JP5700540B2 - Optical device and optical measuring device - Google Patents

Description

  The present invention relates to an optical device including an optical system adjustment mechanism, and an optical measurement device.

  2. Description of the Related Art Conventionally, a shape measuring apparatus that measures the surface shape of a workpiece by scanning the surface of a measurement object (hereinafter referred to as a workpiece) with a probe and taking in the position coordinates of each part of the workpiece is known. As a shape measuring apparatus, for example, a non-contact type optical measuring apparatus that performs measurement using means of an optical system without bringing a probe into contact with the surface of a workpiece is known.

  The optical system in the conventional optical measuring apparatus 100 will be described. As shown in FIG. 11, the laser light emitted from the laser light source 101 is converted into parallel light by the collimator lens 102, and the light converted into parallel light is converted into a rod lens. In 103, the light L is formed into a line shape and is irradiated onto the workpiece W. The line-shaped light L irradiated to the workpiece W is reflected by the surface of the workpiece W and is incident on an imaging element (not shown). Thereby, the conventional optical measuring apparatus 100 can measure the surface shape of the workpiece W.

Here, when parallel light is incident straight on the rod lens 103 (that is, aligned), the workpiece W is irradiated with linear laser light L1 as shown in FIG. The Rukoto.
On the other hand, when parallel light is incident on the rod lens 103 in a bent state (that is, the alignment is shifted), as shown in FIGS. The bent laser beams L2 and L3 are irradiated.

  Accordingly, as shown in FIGS. 12B and 12C, even when the workpiece W is irradiated with the laser beams L2 and L3 bent in an arc shape, even if the shape of the workpiece W is flat. Therefore, there is a problem that a measurement error occurs because the shape is recognized as an uneven shape.

Therefore, as a technique for reducing this measurement error, for example, a technique for adjusting an optical axis using a gimbal mechanism is disclosed (see Patent Document 1).
In addition, a technique for performing adjustment using a slide type bending adjustment mechanism is disclosed (see Non-Patent Document 1).

JP 2005-233676 A

"Precision adjustment mechanism and shock absorption mechanism for laser marking device" Matsushita Electric Works Technical Report Vol. 52 no. 4, p. 87-93

  However, the technique described in Patent Document 1 has a drawback that it is vulnerable to impact because it is a mechanism for holding a shaft by a bearing. Moreover, although the technique described in Patent Document 1 can be adjusted with a relatively high degree of freedom, there is a problem that it is difficult to manufacture because the structure is complicated.

  Moreover, although the technique of the said patent document 2 can perform adjustment with a very high degree of freedom, there existed a problem that the process of a curved surface was difficult. In addition, the technique described in Patent Literature 2 determines the accuracy of adjustment based on the surface accuracy of the curved surface. Therefore, in order to improve the adjustment accuracy, it is difficult to improve the accuracy of processing of the curved surface, which is difficult to achieve. It was essential and it was extremely difficult.

  It is an object of the present invention to provide an optical apparatus and an optical measurement apparatus that have a simple configuration and include a mechanism that can easily adjust an optical system.

Invention of Claim 1 was made | formed in order to achieve the said objective, The laser light source which radiate | emits a laser beam,
A collimator lens that collimates laser light emitted from the laser light source;
A light shape deforming means for transforming the laser light that has been converted into parallel light by the collimator lens into a line-shaped light;
In an optical device comprising:
While holding the light shape deformation means inside, a holder formed with a protrusion,
An optical system adjustment mechanism having a V-groove block fixed to the holder and having a V-shaped first V-groove formed at a position facing the protrusion.
When the V-groove block is fixed to the holder, the projecting portion provided on said holder, said first V-shaped groove provided in the V-groove block is engaged,
The protrusion is formed by a second V-groove engaged cylinder top portion of the V-shaped formed of said holder and said Rukoto.

According to a second aspect of the invention, the optical device according to claim 1, wherein the optical deformation means being a rod lens or a cylindrical lens.

