JP5709535B2 - 電子ビーム描画装置、およびそれを用いた物品の製造方法 - Google Patents

電子ビーム描画装置、およびそれを用いた物品の製造方法 Download PDF

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Publication number
JP5709535B2
JP5709535B2 JP2011001991A JP2011001991A JP5709535B2 JP 5709535 B2 JP5709535 B2 JP 5709535B2 JP 2011001991 A JP2011001991 A JP 2011001991A JP 2011001991 A JP2011001991 A JP 2011001991A JP 5709535 B2 JP5709535 B2 JP 5709535B2
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Japan
Prior art keywords
electron beam
electron
holes
main body
lens
Prior art date
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Expired - Fee Related
Application number
JP2011001991A
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English (en)
Japanese (ja)
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JP2012146731A5 (enExample
JP2012146731A (ja
Inventor
田中　一郎
一郎 田中
三宅　明
明 三宅
高瀬　博光
博光 高瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2011001991A priority Critical patent/JP5709535B2/ja
Priority to US13/343,752 priority patent/US8698095B2/en
Publication of JP2012146731A publication Critical patent/JP2012146731A/ja
Publication of JP2012146731A5 publication Critical patent/JP2012146731A5/ja
Application granted granted Critical
Publication of JP5709535B2 publication Critical patent/JP5709535B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3177—Multi-beam, e.g. fly's eye, comb probe
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/022—Avoiding or removing foreign or contaminating particles, debris or deposits on sample or tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/049—Focusing means
    • H01J2237/0492—Lens systems
    • H01J2237/04924—Lens systems electrostatic

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • General Physics & Mathematics (AREA)
  • Epidemiology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Atmospheric Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Environmental & Geological Engineering (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP2011001991A 2011-01-07 2011-01-07 電子ビーム描画装置、およびそれを用いた物品の製造方法 Expired - Fee Related JP5709535B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2011001991A JP5709535B2 (ja) 2011-01-07 2011-01-07 電子ビーム描画装置、およびそれを用いた物品の製造方法
US13/343,752 US8698095B2 (en) 2011-01-07 2012-01-05 Charged particle beam drawing apparatus and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011001991A JP5709535B2 (ja) 2011-01-07 2011-01-07 電子ビーム描画装置、およびそれを用いた物品の製造方法

Publications (3)

Publication Number Publication Date
JP2012146731A JP2012146731A (ja) 2012-08-02
JP2012146731A5 JP2012146731A5 (enExample) 2014-02-20
JP5709535B2 true JP5709535B2 (ja) 2015-04-30

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011001991A Expired - Fee Related JP5709535B2 (ja) 2011-01-07 2011-01-07 電子ビーム描画装置、およびそれを用いた物品の製造方法

Country Status (2)

Country Link
US (1) US8698095B2 (enExample)
JP (1) JP5709535B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5683227B2 (ja) * 2010-11-19 2015-03-11 キヤノン株式会社 電子ビーム描画装置、およびそれを用いた物品の製造方法
JP5785436B2 (ja) * 2011-05-09 2015-09-30 キヤノン株式会社 荷電粒子線描画装置およびそのクリーニング方法ならびにデバイスの製造方法
CN104321701B (zh) * 2012-03-20 2017-04-12 迈普尔平版印刷Ip有限公司 用于运输自由基的装置和方法
US11348756B2 (en) 2012-05-14 2022-05-31 Asml Netherlands B.V. Aberration correction in charged particle system
US10586625B2 (en) 2012-05-14 2020-03-10 Asml Netherlands B.V. Vacuum chamber arrangement for charged particle beam generator
CN104428866A (zh) 2012-05-14 2015-03-18 迈普尔平版印刷Ip有限公司 带电粒子光刻系统和射束产生器
DE112016000265B4 (de) 2015-01-30 2022-05-19 Robert Bosch Gmbh Elektrostatische Linsenreinigung
JP6439620B2 (ja) * 2015-07-28 2018-12-19 株式会社ニューフレアテクノロジー 電子源のクリーニング方法及び電子ビーム描画装置
US9981293B2 (en) 2016-04-21 2018-05-29 Mapper Lithography Ip B.V. Method and system for the removal and/or avoidance of contamination in charged particle beam systems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3466744B2 (ja) 1993-12-29 2003-11-17 株式会社東芝 洗浄機能付き荷電ビーム装置および荷電ビーム装置の洗浄方法
JPH09245716A (ja) * 1996-03-04 1997-09-19 Hitachi Ltd 電子ビーム描画方法および描画装置およびこれを用いた半導体集積回路
JP2005208120A (ja) * 2004-01-20 2005-08-04 Ebara Corp 試料修正装置及び試料修正方法並びに該方法を用いたデバイス製造方法
JP2007088386A (ja) * 2005-09-26 2007-04-05 Advantest Corp 電子ビーム露光装置及び電子ビーム露光装置のクリーニング方法
US8349125B2 (en) * 2009-07-24 2013-01-08 Xei Scientific, Inc. Cleaning device for transmission electron microscopes
JP5785436B2 (ja) * 2011-05-09 2015-09-30 キヤノン株式会社 荷電粒子線描画装置およびそのクリーニング方法ならびにデバイスの製造方法

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Publication number Publication date
US8698095B2 (en) 2014-04-15
JP2012146731A (ja) 2012-08-02
US20120178025A1 (en) 2012-07-12

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