeled off, a dispensing instruction is issued to the collecting device that stores the substrate. The reproduction | regeneration processing system of the substrate for color filters of Claim 1.

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