The invention according to claim 3 is an optical measurement device, wherein the optical device according to claim 1 or 2 ,
Measuring means for measuring the shape of the measurement object based on the reflected light from the measurement object irradiated with the light of the line shape deformed by the light shape deformation means;
It is characterized by providing.

  According to the present invention, the protrusion provided on the holder engages with the first V-groove provided on the V-groove block, and the holder and V are freely adjusted with the protrusion and the first V-groove. Since the groove block can be fixed, the inclination of the optical shape deforming means with respect to the optical axis can be freely adjusted, and the alignment of the optical system can be easily adjusted.

1 is an overall view of a shape measuring system S including a three-dimensional measuring device to which an optical probe according to the present embodiment is attached. It is a schematic diagram which shows the structure of an optical probe. It is the external appearance perspective view which looked at the optical system adjustment mechanism from the side. It is the external appearance perspective view which looked at the optical system adjustment mechanism from the upper part. It is the external appearance perspective view which looked at the optical system adjustment mechanism from the downward direction. It is a figure explaining the effect | action which concerns on an optical system adjustment mechanism. It is the external appearance perspective view which looked at the optical system adjustment mechanism which concerns on a modification from upper direction. It is the figure which looked at the optical system adjustment mechanism which concerns on a modification from the side. It is the external appearance perspective view which looked at the optical system adjustment mechanism which concerns on a modification from upper direction. It is the figure which looked at the optical system adjustment mechanism which concerns on a modification from the side. It is a schematic diagram shown about the optical system in the conventional optical measuring device. It is the figure which looked at a mode that the light of line shape was irradiated to the surface of a work from the direction of a laser light source.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In this embodiment, an example in which the optical device according to the present invention is applied to the optical part of the optical probe and the optical measurement device according to the present invention is applied to the optical probe will be described. It is not limited.
In the following description, the X direction in FIG. 1 is the left-right direction, the Y direction is the front-rear direction, and the Z direction is the up-down direction. The XY plane is a horizontal plane.

  As shown in FIG. 1, the shape measurement system S according to the present embodiment scans the surface of the workpiece W, and measures the position coordinates of each part of the workpiece W. The three-dimensional measurement is equipped with the non-contact optical probe 1. While driving and controlling the apparatus 10 and the three-dimensional measuring apparatus 10, the driving control apparatus 20 for taking in necessary measurement coordinate values from the three-dimensional measuring apparatus 10, and the three-dimensional measuring apparatus 10 manually via the drive control apparatus 20 An operation panel 30 for operation and a part program for instructing a measurement procedure in the drive control device 20 are edited and executed, and a calculation for applying a geometric shape to the measurement coordinate values taken in via the drive control device 20 And a host system 40 having a function of recording and transmitting a part program so that the surface shape of the workpiece W can be measured. You have me.

  The three-dimensional measuring apparatus 10 includes a vibration isolation table 2, a surface plate 3 placed on the vibration isolation table 2 so as to coincide with a horizontal plane with the upper surface as a base surface, and both side edges of the surface plate 3. Arm support bodies 4a and 4b erected from above and an X-axis guide 5 supported at the upper ends of the arm support bodies 4a and 4b. The lower end of the arm support 4a is driven in the Y-axis direction by the Y-axis drive mechanism 6, and the lower end of the arm support 4b is supported on the surface plate 3 by the air bearing so as to be movable in the Y-axis direction. . A Z-axis guide 7 extending in the vertical direction is attached to the X-axis guide 5 so as to be movable along the X-axis guide 5 in the X-axis direction. A Z-axis arm 8 is provided at the lower end of the Z-axis guide 7, and the optical probe 1 is attached to the lower end of the Z-axis arm 8. The optical probe 1 may be rotatable in a horizontal plane, or may be rotatable in a vertical plane orthogonal to the horizontal plane.

As shown in FIG. 2, the optical probe 1 includes an optical unit 1A as an optical device according to the present invention and a measuring unit 1B as a measuring unit according to the present invention.
The optical unit 1A includes a laser light source 11, a collimator lens 12, and a rod lens 13.

  The laser light source 11 is composed of, for example, an LD (Laser Diode) or the like, and generates and emits laser light. The laser light emitted from the laser light source 11 is applied to the collimator lens 12 disposed below.

