CN102812375B - 利用改进惯性元件的微机电磁场传感器 - Google Patents

利用改进惯性元件的微机电磁场传感器 Download PDF

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Publication number
CN102812375B
CN102812375B CN201180014988.1A CN201180014988A CN102812375B CN 102812375 B CN102812375 B CN 102812375B CN 201180014988 A CN201180014988 A CN 201180014988A CN 102812375 B CN102812375 B CN 102812375B
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CN
China
Prior art keywords
capacitor
rod member
pivot
longitudinal axis
voltage difference
Prior art date
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Expired - Fee Related
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CN201180014988.1A
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English (en)
Chinese (zh)
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CN102812375A (zh
Inventor
P-J·陈
M·埃卡特
A·弗兰克
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Robert Bosch GmbH
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Robert Bosch GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/028—Electrodynamic magnetometers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Measuring Magnetic Variables (AREA)
CN201180014988.1A 2010-02-10 2011-02-07 利用改进惯性元件的微机电磁场传感器 Expired - Fee Related CN102812375B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/703,516 2010-02-10
US12/703,516 US8418556B2 (en) 2010-02-10 2010-02-10 Micro electrical mechanical magnetic field sensor utilizing modified inertial elements
PCT/US2011/023927 WO2011100199A1 (en) 2010-02-10 2011-02-07 Micro electrical mechanical magnetic field sensor utilizing modified inertial elements

Publications (2)

Publication Number Publication Date
CN102812375A CN102812375A (zh) 2012-12-05
CN102812375B true CN102812375B (zh) 2015-09-09

Family

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CN201180014988.1A Expired - Fee Related CN102812375B (zh) 2010-02-10 2011-02-07 利用改进惯性元件的微机电磁场传感器

Country Status (7)

Country Link
US (1) US8418556B2 (enExample)
EP (1) EP2534498B1 (enExample)
JP (1) JP5728029B2 (enExample)
KR (1) KR101755747B1 (enExample)
CN (1) CN102812375B (enExample)
TW (1) TWI529403B (enExample)
WO (1) WO2011100199A1 (enExample)

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CN102680917B (zh) * 2012-04-28 2014-09-17 中国科学院上海微系统与信息技术研究所 一种微机械磁场传感器及其制备方法
FR2992066B1 (fr) * 2012-06-15 2014-07-11 Commissariat Energie Atomique Capteur de champ magnetique a force de laplace
US8943888B2 (en) * 2013-01-09 2015-02-03 M-Tech Instrument Corporation (Holding) Limited Micromachined flow sensor integrated with flow inception detection and make of the same
ITTO20130653A1 (it) * 2013-07-31 2015-02-01 Milano Politecnico Sensore magnetico includente un trasduttore basato sulla forza di lorentz pilotato ad una frequenza diversa dalla frequenza di risonanza, e metodo di pilotaggio di un trasduttore basato sulla forza di lorentz
CN103472413B (zh) * 2013-09-30 2015-08-05 东南大学 一种用于测量磁场方向的微机电系统磁场传感器
TWI538096B (zh) 2013-12-31 2016-06-11 財團法人工業技術研究院 具ｐｎ界面的微機電裝置
US9535137B2 (en) * 2014-08-22 2017-01-03 Ams International Ag Membrane based magnetometer
WO2016075761A1 (ja) * 2014-11-11 2016-05-19 株式会社日立製作所 加速度センサ
US10197590B2 (en) * 2014-11-17 2019-02-05 The Royal Institution For The Advancement Of Learning/Mcgill University Combined magnetometer accelerometer MEMS devices and methods
US10466313B2 (en) 2014-12-12 2019-11-05 Korea Research Institute Of Standards And Science Magnetic field sensor and apparatus for measuring magnetic field
US9840409B2 (en) * 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
WO2017061640A1 (ko) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems 장치, 이를 포함하는 mems 패키지 및 사용자 단말기
US10761622B2 (en) * 2016-03-29 2020-09-01 Cirque Corporation Pressure sensing on a touch sensor using capacitance
US10802040B2 (en) 2016-04-18 2020-10-13 Hitachi, Ltd. Acceleration sensor
CN107271930B (zh) * 2017-06-09 2019-11-01 合肥工业大学 一种折合梁结构的mems磁场传感器及制备方法
CN107329099B (zh) * 2017-06-22 2019-08-20 东南大学 一种扭摆平移式微机电磁场传感器
CN107356889B (zh) * 2017-06-22 2019-08-20 东南大学 一种扭摆式叉指微机电磁场传感器
DE102017219438B3 (de) 2017-10-30 2019-03-28 Te Connectivity Germany Gmbh Stromsensor und Verfahren zum Detektieren eines elektrischen Stromflusses, sowie Ladekontrolleinheit
US10895457B2 (en) * 2018-03-08 2021-01-19 Analog Devices, Inc. Differential z-axis resonant accelerometry
JP7410935B2 (ja) 2018-05-24 2024-01-10 ザ リサーチ ファウンデーション フォー ザ ステイト ユニバーシティー オブ ニューヨーク 容量性センサ
CN118169620B (zh) * 2024-05-15 2024-07-26 浙江大学 一种可调灵敏度的mems多级同步磁强计

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US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US6215318B1 (en) * 1998-06-18 2001-04-10 Robert Bosch Gmbh Micromechanical magnetic field sensor
US6392220B1 (en) * 1998-09-02 2002-05-21 Xros, Inc. Micromachined members coupled for relative rotation by hinges
CN101216539A (zh) * 2007-01-03 2008-07-09 通用电气公司 用于校准基于微机电系统的传感器的方法和系统

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US5563343A (en) * 1993-05-26 1996-10-08 Cornell Research Foundation, Inc. Microelectromechanical lateral accelerometer
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US6215318B1 (en) * 1998-06-18 2001-04-10 Robert Bosch Gmbh Micromechanical magnetic field sensor
US6392220B1 (en) * 1998-09-02 2002-05-21 Xros, Inc. Micromachined members coupled for relative rotation by hinges
CN101216539A (zh) * 2007-01-03 2008-07-09 通用电气公司 用于校准基于微机电系统的传感器的方法和系统

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MEMS磁场传感器的研究进展;陈洁灯;《电子器件》;20061231;第29卷(第4期);第1384-1388页 *

Also Published As

Publication number Publication date
KR101755747B1 (ko) 2017-07-07
US20110192229A1 (en) 2011-08-11
US8418556B2 (en) 2013-04-16
TWI529403B (zh) 2016-04-11
JP5728029B2 (ja) 2015-06-03
TW201217820A (en) 2012-05-01
EP2534498A1 (en) 2012-12-19
JP2013519880A (ja) 2013-05-30
EP2534498B1 (en) 2013-10-30
KR20130025366A (ko) 2013-03-11
CN102812375A (zh) 2012-12-05
WO2011100199A1 (en) 2011-08-18

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