JP5728029B2 - 改良された慣性要素を利用する微小電子機械の磁界センサ - Google Patents

改良された慣性要素を利用する微小電子機械の磁界センサ Download PDF

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JP5728029B2
JP5728029B2 JP2012552915A JP2012552915A JP5728029B2 JP 5728029 B2 JP5728029 B2 JP 5728029B2 JP 2012552915 A JP2012552915 A JP 2012552915A JP 2012552915 A JP2012552915 A JP 2012552915A JP 5728029 B2 JP5728029 B2 JP 5728029B2
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capacitor
mems
lever arm
substrate
capacitor portion
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Japanese (ja)
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JP2013519880A5 (enExample
JP2013519880A (ja
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チェン，ポー−ジュイ
エッカルト，マルティン
フランケ，アクセル
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Measuring Magnetic Variables (AREA)
JP2012552915A 2010-02-10 2011-02-07 改良された慣性要素を利用する微小電子機械の磁界センサ Active JP5728029B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/703,516 2010-02-10
US12/703,516 US8418556B2 (en) 2010-02-10 2010-02-10 Micro electrical mechanical magnetic field sensor utilizing modified inertial elements
PCT/US2011/023927 WO2011100199A1 (en) 2010-02-10 2011-02-07 Micro electrical mechanical magnetic field sensor utilizing modified inertial elements

Publications (3)

Publication Number Publication Date
JP2013519880A JP2013519880A (ja) 2013-05-30
JP2013519880A5 JP2013519880A5 (enExample) 2014-03-06
JP5728029B2 true JP5728029B2 (ja) 2015-06-03

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JP2012552915A Active JP5728029B2 (ja) 2010-02-10 2011-02-07 改良された慣性要素を利用する微小電子機械の磁界センサ

Country Status (7)

Country Link
US (1) US8418556B2 (enExample)
EP (1) EP2534498B1 (enExample)
JP (1) JP5728029B2 (enExample)
KR (1) KR101755747B1 (enExample)
CN (1) CN102812375B (enExample)
TW (1) TWI529403B (enExample)
WO (1) WO2011100199A1 (enExample)

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CN102680917B (zh) * 2012-04-28 2014-09-17 中国科学院上海微系统与信息技术研究所 一种微机械磁场传感器及其制备方法
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US8943888B2 (en) * 2013-01-09 2015-02-03 M-Tech Instrument Corporation (Holding) Limited Micromachined flow sensor integrated with flow inception detection and make of the same
ITTO20130653A1 (it) * 2013-07-31 2015-02-01 Milano Politecnico Sensore magnetico includente un trasduttore basato sulla forza di lorentz pilotato ad una frequenza diversa dalla frequenza di risonanza, e metodo di pilotaggio di un trasduttore basato sulla forza di lorentz
CN103472413B (zh) * 2013-09-30 2015-08-05 东南大学 一种用于测量磁场方向的微机电系统磁场传感器
TWI538096B (zh) 2013-12-31 2016-06-11 財團法人工業技術研究院 具ｐｎ界面的微機電裝置
US9535137B2 (en) * 2014-08-22 2017-01-03 Ams International Ag Membrane based magnetometer
WO2016075761A1 (ja) * 2014-11-11 2016-05-19 株式会社日立製作所 加速度センサ
US10197590B2 (en) * 2014-11-17 2019-02-05 The Royal Institution For The Advancement Of Learning/Mcgill University Combined magnetometer accelerometer MEMS devices and methods
US10466313B2 (en) 2014-12-12 2019-11-05 Korea Research Institute Of Standards And Science Magnetic field sensor and apparatus for measuring magnetic field
US9840409B2 (en) * 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
WO2017061640A1 (ko) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems 장치, 이를 포함하는 mems 패키지 및 사용자 단말기
US10761622B2 (en) * 2016-03-29 2020-09-01 Cirque Corporation Pressure sensing on a touch sensor using capacitance
US10802040B2 (en) 2016-04-18 2020-10-13 Hitachi, Ltd. Acceleration sensor
CN107271930B (zh) * 2017-06-09 2019-11-01 合肥工业大学 一种折合梁结构的mems磁场传感器及制备方法
CN107329099B (zh) * 2017-06-22 2019-08-20 东南大学 一种扭摆平移式微机电磁场传感器
CN107356889B (zh) * 2017-06-22 2019-08-20 东南大学 一种扭摆式叉指微机电磁场传感器
DE102017219438B3 (de) 2017-10-30 2019-03-28 Te Connectivity Germany Gmbh Stromsensor und Verfahren zum Detektieren eines elektrischen Stromflusses, sowie Ladekontrolleinheit
US10895457B2 (en) * 2018-03-08 2021-01-19 Analog Devices, Inc. Differential z-axis resonant accelerometry
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
CN118169620B (zh) * 2024-05-15 2024-07-26 浙江大学 一种可调灵敏度的mems多级同步磁强计

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US5117166A (en) * 1991-03-28 1992-05-26 General Electric Company Chopper circuit for dynamic braking in an electric power conversion system
US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5517093A (en) * 1993-12-16 1996-05-14 General Electric Company Braking grid isolation for locomotive traction motor control system
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
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US6664786B2 (en) * 2001-07-30 2003-12-16 Rockwell Automation Technologies, Inc. Magnetic field sensor using microelectromechanical system
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Also Published As

Publication number Publication date
CN102812375B (zh) 2015-09-09
KR101755747B1 (ko) 2017-07-07
US20110192229A1 (en) 2011-08-11
US8418556B2 (en) 2013-04-16
TWI529403B (zh) 2016-04-11
TW201217820A (en) 2012-05-01
EP2534498A1 (en) 2012-12-19
JP2013519880A (ja) 2013-05-30
EP2534498B1 (en) 2013-10-30
KR20130025366A (ko) 2013-03-11
CN102812375A (zh) 2012-12-05
WO2011100199A1 (en) 2011-08-18

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