  The collimator lens 12 irradiates the rod lens 13 disposed below as parallel light with light incident from the laser light source 11.

The rod lens 13 deforms the parallel light from the collimator lens 12 into a line shape as light shape deforming means. When parallel light is irradiated onto the rod lens 13 from above, the parallel light is transformed into a line-shaped beam and is irradiated onto the workpiece W placed below. The rod lens 13 is held by an optical system adjusting mechanism 18 having a lens holder 16 and a V-groove block 17 as will be described in detail later.
The laser light source 11, the collimator lens 12, and the rod lens 13 are arranged so that their optical axes are the same.

  The measuring unit 1 </ b> B includes a light receiving lens 14 and a CMOS image sensor 15.

  The light receiving lens 14 transmits the laser light reflected on the surface of the workpiece W. The laser light transmitted through the light receiving lens 14 is incident on a CMOS image sensor 15 disposed on the same optical axis as the light receiving lens 14.

  The CMOS image sensor 15 is an imaging device that captures an image of the workpiece W based on the laser light reflected on the surface of the workpiece W and measures the coordinate values of each part of the workpiece W. It outputs to the drive control apparatus 20 via the control part etc. which are not shown in figure.

Next, the optical system adjustment mechanism 18 will be described in detail.
As shown in FIGS. 3 to 5, the optical system adjustment mechanism 18 includes a lens holder 16 that holds the rod lens 13 therein, and a V-groove block 17 that is placed on the upper surface portion 161 of the lens holder 16. It is configured.

The lens holder 16 is formed from, for example, a circular hole 164 that is formed in a substantially rectangular parallelepiped shape and penetrates between the first side surface portion 162a and the second side surface portion 162c facing each other among the four side surface portions 162a to 162d. By inserting and inserting the cylindrical rod lens 13, the rod lens 13 can be held inside.
Further, the lens holder 16 is formed with a circular hole 165 that penetrates through substantially the center portion of the upper surface portion 161 and the bottom surface portion 163, and the parallel light C incident from the collimator lens 12 passes through the circular hole 165. Can be done. Since the rod lens 13 is held inside the lens holder 16 so as to cover the circular hole 165, the parallel light C incident from the collimator lens 12 is line-shaped by the rod lens 13 when passing through the circular hole 165. It is designed to be transformed into a beam.

  The upper surface portion 161 of the lens holder 16 includes two projecting portions 166a and 166b that project in a rectangular parallelepiped shape. For example, the protrusions 166a and 166b are provided at both ends in the width direction at the center in the longitudinal direction of the upper surface portion 161 so as to face each other with a circular hole 165 therebetween.

  Further, substantially U-shaped U grooves 167a and 167b are formed from the upper surface portion 161 to the bottom surface portion 163 in the first side surface portion 162a and the second side surface portion 162c of the lens holder 16, and the U groove 167a, Adjustment screws 19 and 20 can be inserted into 167b. The U grooves 167a and 167b are exemplified as the configuration (first screw hole) through which the adjustment screws 19 and 20 are inserted. However, the present invention is not limited to this, and the adjustment screws 19 and 20 are connected to the upper surface portion from the bottom surface portion 163. It suffices if it can be inserted up to 161. For example, instead of the U grooves 167a and 167b, circular screw holes penetrating both longitudinal ends of the top surface portion 161 and the bottom surface portion 163 may be formed.

The outer shape of the V-groove block 17 is formed in a substantially cylindrical shape. For example, the V-groove block 17 is configured such that the upper surface portion 171 can be attached to the lower surface of a holding mechanism (not shown) of the collimator lens 12.
The V-groove block 17 is formed with a circular hole 174 penetrating from the upper surface portion 171 to the bottom surface portion 173 at a substantially central portion, and the parallel light C incident from the collimator lens 12 passes through the circular hole 174. Be able to. Then, the parallel light C that has passed through the circular hole 174 passes through the circular hole 165 formed in the lens holder 16.

  The bottom surface portion 173 of the V-groove block 17 includes two projecting portions 175a and 175b so as to face each other with a circular hole 174 therebetween. The protrusions 175a and 175b are formed with V-shaped V grooves 176a and 176b, which are first V grooves, from the circular hole 174 to the peripheral surface portion 172, respectively, at substantially central portions. The V grooves 176 a and 176 b are formed at positions facing the protrusions 166 a and 166 b of the lens holder 16. When the V groove block 17 is fixed to the upper surface portion 161 of the lens holder 16, the upper surface portion of the lens holder 16. The V grooves 176 a and 176 b provided on the bottom surface portion 173 of the V groove block 17 are engaged with the protrusions 166 a and 166 b provided on the 161.

  The bottom surface portion 173 of the V-groove block 17 is opposed to each other with a circular hole 174 at both ends of the V-groove block 17 on an axis perpendicular to the axis connecting the V-grooves 176a and 176b. In addition, circular screw holes 177a and 177b, which are second screw holes penetrating to the upper surface portion 171, are formed. The screw holes 177a and 177b of the V groove block 17 are formed at positions facing the U grooves 167a and 167b which are screw holes of the lens holder 16, and the adjustment screws 19 protruding from the upper surface portion 161 of the lens holder 16, The distal end portion of 20 is screwed through the screw holes 177a and 177b. The adjustment screws 19 and 20 are configured to be able to be screwed into the screw holes 177a and 177b at desired positions (depths), respectively.

Next, the effect | action which concerns on the optical system adjustment mechanism 18 of this embodiment is demonstrated using FIG.
When the operator adjusts the optical system, for example, the protrusions 166 a and 166 b provided on the upper surface portion 161 of the lens holder 16 are engaged with the V grooves 176 a and 176 b provided on the bottom surface portion 173 of the V groove block 17. In the state where the V groove block 17 is placed, the adjustment screws 19 and 20 are inserted into the U grooves 167a and 167b which are screw holes from the bottom surface portion 163 side of the lens holder 16, and the upper surface portion 161 side of the lens holder 16 is placed. The lens holder 16 and the V-groove block 17 are fixed by projecting the tip portions of the adjusting screws 19 and 20.
Here, since the screw holes 177a and 177b of the V-groove block 17 are formed at positions facing the U-grooves 167a and 167b of the lens holder 16, the adjustment screw 19 protruding from the upper surface portion 161 side of the lens holder 16; For example, as shown in FIG. 6A, 20 is inserted into the screw holes 177a and 177b from the bottom surface portion 173 side of the V-groove block 17.
The adjustment screws 19 and 20 are configured to be able to be screwed into the screw holes 177a and 177b at desired positions, respectively. For example, as shown in FIG. If the right adjustment screw 20 is tightened at a shallow position, the lens holder 16 is fixed to the V-groove block 17 with the left side of the lens holder 16 raised. As a result, the rod lens 13 is fixed with the left side raised relative to the optical axis.
On the other hand, for example, as shown in FIG. 6C, when the right adjustment screw 20 is tightened at a deep position and the left adjustment screw 19 is tightened at a shallow position, the right side of the lens holder 16 is raised with V The groove block 17 is fixed. Thereby, the rod lens 13 is fixed in a state where the right side is raised with respect to the optical axis.
In this way, by adjusting the screwing positions of the adjustment screws 19 and 20 on both the left and right sides, the inclination of the rod lens 13 with respect to the optical axis can be freely adjusted, so that the alignment of the optical system can be easily adjusted. Is possible.

As described above, according to the optical unit 1A of the optical probe 1 according to the present embodiment, the rod lens 13 is held inside, the lens holder 16 formed with the protrusions 166a and 166b, and the lens holder 16 An optical system adjustment mechanism 18 having a V-groove block 176a and 176b formed in a V-shaped V-groove 176a and 176b at a position facing the protrusions 166a and 166b is provided. Are fixed, the V grooves 176a and 176b provided in the V groove block 17 are engaged with the protrusions 166a and 166b provided in the lens holder 16.
Therefore, the protrusions 166a and 166b provided on the lens holder 16 engage with the V grooves 176a and 176b provided on the V groove block 17, and the protrusions 166a and 166b and the V grooves 176a and 176b can freely be engaged. Since the V-grooves 176a and 176b and the V-groove block 17 can be fixed while adjusting, the inclination of the rod lens 13 with respect to the optical axis can be freely adjusted, and the alignment of the optical system can be easily adjusted. It becomes possible.

Further, according to the optical portion 1A of the optical probe 1 according to the present embodiment, U grooves 167a and 167b penetrating from the upper surface portion 161 to the bottom surface portion 163 are formed at both longitudinal ends of the lens holder 16, and V grooves Screw holes 177a and 177b are formed in the block 17 at positions facing the U grooves 167a and 167b, and adjustment screws 19 and 20 are inserted into the U grooves 167a and 167b from the bottom surface portion 163 side of the lens holder 16, and the top surface The adjusting screws 19 and 20 protruding from the portion 161 side are inserted into the screw holes 177a and 177b and screwed together.
For this reason, by adjusting the screwing positions of the adjusting screws 19 and 20, the degree of inclination of the rod lens 13 with respect to the optical axis can be freely adjusted, so that the alignment of the optical system can be easily adjusted. .

<Modification>
In the embodiment, the rectangular parallelepiped protrusions 166 a and 166 b provided on the upper surface portion 161 of the lens holder 16 are engaged with the V grooves 176 a and 176 b provided on the bottom surface portion 173 of the V groove block 17, whereby the optical axis. However, for example, as shown in FIGS. 7 to 10, a protruding portion that protrudes in a spherical shape instead of a rectangular parallelepiped shape may be provided.
For simplification of description, the same reference numerals are given to the same configurations as those in the embodiment, and detailed description thereof is omitted.

That is, in the example shown in FIG. 7, spherical grooves 168a and 168b into which the spherical bodies 21a and 21b can be fitted are formed at both ends in the width direction of the upper surface portion 161 of the lens holder 16, and the spherical body 21a is formed in the grooves 168a and 168b. , 21b is fitted to form a protruding portion that protrudes into a spherical shape. That is, the spheres 21a and 21b function as protrusions.
Thus, for example, as shown in FIG. 8, the protrusions (spheres 21 a and 21 b) provided on the upper surface portion 161 of the lens holder 16 are changed to V grooves 176 a and 176 b provided on the bottom surface portion 173 of the V groove block 17. Since the projections 21a and 21b are spherical when engaged with the lens, the lens holder 16 can be moved more smoothly than the projections 166a and 166b having a rectangular parallelepiped shape. It becomes possible to adjust the inclination of the rod lens 13 with respect to the shaft more precisely.
In this example, the spherical grooves 168a and 168b are fitted with the spheres 21a and 21b so as to form the projections that are projected in a spherical shape. However, the present invention is not limited to this. Further, at both ends in the width direction of the upper surface portion 161 of the lens holder 16, at least a tip portion having a spherical shape (not shown) may be provided.

  As described above, according to the optical portion 1A of the optical probe 1 according to the modification shown in FIG. 7, since at least the tip portions of the protrusions 21a and 21b are spherical, the protrusions 166a and 166b have a rectangular parallelepiped shape. Compared to the above, the lens holder 16 can be moved more smoothly, and the inclination of the rod lens 13 with respect to the optical axis can be adjusted more precisely.

In the example shown in FIG. 9, V-shaped V grooves 169 a and 169 b as second V grooves that can engage the cylindrical bodies 22 a and 22 b are provided at both ends in the width direction of the upper surface portion 161 of the lens holder 16. By forming and engaging the cylindrical bodies 22a and 22b with the V-grooves 169a and 169b, a projecting portion that is projected in a cylindrical shape is formed. That is, the cylindrical bodies 22a and 22b function as protrusions.
Accordingly, for example, as shown in FIGS. 10A and 10B, the protrusions (cylindrical bodies 22 a and 22 b) provided on the upper surface portion 161 of the lens holder 16 are formed on the bottom surface portion 173 of the V groove block 17. When engaging with the provided V grooves 176a and 176b, the shape of the protrusions 22a and 22b is cylindrical, so that the lens holder 16 is moved more smoothly than the protrusions 166a and 166b having a rectangular parallelepiped shape. As a result, the tilt of the rod lens 13 with respect to the optical axis can be adjusted more precisely. Further, since the V grooves 169a and 169b are formed in the upper surface portion 161 of the lens holder 16 and the cylindrical bodies 22a and 22b are engaged with the V grooves 169a and 169b, when the lens holder 16 is moved, for example, The adjustment mechanism using the adjustment screws 19 and 20 as shown in FIG. 6 is not required, and the alignment of the optical system can be adjusted with a simpler configuration.
In this example, the cylindrical portions 22a and 22b are engaged with the V-shaped V grooves 169a and 169b so as to form a protruding portion that is cylindrically formed. However, the present invention is not limited to this. For example, the spheres 21a and 21b may be used instead of the cylindrical bodies 22a and 22b. In this case, although not particularly illustrated, a mechanism for preventing the spheres 21a and 21b from falling along the V grooves 169a and 169b and falling into the outer peripheral surface or the circular hole 165 is provided. preferable.

As described above, according to the optical portion 1A of the optical probe 1 according to the modification shown in FIG. 9, the protrusions 22a and 22b are V-shaped V-grooves 169a formed on the upper surface portion 161 of the lens holder 16. , 169b and cylindrical bodies 22a and 22b are engaged.
Therefore, the lens holder 16 can be moved more smoothly than the rectangular parallelepiped protrusions 166a and 166b, and the inclination of the rod lens 13 with respect to the optical axis can be adjusted more precisely. Become. Further, when the lens holder 16 is moved, an adjustment mechanism using the adjustment screws 19 and 20 is not required, and the alignment of the optical system can be adjusted with a simpler configuration.

  As mentioned above, although concretely demonstrated based on embodiment which concerns on this invention, this invention is not limited to the said embodiment, It can change in the range which does not deviate from the summary.

  For example, in the above embodiment, the rod lens 13 has been described as an example of the light shape deforming means. However, the present invention is not limited to this, and for example, a cylindrical lens may be used instead of the rod lens 13. .

10 Three-dimensional measuring device 1 Optical probe (optical measuring device)
1A Optical part (optical device)
1B Measuring unit (measuring means)
11 Laser light source 12 Collimator lens 13 Rod lens (light shape deformation means)
14 Photosensitive lens 15 CMOS image sensor 16 Lens holder (holder)
161 Upper surface portion 162a-d Side surface portion 163 Bottom surface portion 166a, 166b Projection portion 167a, 167b U groove (first screw hole)
168a, 168b Groove 169a, 169b V groove (second V groove)
17 V groove block 171 Upper surface portion 172 Peripheral surface portion 173 Bottom surface portion 176a, 176b V groove (first V groove)
177a, 177b Screw hole (second screw hole)
18 Optical system adjustment mechanism 19, 20 Adjustment screw 21a, 21b Sphere (protrusion)
22a, 22b Cylindrical body (projection)

Claims (3)

A laser light source for emitting laser light;
A collimator lens that collimates laser light emitted from the laser light source;
A light shape deforming means for transforming the laser light that has been converted into parallel light by the collimator lens into a line-shaped light;
In an optical device comprising:
While holding the light shape deformation means inside, a holder formed with a protrusion,
An optical system adjustment mechanism having a V-groove block fixed to the holder and having a V-shaped first V-groove formed at a position facing the protrusion.
When the V-groove block is fixed to the holder, the projecting portion provided on said holder, said first V-shaped groove provided in the V-groove block is engaged,
The protrusions optical device according to claim Rukoto constituted by engaged cylinder to the second V grooves of the formed V-shaped on the upper surface of the holder. The optical apparatus according to claim 1, wherein the light shape deforming unit is a rod lens or a cylindrical lens. The optical device according to claim 1 or 2 ,
Measuring means for measuring the shape of the measurement object based on the reflected light from the measurement object irradiated with the light of the line shape deformed by the light shape deformation means;
An optical measurement device comprising:

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